CN115435951A - Fiber grating six-dimensional force sensor and working method thereof - Google Patents
Fiber grating six-dimensional force sensor and working method thereof Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
- G01L1/246—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
Abstract
The invention belongs to the technical field of sensors, and provides a fiber bragg grating six-dimensional force sensor and a working method thereof.A plurality of containing cavities are formed in the inner wall of a circular elastic body in a first elastic body, a first flat beam is fixed in each containing cavity, a second flat beam is vertically fixed on each first flat beam, the plane where the first flat beam is located is vertical to the plane where the second flat beam is located, and one ends of all the second flat beams, which are far away from the first flat beam, are connected to a first connecting piece together, so that the moment elastic body is designed into a structure consisting of a cross orthogonal vertical flat beam and a horizontal flat beam; meanwhile, the second elastic body comprises a plurality of third flat beams which are vertically connected with the annular elastic body through the first connecting piece, and one end, far away from the first connecting piece, of each third flat beam is vertically connected with a plurality of fourth flat beams, so that the force elastic body is designed into a structure formed by two double-layer flat beams which are vertically orthogonal; the sensing strength of the force and the moment is ensured, and the design of the force elastic body is simplified.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a fiber grating six-dimensional force sensor and a working method thereof.
Background
Force perception and moment perception play an important role in the field of smart operation and control of intelligent robots. The six-dimensional force sensor with the force sensing and moment sensing functions provides reliable data information for robot force position control, and promotes the rapid development of the robot from a control theory to control application.
The inventor finds that, aiming at the problems of high possibility of electromagnetic interference, large size, serious coupling among dimensions and the like of a six-dimensional force sensor, although some six-dimensional sensors with good symmetry, self-provided mechanical decoupling and temperature self-compensation are designed in the prior art, in the existing six-dimensional force sensor, the force transmission speed in a moment elastic part and a force elastic part is unreasonable, the moment sensing effect on force and force is influenced, and the structure design of the force elastic part in some existing six-dimensional force sensors is complex, so that the six-dimensional force sensor is not beneficial to design and popularization.
Disclosure of Invention
The six-dimensional force sensor is characterized in that the six-dimensional force sensor is designed into a structure consisting of a cross orthogonal vertical flat beam and a horizontal flat beam, and the force elastic body is designed into a structure formed by two double-layer flat beams which are longitudinally orthogonal, so that the sensing strength of force and moment is ensured, and the design of the force elastic body is simplified.
In order to achieve the above object, in a first aspect, the present invention provides a fiber grating six-dimensional force sensor, which adopts the following technical solutions:
a fiber grating six-dimensional force sensor comprises a first elastic body and a second elastic body;
the first elastic body comprises a circular elastic body, a plurality of containing cavities are formed in the inner wall of the circular elastic body, and a first flat beam is fixed in each containing cavity; a second flat beam is vertically fixed on each first flat beam, and the plane where the first flat beam is located is vertical to the plane where the second flat beam is located; one ends of all the second flat beams, which are far away from the first flat beam, are connected to a first connecting piece together;
the second elastic body comprises a plurality of third flat beams which are vertically connected with the annular elastic body through the first connecting piece, and one end, far away from the first connecting piece, of each third flat beam is vertically connected with a plurality of fourth flat beams.
Furthermore, the accommodating cavity is a rectangular groove, and two ends of the first flat beam are respectively fixed on the inner walls of two ends of the rectangular groove; the number of the accommodating cavities is four, and the four accommodating cavities are uniformly formed in the inner wall of the annular elastic body.
Furthermore, the plane of the first flat beam is parallel to or coincident with the plane of the annular elastic body.
Furthermore, a connecting clamping groove is formed in one end, connected with the first flat beam, of the second flat beam, the depth of the connecting clamping groove is equal to the width of the first flat beam, and the middle position of the first flat beam is inserted into the connecting clamping groove and fixedly connected with the second flat beam.
