CN115421265A

CN115421265A - Objective stabilizer and optical machine

Info

Publication number: CN115421265A
Application number: CN202211053703.1A
Authority: CN
Inventors: 涂鑫; 邵金涛
Original assignee: Shenzhen Taiguyu Technology Co ltd
Current assignee: Shenzhen Taiguyu Technology Co ltd
Priority date: 2022-08-31
Filing date: 2022-08-31
Publication date: 2022-12-02

Abstract

The invention relates to the technical field of microscopic imaging, and particularly discloses an objective stabilizer and an optical machine, which comprise an adjusting sleeve, a fixed support and a vibration damping module, wherein the adjusting sleeve is provided with a through hole; the fixing support is provided with a mounting hole, the fixing support is used for fixing the objective lens in the mounting hole, and the fixing support penetrates through the through hole and is arranged at intervals with the adjusting sleeve; the vibration damping module comprises a radial vibration damping part and an axial vibration damping part, the radial vibration damping part is sleeved on the fixed support, the radial vibration damping part is fixedly connected with the adjusting sleeve and is abutted against the fixed support, and the radial vibration damping part has elasticity along the radial direction of the fixed support; axial damping portion has elasticity along the axial of fixed bolster along the axial one end and the fixed bolster butt of fixed bolster, other end and adjusting sleeve butt, axial damping portion. The objective stabilizer solves the problems that active vibration reduction is expensive in manufacturing cost, large in size, difficult to use in a small gene sequencer, quite limited in application range and long in response time.

Description

Objective stabilizer and optical machine

Technical Field

The invention relates to the technical field of microscopic imaging, in particular to an objective stabilizer and an optical machine.

Background

The mainstream gene sequencing technology in the market at present obtains gene sequence information by detecting and marking fluorescence, and the detection process utilizes a microscopic imaging technology. The microscopic imaging technology is that exciting light emitted by the lighting system is projected onto the biochip through the optical filter and the dichroic mirror, and fluorescence generated by the irradiation of laser on a sample of the biochip passes through the objective lens, the dichroic mirror, the tube lens and the optical filter and finally reaches the photoelectric sensor for imaging. The objective lens is the most important ring, and its position is critical to the imaging quality. When the objective lens is used for the gene sequencer with the automatic focusing system, the objective lens needs to continuously move up and down to search a focus point, vibration is generated in the process, and meanwhile, other equipment which always generates vibration is also included in the system, so that the whole gene sequencer can realize sampling of a biochip sample in an environment with vibration. In the face of a complex working environment, the objective lens must be fast and stable, and the end face of the objective lens and other optical mirror surfaces always guarantee a mounting angle, so that the actual requirements can be met.

Objective damping and adjusting device on the market are mostly active damping, and the sensor will monitor the deflection angle of objective promptly, feed back to control program, and control program is through a series of calculation output signal to control inside driver realizes the shock-absorbing function to objective, and this initiative shock-absorbing structure exists the cost height, and the structure is complicated, and is bulky difficult to be used for small-size gene sequencer, and the range of application is very limited, and the problem of response time ratio of a specified duration moreover.

Disclosure of Invention

The invention aims to: the objective stabilizer and the optical machine are provided to solve the problems that active vibration reduction in the related technology has high manufacturing cost, large volume, difficult application to a small gene sequencer, very limited application range and longer response time.

In one aspect, the present invention provides an objective lens stabilizer comprising:

the adjusting sleeve is provided with a through hole;

the fixing support is provided with a mounting hole and used for fixing the objective lens in the mounting hole, and the fixing support penetrates through the through hole and is arranged at intervals with the adjusting sleeve;

the vibration damping module comprises a radial vibration damping part and an axial vibration damping part, the radial vibration damping part is sleeved on the fixed support, the radial vibration damping part is fixedly connected with the adjusting sleeve and is abutted against the fixed support, and the radial vibration damping part has elasticity along the radial direction of the fixed support; the axial vibration reduction part is along the axial one end of fixed bolster with the fixed bolster butt, the other end with adjusting sleeve butt, axial vibration reduction part is along the axial of fixed bolster has elasticity.

