CN115315056B - High-power beam cutter with measurement function - Google Patents

High-power beam cutter with measurement function Download PDF

Info

Publication number
CN115315056B
CN115315056B CN202210995393.9A CN202210995393A CN115315056B CN 115315056 B CN115315056 B CN 115315056B CN 202210995393 A CN202210995393 A CN 202210995393A CN 115315056 B CN115315056 B CN 115315056B
Authority
CN
China
Prior art keywords
cutter
holder
cutoff
stop
cut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202210995393.9A
Other languages
Chinese (zh)
Other versions
CN115315056A (en
Inventor
杜畅通
雷钰
邢庆子
范永山
王学武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Original Assignee
Tsinghua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University filed Critical Tsinghua University
Priority to CN202210995393.9A priority Critical patent/CN115315056B/en
Publication of CN115315056A publication Critical patent/CN115315056A/en
Application granted granted Critical
Publication of CN115315056B publication Critical patent/CN115315056B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/001Arrangements for beam delivery or irradiation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/001Arrangements for beam delivery or irradiation
    • H05H2007/002Arrangements for beam delivery or irradiation for modifying beam trajectory, e.g. gantries
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/001Arrangements for beam delivery or irradiation
    • H05H2007/008Arrangements for beam delivery or irradiation for measuring beam parameters

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)

Abstract

本发明涉及一种截束器,包括:束流截止件,所述束流截止件具有由束流截止材料制成、能够暴露于束流来流方向的束流截止表面;保持件,所述保持件在束流截止表面以外的区域保持并接触束流截止件;冷却系统,所述冷却系统与保持件传热地连接,在束流截止件截止束流时吸收从束流截止件传导给保持件的热量;可动连接装置,所述可动连接装置以可动的方式固定保持件,以使得保持件内的束流截止件能够移动到截断或离开束流的位置;截束器壳体,所述截束器壳体容纳保持件和束流截止件,在束流方向上的两侧各具有一个通过束流孔法兰与束流通道相连接的束流孔,在不影响束流的方向上通过真空室法兰与真空泵相连且具有用于安装可动连接装置的安装法兰。

The present invention relates to a beam cutter, comprising: a beam cutoff member, the beam cutoff member having a beam cutoff surface made of a beam cutoff material and capable of being exposed to a beam flow direction; a holding member, the holding member holding and contacting the beam cutoff member in an area other than the beam cutoff surface; a cooling system, the cooling system being connected to the holding member in a heat transfer manner and absorbing heat conducted from the beam cutoff member to the holding member when the beam cutoff member cuts off the beam; a movable connecting device, the movable connecting device fixing the holding member in a movable manner so that the beam cutoff member in the holding member can be moved to a position for cutting off or leaving the beam; and a beam cutter housing, the beam cutter housing accommodating the holding member and the beam cutoff member, having a beam hole connected to a beam channel through a beam hole flange on both sides in the beam direction, being connected to a vacuum pump through a vacuum chamber flange in a direction not affecting the beam, and having a mounting flange for mounting the movable connecting device.

Description

一种具有测量功能的高功率截束器A high power beam cutter with measurement function

技术领域Technical Field

本发明涉及一种具有测量功能的高功率截束器,尤其是一种用于加速器领域的束流截止装置。The invention relates to a high-power beam cutter with a measuring function, in particular to a beam cutoff device used in the field of accelerators.

背景技术Background technique

截束器(Beam Dump)是一种广泛应用于加速器领域的束流截止装置。在加速器调试和运行时,被加速至高能量的强流束的束流功率往往会达到几千瓦甚至数十千瓦。如果高功率束流轰击在束线终端的设备壁上会导致放射性污染,以致长时间无法接近附近进行工作;更严重的,高功率束可能会熔毁设备,对加速器装置造成灾难性后果,因此束流并不直接导向靶或者终端试验样品。高功率加速器通常会专门设置截束器,其主要作用是在指定的位置(通常是束线终端)采用被束流轰击后感生放射性较低的材料截止束流,并实时获得束流流强、功率等相关参数。这样,在稳定性测试过程中,就可以长时间承接大功率束流,记录束流稳定性。Beam dump is a beam cutoff device widely used in the field of accelerators. During accelerator commissioning and operation, the beam power of a high-energy beam accelerated to high energy often reaches several kilowatts or even tens of kilowatts. If a high-power beam hits the equipment wall at the end of the beam line, it will cause radioactive contamination, making it impossible to work nearby for a long time; more seriously, the high-power beam may melt the equipment, causing catastrophic consequences for the accelerator device, so the beam is not directly directed to the target or terminal test sample. High-power accelerators usually have a special beam dump, whose main function is to cut off the beam at a specified position (usually the end of the beam line) using materials that are induced to have lower radioactivity after being bombarded by the beam, and obtain relevant parameters such as beam intensity and power in real time. In this way, during the stability test, it is possible to undertake high-power beams for a long time and record beam stability.

