CN115408334B - Recipe file management method, system, storage medium and computer - Google Patents
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Abstract
The invention provides a Recipe file management method, a system, a storage medium and a computer, wherein the method comprises the following steps: identifying the sheet number of a product to be detected, and acquiring a Recipe file name corresponding to the product to be detected according to the sheet number; generating a plurality of standard configuration file names according to the Recipe file name and a first configuration file downloading rule; inquiring a corresponding standard configuration file from the network terminal according to the standard configuration file name, and judging whether a difference exists between the standard configuration file and the original configuration of the local terminal of the machine; if the difference exists, downloading a corresponding standard configuration file based on the name of the standard configuration file, and replacing the original configuration file in the local end of the machine with the downloaded standard configuration file. The technical problems that in the prior art, the Recipe file management difficulty is high, and debugging is prone to making mistakes are solved.
Description
Technical Field
The present invention relates to the field of semiconductor integrated circuit technology, and in particular, to a Recipe file management method, system, storage medium, and computer.
Background
Recipe refers to a process in an industrial automation manufacturing process, and the Recipe may include the following information: a plurality of steps in the material processing process, values of various process parameters in each step, end conditions of each step, and the like.
At present, in the LED chip manufacturing industry, along with the product size is smaller and smaller, the multiplying power of the chip particle number under the same 4-inch wafer is increased, especially along with the mass production promotion of mini and micro products, in the LED chip manufacturing process flow, the number of measuring equipment required by a photoelectric testing link is more and more increased, the number of single-process machine tables reaches more than 1000, program Recipe files for controlling the machine table operation are too many, the management difficulty is higher, program parameter adjustment, updating and the like need to be set one by one machine table, the workload is large, the time consumption is long, errors and the inconsistency among the machine tables are easily caused, and the phenomenon of setting errors of individual machine tables is difficult to find.
Disclosure of Invention
Based on this, the invention aims to provide a Recipe file management method, a system, a storage medium and a computer, which are used for solving the technical problems that the Recipe file management difficulty is high and debugging is easy to make mistakes in the prior art.
The invention provides a Recipe file management method on the one hand, which comprises the following steps:
identifying a piece number of a product to be detected, and acquiring a Recipe file name corresponding to the product to be detected from a network terminal according to the piece number;
generating a plurality of standard configuration file names from the network terminal according to the Recipe file name according to a first configuration file downloading rule, wherein a file library in the network terminal comprises a machine general type file library and a machine non-general type file library, and the machine general type file library comprises a product general type file library and a product non-general type file library;
inquiring a corresponding standard configuration file from the network terminal according to the standard configuration file name, and judging whether a difference exists between the standard configuration file and the original configuration of the local terminal of the machine;
if the standard configuration file is different from the original configuration of the local end of the machine, downloading corresponding standard configuration files from the machine non-universal type file library and the product non-universal type file library based on the name of the standard configuration file, and replacing the original configuration file in the local end of the machine with the downloaded standard configuration file.
Preferably, the method further includes, before the step of identifying a piece number of a product to be tested and obtaining a Recipe file name corresponding to the product to be tested from a network according to the piece number:
downloading a standard general configuration file from the product general type file library periodically according to a second configuration file downloading rule;
and replacing the original general configuration file in the local end of the machine station with the downloaded standard general configuration file.
Preferably, the product general type file library comprises configuration files of document throwing path parameters and account authority parameters, and the product non-general type file library comprises configuration files of test condition parameters, photomask document parameters and setting document parameters; the machine non-universal type file library comprises configuration files of correction file parameters and machine hardware operation parameters.
Preferably, the total number of 13-bit codes of the Recipe file name, and the step of generating a plurality of standard configuration file names from the network according to the Recipe file name by using a first configuration file download rule specifically includes:
generating a standard configuration file name of the photomask file parameter according to the first 12-bit code number of the Recipe file name;
generating a standard configuration file name of the setting file parameter according to the first 7-bit code number of the Recipe file name;
generating a standard configuration file name of the machine hardware operating parameter according to the first 6-bit code number of the Recipe file name;
generating a standard configuration file name of the test condition parameter according to the number of the first 8-bit codes and the number of the last bit code of the Recipe file name;
and generating the standard configuration file name of the correction file parameter according to the first 8-bit code number of the test condition parameter name.