Furthermore, two third flat beams are arranged in parallel, one end of each of the two third flat beams is vertically fixed on the second connecting piece, and the other end of each of the two third flat beams is vertically fixed on the third connecting piece; the number of the fourth flat beams is two, the two fourth flat beams are arranged in parallel, one ends of the two fourth flat beams are vertically fixed on one side, far away from the third flat beam, of the third connecting piece, and the other ends of the two fourth flat beams are vertically fixed on the fourth connecting piece.
Further, the second connecting piece is connected with the first connecting piece through a buffer body.
Furthermore, the number of the second flat beams is 4, and the second flat beams are uniformly distributed in the circumferential direction of the first connecting piece; the two third flat beams are parallel to two symmetrically arranged second flat beams, and the two fourth flat beams are parallel to the other two symmetrically arranged second flat beams; the second flat beam is vertically fixed in the middle of the first flat beam, and each first flat beam is divided into two symmetrical parts.
Furthermore, a first fiber bragg grating and an eleventh fiber bragg grating are respectively arranged on the two fourth flat beams; the two third flat beams are respectively provided with a second fiber Bragg grating and a tenth fiber Bragg grating; a third fiber Bragg grating is arranged on one second flat beam; a fourth fiber Bragg grating is arranged on the first flat beam connected with the second flat beam provided with the third fiber Bragg grating; a fifth fiber Bragg grating is arranged on the first flat beam adjacent to the first flat beam provided with the fourth fiber Bragg grating; a sixth fiber Bragg grating is arranged at one end of the first flat beam which is symmetrical to the first flat beam provided with the fourth fiber Bragg grating, and the sixth fiber Bragg grating and the fourth fiber Bragg grating are symmetrically arranged; a seventh fiber bragg grating is arranged on the second flat beam which is symmetrical to the second flat beam provided with the third fiber bragg grating, and the seventh fiber bragg grating and the third fiber bragg grating are symmetrically arranged; the other end of the first flat beam, which is symmetrical to the first flat beam provided with the fourth fiber Bragg grating, is provided with an eighth fiber Bragg grating; a ninth fiber Bragg grating is arranged on the first flat beam which is symmetrical to the first flat beam provided with the fifth fiber Bragg grating, and the ninth fiber Bragg grating is symmetrical to the fifth fiber Bragg grating;
the first fiber bragg grating, the second fiber bragg grating, the third fiber bragg grating, the fourth fiber bragg grating, the fifth fiber bragg grating, the sixth fiber bragg grating, the seventh fiber bragg grating, the eighth fiber bragg grating, the ninth fiber bragg grating, the tenth fiber bragg grating and the eleventh fiber bragg grating are connected in series through an optical fiber.
In order to achieve the above object, in a second aspect, the present invention further provides a working method of a fiber grating six-dimensional force sensor, which adopts the following technical scheme:
a working method of a fiber grating six-dimensional force sensor, which employs the fiber grating six-dimensional force sensor as described in the first aspect, includes:
measuring moments in Mx, my and Mz directions and measuring force in the Fz direction by using a first elastic body comprising a circular elastic body, a first flat beam and a second flat beam; the measurement of the force in both Fx and Fy directions is performed using a second elastic body comprising a third flat beam and a fourth flat beam.
Furthermore, a third fiber Bragg grating and a seventh fiber Bragg grating form a group and are used for measuring the moment Mz; the fourth fiber Bragg grating and the sixth fiber Bragg grating form a group and are used for measuring the moment Mx; the fifth fiber Bragg grating and the ninth fiber Bragg grating are in a group and are used for measuring the moment My; the fourth fiber Bragg grating and the eighth fiber Bragg grating are in a group and are used for measuring force Fz; the second fiber Bragg grating and the tenth fiber Bragg grating form a group and are used for measuring force Fy; the first fiber Bragg grating and the eleventh fiber Bragg grating are in a group and are used for measuring force Fx;
under the action of force and moment, the flat beam generates strain, the fiber Bragg grating on the flat beam generates the same strain, and the strain enables the central wavelength of the fiber Bragg grating to shift so as to realize the measurement of the force and the moment; and performing differential calculation on the wavelength offset of each group of fiber Bragg gratings, and then measuring the force and the moment.
