CN115338192A - Electronic device etching apparatus - Google Patents
Electronic device etching apparatus Download PDFInfo
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- CN115338192A CN115338192A CN202210968736.2A CN202210968736A CN115338192A CN 115338192 A CN115338192 A CN 115338192A CN 202210968736 A CN202210968736 A CN 202210968736A CN 115338192 A CN115338192 A CN 115338192A
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- pipe
- box
- electronic device
- bearing
- etching apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/087—Cleaning containers, e.g. tanks by methods involving the use of tools, e.g. brushes, scrapers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/093—Cleaning containers, e.g. tanks by the force of jets or sprays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning In General (AREA)
Abstract
The application discloses electron device etching device belongs to electron device equipment technical field. This electron device etching device, including the protecting box, protecting box one side is equipped with the draught fan, draught fan one side is equipped with and holds the box, the draught fan induced draft end tip be connected with hold the connecting pipe of box intercommunication, it is connected with the laying dust bucket to hold the end rotation that the pipe is located and holds the box inboard, it has a plurality of filtration pores to gather on the laying dust bucket, the pipe other end rotates and is connected with the rotating tube, be equipped with a plurality ofly on the cloth tuber pipe rather than communicating aspiration channel, be equipped with a plurality ofly on the aspiration channel rather than the same dust absorption fill. This application technical scheme is through setting up draught fan and dust absorption fill, can be directly absorb the piece dust that the etching produced to laying dust bucket inside, need not the staff and clears up the piece in addition, has both improved and has carried out clear effect also for the staff to the guard box inside and brought the facility.
Description
Technical Field
The present application relates to the field of electronic device equipment, and more particularly, to an electronic device etching apparatus.
Background
With the rapid development of information technology, electronic devices have been widely used in various fields as very important components in information technology, and in order to stably and smoothly produce electronic devices, many electronic devices, such as circuit boards, etc., are subjected to an etching process, which requires an electronic device etching apparatus. The patent document with the prior art publication number CN113814251A provides an etching device for manufacturing integrated optoelectronic devices, which is provided with a storage box, a panel and a telescopic cylinder plate, wherein scraps generated in the working process fall into the interior of a recovery box, and workers can perform centralized processing on the scraps after the work is completed, so that the etching device is convenient and fast. Although the device has more beneficial effects, the following problems still exist: the device utilizes and retrieves the box and accepts the piece that produces in the production process, and the staff need often clear up the piece in retrieving the box, and during dry etching, these pieces can scatter everywhere moreover, and unable smooth whole fall into retrieves in the box, and the staff still needs to clear up the inside of protective housing in addition. Not only does this cause a number of problems for the operator, but the debris may fly to and adhere to the electronic device, which can affect the quality of the electronic device. In view of this, we propose an electronic device etching apparatus.
Disclosure of Invention
1. Technical problem to be solved
An object of the present application is to provide an electronic device etching apparatus to solve the problems set forth in the above background art.
2. Technical scheme
Electronic device etching device, including the protective housing, be equipped with in the protective housing and hold the seat, it is equipped with the etching machine to hold seat upside, protective housing one side is equipped with the draught fan, draught fan one side is equipped with and holds the box, the draught fan induced draft end tip be connected with hold the connecting pipe of box intercommunication, it is equipped with sealed lid to hold the box upside, sealed covering middle part inlays the takeover who is equipped with and holds the box intercommunication, the takeover is located and holds the inboard tip rotation of box and is connected with the laying dust bucket, it has a plurality of filtration pores to gather on the laying dust bucket, the takeover other end rotates and is connected with the swinging head, the swinging head other end penetrates the protective housing and is connected with the stringing pipe, the intercommunication is provided with a plurality of aspiration channels on the stringing pipe, the intercommunication is provided with a plurality of dirt hoppers of inhaling on the aspiration channel.
As an alternative scheme of this application file technical scheme, still seted up the bleeder vent on the protective housing, still be equipped with the filter screen on the bleeder vent.
As an alternative scheme of the technical scheme of the application, the rotating pipe is limited by the protective box and is connected with the protective box in a rotating mode, the protective box is further provided with a first motor, the end portion of the output end of the first motor is connected with a driving gear, and the rotating pipe is sleeved with a driven gear which is connected with the driving gear in a meshed mode.
