CN115319927A

CN115319927A - Linear cutting machining method

Info

Publication number: CN115319927A
Application number: CN202210919480.6A
Authority: CN
Inventors: 陈启淄; 林艺楠; 张威
Original assignee: Zhejiang Fengfan Nc Machinery Co ltd
Current assignee: Zhejiang Fengfan Nc Machinery Co ltd
Priority date: 2022-08-02
Filing date: 2022-08-02
Publication date: 2022-11-11

Abstract

The invention discloses a linear cutting processing method, which belongs to the technical field of linear cutting and comprises the following steps: s100, freezing and freezing a plurality of blanks by water to form ice and solidifying the ice together; s200, fixing the blanks consolidated by the ice in the step S100 on a workbench of the multi-wire cutting machine; and S300, cutting the blank in the step S200 by the multi-wire cutting machine to obtain a workpiece. The water is used for replacing the adhesive agents such as hot melt adhesive and the like adopted in the prior art, so that the blanks can be solidified together, and the reasonable reduction of the production auxiliary material cost is facilitated. After cutting, the ice is melted to obtain a single workpiece, and the workpiece is not required to be subjected to de-bonding treatment in a hot water soaking or pickling manner and the like, so that the condition that the workpiece is cracked and damaged in the hot water soaking or pickling process is effectively avoided, and the qualified rate of the workpiece is favorably and reasonably improved. Because the workpiece does not need to be subjected to de-bonding treatment after cutting, the production efficiency is favorably and reasonably improved.

Description

Linear cutting machining method

Technical Field

The invention relates to the technical field of linear cutting, in particular to a linear cutting machining method.

Background

When manufacturing various semiconductors and photovoltaic devices, a semiconductor blank containing hard and brittle materials such as silicon, sapphire, ceramics, glass and the like needs to be cut into workpieces meeting the thickness requirement or the length requirement. The cutting operation is also more and more demanding because the cutting of the blank has a significant impact on the subsequent process steps. At present, the multi-wire cutting technology is widely applied to the cutting production of semiconductor products due to the characteristics of high production efficiency, high operation precision and the like.

The principle of the multi-wire cutting technology is that a cutting wire is wound on a wire guide wheel to form a multi-loop wire mesh, and the cutting wire moving at a high speed cuts a blank to obtain a target workpiece. The Chinese invention application with the publication number of CN 110722231A discloses a linear cutting method, which comprises the steps of injecting molten hot melt adhesive into an accommodating cavity for accommodating blanks, adhering the blanks in the accommodating cavity together after the hot melt adhesive is solidified, then cutting the adhered blanks by a linear cutting machine to obtain workpieces, and finally scrubbing the workpieces by alcohol to enable the hot melt adhesive to be denatured and remove the hot melt adhesive adhered to the workpieces. In other linear cutting processing methods, the blanks are adhered together by adopting an adhesive, then the blanks are cut, and after the cutting is finished, the adhesive adhered to the workpiece is removed by adopting a hot water soaking mode, an adhesive removing cleaning mode or other modes. In the existing linear cutting method, because the blank is adhered by adopting the adhesive body with viscosity, the workpiece needs to be subjected to de-adhesion treatment after cutting is finished, the production efficiency is not improved, and the loss of the adhesive body is caused during production, so that the production auxiliary material cost is higher. In addition, when the workpiece is subjected to a de-bonding treatment by hot water soaking or acid washing, the workpiece is easily cracked and damaged, which is not beneficial to improving the qualified rate of the workpiece.

Disclosure of Invention

In order to solve the defects in the prior art, the invention provides the linear cutting processing method, which is characterized in that the blanks are solidified together by utilizing ice blocks formed by freezing water, thereby being beneficial to reducing the auxiliary material cost of linear cutting processing and improving the qualification rate of workpieces.

In order to achieve the above technical object, the present invention provides a wire cutting method, comprising the steps of,

s100, freezing and solidifying a plurality of blanks by water to connect the blanks together;

s200, fixing the blanks consolidated by the ice in the step S100 on a workbench of the multi-wire cutting machine;

and S300, cutting the blank in the step S200 by the multi-wire cutting machine to obtain a workpiece.

