CN115386949A - Transmission device of crucible for crystal growth and crystal growth equipment - Google Patents

Transmission device of crucible for crystal growth and crystal growth equipment Download PDF

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Publication number
CN115386949A
CN115386949A CN202211338247.5A CN202211338247A CN115386949A CN 115386949 A CN115386949 A CN 115386949A CN 202211338247 A CN202211338247 A CN 202211338247A CN 115386949 A CN115386949 A CN 115386949A
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CN
China
Prior art keywords
guide rail
crucible
straight line
accommodation space
sealing
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CN202211338247.5A
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Chinese (zh)
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CN115386949B (en
Inventor
曹建伟
朱亮
傅林坚
张俊
叶钢飞
倪军夫
吴虞超
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Zhejiang Qiushi Semiconductor Equipment Co Ltd
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Zhejiang Qiushi Semiconductor Equipment Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The application belongs to the technical field of crystal growth. The application discloses a transmission device of a crucible for crystal growth, which comprises a guide rail seat, a lifting frame, a crucible shaft, a first driving mechanism and a second driving mechanism; the outer side of the crucible shaft is provided with a sealing mechanism, the sealing mechanism is connected to the top of the guide rail seat, and the sealing mechanism comprises a shell, a guide piece and a sealing piece; the casing cover is established in the outside of crucible axle, forms first accommodation space and second accommodation space between casing and the crucible axle, and second accommodation space and first accommodation space intercommunication, upside and the downside of second accommodation space are located to first accommodation space, and during first accommodation space was located to the sealing member, the guide was located in the second accommodation space. The application also discloses crystal growth equipment which comprises the transmission device. The application provides a transmission of crucible for crystal growth has adopted mechanical seal mechanism to replace magnetic fluid sealing mechanism, has reduced manufacturing cost and the maintenance cost after leaking the silicon.

Description

Transmission device of crucible for crystal growth and crystal growth equipment
Technical Field
The invention relates to the technical field of crystal growth, in particular to a transmission device of a crucible for crystal growth and crystal growth equipment.
Background
The photovoltaic and semiconductor single crystal silicon rods are pulled by a single crystal furnace, crystal pulling raw materials are contained in a crucible, the raw materials need to rotate and lift in the crystal pulling process, and the rotation and lifting processes of the crucible and the raw materials are realized through a crucible transmission device in actual production. The rotation and lifting processes of the crucible are in a vacuum environment, so that vacuum sealing in the rotation and lifting processes is required.
The traditional crucible transmission device realizes rotary vacuum sealing through magnetic fluid.
However, in the actual production process, silicon leakage often occurs in the single crystal furnace, once the silicon leakage occurs, the magnetic fluid cannot bear the heat generated by the silicon leakage, and the magnetic fluid is damaged after the silicon leakage, so that the corresponding magnetic fluid component needs to be replaced. The traditional crucible transmission device has higher maintenance cost after silicon leakage occurs.
Disclosure of Invention
In order to solve the defects of the prior art, the invention aims to provide a transmission device of a crucible for crystal growth, which can simplify a sealing structure and reduce the later maintenance cost.
In order to achieve the purpose, the invention adopts the following technical scheme:
one aspect of the application provides a transmission device of a crucible for crystal growth, which comprises a guide rail seat, a lifting frame, a crucible shaft, a first driving mechanism and a second driving mechanism; the guide rail seat extends along the up-down direction; the lifting frame is at least partially connected to the guide rail seat in a sliding manner, and the lifting frame can move relatively along the guide rail seat; the crucible shaft penetrates through the top of the guide rail seat and is at least partially connected to the lifting frame, and the crucible shaft moves along with the lifting frame; one part of the first driving mechanism is connected to the lifting frame, the other part of the first driving mechanism is connected to the guide rail seat, and the first driving mechanism drives the lifting frame to perform linear motion along the guide rail seat; the second driving mechanism is at least partially connected to the crucible shaft and drives the crucible shaft to rotate; the outer side of the crucible shaft is provided with a sealing mechanism, the sealing mechanism is connected to the top of the guide rail seat, and the sealing mechanism comprises a shell, a guide piece and a sealing piece; the casing cover is established in the outside of crucible axle, forms first accommodation space and second accommodation space between casing and the crucible axle, and second accommodation space and first accommodation space intercommunication, the upside and the downside of second accommodation space are located to first accommodation space, and the sealing member is located in first accommodation space, and the guide is located in the second accommodation space.
