CN115449746A - Coating device with fixture tool for realizing batch coating - Google Patents
Coating device with fixture tool for realizing batch coating Download PDFInfo
- Publication number
- CN115449746A CN115449746A CN202211122368.6A CN202211122368A CN115449746A CN 115449746 A CN115449746 A CN 115449746A CN 202211122368 A CN202211122368 A CN 202211122368A CN 115449746 A CN115449746 A CN 115449746A
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- China
- Prior art keywords
- positioning
- base
- connecting plate
- sliding
- movable connecting
- Prior art date
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- 239000011248 coating agent Substances 0.000 title claims description 34
- 238000000576 coating method Methods 0.000 title claims description 34
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 98
- 239000000758 substrate Substances 0.000 claims abstract description 64
- 239000007888 film coating Substances 0.000 claims abstract description 24
- 238000009501 film coating Methods 0.000 claims abstract description 24
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 24
- 239000011733 molybdenum Substances 0.000 claims abstract description 24
- 230000000712 assembly Effects 0.000 claims description 10
- 238000000429 assembly Methods 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 6
- 238000003825 pressing Methods 0.000 abstract description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 14
- 229910052697 platinum Inorganic materials 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Abstract
The invention discloses a film coating device with a fixture tool for realizing batch film coating, which comprises a base, a molybdenum sheet, a cover plate, a horizontal adjusting component and a plurality of positioning components, wherein the upper surface of the base is used for placing a sensor substrate; the molybdenum sheet is arranged on the base and is used for being attached to the top end of the sensor substrate on the base, and a gap is formed in the area, covered with the sensor substrate, of the molybdenum sheet; the cover plate is attached to the upper surface of the molybdenum sheet, and a through groove is formed in the area right above the sensor substrate; the horizontal adjusting component can adjust the position of the molybdenum sheet at the top end of the base through a plurality of positioning components; the molybdenum sheets are connected in a mode of positioning first and then pressing, the positions of the molybdenum sheets can be adjusted by controlling the positioning pieces to move synchronously, and the molybdenum sheets are not contacted with the sensor substrate when not pressed, so that the positions of the molybdenum sheets are convenient to finely adjust.
Description
Technical Field
The invention relates to the technical field of film coating, in particular to a film coating device with a fixture tool for realizing batch film coating.
Background
The masking method is developed from electrolytic machining technology in macroscopic machining, and has a long history, and the key point of the masking method is to shield the part of the processed material which does not need to be etched by an insulating mask and then carry out anodic dissolution, so that the metal film is only plated in the place which is not shielded.
The mask sheet is usually a molybdenum sheet, and can be processed in a wire cutting mode to obtain molybdenum sheets with different shapes, lengths and widths, and slits with any shapes are cut on the processed molybdenum sheet, so that the subsequent metal film can only pass through the slits, and the metal film with the corresponding shapes of the slits is plated below the molybdenum sheet.
In the prior art, different gaps are generally cut on different molybdenum sheets, when coating is carried out, a substrate to be coated is firstly placed on a coating machine, and the corresponding molybdenum sheet is taken out and manually placed above the substrate for fixing, so that the coating machine coats a metal film with a required shape on the substrate.
In addition, when the molybdenum sheet is placed on the substrate, the position covered by the molybdenum sheet generally needs to be adjusted to ensure that the gap on the molybdenum sheet is located in the corresponding area on the substrate, but adjusting the position of the molybdenum sheet when the molybdenum sheet is attached to the substrate may cause the substrate to be scratched by the molybdenum sheet, thereby reducing the yield of the processed finished product.
Disclosure of Invention
The invention aims to provide a film coating device with a fixture tool for realizing batch film coating, which is used for solving the problems that the prior art is not suitable for coating a large amount of substrates and the position of a molybdenum sheet is adjusted, and the molybdenum sheet can be scratched.
In order to solve the technical problems, the invention specifically provides the following technical scheme:
a film coating device with a fixture tool for realizing batch film coating is provided with:
a base, the upper surface of which is used for placing a sensor substrate;
the molybdenum sheet is arranged on the base, is used for being attached to the top end of the sensor substrate on the base, and is provided with a gap in the area where the molybdenum sheet covers the sensor substrate;
the cover plate is attached to the upper surface of the molybdenum sheet, and a through groove is formed in the area right above the sensor substrate;
the horizontal adjusting component is arranged in the base and can adjust the horizontal position in the base;
the positioning components are fixedly connected to the horizontal adjusting component and sequentially penetrate through the base and the molybdenum sheet to be connected with the cover plate;
the horizontal adjusting component can adjust the position of the molybdenum sheet at the top end of the base through a plurality of positioning components.