As the preferred technical scheme of objective stabilizer, radial damping portion includes damping ring and a plurality of damping subassembly, damping ring interval cover is located fixed bolster and with the adjusting sleeve rigid coupling, it is a plurality of damping subassembly is followed the equal contained angle in circumference of damping ring set up in damping ring, damping subassembly is followed fixed bolster radially has elasticity.

As a preferred technical scheme of the objective lens stabilizer, a plurality of threaded holes are formed in the vibration reduction ring at equal included angles along the circumferential direction of the vibration reduction ring, and the axis of each threaded hole is consistent with the radial direction of the fixing support;

a plurality of damping subassembly one-to-one sets up in a plurality of in the screw hole, damping subassembly includes steel ball, radial spring and fastening screw, the steel ball with the fixed bolster butt, fastening screw with the screw hole spiro union, radial spring set up in the steel ball with between the fastening screw.

As a preferred technical scheme of the objective lens stabilizer, a first clip is arranged on the inner wall of the vibration reduction ring, a second clip is arranged on the fixing support, and when the fixing support is pulled out from one axial side of the vibration reduction ring to the other axial side, the first clip is clamped with the second clip;

the axial vibration reduction portion comprises an axial spring, the axial spring is sleeved on the fixed support and located on the other side of the vibration reduction ring, one end of the axial spring is fixedly connected with the fixed support, and the other end of the axial spring is fixedly connected with the adjusting sleeve.

As the preferred technical scheme of objective stabilizer, axial damping portion still includes spring cutting ferrule and nut, the spring cutting ferrule cover is located the fixed bolster and with the one end butt of axial spring, the nut with the fixed bolster spiro union and with the spring cutting ferrule keeps away from one side butt of axial spring.

As a preferred technical scheme of the objective lens stabilizer, the objective lens stabilizer further comprises an adjusting module, wherein the adjusting module comprises an adjusting seat and three radial adjusting bolts, and the adjusting seat is sleeved on the adjusting sleeve and is arranged at intervals with the adjusting sleeve;

the adjusting seat is provided with three radial adjusting threaded holes at equal angles along the circumferential direction, the axial lines of the radial adjusting threaded holes are respectively directional, the radial direction of the adjusting sleeve is three, the radial adjusting bolts are in one-to-one correspondence with the radial adjusting threaded holes and are in threaded connection with the radial adjusting threaded holes, and the radial adjusting bolts respectively penetrate through the corresponding radial adjusting threaded holes and are abutted against the adjusting sleeve.

As the preferred technical scheme of objective stabilizer, the adjusting module still includes three radial fastening bolt, adjusting sleeve is provided with three connecting plate along its circumference, the connecting plate has seted up the fixed orifices, and is three radial fastening bolt one-to-one passes threely the fixed orifices and respectively with adjust the seat spiro union, the diameter of fixed orifices is greater than the diameter of radial fastening bolt's double-screw bolt and be less than the diameter of radial fastening bolt's spiral shell head.

As the preferred technical scheme of objective stabilizer, adjusting module still includes base, reference part, stop screw, spacing spring and two axial adjusting bolt, the base cover is located adjusting sleeve, stop screw follows adjusting sleeve's axial is passed adjust the seat and with the base spiro union, stop spring cover is located stop screw and one end with stop screw's spiral shell head butt, the other end with adjust the seat butt, the reference part includes first benchmark and second benchmark, the reference part is located the base with adjust between the seat, first benchmark with the second benchmark respectively with the base with adjust the seat rigid coupling, first benchmark with the mutual butt of second benchmark and make the base with adjust the seat interval and set up, two axial adjusting bolt with adjust the seat spiro union and all with the base butt, two axial adjusting bolt with the contained angle between the reference part equals.

In a preferred embodiment of the objective lens stabilizer, a surface of the first reference in contact with the second reference is a spherical surface, and a surface of the second reference in contact with the first reference is a flat surface.

As a preferable technical scheme of the objective lens stabilizer, one end of the axial adjusting bolt, which is abutted with the base, is of a spherical structure;

the base is provided with first support piece and second support piece respectively, first support piece is provided with spherical recess, second support piece is provided with the spout, the spout is followed the circumference of base sets up, two axial adjusting bolt's spherical structure respectively with the cell wall of spherical recess with the cell wall butt of spout.

