CN115435101A - Large electrically-driven rectangular vacuum gate valve and motion control method - Google Patents
Large electrically-driven rectangular vacuum gate valve and motion control method Download PDFInfo
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- CN115435101A CN115435101A CN202211365724.7A CN202211365724A CN115435101A CN 115435101 A CN115435101 A CN 115435101A CN 202211365724 A CN202211365724 A CN 202211365724A CN 115435101 A CN115435101 A CN 115435101A
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- 230000007246 mechanism Effects 0.000 claims description 61
- 238000007789 sealing Methods 0.000 claims description 32
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- 230000001360 synchronised effect Effects 0.000 claims description 8
- 230000009471 action Effects 0.000 claims description 3
- 230000008602 contraction Effects 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
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- RCKMWOKWVGPNJF-UHFFFAOYSA-N diethylcarbamazine Chemical compound CCN(CC)C(=O)N1CCN(C)CC1 RCKMWOKWVGPNJF-UHFFFAOYSA-N 0.000 claims description 3
- 230000002441 reversible effect Effects 0.000 claims description 3
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
- F16K3/186—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams by means of cams of wedge from
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
- F16K37/0083—For recording or indicating the functioning of a valve in combination with test equipment by measuring valve parameters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M9/00—Aerodynamic testing; Arrangements in or on wind tunnels
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/05—Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Fluid Mechanics (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
The invention provides a large electrically-driven rectangular vacuum gate valve and a motion control method.
Description
Technical Field
The invention relates to the field of pneumatic test equipment, in particular to a large-scale electrically-driven rectangular vacuum gate valve and a motion control method.
Background
In pneumatic test equipment, some tests need to be carried out in a large vacuum cavity, and the vacuum degree in the vacuum cavity is maintained by means of the suction effect of an injection system. The area of an airflow channel of the vacuum cavity is large, the airflow channel is rectangular, after the test is started, the vacuum gate valve needs to be opened at a high speed without impact, the vacuum gate valve needs to be closed at a high speed without impact after the test is finished, and the vacuum cavity is required to be sealed reliably after the vacuum gate valve is closed, so that the test result of the optical test equipment is not influenced. The traditional vacuum gate valve is small in caliber, a flow channel is generally circular, a high-pressure gas driving mode is adopted for realizing quick opening and closing, the opening and closing speed of the mode can meet the test requirement, but the vibration impact is very large, the service life is short, and the requirement of the test on impact-free high-speed opening and closing of the valve can not be met.
Disclosure of Invention
The invention aims to provide a technical scheme of a large electrically-driven rectangular vacuum gate valve and a motion control method aiming at the defects in the prior art, the scheme adopts a servo motor for driving and combines a specially developed motion control method, so that the high-speed impact-free opening and closing of the vacuum gate valve can be realized, the scheme is suitable for large-caliber vacuum gate valves, the test requirement of high-speed opening and closing is met, and the service life of equipment can be effectively prolonged.
The scheme is realized by the following technical measures:
a large-scale electrically-driven rectangular vacuum gate valve comprises a driving mechanism, a valve body, a connecting mechanism, a flow channel baffle, a sealing mechanism and a limiting block; an airflow channel is arranged on the side wall of the valve body; the driving mechanism is arranged at the top of the valve body; the flow channel baffle is arranged inside the valve body; the connecting mechanism connects the flow channel baffle with the driving mechanism; the sealing mechanism is arranged on the connecting mechanism; the limiting block is arranged inside the valve body; the driving mechanism can drive the connecting mechanism to do telescopic motion in the vertical direction; when the connecting mechanism moves downwards to the limit position, the sealing mechanism can seal the airflow channel of the valve body under the action of the limiting block, so that the air passage is closed; when the connecting mechanism moves upwards to the limit position, the position of the flow channel baffle is matched with the position of the airflow channel, and the open circuit of the air path is realized.
The scheme is preferably as follows: the connecting mechanism is a connecting rod.
The scheme is preferably as follows: the sealing mechanism comprises a swing rod, a sealing cover plate and a stop wheel; the swing rod is respectively movably connected with the connecting mechanism and the sealing cover plate; the stop wheel is arranged on the side surface of the sealing cover plate and is matched with the position of the limiting block; when the connecting mechanism moves upwards to the limit position, the sealing cover plate is in a free contraction state; when the connecting mechanism moves downwards to the limit position, the stop wheel contacts with the limiting block, so that the sealing cover plate is in an extending state, and the sealing cover plate can completely block the airflow channel of the valve body.