Compared with the prior art, the invention has the following beneficial effects:
1. the six-dimensional force sensor has the characteristics of good symmetry, self-contained mechanical decoupling, self-temperature compensation, high sensitivity and overload protection; the torque elastic body is designed into a structure consisting of cross-shaped orthogonal vertical flat beams and horizontal flat beams; meanwhile, the second elastic body comprises a plurality of third flat beams which are vertically connected with the annular elastic body through the first connecting piece, and one end, far away from the first connecting piece, of each third flat beam is vertically connected with a plurality of fourth flat beams, so that the elastic body is designed into a structure formed by two double-layer flat beams which are vertically orthogonal; the moment elastic body is designed into a structure consisting of a cross orthogonal vertical flat beam and a horizontal flat beam, and the force elastic body is designed into a structure formed by two double-layer flat beams which are longitudinally orthogonal, so that the sensing strength of force and moment is ensured, and the design of the force elastic body is simplified;
2. the invention adopts the optimized composite beam structure of the maltese cross beam and the T-shaped beam and the orthogonal double-layer beam structure to realize the measurement of force and moment, and the structure has good symmetry and a certain mechanical self-decoupling function;
3. the invention realizes the separated measurement of force and moment, reduces the coupling effect between the force and the moment, simultaneously adopts the wavelength offset difference calculation mode, eliminates the interference between dimensions, realizes the temperature self-compensation without additional fiber Bragg grating, and solves the problem that the wavelength of the fiber Bragg grating is easy to be interfered by the temperature change;
4. compared with the traditional six-dimensional force sensor, the sensor sensing element adopts the Bragg fiber grating sensor which is connected in series, the sensitivity is high, the electromagnetic interference resistance is high, the strain performance is good, the sensing of the structural strain can be finished by using one single-mode fiber, and the circuit arrangement is simple.
Drawings
The accompanying drawings, which form a part hereof, are included to provide a further understanding of the present embodiments, and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the present embodiments and together with the description serve to explain the present embodiments without unduly limiting the present embodiments.
FIG. 1 is a schematic structural view of embodiment 1 of the present invention;
FIG. 2 is a side sectional view of embodiment 1 of the present invention;
FIG. 3 is a schematic view of an optical fiber in series connection according to example 1 of the present invention;
wherein, 1, a first elastomer; 11. a circular elastomer; 12. an accommodating chamber; 13. a first flat beam; 14. a second flat beam; 15. a first connecting member; 16. a connecting clamping groove; 2. a second elastomer; 21. a third flat beam; 22. a fourth flat beam; 23. a second connecting member; 24. a third connecting member; 25. a fourth connecting member; 3. a buffer body.
Detailed Description
The invention is further described with reference to the following figures and examples.
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure herein. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
Example 1:
as shown in fig. 1, the present embodiment provides a fiber grating six-dimensional force sensor, which includes a first elastic body 1, an annular elastic body 11, an accommodating cavity 12, a first flat beam 13, a second flat beam 14, a first connecting member 15, a connecting slot 16, a second elastic body 2, a third flat beam 21, a fourth flat beam 22, a second connecting member 23, a third connecting member 24, a fourth connecting member 25, and a buffer body 3;
the first elastic body 1 comprises a circular elastic body 11, a plurality of containing cavities 12 are formed in the inner wall of the circular elastic body 11, and a first flat beam 13 is fixed in each containing cavity 12; a second flat beam 14 is vertically fixed on each first flat beam 13, and the plane of the first flat beam 13 is vertical to the plane of the second flat beam 14; the ends of all second flat beams 14 remote from said first flat beam 13 are jointly connected to a first connecting member 15;
the second elastic body 2 comprises a plurality of third flat beams 21 which are vertically connected with the annular elastic body 11 through the first connecting piece 15, and one end, far away from the first connecting piece 15, of each third flat beam 21 is vertically connected with a plurality of fourth flat beams 22.