Preferably, before the step of replacing the original configuration file in the local end of the machine with the downloaded standard configuration file, the method further includes:
and prompting a tester in an alarm mode, and listing the difference on a display.
Preferably, the files in the network terminal can be modified in real time.
In another aspect, the present invention further provides a Recipe file management system, including:
the acquisition module is used for identifying the piece number of the product to be detected and acquiring the Recipe file name corresponding to the product to be detected from the network terminal according to the piece number;
the generating module is used for generating a plurality of standard configuration file names according to the Recipe file name and a first configuration file downloading rule from the network terminal, a file library in the network terminal comprises a machine general type file library and a machine non-general type file library, and the machine general type file library comprises a product general type file library and a product non-general type file library;
the comparison module is used for inquiring a corresponding standard configuration file from the network terminal according to the standard configuration file name and judging whether the standard configuration file is different from the original configuration of the local terminal of the machine;
and the updating module is used for downloading corresponding standard configuration files from the machine non-universal type file library and the product non-universal type file library based on the standard configuration file name and replacing the original configuration files in the local end of the machine with the downloaded standard configuration files if the standard configuration files are different from the original configuration files of the local end of the machine.
Preferably, the system further comprises:
the automatic acquisition module is used for periodically downloading a standard general configuration file from the product general type file library according to a second configuration file downloading rule;
and the automatic updating module is used for replacing the original general configuration file in the local end of the machine station with the downloaded standard general configuration file.
Preferably, the generating module comprises:
the first generation unit is used for generating a standard configuration file name of the photomask file parameter according to the first 12-bit code number of the Recipe file name;
the second generation unit is used for generating the standard configuration file name of the setting file parameter according to the first 7-bit code number of the Recipe file name;
a third generating unit, configured to generate a standard configuration file name of the machine hardware operating parameter according to the first 6-bit code number of the Recipe file name;
a fourth generating unit, configured to generate a standard configuration file name of the test condition parameter according to the number of the first 8-bit code and the number of the last bit code of the Recipe file name;
a fifth generating unit for generating the standard configuration file name of the correction file parameter according to the first 8-bit code number of the test condition parameter name
Preferably, the system further comprises:
and the alarm module is used for prompting a tester in an alarm mode and listing the difference on the display.
The present invention also proposes a readable storage medium on which a computer program is stored, which when executed by a processor implements the Recipe file management method as described above.
The invention also provides a computer, which comprises a memory, a processor and a computer program stored on the memory and capable of running on the processor, wherein the processor executes the program to realize the Recipe file management method.
According to the Recipe file management method, the system, the storage medium and the computer, automatic updating of the machines is achieved through a mode that one network end manages a plurality of machines in a unified mode, and the mode that one machine is communicated to modify the Recipe file is avoided.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a flowchart of a Recipe file management method according to a first embodiment of the present invention;
FIG. 2 is a flowchart of a Recipe file management method according to a second embodiment of the present invention;
FIG. 3 is a logic diagram of a second embodiment of the present invention for uploading a split file to a network;
FIG. 4 is a flowchart of downloading standard common configuration files from a product common type file library according to a second embodiment of the present invention;
FIG. 5 is a flowchart of downloading standard configuration files from a product non-generic type file library and a machine non-generic type file library according to a second embodiment of the present invention;
FIG. 6 is a diagram showing the structure of a Recipe file management system in a third embodiment of the present invention;
the following detailed description will further illustrate the invention in conjunction with the above-described figures.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Several embodiments of the invention are presented in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The embodiment of the invention aims to provide a Recipe file management method which is applied to the technical field of semiconductor integrated circuits. Specifically, in the field of semiconductor integrated circuits, as the processing fineness is higher and higher, the process is more and more complex, more and more information is contained in one Recipe, recipe parameters to be modified and added are increased, and after a first configuration file (new file) of a Recipe template is modified, all second configuration files (old files) of existing recipes corresponding to the Recipe template need to be modified. Specifically, one Recipe template may correspond to a plurality of existing recipes, and therefore, the second configuration file of each existing Recipe needs to be modified, and if the modification is performed manually, not only is the efficiency low, but also errors are easily caused due to human factors.