Preferably, in the step S100, the plurality of billets are placed in the containing box through the supporting frame, and the containing box is placed in the freezing chamber for freezing after water is added to the containing box, so that the billets are solidified together by the ice formed by water freezing.

Preferably, the temperature of the freezing chamber is-25 ℃ to-10 ℃; and/or the freezing time is 6-12 h.

Preferably, the end parts of the two ends of the blank are inserted into the support frame; and/or after freezing is finished, taking out the blanks adhered together by the ice from the accommodating box, and fixing the blanks on the workbench after the blanks are separated from the support frame.

Preferably, a gap is formed between adjacent blanks in the accommodating box.

Preferably, a base is disposed on the top of the worktable, and in step S200, the base is pumped with a cooling liquid to adhere the blank to the bottom surface of the worktable through ice.

Preferably, the temperature of the cold liquid is-10 ℃ to-5 ℃.

Preferably, in step S300, the base is filled with a cooling liquid to consolidate the uncut blanks together by ice.

Preferably, a material receiving box is arranged below the workbench, the linear cutting processing method further comprises a step S400,

s400, after cutting, the base is heated by the heating liquid to melt the ice which adheres the workpiece to the bottom surface of the workbench, so that the workpiece falls into the material receiving box downwards.

Preferably, in the step S400, the temperature of the hot liquid is 15 to 40 ℃.

After the technical scheme is adopted, the invention has the following advantages:

1. according to the wire cutting processing method provided by the invention, the plurality of blanks are fixedly bonded together by the ice formed by freezing water, and the water is used for replacing adhesives such as hot melt adhesive and the like adopted in the prior art, so that the auxiliary material cost of wire cutting processing is favorably and reasonably reduced. After cutting, the ice is melted to obtain a single workpiece, and because the water after the ice is melted has no viscosity, the workpiece is not required to be subjected to viscosity removal treatment in a hot water soaking or pickling mode, so that the conditions that the workpiece is cracked and damaged in the hot water soaking or pickling process are effectively avoided, and the qualified rate of the workpiece is favorably and reasonably improved. Because the workpiece does not need to be subjected to de-bonding treatment after the cutting is finished, the production efficiency is favorably and reasonably improved.

2. Put into holding the box through the support frame with a plurality of blanks, put into the freezer after adding water in holding the box and freeze to make each blank can be fixed through the ice that water formed and bond together, the frozen concrete mode of reasonable setting makes the blank can be fixed through the ice and bonds together.

3. The temperature and the freezing time of the freezing chamber are reasonably set, and the stability of ice formed by freezing water is improved, so that blanks can be effectively and stably fixed and bonded together through the ice, the smoothness of the blanks cut by the multi-wire cutting machine is favorably improved, and the qualification rate of workpieces is favorably improved.

4. The end parts of the two ends of the blank are inserted on the support frame, so that the blank which is fixedly connected together is separated from the support frame and then is fixed on a workbench of the multi-wire cutting machine after freezing is finished. If the blank is fixed to the table of the multi-wire saw together with the support frame after freezing is completed, the end portion of the blank inserted into the support frame is cut and disposed of as a waste.

5. When the blanks are placed into the accommodating box through the supporting frame, a gap is formed between every two adjacent blanks, so that the blanks can be firmly and fixedly bonded together through ice after freezing is finished, the solidification stability of the blanks is favorably improved, the situation that the blanks are separated due to the action of cutting force when being cut is avoided, and the cutting effect of the multi-wire cutting machine on workpieces is favorably improved.

6. The top of workstation sets up the base, and the base leads to cold liquid to reduce the temperature of workstation, makes the blank can fix the bottom surface at the workstation through the stable adhesion of ice, avoids ice to melt and leads to the condition that the blank can't be fixed in the workstation bottom surface through the ice adhesion. Because the blanks are fixed through ice adhesion, the workbench is not required to be provided with a clamp for clamping the blanks, and the condition that the blanks are mutually shifted or separated due to ice fragmentation caused by overlarge clamping force of the clamp on the blanks can be avoided.