It is understood that the first elastic body 1 is a moment elastic body, and the second elastic body 2 is a force elastic body; the sensor obtained from the first elastic body 1 and the second elastic body 2 has a good symmetrical structure and a mechanical self-decoupling function. The first elastic body 1 and the second elastic body 2 are respectively used for measuring moment and force, the first elastic body 1 is composed of a first flat beam 13 and a second flat beam 14 which are cross-shaped and orthogonal, the first flat beam 13 and the second flat beam 14 are 90 degrees, and the whole body is of a cross T-shaped structure and is used for measuring moments Mx, my, mz and force Fz. The second elastic body 2 is formed by two double-layer flat beams which are vertically orthogonal, namely an x-direction double-layer flat beam formed by two fourth flat beams 21 and a y-direction double-layer flat beam formed by two third flat beams 22 are mainly used for measuring forces Fx and Fy; the flat beam has the effect on force and moment, and compared with the force vertical to the flat surface, the force parallel to the flat surface is not easy to cause the flat beam to generate bending strain, and the force vertical to the flat surface is easy to cause the beam to generate bending strain, namely the flat beam has great difference in the sensitivity to the force and the moment in two orthogonal directions.
The accommodating cavity 12 may be a rectangular groove, and two ends of the first flat beam 13 are respectively fixed on inner walls of two ends of the rectangular groove; the number of the accommodating cavities 12 can be four, and the four accommodating cavities are uniformly formed in the inner wall of the annular elastic body 11; it is understood that the number of the first flat beams 13 and the second flat beams 14 corresponds to four; the side walls of the first flat beam 13 are not in contact with the inner walls of the accommodating cavity 12, so that the first flat beam 13 is ensured to deform under stress.
The plane of the first flat beam 13 is parallel to or coincident with the plane of the annular elastic body 11; the second flat beam 14 is vertically fixed in the middle of the first flat beam 13, and divides each first flat beam 13 into two symmetrical parts; specifically, a connecting clamping groove 16 is formed in one end, connected with the first flat beam 13, of the second flat beam 14, the depth of the connecting clamping groove 16 is equal to the width of the first flat beam 13, and the middle position of the first flat beam 13 is inserted into the connecting clamping groove 16 and is fixedly connected with the second flat beam 14.
The number of the third flat beams 21 can be two, the two third flat beams 21 are arranged in parallel, one end of each of the two third flat beams 21 is vertically fixed on the second connecting piece 23, and the other end of each of the two third flat beams 21 is vertically fixed on the third connecting piece 24; the number of the fourth flat beams 22 can also be two, two of the fourth flat beams 22 are arranged in parallel, one end of each of the two fourth flat beams 22 is vertically fixed on one side of the third connecting piece 24 away from the third flat beam 21, and the other end of each of the two fourth flat beams 22 is vertically fixed on the fourth connecting piece 25. The second connecting piece 23 is connected with the first connecting piece 15 through a buffer body 3, and the buffer body plays a role in reducing the coupling influence of moment on force; specifically, as shown in fig. 2, the diameter of the buffer body 3 is smaller than that of the second connection piece 23, and after the second connection piece 23 and the first connection piece 15 are connected through the buffer body 3, a certain gap exists between the first connection piece 15 and the second connection piece 23 at a non-connection part, and the gap can reduce the mutual influence of force and moment. The first connector 15, the second connector 23, the third connector 24 and the fourth connector 25 may be configured in a circular structure, and the fourth connector may be used for connecting with other external components, which will not be described in detail herein.
The number of the second flat beams is 4, and the second flat beams are uniformly distributed in the circumferential direction of the first connecting piece; two third flat beams 21 are parallel to two of the symmetrically arranged second flat beams 14 and two fourth flat beams 22 are parallel to the other two symmetrically arranged second flat beams 14.