Further, the shell comprises a first oil duct, the first oil duct is arranged on the inner side of the shell and connected to the second accommodating space, and the guide piece comprises a second oil duct which communicates the outer side of the guide piece with the inner side of the guide piece.
Further, the housing further includes a first oil hole that communicates the outside of the housing with the first oil passage.
Further, the top of second accommodation space includes at least two first accommodation spaces, and at least one first accommodation space is wrapped up to the below of second accommodation space, is equipped with the sealing member in the first accommodation space.
Further, the sealing element is a framework oil seal.
Furthermore, the transmission device also comprises a corrugated pipe, the corrugated pipe is sleeved outside the crucible shaft, and the corrugated pipe is connected to the top of the shell of the sealing mechanism.
Further, the guide rail seat comprises a first guide rail and a second guide rail, the first guide rail and the second guide rail are arranged on the inner side of the guide rail seat, one side of the lifting frame is connected to the first guide rail in a sliding mode, and the other side of the lifting frame is connected to the second guide rail in a sliding mode.
Furthermore, the axis of the first guide rail extends along a first straight line, the axis of the second guide rail extends along a second straight line, the axis of the crucible shaft extends along a third straight line, the first straight line, the second straight line and the third straight line are pairwise parallel, the first straight line, the second straight line and the third straight line are located in a first plane, and the distance between the first straight line and the third straight line is equal to the distance between the second straight line and the third straight line.
Further, the rail seat is arranged symmetrically with respect to the first plane.
Another aspect of the present application also provides a crystal growing apparatus comprising a crucible, the crystal growing apparatus further comprising a transmission device as described above, the top of the crucible shaft being connected to the crucible.
The application provides a transmission of crucible for crystal growth has adopted mechanical seal mechanism to replace the magnetic fluid sealing mechanism among the prior art, can reduce transmission's manufacturing cost, also can reduce the maintenance cost after leaking the silicon. The application provides a transmission has still adopted ordinary bellows to replace the plectrum bellows, has also reduced manufacturing cost and the maintenance cost after leaking the silicon. The utility model provides a transmission locates the coplanar with the axis of crucible axle and the axis of guide rail in the guide rail seat to locate the centre of two guide rail axes with the axis of crucible axle, can avoid appearing the problem of heeling behind the crucible axle load.
Drawings
FIG. 1 is a schematic diagram of a transmission in an implementation of the present application;
FIG. 2 is a schematic front view of a transmission in an implementation of the present application;
FIG. 3 is a schematic view of a structural combination of a crucible shaft and a sealing mechanism in an implementation of the present application;
FIG. 4 isbase:Sub>A schematic cross-sectional view taken along A-A of FIG. 3;
FIG. 5 is an enlarged schematic view at B in FIG. 4;
FIG. 6 is a schematic view of another embodiment of a transmission according to an embodiment of the present application
In the figure: the crucible lifting device comprises a transmission device 100, a guide rail seat 11, a first guide rail 111, a second guide rail 112, a lifting frame 12, a crucible shaft 13, a first driving mechanism 14, a second driving mechanism 15, a sealing mechanism 16, a shell 161, a first oil channel 1611, a first oil hole 1612, a guide piece 162, a second oil channel 1621, a sealing piece 163, a first accommodating space 164 and a second accommodating space 165; a first line 101, a second line 102, a third line 103, a first plane 104.
Detailed Description
In order to make the technical solution of the present invention better understood, the technical solution of the present invention in the specific embodiment will be clearly and completely described below with reference to the attached drawings in the embodiment of the present invention.