In another aspect, the present invention provides an optical machine including the objective lens stabilizer of any one of the above aspects, including:

the microscope comprises a base and a carrying platform, wherein the carrying platform is arranged on the base and is in sliding fit with the base, and the carrying platform is used for placing a piece to be measured;

the top plate and the base are arranged at intervals, and the carrying platform is positioned between the top plate and the base and arranged at intervals with the top plate;

the measuring assembly comprises a driver, an optical element integration device, an optical sleeve, an objective lens stabilizer and an objective lens, wherein the optical element integration device is arranged on the top plate, the optical axis of the optical element integration device is opposite to the measured piece, the optical sleeve is fixedly arranged on one side of the optical element integration device opposite to the carrying platform and is coaxial with the optical axis, the objective lens is slidably inserted into the optical sleeve, the objective lens stabilizer is sleeved on the objective lens and is fixedly connected with the objective lens, and the driver drives the objective lens stabilizer to move along the axial direction of the optical sleeve.

The invention has the beneficial effects that:

the invention provides an objective lens stabilizer, which comprises an adjusting sleeve, a fixed support and a vibration damping module, wherein the adjusting sleeve is provided with a through hole; the fixing support is provided with a mounting hole, the fixing support is used for fixing the objective lens in the mounting hole, and the fixing support penetrates through the through hole and is arranged at intervals with the adjusting sleeve; the vibration damping module comprises a radial vibration damping part and an axial vibration damping part, the radial vibration damping part is sleeved on the fixed support, the radial vibration damping part is fixedly connected with the adjusting sleeve and is abutted against the fixed support, and the radial vibration damping part has elasticity along the radial direction of the fixed support; the axial damping portion is along the axial one end and the fixed bolster butt of fixed bolster, and the other end and adjusting sleeve butt, and axial damping portion has elasticity along the axial of fixed bolster. The objective lens stabilizer fixes the objective lens in the mounting hole of the fixing support, when the objective lens stabilizing support moves, the axial shock absorption part has elasticity along the axial direction, the radial shock absorption part has elasticity along the radial direction, and then the shock absorption module can passively relieve the vibration of the objective lens along the axial direction and the radial direction. And further solves the problems of high cost, large volume, difficult application to a small gene sequencer, very limited application range and long response time of active vibration reduction.

Drawings

FIG. 1 is a first schematic view of an objective lens stabilizer according to an embodiment of the present invention;

FIG. 2 is a second schematic structural diagram of an objective lens stabilizer according to an embodiment of the present invention;

FIG. 3 is a cross-sectional view taken at B-B of FIG. 2;

FIG. 4 is a first schematic view (excluding the ocular and the fixing bracket) of the objective stabilizer according to the embodiment of the present invention;

FIG. 5 is a second schematic structural diagram of an objective lens stabilizer (excluding an eyepiece and a fixing bracket) according to an embodiment of the present invention;

FIG. 6 is a schematic structural view of a shock ring according to an embodiment of the present invention;

FIG. 7 is a schematic view of an adjusting base according to an embodiment of the present invention;

fig. 8 is a schematic structural diagram of an optical machine according to an embodiment of the present invention.

In the figure:

100. an objective lens; 200. a base; 300. carrying platform; 400. a top plate; 500. a driver; 600. an optical element integration device; 700. an optical sleeve; 800. a measured piece;

1. an adjustment sleeve; 11. a connecting plate; 111. a fixing hole;

2. fixing a bracket; 21. a second clip; 211. mounting a frame; 212. a lower mounting frame; 22. a gasket;

31. a radial vibration damping portion; 311. a vibration damping ring; 3111. a threaded hole; 3112. a first clip; 312. a vibration reduction assembly; 3121. a steel ball; 3122. a radial spring; 3123. a fastening screw;

321. an axial spring; 322. a spring card sleeve; 323. a nut;

4. an adjustment module; 41. an adjusting seat; 411. a radial adjustment threaded hole; 412. radial fastening bolts; 42. a radial adjustment bolt; 43. a base; 431. a first support member; 432. a second support member; 44. a reference member; 441. a first reference; 442. a second reference; 45. a limit screw; 46. a limiting spring; 47. and adjusting the bolt axially.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Where the terms "first position" and "second position" are two different positions, and where a first feature is "over", "above" and "on" a second feature, it is intended that the first feature is directly over and obliquely above the second feature, or simply means that the first feature is at a higher level than the second feature. "beneath," "under" and "beneath" a first feature includes the first feature being directly beneath and obliquely beneath the second feature, or simply indicating that the first feature is at a lesser elevation than the second feature.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

