CN115437161A - Reflection type collimation and integration homogenization integrated mirror - Google Patents
Reflection type collimation and integration homogenization integrated mirror Download PDFInfo
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- 238000007493 shaping process Methods 0.000 abstract description 26
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Abstract
The invention discloses a reflective collimation and integration homogenization integral mirror. A reflective collimation and integration homogenization integral mirror is provided with a front convergence surface in an incident direction and a rear convergence surface in an emergent direction; the light source at the front convergence surface emits an input light beam, the reflecting mirror collimates the input light beam and then reflects the input light beam into a limited area on the working surface at the rear convergence surface to obtain a target homogenized rectangular light spot; the reflecting mirror surface is composed of a curved surface formed by each section of bus on the rotating bus rotating around a respective specific rotating shaft; the rotating bus is solved according to the target homogenized rectangular light spots, and the specific rotating shaft is a straight line connecting the light source point and the mapping point of the middle point of the bus on the working surface. The problems of complex structure, large energy loss and high cost in the existing shaping system of the rectangular light spot are solved. The method has the advantages of simplifying the structure of the light path, improving the utilization rate of laser energy and meeting the requirements of different scenes.
Description
Technical Field
The invention belongs to the field of laser processing, and particularly relates to a reflective collimating, integrating and homogenizing integrated mirror.
Background
In many scenarios of laser processing, it is common to shape an incident gaussian beam into a homogenized rectangular spot by using a reflective integrator mirror. The reflective integral mirror can be processed by adopting a copper matrix or other materials, and can also be processed by designing a water cooling mode on the back surface, so that the reflective integral mirror can be used for high-power laser processing; the homogenized rectangular light spot is more regular in shape and more uniform in energy compared with a Gaussian light spot.
At present, in the field of laser processing, there are various methods for generating rectangular light spots, and at present, rectangular homogenized light spot solutions suitable for processing scenes are divided into two types, one is to use transmissive shaping elements, such as microlens arrays, spatial light modulators, and other transmissive optical shaping elements with a light beam shaping effect; the other scheme is to use a reflective water-cooled copper mirror, wherein a light beam is collimated by a collimating mirror, is incident on a traditional integrating mirror to be shaped, and is reflected to a working surface after being reflected and shaped, namely the working mode of the traditional integrating mirror.
In the first kind of reflective rectangular spot shaping scheme, thorlabs proposed a PMMA Microlens array, and Limo proposed a Microlens Arrays Microlens array scheme, but the current transmissive optical shaping element has the following defects: the damage threshold is low, so that the stability and the service life of the transmissive optical element are insufficient in the ultra-high power laser processing; many transmissive optical shaping elements have complex mirror shapes, high processing difficulty and high processing cost.
The second type is a reflective beam shaping scheme, and compared with a transmissive optical shaping element, the reflective shaping element has a higher damage threshold and a more mature processing technology because the main material can be metal and a water-cooling channel is arranged in the reflective shaping element. The reflected light beam integrators of II-VI, the water-cooled reflector of KUGLER and the like are reflection shaping schemes of various rectangular light spots, and the output of the rectangular light spots can be realized by shaping the laser beams. However, such shaping schemes have the following disadvantages: firstly, the cost is high, the laser beam is uniformly collimated before being applied to the shaping mirror, so that a collimating lens needs to be additionally configured in the scheme; secondly, the power loss is large, because the collimating mirror needs to be added in front of the shaping mirror in the scheme, the highest reflectivity of the existing copper mirror can only reach about 97-99%, and the loss caused by the high-power laser beam passing through the two copper mirrors is large; and thirdly, the structure is complex, because of a plurality of collimating lenses, the light path structure becomes complex, the adjusting difficulty is high, and the requirement on the assembling precision is improved.
In summary, the existing shaping scheme for realizing the high-power rectangular light spot has the problems of complex structure, large energy loss in the transmission process and high cost.
Disclosure of Invention
Aiming at the defects of the related art, the invention aims to provide a reflective collimation and integration homogenization integral mirror, aiming at solving the problems of complex structure, large energy loss in the transmission process and high cost in the existing shaping system of rectangular light spots.