Fig. 1 shows an actuator 100 for a crucible for crystal growth, the actuator 100 including a rail base 11, a lifting frame 12, a crucible shaft 13, a first driving mechanism 14, a second driving mechanism 15, and a sealing mechanism 16. For convenience of illustration, in the present embodiment, front, rear, left, right, up, and down as shown in fig. 1 are also defined. As shown in fig. 2, the rail seat 11 forms a main body bracket of the transmission device 100, and other components are directly or indirectly connected to the rail seat 11, the rail seat 11 is substantially in a shape of' 20866, and the rail seat 11 comprises two vertical brackets and a connecting frame connected between the two brackets. Wherein the vertical direction refers to the up-down direction of the transmission 100. The guide rail seat 11 is further provided with a guide rail inside, and specifically, the guide rail is vertically arranged inside the bracket. The lifting frame 12 is connected to a guide rail inside the rail housing 11, and the lifting frame 12 can be moved along the guide rail. A part of the crucible shaft 13 is connected to the elevating frame 12, and the crucible shaft 13 can move with the movement of the elevating frame 12. Specifically, the lower portion of the crucible shaft 13 passes through the elevating frame 12 and is fixed to the elevating frame 12. As a conventional arrangement, the crucible shaft 13 is located at the lower part of the lifting frame 12, and a water inlet mechanism and a water outlet mechanism are arranged. The upper part of the crucible shaft 13 passes through the top of the guide rail seat 11 and is used for connecting the bottom of the crucible for crystal growth. During the crystal growth process, the crucible shaft 13 needs to drive the crucible to lift and rotate. The first driving device is used for driving the crucible shaft 13 to perform lifting movement. A part of the first drive mechanism 14 is connected to the lifting frame 12, another part of the first drive mechanism 14 is connected to the rail base 11, and the first drive mechanism 14 can drive the lifting frame 12 to move in the up-down direction with respect to the rail base 11. Since the lower portion of the crucible shaft 13 is connected to the elevating frame 12, the crucible shaft 13 can also move in the up-down direction with respect to the rail housing 11 by the first driving mechanism 14. The first driving mechanism 14 may be any linear driving device, specifically, a screw device connected to a motor, or a linear driving device such as an air cylinder. The second driving mechanism 15 is used for driving the crucible shaft 13 to perform a rotational motion. Specifically, the second driving mechanism 15 may be a motor-connected belt transmission mechanism, a gear transmission mechanism, a chain transmission mechanism, or the like.
As shown in fig. 3 and 4, the transmission device 100 further includes a sealing mechanism 16, and the sealing mechanism 16 is disposed on the outer side of the crucible shaft 13. The top of the sealing mechanism 16 is connected to the top of the rail seat 11, and the sealing mechanism 16 and the rail seat 11 are fixed in position and do not move mutually. As shown in fig. 4, the sealing mechanism 16 includes a housing 161, a guide 162, and a seal 163. As shown in fig. 5, the housing 161 is fitted around the crucible shaft 13, and a first accommodating space 164 and a second accommodating space 165 are formed between the housing 161 and the crucible shaft 13. Specifically, a plurality of first receiving spaces 164 are formed between the housing 161 and the crucible shaft 13, and a sealing member 163 is provided in each of the first receiving spaces 164. A second receiving space 165 is further formed between the adjacent first receiving spaces 164, and a guide 162 is provided in the second receiving space 165. That is, the guide 162 is disposed between a pair of adjacent sealing members 163, and the guide 162 is disposed to ensure concentricity between the crucible shaft 13 and the sealing members 163 during use, ensure sealing effect of the sealing mechanism 16, and prevent leakage. After the crucible shaft 13 bears the weight, the crucible shaft 13 may incline toward one side of the housing 161, so that the gap between the crucible shaft 13 and the housing 161 of the sealing mechanism 16 becomes uneven, and after the crucible shaft 13 inclines, the sealing element 163 at different positions receives different pressures from the crucible shaft 13, so that some areas of the sealing element 163 are deformed, and further, leakage is caused. The guide piece 162 is arranged between the crucible shaft 13 and the shell 161, so that the crucible shaft 13 cannot incline after bearing, a gap between the crucible shaft 13 and the shell 161 of the sealing mechanism 16 is ensured, the sealing piece 163 is prevented from deforming, and the leakage condition is avoided. Specifically, the thickness of the guide 162 is substantially similar to the gap between the crucible shaft 13 and the housing 161 of the sealing mechanism 16. The positioning of the guide 162 between the sealing members 163 ensures a more uniform gap between the crucible shaft 13 and the housing 161 of the sealing mechanism 16. In the sealing mechanism 16, the guide 162 and the sealing member 163 are engaged with each other, and the fitting property between the sealing mechanism 16 and the crucible shaft 13 is ensured, and the sealing capability is ensured. By adopting the mechanical sealing mode of the sealing element 163, the magnetic fluid sealing mode with higher cost in the prior art is replaced, and the production cost and the later maintenance cost can be reduced under the condition of ensuring the precursor of the sealing effect. Particularly, after silicon leakage occurs, the replacement and maintenance cost of the equipment can be reduced.