As shown in fig. 1 to 7, the present embodiment provides an objective lens stabilizer, which includes an adjusting sleeve 1, a fixing bracket 2 and a vibration damping module, wherein the adjusting sleeve 1 is provided with a through hole; the fixing support 2 is provided with a mounting hole, the fixing support 2 is used for fixing the objective lens 100 in the mounting hole, and the fixing support 2 is arranged in the through hole in a penetrating way and is spaced from the adjusting sleeve 1; the vibration damping module comprises a radial vibration damping part and an axial vibration damping part, the radial vibration damping part is sleeved on the fixed support 2, the radial vibration damping part is fixedly connected with the adjusting sleeve 1 and is abutted against the fixed support 2, and the radial vibration damping part has elasticity along the radial direction of the fixed support 2; axial damping portion along the axial one end and the 2 butt of fixed bolster 2 of fixed bolster, the other end and 1 butt of adjusting sleeve, axial damping portion has elasticity along the axial of fixed bolster 2. The objective lens stabilizer fixes the objective lens 100 in the mounting hole of the fixing support 2, when the objective lens 100 stabilizing support moves, the axial damping part has elasticity along the axial direction, and the radial damping part has elasticity along the radial direction, so that the damping module can passively alleviate the vibration of the objective lens 100 along the axial direction and the radial direction. And then the problems that the active vibration reduction has high manufacturing cost, large volume, difficult application to a small gene sequencer, very limited application range and longer response time are solved.

For the specific structure of the fixing support 2, optionally, the fixing support 2 includes a lower fixing frame and an upper fixing frame, the upper fixing frame is provided with an upper mounting hole, the lower fixing frame is provided with a lower mounting hole, and when the upper fixing frame and the lower fixing frame are screwed to each other, the upper mounting hole and the lower mounting hole are enclosed to form a mounting hole. When the eyepiece is installed, one end of the objective lens 100 extends into the lower installation hole, the other end of the objective lens 100 extends into the upper installation hole, and when the upper installation frame 211 and the lower installation frame 212 are screwed with each other, the eyepiece is fixed in the installation hole.

Specifically, the lower mounting hole is a truncated cone structure, after one end of the objective lens 100 abuts against the lower mounting hole, the objective lens 100 cannot continue to extend into the lower mounting hole, the upper mounting hole is provided with a stepped surface, the other end of the objective lens 100 is clamped with a gasket 22, when the other end of the objective lens 100 extends into the upper mounting hole, the gasket 22 abuts against the stepped structure of the upper mounting hole, and then the other end of the objective lens 100 is limited to continue to extend into the upper mounting hole. When the upper and lower holders are screwed to each other, the objective lens 100 is fixed in the mounting hole. In other embodiments, the upper and lower mounts may also be attachable to each other.

For the specific structure of the radial damping portion, optionally, the radial damping portion includes a damping ring 311 and a plurality of damping assemblies 312, the damping ring 311 is sleeved on the fixed bracket 2 at intervals and is fixedly connected with the adjusting sleeve 1, the plurality of damping assemblies 312 are arranged on the damping ring 311 along the circumferential direction of the damping ring 311 at equal included angles, and the damping assemblies 312 have elasticity along the radial direction of the fixed bracket 2. In this embodiment, the one end and the shock ring spiro union each other that the mount was kept away from to adjusting sleeve 1, in other embodiments, the one end and the shock ring that the mount was kept away from to adjusting sleeve 1 also can joint each other. The three damping components are arranged on the damping ring, the included angle between every two of the three damping components is 120 degrees, and the objective lens 100 can be damped in any direction of the horizontal plane through the arrangement.