The scheme is preferably as follows: the driving mechanism comprises an alternating current servo motor, an electric cylinder and a motion control system; the alternating current servo motor can drive electric motion; the electric cylinder is connected with the connecting mechanism; the motion control system can control the work of the alternating current servo motor; the motion control system selects S7-1500T series of Siemens motion control series PLC, and configures a Profibus DP bus interface; the vacuum gate valve driving motor is provided with an absolute encoder.
A motion control method based on the vacuum gate valve is characterized by comprising the following steps: the method comprises the following steps:
a. presetting a valve opening and closing process, and creating a connecting rod motion curve graph;
b. and (3) creating a cam table through programming software, and constructing a cam curve to synchronize the motion curve graph of the control connecting rod with the cam curve.
The scheme is preferably as follows: in the step a, the opening and closing process of the valve is as follows:
and (3) valve closing process: starting a servo motor, firstly accelerating to enable the connecting rod to move downwards until the connecting rod reaches a specified speed, then decelerating until the speed is reduced to 0 when the stop wheel is positioned at a preset distance above the limiting block and the limiting block is contacted, and then moving at a trapezoidal speed until the connecting rod stops when extending out of the limiting position;
the valve opening process is the reverse motion of the valve closing process.
The scheme is preferably as follows: the concrete implementation method of the step b is as follows:
firstly, completing project configuration according to control system hardware equipment and network configuration;
two process objects are created in the control software design: one is a linear virtual axis as a driving axis; the other is a connecting rod shaft driven by an alternating current servo motor and used as a synchronous driven shaft, the shaft type is set as a linear shaft, a closed-loop position sensor adopts a motor absolute encoder, then a synchronous shaft is configured, a virtual shaft is used as a main shaft, and a valve core support plate shaft is used as a driven shaft;
creating a cam table by using a cam editor of a programming software process object, constructing a cam curve, and adding cam elements in graphs and tables; an electronic cam curve established by motion control is mainly based on a connecting rod motion curve graph, the motion range of the horizontal and vertical coordinates of the electronic cam curve selects the minimum position S1 of a valve to the full-open position S7, the positions S1 to S7 are the positions of inflection points of the corresponding speed of a connecting rod shaft when a virtual shaft moves at a constant speed, the transition part between cam elements is interpolated by using a B spline, the motion ranges of the virtual shaft and the connecting rod shaft are consistent, namely 0 to Sm, and the electronic cam curve is named camX after the cam is successfully established;
reading a current valve core support plate shaft position value, acquiring a virtual shaft position value corresponding to the current valve core support plate shaft position value on a cam camX relation curve by using an MC _ GetCamLeadingValue instruction, adopting an MC _ Power instruction, taking 1 for a parameter ENABLE, enabling the virtual shaft and the valve core support plate shaft, and positioning the virtual shaft to the corresponding position by using an MC _ MoveAbsolute instruction;
coupling the virtual axis and the valve core support plate axis by using an MC _ CamIn motion control command, starting a cam curve camX of the virtual axis and the valve core support plate axis, synchronizing the corresponding relation of cams camX between the virtual axis and the valve core support plate axis, and immediately starting synchronization by taking 3 as a parameter SyncProfileReference value;
when the valve is opened, the MC _ MoveAbsolute command is adopted to control the virtual axis so as to
The speed of/s moves from 0 to the Sm position; shut-off valveWhen the virtual axis is controlled by adopting the MC _ MoveAbsolute command to control the virtual axis
The speed of/s moves from Sm to the 0 position;
after the task is completed, the MC _ Power instruction is adopted, the ENABLE parameter is 0, and the virtual shaft and the connecting rod shaft are enabled.
The beneficial effects of the scheme can be known from the description of the scheme, because the scheme adopts an alternating-current servo valve synchronous motor driving mode, a motion control system and a virtual shaft through a sealing cover plate, a flow channel baffle plate, a swing rod, a connecting rod and a stop wheel motion mechanism, establishes a virtual shaft and valve core support plate shaft cam relation curve, and realizes high-speed vibration-free and impact-free opening and closing of the large-scale electrically-driven rectangular vacuum gate valve by adopting a master-slave linkage control mode.
Therefore, compared with the prior art, the invention has prominent substantive features and remarkable progress, and the beneficial effects of the implementation are also obvious.
Drawings
Fig. 1 is a schematic structural view of the valve of the present invention in an open state.
Fig. 2 is a schematic structural view of the valve of the present invention in a closed state.
Fig. 3 is a graph of the connecting rod movement.
Fig. 4 is a diagram of an electronic cam curve parameterization element selection point.
