CN115430268A - SF6 waste gas water-cooled dielectric barrier discharge treatment device and method - Google Patents
SF6 waste gas water-cooled dielectric barrier discharge treatment device and method Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
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- B01D53/40—Acidic components
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- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Abstract
The invention relates to an SF6 waste gas water-cooled dielectric barrier discharge treatment device, which comprises a degradation treatment system and an air inlet system for constant flow air inlet of the degradation treatment system, wherein the degradation treatment system comprises a water-cooled dielectric barrier discharge reactor, a plasma power supply, a liquid circulation system, an alkali liquor gas washing device and a liquid storage tank, the water-cooled dielectric barrier discharge reactor comprises a dielectric barrier discharge area, the dielectric barrier discharge area is connected with the plasma power supply, the dielectric barrier discharge area is divided into a gas circulation area and a liquid circulation area by an insulating medium from inside to outside, the gas circulation area is connected with the alkali liquor gas washing device, and the liquid circulation area is connected with the liquid storage tank and the liquid circulation system. The invention takes flowing liquid as a low-voltage electrode, and the liquid circularly flows through the liquid circulating system, so that heat generated by a discharge area can be taken away, thereby avoiding overheating of the discharge area, and enabling the temperature of the electrode and the discharge area to be in a temperature range capable of achieving optimal energy efficiency.
Description
Technical Field
The invention belongs to the field of waste gas treatment, and relates to an SF6 waste gas water-cooled dielectric barrier discharge treatment device and method.
Background
SF6 is an artificially synthesized gas, has good electrical performance, arc extinguishing performance and unique physical and chemical properties, is widely applied to industries such as electric power, metal smelting, semiconductor manufacturing and the like, and increases the exhaust emission and the concentration of SF6 in the atmosphere due to the huge use amount of the SF6 gas. While SF6 is a strong greenhouse gas, has 23900 times of potential value of greenhouse effect as CO2 in the time range of 100 years, is stable in the atmosphere, and is very necessary to control the emission of SF6 in order to relieve the influence of greenhouse effect on global climate.
An important means for controlling the discharge amount of SF6 is to degrade the SF6 exhaust gas, and the traditional SF6 degradation technologies include pyrolysis, thermal catalysis and photolysis, however, these methods have certain disadvantages and limitations, and for the existing SF6 degradation devices, the problem of SF6 discharge cannot be completely solved, and in the known patents, the main treatment mode is to recover and store SF 6.
At present, the known methods for degrading SF6 have more or less defects, and can not realize high degradation rate, high degradation energy consumption and product selectivity at the same time, and can only be partially realized. For example, in experiments and simulation studies on SF6 degradation by dielectric barrier discharge plasma, which are published in the chinese electro-mechanical engineering newspaper by zhang xian et al, university of wuhan, DBD processing technology is adopted to degrade SF6 in a quartz tube reactor, and through dilution and carrier gas addition of SF6, a degradation result of 90% or more is finally obtained, but the method has a good degradation effect, but has limitations on product processing, nontoxic discharge cannot be guaranteed, and continuous temperature rise in a discharge region during discharge causes overheating, and the temperature of the discharge region is not in a temperature range with optimal energy efficiency, so that degradation efficiency is reduced due to overhigh reactor temperature when SF6 exhaust gas is processed.
Disclosure of Invention
The invention aims to provide an SF6 waste gas water-cooled dielectric barrier discharge treatment device, which ensures non-toxic discharge and ensures that the temperature of a discharge area is in a temperature range with optimal energy efficiency.
In order to solve the technical problems, the invention is realized by the following technical scheme:
the utility model provides a SF6 waste gas water-cooled dielectric barrier discharge treatment device, includes the degradation processing system to and the air intake system who admits air for the constant flow of degradation processing system, the degradation processing system includes water-cooled dielectric barrier discharge reactor, plasma power, liquid circulation system, alkali lye gas washing device and liquid storage pot, water-cooled dielectric barrier discharge reactor includes that dielectric barrier discharges regionally, dielectric barrier discharges the regional plasma power of connecting, dielectric barrier discharges regional separating for the region of gas circulation and liquid circulation region from inside to outside by insulating medium, the regional alkali lye gas washing device of connecting of gas circulation, liquid circulation region connects liquid storage pot and liquid circulation system.