For the specific structure of the damping assembly, optionally, the damping ring 311 is provided with a plurality of threaded holes 3111 at equal included angles along the circumferential direction of the damping ring 311, and the axis of the threaded hole 3111 is consistent with the radial direction of the fixing bracket 2; a plurality of damping subassembly 312 one-to-one sets up in a plurality of screw holes 3111, and damping subassembly 312 includes steel ball 3121, radial spring 3122 and fastening screw 3123, and steel ball 3121 and fixed bolster 2 butt, fastening screw 3123 and screw hole 3111 spiro union, and radial spring 3122 sets up between steel ball 3121 and fastening screw 3123. In this embodiment, steel ball 3121 and fixed bracket 2 are in point-to-point contact with each other, thereby preventing steel ball 3121 from interfering with the movement of fixed bracket 2. The spring is arranged between the steel ball 3121 and the fastening screw 3123, and the force of the radial spring 3122 acting on the steel ball can be adjusted by adjusting the position of the fastening screw 3123 in the threaded hole 3111.

As for the specific structure of the axial vibration damping portion, optionally, the inner wall of the vibration damping ring 311 is provided with a first clip 3112, the fixing bracket 2 is provided with a second clip 21, and when the fixing bracket 2 is pulled out from the direction from one axial side of the vibration damping ring 311 to the other axial side, the first clip 3112 is connected with the second clip 21 in a clamping manner; the axial vibration damping portion comprises an axial spring 321, the axial spring 321 is sleeved on the fixed support 2 and located on the other side of the vibration damping ring 311, one end of the axial spring 321 is fixedly connected with the fixed support 2, and the other end of the axial spring 321 is fixedly connected with the adjusting sleeve 1. In this embodiment, in order to prevent the fixing bracket 2 from being drawn out from the direction of the axial one side of the cushion ring pointing to the other side, the cushion ring and the fixing bracket 2 are respectively provided with the first clip 3112 and the second clip 21, when the fixing bracket 2 moves from the axial other side of the cushion ring to the direction of the one side, the first clip 3112 and the second clip 21 are separated from each other, and when the fixing bracket 2 moves from the axial one side of the cushion ring to the direction of the other side and the fixing bracket 2 is separated from the cushion ring soon, the first clip 3112 and the second clip 21 are clamped with each other. The axial damping part is arranged on the other side of the damping ring along the axial direction, one end of the axial spring 321 is fixedly connected with the fixed support 2, the other end of the axial spring 321 is fixedly connected with the adjusting sleeve 1, and the axial spring 321 can relieve the axial vibration of the objective lens 100 when the objective lens 100 is subjected to the axial vibration.

Optionally, the axial damping portion further includes a spring clamp sleeve 322 and a nut 323, the spring clamp sleeve 322 is sleeved on the fixing bracket 2 and abuts against one end of the axial spring 321, and the nut 323 is screwed with the fixing bracket 2 and abuts against one side of the spring clamp sleeve 322 far away from the axial spring 321. In this embodiment, the nut 323 is screwed with the fixing bracket 2 along the axial direction of the fixing bracket 2, and the relative position between the nut 323 and the fixing bracket 2 is adjusted by screwing the nut 323, so that the compressed amount of the axial spring 321 can be adjusted.

Optionally, the objective lens stabilizer further includes an adjusting module, the adjusting module includes an adjusting seat 41 and three radial adjusting bolts 42, and the adjusting seats 41 are all sleeved on the adjusting sleeve 1 and spaced from the adjusting sleeve 1; the adjusting seat 41 is provided with three radial adjusting threaded holes 411 at equal angles along the circumferential direction, the axes of the three radial adjusting threaded holes 411 respectively point to the radial direction of the adjusting sleeve 1, the three radial adjusting bolts 42 are in one-to-one correspondence with the three radial adjusting threaded holes 411 in a screwed connection, and the three radial adjusting bolts 42 respectively penetrate through the corresponding radial adjusting threaded holes 411 and abut against the adjusting sleeve 1. In this embodiment, three radial adjusting screw plugs are respectively screwed, so that the relative position of the adjusting sleeve 1 with respect to the adjusting base 41 can be adjusted, and the horizontal position of the objective lens 100 can be finely adjusted.

Optionally, the adjusting module further includes three radial fastening bolts 412, the adjusting sleeve 1 is provided with three connecting plates 11 along the circumferential direction thereof, the connecting plates 11 are provided with fixing holes 111, the three radial fastening bolts 412 penetrate through the three fixing holes 111 in a one-to-one correspondence manner and are respectively screwed with the adjusting seat 41, and the diameter of the fixing hole 111 is larger than the diameter of the stud of the radial fastening bolt 412 and smaller than the diameter of the head of the radial fastening bolt 412. In this embodiment, when the screw heads of the three radial fastening bolts 412 and the three corresponding connecting plates 11 are arranged at intervals, the adjusting sleeve can move relative to the adjusting seat 41 because the diameter of the fixing hole 111 is larger than the diameter of the stud of the radial fastening bolt 412 and smaller than the diameter of the screw head of the radial fastening bolt 412. When the heads of the three radial fastening bolts 412 are abutted against the three corresponding connecting plates 11 one by one, the adjusting sleeve is fixed relative to the adjusting seat 41.