In the figure, 1 is an alternating current servo motor, 2 is an electric cylinder, 3 is a valve body, 4 is a sealing cover plate, 5 is a stop wheel, 6 is a swing rod, 7 is a connecting rod, 8 is a flow channel baffle, 9 is a limiting block, and 10 is an air flow channel.
Detailed Description
All of the features disclosed in this specification, or all of the steps in any method or process so disclosed, may be combined in any combination, except combinations of features and/or steps that are mutually exclusive.
Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
Example (b):
in this embodiment, the vacuum gate valve includes a driving mechanism, a valve body, a connecting mechanism, a flow channel baffle, a sealing mechanism and a limiting block; an airflow channel is arranged on the side wall of the valve body; the driving mechanism is arranged at the top of the valve body; the flow channel baffle is arranged inside the valve body; the connecting mechanism connects the flow channel baffle with the driving mechanism; the sealing mechanism is arranged on the connecting mechanism; the limiting block is arranged inside the valve body; the driving mechanism can drive the connecting mechanism to do telescopic motion in the vertical direction; when the connecting mechanism moves downwards to the limit position, the sealing mechanism can seal the airflow channel of the valve body under the action of the limiting block to close the air passage (as shown in fig. 2); when the connecting mechanism moves upwards to the limit position, the position of the flow channel baffle is matched with the position of the airflow channel, and an air path open circuit is realized (as shown in figure 1).
The connecting mechanism is a connecting rod.
The sealing mechanism comprises a swing rod, a sealing cover plate and a stop wheel; the swing rod is respectively movably connected with the connecting mechanism and the sealing cover plate; the stop wheel is arranged on the side surface of the sealing cover plate and is matched with the position of the limiting block; when the connecting mechanism moves upwards to the limit position, the sealing cover plate is in a free contraction state; when the connecting mechanism moves downwards to the limit position, the stop wheel contacts with the limiting block, so that the sealing cover plate is in an extending state, and the sealing cover plate can completely block the airflow channel of the valve body.
The driving mechanism comprises an alternating current servo motor, an electric cylinder and a motion control system; the alternating current servo motor can drive electric motion; the electric cylinder is connected with the connecting mechanism; the motion control system can control the work of the alternating current servo motor; the motion control system selects the S7-1500T series of Siemens motion control series PLC, a Profibus DP bus interface is configured, and the vacuum gate valve driving motor selects a 1FT series permanent magnet synchronous servo motor with compact Siemens structure and good dynamic response, and is provided with an absolute encoder for marking the valve switch position and participating in the speed and position control of the vacuum gate valve.
The motion control method of the vacuum gate valve is characterized by comprising the following steps: the method comprises the following steps:
a. presetting the opening and closing process of a valve, and creating a connecting rod motion curve diagram (shown in figure 3);
b. the cam curve is constructed by programming software to create a cam table (see table 1) that synchronizes the control link motion profile with the cam curve.
In the step a, the opening and closing process of the valve is as follows:
and (3) valve closing process: the servo motor is started, firstly, the speed is increased to enable the connecting rod to move downwards until the connecting rod reaches the designated speed, then, the speed is reduced to 0 when the stopping wheel is positioned at the position above the limiting block at the preset distance until the stopping wheel is contacted with the limiting block, and then, the connecting rod stops when the connecting rod extends out of the limit position according to the trapezoidal speed.
The valve opening process is the reverse motion of the valve closing process.
