CN115326198A - Pulse laser energy detector and online calibration method thereof - Google Patents
Pulse laser energy detector and online calibration method thereof Download PDFInfo
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- CN115326198A CN115326198A CN202210951962.XA CN202210951962A CN115326198A CN 115326198 A CN115326198 A CN 115326198A CN 202210951962 A CN202210951962 A CN 202210951962A CN 115326198 A CN115326198 A CN 115326198A
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- 238000000034 method Methods 0.000 title claims description 8
- 238000001514 detection method Methods 0.000 claims abstract description 43
- 238000005485 electric heating Methods 0.000 claims abstract description 20
- 238000010521 absorption reaction Methods 0.000 claims abstract description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims description 31
- 239000003990 capacitor Substances 0.000 claims description 27
- 238000011896 sensitive detection Methods 0.000 claims description 14
- 238000007599 discharging Methods 0.000 claims description 6
- 230000002159 abnormal effect Effects 0.000 claims description 3
- 230000005856 abnormality Effects 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 5
- 230000007774 longterm Effects 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J2001/4238—Pulsed light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
- G01J2001/444—Compensating; Calibrating, e.g. dark current, temperature drift, noise reduction or baseline correction; Adjusting
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
The invention belongs to the technical field of optical measurement and test, and discloses a pulse laser energy detector, which comprises: the device comprises a shell, and a detection circuit, a thermosensitive detection unit and an electric heating unit which are arranged in the shell, wherein the thermosensitive detection unit is of a sheet structure, an absorption unit is arranged on a light-facing surface of the thermosensitive detection unit, the absorption unit receives incident laser which is vertically incident, the electric heating unit is arranged close to the middle part of a backlight surface of the thermosensitive detection unit, and the thermosensitive detection unit and the electric heating unit are respectively connected with the detection circuit through leads; the outer ring of the backlight surface of the thermosensitive detection unit is also provided with a heat sink unit which is of an aluminum annular structure and is arranged at the periphery of the electric heating unit. The invention can monitor the long-term working stability of the energy detector on line, overcomes the difficult problem of engineering detection that the detector in a large laser system can not be disassembled for calibration, and ensures the reliability and stability of parameter measurement.
Description
Technical Field
The invention belongs to the technical field of optical metering test, and relates to a pulse laser energy detector and an online calibration method thereof.
Background
The pulse laser energy detector is made of a pyroelectric or pyroelectric detector as a core device, and obtains a laser energy value by measuring electric quantity generated after the detector absorbs laser energy. In the development of a large-scale high-power pulse laser system, laser pulse energy parameters of a plurality of link parts need to be measured. The existing series of energy detectors are in a working state for a long time, and performance is reduced or the energy detectors fail due to aging or laser damage, so that frequent calibration detection is needed. The existing calibration method is to disassemble the energy detector from the high-power laser system and then use a standard pulse light source for calibration, so that the implementation steps are complex, time and labor are wasted, and the accuracy of laser energy detection can be caused by the change of the mounting position every time.
Disclosure of Invention
Object of the invention
The purpose of the invention is: the pulse laser energy detector and the online calibration method thereof are provided, the energy detector is calibrated online in a large laser system, the operation process is simplified, and the measurement accuracy is ensured.
(II) technical scheme
In order to solve the technical problem, the invention provides a pulse laser energy detector, which comprises a shell 5, and a detection circuit 7, a thermosensitive detection unit 3 and an electric heating unit 8 which are arranged in the shell 5, wherein the thermosensitive detection unit 3 is of a sheet structure, an absorption unit 2 is arranged on a light facing surface of the thermosensitive detection unit 3, the absorption unit 2 receives incident laser 1 which is vertically incident, the electric heating unit 8 is arranged in a manner of being clung to the middle part of a backlight surface of the thermosensitive detection unit 3, and the thermosensitive detection unit 3 and the electric heating unit 8 are respectively connected with the detection circuit 7 through leads 6. In addition, a heat sink unit 4 is further arranged on the outer ring of the backlight surface of the thermosensitive detection unit 3, and the heat sink unit 4 is of an aluminum annular structure and is arranged on the periphery of the electric heating unit 8.