As a preferable scheme of the present invention, the base includes an upper base and a lower base, and four supporting members are disposed between the upper base and the lower base;
the upper base is positioned right above the lower base, the four supporting pieces are respectively positioned at four corners of the upper base and the lower base, and the upper base and the lower base are connected into an integral structure through the four supporting pieces;
wherein an activity space for connecting the horizontal adjustment assembly is formed between any two adjacent supporting members.
As a preferred scheme of the invention, a plurality of strip-shaped grooves for placing a sensor substrate are formed on the upper base, and a plurality of round holes for the positioning assembly to pass through are formed on the upper base;
the inner diameter of the round hole is larger than the diameter of the positioning assembly, and the round holes are uniformly distributed on the outer sides of the strip-shaped grooves.
The depth of the strip-shaped groove is smaller than the thickness of the sensor substrate.
As a preferable scheme of the present invention, two first slide rails and two second slide rails are disposed on the lower base, the two first slide rails are respectively located in the moving spaces on the left and right sides of the lower base, two ends of the first slide rails respectively face the two adjacent supporting members, the two second slide rails are respectively located in the moving spaces on the front and rear sides of the lower base, and two ends of the second slide rails respectively face the two adjacent supporting members.
As a preferred scheme of the invention, a plurality of positioning holes for the positioning components to pass through are formed in the molybdenum sheet, and a plurality of coating seams are formed in the region of the molybdenum sheet right above the strip-shaped groove;
the positioning holes correspond to the positioning assemblies one by one, and the inner diameter of each positioning hole is equal to the diameter of each positioning assembly.
As a preferred scheme of the invention, a plurality of positioning pieces for connecting the positioning assemblies are arranged on the cover plate, and a film coating groove is formed in the cover plate right above the strip-shaped groove;
the locating piece is characterized in that an inner cavity for the locating component to extend into is formed in the locating piece, a bolt hole is formed in the center of the top end of the locating piece, and a fixing bolt which can be connected with the top end of the locating component through threads is arranged in the bolt hole.
As a preferable scheme of the present invention, the horizontal adjustment assembly includes a movable connecting plate disposed between the upper base and the lower base, the movable connecting plate is provided with a left-right adjustment member and a front-back adjustment member which are transversely distributed, the left-right adjustment member and the front-back adjustment member are vertically distributed in the movable connecting plate, and the left-right adjustment member is located above the front-back adjustment member in the movable connecting plate;
the left and right adjusting pieces can control the movable connecting plate and the front and back adjusting pieces to move left and right synchronously, and the front and back adjusting pieces can control the movable connecting plate and the left and right adjusting pieces to move front and back synchronously.
As a preferable scheme of the present invention, the left and right adjusting member includes a left and right lead screws passing through the movable connecting plate in a transverse direction and connected to the movable connecting plate through threads, two ends of the left and right lead screws are respectively located at left and right sides of the movable connecting plate and rotatably connected to a first slider, a first knob is rotatably connected to an outer side of the first slider, and the first knob is connected to one end of the left and right lead screws to control the rotation of the left and right lead screws;
the bottom ends of the two first sliding blocks are provided with sliding grooves, and the two first sliding blocks are respectively connected to the two first sliding rails in a sliding manner through the sliding grooves;
the front and rear adjusting part comprises a front and rear screw rod which transversely penetrates through the movable connecting plate and is in threaded connection with the movable connecting plate, two ends of the front and rear screw rod are respectively positioned at the front and rear sides of the movable connecting plate and are rotatably connected with a second sliding block, a second knob is rotatably connected to the outer side of the second sliding block, and the second knob is connected with one end of the front and rear screw rod to control the rotation of the front and rear screw rod;
the bottom of two second slider has all seted up the spout, two the second slider all passes through each sliding connection of spout is in two on the second slide rail.
As a preferred scheme of the present invention, the positioning assembly includes a positioning column fixed on the movable connecting plate, a sliding sleeve is sleeved outside the positioning column, and a wave spring is sleeved outside the sliding sleeve;
the sliding sleeves are arranged on the outer sides of the positioning columns and used for supporting the molybdenum sheets, and the sliding sleeves are supported together so that the molybdenum sheets do not contact with the sensor substrate on the base when placed;
and a threaded hole is formed in the center of the top end of the positioning column.
As a preferred scheme of the present invention, the sliding sleeve can longitudinally slide on the positioning column, a concave structure is arranged on the outer side of the positioning column, a convex structure is arranged on the inner side of the sliding sleeve, the convex structure of the sliding sleeve always moves up and down in the concave structure of the positioning column, and the sliding sleeve is located at the highest position on the positioning column when the convex structure of the sliding sleeve abuts against the top end of the concave structure of the positioning column;
the bottom end of the wave spring is in contact with the movable connecting plate to elastically support the sliding sleeve, and the wave spring is elastically supported to enable the sliding sleeve to be located at the highest position on the positioning column.