The concrete implementation method of the step b is as follows:
firstly, completing project configuration according to control system hardware equipment and network configuration;
two process objects are created in the control software design: one is a linear virtual axis as the active axis; the other is a connecting rod shaft driven by an alternating current servo motor and used as a synchronous driven shaft, the shaft type is set as a linear shaft, a closed-loop position sensor adopts a motor absolute encoder, then a synchronous shaft is configured, a virtual shaft is used as a main shaft, and a valve core support plate shaft is used as a driven shaft;
creating a cam table by using a cam editor of a programming software process object, constructing a cam curve, and adding cam elements in graphs and tables; an electronic cam curve established by motion control is mainly based on a connecting rod motion curve graph, the motion range of the horizontal and vertical coordinates of the electronic cam curve selects a valve minimum position S1 to a full-open position S7, the positions S1 to S7 are positions of inflection points of corresponding speeds of a connecting rod shaft when an imaginary axis moves at a constant speed (point positions are selected as shown in figure 4), B-spline interpolation is adopted for transition parts among cam elements, the motion ranges of the imaginary axis and the connecting rod shaft are consistent, namely 0 to Sm, and the electronic cam curve is named as camX after the cam is successfully established;
reading a current valve core support plate axis position value, obtaining a virtual axis position value corresponding to the current valve core support plate axis position value on a cam camX relation curve by using an MC _ GetCamLeadingValue instruction, adopting an MC _ Power instruction, taking 1 for a parameter ENABLE, enabling the virtual axis and the valve core support plate axis, and adopting an MC _ MoveAbsolute instruction to position the virtual axis to the corresponding position;
coupling the virtual axis and the valve core support plate axis by using an MC _ CamIn motion control command, starting a cam curve camX of the virtual axis and the valve core support plate axis, synchronizing the corresponding relation of the cam camX between the virtual axis and the valve core support plate axis, and immediately starting synchronization by taking 3 as a parameter SyncProfileReference value;
when the valve is opened, the MC _ MoveAbsolute command is adopted to control the virtual axis so as to
The speed of/s moves from 0 to the Sm position; when the valve is closed, the MC _ MoveAbsolute command is adopted to control the virtual axis so as to
The speed of/s moves from Sm to the 0 position;
after the task is completed, the MC _ Power instruction is adopted, the ENABLE parameter is 0, and the virtual shaft and the connecting rod shaft are enabled.
TABLE 1 cam relationship Curve Table
| Name(s) | S1 | S2 | S3 | S4 | S5 | S6 | S7 |
| Virtual axis | 0 | Sx2 | Sx3 | Sx4 | Sx5 | Sx6 | Sm |
| Valve core support plate shaft | 0 | Sy2 | Sy3 | Sy4 | Sy5 | Sy6 | Sm |
The invention is not limited to the foregoing embodiments. The invention extends to any novel feature or any novel combination of features disclosed in this specification and any novel method or process steps or any novel combination of features disclosed.
Claims (7)
1. A large-scale electrically-driven rectangular vacuum gate valve is characterized in that: the valve comprises a driving mechanism, a valve body, a connecting mechanism, a flow channel baffle, a sealing mechanism and a limiting block; an airflow channel is arranged on the side wall of the valve body; the driving mechanism is arranged at the top of the valve body; the flow channel baffle is arranged inside the valve body; the connecting mechanism connects the flow channel baffle with the driving mechanism; the sealing mechanism is arranged on the connecting mechanism; the limiting block is arranged inside the valve body; the driving mechanism can drive the connecting mechanism to do telescopic motion in the vertical direction; when the connecting mechanism descends to the limit position, the sealing mechanism can seal the airflow channel of the valve body under the action of the limiting block, so that the air path is closed; when the connecting mechanism moves upwards to the limit position, the position of the flow channel baffle is matched with the position of the airflow channel, and the open circuit of the air path is realized.
2. A large electrically driven rectangular vacuum gate valve according to claim 1, characterized in that: the connecting mechanism is a connecting rod.
3. A large electrically driven rectangular vacuum gate valve as claimed in claim 1, wherein: the sealing mechanism comprises a swing rod, a sealing cover plate and a stop wheel; the swing rod is movably connected with the connecting mechanism and the sealing cover plate respectively; the stop wheel is arranged on the side surface of the sealing cover plate and is matched with the position of the limiting block; when the connecting mechanism moves upwards to the limit position, the sealing cover plate is in a free contraction state; when the connecting mechanism moves downwards to the limit position, the stop wheel contacts with the limiting block, so that the sealing cover plate is in an extending state, and the sealing cover plate can completely block the airflow channel of the valve body.
4. A large electrically driven rectangular vacuum gate valve as claimed in claim 1, wherein: the driving mechanism comprises an alternating current servo motor, an electric cylinder and a motion control system; the alternating current servo motor can drive electric motion; the electric cylinder is connected with the connecting mechanism; the motion control system can control the work of the alternating current servo motor; the motion control system selects S7-1500T series of Siemens motion control series PLC and configures a Profibus DP bus interface; the vacuum gate valve driving motor is provided with an absolute encoder.
5. A motion control method of a large electrically-driven rectangular vacuum gate valve based on claim 1 is characterized in that: the method comprises the following steps:
a. presetting a valve opening and closing process, and creating a connecting rod motion curve graph;
b. and (3) creating a cam table through programming software, and constructing a cam curve to synchronize the motion curve graph of the control connecting rod with the cam curve.