Preferably, the upper part and the lower part of the dielectric barrier discharge region are respectively connected and fixed through a first plastic cylinder and a second plastic cylinder.
Preferably, the gas circulation area comprises a first cylinder and a high-voltage electrode inserted in a center shaft of the first cylinder, and the high-voltage electrode is connected and fixed with the upper part and the lower part of the first cylinder through a first plastic cylinder and a second plastic cylinder respectively.
Preferably, the high-voltage electrode penetrates through the first plastic cylinder and the second plastic cylinder, a high-voltage electrode interface is arranged at the joint of the lower end of the high-voltage electrode and the outside, and the high-voltage electrode interface is connected with a plasma power supply.
Preferably, the high-voltage electrode is provided with threaded protrusions in the dielectric barrier discharge region, and the threaded protrusions are uniformly distributed along the axial direction of the high-voltage electrode.
Preferably, the first cylinder penetrates through the first plastic cylinder and the second plastic cylinder, and the connection parts of the upper part and the lower part of the first cylinder and the outside are respectively provided with an air inlet and an air outlet.
Preferably, the liquid flowing area comprises a second cylinder and is formed by a sealed hollow cylinder formed by the second cylinder and the outer wall of the first cylinder together, the liquid flowing area is filled with liquid, the liquid and a metal wire extending into the liquid flowing area together form a low-voltage electrode, the low-voltage electrode is connected with a plasma power supply through the metal wire, and a low-voltage electrode interface is arranged on the second cylinder.
Preferably, the outer wall of the second cylinder is provided with a liquid inlet hole and a liquid outlet hole, the liquid inlet hole and the liquid outlet hole are respectively connected with the liquid storage tank through pipelines, and a liquid circulation system is connected between the liquid inlet hole and the liquid storage tank.
Preferably, the air inlet system comprises an SF6 gas cylinder and an externally-added gas cylinder, the gas outlets of the externally-added gas cylinder and the SF6 gas cylinder are respectively connected with a flow meter in series through a gas pipe, and the gas outlets of the two flow meters are connected with the water-cooled dielectric barrier discharge reactor through the gas pipe.
A method for degrading and treating SF6 waste gas by adopting an SF6 waste gas water-cooled dielectric barrier discharge treatment device comprises the following steps:
s1, distributing gas, namely opening switch valves of an SF6 gas cylinder and an externally added gas cylinder, and respectively controlling different flow rates of the SF6 gas cylinder and the externally added gas through a flow meter to obtain mixed gas with a specific proportion, so that the SF6 gas and the externally added gas are fully mixed and stably input into a water-cooled dielectric barrier discharge reactor;
s2, cooling liquid circulation, namely opening a liquid circulation system, sucking liquid in a liquid storage tank into a liquid inlet hole of the water-cooled dielectric barrier discharge reactor by a pump, flowing the liquid absorbing heat generated by discharge into the liquid storage tank through a liquid outlet hole of the reactor for cooling, and continuously circulating to continuously transfer the heat generated by discharge of the water-cooled dielectric barrier discharge reactor so that the temperature of the water-cooled dielectric barrier discharge reactor can be maintained in a temperature range suitable for discharge;
s3, dielectric barrier discharge, wherein gas with a constant flow enters the water-cooled dielectric barrier discharge reactor through S1, a plasma power supply is turned on, discharge is generated between a high-voltage electrode and a low-voltage electrode, plasma is generated in a discharge area, SF6 waste gas is degraded through the discharge area, uniform threaded protrusions on the high-voltage electrode can increase the contact area between the electrode and the SF6 waste gas, and the degradation process of the SF6 waste gas is effectively promoted;
s4, tail gas treatment, wherein the decomposition products of the SF6 waste gas are introduced into an alkali liquor gas washing device along with a gas pipe, the alkali liquor gas washing device can absorb toxic acid gas products generated by decomposing the SF6 waste gas, and the absorbed gas is dried by a drying agent, so that the decomposition products can be further purified;
s5, the treated SF6 waste gas decomposition product can be collected through the gas collecting bag, and components of the decomposition product can be detected through detection equipment, so that the treatment effect is judged.