Compared with the prior art, the invention has the following beneficial effects:
(1) The film coating clamp can position and fix the substrate, obtain an effective platinum film coating by adopting a mask method, simultaneously manufacture a plurality of sensors with different measuring points and different types, ensure the film coating consistency of the plurality of substrates and improve the development efficiency.
(2) According to the invention, the molybdenum sheet is connected in a mode of positioning firstly and then pressing, the positions of the molybdenum sheets can be adjusted by controlling the plurality of positioning parts to move synchronously, and the molybdenum sheets are not contacted with the sensor substrate when not pressed, so that the positions of the molybdenum sheets can be finely adjusted conveniently, and the area of the slit on the molybdenum sheets can be accurately attached to the sensor substrate below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It should be apparent that the drawings in the following description are merely exemplary, and that other embodiments can be derived from the drawings provided by those of ordinary skill in the art without inventive effort.
FIG. 1 is a schematic view of the entire apparatus according to the present invention.
FIG. 2 is a schematic view of the structure of the molybdenum sheet according to the present invention.
Fig. 3 is a schematic structural diagram of a base provided in the present invention.
FIG. 4 is a schematic view of the present invention providing the installation of left and right, fore and aft adjustment members.
Fig. 5 is a schematic structural view of the movable connecting plate provided by the invention.
FIG. 6 is a cross-sectional view of the connection of the positioning assembly provided by the present invention.
The reference numerals in the drawings denote the following, respectively:
1-a base; 2-molybdenum sheet; 3-cover plate; 4-a horizontal adjustment assembly; 5-a positioning assembly;
11-upper base; 12-a lower base; 13-a support;
111-bar-shaped grooves; 112-circular holes; 121-a first slide rail; 122-a second slide rail;
21-positioning holes; 22-coating film seams;
31-a positioning element; 32-a film coating groove;
311-lumen; 312-bolt hole; 313-a fixing bolt;
41-movable connecting plate; 42-left and right adjustment; 43-front-back adjustment;
421-left and right screw rods; 422-first slider; 423-first knob; 431-front and rear screw rods; 432-a second slider; 433-a second knob;
51-a locating post; 52-a sliding sleeve; 53-wave spring.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 to 6, the present invention provides a plating apparatus having a jig tool for batch plating, including:
a base 1, the upper surface of which is used for placing a sensor substrate;
the molybdenum sheet 2 is arranged on the base 1, is used for being attached to the top end of the sensor substrate on the base 1, and is provided with a gap in the area where the molybdenum sheet 2 covers the sensor substrate;
the cover plate 3 is attached to the upper surface of the molybdenum sheet 2, and is provided with a through groove in the area right above the sensor substrate;
a horizontal adjusting component 4 which is arranged inside the base 1 and can adjust the horizontal position inside the base 1;
a plurality of positioning components 5 which are all fixedly connected on the horizontal adjusting component 4 and sequentially penetrate through the base 1 and the molybdenum sheet 2 to be connected with the cover plate 3;
the horizontal adjusting component 4 can adjust the position of the molybdenum sheet 2 on the top end of the base 1 through a plurality of positioning components 5.
In the prior art, different gaps are generally cut on different molybdenum sheets 2, when coating is performed, a substrate to be coated is firstly placed on a coating machine, and the corresponding molybdenum sheet 2 is taken out and manually placed above the substrate for fixing, so that the coating machine coats a metal film with a required shape on the substrate.
The film coating clamp can position and fix the substrate, obtain an effective platinum film coating by adopting a mask method, simultaneously manufacture a plurality of sensors with different measuring points and different types, ensure the film coating consistency of the plurality of substrates and improve the development efficiency.
When the molybdenum sheet 2 is placed on the substrate, the position covered by the molybdenum sheet 2 generally needs to be adjusted to ensure that the gap on the molybdenum sheet 2 is located in the corresponding area on the substrate, however, adjusting the position of the molybdenum sheet 2 when the molybdenum sheet 2 is attached to the substrate may cause the substrate to be scratched by the molybdenum sheet 2, thereby reducing the yield of the finished product.
According to the invention, the connection mode of the molybdenum sheets 2 is set to be a mode of positioning first and then pressing, the positions of the molybdenum sheets 2 can be adjusted continuously by controlling the synchronous movement of the plurality of positioning parts, and the molybdenum sheets 2 are not contacted with the sensor substrate when not pressed, so that the positions of the molybdenum sheets 2 can be finely adjusted conveniently, and the area of the slot on the molybdenum sheets 2 can be accurately attached to the sensor substrate below.
The base 1 comprises an upper base 11 and a lower base 12, and four supporting pieces 13 are arranged between the upper base 11 and the lower base 12;
the upper base 11 is positioned right above the lower base 12, the four supporting pieces 13 are respectively positioned at the four corners of the upper base 11 and the lower base 12, and the upper base 11 and the lower base 12 are connected into an integral structure through the four supporting pieces 13;
wherein a movement space for connecting the leveling assemblies 4 is formed between any two adjacent supporting members 13.