To achieve the above object, the present invention provides a reflective collimating and integrating-homogenizing integral mirror, comprising: the collimating homogenizing mirror body and the reflecting mirror surface are integrated;
the reflective collimation and integration homogenization integral mirror is provided with a front convergence surface in the incident direction and a rear convergence surface in the emergent direction; the light source at the front convergence surface emits an input light beam, and the incident direction of the input light beam is vertical to the front convergence surface;
after the input light beams are collimated by the reflecting mirror, the input light beams are reflected into a limited area on a working surface at the rear convergence surface, and target homogenization rectangular light spots are obtained;
the reflecting mirror surface is composed of a curved surface formed by each section of bus on a rotating bus rotating around a respective specific rotating shaft; and the rotating bus is used for solving according to the target homogenization rectangular light spots, and the specific rotating shaft of each section of bus is a straight line connecting the light source point and the mapping point of the middle point of the section of bus on the working surface.
Optionally, the coordinates of the rotating bus are determined by:
solving the terminal point coordinate of the first section of bus according to the starting point coordinate of the first section of bus and the mapping relation of the energy distribution of the incident light field and the target light field;
then, the terminal point coordinate of the first section of bus is used as the starting point coordinate of the second section of bus, and the terminal point coordinate of the second section of bus is solved; and sequentially determining the starting point coordinates and the end point coordinates of each section of bus.
Optionally, the end point of each bus is calculated by the following equation:
the central point of the reflector is used as an origin, the incident direction of the light beam is the negative direction of an x axis, the emergent direction of the light beam is the negative direction of a y axis, the normal direction of a plane formed by the x axis and the y axis is used as a z axis to establish a three-dimensional rectangular coordinate system, and a bus is positioned on an xoy plane; x is the number of 1 ，y 1 For the starting point of each line on the bus, y 2 The y coordinate of the end point of the segment line can be directly obtained by setting the intercept of each segment line in the y direction, f z Is a collimation distance, f w As working distance, f a The x-coordinate of the location on the spot is mapped for each line midpoint.
Optionally, the rotating bus comprises a plurality of groups of buses, and each group of connected buses uniformly superimposes incident light onto a limited area on the working surface to form uniform light spots;
when the mapping points of the buses with the preset number are changed from one side of the light spot to the other side of the light spot, the bus sections are the same group of lines;
and on the bus plane, the origin is taken as the starting point of one group of lines of the bus, the starting point corresponds to one end point of the light spot, the end point of the group of lines on the bus corresponds to the other end point of the light spot, and each line segment in the group of lines sequentially corresponds to each position on the light spot.
Optionally, the rotation generatrix of the reflecting mirror surface includes one of a convex type, a concave type and a convex-concave symmetrical type.
Optionally, when the rotating bus is convex, the shape of a single group of buses included in the rotating bus is convex; the mapping point of the first section of the bus of each group of buses is near the left end point of the light spot, the mapping point of the last section of the bus is near the right end point of the light spot, and all the internal mapping points are changed from the left end point to the right end point uniformly.
Optionally, when the rotating bus is concave, the shape of a single group of buses included in the rotating bus is concave; the mapping point of the first section of the bus of each group of buses is near the right end point of the light spot, the mapping point of the last section of the bus is near the left end point of the light spot, and all the mapping points in the interior are uniformly changed from the right end point to the left end point.
Optionally, when the rotating bus is of a concave-convex symmetric type, the shape of a single group of buses included in the rotating bus is of a concave-convex symmetric type; the middle points of the rotating bus are concave-convex in sequence and alternate rightwards, the middle points are concave-convex in sequence and alternate leftwards, and the mapping points on the left side or the right side change from one side of the light spot to the other side of the light spot and then return to the original position.
Optionally, the shape of the reflecting mirror surface of the reflective collimation and integration homogenization integral mirror is a non-rotationally symmetric free-form surface.
Optionally, a laser is disposed at the front converging surface to provide a light source.
Generally, by the above technical solution conceived by the present invention, the following beneficial effects can be obtained:
1. meanwhile, the device has the functions of beam collimation and spot shaping, can realize the beam collimation and the spot shaping only through one reflector, directly obtains homogenized rectangular spots from a laser light source, does not need other optical elements, realizes a simplified light path structure, and homogenizes the output of the rectangular spots; different reflecting mirror surfaces can be designed according to the target homogenization rectangular light spots, and the requirements of different scenes in actual processing are met.