In order to solve the technical problems of the conventional Recipe file management method, the embodiment of the invention aims to provide a Recipe file management method which is used for parameter sharing and unique network end management among batch devices and the like, can be modified by one key, automatically updates all devices (thousands of devices), is convenient, fast, time-saving and labor-saving, solves the problem of error of anti-blocking personnel, and reduces the difficulty of personnel in managing the Recipe parameters of the batch devices.
Specifically, the Recipe file management method according to the embodiment of the present invention includes: identifying the piece number of a product to be detected, and acquiring a Recipe file name corresponding to the product to be detected from a network terminal according to the piece number; generating a plurality of standard configuration file names from the network terminal according to the Recipe file name according to a first configuration file downloading rule, wherein a file library in the network terminal comprises a machine general type file library and a machine non-general type file library, and the machine general type file library comprises a product general type file library and a product non-general type file library; inquiring a corresponding standard configuration file from the network terminal according to the standard configuration file name, and judging whether a difference exists between the standard configuration file and the original configuration of the local terminal of the machine; if the standard configuration file is different from the original configuration of the local end of the machine, downloading the corresponding standard configuration file from the machine non-universal type file library and the product non-universal type file library based on the standard configuration file name, and replacing the original configuration file in the local end of the machine with the downloaded standard configuration file. The method comprises the steps of realizing automatic updating of the machine stations through a mode that a network end manages a plurality of machine stations in a unified mode, avoiding the mode that one machine station is communicated to modify a Recipe file, specifically, firstly identifying the sheet number of a product to be detected, downloading a corresponding Recipe file name from the network end according to the sheet number, then generating a plurality of standard configuration file names from the network end according to a first configuration file downloading rule according to the Recipe file name, finally inquiring a corresponding standard configuration file from the network end according to the standard configuration file name, comparing the standard configuration file with an original configuration file of a local end of the machine station, judging whether a difference exists, if so, directly downloading and replacing the standard configuration file, so that the efficiency is high, errors are not prone to occur, and the technical problems that in the prior art, the Recipe file management difficulty is high, and debugging is prone to occur are solved.
Example one
Referring to fig. 1, a flowchart of a Recipe file management method according to a first embodiment of the present invention is shown, where the method includes:
step S101, identifying a piece number of a product to be detected, and acquiring a Recipe file name corresponding to the product to be detected from a network terminal according to the piece number;
specifically, different products to be tested have different chip numbers, the machine station obtains information of the products to be tested by scanning the bar codes, and the machine station obtains and generates corresponding Recipe program names from the network side based on process information recorded on the chip numbers.
Step S102, generating a plurality of standard configuration file names from the network terminal according to the Recipe file name by a first configuration file downloading rule, wherein a file library in the network terminal comprises a machine general type file library and a machine non-general type file library, and the machine general type file library comprises a product general type file library and a product non-general type file library;
specifically, after obtaining the Recipe file name, the corresponding standard configuration file may be obtained and downloaded from the network end through the configured network address, it should be noted that in this embodiment, the Recipe file name is not split into a plurality of standard configuration file names according to different function modules, but the network address based on the split standard configuration file name is used to query the corresponding standard configuration file in the network end, so that the Recipe file stored in the network end is also split, and each configuration file is stored in its corresponding file library. Therefore, the universal parameters of different machines share the unique network management, the configuration file is flexibly called, the occupied space of the network is small, and the working efficiency is greatly improved. The standard configuration file name includes the name of the test condition parameter, the mask file parameter, the setting file parameter, the positive file parameter and the machine hardware operation parameter.
Step S103, inquiring a corresponding standard configuration file from the network terminal according to the standard configuration file name, and judging whether a difference exists between the standard configuration file and the original configuration of the local terminal of the machine;
specifically, the original configuration file in the local end of the machine is compared with the standard configuration file queried in the network end, and if the two are not different, it indicates that the Recipe file of the current machine is correct, and no update or replacement is needed, otherwise, if a difference item exists between the standard configuration file and the original configuration file of the local end of the machine, the following step S104 is executed.
Step S104, if the standard configuration file is different from the original configuration of the local end of the machine, downloading the corresponding standard configuration file from the machine non-universal type file library and the product non-universal type file library based on the standard configuration file name, and replacing the original configuration file in the local end of the machine with the downloaded standard configuration file.