Go up and set up a plurality of bar recesses 111 that are used for putting into the sensor base on the base 11, go up and be equipped with a plurality of round holes 112 that are used for supplying locating component 5 to pass on the base 11, this coating film anchor clamps frock is used for slice platinum film resistance heat flow sensor, can design for bar recess 111 according to the user demand of sensor kind, or the recess of cylindricality is used for plating the column sensor base.
The inner diameter of the round hole 112 is larger than the diameter of the positioning component 5, and the round holes 112 are uniformly distributed on the outer sides of the strip-shaped grooves 111.
The depth of the stripe-shaped groove 111 is smaller than the thickness of the sensor substrate.
Be equipped with two first slide rails 121 and two second slide rails 122 on the lower base 12, two first slide rails 121 are located the activity space of the left and right sides of lower base 12 respectively to the both ends of first slide rail 121 are respectively towards two adjacent support piece 13, and two second slide rails 122 are located the activity space of both sides around lower base 12 respectively, and the both ends of second slide rail 122 are respectively towards two adjacent support piece 13.
The molybdenum sheet 2 is provided with a plurality of positioning holes 21 for the positioning components 5 to pass through, a plurality of coating seams 22 are arranged on the molybdenum sheet 2 in the area right above the strip-shaped groove 111, and the seams on the molybdenum sheet 2 are actually in the shape of a coated film (which can be a straight line or in an S shape or a W shape). Because platinum is sputtered to the base 1 after being ionized, the platinum can be sputtered only at the position on the base 1 where the molybdenum sheet 2 is not shielded.
The positioning holes 21 correspond to the positioning components 5 one by one, and the inner diameter of the positioning hole 21 is equal to the diameter of the positioning component 5.
A plurality of positioning pieces 31 used for connecting the positioning assembly 5 are arranged on the cover plate 3, and a film coating groove 32 is arranged on the cover plate 3 and positioned right above the strip-shaped groove 111;
an inner cavity 311 for the positioning component 5 to extend into is arranged inside the positioning component 31, a bolt hole 312 is arranged at the center position of the top end of the positioning component 31, and a fixing bolt 313 capable of being in threaded connection with the top end of the positioning component 5 is arranged inside the bolt hole 312.
Typically, tens of chip sensor substrates can be placed on the strip-shaped groove 111 of the upper base 11 at a time, and the molybdenum sheet 2 is only required to be provided with corresponding slits at corresponding positions.
The glass substrate is placed in the strip-shaped groove 111 of the base 1, the positioning holes 21 of the molybdenum sheet 2 penetrate through the positioning components 5 until the molybdenum sheet covers the sensor substrate below, then the positioning components 5 are sleeved with the positioning pieces 31 of the cover plate 3, and then the fixing bolts 313 are screwed down, so that the molybdenum sheet 2 is fully pressed on the sensor substrate on the upper base 11 by the cover plate 3.
Then the clamp is arranged in a film coating machine, after sealing, vacuumizing is carried out, argon is filled, high-voltage discharge current (or voltage) is adjusted, the platinum target is ionized to generate ion beams, the film coating time is controlled according to the voltage, after the film coating is finished, the high-voltage power supply is turned off, and then the gas is discharged.
The strip-shaped groove 111 on the upper base 11 is used for placing a glass sheet substrate, the thickness of the glass sheet substrate is only 1mm, the molybdenum sheet 2 is flat and is only 0.09mm thick, the sensor substrate is arranged in the strip-shaped groove 111 of the upper base 11, the surface of the substrate is slightly higher than the surface of the upper base 11 by 0.1mm, the molybdenum sheet 2 covers the substrate, and when the molybdenum sheet 2 is pressed, the molybdenum sheet can be preferentially contacted with the sensor substrate, so that the molybdenum sheet 2 is tightly attached to the surface of the substrate, and platinum is sputtered on the sensor substrate through a gap on the molybdenum sheet 2.
Wherein, the positioning assembly 5 comprises a positioning column 51 fixed on the movable connecting plate 41, a sliding sleeve 52 is sleeved outside the positioning column 51, and a wave spring 53 is sleeved outside the sliding sleeve 52;
the sliding sleeves 52 are arranged outside the positioning columns 51 and used for supporting the molybdenum sheets 2, and the sliding sleeves 52 support together so that the molybdenum sheets 2 do not contact with the sensor substrate on the base 1 when being placed;
wherein, a threaded hole is opened at the center position of the top end of the positioning post 51.