As an alternative scheme of the technical scheme of the application document, a plurality of the air suction pipes are densely distributed with bristles, and the bristles are in frictional contact with the protective box.
As an alternative of the technical scheme of the application, a plurality of blocking pieces are arranged on the dust collecting barrel, a plurality of springs are fixedly arranged inside the bearing box, and silica gel knocking hammers are arranged at the other ends of the springs and are in movable contact with the corresponding blocking pieces;
the dust-collecting barrel is characterized in that the other end of the dust-collecting barrel is connected with a bearing pipe, a rotating mechanism is arranged on the lower side of the bearing pipe, and the rotating mechanism can drive the bearing pipe to rotate.
As an alternative scheme of this application file technical scheme, slewing mechanism is including locating the second motor that bears tub one side and cup jointing the drive gear on bearing the tub, second motor output end connection has drive gear, drive gear is connected with drive gear meshing.
As an alternative scheme of this application file technical scheme, the intercommunication is provided with the dust exhaust pipe on the position that the carrier tube is located the bearing box outside, dust exhaust pipe one side threaded connection has a bearing cylinder.
As an alternative of this document technical scheme, it is equipped with the drive shaft to inlay on the carrier tube, the drive shaft upper end penetrates the carrier tube is connected with the auger, the cover is equipped with sealed gluey ring on the auger, the carrier tube downside still is equipped with drive module, drive module can drive the drive shaft and rotate.
As an alternative of the technical solution of this document, the driving module includes a connecting gear sleeved on the output shaft of the second motor and a receiving gear sleeved on the driving shaft, and the connecting gear is engaged with the receiving gear.
As an alternative of this document technical scheme, still be equipped with the subassembly of raising in the protective housing, the subassembly of raising is including locating the blowing pipe in the protective housing, it has a plurality of blowholes to gather on the blowing pipe, be connected with the return air pipe of being connected with draught fan air-out end on the blowing pipe.
3. Advantageous effects
Compare in prior art, the advantage of this application lies in:
1. this application technical scheme is through setting up draught fan and dust absorption fill, can absorb the piece dust that the etching produced to laying dust bucket inside, need not the staff and clears up the piece in addition, has both improved and has carried out clear effect and also brought the facility for the staff to the protective housing inside.
2. This application technical scheme strikes hammer and separation blade through setting up silica gel, and the silica gel strikes the hammer and strikes the separation blade, can avoid the piece to adsorb on laying dust barrel surface, blocks up the filtration pore, simultaneously through setting up auger and auger, can reduce the piece in the laying dust bucket with the piece discharge in the laying dust bucket for this device dust absorption is smooth and easy all the time.
3. This application technical scheme can raise the piece of deposit in protective housing inner chamber downside through setting up the subassembly of raising, and the aspiration channel of being convenient for adsorbs it, has further improved the effect of cleaing away the piece.
Drawings
FIG. 1 is a schematic diagram of an overall structure of an etching apparatus for electronic devices according to a preferred embodiment of the present application;
FIG. 2 is a schematic view of a portion of the inside of a shield box of an electronic device etching apparatus according to an embodiment of the present disclosure;
FIG. 3 is a schematic cross-sectional view of a receiving box of an electronic device etching apparatus according to a preferred embodiment of the present application;
FIG. 4 is an enlarged view of a structure at A in an electronic device etching apparatus according to a preferred embodiment of the present application;
FIG. 5 is a cross-sectional view of a carrier tube in an electronic device etching apparatus according to an embodiment of the present disclosure;
FIG. 6 is a schematic diagram of a lift element of an electronic device etching apparatus according to an embodiment of the present disclosure;
the reference numbers in the figures illustrate: 1. a protective box; 101. air holes are formed; 2. a receiving box; 3. distributing an air pipe; 4. a bearing seat; 5. a second motor; 6. an air suction pipe; 7. a dust collecting barrel; 701. filtering holes; 8. a carrier tube; 9. a hoisting component; 901. a blowpipe; 902. an air blowing hole; 903. a return air duct; 10. an induced draft fan; 11. a first motor; 12. a driving gear; 13. rotating the tube; 14. a connecting pipe; 15. driving the gear; 16. a receiving gear; 17. a drive gear; 18. a connecting gear; 19. a bearing pipe; 20. a driven gear; 21. filtering with a screen; 22. brushing; 23. an etching machine; 24. a sealing cover; 25. a dust suction hopper; 26. a packing auger; 27. a baffle plate; 28. a silica gel knocking hammer; 29. a spring; 30. a carrying cylinder; 31. a drive shaft; 32. a dust exhaust pipe; 33. and sealing the rubber ring.