Specifically, in practical application, the modification process can be executed by a computer without manual participation, so that the process of manually modifying existing Recipe files of a machine table one by one is avoided, and the Recipe parameter processing efficiency can be improved; in addition, the risk caused by misoperation in the manual modification process can be reduced, and the accuracy of Recipe parameter processing can be improved.
In this embodiment, batch equipment isoparametric sharing unionization network end management can be revised by a key, and all equipment (thousands of) are automatic to be updated, convenient swift again, labour saving and time saving, and prevent stifled personnel error problem, have reduced the personnel to the management degree of difficulty of the Recipe parameter of equipment in batches.
In summary, in the Recipe file management method in the above embodiment of the present invention, a manner of uniformly managing a plurality of machines through a network end is used to implement automatic update of the machines, and a manner of uniformly managing a plurality of machines to modify a Recipe file is avoided.
Example two
Referring to fig. 2 to 5, a Recipe file management method according to a second embodiment of the present invention includes:
s11, identifying the piece number of a product to be detected, and acquiring a Recipe file name corresponding to the product to be detected from a network terminal according to the piece number;
specifically, different products to be tested have different chip numbers, the machine station obtains information of the products to be tested by scanning the bar codes, and the machine station obtains and generates corresponding Recipe program names from the network side based on process information recorded on the chip numbers.
Step S12, generating a plurality of standard configuration file names from the network end according to the Recipe file name by a first configuration file downloading rule, wherein a file library in the network end comprises a machine general type file library and a machine non-general type file library, and the machine general type file library comprises a product general type file library and a product non-general type file library;
specifically, after the Recipe file name is obtained, the corresponding standard configuration file may be obtained and downloaded from the network side through the configured network address, it should be noted that, in this embodiment, the corresponding configuration file is not queried in the network side based on the Recipe file name, but the obtained Recipe file name is first split into a plurality of standard configuration file names according to the difference of the function module, and then the corresponding standard configuration file is queried in the network side based on the network address of the split standard configuration file name, so that the Recipe file stored in the network side is also split, and each configuration file is stored in its corresponding file library. Therefore, the universal parameters of different machines share the unique network management, the configuration file is flexibly called, the occupied space of the network is small, and the working efficiency is greatly improved. The standard configuration file name includes the name of the test condition parameter, the mask file parameter, the setting file parameter, the positive file parameter and the machine hardware operation parameter.
Step S13, inquiring a corresponding standard configuration file from the network terminal according to the name of the standard configuration file, and judging whether the standard configuration file is different from the original configuration of the local terminal of the machine;
specifically, the original configuration file in the local end of the machine is compared with the standard configuration file queried in the network end, and if the two are not different, it indicates that the Recipe file of the current machine is correct, and no update or replacement is needed, otherwise, if a difference item exists between the standard configuration file and the original configuration file of the local end of the machine, the following step S14 is executed.
Step S14, if the standard configuration file is different from the original configuration of the local end of the machine, downloading the corresponding standard configuration file from the file library of the type not commonly used by the machine and the file library of the type not commonly used by the product based on the name of the standard configuration file, and replacing the original configuration file in the local end of the machine with the downloaded standard configuration file.
Specifically, in practical application, the modification process can be executed by a computer without manual participation, so that the process of manually modifying existing Recipe files of a machine table one by one is avoided, and the Recipe parameter processing efficiency can be improved; in addition, the risk caused by misoperation in the manual modification process can be reduced, and the accuracy of Recipe parameter processing can be improved.
In this embodiment, batch equipment isoparametric sharing unionization network end management can be revised by a key, and all equipment (thousands of) are automatic to be updated, convenient swift again, labour saving and time saving, and prevent stifled personnel error problem, have reduced the personnel to the management degree of difficulty of the Recipe parameter of equipment in batches.
Further, the method before the step of identifying the piece number of the product to be tested and obtaining the Recipe file name corresponding to the product to be tested from the network according to the piece number further comprises:
downloading a standard general configuration file from the product general type file library periodically according to a second configuration file downloading rule;
and replacing the original general configuration file in the local end of the machine station with the downloaded standard general configuration file.
Specifically, referring to fig. 4, for the files common to both the machine and the product, because the change frequency is not high, it is not necessary to set the operation to be called every time, but the file is checked and replaced by setting a proper frequency according to the actual situation, for example, every day or every week.
