CN115452206B - Ultralow-temperature capacitive pressure sensor and preparation method thereof - Google Patents

Ultralow-temperature capacitive pressure sensor and preparation method thereof Download PDF

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Publication number
CN115452206B
CN115452206B CN202211001778.5A CN202211001778A CN115452206B CN 115452206 B CN115452206 B CN 115452206B CN 202211001778 A CN202211001778 A CN 202211001778A CN 115452206 B CN115452206 B CN 115452206B
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layer
elastomer
pressure sensor
electrode layer
capacitive pressure
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CN115452206A (en
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杨静
张雷
杨凯
田澍
卢文义
钟成
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Binzhou Weiqiao National Institute Of Advanced Technology
Tianjin University
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Binzhou Weiqiao National Institute Of Advanced Technology
Tianjin University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/14Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/283Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polysiloxanes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B33/00Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00Coating on the layer surface
    • B32B2255/10Coating on the layer surface on synthetic resin layer or on natural or synthetic rubber layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00Coating on the layer surface
    • B32B2255/20Inorganic coating
    • B32B2255/205Metallic coating

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention belongs to the field of electronic skin at ultralow temperature, and particularly relates to an ultralow temperature capacitive pressure sensor and a preparation method thereof, wherein the pressure sensor consists of a basal layer, an electrode layer, a pressure sensitive layer, an electrode layer and a packaging layer from bottom to top; wherein, the basal layer, the pressure sensitive layer and the packaging layer are all elastic bodies with high ductility at ultralow temperature; the dynamic supermolecular network constructed in the elastomer skeleton consists of one or more of four-fold hydrogen bond, strong hydrogen bond, weak hydrogen bond, disulfide bond, metal coordination bond, ionic bond and main guest interaction; the electrode layer comprises an elastomer, liquid metal and silver flake powder. The capacitive pressure sensor can accurately respond to different weights and actions (finger bending and the like) at ultralow temperature (-80 ℃).