因此,希望提供一种支持在线测量的、具有流强测量功能的高功率截束器装置。同时,希望截束器能够简便地布置和移除,在不使用时,截束器所在真空室能够复用为真空室,从而缩减设备的整体设计尺寸。Therefore, it is desirable to provide a high-power beam cutter device that supports online measurement and has a current intensity measurement function. At the same time, it is desirable that the beam cutter can be easily arranged and removed, and when not in use, the vacuum chamber where the beam cutter is located can be reused as a vacuum chamber, thereby reducing the overall design size of the device.

发明内容Summary of the invention

为解决上述技术问题,本发明提供了一种截束器,用于截止束流通道中的能量束流,该截束器包括:束流截止件,所述束流截止件具有由束流截止材料制成、能够暴露于束流来流方向的束流截止表面;保持件,所述保持件在所述束流截止表面以外的区域保持并接触所述束流截止件;冷却系统,所述冷却系统与所述保持件传热地连接,用于在所述束流截止件截止束流时吸收从所述束流截止件传导给所述保持件的热量;可动连接装置,所述可动连接装置用于以可动的方式固定所述保持件,以使得所述保持件内的所述束流截止件能够移动到截断或离开束流的位置;截束器壳体,所述截束器壳体容纳所述保持件和所述束流截止件,其中,所述截束器壳体在束流方向上的两侧各具有一个分别通过束流孔法兰与束流通道相连接的束流孔,在不影响束流的方向上通过真空室法兰与真空泵相连且具有用于安装所述可动连接装置的安装法兰。In order to solve the above technical problems, the present invention provides a beam cutter for cutting off an energy beam in a beam channel, the beam cutter comprising: a beam cutoff member, the beam cutoff member having a beam cutoff surface made of a beam cutoff material and capable of being exposed to the direction of the beam flow; a holder, the holder holding and contacting the beam cutoff member in an area outside the beam cutoff surface; a cooling system, the cooling system being heat-conductingly connected to the holder and used for absorbing heat conducted from the beam cutoff member to the holder when the beam cutoff member cuts off the beam; a movable connecting device, the movable connecting device being used for fixing the holder in a movable manner so that the beam cutoff member in the holder can be moved to a position for cutting off or leaving the beam; a beam cutter housing, the beam cutter housing accommodating the holder and the beam cutoff member, wherein the beam cutter housing has a beam hole on both sides in the beam direction, each of which is connected to the beam channel through a beam hole flange, and is connected to a vacuum pump through a vacuum chamber flange in a direction that does not affect the beam, and has a mounting flange for mounting the movable connecting device.

由此,截束器能够通过安装法兰安装在与真空泵连通的真空室中,且能够通过可动连接装置移动到截断束流的位置或从截断束流的位置离开。这带来的便利是,在从束流方向上移除截束器时,并不破坏截束器所在空间的真空环境。Thus, the beam cutter can be installed in a vacuum chamber connected to a vacuum pump through a mounting flange, and can be moved to or away from a position where the beam is cut off through a movable connection device. This brings the convenience that when the beam cutter is removed from the beam direction, the vacuum environment of the space where the beam cutter is located is not destroyed.

冷却系统为保持件提供必要的温度调节能力。截束器工作时,束流在束流截止件的束流截止表面上沉积,导致束流截止件材料的温度升高,甚至会带来物相的改变。冷却系统吸收保持件从束流截止件通过传导方式带出的热量并将其排出截束器壳体,从而达到为束流截止材料降温的目的。The cooling system provides the necessary temperature regulation capability for the holder. When the beam cutter is working, the beam is deposited on the beam cutoff surface of the beam cutoff, causing the temperature of the beam cutoff material to rise and even cause a change in the phase. The cooling system absorbs the heat that the holder takes out of the beam cutoff through conduction and discharges it out of the beam cutter housing, thereby achieving the purpose of cooling the beam cutoff material.