Specifically, the product general type file library comprises configuration files of a document throwing path parameter and an account number authority parameter, and the product non-general type file library comprises configuration files of a test condition parameter, a photomask document parameter and a setting document parameter; the machine non-universal type file library comprises configuration files of correction file parameters and machine hardware operation parameters.
Wherein, the SettingPathFile (throwing file path) can adjust the data throwing position of the machine operation by updating the file;
a logic (account number authority) including a function opening authority corresponding to a machine three-level account number, such as a production authority, an engineer authority, a highest administrator authority and the like; the file contains account numbers and passwords of different personnel, and remote updating can be realized by modifying the file;
TestItemList (test condition), whose internal parameters mainly include: testing condition time, upper and lower limit alarm control of a test result, continuous NG alarm control, electrode direction, correction gear name and the like;
mapping, recording the coordinate file of the product photomask dots, and determining the positions of the dots of the wafer by the machine through the coordinate recording file;
parasetting, which includes jump test compensation setting, multi-channel test setting, wiring card control, probe life, needle grinding frequency, needle pressure setting, CCD image, wafer map on-line and off-line setting, etc.;
calibration data (calibration file) containing compensation values of large calibration Gain and Offset corresponding to photoelectric parameters of different product types and small calibration Gain and Offset along with wave band;
the PD files (hardware operating parameters of the machine) include a series of hardware operating parameters such as servo motor operating parameters and light source brightness.
In this embodiment, the total number of documents in the network is finally divided into 7 documents, the documents are placed in 7 different paths, after the documents are loaded, the documents are respectively called and compared through the different paths, and the positions of the documents are found through the machine number if the machines are not universal.
Further, the step of generating a plurality of standard configuration file names from the network end according to the Recipe file name by using a first configuration file download rule specifically includes:
generating a standard configuration file name of the photomask file parameter according to the first 12-bit code number of the Recipe file name;
generating a standard configuration file name of the setting file parameter according to the first 7-bit code number of the Recipe file name;
generating a standard configuration file name of the machine hardware operating parameter according to the first 6-bit code number of the Recipe file name;
generating a standard configuration file name of the test condition parameter according to the first 8-bit code number and the last one-bit code number of the Recipe file name;
and generating the standard configuration file name of the correction file parameter according to the first 8-bit code number of the test condition parameter name.
Referring to fig. 5 and the following tables 1 and 2, where table 1 shows the naming rule of the Recipe file Name, the Recipe file Name is 13 digits in total, and mainly comes from Product Model Name and Product NO, each digit has its meaning and represents different Product distinctions and distinctions of different manufacturing processes, and table 2 shows that one Recipe file Name is split into 5 different standard Recipe file names according to the first Recipe file downloading rule.
TABLE 1
TABLE 2
It can be understood that the configuration file can set the length of each file according to actual requirements, the name of the calling file is set by the configuration file to some characters in the Recipe full name, the number of files is reduced to the maximum, the purpose is to make the functional general as possible, it should be explained that the name of the standard general configuration file is not selected from 13 bits of the Recipe full name, but is stored in the network directly by human, that is, only the relevant information of the standard configuration file is recorded in the slice number.
Further, before the step of calling the corresponding Recipe file from the network to replace the difference item if the difference item exists between the standard configuration file and the original configuration of the local side of the equipment, the method further includes:
and prompting a tester in an alarm mode, and listing the difference on a display.
In this embodiment, the Recipe call logic is executed once before each wafer operation is started, that is, the Recipe call logic has the function of checking each wafer and prompting an abnormality, so that it is ensured that each product processing program is completely correct.
Further, files in the network can be modified in real time, specifically, the files are uploaded to the network through one key after a Recipe is established through one standard device, when other machines are called for use, one machine is not needed to be established, after a user modifies one parameter, the latest parameter can be updated through downloading comparison before the machine operation starts, personnel do not need to change the equipment one by one, and the remote updating function through one key is achieved.
In summary, in the Recipe file management method in the above embodiment of the present invention, a manner of uniformly managing a plurality of machines through a network end is used to implement automatic update of the machines, and a manner of uniformly managing a plurality of machines to modify a Recipe file is avoided.