As one implementation, as shown in fig. 5, a first oil passage 1611 is also provided in the housing 161 of the sealing mechanism 16, and the first oil passage 1611 is provided inside the housing 161. Specifically, the first oil passage 1611 is provided in an annular shape on the inner wall of the housing 161. The transmission device 100 in the present application includes two movement modes of lifting and rotating during the use process, during the rotation and lifting process of the transmission device 100, there is relative movement between the sealing mechanism 16 and the crucible shaft 13, especially the friction is generated between the sealing element 163 and the guiding element 162 in the sealing mechanism 16 and the crucible shaft 13 due to the relative movement. In order to reduce wear caused by friction between the crucible shaft 13 and the seal 163 and the guide 162, the crucible shaft 13, the seal 163 and the guide 162 are lubricated with oil in the present embodiment. A first oil passage 1611 is provided on an inner wall of the case 161, and the first oil passage 1611 and the second accommodation space 165 communicate with each other. The first oil passage 1611 can store therein a certain amount of lubricating oil, and the lubricating oil in the first oil passage 1611 can enter the second accommodating space 165 communicating therewith and lubricate the guide 162 in the second accommodating space 165. A second oil passage 1621 is provided in the guide 162, and the second oil passage 1621 passes through from the outer side of the guide 162 to the inner side of the guide 162. The lubricating oil in the first oil passage 1611 can enter between the guide 162 and the crucible shaft 13 through the second oil passage 1621, and thus, the guide 162 and the crucible shaft 13 are lubricated. Meanwhile, the lubricating oil between the guide 162 and the crucible shaft 13 can enter between the sealing member 163 and the crucible shaft 13, and plays a role of lubricating the sealing member 163 and the crucible shaft 13. Further, a plurality of first oil passages 1611 may be provided on the inner wall of the casing 161 as necessary, the first oil passages 1611 being arranged in parallel with each other. A plurality of second oil passages 1621 may also be provided in the guide 162 as needed, the positions and shapes of the second oil passages 1621 may be set as needed, and the second oil passages 1621 only need to be capable of communicating the inner and outer sides of the guide 162, so that the lubricating oil can be delivered between the inner and outer sides of the guide 162.
As one implementation, as shown in fig. 5, the housing 161 further includes a first oil hole 1612, the first oil hole 1612 communicating the outside of the housing 161 with the first oil passage 1611. During use, the lubrication fluid in the seal mechanism 16 is inevitably reduced by wear. The first oil hole 1612 is provided in the housing 161, and lubricating oil can be supplied to the seal mechanism 16 without detaching the seal mechanism 16. Further, in order to meet the requirement of use, a plurality of first oil holes 1612 or the same number of first oil holes 1612 as the number of the first oil passages 1611 may be provided in the casing 161 to separately supply lubricating oil to each of the first oil passages 1611.