The sliding sleeve 52 can longitudinally slide on the positioning column 51, a concave structure is arranged on the outer side of the positioning column 51, a convex structure is arranged on the inner side of the sliding sleeve 52, the convex structure of the sliding sleeve 52 always moves up and down in the concave structure of the positioning column 51, and the sliding sleeve 52 is positioned at the highest position on the positioning column 51 when the convex structure of the sliding sleeve 52 is abutted against the top end of the concave structure of the positioning column 51;
wherein, the bottom end of the wave spring 53 contacts with the movable connecting plate 41 to elastically support the sliding sleeve 52, and the wave spring 53 elastically supports to make the sliding sleeve 52 at the highest position on the positioning column 51.
When the molybdenum sheet 2 is placed on the positioning assemblies 5, the positioning holes 21 are movably sleeved on the positioning posts 51 until the bottom end of the molybdenum sheet contacts the sliding sleeve 52, and the wave spring 53 provides elasticity to elastically support the bottom end of the molybdenum sheet 2 by the sliding sleeve 52, so that the bottom end of the molybdenum sheet 2 does not contact the sensor substrate below after being placed, and the horizontal adjusting assembly is convenient for fine adjustment of the position of the molybdenum sheet 2 in the subsequent process.
After the position of the molybdenum sheet 2 is determined, in the process of installing the cover plate 3, the positioning posts 51 extend into the inner cavities 311 of the positioning members 31 and are continuously screwed into the positioning posts by using the fixing bolts 313, so that the cover plate 3 is uniformly pressed on the molybdenum sheet 2, and the sliding sleeves 52 and the wave springs 53 are continuously pressed by descending the molybdenum sheet 2 until the molybdenum sheet 2 contacts with the sensor substrate.
The horizontal adjusting component 4 comprises a movable connecting plate 41 arranged between the upper base 11 and the lower base 12, the movable connecting plate 41 is provided with a left-right adjusting piece 42 and a front-back adjusting piece 43 which are transversely distributed, the left-right adjusting piece 42 and the front-back adjusting piece 43 are vertically distributed on the movable connecting plate 41, and the left-right adjusting piece 42 is positioned above the front-back adjusting piece 43 in the movable connecting plate 41;
the left-right adjusting piece 42 can control the movable connecting plate 41 and the front-back adjusting piece 43 to synchronously move left and right, and the front-back adjusting piece 43 can control the movable connecting plate 41 and the left-right adjusting piece 42 to synchronously move front and back.
The left and right adjusting member 42 comprises a left and right screw rod 421 transversely passing through the movable connecting plate 41 and in threaded connection with the movable connecting plate, two ends of the left and right screw rod 421 are respectively positioned at the left and right sides of the movable connecting plate 41 and are rotatably connected with a first slider 422, a first knob 423 is rotatably connected to the outer side of the first slider 422, and the first knob 423 is connected with one end of the left and right screw rod 421 to control the rotation of the left and right screw rod 421;
the bottom ends of the two first sliding blocks 422 are both provided with sliding grooves, and the two first sliding blocks 422 are both connected to the two first sliding rails 121 through the sliding grooves in a sliding manner;
the front and rear adjusting member 43 comprises a front and rear screw rod 431 transversely passing through the movable connecting plate 41 and connected with the movable connecting plate through threads, two ends of the front and rear screw rod 431 are respectively positioned at the front and rear sides of the movable connecting plate 41 and rotatably connected with a second slide block 432, a second knob 433 is rotatably connected to the outer side of the second slide block 432, and the second knob 433 is connected with one end of the front and rear screw rod 431 to control the rotation of the front and rear screw rod 431;
the bottom ends of the two second sliding blocks 432 are both provided with sliding grooves, and the two second sliding blocks 432 are both connected to the two second sliding rails 122 through the sliding grooves in a sliding manner.
After the molybdenum sheet 2 is placed, the molybdenum sheet 2 is in contact with the sensor substrate, if the position of the molybdenum sheet 2 covering the sensor substrate needs to be adjusted, the first knob 423 can be rotated between the two first sliding blocks 422 through the first knob 423 and the left and right screw rods 421, the movable connecting plate 41 can move left and right through the action of the threads, the movable connecting plate 41 can move in the circular hole together with the plurality of positioning assemblies 5, so that the molybdenum sheets 2 positioned on the plurality of positioning assemblies 5 can move left and right, and when the movable connecting plate 41 moves left and right, the two second sliding blocks 432 of the front and rear adjusting pieces 43 slide on the second sliding rails 122, so that the movable connecting plate 41 can always slide back and forth towards a specific direction.