As shown in fig. 3, the sensing element of the sensor adopts a single mode fiber in which 11 Fiber Bragg Gratings (FBGs) are connected in series, and the FBGs are adhered to corresponding flat beams, that is, the strain beams. Every 11 FBGs form a group, six groups are formed, and the six groups are used for measuring moment Mz, moment Mx, moment My, force Fz, force Fy and force Fx. The sticking positions of each group of FBGs are symmetrical relatively, the sticking mode adopts a full sticking mode, and the sticking positions are all located on the central axis position of the strain beam. Under the action of force and moment, the strain beams corresponding to the force and the moment generate equal-magnitude and opposite-direction strains, namely the corresponding FBGs also generate the same strain; specifically, the method comprises the following steps:
the two fourth flat beams 22 are respectively provided with a first fiber bragg grating FBG1 and an eleventh fiber bragg grating FBG11; the two third flat beams 21 are respectively provided with a second fiber bragg grating FBG2 and a tenth fiber bragg grating FBG10; a third fiber bragg grating FBG3 is arranged on one of the second flat beams 14; a fourth fiber bragg grating FBG4 is arranged on the first flat beam 13 connected with the second flat beam 14 provided with the third fiber bragg grating FBG3; a fifth fiber bragg grating FBG5 is arranged on the first flat beam 13 adjacent to the first flat beam 13 provided with the fourth fiber bragg grating FBG4; a sixth fiber bragg grating FBG6 is arranged at one end of the first flat beam 13 which is symmetrical to the first flat beam 13 provided with the fourth fiber bragg grating FBG4, and the sixth fiber bragg grating FBG6 and the fourth fiber bragg grating FBG4 are symmetrically arranged; a seventh fiber bragg grating FBG7 is arranged on the second flat beam 14 which is symmetrical to the second flat beam 14 provided with the third fiber bragg grating FBG3, and the seventh fiber bragg grating FBG7 and the third fiber bragg grating FBG3 are symmetrically arranged; the other end of the first flat beam 13 which is symmetrical to the first flat beam 13 provided with the fourth fiber bragg grating FBG4 is provided with an eighth fiber bragg grating FBG8; a ninth fiber bragg grating FBG9 is arranged on the first flat beam 13 which is symmetrical to the first flat beam 13 provided with the fifth fiber bragg grating FBG5, and the ninth fiber bragg grating FBG9 is symmetrical to the fifth fiber bragg grating FBG5;
specifically, the third fiber bragg grating and the fourth fiber bragg grating are a first group and are used for measuring the moment Mz; the fourth fiber Bragg grating and the sixth fiber Bragg grating are a second group and are used for measuring the moment Mx; the fifth fiber Bragg grating and the ninth fiber Bragg grating are a third group and are used for measuring the moment My; the fourth fiber Bragg grating and the eighth fiber Bragg grating are in a fourth group and are used for measuring force Fz; the second fiber Bragg grating and the tenth fiber Bragg grating are a fifth group and are used for measuring force Fy; the first fiber Bragg grating and the eleventh fiber Bragg grating are a sixth group and are used for measuring force Fx;
under the action of force and moment, the flat beam generates strain, the fiber Bragg grating on the flat beam generates the same strain, and the strain enables the central wavelength of the fiber Bragg grating to shift so as to realize the measurement of the force and the moment; and performing differential calculation on the wavelength offset of each group of fiber Bragg gratings, and then measuring the force and the moment.
The first fiber bragg grating FBG1, the second fiber bragg grating FBG2, the third fiber bragg grating FBG3, the fourth fiber bragg grating FBG4, the fifth fiber bragg grating FBG5, the sixth fiber bragg grating FBG6, the seventh fiber bragg grating FBG7, the eighth fiber bragg grating FBG8, the ninth fiber bragg grating FBG9, the tenth fiber bragg grating FBG10 and the eleventh fiber bragg grating FBG11 are serially connected together through an optical fiber.
Specifically, the principle of the sensor sensing force and moment method in this implementation is as follows:
under the action of force and moment, the flat beam generates strain, the FBG generates the same strain along with the strain, the central wavelength of the FBG is shifted by the strain, and the force and moment are measured by virtue of the certain linear relation between the wavelength shift of the FBG and the force and moment.