Description

Ultralow-temperature capacitive pressure sensor and preparation method thereof
Technical Field
The invention belongs to the field of electronic skin at ultralow temperature, and particularly relates to an ultralow temperature capacitive pressure sensor and a preparation method thereof.
Background
The electronic skin is a novel electronic device which simulates the human skin to feel external stimulus (pressure, temperature and humidity) through the integration and feedback of electrical signals. Electronic skin as a flexible touch bionic sensor has been widely used in the fields of human physiological parameter detection, robot touch perception and the like. The most fundamental element of tactile sensing is pressure sensing, and pressure sensing is therefore the fundamental property of electronic skin. According to the different working principles, the pressure sensor can be mainly divided into a resistance type pressure sensor, a capacitance type pressure sensor and a piezoelectric type pressure sensor. Among them, capacitive pressure sensors can provide higher accuracy, lower power consumption, better stability and consistency, and have recently become a hotspot of widespread attention for researchers around the world.
However, the conventional capacitive pressure sensor can only meet the requirement of accurate response at room temperature, and the capacitive pressure sensor with response at ultralow temperature has not been reported, so that exploration of ultralow temperature (polar region, high altitude and the like) is seriously hindered, and therefore, development and application of electronic skin of the ultralow temperature capacitive pressure sensor are very important.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides an ultralow-temperature capacitive pressure sensor and a preparation method thereof.
In order to achieve the above purpose, the invention adopts the following technical scheme:
An ultralow-temperature capacitive pressure sensor consists of a basal layer, an electrode layer, a pressure-sensitive layer, an electrode layer and a packaging layer from bottom to top; wherein, the basal layer, the pressure sensitive layer and the packaging layer are all elastic bodies with high ductility at ultralow temperature; the dynamic supermolecular network constructed in the elastomer skeleton consists of one or more of four-fold hydrogen bond, strong hydrogen bond, weak hydrogen bond, disulfide bond, metal coordination bond, ionic bond and main guest interaction; the electrode layer comprises an elastomer, liquid metal and silver flake powder.
The elastomer is a quadruple hydrogen bond group polydimethylsiloxane elastomer.
The quadruple hydrogen bond-based polydimethylsiloxane elastomer is prepared by the following steps: heating the polydimethylsiloxane oil bath, and vacuumizing and stirring; adding isophorone diisocyanate, tetrahydrofuran and a catalytic amount of butyl tin dilaurate after stirring;
Continuously stirring, then adding 2-ureido-4-pyrimidinone, 4' -dihydroxybiphenyl, dimethyl sulfoxide and catalyst amount of butyl tin dilaurate, and continuously polymerizing to obtain a product;
wherein the polydimethylsiloxane: the molar ratio of isophorone diisocyanate is: 4:6, preparing a base material; 4' -dihydroxybiphenyl: the molar ratio of the 2-ureido-4-pyrimidinone is 0.6 to 1.2:0.8-1.4.
The mass ratio of the elastomer to the liquid metal to the silver flake powder in the electrode layer is 1:1-10:1-10.
The invention also comprises a preparation method of the ultralow temperature capacitive pressure sensor, which comprises the following steps:
(1) Carrying out hot pressing on the elastomer to prepare a sensor substrate layer with the thickness of about 1 mm;
(2) The elastomer, the liquid metal and the silver flake powder are dissolved in a solvent according to a proportion, and are printed on the basal layer in the step (1), and the basal layer is dried at room temperature;
(3) Pressing the high-ductility elastomer into a sensor pressure-sensitive layer with the thickness of about 0.5mm by hot pressing, and flatly paving the sensor pressure-sensitive layer on the electrode layer in the step (2);
(4) Printing the mixed solution of the elastomer, the liquid metal and the silver flake powder prepared in the step (2) onto the pressure-sensitive layer in the step (3) again;
(5) And (3) hot pressing the high-ductility elastomer into a sensor packaging layer with the thickness of about 0.5mm, and flatly paving the sensor packaging layer on the electrode layer in the step (2).
The liquid metal in the step (2) is gallium.
The solvent in the step (2) is one or more than two of ethanol, dichloromethane, ethyl acetate, tetrahydrofuran, N-dimethylformamide and N, N-dimethylacetamide.
The invention also comprises application of the ultralow temperature capacitive pressure sensor to preparation of ultralow temperature electronic skin.
Compared with the prior art, the invention has the beneficial effects that:
(1) The accurate response at room temperature is only satisfied compared to the conventional capacitive pressure sensor. The capacitive pressure sensor can accurately respond to different weights and actions (finger bending and the like) at ultralow temperature (-80 ℃).
(2) The stretchability is poor compared to the conventional capacitive pressure sensor. The capacitive pressure sensor can exhibit high ductility at ultra-low temperatures (-80 ℃).
(3) Compared with the traditional capacitive pressure sensor, the capacitive pressure sensor has no response after stretching, and can still show accurate response to different weights after stretching for 100 percent at ultralow temperature (-80 ℃). This will greatly facilitate exploration of ultra-low temperature areas (polar, high altitude, etc.).
(4) An elastomer with high ductility at ultralow temperature is used as a basal layer, a pressure-sensitive layer and a packaging layer of the capacitive pressure sensor; the design gives the capacitive pressure sensor beneficial ductility at low temperature and accurate response to motion and weight by using a mixed solution of an elastomer, a liquid metal and silver flake powder having high ductility at ultra-low temperature as an electrode layer.
Drawings
FIG. 1 is a structural design diagram of an ultra-low temperature capacitive pressure sensor.
Fig. 2 is a real-life representation of an ultra-low temperature capacitive pressure sensor.
Fig. 3 is a graph showing the continuous response results of the capacitive pressure sensor of example 1 at ultra-low temperatures.
Fig. 4 is a graph showing the same weight continuous response result at ultra-low temperature of the capacitive pressure sensor of example 1.