As one implementation, as shown in fig. 5, a plurality of first receiving spaces 164 for disposing the sealing members 163 are provided in the case 161. The sealing mechanism 16 is provided with the plurality of sealing members 163, so that the sealing performance of the sealing mechanism 16 can be improved and the sealing effect can be ensured. Specifically, a first accommodating space 164 for accommodating the sealing member 163 may be provided on each of the upper and lower sides of the second accommodating space 165, so that good sealing effect can be ensured on both the upper and lower sides of the sealing mechanism 16. Two first receiving spaces 164 for disposing the sealing member 163 may be provided at an upper side of the second receiving space 165, and one first receiving space 164 for disposing the sealing member 163 may be provided at a lower side of the second receiving space 165. Since the sealing mechanism 16 mainly serves to seal the bottom of the sealing region between the bottom of the crystal growth apparatus and the sealing mechanism 16, the two sealing members 163 disposed on the upper portion of the sealing mechanism 16 can better serve to seal the sealing region and reduce the probability of leakage in the sealing region. Meanwhile, only one first accommodating space 164 is arranged on the lower side of the second accommodating space 165, so that the use amount of the sealing element 163 can be reduced on the premise of ensuring the sealing effect, and the production cost and the later maintenance cost are reduced. Similarly, according to actual requirements, more than two first accommodating spaces 164 for arranging the sealing members 163 can be arranged on the upper side of the second accommodating space 165, that is, more than two sealing members 163 are arranged on the upper side of the guide member 162, so that a better sealing effect can be achieved, the probability of leakage is further reduced, and the equipment is ensured to be in a good operation state.
As an implementation, the sealing element 163 may be a frame oil seal. The framework oil seal takes a metal material as a base body, and simultaneously, the flexible polymer is coated outside the base body, so that the metal base body positioned inside the framework oil seal can provide enough strength, the strength of the framework oil seal is ensured, and the shape and the tension of the oil seal can be kept. The flexible polymer wrapped outside the metal matrix enables the sealing element 163 to better fit the shell 161 of the sealing mechanism 16 and the crucible shaft 13, and the sealing performance is guaranteed.
As one implementation, as shown in fig. 4 and 5, the sealing mechanism 16 further includes a bellows 166, the bellows 166 is sleeved outside the crucible shaft 13, and the bellows 166 is connected to the top of the housing of the sealing mechanism 16. The provision of bellows 166 can serve the purpose of sealing the area sealed between the bottom of the crystal growing apparatus and the sealing mechanism 16. In the crystal growth apparatus in which the crucible shaft 13 is required to be inserted through the furnace floor, in order to ensure the sealing of the region between the furnace floor and the top of the sealing mechanism 16, a bellows 166 is required to be provided between the top of the sealing mechanism 16 and the furnace floor. The corrugated pipe 166 has a certain expansion and contraction capacity, and after the corrugated pipe 166 is arranged, the corrugated pipe 166 can expand and contract along with the crucible shaft 13 in the lifting process to ensure a continuous sealing effect.
As one implementation, as shown in fig. 6, the rail housing 11 includes a first rail 111 and a second rail 112, and the first rail 111 and the second rail 112 are respectively disposed inside the rail housing 11. Specifically, the first guide rail 111 and the second guide rail 112 are respectively disposed inside the brackets on both sides of the rail housing 11. One side of the lifting frame 12 is connected to the first guide rail 111 and can be slidably lifted and lowered along the first guide rail 111, and the other side of the lifting frame 12 is connected to the second guide rail 112 and can be slidably lifted and lowered along the second guide rail 112. The lifting frame 12 can slide along the first guide rail 111 and the second guide rail 112 under the driving of the first driving mechanism 14 to realize the lifting and lowering of the lifting frame 12. Since the crucible shaft 13 is connected to the elevating frame 12, the crucible shaft 13 can be elevated along with the elevation of the elevating frame 12, achieving the purpose of elevating the crucible shaft 13. The guide rails are arranged on two sides of the guide rail seat 11, so that the lifting frame 12 can be uniformly stressed on two sides of the lifting frame 12 in the lifting process, the stability of the transmission device 100 in the operation process is improved, the condition that the crucible shaft 13 and the lifting frame 12 incline due to the bearing of the crucible shaft 13 is avoided, and the problem that the crucible shaft 13 cannot be centered is further avoided. Compared with the situation that the lifting frame 12 is controlled to lift only by a single guide rail, the lifting frame 12 is controlled to lift by the guide rails on two sides, the pressure borne by the single guide rail can be reduced, the stability of the lifting frame 12 in the lifting process is improved, and the problem that the lifting frame 12 cannot be lifted horizontally due to the stress on one side is solved.