2. The reflecting mirror and the related structure required in the original system are reduced, the reflection times of the light beams in the system are reduced, the energy loss of the system is reduced, and the utilization rate of laser energy is improved.
3. The reflective collimation and integration homogenization integral mirror has smaller adjustment difficulty and better light path stability; the processing error or the assembly error accumulation of each element is reduced, so that the light spot shaping system can obtain more stable and accurate output; meanwhile, the volume of the light path is reduced, the light path structure is more simplified, and the anti-interference capability is stronger.
Drawings
FIG. 1 is a schematic structural diagram of a reflective collimating and integrating-homogenizing integral mirror provided by the present invention;
FIG. 2 is a schematic diagram of the energy distribution of the output spot of the integrated mirror for reflective collimation and integral homogenization provided by the present invention;
FIG. 3 is a schematic diagram of a bus of a full-convex reflective collimating and integrating-homogenizing integral mirror provided by the present invention;
FIG. 4 is a schematic diagram of a bus of a total concave reflective collimating and integrating-homogenizing integral mirror provided by the present invention;
FIG. 5 is a schematic view of a bus of a convex-concave symmetric reflective collimating, integrating and homogenizing integral mirror provided by the present invention;
FIG. 6 is a schematic diagram of a convex-concave symmetric reflective collimating, integrating and homogenizing mirror according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
The invention provides a reflective collimation and integration homogenization integral mirror which is simple in structure and can output homogenized rectangular light spots; the reflector has the functions of collimating and shaping input Gaussian beams, the shape of a generatrix of the reflector is obtained by solving according to given parameters, and the reflector rotates according to the solved generatrix and a related rotating shaft. The device has the capability of outputting homogenized rectangular light spots, and simultaneously realizes the functions of collimation and shaping through a single reflector, thereby reducing optical elements; the energy utilization rate is improved.
Specifically, as shown in fig. 1, the present invention provides a reflective collimating and integrating-homogenizing integrated mirror 1, comprising: an integrated collimating and homogenizing mirror body 11 and a reflecting mirror surface 12;
the reflective collimation and integration homogenization integral mirror 1 is provided with a front convergence surface 2 in the incident direction and a rear convergence surface 3 in the emergent direction; a light source at the front convergence surface 2 emits an input light beam 4, and the incident direction of the input light beam 4 is vertical to the front convergence surface 2;
after the input light beam 4 is collimated by the reflecting mirror surface 12, the distribution mode of the input light beam 4 is changed into a preset light spot distribution mode, the input light beam 4 is reflected to a limited area on the working surface 5 at the rear convergence surface 3, and target homogenized rectangular light spots are obtained through uniform superposition;
the reflecting mirror surface 12 is composed of a curved surface formed by each section of bus on a rotating bus rotating around a respective specific rotating shaft; the rotating bus is solved according to the target homogenized rectangular light spots, and the specific rotating shaft of each section of bus is a straight line connecting the light source point and the mapping point of the middle point of the section of bus on the working surface.
A laser 6 is arranged at the front convergence surface 2 to provide a light source for the reflective collimation, integration and homogenization integral mirror 1, and the front convergence surface 2 is marked as a light source point; the shape of the reflecting mirror surface 12 of the reflective collimating and integrating-homogenizing integral mirror 1 in the present embodiment is a non-rotationally symmetric free-form surface.
The laser 6 is used as a light source to output a non-collimated Gaussian beam as an input beam 4, the incident direction of the input beam 4 is perpendicular to the front convergence surface 2, the input beam 4 enters the reflective collimation and integration homogenization integral mirror 1 through the reflecting mirror surface 12, and because the reflective collimation and integration homogenization integral mirror 1 has the functions of collimation and beam shaping, after the input beam 4 is collimated by the reflecting mirror surface 12, the distribution mode of the input beam 4 is changed into a preset light spot distribution mode and is reflected to the working surface 5 of the rear convergence surface 3, and a target combined homogenization rectangular light spot is obtained. The shapes of the reflecting mirror surfaces 12 are different, the light spot distribution modes obtained by the reflecting collimation and integration homogenization integral mirror are different, and the shapes of the reflecting mirror surfaces 12 are set according to target homogenization rectangular light spots formed according to requirements.