The wavelengths of the six groups of FBGs generate corresponding offsets under the action of force and moment, and the first group of FBGs has the wavelength offset of lambda 1 And λ 2 The second group FBG wavelength offset is lambda 3 And λ 5 The third FBG wavelength offset is lambda 4 And λ 6 And the fourth group of FBGs has a wavelength offset of lambda 5 And λ 7 The fifth FBG wavelength offset is lambda 8 And λ 9 The sixth FBG wavelength offset is lambda 10 And λ 11 . And carrying out differential calculation on the wavelength offset of each group of FBGs to eliminate the interference existing between the force and the moment, realize temperature self-compensation and eliminate the influence of temperature change on the wavelength. Wherein λ is 2 -λ 1 For measuring moments Mz, λ 5 -λ 3 For measuring moments Mx, λ 6 -λ 4 For measuring moments My, λ 7 -λ 5 For measuring forces Fz, λ 9 -λ 8 For measuring forces Fy, λ 11 -λ 10 For measuring the force Fz.
Example 2:
the present embodiment provides a working method of a fiber grating six-dimensional force sensor, which adopts the fiber grating six-dimensional force sensor described in embodiment 1, and includes:
measuring moments in Mx, my and Mz directions and measuring forces in the Fz direction by using a first elastic body 1 comprising a circular elastic body 11, a first flat beam 13 and a second flat beam 14; with the second elastic body 2 including the third flat beam 21 and the fourth flat beam 22, measurement of forces in both Fx and Fy directions is performed. Specifically, the third fiber bragg grating and the seventh fiber bragg grating form a group and are used for measuring the moment Mz; the fourth fiber Bragg grating and the sixth fiber Bragg grating form a group and are used for measuring the moment Mx; the fifth fiber Bragg grating and the ninth fiber Bragg grating are in a group and are used for measuring the moment My; the fourth fiber Bragg grating and the eighth fiber Bragg grating are in a group and are used for measuring force Fz; the second fiber Bragg grating and the tenth fiber Bragg grating form a group and are used for measuring force Fy; the first fiber Bragg grating and the eleventh fiber Bragg grating are in a group and are used for measuring force Fx;
under the action of force and moment, the flat beam generates strain, the fiber Bragg grating on the flat beam generates the same strain, and the strain enables the center wavelength of the fiber Bragg grating to shift so as to realize the measurement of force moment; and performing differential calculation on the wavelength offset of each group of fiber Bragg gratings, and then measuring the force and the moment.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and those skilled in the art can make various modifications and variations. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present embodiment shall be included in the protection scope of the present embodiment.
Claims (10)
1. The fiber grating six-dimensional force sensor is characterized by comprising a first elastic body and a second elastic body;
the first elastic body comprises a circular elastic body, a plurality of accommodating cavities are formed in the inner wall of the circular elastic body, and a first flat beam is fixed in each accommodating cavity; a second flat beam is vertically fixed on each first flat beam, and the plane where the first flat beam is located is vertical to the plane where the second flat beam is located; one ends of all the second flat beams, which are far away from the first flat beam, are connected to a first connecting piece together;
the second elastic body comprises a plurality of third flat beams which are vertically connected with the annular elastic body through the first connecting piece, and one end, far away from the first connecting piece, of each third flat beam is vertically connected with a plurality of fourth flat beams.
2. The fiber grating six-dimensional force sensor according to claim 1, wherein the accommodating cavity is a rectangular groove, and two ends of the first flat beam are respectively fixed on inner walls of two ends of the rectangular groove; the number of the accommodating cavities is four, and the four accommodating cavities are uniformly formed in the inner wall of the annular elastic body.
3. The fiber grating six-dimensional force sensor according to claim 1, wherein the plane of the first flat beam is parallel to or coincident with the plane of the annular elastic body.
4. The fiber grating six-dimensional force sensor according to claim 3, wherein a connecting clamping groove is formed at one end of the second flat beam connected with the first flat beam, the depth of the connecting clamping groove is equal to the width of the first flat beam, and the middle position of the first flat beam is inserted into the connecting clamping groove and fixedly connected with the second flat beam.
5. The fiber grating six-dimensional force sensor as claimed in claim 1, wherein there are two third flat beams, two third flat beams are disposed in parallel, one end of each of the two third flat beams is vertically fixed on the second connecting member, and the other end of each of the two third flat beams is vertically fixed on the third connecting member; the number of the fourth flat beams is two, the two fourth flat beams are arranged in parallel, one ends of the two fourth flat beams are vertically fixed on one side, far away from the third flat beam, of the third connecting piece, and the other ends of the two fourth flat beams are vertically fixed on the fourth connecting piece.