7. The temperature of the cooling liquid communicated with the base is reasonably set, so that the blank can be stably adhered and fixed on the bottom surface of the workbench through ice. If the temperature of the cold liquid is higher than-5 ℃, the temperature of the workbench is not favorably reduced effectively, so that the blank is not favorably fixed on the bottom surface of the workbench through stable ice adhesion. If the temperature of the cold liquid is lower than-10 ℃, the cooling pressure of the liquid supply system is higher, and the improvement effect of fixing the blank on the bottom surface of the workbench through ice adhesion is limited.

8. When the multi-wire saw cuts the blank, the base is always communicated with the cold liquid, so that the uncut blank can be stably and fixedly bonded together through ice and stably bonded on the bottom surface of the workbench, the condition that the uncut blank falls downwards due to the fact that the ice melts and the uncut blank is avoided due to heating of the blank and the ice due to friction in the cutting process is avoided, and the cutting effect on the blank is favorably guaranteed.

9. After cutting, the base is communicated with the hot liquid, the base transfers the heat of the hot liquid to the workbench, the temperature of the workbench rises, so that ice adhering to the bottom surface of the workbench can be heated and melted in an accelerated manner, the time required for the workpiece to be separated from the workbench after cutting is effectively shortened, and the reasonable improvement of the production efficiency is facilitated.

10. And reasonably setting the temperature of the hot liquid communicated with the base in the step S400, so that the temperature rise of the base is reasonably controlled while the ice is effectively melted. If the temperature of the hot liquid is lower than 15 ℃, the temperature of the hot liquid is lower, which is not beneficial to reasonably quickening the melting speed of ice on the bottom surface of the workbench, thereby being not beneficial to reasonably shortening the time length required for the workpiece to be separated from the workbench after the cutting is finished. If the temperature of the hot liquid is higher than 40 ℃, the temperature of the hot liquid is higher, the temperature rise of the base after the hot liquid is introduced into the base is larger, and the preparation time for cooling the base and the workbench for next cutting is longer due to the introduction of the cold liquid into the base, so that the cutting efficiency is not improved.

Drawings

FIG. 1 is a flow chart of a wire-cut machining method according to an embodiment of the present invention;

FIG. 2 is a schematic view of a blank being placed in a container box through a supporting frame in a wire-cut machining method according to an embodiment of the present invention;

FIG. 3 is a schematic view of a blank being fixed on the bottom surface of a worktable in a linear cutting machining method according to an embodiment of the invention;

FIG. 4 is a schematic view of a liquid supply system in a wire-cut machining method according to an embodiment of the invention.

In the figure, 10-blank, 20-support frame, 30-containing box, 41-workbench, 42-roller, 43-cutting line, 51-base, 52-cold liquid box, 53-hot liquid box, 54-pump, 55-pressure reducing valve, 56-overflow valve, 57-first electromagnetic valve, 58-second electromagnetic valve and 60-material receiving box.

Detailed Description

The invention is further described with reference to the following figures and specific examples. It is to be understood that the following terms "upper," "lower," "left," "right," "longitudinal," "lateral," "inner," "outer," "vertical," "horizontal," "top," "bottom," and the like are used merely to indicate an orientation or positional relationship relative to one another as illustrated in the drawings, merely to facilitate describing and simplifying the invention, and are not intended to indicate or imply that the device/component so referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore are not to be considered limiting of the invention.

Example one

With reference to fig. 1 to 4, a wire cutting processing method according to an embodiment of the present invention includes the following steps,

s100, solidifying a plurality of blanks 10 together through ice formed by freezing water;

s200, fixing the blanks 10 adhered together through the ice in the step S100 on a workbench 41 of the multi-wire cutting machine;

s300, the workpiece is obtained by cutting the blank 10 in the step S200 with the multi-wire saw.

In the present embodiment, the blank 10 is described by taking a long glass tube as an example, with reference to fig. 2. In step S100, a plurality of blanks 10 are placed in the accommodating box 30 through the holding frame 20, and water is added to the accommodating box 30 and then the accommodating box is placed in the freezing chamber for freezing, so that the ice formed by freezing the blanks 10 by water is fixedly bonded together. Specifically, the support 20 is roughly in a shape of a letter 21274, through holes for the blank 10 to pass through are formed in two end portions of the support 20, and the end portions of the two ends of the blank 10 are inserted into the support 20 through the through holes. In step S300, the multi-wire saw cuts the work piece having a small length from the blank 10 having a large length.