Optionally, the adjusting module further includes a base 43, a reference member 44, a limit screw 45, a limit spring 46 and two axial adjusting bolts 47, the base 43 is sleeved on the adjusting sleeve 1, the limit screw 45 penetrates through the adjusting seat 41 along the axial direction of the adjusting sleeve 1 and is screwed with the base 43, the limit spring 46 is sleeved on the limit screw 45, one end of the limit spring abuts against a screw head of the limit screw 45, the other end of the limit spring abuts against the adjusting seat 41, the reference member 44 includes a first reference 441 and a second reference 442, the reference member 44 is located between the base 43 and the adjusting seat 41, the first reference 441 and the second reference 442 are respectively fixedly connected with the base 43 and the adjusting seat 41, the first reference 441 and the second reference 442 abut against each other and enable the base 43 and the adjusting seat 41 to be arranged at an interval, the two axial adjusting bolts 47 are screwed with the adjusting seat 41 and both abut against the base 43, and included angles between the two axial adjusting bolts 47 and the reference member 44 are equal. In this embodiment, when leveling the objective lens 100, the reference member 44 is used as a reference, and the first reference 441 and the second reference 442 abut against each other, so that the included angle between the first reference 441 and the second reference 442 can be changed, and the two axial adjusting bolts 47 are screwed, so that the objective lens 100 can be leveled. The stopper spring 46 applies a pressure to the adjustment base 41 in a direction approaching the base 43, so that the circumferential adjustment bolt is always in contact with the base 43, and the first reference 441 and the second reference 442 are always in contact with each other.

Optionally, the adjusting device further comprises an axial fastening bolt, the adjusting seat 41 is provided with an axial fastening threaded hole, the axial fastening threaded hole is opposite to the axial adjusting bolt 47, and the axial fastening bolt is in threaded connection with the axial fastening threaded hole and has two states of pressing the axial adjusting bolt 47 and setting the axial adjusting bolt 47 at an interval.

Alternatively, the surface of the first reference 441 and the second reference 442 contacting each other is a spherical surface, and the surface of the second reference 442 and the first reference 441 contacting each other is a flat surface. In this embodiment, the first standard 441 and the second standard 442 are arranged so as to abut against a surface, and when the angle between the first standard 441 and the second standard 442 is changed, no motion interference occurs between the first standard 441 and the second standard 442.

Alternatively, one end of the axial adjusting bolt 47 abutting against the base 43 is of a spherical structure; the base 43 is provided with a first support 431 and a second support 432 respectively, the first support 431 is provided with a spherical groove, the second support 432 is provided with a sliding groove, the sliding groove is arranged along the circumferential direction of the base 43, and the spherical structures of the two axial adjusting bolts 47 are abutted with the groove wall of the spherical groove and the groove wall of the sliding groove respectively. In this embodiment, when the axial adjusting bolt 47 corresponding to the first supporting member 431 is adjusted, the adjusting base 41 drives the other axial adjusting bolt 47 corresponding to the second supporting member 432 to slide relative to the base 43, so as to set the second supporting member 432 in the sliding slot, and the other axial adjusting bolt 47 can slide in the sliding slot.