The distance from the front converging surface 2 to the central point of a reflecting mirror surface 12 of the integral mirror 1 for collimation and integration homogenization is recorded as a collimation distance; the distance from the rear collecting surface 3 to the center point of the mirror surface 12 of the integral mirror 1 for collimating and homogenizing is recorded as the working distance.
Wherein the coordinates of the rotation generatrix forming the mirror surface 12 are determined by:
solving the terminal point coordinate of the first section of bus according to the starting point coordinate of the first section of bus and the mapping relation of the energy distribution of the incident light field and the target light field;
then, the terminal point coordinate of the first section of bus is used as the starting point coordinate of the second section of bus, and the terminal point coordinate of the second section of bus is solved; and sequentially determining the starting point coordinates and the end point coordinates of each section of bus.
And establishing a three-dimensional rectangular coordinate system by taking the central point of the reflector as an origin, the incident direction of the light beam as the negative direction of an x axis, the emergent direction of the light beam as the negative direction of a y axis and the normal direction of a plane formed by the x axis and the y axis as a z axis, and rotating a generating line to be positioned on an xoy plane. Solving according to the required light spots to obtain the type and the group number of the required rotating buses; the rotating bus comprises one of a convex type, a concave type and a convex-concave symmetrical type, and the rotating bus comprises a plurality of groups of buses.
When the starting point coordinate of a section of bus is known, a reflecting curved surface bus equation corresponding to an incident light field and a target rectangular light spot is constructed through the mapping relation of the energy distribution of the incident light field and the target light field, and the reflecting collimation and integration homogenization integral mirror simultaneously has the functions of light beam collimation and light spot shaping after corresponding rotation. Solving the terminal point coordinate of the bus, specifically calculating by the following equation:
wherein x is 1 ，y 1 For the starting point of each line on the bus, y 2 The y coordinate of the terminal point of the section of the bus can be directly obtained by setting the intercept of each section of the bus in the y direction, f z Is a collimation distance, f w As working distance, f a And mapping the x coordinate of the position on the light spot for the middle point of each section of the bus.
In this embodiment, the coordinate calculation of the bus is calculated from left to right, the first starting point of the bus is the origin, and the first mapping point is the left end point of the rectangular light spot, so as to solve the end point of the first section of the bus to the right, and thus obtain the coordinate of the first section of the bus in the bus; then using the terminal point coordinates of the first section of bus as the starting point of the second section of bus, and moving the mapping point of the second section of bus to a right distance to solve the next terminal point; the start and end coordinates of each segment of the bus in a set of buses are determined in turn, and when the points are mapped to the rightmost end, the lines are one set of buses. And after the buses are solved, rotating each section of bus around a straight line connecting the light source and the mapping point of the midpoint of the section of bus on the working surface to obtain a reflecting curved surface.
When the mapping points of the buses with the preset number are changed from one side of the light spot to the other side of the light spot, the bus sections are the same group of lines; and on the bus plane, the origin is taken as the starting point of one group of lines of the bus, the starting point corresponds to one end point of the light spot, the end point of the group of lines on the bus corresponds to the other end point of the light spot, and each line segment in the group of lines sequentially corresponds to each position on the light spot. Wherein the preset number is a self-defined setting. Each group of connected bus bars uniformly superimposes incident light onto a defined area on the working surface to form a uniform light spot, and the energy distribution of the light spot is shown in figure 2.
As shown in fig. 3, in one embodiment, when the rotating generatrix of the mirror surface is convex, all of the plurality of generatrixes included in the rotating generatrix are convex. The mapping point of the first section of the bus of each group of buses is near the left end point of the facula, the mapping point of the last section of the bus is near the right end point of the facula, and all the mapping points in the interior are changed from the left end point to the right end point uniformly.
The reflecting mirror surface is rotated by the straight line connecting each section of the mother winding light source and the middle point of the section on the reflecting point on the working surface, and the reflecting curved surface is obtained.
As shown in fig. 4, in an embodiment, when the rotating generatrix of the reflector is concave, the shape of the plurality of generatrixes included in the rotating generatrix is concave; the mapping point of the first section of the bus of each group of buses is near the right end point of the light spot, the mapping point of the last section of the bus is near the left end point of the light spot, and all the mapping points in the interior are uniformly changed from the right end point to the left end point.