The detection circuit 7 comprises a core control module 11, a high-voltage charging module 12, a charging capacitor C, a heating resistor R1, a standard resistor R, a voltmeter V1, a voltmeter V2, a voltmeter V3, a switch K1 and a switch K2; wherein the heating resistance of the electric heating unit 8 is R1; after being connected in series, the heating resistor R1 and the standard resistor R are connected in parallel with the voltmeter V1 and the high-voltage charging module 12 at two ends of the charging capacitor C, the voltmeter V2 and the voltmeter V3 are connected in parallel at two ends of the heating resistor R1 and the standard resistor R respectively, the switch K1 is connected in series between the high-voltage charging module 12 and the voltmeter V1, and the switch K2 is connected in series between the standard resistor R and the charging capacitor C. The voltmeter V1, the voltmeter V2 and the voltmeter V3 are electrically connected with the core control module 11.
The switch K1 is controlled by the core control module 11 to realize the charging of the charging capacitor C by the high-voltage charging module 12, and once the voltmeter V1 reaches a set value, the charging is stopped; the switch K2 realizes the discharge of the charging capacitor C to the heating resistor R1 and the standard resistor R under the control of the core control module 11, the discharge time is t, the core control module 1 collects the parameters of the voltmeter V2 and the voltmeter V3 and calculates the electric quantity Qd while discharging, and after comparing the parameters with the collected output signal of the thermosensitive detection unit 3, whether the performance of the detector is reduced is judged.
Based on the structural arrangement of the pulse laser energy detector, the online calibration steps of the energy detector are as follows:
【1】 Light calibration
A standard pulse light source is adopted as an incident laser 1 to be incident to an energy detector, and a core control module 11 acquires an output signal U0;
【2】 Capacitor charging
The core control module 11 controls the switch K1 to be closed, the high-voltage charging module 12 charges the charging capacitor C, and once the voltmeter V1 reaches a set value U1, the switch K1 is opened to stop charging;
【3】 Discharge of capacitor
The core control module 11 controls the switch K2 to be closed, the charging capacitor C discharges the heating resistor R1 and the standard resistor R, the discharging time is t, and parameters U2 and U3 of the voltmeter V2 and the voltmeter V3 are collected in real time;
【4】 Electric quantity Qd calculation
According to the electric quantity calculation formula, the available electric quantity Qd = V2 (V3/R) t;
integrating the acquired data within t time to obtain an electric quantity value, wherein V3/R is the current passing through the heating resistor R1;
【5】 Calculation of electrical calibration coefficients
k＝Qd/U0
【6】 After the detector is installed at a working position, repeating the steps from (2) to (5) at set time intervals, and comparing the consistency of the k values; if the k value is abnormal, the performance of the detector is judged to be reduced. In general, if the k value changes by more than 2%, the performance of the detector is considered to be degraded, and if it exceeds 5%, an abnormality is considered to occur, and it is necessary to check the state of the energy detector to determine whether the energy detector is damaged.
(III) advantageous effects
According to the pulse laser energy detector and the online calibration method thereof provided by the technical scheme, the electrical heating unit is arranged on the back surface of the thermosensitive detection unit, so that the incident laser beam cannot be shielded to influence the measurement accuracy, and the electrical heating unit arranged on the backlight surface is adopted to simulate the laser pulse input according to the output characteristics of the thermosensitive detection unit, so that the negative signal output of the thermosensitive detection unit is realized, the relationship between the electrical quantity of electrical heating and the output signal of the detector is compared, the long-term working stability of the energy detector is monitored online, the difficult problem of engineering detection that the detector cannot be detached for calibration in a large laser system is solved, and the reliability and stability of parameter measurement are ensured.