6. The fiber grating six-dimensional force sensor according to claim 5, wherein the second connecting member is connected to the first connecting member through a buffer body; after the second connecting piece and the first connecting piece are connected through the buffer body, a certain gap exists at the non-connecting part between the first connecting piece and the second connecting piece.
7. The fiber grating six-dimensional force sensor according to claim 5, wherein the number of the second flat beams is 4, and the second flat beams are uniformly distributed on the circumference of the first connecting piece; the two third flat beams are parallel to two symmetrically arranged second flat beams, and the two fourth flat beams are parallel to the other two symmetrically arranged second flat beams; the second flat beam is vertically fixed in the middle of the first flat beam, and each first flat beam is divided into two symmetrical parts.
8. The fiber grating six-dimensional force sensor according to claim 7, wherein a first fiber bragg grating and an eleventh fiber bragg grating are respectively disposed on the two fourth flat beams; the two third flat beams are respectively provided with a second fiber Bragg grating and a tenth fiber Bragg grating; a third fiber Bragg grating is arranged on one second flat beam; a fourth fiber Bragg grating is arranged on the first flat beam connected with the second flat beam provided with the third fiber Bragg grating; a fifth fiber Bragg grating is arranged on the first flat beam adjacent to the first flat beam provided with the fourth fiber Bragg grating; a sixth fiber Bragg grating is arranged at one end of the first flat beam which is symmetrical to the first flat beam provided with the fourth fiber Bragg grating, and the sixth fiber Bragg grating and the fourth fiber Bragg grating are symmetrically arranged; a seventh fiber Bragg grating is arranged on the second flat beam which is symmetrical to the second flat beam provided with the third fiber Bragg grating, and the seventh fiber Bragg grating and the third fiber Bragg grating are symmetrically arranged; the other end of the first flat beam, which is symmetrical to the first flat beam provided with the fourth fiber Bragg grating, is provided with an eighth fiber Bragg grating; a ninth fiber bragg grating is arranged on the first flat beam which is symmetrical to the first flat beam provided with the fifth fiber bragg grating, and the ninth fiber bragg grating is symmetrical to the fifth fiber bragg grating;
the first fiber bragg grating, the second fiber bragg grating, the third fiber bragg grating, the fourth fiber bragg grating, the fifth fiber bragg grating, the sixth fiber bragg grating, the seventh fiber bragg grating, the eighth fiber bragg grating, the ninth fiber bragg grating, the tenth fiber bragg grating and the eleventh fiber bragg grating are connected in series through optical fibers.
9. A method for operating a fiber grating six-dimensional force sensor, wherein the fiber grating six-dimensional force sensor according to any one of claims 1 to 8 is used, comprising:
measuring moments in Mx, my and Mz directions and measuring force in the Fz direction by using a first elastic body comprising a circular elastic body, a first flat beam and a second flat beam; the measurement of the forces in both Fx and Fy directions is performed using a second elastic body comprising a third flat beam and a fourth flat beam.
10. The working method of the fiber bragg grating six-dimensional force sensor according to claim 9, wherein the third fiber bragg grating and the seventh fiber bragg grating are in a group for measuring the moment Mz; the fourth fiber Bragg grating and the sixth fiber Bragg grating form a group and are used for measuring the moment Mx; the fifth fiber Bragg grating and the ninth fiber Bragg grating form a group and are used for measuring the moment My; the fourth fiber Bragg grating and the eighth fiber Bragg grating form a group and are used for measuring the force Fz; the second fiber Bragg grating and the tenth fiber Bragg grating are in a group and are used for measuring force Fy; the first fiber Bragg grating and the eleventh fiber Bragg grating are in a group and are used for measuring force Fx;
under the action of force and moment, the flat beam generates strain, the fiber Bragg grating on the flat beam generates the same strain, and the strain enables the central wavelength of the fiber Bragg grating to shift so as to realize the measurement of the force and the moment; and performing differential calculation on the wavelength offset of each group of fiber Bragg gratings, and then measuring the force and the moment.
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