In conclusion, the invention has the advantages that:
1. the liquid which flows is used as a low-voltage electrode, and the liquid circularly flows through a liquid circulating system, so that heat generated by a discharge area can be taken away, the discharge area is prevented from being overheated, and the temperature of the electrode and the discharge area is in a temperature range which can reach the optimal energy efficiency;
2. the high-voltage electrode is provided with the thread bulge on the outer surface of the discharge area, so that the contact area of the electrode and the gas to be treated can be effectively increased, and the degradation efficiency is improved.
Drawings
FIG. 1 is a schematic flow diagram of the present invention;
FIG. 2 is a schematic structural diagram of a water-cooled dielectric barrier discharge reactor according to the present invention.
Reference numerals are as follows:
1. a water-cooled dielectric barrier discharge reactor; 2. a gas flow-through region; 3. a high voltage electrode; 31. a thread bulge; 4. a second cylinder; 5. a first cylinder; 6. a high voltage electrode interface; 7. a liquid inlet hole; 8. a liquid outlet hole; 9. an air inlet; 10. an air outlet; 11. a low voltage electrode interface; 12. a first plastic cylinder; 13. a second plastic cylinder; 14. a plasma power supply; 15. a liquid circulation system; 16. an alkali liquor gas washing device; 17. a liquid storage tank; 20. an SF6 gas cylinder; 21. an additional gas cylinder; 22. a flow meter.
Detailed Description
In order to more clearly explain the overall concept of the present invention, the present invention will be further explained with reference to the drawings and specific examples. It is to be understood that the following terms "upper," "lower," "left," "right," "longitudinal," "lateral," "inner," "outer," "vertical," "horizontal," "top," "bottom," and the like are used merely to indicate an orientation or positional relationship relative to one another as illustrated in the drawings, merely to facilitate describing and simplifying the invention, and are not intended to indicate or imply that the device/component so referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore are not to be considered limiting of the invention.
The SF6 waste gas water-cooled dielectric barrier discharge treatment device comprises a degradation treatment system and a gas inlet system for constant flow gas inlet of the degradation treatment system, wherein the degradation treatment system comprises a water-cooled dielectric barrier discharge reactor 1, a plasma power supply 14, a liquid circulation system 15, an alkali liquor gas washing device 16 and a liquid storage tank 17, the water-cooled dielectric barrier discharge reactor 1 comprises a dielectric barrier discharge area, the upper part and the lower part of the dielectric barrier discharge area are connected and fixed through a first plastic cylinder 12 and a second plastic cylinder 13 respectively, the dielectric barrier discharge area is connected with the plasma power supply 14, the dielectric barrier discharge area is divided into a gas circulation area 2 and a liquid circulation area from inside to outside, the gas circulation area 2 is connected with the alkali liquor gas washing device 16, and the liquid circulation area is connected with the liquid storage tank 17 and the liquid circulation system 15. The insulating medium material can be quartz glass, ceramic, alumina, rubber, plastic and other insulating materials or composites thereof.
The gas circulation area 2 comprises a first cylinder 5 and a high-voltage electrode 3 inserted in the center shaft of the first cylinder 5, wherein the high-voltage electrode 3 is connected and fixed with the upper part and the lower part of the first cylinder 5 through a first plastic cylinder 12 and a second plastic cylinder 13 respectively. The high-voltage electrode 3 penetrates through the first plastic cylinder 12 and the second plastic cylinder 13, a high-voltage electrode interface 6 is arranged at the connection part of the lower end of the high-voltage electrode 3 and the outside, and the high-voltage electrode interface 6 is connected with a plasma power supply 14; the first cylinder 5 penetrates through the first plastic cylinder 12 and the second plastic cylinder 13, and the air inlet 9 and the air outlet 10 are respectively arranged at the connection positions of the upper part and the lower part of the first cylinder 5 and the outside. Wherein, the high voltage electrode 3 is a metal rod, penetrates the whole water-cooled dielectric barrier discharge reactor 1, and can be made of conductive metals such as gold, silver, copper, iron, aluminum and the like or compounds thereof; the plasma power supply 14 types include power supplies in the form of high frequency ac sources, pulsed sources, etc., with a frequency range that covers the frequency required for the dielectric barrier discharge to occur.