Drawings
FIG. 1 is a schematic diagram of a pulsed laser energy detector according to the present invention;
FIG. 2 is a schematic diagram of the output signals of the heat-sensitive detection unit during laser irradiation and electric heating;
FIG. 3 is a schematic diagram of the detection circuit of the present invention;
in the figure: 1-incident laser light; 2-an absorption unit; 3-a heat sensitive detection unit; 4-a heat sink unit; 5-a shell; 6-lead wire; 7-a detection circuit; 8-an electric heating unit; 11-core control module; 12-high voltage charging module.
Detailed Description
In order to make the objects, contents and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.
As shown in fig. 1, the pulse laser energy detector of the present invention includes a housing 5, and a detection circuit 7, a thermal sensitive detection unit 3 and an electrical heating unit 8 which are arranged inside the housing 5, wherein the thermal sensitive detection unit 3 is in a sheet structure, a light facing surface of the thermal sensitive detection unit 3 is provided with an absorption unit 2, the absorption unit 2 receives incident laser 1 which is vertically incident, the electrical heating unit 8 is arranged in close contact with a middle portion of a backlight surface of the thermal sensitive detection unit 3, and the thermal sensitive detection unit 3 and the electrical heating unit 8 are respectively connected with the detection circuit 7 through leads 6. In addition, the heat sink unit 4 is further arranged on the outer ring of the backlight surface of the heat-sensitive detection unit 3, and the heat sink unit 4 is of an aluminum annular structure and is arranged on the periphery of the electric heating unit 8.
If necessary, a fan may be installed at the back of the heat sink unit 4 to dissipate heat. An electric heating unit 8 is arranged at the vacant part in the heat sink unit 4, and the electric heating unit 8 is a ceramic heating sheet.
The absorption unit 2 is a broad spectrum absorption film, such as graphite or silicon carbide layer, sprayed on the light facing surface of the heat-sensitive detection unit 3, and the spectrum absorption range comprises 0.1-20 microns. Alternatively, the absorbing unit 2 may be made of ZAB00 bulk absorbing glass.
The heat-sensitive detection unit 3 is a thermoelectric detector or a pyroelectric detector, laser is irradiated to the absorption unit 2 and converted into heat, so that the heat-sensitive detection unit 3 linearly outputs charges, and the energy of incident laser can be obtained by back-stepping through measuring the electric quantity of the charges.
As shown in fig. 2, for the pyroelectric detector or pyroelectric detector, the amount of electricity generated by the laser incidence is Qg, and the output amount of electricity of the electrical heating unit 8 is Qd due to the arrangement on the back of the thermosensitive detection unit 3, and the voltage signals Vo1 and Vo2 have opposite polarities. When the device is manufactured, a constant coefficient is kept between Qg and Qd generated by the same energy.
As shown in fig. 3, the detection circuit 7 includes a core control module 11, a high-voltage charging module 12, a charging capacitor C, a heating resistor R1, a standard resistor R, a voltmeter V1, a voltmeter V2, a voltmeter V3, a switch K1, and a switch K2; wherein the heating resistance of the electric heating unit 8 is R1; the heating resistor R1 and the standard resistor R are connected in series and then connected in parallel with the voltmeter V1 and the high-voltage charging module 12 at two ends of the charging capacitor C, the voltmeter V2 and the voltmeter V3 are connected in parallel at two ends of the heating resistor R1 and the standard resistor R respectively, the switch K1 is connected in series between the high-voltage charging module 12 and the voltmeter V1, and the switch K2 is connected in series between the standard resistor R and the charging capacitor C. The voltmeter V1, the voltmeter V2 and the voltmeter V3 are electrically connected with the core control module 11.