Fig. 5 is a graph showing the finger bending response at ultralow temperature of the capacitive pressure sensor in example 1.
FIG. 6 is a graph showing the continuous response of 100% tensile weight at ultra-low temperature for the capacitive pressure sensor of example 1.
Detailed Description
The present invention will be described in further detail below with reference to the drawings and preferred embodiments, so that those skilled in the art can better understand the technical solutions of the present invention.
Example 1: preparation of elastomer P1: the method specifically comprises the following steps: (1) Polydimethylsiloxane (5.6 g) was stirred for 1 hour at 100℃under vacuum. After stirring, the system was cooled to 70℃and isophorone diisocyanate (0.3891 g), tetrahydrofuran (10 mL) and butyl tin dilaurate (about 4 drops) were added as catalyst. After 3 hours, 2-ureido-4-pyrimidinone (0.0338 g), 4' -dihydroxybiphenyl (0.0558 g) dimethyl sulfoxide (2 mL) and the catalyst butyl tin dilaurate (about 1 drop) were added, discharged into water after 3 hours, dried and collected for later use.
The setting parameters of the temperature-controllable stretcher are as follows: the stretching rate was 20mm/min and the ambient temperature was-80 ℃. The test specimens were previously made into dumbbell shapes with a middle portion of about 5mm wide, a length of about 4mm and a thickness of about 1mm. The test results show that the P1 has the stress intensity of 9.31Mpa and the elongation of 1437 percent at the temperature of-80 ℃ and the healing efficiency is about 42 percent after healing for 48 hours.
Preparation of elastomer P2: (1) Polydimethylsiloxane (5.6 g) was stirred for 1 hour at 100℃under vacuum. After stirring, the system was cooled to 70℃and isophorone diisocyanate (0.3891 g), tetrahydrofuran (10 mL) and butyl tin dilaurate (about 4 drops) were added as catalyst. After 3 hours, 2-ureido-4-pyrimidinone (0.0507 g), 4' -dihydroxybiphenyl (0.0372 g) dimethyl sulfoxide (2 mL) and the catalyst butyl tin dilaurate (about 1 drop) were added, discharged into water after 3 hours, dried and collected for later use.
The setting parameters of the temperature-controllable stretcher are as follows: the stretching rate was 20mm/min and the ambient temperature was-80 ℃. The test specimens were previously made into dumbbell shapes with a middle portion of about 5mm wide, a length of about 4mm and a thickness of about 1mm. The test result shows that the P2 has the stress intensity of 12.56Mpa and the elongation of 2472 percent at the temperature of-80 ℃ and the healing efficiency is about 65 percent after healing for 48 hours.
Preparation of elastomer P3: (1) Polydimethylsiloxane (5.6 g) was stirred for 1 hour at 100℃under vacuum. After stirring, the system was cooled to 70℃and isophorone diisocyanate (0.3891 g), tetrahydrofuran (10 mL) and butyl tin dilaurate (about 4 drops) were added as catalyst. After stirring for 3 hours, 2-ureido-4-pyrimidinone (0.0592 g), 4' -dihydroxybiphenyl (0.0279 g) dimethyl sulfoxide (2 mL) and the catalyst butyl tin dilaurate (about 1 drop) were added, discharged into water after 3 hours, dried and collected for later use.
The setting parameters of the temperature-controllable stretcher are as follows: the stretching rate was 20mm/min and the ambient temperature was-80 ℃. The test specimens were previously made into dumbbell shapes with a middle portion of about 5mm wide, a length of about 4mm and a thickness of about 1mm. The test result shows that the P3 has the stress intensity of 13.01Mpa and the elongation of 2042 percent at the temperature of-80 ℃ and the healing efficiency is about 51 percent after 48 hours of healing.
The test, P2, is the best embodiment, and the elastomer is used to prepare the ultra-low temperature capacitive pressure sensor, which comprises the following steps:
example 1:
(1) Performing hot pressing on 2g of the elastomer P2 to prepare a sensor substrate layer with the thickness of about 1mm;
(2) Dissolving an elastomer P2, liquid gallium and silver flake powder in a solvent ethyl acetate according to a ratio of (1:5:5) to form a mixed solution, printing the mixed solution onto a substrate layer in the step (1), and airing at room temperature;
(3) Preparing a sensor pressure-sensitive layer with the thickness of about 0.5mm by hot-pressing the high-ductility elastomer P2, and flatly paving the sensor pressure-sensitive layer on the electrode layer in the step (2);
(4) Printing the mixed solution prepared in the step (2) onto the pressure-sensitive layer in the step (3) again;
(5) Hot pressing the high-ductility elastomer into a sensor pressure-sensitive layer with the thickness of 0.5mm, and flatly paving the sensor pressure-sensitive layer on the electrode layer in the step (4);
FIG. 1 is a structural design diagram of an ultra-low temperature capacitive pressure sensor. Fig. 2 is a real-life representation of an ultra-low temperature capacitive pressure sensor. Fig. 3 is a graph showing the continuous response results of the capacitive pressure sensor of example 1 at ultra-low temperatures. Fig. 4 is a graph showing the same weight continuous response result at ultra-low temperature of the capacitive pressure sensor of example 1. Fig. 5 is a graph showing the finger bending response at ultralow temperature of the capacitive pressure sensor in example 1. FIG. 6 is a graph showing the continuous response of 100% tensile weight at ultra-low temperature for the capacitive pressure sensor of example 1.
As can be seen from fig. 1-2, the present invention uses an elastomer having high ductility at ultra-low temperature as a base layer, a pressure sensitive layer and an encapsulation layer of a capacitive pressure sensor; and the mixed solution of the elastomer, the liquid gallium and the silver flake powder is used as an electrode layer of the capacitive pressure sensor. As can be seen from FIG. 3, the prepared capacitor can respond accurately to different weights at ultra-low temperatures (-80 ℃). As can be seen from fig. 4, the prepared capacitor can have excellent stability at ultra-low temperature (-80 ℃). As can be seen from FIG. 5, the prepared capacitor can accurately respond to human body movements (finger bending, etc.) at ultra-low temperatures (-80 ℃). As can be seen from fig. 5, the prepared capacitor can exhibit high ductility at ultra-low temperatures (-80 ℃) and accurate response to various weights after stretching by 100%. This will greatly facilitate exploration of ultra-low temperature areas (polar, high altitude, etc.).
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.