In order to further improve the degradation efficiency, the high-voltage electrode 3 is provided with threaded protrusions 31 in the dielectric barrier discharge region, and the threaded protrusions 31 are uniformly distributed along the axial direction of the high-voltage electrode 3. The contact area of the high-voltage electrode 3 and the gas to be treated can be effectively increased by arranging the thread bulge 31, so that the degradation efficiency is improved.
The liquid circulation area comprises a second cylinder 4 and is formed by a sealed hollow cylinder formed by the second cylinder 4 and the outer wall of a first cylinder 5 together, the liquid circulation area is filled with liquid, the liquid is water or other conductive liquid, the liquid and a metal wire extending into the liquid jointly form a low-voltage electrode and is connected with a plasma power supply 14 through the metal wire, and the metal wire is made of conductive metal such as gold, silver, copper, iron, aluminum and the like or a compound thereof; the liquid is water or other conductive liquid; open on the outer wall of second cylinder 4 has feed liquor hole 7 and play liquid hole 8, and feed liquor hole 7 and play liquid hole 8 are located the left and right both sides of regional insulating medium outer wall of liquid circulation respectively to be central symmetry one on top of the other, feed liquor hole 7 and play liquid hole 8 are respectively through pipe connection liquid storage pot 17, it is equipped with liquid circulation system 15 to connect between feed liquor hole 7 and the liquid storage pot 17.
In order to realize constant flow gas supply, the gas inlet system comprises an SF6 gas cylinder 20 and an additional gas cylinder 21, the gas outlets 10 of the additional gas cylinder 21 and the SF6 gas cylinder 20 are respectively connected with a flow meter 22 in series through gas pipes, and the gas outlets 10 of the two flow meters 22 are connected with a water-cooled dielectric barrier discharge reactor 1 through gas pipes; SF6 waste gas and additional gas in a specific ratio are mixed in a gas pipe through a flow meter 22 and then enter the reactor, so that constant flow of gas entering the reactor is realized. Wherein, plus gas cylinder 21 and SF6 gas cylinder 20 are all from taking the relief pressure valve, and atmospheric pressure is 0.25MP stable value behind the relief pressure valve, thereby obtains specific proportion's mist through the different velocity of flow of flowmeter control SF6 respectively with plus gas, makes SF6 and plus gas can intensive mixing to inside inputting the reactor through air inlet 9 is stable, the flowmeter can realize the control of different gas flow, with the mist stable input to the reactor.
The invention also aims to provide a method for performing SF6 waste gas degradation treatment by adopting the SF6 waste gas water-cooled dielectric barrier discharge treatment device, which comprises the following steps:
s1, distributing gas, namely opening switch valves of an SF6 gas cylinder 20 and an externally-added gas cylinder, and respectively controlling different flow rates of SF6 and the externally-added gas through a flowmeter 22 to obtain mixed gas with a specific proportion, so that the SF6 and the externally-added gas are fully mixed and stably input into a water-cooled dielectric barrier discharge reactor 1;
s2, cooling liquid circulation, namely opening a liquid circulation system 15, sucking liquid in a liquid storage tank 17 into a liquid inlet hole 7 of the water-cooled dielectric barrier discharge reactor 1 by a pump, absorbing heat generated by discharge by the liquid and flowing into the liquid storage tank 17 through a liquid outlet hole 8 of the reactor for cooling, continuously circulating, and continuously transferring the heat generated by discharge of the water-cooled dielectric barrier discharge reactor 1 so that the temperature of the water-cooled dielectric barrier discharge reactor 1 can be maintained in a temperature range suitable for discharge;
s3, dielectric barrier discharge, wherein gas with a constant flow enters the water-cooled dielectric barrier discharge reactor 1 through S1, a plasma power supply 14 is turned on, discharge is generated between the high-voltage electrode 3 and the low-voltage electrode, plasma is generated in a discharge area, SF6 waste gas is degraded through the discharge area, uniform threaded protrusions on the high-voltage electrode 3 can increase the contact area between the electrode and the SF6 waste gas, and the degradation process of the SF6 waste gas is effectively promoted;
s4, tail gas treatment, wherein the decomposition products of the SF6 waste gas are introduced into an alkali liquor gas washing device 16 along with a gas pipe, the alkali liquor gas washing device 16 can absorb toxic acid gas products generated by decomposition of the SF6 waste gas, and the absorbed gas is dried by a drying agent, so that the decomposition products are further purified;
s5, the processed decomposition products of the SF6 waste gas can be collected through the gas collecting bag, and components of the decomposition products can be detected through detection equipment, so that the treatment effect can be judged.