The switch K1 is controlled by the core control module 11 to realize the charging of the charging capacitor C by the high-voltage charging module 12, and once the voltmeter V1 reaches a set value, the charging is stopped; the switch K2 realizes the discharge of the charging capacitor C to the heating resistor R1 and the standard resistor R under the control of the core control module 11, the discharge time is t, the core control module 1 collects the parameters of the voltmeter V2 and the voltmeter V3 and calculates the electric quantity Qd while discharging, and after comparing the parameters with the collected output signal of the thermosensitive detection unit 3, whether the performance of the detector is reduced is judged.
Based on the structural arrangement of the pulse laser energy detector, the online calibration steps of the energy detector are as follows:
【1】 Light collimation
A standard pulse light source is adopted as an incident laser 1 to be incident to an energy detector, and a core control module 11 acquires an output signal U0;
【2】 Capacitor charging
The core control module 11 controls the switch K1 to be closed, the high-voltage charging module 12 charges the charging capacitor C, and once the voltmeter V1 reaches a set value U1, the switch K1 is opened to stop charging;
【3】 Discharge of the capacitor
The core control module 11 controls the switch K2 to be closed, the charging capacitor C discharges the heating resistor R1 and the standard resistor R, the discharging time is t, and parameters U2 and U3 of the voltmeter V2 and the voltmeter V3 are collected in real time;
【4】 Electric quantity Qd calculation
According to the electric quantity calculation formula, the available electric quantity Qd = V2 (V3/R) t;
integrating the acquired data within t time to obtain an electric quantity value, wherein V3/R is the current passing through the heating resistor R1;
【5】 Calculation of electrical calibration coefficients
k＝Qd/U0
【6】 After the detector is installed at a working position, repeating the steps (2) to (5) at set time intervals, and comparing the consistency of k values; if the k value is abnormal, the performance of the detector is judged to be reduced. In general, if the k value changes by more than 2%, the performance of the detector is considered to be degraded, and if it exceeds 5%, an abnormality is considered to occur, and it is necessary to check the state of the energy detector to determine whether the energy detector is damaged.
The invention overcomes the problem of calibration of an energy detector in the existing large-scale laser system, ensures the working stability of the whole system and has important popularization value.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A pulsed laser energy detector, comprising: the laser detector comprises a shell (5), and a detection circuit (7), a thermosensitive detection unit (3) and an electric heating unit (8) which are arranged in the shell (5), wherein the thermosensitive detection unit (3) is of a sheet structure, the light-facing surface of the thermosensitive detection unit (3) is provided with an absorption unit (2), the absorption unit (2) receives incident laser (1) which is vertically incident, the electric heating unit (8) is arranged in a manner of being tightly attached to the middle part of the backlight surface of the thermosensitive detection unit (3), and the thermosensitive detection unit (3) and the electric heating unit (8) are respectively connected with the detection circuit (7) through leads (6); the outer ring of the backlight surface of the heat-sensitive detection unit (3) is also provided with a heat sink unit (4), and the heat sink unit (4) is of an aluminum annular structure and is arranged at the periphery of the electric heating unit (8).
2. The pulsed laser energy detector of claim 1, characterized in that the back of the heat sink unit (4) is fan-mounted for heat dissipation.
3. The pulsed laser energy detector of claim 1, characterized in that the electrical heating unit (8) is a ceramic heating plate.
4. The pulsed laser energy detector of claim 1, characterized in that the absorption unit (2) is a broad spectrum absorption film sprayed on the light-facing side of the thermosensitive detection unit (3), and the spectral absorption range is 0.1-20 μm.
5. The pulsed laser energy detector of claim 4, wherein the broad spectrum absorbing thin film is a graphite or silicon carbide layer.
6. The pulsed laser energy detector of claim 1, characterized in that the absorption unit (2) uses a volume absorbing glass of type ZAB 00.
7. The pulsed laser energy detector according to claim 1, characterized in that the thermal sensitive detection unit (3) is a pyroelectric detector or a pyroelectric detector, the incident laser (1) is irradiated to the absorption unit (2) and converted into heat, so that the thermal sensitive detection unit (3) outputs electric charge linearly, and the energy of the incident laser (1) is obtained by measuring the electric quantity of the electric charge and performing back-stepping.