Detailed Description
Referring to fig. 1-6, the present application provides a technical solution:
electronic device etching device, including protective housing 1, be equipped with in the protective housing 1 and hold seat 4, hold 4 upsides of seat and be equipped with etching machine 23, protective housing 1 one side is equipped with draught fan 10, draught fan 10 one side is equipped with and holds box 2, draught fan 10 induced draft end tip is connected with and holds connecting pipe 14 that box 2 communicates, it is equipped with sealed lid 24 to hold 2 upsides of box, sealed lid 24 middle part inlays and is equipped with and holds the takeover 19 of box 2 intercommunication, takeover 19 is located to hold 2 inboard tip rotations of box and is connected with laying dust bucket 7, it has a plurality of filtration pores 701 to gather on the laying dust bucket 7, the takeover 19 other end rotates and is connected with rotating tube 13, the rotating tube 13 other end passes protective housing 1 outer wall and extends to protective housing 1 inner chamber and is connected with cloth tuber pipe 3, be connected with a plurality of rather than communicating aspiration channel 6 on the cloth tuber pipe 3, be equipped with a plurality of rather than the same dust absorption fill 25 on the aspiration channel 6.
In this embodiment, after the electron device accomplished the etching, under the effect of draught fan 10, be negative pressure state in accepting box 2, piece in the protective housing 1 gets into in the laying dust bucket 7 by aspiration channel 6 and accepting pipe 19 immediately, need not the staff and clears up the piece of protective housing inside in addition, has both reduced staff's intensity of labour and has also improved the effect of cleaing away to piece.
Specifically, the protective box 1 is further provided with an air hole 101, and the air hole 101 is further provided with a filter screen 21.
In this embodiment, the air holes 101 and the filter screen 21 are arranged so that the debris in the protection box 1 can smoothly enter the dust collecting barrel 7.
Further, the rotating pipe 13 is limited by the protective box 1 and is rotatably connected with the protective box 1, the protective box 1 is further provided with a first motor 11, the end part of the output end of the first motor 11 is connected with a driving gear 12, and the rotating pipe 13 is sleeved with a driven gear 20 which is in meshed connection with the driving gear 12.
In this embodiment, under the effect of first motor 11, driving gear 12 rotates, and driven gear 20 drives rotation tube 13 and aspiration channel 6 immediately and rotates, can adsorb the piece of each inside position of guard box 1, improves clean effect.
Furthermore, a plurality of air suction pipes 6 are densely distributed with bristles 22, and the bristles 22 are in frictional contact with the protective box 1.
In this embodiment, brush hair 22 can rotate along with corresponding aspiration channel 6, cleans protection box 1 inside for absorbent piece drops on the protection box 1 inner wall, is convenient for adsorb these pieces, has further improved the effect of cleaing away to the piece. In actual use, soft bristles are used as the bristles 22, so that the bristles can clean corners of the inner wall of the protective box 1.
Furthermore, be equipped with a plurality of separation blade 27 on the laying dust bucket 7, accept the inside fixed a plurality of spring 29 that is provided with of box 2, the spring 29 other end is equipped with silica gel and strikes the hammer 28, and silica gel strikes hammer 28 and separation blade 27 movable contact, and the laying dust bucket 7 other end is connected with bearing pipe 8, and bearing pipe 8 downside is equipped with slewing mechanism, and slewing mechanism can drive bearing pipe 8 and rotate.
In this embodiment, under slewing mechanism's effect, bearing pipe 8 drives laying dust bucket 7 and separation blade 27 and rotates, and separation blade 27 strikes with silica gel rapping hammer 28 for 7 surperficial vibrations that produce of laying dust bucket prevent that the piece from adsorbing on laying dust bucket 7 surface, block up filtration pore 701, make the piece can be smooth and easy get into in the laying dust bucket 7.