As an implementation, as shown in fig. 6, the axis of the first guide rail 111 extends along the first straight line 101, the axis of the second guide rail 112 extends along the second straight line 102, the axis of the crucible shaft 13 extends along the third straight line 103, the first straight line 101, the second straight line 102 and the third straight line 103 are parallel in pairs, the first straight line 101, the second straight line 102 and the third straight line 103 are in the first plane 104, and the distance between the first straight line 101 and the third straight line 103 is equal to the distance between the second straight line 102 and the third straight line 103. When the axes of the first guide rail 111, the crucible shaft 13 and the second guide rail 112 are in the same plane, the stress point of the crucible shaft 13 is located in the guide rail surface formed by the first guide rail 111 and the second guide rail 112, so that the stress of the first guide rail 111 and the second guide rail 112 is uniform, the moment arm in the front-back direction can be avoided, and the condition that the single-side stress cannot occur due to the uniform stress of the whole crucible shaft 13 is ensured. The distance between the first straight line 101 and the third straight line 103 is equal to the distance between the second straight line 102 and the third straight line 103, so that the axis of the crucible shaft 13 is located in the middle of the axes of the first guide rail 111 and the second guide rail 112, the crucible shaft 13 is uniformly stressed in the left-right direction, and the stability of the crucible shaft 13 in the lifting process is ensured.
As one implementation, as shown in fig. 6, the first plane 104 passes through the rail base 11 and the rail base 11 is symmetrically disposed about the first plane 104. The axes of the first guide rail 111, the second guide rail 112 and the crucible shaft 13 are in the first plane 104, the first plane 104 bisects the guide rail seat 11, so that the center of gravity of the guide rail seat 11 is in the first plane 104, and the center of the guide rail seat 11 is on the third straight line 103, so that the center of gravity of the crucible shaft 13 and the center of gravity of the guide rail seat 11 are on the same vertical straight line. In actual use, the connecting line of the gravity center of the crucible shaft 13 and the gravity center of the guide rail seat 11 is ensured to be the same as the direction of the gravity force applied to the crucible shaft 13, so that the force arm between the crucible shaft 13 and the guide rail seat 11 is avoided, the crucible shaft 13 can be prevented from being inclined, and the stability of the transmission device 100 is further ensured.
Another aspect of the present application also provides a crystal growing apparatus including a crucible. The crystal growth apparatus includes the aforementioned transmission device 100 of the crucible for crystal growth, and the top of the transmission device 100 is connected to the crucible. An actuator 100 is connected to the crucible for effecting elevation and rotation of the crucible. Specifically, the crystal growth apparatus may be a crystal growth furnace, the top of the crucible shaft 13 in the transmission 100 is connected to the bottom of the crucible, and the top of the bellows 166 is connected to the furnace floor of the crystal growth furnace. The sealing of the crystal growth furnace is realized through the bellows 166 and the sealing mechanism 16 in the transmission device 100, and the crystal growth furnace is ensured to have excellent sealing performance during the use process of the crystal growth furnace, particularly during the process that the transmission device 100 drives the crucible to lift and rotate.
It will be understood that modifications and variations can be made by persons skilled in the art in light of the above teachings and all such modifications and variations are intended to be included within the scope of the invention as defined in the appended claims.