8. The pulsed laser energy detector of claim 1, characterized in that the detection circuit (7) comprises a core control module (11), a high voltage charging module (12), a charging capacitor C, a heating resistor R1, a standard resistor R, a voltmeter V1, a voltmeter V2, a voltmeter V3, a switch K1, a switch K2; the heating resistance of the electric heating unit 8 is R1; the heating resistor R1 and the standard resistor R are connected in series and then are connected in parallel with the voltmeter V1 and the high-voltage charging module (12) at two ends of the charging capacitor C together, the voltmeter V2 and the voltmeter V3 are respectively connected in parallel at two ends of the heating resistor R1 and the standard resistor R, the switch K1 is connected in series between the high-voltage charging module (12) and the voltmeter V1, and the switch K2 is connected in series between the standard resistor R and the charging capacitor C; the voltmeter V1, the voltmeter V2 and the voltmeter V3 are electrically connected with the core control module (11).
9. The pulsed laser energy detector of claim 8, wherein when the detection circuit (7) is in operation, the switch K1 is controlled by the core control module (11) to charge the charging capacitor C with the high-voltage charging module (12), and when the voltmeter V1 reaches a set value, the charging is stopped; the switch K2 is controlled by the core control module (11) to realize the discharge of the charging capacitor C to the heating resistor R1 and the standard resistor R, the discharge time is t, the core control module (1) collects the parameters of the voltmeter V2 and the voltmeter V3 and calculates the electric quantity Qd while discharging, and after the parameters are compared with the collected output signal of the thermosensitive detection unit (3), whether the performance of the detector is reduced or not is judged.
10. An on-line calibration method for the pulsed laser energy detector according to claim 9, comprising the steps of:
s1: light calibration
A standard pulse light source is adopted as an incident laser (1) to be incident to an energy detector, and a core control module (11) acquires an output signal U0;
s2: capacitor charging
The core control module (11) controls the switch K1 to be closed, the high-voltage charging module (12) charges the charging capacitor C, and once the voltmeter V1 reaches a set value U1, the switch K1 is opened to stop charging;
s3: discharge of the capacitor
The core control module (11) controls the switch K2 to be closed, the charging capacitor C discharges the heating resistor R1 and the standard resistor R, the discharging time is t, and parameters U2 and U3 of the voltmeter V2 and the voltmeter V3 are collected in real time;
s4: electric quantity Qd calculation
According to an electric quantity calculation formula, the available electric quantity Qd = V2 (V3/R) t;
integrating the acquired data within t time to obtain an electric quantity value, wherein V3/R is the current passing through the heating resistor R1;
s5: calculation of electrical calibration coefficients
k＝Qd/U0
S6: after the detector is installed at the working position, repeating the steps from S2 to S5 every set time, and comparing the consistency of the k values; if the k value is abnormal, the performance of the detector is determined to be reduced; if the k value changes by more than 2%, the performance of the detector is considered to be degraded, and if the k value exceeds 5%, the abnormality is considered to occur, and the state of the energy detector needs to be checked to determine whether the energy detector is damaged.
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| CN112082737A (en) * | 2020-08-24 | 2020-12-15 | 中国电子科技集团公司第四十一研究所 | Terahertz pulse laser energy calibration device and method |
| CN112859035A (en) * | 2021-01-13 | 2021-05-28 | 武汉大学 | High dynamic range multi-satellite compatible active laser detector |
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2022
- 2022-08-09 CN CN202210951962.XA patent/CN115326198A/en active Pending
Patent Citations (8)
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|---|---|---|---|---|
| CN101246051A (en) * | 2008-03-18 | 2008-08-20 | 中国科学院长春光学精密机械与物理研究所 | Radiation detection chip |
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| CN106030345A (en) * | 2014-12-11 | 2016-10-12 | 皇家飞利浦有限公司 | X-ray detector, imaging apparatus and calibration method |
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