Based on the steps, the one-time complete operation flow is as follows:
opening switch valves of an SF6 and an externally added gas cylinder, respectively controlling different flow rates of the SF6 and the externally added gas through a flowmeter 22 to obtain mixed gas with a specific proportion, and stably inputting the mixed gas into the reactor after the SF6 and the externally added gas are fully mixed; opening a liquid circulation system, pumping liquid in a liquid storage tank 17 into a liquid inlet hole 7 of the reactor, allowing the liquid absorbing heat generated by discharge to flow into the liquid storage tank 17 through a liquid outlet hole 8 of the reactor for cooling, continuously circulating, and continuously transferring the heat generated by the discharge of the reactor to maintain the temperature of the reactor in a temperature range suitable for the discharge; and turning on a plasma power supply, generating discharge between the high-voltage electrode 3 and the low-voltage electrode of the reactor to generate plasma, and allowing SF6 waste gas to pass through a discharge area to generate a degradation process under the action of the plasma. The uniform thread protrusions 3 on the high-voltage electrode can increase the contact area of the high-voltage electrode and SF6 waste gas, and effectively promote the degradation process of the SF6 waste gas;
SF6 waste gas decomposition product lets in into alkali lye gas washing device through gas outlet 10, and alkali lye gas washing device can absorb the poisonous acid gas product that SF6 decomposes the production, and the gaseous rethread desiccant after the absorption carries out drying process, and the gas after the drying is collected through the gas collection bag to accessible check out test set detects its composition, thereby judges the treatment effect.
The above steps of the method for degrading SF6 exhaust gas by water-cooled dielectric barrier discharge are only embodiments of the present invention, but the scope of the present invention is not limited thereto, and any modifications or substitutions that can be made by one skilled in the art within the technical scope of the present invention should be included in the scope of the present invention.
Other embodiments of the present invention than the preferred embodiments described above will be apparent to those skilled in the art from the present invention, and various changes and modifications can be made therein without departing from the spirit of the present invention as defined in the appended claims.
Claims (10)
1. The SF6 waste gas water-cooled dielectric barrier discharge treatment device is characterized in that: including degradation processing system to and the air intake system who admits air for degradation processing system steady flow, degradation processing system includes water-cooled dielectric barrier discharge reactor, plasma power, liquid circulation system, alkali lye gas washing device and liquid storage pot, water-cooled dielectric barrier discharge reactor includes that dielectric barrier discharges regionally, dielectric barrier discharges regionally and connects the plasma power, dielectric barrier discharges regionally from inside to outside and is separated for regional and the liquid circulation of gas flow for insulating medium regional, regional connection alkali lye gas washing device of gas flow, liquid circulation region connects liquid storage pot and liquid circulation system.
2. The SF6 waste gas water-cooled dielectric barrier discharge treatment device of claim 1, wherein: the upper part and the lower part of the dielectric barrier discharge area are respectively connected and fixed through a first plastic cylinder and a second plastic cylinder.
3. The SF6 exhaust water-cooled dielectric barrier discharge treatment device of claim 2, wherein: the gas circulation area comprises a first cylinder and a high-voltage electrode inserted into a center shaft of the first cylinder, and the high-voltage electrode and the upper part and the lower part of the first cylinder are connected and fixed through a first plastic cylinder and a second plastic cylinder respectively.