The second knob 433 can be rotated by rotating the second knob 433, the second knob 433 rotates between the two second sliding blocks 432 together with the front and rear screw rods 431, the movable connecting plate 41 moves back and forth through the action of threads, the movable connecting plate 41 moves in a circular hole together with the plurality of positioning assemblies 5, so that the molybdenum sheets 2 positioned on the plurality of positioning assemblies 5 move back and forth, and when the movable connecting plate 41 moves back and forth, the two first sliding blocks 422 of the left and right adjusting members 42 slide on the first sliding rails 121, so that the movable connecting plate 41 can always slide back and forth in a specific direction.
The above embodiments are only exemplary embodiments of the present application, and are not intended to limit the present application, and the protection scope of the present application is defined by the claims. Various modifications and equivalents may be made to the disclosure by those skilled in the art within the spirit and scope of the disclosure, and such modifications and equivalents should also be considered as falling within the scope of the disclosure.
Claims (10)
1. The utility model provides a coating device with realize anchor clamps frock of coating film in batches which characterized in that possesses:
a base (1) having an upper surface for placing a sensor substrate;
the molybdenum sheet (2) is arranged on the base (1), is used for being attached to the top end of the sensor substrate on the base (1), and is provided with a gap in the area, covering the sensor substrate, of the molybdenum sheet (2);
the cover plate (3) is attached to the upper surface of the molybdenum sheet (2), and a through groove is formed in the area right above the sensor substrate;
the horizontal adjusting component (4) is arranged inside the base (1) and can adjust the horizontal position inside the base (1);
the positioning components (5) are fixedly connected to the horizontal adjusting component (4) and sequentially penetrate through the base (1) and the molybdenum sheet (2) to be connected with the cover plate (3);
the horizontal adjusting component (4) can adjust the position of the molybdenum sheet (2) at the top end of the base (1) through a plurality of positioning components (5).
2. The coating device with a fixture tool for batch coating according to claim 1,
the base (1) comprises an upper base (11) and a lower base (12), and four supporting pieces (13) are arranged between the upper base (11) and the lower base (12);
the upper base (11) is positioned right above the lower base (12), the four supporting pieces (13) are respectively positioned at four corners of the upper base (11) and the lower base (12), and the upper base (11) and the lower base (12) are connected into an integral structure through the four supporting pieces (13);
wherein an activity space for connecting the horizontal adjusting components (4) is formed between any two adjacent supporting components (13).
3. The coating device with a fixture for batch coating according to claim 2,
the upper base (11) is provided with a plurality of strip-shaped grooves (111) for placing a sensor substrate, and the upper base (11) is provided with a plurality of round holes (112) for the positioning assembly (5) to pass through;
the inner diameter of the round hole (112) is larger than the diameter of the positioning component (5), and the round holes (112) are uniformly distributed on the outer sides of the strip-shaped grooves (111).
The depth of the strip-shaped groove (111) is smaller than the thickness of the sensor substrate.
4. The coating device with a fixture tool for batch coating according to claim 2,
be equipped with two first slide rails (121) and two second slide rails (122) on lower base (12), two first slide rail (121) are located respectively the activity space of the left and right sides of lower base (12), and the both ends of first slide rail (121) are towards two adjacent respectively support piece (13), two second slide rail (122) are located respectively the activity space of the front and back both sides of lower base (12), and the both ends of second slide rail (122) are towards two adjacent respectively support piece (13).
5. The coating device with a fixture tool for batch coating according to claim 3,
a plurality of positioning holes (21) for the positioning components (5) to pass through are formed in the molybdenum sheet (2), and a plurality of coating seams (22) are formed in the region, which is positioned right above the strip-shaped groove (111), of the molybdenum sheet (2);
the positioning holes (21) correspond to the positioning assemblies (5) one by one, and the inner diameter of each positioning hole (21) is equal to the diameter of each positioning assembly (5).
6. The coating device with a fixture tool for batch coating according to claim 3,
a plurality of positioning pieces (31) used for connecting the positioning assemblies (5) are arranged on the cover plate (3), and a film coating groove (32) is formed in the cover plate (3) and is positioned right above the strip-shaped groove (111);
the inner cavity (311) used for the positioning component (5) to extend into is arranged in the positioning component (31), a bolt hole (312) is formed in the center of the top end of the positioning component (31), and a fixing bolt (313) which can be in threaded connection with the top end of the positioning component (5) is arranged in the bolt hole (312).
7. The coating device with a fixture tool for batch coating according to claim 2,
the horizontal adjusting assembly (4) comprises a movable connecting plate (41) arranged between the upper base (11) and the lower base (12), a left adjusting piece (42) and a right adjusting piece (43) which are transversely distributed are arranged on the movable connecting plate (41), the left adjusting piece (42) and the right adjusting piece (43) are mutually and vertically distributed on the movable connecting plate (41), and the left adjusting piece (42) and the right adjusting piece (43) are positioned above the front adjusting piece (43) in the movable connecting plate (41);
the left-right adjusting piece (42) can control the movable connecting plate (41) and the front-back adjusting piece (43) to move left and right synchronously, and the front-back adjusting piece (43) can control the movable connecting plate (41) and the left-right adjusting piece (42) to move front and back synchronously.