In order to firmly fix and bond the blanks 10 together by ice formed by water freezing, when the blanks 10 are placed in the accommodating box 30 through the supporting frame 20, a gap is formed between the adjacent blanks 10, so that the blanks can be firmly fixed and bonded together by the ice after the freezing is finished, and the fixation stability between the blanks is improved. In this embodiment, the width of the gap between two adjacent glass tubes is preferably substantially the same as the tube diameter of the glass tube.

In order to ensure the stability of the water freezing and forming ice, the temperature of the freezing chamber and the freezing time need to be reasonably suitable. The temperature of the freezing chamber is-25 ℃ to-10 ℃, and the time for placing the accommodating box 30 containing the blank 10 and water into the freezing chamber for freezing is 6h to 12h. In this embodiment, the temperature of the freezing chamber is preferably set to-15 deg.C, and the freezing time is preferably set to 10 hours.

After the cold freezing is finished, the support frame 20 and the blanks 10 fixedly bonded together through the ice are taken out from the accommodating box 30, then the blanks 10 are separated from the support frame 20, and the blanks 10 fixedly bonded together are fixed on a workbench 41 of the multi-wire cutting machine, so that the stability of the blanks 10 fixedly bonded together through the ice adhesion and fixed on the workbench 41 is improved.

With reference to fig. 3, the multi-wire saw further includes two roller 41 arranged in parallel at intervals and a cutting wire 43 wound around the two roller 41, and the worktable 41 is disposed above the roller 41 and the cutting wire 43 and can move up and down. In order to catch the cut workpiece, a material receiving box 60 is provided below the table 41, and the cut workpiece may fall down into the material receiving box 60. In this embodiment, the material receiving box 60 is disposed between the two roller rollers 41 and between the upper and lower layers of cutting lines 43. In step S200, the bonded blanks 10 are fixed to the bottom surface of the table 41. In step S300, the table 41 drives the blank 10 to move downward, so that the cutting line 43 can effectively cut the blank 10.

In order to stably fix the blank 10 on the bottom surface of the table 41, a base 51 is provided on the top of the table 41, and the base 51 can be filled with a cold liquid or a hot liquid. In step S200, the base 51 is filled with a cooling liquid to fix the billet 10 to the bottom surface of the table 41 by ice adhesion. In step S300, the base 51 is filled with a cooling liquid to make the uncut blanks 10 still be solidified together by the ice, so as to avoid the situation that the uncut blanks 10 fall down due to the ice melting caused by friction heating of the blanks 10 and the ice during the cutting process.

The wire-electrode cutting method according to this embodiment further includes step S400, after the cutting is completed, the base 51 heats and melts the ice adhering the workpiece to the bottom surface of the table 41 by the hot liquid, so that the workpiece falls down into the material receiving box 60. The base 51 is heated to raise the temperature of the worktable 41, so that ice adhering the workpiece to the bottom surface of the worktable 41 can be heated and melted quickly, and the time required for the workpiece to be separated from the worktable 41 after cutting is effectively shortened.

The base 51 is provided with a liquid flow channel, and referring to fig. 4, the liquid supply system for supplying liquid to the base 51 includes a cold liquid tank 52, a hot liquid tank 53, a cold liquid supply pipeline C1, a cold liquid return pipeline C2, a hot liquid supply pipeline H1, and a hot liquid return pipeline H2, wherein a pump 54, a pressure reducing valve 55, and an overflow branch are provided on each of the cold liquid supply pipeline C1 and the hot liquid supply pipeline H1, and an overflow valve 56 is provided on the overflow branch. The cold liquid supply pipeline C1 and the hot liquid supply pipeline H1 are connected with the liquid inlet end of the liquid flow channel through a first electromagnetic valve 57 at the downstream, and the liquid discharge end of the liquid flow channel is connected with the cold liquid return pipeline C2 and the hot liquid return pipeline H2 through a second electromagnetic valve 58.

In steps S200 and S300, the temperature of the cooling liquid passed through the susceptor 51 is-10 ℃ to-5 ℃. In this embodiment, the temperature of the cooling liquid in the cooling liquid tank 52 is maintained at about-8 ℃, and the cooling liquid in the cooling liquid tank 52 is slightly increased when flowing to the susceptor 51 through the cooling liquid supply line C1.