Claims (5)

1. An ultralow-temperature capacitive pressure sensor is characterized by comprising a basal layer, an electrode layer, a pressure-sensitive layer, an electrode layer and a packaging layer from bottom to top;
Wherein, the basal layer, the pressure sensitive layer and the packaging layer are all elastic bodies with high ductility at ultralow temperature; the dynamic supermolecular network constructed in the elastomer skeleton consists of one or more of four-fold hydrogen bond, strong hydrogen bond, weak hydrogen bond, disulfide bond, metal coordination bond, ionic bond and main guest interaction;
the electrode layer comprises an elastomer, liquid metal and silver flake powder;
the elastomer is a quadruple hydrogen bond group polydimethylsiloxane elastomer;
The quadruple hydrogen bond-based polydimethylsiloxane elastomer is prepared by the following steps: heating the polydimethylsiloxane oil bath, and vacuumizing and stirring; adding isophorone diisocyanate, tetrahydrofuran and a catalytic amount of butyl tin dilaurate after stirring; continuously stirring, then adding 2-ureido-4-pyrimidinone, 4' -dihydroxybiphenyl, dimethyl sulfoxide and catalytic amount of butyl tin dilaurate, and continuously polymerizing to obtain a product;
Wherein the polydimethylsiloxane: the molar ratio of isophorone diisocyanate is: 4:6, preparing a base material; 4,4' -dihydroxybiphenyl: the molar ratio of the 2-ureido-4-pyrimidinone is 0.6 to 1.2:0.8-1.4;
The mass ratio of the elastomer to the liquid metal to the silver flake powder in the electrode layer is 1:1-10:1-10.
2. A method of manufacturing the ultra-low temperature capacitive pressure sensor of claim 1, comprising the steps of:
(1) Performing hot pressing on the elastomer to prepare a sensor substrate layer with the thickness of 1 mm;
(2) The elastomer, the liquid metal and the silver flake powder are dissolved in a solvent according to a proportion, and are printed on the basal layer in the step (1) to obtain an electrode layer, and the electrode layer is dried at room temperature;
(3) Hot pressing the high-ductility elastomer into a sensor pressure-sensitive layer with the thickness of 0.5 mm, and flatly paving the sensor pressure-sensitive layer on the electrode layer in the step (2) to obtain the pressure-sensitive layer;
(4) Printing the mixed solution of the elastomer, the liquid metal and the silver flake powder prepared in the step (2) onto the pressure-sensitive layer in the step (3) again to obtain an electrode layer;
(5) And (3) hot pressing the high-ductility elastomer into a sensor packaging layer with the thickness of 0.5mm, and flatly paving the sensor packaging layer on the electrode layer in the step (4).
3. The method for manufacturing an ultralow temperature capacitive pressure sensor according to claim 2, wherein the liquid metal in step (2) is gallium.
4. The method for manufacturing an ultralow temperature capacitive pressure sensor according to claim 2, wherein the solvent in the step (2) is one or a combination of more than two of ethanol, dichloromethane, ethyl acetate, tetrahydrofuran, N-dimethylformamide and N, N-dimethylacetamide.
5. The use of the ultra-low temperature capacitive pressure sensor of claim 1 for the preparation of ultra-low temperature electronic skin.
CN202211001778.5A 2022-08-20 2022-08-20 Ultralow-temperature capacitive pressure sensor and preparation method thereof Active CN115452206B (en)

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KR102012761B1 (en) * 2018-01-04 2019-10-21 한국과학기술연구원 Self healing elastomer, self healing complex and self healing film
US11532789B2 (en) * 2018-05-29 2022-12-20 Samsung Electronics Co., Ltd. Organic thin film including semiconducting polymer and elastomer configured to be dynamic intermolecular bonded with a metal-coordination bond and organic sensor and electronic device including the same
KR102476615B1 (en) * 2018-10-22 2022-12-09 한양대학교 산학협력단 Capacitor-type pressure sensor and method for fabricating the same
CN109764980B (en) * 2019-01-30 2020-06-30 常州大学 Preparation method of double reversible bond room temperature self-healing silicon rubber pressure sensor
CN111875821B (en) * 2020-07-31 2021-08-17 盐城工学院 Preparation method of tri-dynamic cross-linked self-repairing polyurethane and product thereof

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