As shown in fig. 8, the embodiment further provides an optical bench, which includes the objective lens stabilizer in the above solution, the optical bench includes a base 200, a carrier 300, a top plate 400 and a measuring assembly, the carrier 300 is disposed on the base 200 and is in sliding fit with the base 200, and the carrier 300 is used for placing a measured object 800; the top plate 400 is arranged at a distance from the base 200, and the carrier 300 is arranged between the top plate 400 and the base 200 at a distance from the top plate 400; the measuring assembly comprises a driver 500, an optical element integration device 600, an optical sleeve 700, an objective stabilizer and an objective lens 100, wherein the optical element integration device 600 is arranged on the top plate 400, an optical axis of the optical element integration device 600 is opposite to the measured object 800, the optical sleeve 700 is fixedly arranged on one side of the optical element integration device 600 opposite to the carrier 300, the optical sleeve 700 is coaxial with the optical axis, the objective lens 100 is slidably inserted into the optical sleeve 700, the objective lens stabilizer is sleeved on the objective lens 100 and fixedly connected with the objective lens 100, and the driver 500 drives the objective lens stabilizer to move along the axial direction of the optical sleeve 700. In this embodiment, the optical axes of the objective lens 100 and the optical element integrated device 600 can be coaxial by adjusting the objective lens stabilizer; meanwhile, the focal length between the objective lens 100 and the tested piece 800 can be adjusted through the driver 500; by adjusting the relative position of the stage 300 and the base 200, the stage 300 and the objective lens 100 can be made not to face each other, and the object 800 to be measured can be replaced and mounted, or by adjusting the relative position of the stage 300 and the base 200, the relative position between the objective lens 100 and the object 800 to be measured can be adjusted. Specifically, the top plate 400 and the base 200 are supported by a plurality of pillars.

It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. This need not be, nor should it be exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. An objective lens stabilizer, comprising:

the adjusting sleeve (1), the adjusting sleeve (1) is provided with a through hole;

the fixing support (2) is provided with a mounting hole, the fixing support (2) is used for fixing the objective lens (100) in the mounting hole, and the fixing support (2) penetrates through the through hole and is arranged at intervals with the adjusting sleeve (1);

the damping module comprises a radial damping part and an axial damping part, the radial damping part is sleeved on the fixed support (2), the radial damping part is fixedly connected with the adjusting sleeve (1) and is abutted against the fixed support (2), and the radial damping part has elasticity along the radial direction of the fixed support (2); the axial vibration reduction part is abutted against the fixed support (2) along one axial end of the fixed support (2), the other end of the axial vibration reduction part is abutted against the adjusting sleeve (1), and the axial vibration reduction part has elasticity along the axial direction of the fixed support (2).

2. The objective lens stabilizer according to claim 1, wherein the radial vibration reduction portion comprises a vibration reduction ring (311) and a plurality of vibration reduction assemblies (312), the vibration reduction ring (311) is sleeved on the fixing bracket (2) at intervals and is fixedly connected with the adjusting sleeve (1), the plurality of vibration reduction assemblies (312) are arranged on the vibration reduction ring (311) at equal included angles along the circumferential direction of the vibration reduction ring (311), and the vibration reduction assemblies (312) have elasticity along the radial direction of the fixing bracket (2).

3. The objective lens stabilizer according to claim 2, characterized in that the damping ring (311) is provided with a plurality of threaded holes (3111) at equal angles along the circumference of the damping ring (311), the axis of the threaded holes (3111) coinciding with the radial direction of the fixing bracket (2);

a plurality of damping subassembly (312) one-to-one sets up in a plurality of screw hole (3111), damping subassembly (312) include steel ball (3121), radial spring (3122) and fastening screw (3123), steel ball (3121) with fixed bolster (2) butt, fastening screw (3123) with screw hole (3111) spiro union, radial spring (3122) set up in steel ball (3121) with fastening screw (3123) between.

4. The objective lens stabilizer according to claim 2, characterized in that the inner wall of the damping ring (311) is provided with a first clip (3112), the fixing bracket (2) is provided with a second clip (21), and when the fixing bracket (2) is drawn out from one side of the damping ring (311) in the axial direction to the other side, the first clip (3112) is engaged with the second clip (21);

the axial vibration reduction part comprises an axial spring (321), the axial spring (321) is sleeved on the fixed support (2) and located on the other side of the vibration reduction ring (311), one end of the axial spring (321) is fixedly connected with the fixed support (2), and the other end of the axial spring (321) is fixedly connected with the adjusting sleeve (1).

5. The objective lens stabilizer according to claim 4, characterized in that the axial vibration reduction part further comprises a spring collar (322) and a nut (323), the spring collar (322) is sleeved on the fixing support (2) and abuts against one end of the axial spring (321), and the nut (323) is screwed with the fixing support (2) and abuts against one side of the spring collar (322) away from the axial spring (321).