In step S400, the temperature of the hot liquid passed through the susceptor 51 is 15 to 40 ℃, so that the temperature rise of the susceptor 51 is reasonably controlled while the ice is effectively melted. In this embodiment, the temperature of the hot liquid in the hot liquid tank 53 is preferably maintained at about 30 ℃, and the hot liquid in the hot liquid tank 53 slightly decreases when flowing to the susceptor 51 through the hot liquid supply line H1.

In step S200 and step S300, the cold liquid in the cold liquid tank 52 flows to the base 51 through the cold liquid supply pipeline C1, the cold liquid flows through the liquid flow channel of the base 51 and then flows back to the cold liquid tank 52 through the cold liquid return pipeline C2, a cold liquid flow circulation is formed, and the temperature of the base 51 and the temperature of the worktable 41 are reduced through the cold liquid flow circulation, so that the blanks 10 adhered together can be stably adhered and fixed on the bottom surface of the worktable 41 through ice.

In step S400, the hot liquid in the hot liquid tank 53 flows to the base 51 through the hot liquid supply pipeline H1, and the hot liquid flows through the liquid flow channel of the base 51 and then flows back to the hot liquid tank 53 through the hot liquid return pipeline H2, so as to form a hot liquid flowing circulation, and the temperature of the base 51 and the worktable 41 is raised through the hot liquid flowing circulation, so as to accelerate the melting speed of the ice on the bottom surface of the worktable 41, so that the work piece adhered to the bottom surface of the worktable 41 by the ice after the cutting is finished can be accelerated to be separated from the worktable, and the work piece separated from the worktable 41 falls downward into the material receiving box 60.

Since a certain amount of water remains in the workpiece after the step S400 is completed, the drying speed of the workpiece can be increased by low-temperature drying or hot-air drying after the step S400 is completed.

According to the wire-electrode cutting processing method provided by the embodiment, the plurality of blanks 10 are fixedly bonded together by the ice formed by freezing water, and the water is used for replacing adhesives such as hot melt adhesive and the like adopted in the prior art, so that the reasonable reduction of the production auxiliary material cost is facilitated. After cutting, the ice is melted to obtain a single workpiece, and because the water after the ice is melted has no viscosity, the workpiece is not required to be subjected to viscosity removal treatment in the modes of hot water soaking, pickling and the like, so that the conditions of cracks and damages of the workpiece in the hot water soaking or pickling process are effectively avoided, and the qualified rate of the workpiece is favorably and reasonably improved. Because the workpiece does not need to be subjected to de-bonding treatment after cutting, the production efficiency is favorably and reasonably improved.

It should be understood that the shape of the blank 10 to which the wire-cutting method according to the present embodiment is applied is not limited to the long tube shape described above and shown in the drawings, and may be applied to wire-cutting of a blank having another shape such as a long thin plate.

It is to be understood that the material of the blank 10 to which the wire-cutting method according to the present embodiment is applied is not limited to the glass tube described above, and may be applied to wire-cutting of a blank made of other material such as single crystal silicon.

It will be appreciated that the particular shape of the support 20 is not limited to the 21274; and is shown in the above description and drawings, and may be provided in other shapes to facilitate detachment from the blank 10.

It is understood that, in step S100, the width of the gap between adjacent blanks in the containing box 30 can be set appropriately according to factors such as the thickness, size, weight, etc. of the blanks.

It is understood that in step S200, the temperature of the freezing chamber may be set to other reasonable temperature values such as-25 ℃, -23 ℃, -21 ℃, -20 ℃, -19 ℃, -17 ℃, -16 ℃, -14 ℃, -13 ℃, -10 ℃.

It is understood that in step S200, the freezing time may be set to 6h, 7h, 8h, 9h, 9.5h, 10.5h, 11h, 12h, or other reasonable time periods.

It is understood that in step S200, the freezing time may be appropriately shortened in the time length range as the temperature of the freezing chamber is lower, and the freezing time may be appropriately lengthened in the time length range as the temperature of the freezing chamber is higher.