It is worth to say that, slewing mechanism is including locating second motor 5 of carrier tube 8 one side and cup jointing in carrier tube 8 on driving gear 15, and second motor 5 output end connection has drive gear 17, and drive gear 17 is connected with driving gear 15 meshing.
In this embodiment, under the action of the second motor 5, the driving gear 17 rotates, and the bearing pipe 8 drives the dust collecting barrel 7 to rotate because the driving gear 17 is meshed with the driving gear 15.
It should be noted that the position of the carrying pipe 8 outside the receiving box 2 is provided with a dust exhaust pipe 32 communicated with the carrying pipe, and one side of the dust exhaust pipe 32 is connected with the carrying cylinder 30 by screw thread.
In this embodiment, the purpose of the loading cylinder 30 and the dust exhaust pipe 32 is to facilitate the cleaning of the debris by the worker.
Besides, the bearing tube 8 is embedded with a driving shaft 31, the upper end of the driving shaft 31 penetrates through the outer wall of the bearing tube 8 and extends to the inner cavity of the bearing tube, the upper end of the driving shaft 31 is connected with an auger 26, the auger 26 is sleeved with a sealing rubber ring 33, the lower side of the bearing tube 8 is also provided with a driving module, and the driving module can drive the driving shaft 31 to rotate.
In this embodiment, under the action of the driving module, the driving shaft 31 immediately drives the packing auger 26 to rotate, and the chips in the bearing pipe 8 immediately and smoothly enter the bearing cylinder 30 from the dust exhaust pipe 32 under the driving of the packing auger 26, so as to further reduce the chips in the dust collecting barrel 7, and ensure that the dust collection of the device is always smooth.
Besides, the driving module includes a connecting gear 18 sleeved on the output shaft of the second motor 5 and a receiving gear 16 sleeved on the driving shaft 31, and the connecting gear 18 is meshed with the receiving gear 16.
In the present embodiment, the connecting gear 18 rotates by the second motor 5, and the receiving gear 16 rotates the driving shaft 31.
Besides, the protective box 1 is also internally provided with a lifting component 9, the lifting component 9 comprises a blowing pipe 901 arranged in the protective box 1, a plurality of blowing holes 902 are densely distributed on the blowing pipe 901, and the blowing pipe 901 is connected with a return air pipe 903 connected with the end part of the air outlet end of the induced draft fan 10.
In this embodiment, under the effect of the induced draft fan 10, the air current is blown out by the blowhole 902 in the blowpipe 901 is got into by the return air pipe 903, and the piece that will deposit in protection box 1 inner chamber downside is raised, and the aspiration channel 6 of being convenient for adsorbs it, guarantees to clear away the effect to the piece.
After the related staff use the etching machine 23 to the electron device etching completion, under the effect of draught fan 10, accept the box 2 in the negative pressure state, the piece in the guard box 1 gets into in the dust collecting bucket 7 by aspiration channel 6 and accepting pipe 19 immediately.
In the process, under the action of the first motor 11, the driving gear 12 rotates, and the driven gear 20 immediately drives the rotating pipe 13 and the air suction pipe 6 to rotate, so as to adsorb the debris at each position inside the protection box 1. In addition, brush hair 22 can rotate along with corresponding aspiration channel 6, cleans protection box 1 inside for the piece that adsorbs on the protection box 1 inner wall drops, is convenient for adsorb these pieces.
Meanwhile, under the effect of second motor 5, drive gear 17 rotates, because drive gear 17 is connected with drive gear 15 meshing, consequently bears the pipe 8 and will drive laying dust bucket 7 and separation blade 27 and rotate, and separation blade 27 strikes with silica gel rapping hammer 28 for laying dust bucket 7 surface produces the vibration, makes the piece that adsorbs on laying dust bucket 7 surface drop to its inner chamber downside and gets into in bearing the pipe 8.
Subsequently, under the action of the second motor 5, the connecting gear 18 rotates, and the receiving gear 16 drives the driving shaft 31 and the auger 26 to rotate. The scraps in the bearing pipe 8 are smoothly driven by the auger 26 to enter the bearing cylinder 30 through the dust exhaust pipe 32, so that the scraps in the dust collecting barrel 7 are further reduced, and the dust collection of the device is smooth all the time.