8. The coating device with a fixture tool for batch coating according to claim 7,
the left and right adjusting piece (42) comprises a left and right screw rod (421) which transversely penetrates through the movable connecting plate (41) and is in threaded connection with the movable connecting plate, two ends of the left and right screw rod (421) are respectively positioned at the left and right sides of the movable connecting plate (41) and are rotatably connected with a first sliding block (422), a first knob (423) is rotatably connected to the outer side of the first sliding block (422), and the first knob (423) is connected with one end of the left and right screw rod (421) to control the rotation of the left and right screw rod (421);
the bottom ends of the two first sliding blocks (422) are provided with sliding grooves, and the two first sliding blocks (422) are respectively connected to the two first sliding rails (121) in a sliding manner through the sliding grooves;
the front and rear adjusting piece (43) comprises a front and rear screw rod (431) which transversely penetrates through the movable connecting plate (41) and is in threaded connection with the movable connecting plate, two ends of the front and rear screw rod (431) are respectively positioned at the front and rear sides of the movable connecting plate (41) and are rotatably connected with a second sliding block (432), a second knob (433) is rotatably connected to the outer side of the second sliding block (432), and the second knob (433) is connected with one end of the front and rear screw rod (431) to control the rotation of the front and rear screw rod (431);
the bottom ends of the two second sliding blocks (432) are provided with sliding grooves, and the two second sliding blocks (432) are connected to the two second sliding rails (122) through the sliding grooves in a sliding mode.
9. The coating device with a fixture for batch coating according to claim 7,
the positioning assembly (5) comprises a positioning column (51) fixed on the movable connecting plate (41), a sliding sleeve (52) is sleeved outside the positioning column (51), and a wave spring (53) is sleeved outside the sliding sleeve (52);
the sliding sleeves (52) are used for supporting the molybdenum sheets (2) on the outer sides of the positioning columns (51), and the sliding sleeves (52) are supported together so that the molybdenum sheets (2) are not in contact with a sensor substrate on the base (1) when placed;
wherein, the center position of the top end of the positioning column (51) is provided with a threaded hole.
10. The coating device with a fixture tool for batch coating according to claim 9,
the sliding sleeve (52) can longitudinally slide on the positioning column (51), a concave structure is arranged on the outer side of the positioning column (51), a convex structure is arranged on the inner side of the sliding sleeve (52), the convex structure of the sliding sleeve (52) always moves up and down in the concave structure of the positioning column (51), and the sliding sleeve (52) is located at the highest position on the positioning column (51) when the convex structure of the sliding sleeve (52) is abutted against the top end of the concave structure of the positioning column (51);
wherein, the bottom end of the wave spring (53) is in contact with the movable connecting plate (41) to elastically support the sliding sleeve (52), and the wave spring (53) elastically supports the sliding sleeve (52) to be at the highest position on the positioning column (51).
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|---|---|---|---|
| CN202211122368.6A CN115449746B (en) | 2022-09-15 | 2022-09-15 | Coating device with fixture tool for realizing batch coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211122368.6A CN115449746B (en) | 2022-09-15 | 2022-09-15 | Coating device with fixture tool for realizing batch coating |
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| CN115449746B CN115449746B (en) | 2024-01-26 |
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Citations (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4501650A (en) * | 1983-08-26 | 1985-02-26 | Napco, Inc. | Workpiece clamp assembly for electrolytic plating machine |
| US5472592A (en) * | 1994-07-19 | 1995-12-05 | American Plating Systems | Electrolytic plating apparatus and method |
| WO2003078921A2 (en) * | 2002-03-15 | 2003-09-25 | Jaubjaub Consulting | Device for controlling the geometry of a shaped profile section |