EXAMPLE III
Referring to fig. 6, a Recipe file management system according to a third embodiment of the present invention is shown, including:
the acquiring module 10 is configured to identify a piece number of a product to be detected, and acquire a Recipe file name corresponding to the product to be detected from a network terminal according to the piece number;
a generating module 20, configured to generate a plurality of standard configuration file names according to the Recipe file name and a first configuration file downloading rule from the network end, where a file library in the network end includes a machine general type file library and a machine non-general type file library, and the machine general type file library includes a product general type file library and a product non-general type file library;
a comparison module 30, configured to query a corresponding standard configuration file from the network according to the standard configuration file name, and determine whether there is a difference between the standard configuration file and an original configuration of the local end of the machine;
an updating module 40, configured to download, if there is a difference between the standard configuration file and the original configuration of the local end of the machine, a corresponding standard configuration file from the machine non-generic type file library and the product non-generic type file library based on the standard configuration file name, and replace the original configuration file in the local end of the machine with the downloaded standard configuration file.
Preferably, the system further comprises:
the automatic acquisition module is used for periodically downloading a standard general configuration file from the product general type file library according to a second configuration file downloading rule;
and the automatic updating module is used for replacing the original general configuration file in the local end of the machine station with the downloaded standard general configuration file.
Preferably, the generating module comprises:
the first generation unit is used for generating a standard configuration file name of the photomask file parameter according to the first 12-bit code number of the Recipe file name;
the second generation unit is used for generating the standard configuration file name of the setting file parameter according to the first 7-bit code number of the Recipe file name;
a third generating unit, configured to generate a standard configuration file name of the machine hardware operating parameter according to the first 6-bit code number of the Recipe file name;
a fourth generating unit, configured to generate a standard configuration file name of the test condition parameter according to the number of the first 8-bit codes and the number of the last 8-bit codes of the Recipe file name;
a fifth generating unit for generating the standard configuration file name of the correction file parameter according to the first 8-bit code number of the test condition parameter name
Preferably, the system further comprises:
and the alarm module is used for prompting a tester in an alarm mode and listing the difference on a display.
In summary, in the Recipe file management system in the above embodiment of the present invention, a manner of uniformly managing a plurality of machines through a network end is used to implement automatic update of the machines, and a manner of uniformly managing a plurality of machines to modify a Recipe file is avoided.
Example four
The present invention also proposes a readable storage medium on which a computer program is stored, which when executed by a processor implements the Recipe file management method as described above.
The invention also provides a computer, which comprises a memory, a processor and a computer program stored on the memory and capable of running on the processor, wherein the processor executes the program to realize the Recipe file management method.
Those of skill in the art will understand that the logic and/or steps represented in the flowcharts or otherwise described herein, e.g., an ordered listing of executable instructions that can be viewed as implementing logical functions, can be embodied in any computer-readable medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, processor-containing system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For the purposes of this description, a "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device.
More specific examples (a non-exhaustive list) of the computer-readable medium would include the following: an electrical connection (electronic device) having one or more wires, a portable computer diskette (magnetic device), a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). Further, the computer-readable medium could even be paper or another suitable medium upon which the program is printed, as the program can be electronically captured, via for instance optical scanning of the paper or other medium, then compiled, interpreted or otherwise processed in a suitable manner if necessary, and then stored in a computer memory.
It should be understood that portions of the present invention may be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, various steps or methods may be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, any one or combination of the following technologies, which are well known in the art, may be used: a discrete logic circuit having a logic gate circuit for implementing a logic function on a data signal, an application specific integrated circuit having an appropriate combinational logic gate circuit, a Programmable Gate Array (PGA), a Field Programmable Gate Array (FPGA), or the like.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, and these are all within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (8)
1. A Recipe file management method, the method comprising:
identifying the piece number of a product to be detected, and acquiring a Recipe file name corresponding to the product to be detected from a network terminal according to the piece number;
generating a plurality of standard configuration file names from the network terminal according to the Recipe file name according to a first configuration file downloading rule, wherein a file library in the network terminal comprises a machine general type file library and a machine non-general type file library, and the machine general type file library comprises a product general type file library and a product non-general type file library;
inquiring a corresponding standard configuration file from the network terminal according to the name of the standard configuration file, and judging whether the standard configuration file is different from the original configuration of the local terminal of the machine;
if the standard configuration file is different from the original configuration of the local end of the machine, downloading corresponding standard configuration files from the machine non-universal type file library and the product non-universal type file library based on the standard configuration file name, and replacing the original configuration file in the local end of the machine with the downloaded standard configuration file;
the product universal type file library comprises configuration files of a document throwing path parameter and an account number authority parameter, and the product non-universal type file library comprises configuration files of a test condition parameter, a photomask document parameter and a setting document parameter; the machine non-universal type file library comprises configuration files of correction file parameters and machine hardware operation parameters;
the total 13-bit code number of the Recipe file name, and the step of generating a plurality of standard configuration file names from the network terminal according to the Recipe file name by using a first configuration file download rule specifically includes:
generating a standard configuration file name of the photomask file parameter according to the first 12-bit code number of the Recipe file name;
generating a standard configuration file name of the setting file parameter according to the first 7-bit code number of the Recipe file name;
generating a standard configuration file name of the machine hardware operating parameter according to the first 6-bit code number of the Recipe file name;
generating a standard configuration file name of the test condition parameter according to the number of the first 8-bit codes and the number of the last bit code of the Recipe file name;
and generating the standard configuration file name of the correction file parameter according to the first 8-bit code number of the test condition parameter name.