In addition, under the action of the induced draft fan 10, the air flow enters the blowpipe 901 through the air return pipe 903 and is blown out through the blowhole 902, so that the debris deposited on the lower side of the inner cavity of the protective box 1 is lifted, and the air suction pipe 6 can conveniently adsorb the debris.
Claims (10)
1. Electronic device etching device, including the protective housing, be equipped with in the protective housing and hold and put the seat, it is equipped with etching machine, its characterized in that to hold and put a seat upside: the utility model discloses a dust collecting device, including protective housing, draught fan, sealed lid, bearing box, collecting tube, dust collecting barrel, dust distributing bucket, protective housing one side is equipped with the draught fan, draught fan induced draft end tip is connected with and accepts the connecting pipe of box intercommunication, it is equipped with sealed lid to accept the box upside, sealed lid middle part inlays and is equipped with and accepts the carrier pipe of box intercommunication, the carrier pipe is located the inboard tip rotation of bearing box and is connected with the dust collecting barrel, it has a plurality of filtration pores to gather on the dust collecting barrel, the carrier pipe other end rotates and is connected with the swinging head, the swinging head other end penetrates the protective housing and is connected with the cloth tuber pipe, the intercommunication is provided with a plurality of aspiration channels on the cloth tuber pipe, the intercommunication is provided with a plurality of dust collecting hoppers on the aspiration channel.
2. The electronic device etching apparatus according to claim 1, wherein: the protective box is further provided with air holes, and the air holes are further provided with filter screens.
3. The electronic device etching apparatus according to claim 1, wherein: the rotating pipe is limited by the protective box and is rotationally connected with the protective box, the protective box is further provided with a first motor, the end part of the output end of the first motor is connected with a driving gear, and the rotating pipe is sleeved with a driven gear which is in meshed connection with the driving gear.
4. The electronic device etching apparatus according to claim 1, wherein: the plurality of air suction pipes are densely distributed with bristles, and the bristles are in frictional contact with the protective box.
5. The electronic device etching apparatus according to claim 1, wherein: the dust collection barrel is provided with a plurality of blocking pieces, a plurality of springs are fixedly arranged inside the bearing box, and silica gel knocking hammers are arranged at the other ends of the springs and are in movable contact with the corresponding blocking pieces;
the laying dust bucket other end is connected with bears the weight of the pipe, bear the weight of the pipe downside and be equipped with slewing mechanism, slewing mechanism can drive and bear the weight of the pipe and rotate.
6. The electronic device etching apparatus according to claim 5, wherein: the rotating mechanism comprises a second motor arranged on one side of the bearing pipe, a driving gear is sleeved on the outer wall of the bearing pipe, a driving gear is connected to the end portion of the output end of the second motor, and the driving gear is meshed with the driving gear.
7. The electronic device etching apparatus according to claim 5, wherein: the bearing pipe is positioned on the outer side of the bearing box and is communicated with a dust exhaust pipe, and one side of the dust exhaust pipe is in threaded connection with a bearing cylinder.
8. The electronic device etching apparatus according to claim 5, wherein: the bearing pipe is provided with a drive shaft, the upper end of the drive shaft penetrates into the bearing pipe and is connected with an auger, the auger is sleeved with a sealing rubber ring, the lower side of the bearing pipe is also provided with a drive module, and the drive module can drive the drive shaft to rotate.
9. The electronic device etching apparatus according to claim 8, wherein: the driving module comprises a connecting gear sleeved on the output shaft of the second motor and a receiving gear sleeved on the driving shaft, and the connecting gear is in meshed connection with the receiving gear.
10. The electronic device etching apparatus according to any one of claims 1 to 9, wherein: still be equipped with the subassembly of raiseing in the protective housing, the subassembly of raiseing is including locating the blowing pipe in the protective housing, it has a plurality of blowholes to gather on the blowing pipe, be connected with the return air pipe of being connected with draught fan air-out end tip on the blowing pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210968736.2A CN115338192A (en) | 2022-08-12 | 2022-08-12 | Electronic device etching apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210968736.2A CN115338192A (en) | 2022-08-12 | 2022-08-12 | Electronic device etching apparatus |
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| Publication Number | Publication Date |
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| CN115338192A true CN115338192A (en) | 2022-11-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210968736.2A Pending CN115338192A (en) | 2022-08-12 | 2022-08-12 | Electronic device etching apparatus |
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