| US20040129384A1 (en) * | 2002-12-26 | 2004-07-08 | Canon Kabushiki Kaisha | Chemical treatment apparatus and chemical treatment method |
| US20050023149A1 (en) * | 2003-06-05 | 2005-02-03 | Tsutomu Nakada | Plating apparatus, plating method and substrate processing apparatus |
| US20090139871A1 (en) * | 2007-12-04 | 2009-06-04 | Nobutoshi Saito | Plating apparatus and plating method |
| US20090139870A1 (en) * | 2007-12-04 | 2009-06-04 | Mizuki Nagai | Plating apparatus and plating method |
| KR20140060080A (en) * | 2012-11-09 | 2014-05-19 | 우범제 | Plasma treatment equipment of a lid assembly to the process gas spray uniformity on the wafer in process chamber |
| US20150294894A1 (en) * | 2012-11-14 | 2015-10-15 | Jcu Corporation | Substrate plating jig |
| CN106367727A (en) * | 2016-09-06 | 2017-02-01 | 武汉工程大学 | Method for preparing diamond vacuum window with self-supporting frame by virtue of mask method |
| CN108818419A (en) * | 2018-08-06 | 2018-11-16 | 东晶电子金华有限公司 | Magnet dismounts tooling |
| CN208440692U (en) * | 2018-07-04 | 2019-01-29 | 江苏时代华宜电子科技有限公司 | A kind of molybdenum sheet plated film protective device |
| CN209087806U (en) * | 2018-11-02 | 2019-07-09 | 江苏海德频率科技有限公司 | A kind of coating clamp and its carrier strip |
| CN110656316A (en) * | 2019-10-31 | 2020-01-07 | 中山凯旋真空科技股份有限公司 | Clamp and coating equipment with same |
| WO2020199525A1 (en) * | 2019-03-29 | 2020-10-08 | 昆山国显光电有限公司 | Support assembly and mask support using same |
| CN111996490A (en) * | 2020-08-24 | 2020-11-27 | 中国科学院福建物质结构研究所 | Novel film coating mask device |
| CN112242450A (en) * | 2020-12-16 | 2021-01-19 | 浙江里阳半导体有限公司 | Diode device and manufacturing method thereof |
| CN114284057A (en) * | 2022-03-08 | 2022-04-05 | 山西金山磁材有限公司 | Neodymium iron boron particle continuous composite coating device and method for regulating and controlling depth of neodymium iron boron crystal boundary |
| CN114657537A (en) * | 2022-03-25 | 2022-06-24 | 厦门韫茂科技有限公司 | Continuous ALD coating equipment |
-
2022
- 2022-09-15 CN CN202211122368.6A patent/CN115449746B/en active Active
Patent Citations (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4501650A (en) * | 1983-08-26 | 1985-02-26 | Napco, Inc. | Workpiece clamp assembly for electrolytic plating machine |
| US5472592A (en) * | 1994-07-19 | 1995-12-05 | American Plating Systems | Electrolytic plating apparatus and method |
| WO2003078921A2 (en) * | 2002-03-15 | 2003-09-25 | Jaubjaub Consulting | Device for controlling the geometry of a shaped profile section |
| US20040129384A1 (en) * | 2002-12-26 | 2004-07-08 | Canon Kabushiki Kaisha | Chemical treatment apparatus and chemical treatment method |
| US20050023149A1 (en) * | 2003-06-05 | 2005-02-03 | Tsutomu Nakada | Plating apparatus, plating method and substrate processing apparatus |
| US20090139871A1 (en) * | 2007-12-04 | 2009-06-04 | Nobutoshi Saito | Plating apparatus and plating method |
| US20090139870A1 (en) * | 2007-12-04 | 2009-06-04 | Mizuki Nagai | Plating apparatus and plating method |
| KR20140060080A (en) * | 2012-11-09 | 2014-05-19 | 우범제 | Plasma treatment equipment of a lid assembly to the process gas spray uniformity on the wafer in process chamber |
| US20150294894A1 (en) * | 2012-11-14 | 2015-10-15 | Jcu Corporation | Substrate plating jig |
| CN106367727A (en) * | 2016-09-06 | 2017-02-01 | 武汉工程大学 | Method for preparing diamond vacuum window with self-supporting frame by virtue of mask method |
| CN208440692U (en) * | 2018-07-04 | 2019-01-29 | 江苏时代华宜电子科技有限公司 | A kind of molybdenum sheet plated film protective device |
| CN108818419A (en) * | 2018-08-06 | 2018-11-16 | 东晶电子金华有限公司 | Magnet dismounts tooling |
| CN209087806U (en) * | 2018-11-02 | 2019-07-09 | 江苏海德频率科技有限公司 | A kind of coating clamp and its carrier strip |
| WO2020199525A1 (en) * | 2019-03-29 | 2020-10-08 | 昆山国显光电有限公司 | Support assembly and mask support using same |
| CN110656316A (en) * | 2019-10-31 | 2020-01-07 | 中山凯旋真空科技股份有限公司 | Clamp and coating equipment with same |
| CN111996490A (en) * | 2020-08-24 | 2020-11-27 | 中国科学院福建物质结构研究所 | Novel film coating mask device |
| CN112242450A (en) * | 2020-12-16 | 2021-01-19 | 浙江里阳半导体有限公司 | Diode device and manufacturing method thereof |
| CN114284057A (en) * | 2022-03-08 | 2022-04-05 | 山西金山磁材有限公司 | Neodymium iron boron particle continuous composite coating device and method for regulating and controlling depth of neodymium iron boron crystal boundary |
| CN114657537A (en) * | 2022-03-25 | 2022-06-24 | 厦门韫茂科技有限公司 | Continuous ALD coating equipment |
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