It is understood that the multi-wire saw applied to the wire-cutting processing method provided by the embodiment is not limited to the double-roller multi-wire saw described above and shown in the drawings, but is also applicable to a three-roller multi-wire saw, and other structures of the multi-wire saw refer to the prior art.

It will be appreciated that the temperature of the cooling fluid in the cooling fluid tank 52 may be maintained at other reasonable temperature values of-10 deg.C, -9 deg.C, -7 deg.C, -6 deg.C, -5 deg.C, etc.

It is understood that the cooling liquid may be a liquid having a freezing point preferably below-60 deg.c, such as an automotive antifreeze coolant.

It is understood that the temperature of the hot liquid in the hot liquid tank 53 can be maintained at other reasonable temperature values such as 15 deg.C, 17 deg.C, 19 deg.C, 21 deg.C, 23 deg.C, 25 deg.C, 27 deg.C, 29 deg.C, 31 deg.C, 33 deg.C, 35 deg.C, 37 deg.C, 40 deg.C, etc.

It will be understood that the hot liquid is preferably a liquid having a boiling point of 80 ° or more, and that the hot liquid may be the same liquid as the cold liquid, although other suitable liquids such as water may be used.

It will be appreciated that the particular construction of the liquid supply system is not limited to that described above and shown in the drawings, and that other reasonably specific constructions may be used.

It will be appreciated that the two ends of the blank 10 that engage the stock 20 are disposed of as cutting waste.

It is understood that, in step S200, the blank and the supporting frame 20 may be fixed together on the bottom surface of the working platform 41, in which case, the outer portion of the middle portion of the supporting frame 20 has ice with sufficient thickness, the middle portion of the supporting frame 20 faces the working platform 41 and is adhered to the bottom surface of the working platform 41 by the ice, and the two end portions of the blank 10 inserted on the supporting frame 20 are disposed as cutting waste.

It will be appreciated that in the case where the liquid supply system and the base 51 are not provided, the table 41 is preferably provided below the roller 42 and the cutting line 43, and the blanks 10 held together by ice may be held by a jig on the top surface of the table 41, and the table 41 moves the blanks 10 upward when the multi-wire saw is in operation.

It will be appreciated that the water added to the containment box 30 during freezing is substantially flush with or slightly below the top surface of the containment box 30.

Other embodiments of the present invention than the preferred embodiments described above, and those skilled in the art can make various changes and modifications according to the present invention without departing from the spirit of the present invention, should fall within the scope of the present invention defined in the claims.

Claims

1. A wire cutting processing method is characterized by comprising the following steps,

s100, freezing and freezing a plurality of blanks by water to form ice and solidifying the ice together;

2. The wire-cut electric discharge machining method according to claim 1, wherein in step S100, the plurality of billets are placed in the containing box through the supporting frame, and the containing box is frozen in the freezing chamber after water is added to the containing box, so that the billets are fixed together by the ice formed by freezing water.

3. The wire-electrode cutting processing method according to claim 2, wherein the temperature of the freezing chamber is-25 ℃ to-10 ℃; and/or the freezing time is 6-12 h.

4. The wire-electrode cutting processing method according to claim 2, wherein the end portions of the two ends of the blank are inserted into the supporting frame; and/or after freezing is finished, taking out the blank solidified together by the ice from the containing box, and fixing the blank on the workbench after the blank is separated from the support frame.

5. The wire cutting processing method according to claim 2, wherein a gap is provided between adjacent blanks in the accommodating box.

6. The wire-electrode cutting method according to claim 1, wherein a base is provided on the top of the worktable, and in step S200, the base is filled with a cooling liquid to adhere the blank to the bottom surface of the worktable through ice.

7. The wire-electrode cutting process according to claim 6, wherein the temperature of the cooling liquid is-10 ℃ to-5 ℃.

8. The wire-electrode cutting processing method according to claim 6, wherein in the step S300, the base is filled with a cooling liquid to solidify the uncut blanks together by ice.

9. The wire-electrode cutting method according to claim 6, wherein a material receiving box is provided below the worktable, the wire-electrode cutting method further comprises a step S400,

10. The wire-electrode cutting process according to claim 9, wherein the hot liquid is heated to a temperature of 15 ℃ to 40 ℃ in step S400.