6. The method of claim 5, further comprising: in the step a, the opening and closing process of the valve is preset as follows:
and (3) a valve closing process: starting a servo motor, firstly accelerating to enable the connecting rod to move downwards until the connecting rod reaches a specified speed, then decelerating until the speed is reduced to 0 when the stop wheel is positioned at a preset distance above the limiting block and the stop wheel is contacted with the limiting block, and then moving at a trapezoidal speed until the connecting rod stops when extending out of the limiting position;
the valve opening process is the reverse motion of the valve closing process.
7. The method of claim 5, wherein: the specific implementation method of the step b is as follows:
firstly, completing project configuration according to control system hardware equipment and network configuration;
two process objects are created in the control software design: one is a linear virtual axis as the active axis; the other is a connecting rod shaft driven by an alternating current servo motor and used as a synchronous driven shaft, the shaft type is set to be a linear shaft, a closed-loop position sensor adopts a motor absolute encoder, then a synchronous shaft is configured, a virtual shaft is used as a main shaft, and a valve core support plate shaft is used as a driven shaft;
creating a cam table by using a cam editor of a programming software process object, constructing a cam curve, and adding cam elements in graphs and tables; an electronic cam curve established by motion control is mainly based on a connecting rod motion curve graph, the motion range of the horizontal and vertical coordinates of the electronic cam curve selects the minimum position S1 of a valve to the full-open position S7, the positions S1 to S7 are the positions of inflection points of the corresponding speed of a connecting rod shaft when a virtual shaft moves at a constant speed, the transition part between cam elements is interpolated by using a B spline, the motion ranges of the virtual shaft and the connecting rod shaft are consistent, namely 0 to Sm, and the electronic cam curve is named camX after the cam is successfully established;
reading a current valve core support plate shaft position value, acquiring a virtual shaft position value corresponding to the current valve core support plate shaft position value on a cam camX relation curve by using an MC _ GetCamLeadingValue instruction, adopting an MC _ Power instruction, taking 1 for a parameter ENABLE, enabling the virtual shaft and the valve core support plate shaft, and positioning the virtual shaft to the corresponding position by using an MC _ MoveAbsolute instruction;
coupling the virtual axis and the valve core support plate axis by using an MC _ CamIn motion control command, starting a cam curve camX of the virtual axis and the valve core support plate axis, synchronizing the corresponding relation of the cam camX between the virtual axis and the valve core support plate axis, and immediately starting synchronization by taking 3 as a parameter SyncProfileReference value;
when the valve is opened, the MC _ MoveAbsolute command is adopted to control the virtual axis so as to
The speed of/s moves from 0 to the Sm position; when the valve is closed, the MC _ MoveAbsolute command is adopted to control the virtual axis so as to
The speed of/s moves from Sm to the 0 position;
after the task is completed, an MC _ Power instruction is adopted, and the ENABLE parameter is taken as 0, so that the virtual shaft and the connecting rod shaft are disabled.
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| CN202211365724.7A CN115435101B (en) | 2022-11-03 | 2022-11-03 | Large electrically-driven rectangular vacuum gate valve and motion control method |
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| CN202211365724.7A CN115435101B (en) | 2022-11-03 | 2022-11-03 | Large electrically-driven rectangular vacuum gate valve and motion control method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115933523A (en) * | 2022-12-30 | 2023-04-07 | 临沂成盛精机制造有限公司 | Servo yarn guide system and synchronous motion control method and device thereof |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB430265A (en) * | 1934-01-04 | 1935-06-17 | H W Aitken Company Ltd | Improvements in valves |
| JPH09269072A (en) * | 1996-01-31 | 1997-10-14 | Benkan Corp | Non-slide gate valve for semiconductor manufacturing apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115933523A (en) * | 2022-12-30 | 2023-04-07 | 临沂成盛精机制造有限公司 | Servo yarn guide system and synchronous motion control method and device thereof |
| CN115933523B (en) * | 2022-12-30 | 2024-02-23 | 临沂成盛精机制造有限公司 | Synchronous motion control method and device for servo yarn guiding system and servo yarn guiding system |
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|---|---|
| CN115435101B (en) | 2023-02-28 |
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Effective date of registration: 20231025 Address after: 621000 No.6, 2nd Ring Road, Fucheng District, Mianyang City, Sichuan Province Patentee after: Institute of equipment design and test technology, China Aerodynamics Research and Development Center Address before: 621000 No.6, south section of the Second Ring Road, Fucheng District, Mianyang City, Sichuan Province Patentee before: Institute of equipment design and test technology, China Aerodynamics Research and Development Center Patentee before: SICHUAN JIUTIAN VACUUM TECHNOLOGY Co.,Ltd. |