4. The SF6 waste gas water-cooled dielectric barrier discharge treatment device of claim 3, wherein: the high-voltage electrode penetrates through the first plastic cylinder and the second plastic cylinder, a high-voltage electrode interface is arranged at the joint of the lower end of the high-voltage electrode and the outside, and the high-voltage electrode interface is connected with a plasma power supply.
5. The SF6 waste gas water-cooled dielectric barrier discharge treatment device of claim 4, wherein: and thread-shaped bulges are arranged on the high-voltage electrode in the dielectric barrier discharge region and are uniformly distributed along the axial direction of the high-voltage electrode.
6. The SF6 exhaust water-cooled dielectric barrier discharge treatment device of claim 3, wherein: the first cylinder penetrates through the first plastic cylinder and the second plastic cylinder, and an air inlet and an air outlet are respectively formed in the connection positions of the upper part and the lower part of the first cylinder and the outside.
7. The SF6 waste gas water-cooled dielectric barrier discharge treatment device of claim 1, wherein: the liquid circulation area comprises a second cylinder and a sealed hollow cylinder formed by the second cylinder and the outer wall of the first cylinder together, the liquid circulation area is filled with liquid, the liquid and a metal wire extending into the liquid circulation area together form a low-voltage electrode and the low-voltage electrode is connected with a plasma power supply through the metal wire, and a low-voltage electrode interface is arranged on the second cylinder.
8. The SF6 waste gas water-cooled dielectric barrier discharge treatment device of claim 7, wherein: and a liquid inlet hole and a liquid outlet hole are formed in the outer wall of the second cylinder, the liquid inlet hole and the liquid outlet hole are respectively connected with the liquid storage tank through pipelines, and a liquid circulating system is connected between the liquid inlet hole and the liquid storage tank.
9. The SF6 waste gas water-cooled dielectric barrier discharge treatment device of claim 1, wherein: the gas inlet system comprises an SF6 gas cylinder and an external gas cylinder, gas outlets of the external gas cylinder and the SF6 gas cylinder are respectively connected with a flow meter in series through a gas pipe, and gas outlets of the two flow meters are connected with a water-cooled dielectric barrier discharge reactor through the gas pipe.
10. A method for performing SF6 exhaust gas degradation treatment by using the SF6 exhaust gas water-cooled dielectric barrier discharge treatment device according to any one of claims 1 to 9, comprising the steps of:
s1, distributing gas, namely opening switch valves of an SF6 gas cylinder and an externally added gas cylinder, and respectively controlling different flow rates of the SF6 gas cylinder and the externally added gas through a flow meter to obtain mixed gas with a specific proportion, so that the SF6 gas and the externally added gas are fully mixed and stably input into a water-cooled dielectric barrier discharge reactor;
s2, cooling liquid circulation, namely opening a liquid circulation system, sucking liquid in a liquid storage tank into a liquid inlet of the water-cooled dielectric barrier discharge reactor by a pump, flowing the liquid which absorbs heat generated by discharge into the liquid storage tank through a liquid outlet of the reactor for cooling, and continuously circulating to continuously transfer the heat generated by discharge of the water-cooled dielectric barrier discharge reactor so that the temperature of the water-cooled dielectric barrier discharge reactor can be maintained in a temperature range suitable for discharge;
s3, dielectric barrier discharge, wherein after S1, gas with a constant flow enters a water-cooled dielectric barrier discharge reactor, a plasma power supply is turned on, discharge is generated between a high-voltage electrode and a low-voltage electrode, plasma is generated in a discharge area, SF6 waste gas is degraded through the discharge area, uniform threaded protrusions on the high-voltage electrode can increase the contact area of the electrode and the SF6 waste gas, and the SF6 waste gas degradation process is effectively promoted;
s4, tail gas treatment, wherein the decomposition product of the SF6 waste gas is introduced into an alkali liquor gas washing device along with a gas pipe, the alkali liquor gas washing device can absorb the toxic acid gas product generated by decomposition of the SF6 waste gas, and the absorbed gas is dried by a drying agent, so that the decomposition product is further purified;
s5, the treated SF6 waste gas decomposition product can be collected through the gas collecting bag, and components of the decomposition product can be detected through detection equipment, so that the treatment effect is judged.
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