6. The objective lens stabilizer according to claim 1, further comprising an adjusting module, wherein the adjusting module comprises an adjusting seat (41) and three radial adjusting bolts (42), and the adjusting seat (41) is sleeved on the adjusting sleeve (1) and spaced from the adjusting sleeve (1);

adjust seat (41) and be provided with three radial regulation screw hole (411) along circumference equidistance, it is three the axis of radial regulation screw hole (411) points to respectively the radial of adjusting sleeve (1), it is three radial adjusting bolt (42) one-to-one and three radial regulation screw hole (411) spiro union, it is three radial adjusting bolt (42) pass respectively correspond radial regulation screw hole (411) and with adjusting sleeve (1) butt.

7. The objective lens stabilizer according to claim 6, wherein the adjusting module further comprises three radial fastening bolts (412), the adjusting sleeve (1) is provided with three connecting plates (11) along the circumferential direction thereof, the connecting plates (11) are provided with fixing holes (111), the three radial fastening bolts (412) penetrate through the three fixing holes (111) in a one-to-one correspondence manner and are respectively screwed with the adjusting base (41), and the diameter of the fixing hole (111) is larger than the diameter of a stud of the radial fastening bolt (412) and smaller than the diameter of a screw head of the radial fastening bolt (412).

8. Objective stabilizer according to claim 6, characterized in that the adjustment module further comprises a base (43), a reference piece (44), a limit screw (45), a limit spring (46) and two axial adjustment bolts (47), the base (43) is sleeved on the adjusting sleeve (1), the limit screw (45) penetrates through the adjusting seat (41) along the axial direction of the adjusting sleeve (1) and is in threaded connection with the base (43), the limiting spring (46) is sleeved on the limiting screw (45), one end of the limiting spring is abutted against the screw head of the limiting screw (45), the other end of the limiting spring is abutted against the adjusting seat (41), the reference member (44) comprises a first reference (441) and a second reference (442), the reference member (44) is located between the base (43) and the adjustment seat (41), the first reference (441) and the second reference (442) are respectively fixedly connected with the base (43) and the adjusting seat (41), the first benchmark (441) and the second benchmark (442) are mutually abutted and enable the base (43) and the adjusting seat (41) to be arranged at intervals, the axial adjusting bolts (47) are in threaded connection with the adjusting seat (41) and are all abutted to the base (43), and included angles between every two axial adjusting bolts (47) and the benchmark pieces (44) are equal.

9. The objective lens stabilizer according to claim 8, wherein a surface of the first reference (441) abutting against the second reference (442) is a spherical surface, and a surface of the second reference (442) abutting against the first reference (441) is a flat surface.

10. The objective lens stabilizer according to claim 8, characterized in that one end of the axial adjusting bolt (47) abutting the base (43) is of a spherical structure;

the base (43) is provided with a first supporting piece (431) and a second supporting piece (432) respectively, the first supporting piece (431) is provided with a spherical groove, the second supporting piece (432) is provided with a sliding groove, the sliding groove is arranged along the circumferential direction of the base (43), and the spherical structures of the two axial adjusting bolts (47) are abutted to the groove wall of the spherical groove and the groove wall of the sliding groove respectively.

11. Optical bench comprising an objective lens stabilizer according to any of claims 1-10, comprising:

the device comprises a base (200) and a carrier (300), wherein the carrier (300) is arranged on the base (200) and is in sliding fit with the base (200), and the carrier (300) is used for placing a piece to be measured (800);

a top plate (400), wherein the top plate (400) and the base (200) are arranged at intervals, and the carrier (300) is positioned between the top plate (400) and the base (200) and arranged at intervals with the top plate (400);

the measuring assembly comprises a driver (500), an optical element integration device (600), an optical sleeve (700), an objective stabilizer and an objective (100), wherein the optical element integration device (600) is arranged on the top plate (400), the optical axis of the optical element integration device is opposite to the measured piece (800), the optical sleeve (700) is fixedly arranged on one side of the optical element integration device (600) opposite to the carrying platform (300), the optical sleeve (700) is coaxial with the optical axis, the objective (100) is slidably inserted into the optical sleeve (700), the objective stabilizer is sleeved on the objective (100) and fixedly connected with the objective (100), and the driver (500) drives the objective stabilizer to move along the axial direction of the optical sleeve (700).