The reflecting mirror surface is rotated by the straight line connecting each section of the mother winding light source and the middle point of the section on the reflecting point on the working surface, and the reflecting curved surface is obtained.
As shown in fig. 5, in an embodiment, when the rotating bus of the mirror surface is concave-convex symmetrical, the shape of the multiple sets of buses included in the rotating bus is concave-convex symmetrical; the shape of a plurality of groups of buses at the midpoint of the rotating bus to the right is concave-convex in sequence and is also concave-convex in sequence, and the change of mapping points on the left side or the right side is from one side of the facula to the other side of the facula and then returns to the original position.
When the coordinates of the generatrix are solved by the equation provided by the embodiment, the midpoint of the generatrix is taken as an original point, calculation is performed rightward in sequence, the mapping point is near the left side of the facula, when the mapping point moves to the rightmost end, a plurality of solved generatrixes form a group, and the overall shape is a concave surface; and then taking the end point of the previous section of the bus as a starting point, and obtaining the next group of the bus from the right side of the facula to the left side of the mapping point, wherein the whole shape of the group of the bus is a convex surface. The same holds true when calculating from the generatrix focus to the left.
As shown in fig. 5, AD is a segment of the rotating bus that finds the end point D from the known starting point a; mapping points of the multi-section rotating buses from A to C on the light spots are uniformly distributed from the left side of the light spots to the right side of the light spots, a preset number of rotating buses are in a group, the preset number is obtained by comparing the height of the group of rotating buses with the height of a single-end bus, and the group of mapping points are changed from left to right, so that the group of rotating buses are in a concave shape; AB is a rotating bus of the rotating mirror surface.
When the reflecting mirror surface is concave-convex symmetrical, the concave-convex parts are sequentially alternated from the middle point of the bus to the two sides, therefore, the middle point of the bus is not smooth, the reflecting mirror surface is also divided into two sections, as shown in fig. 6, the section reflecting mirror surface reflects the part with higher middle energy of the incident Gaussian beam to the two sides of the light spot, and the incident beam close to one pitch width can obtain better homogenized light spot size.
In this example, the collimation distance was 150mm, the focusing distance was 400mm, the diameter of the mirror surface was 49.5mm, and the resulting homogenization spot length was 15mm.
According to the technical scheme of the embodiment of the invention, the integral mirror of reflection type collimation and integration homogenization is provided with a front convergence surface in an incident direction and a rear convergence surface in an emergent direction; the light source at the front convergence surface emits an input light beam, and the incident direction of the input light beam is vertical to the front convergence surface; after the input light beams are collimated by the reflecting mirror, the distribution mode of the input light beams is changed into a preset light spot distribution mode, the input light beams are reflected into a limited area on a working surface at the rear convergence surface, and the input light beams are uniformly superposed to obtain target homogenized rectangular light spots; the reflecting mirror surface is formed by a curved surface formed by each section of bus on the rotating bus rotating around a respective specific rotating shaft; the rotating buses are used for solving according to the required target homogenized rectangular light spots, and the specific rotating shaft of each bus is a straight line connecting the light source point and the mapping point of the midpoint of the bus on the working surface. The problems of complex structure, high energy loss in the transmission process, high processing difficulty and high cost in the existing shaping system of the rectangular light spot are solved. The method has the advantages of simplifying the structure of the light path, reducing the energy loss of the system, improving the utilization rate of laser energy and meeting the requirements of different scenes in actual processing.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A reflective collimating and integrating-homogenizing integral mirror, comprising: the collimating mirror body and the reflecting mirror surface are integrated;
the reflective collimation and integration homogenization integral mirror is provided with a front convergence surface in the incident direction and a rear convergence surface in the emergent direction; a light source at the front convergence surface emits an input light beam, and the incident direction of the input light beam is vertical to the front convergence surface;
after the input light beams are collimated by the reflecting mirror, the input light beams are reflected into a limited area on a working surface at the rear convergence surface, and target homogenization rectangular light spots are obtained;
the reflecting mirror surface is composed of a curved surface formed by each section of bus on a rotating bus rotating around a respective specific rotating shaft; and solving the rotating bus according to the target homogenized rectangular light spot, wherein the specific rotating shaft of each bus is a straight line connecting the light source point and the mapping point of the midpoint of the bus on the working surface.