Claims (10)

1. A transmission device of a crucible for crystal growth, comprising:
the guide rail seat extends along the vertical direction;
a lifting frame at least partially slidably connected to the rail mount, the lifting frame being capable of relative movement along the rail mount;
a crucible shaft passing through the top of the guide rail seat and at least partially connected to the lifting frame, the crucible shaft moving with the lifting frame;
a first driving mechanism, one part of which is connected to the lifting frame and the other part of which is connected to the guide rail seat, the first driving mechanism driving the lifting frame to move linearly along the guide rail seat;
a second drive mechanism at least partially connected to the crucible shaft, the second drive mechanism driving the crucible shaft in a rotational motion;
the method is characterized in that:
the outer side of the crucible shaft is provided with a sealing mechanism, the sealing mechanism is connected to the top of the guide rail seat, and the sealing mechanism comprises a shell, a guide piece and a sealing piece; the casing cover is established the outside of crucible axle, the casing with form first accommodation space and second accommodation space between the crucible axle, the second accommodation space with first accommodation space intercommunication, first accommodation space is located the upside and the downside of second accommodation space, the sealing member is located in the first accommodation space, the guide is located in the second accommodation space.
2. The transmission of claim 1, wherein:
the casing is including still being equipped with first oil duct, first oil duct is located the inboard of casing, first oil duct is connected to second accommodation space, the guide includes the second oil duct, the second oil duct will the outside of guide with the inboard of guide communicates each other.
3. The transmission of claim 2, wherein:
the housing further includes a first oil hole that communicates an outer side of the housing with the first oil passage.
4. The transmission of claim 1, wherein:
the upper part of the second accommodating space comprises at least two first accommodating spaces, the lower part of the second accommodating space wraps at least one first accommodating space, and the first accommodating space is internally provided with the sealing element.
5. The transmission of claim 1, wherein:
the sealing element is a framework oil seal.
6. The transmission of claim 1, wherein:
the transmission device further comprises a corrugated pipe, the corrugated pipe is sleeved on the outer side of the crucible shaft, and the corrugated pipe is connected to the top of the shell of the sealing mechanism.
7. The transmission of claim 1, wherein:
the guide rail seat includes first guide rail and second guide rail, first guide rail with the second guide rail is located the inboard of guide rail seat, one side sliding connection of hoisting frame is in first guide rail, the opposite side sliding connection of hoisting frame is in the second guide rail.
8. The transmission of claim 7, wherein:
the crucible shaft comprises a first guide rail, a second guide rail, a crucible shaft and a third guide rail, wherein the axis of the first guide rail extends along a first straight line, the axis of the second guide rail extends along a second straight line, the axis of the crucible shaft extends along a third straight line, the first straight line, the second straight line and the third straight line are pairwise parallel, the first straight line, the second straight line and the third straight line are located in a first plane, and the distance between the first straight line and the third straight line is equal to the distance between the second straight line and the third straight line.
9. The transmission of claim 8, wherein:
the guide rail seat is arranged symmetrically with respect to the first plane.
10. A crystal growth apparatus comprising a crucible, characterized by:
the crystal growing apparatus further comprising an actuator as set forth in any one of claims 1 to 9, the top of the crucible shaft being connected to the crucible.
CN202211338247.5A 2022-10-09 2022-10-28 Transmission device of crucible for crystal growth and crystal growth equipment Active CN115386949B (en)

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Application Number Priority Date Filing Date Title
CN2022112268769 2022-10-09
CN202211226876 2022-10-09

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CN115386949B CN115386949B (en) 2023-01-20

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CN112228561A (en) * 2020-11-03 2021-01-15 合智熔炼装备（上海）有限公司 Lifting rod sealing device and vacuum precision casting furnace ingot casting chamber using same
CN114395792A (en) * 2021-11-26 2022-04-26 浙江晶盛机电股份有限公司 Crystal pulling device of hard shaft single crystal furnace

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CN204690168U (en) * 2015-05-20 2015-10-07 内蒙古晶环电子材料有限公司 Axle construction on a kind of novel sapphire
CN112228561A (en) * 2020-11-03 2021-01-15 合智熔炼装备（上海）有限公司 Lifting rod sealing device and vacuum precision casting furnace ingot casting chamber using same
CN114395792A (en) * 2021-11-26 2022-04-26 浙江晶盛机电股份有限公司 Crystal pulling device of hard shaft single crystal furnace

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