2. The Recipe file management method according to claim 1, wherein the method further includes, before the step of identifying a slice number of a product to be tested and obtaining a Recipe file name corresponding to the product to be tested from a network according to the slice number:
downloading a standard general configuration file from the product general type file library periodically according to a second configuration file downloading rule;
and replacing the original general configuration file in the local end of the machine station with the downloaded standard general configuration file.
3. The Recipe file management method according to claim 1, wherein before the step of replacing the original configuration file in the local side of the machine with the downloaded standard configuration file, the method further comprises:
and prompting a tester in an alarm mode, and listing the difference on a display.
4. The Recipe file management method according to claim 1, wherein the files in the network side can be modified in real time.
5. A Recipe file management system, the system comprising:
the acquisition module is used for identifying the piece number of the product to be detected and acquiring the Recipe file name corresponding to the product to be detected from the network terminal according to the piece number;
the generating module is used for generating a plurality of standard configuration file names from the network terminal according to the Recipe file name according to a first configuration file downloading rule, a file library in the network terminal comprises a machine general type file library and a machine non-general type file library, and the machine general type file library comprises a product general type file library and a product non-general type file library;
the comparison module is used for inquiring a corresponding standard configuration file from the network terminal according to the standard configuration file name and judging whether the standard configuration file is different from the original configuration of the local terminal of the machine;
the updating module is used for downloading corresponding standard configuration files from the machine non-universal type file library and the product non-universal type file library based on the standard configuration file name if the standard configuration files are different from the original configuration of the local end of the machine, and replacing the original configuration files in the local end of the machine with the downloaded standard configuration files;
the product general type file library comprises configuration files of document throwing path parameters and account authority parameters, and the product non-general type file library comprises configuration files of test condition parameters, photomask document parameters and setting document parameters; the machine non-universal type file library comprises configuration files of correction file parameters and machine hardware operation parameters;
the generation module comprises:
the first generation unit is used for generating a standard configuration file name of the photomask file parameter according to the first 12-bit code number of the Recipe file name;
the second generation unit is used for generating the standard configuration file name of the setting file parameter according to the first 7-bit code number of the Recipe file name;
a third generating unit, configured to generate a standard configuration file name of the machine hardware operating parameter according to the first 6-bit code number of the Recipe file name;
a fourth generating unit, configured to generate a standard configuration file name of the test condition parameter according to the number of the first 8-bit codes and the number of the last 8-bit codes of the Recipe file name;
and the fifth generating unit is used for generating the standard configuration file name of the correction file parameter according to the first 8-bit code number of the test condition parameter name.
6. The Recipe file management system according to claim 5, wherein the system further comprises:
the automatic acquisition module is used for periodically downloading a standard general configuration file from the product general type file library according to a second configuration file downloading rule;
and the automatic updating module is used for replacing the original general configuration file in the local end of the machine station with the downloaded standard general configuration file.
7. A readable storage medium on which a computer program is stored, which when executed by a processor implements the Recipe file management method according to any one of claims 1 to 4.
8. A computer comprising a memory, a processor and a computer program stored on the memory and executable on the processor, the processor implementing the Recipe file management method according to any one of claims 1 to 4 when executing the program.
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