2. The reflective collimating and integrating homogenizer integral mirror of claim 1, wherein the coordinates of the rotation generatrix are determined by:
solving the terminal point coordinate of the first section of bus according to the starting point coordinate of the first section of bus and the mapping relation of the energy distribution of the incident light field and the target light field;
then, the terminal point coordinate of the first section of bus is used as the starting point coordinate of the second section of bus, and the terminal point coordinate of the second section of bus is solved; and sequentially determining the starting point coordinates and the end point coordinates of each section of bus.
3. The reflective collimating and integrating homogenizer integral mirror according to claim 2, wherein the end point of each segment of the bus is calculated by the following equation:
the central point of the reflector is used as an origin, the incident direction of the light beam is the negative direction of an x axis, the emergent direction of the light beam is the negative direction of a y axis, the normal direction of a plane formed by the x axis and the y axis is used as a z axis to establish a three-dimensional rectangular coordinate system, and a bus is positioned on an xoy plane; x is the number of 1 ，y 1 For the starting point of each line on the bus, y 2 The y coordinate of the end point of the segment line can be directly obtained by setting the intercept of each segment line in the y direction, f z Is a collimation distance, f w As working distance, f a The x-coordinate of the position on the spot is mapped for the midpoint of each segment.
4. The reflective collimating and integrating homogenizer integral mirror of claim 1, wherein the rotating busbars comprise a plurality of sets of busbars, each set of connected busbars superimposing incident light uniformly onto the working surface within a defined area;
when the mapping points of the buses with the preset number are changed from one side of the light spot to the other side of the light spot, the bus sections are the same group of lines;
and on the bus plane, the origin is taken as the starting point of one group of lines of the bus, the starting point corresponds to one end point of the light spot, the end point of the group of lines on the bus corresponds to the other end point of the light spot, and each line segment in the group of lines sequentially corresponds to each position on the light spot.
5. The mirror of claim 1, wherein the rotational generatrix of the mirror surface comprises one of convex, concave, and convex-concave symmetric.
6. The mirror of claim 5, wherein when the rotating bus bars are convex, the shape of the single set of bus bars included in the rotating bus bars is convex; the mapping point of the first section of the bus of each group of buses is near the left end point of the facula, the mapping point of the last section of the bus is near the right end point of the facula, and all the mapping points in the interior are changed from the left end point to the right end point uniformly.
7. The mirror of claim 5, wherein when the rotating busbars are concave, the rotating busbars comprise a single set of busbars that are all concave in shape; the mapping point of the first section of the bus of each group of buses is near the right end point of the light spot, the mapping point of the last section of the bus is near the left end point of the light spot, and all the mapping points in the interior are uniformly changed from the right end point to the left end point.
8. The mirror as claimed in claim 5, wherein when the rotating bus bars are concave-convex symmetrical, the shape of the single set of bus bars included in the rotating bus bars is concave-convex symmetrical; the middle points of the rotating bus are concave-convex in sequence and alternate rightwards, the middle points are concave-convex in sequence and alternate leftwards, and the mapping points on the left side or the right side change from one side of the light spot to the other side of the light spot and then return to the original position.
9. The reflective collimating and integrating homogenizer integral mirror according to claim 1, wherein the reflective surface of the reflective collimating and integrating homogenizer integral mirror is in the shape of a non-rotationally symmetric free-form surface.
10. The mirror of claim 1, wherein a laser is disposed at the front converging surface to provide a light source.
Priority Applications (1)
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| CN113485018A (en) * | 2021-07-19 | 2021-10-08 | 华中科技大学 | Reflection type homogenizing mirror and homogenizing system for generating flat-top-like rectangular light spots |
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| JPH11326616A (en) * | 1998-03-11 | 1999-11-26 | Nippon Steel Corp | Mirror and optical condensing system using the same |
| JP2005351990A (en) * | 2004-06-08 | 2005-12-22 | Canon Inc | Scan type display optical system |
| CN112114393A (en) * | 2020-08-07 | 2020-12-22 | 苏州科技大学 | Parabolic rotating surface array integrator and design method thereof |
| CN113485018A (en) * | 2021-07-19 | 2021-10-08 | 华中科技大学 | Reflection type homogenizing mirror and homogenizing system for generating flat-top-like rectangular light spots |
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