束流截止材料优选为石墨。保持件由导热良好的材料制成,优选由铜制成。石墨本身具有较低的感生放射性,且石墨和铜具有良好的传热性能。热量能够迅速被铜传导到冷却系统中循环的冷却介质,与之进行热交换。The beam cutoff material is preferably graphite. The holder is made of a material with good thermal conductivity, preferably copper. Graphite itself has low induced radioactivity, and graphite and copper have good heat transfer properties. Heat can be quickly conducted by copper to the cooling medium circulating in the cooling system to exchange heat with it.

根据本发明的一种优选实施形式,冷却系统包括保持件的背对束流截止材料那侧的若干冷却腔室。这些冷却腔室通过若干伸缩管贯穿所述安装法兰与所述截束器壳体之外的冷却介质源形成循环回路。伸缩管确保了可动连接装置移动保持件时,能够始终在保持件背侧的冷却腔室和安装法兰外部的冷却介质源之间建立和保持冷却回路,不受保持件位置变动的影响。According to a preferred embodiment of the present invention, the cooling system comprises a plurality of cooling chambers on the side of the holder facing away from the beam cutoff material. These cooling chambers are connected to the mounting flange and the cooling medium source outside the beam cutter housing through a plurality of telescopic tubes to form a circulation loop. The telescopic tubes ensure that when the movable connecting device moves the holder, a cooling loop can always be established and maintained between the cooling chamber on the back side of the holder and the cooling medium source outside the mounting flange, without being affected by the change of the position of the holder.

冷却系统中的冷却介质可以是气体或液体,例如是水。水路充分在铜腔内部循环流动,通过热传导实现对石墨的冷却。因此,在此并不具体限定冷却腔室的具体数量和形状。The cooling medium in the cooling system can be gas or liquid, such as water. The water path fully circulates inside the copper cavity to cool the graphite through heat conduction. Therefore, the specific number and shape of the cooling chamber are not specifically limited here.

可动连接装置可以以不同的运动方式使束流截止件到达截断束流的位置,既可以将束流截止件以平动的方式横向插入和离开束流所在区域,也可以以旋转的方式将束流截止件旋入和离开束流所在区域。应当理解,如果为截束器壳体设置足够的内部空间,上述平动、旋转或者它们的结合都是可以实现的运动方式。对于本发明而言,关键的是可动连接装置能够为保持件以及其所保持的束流截止件提供两个位置,在运动到其中一个位置时截止束流,而在运动到另一个位置时则不影响束流的通过。The movable connecting device can make the beam cutoff reach the position of cutting off the beam in different movement modes, and can insert the beam cutoff into and leave the area where the beam is located in a translational manner, or can rotate the beam cutoff into and leave the area where the beam is located in a rotational manner. It should be understood that if sufficient internal space is provided for the beam cutter housing, the above-mentioned translation, rotation or a combination thereof are all feasible movement modes. For the present invention, it is critical that the movable connecting device can provide two positions for the retaining member and the beam cutoff retained by it, and cut off the beam when moving to one of the positions, and does not affect the passage of the beam when moving to the other position.

根据本发明的一种优选实施形式,可动连接装置包括若干螺杆,所述螺杆分别连接所述保持件和所述安装法兰并且能够在所述安装法兰外侧调节插入所述截束器壳体的深度。由此,就可以在设备外侧安全地调节保持件以及其所保持的束流截止件的位置,以决定截止和导通束流。According to a preferred embodiment of the present invention, the movable connection device includes a plurality of screws, which are respectively connected to the holding member and the mounting flange and can adjust the depth of the screws inserted into the beam cutter housing outside the mounting flange. Thus, the position of the holding member and the beam cutoff member held by the holding member can be safely adjusted outside the device to determine whether to cut off or conduct the beam.

束流截止件可以是任意形状,例如是任何横向于束流方向的平面或曲面。不过,优选的是,将束流截止件设计成筒形,尤其是锥筒状,其开口朝向束流方向,从而更大面积地接触束流,以降低束流密度。The beam cutoff can be of any shape, for example, any plane or curved surface transverse to the beam direction. However, preferably, the beam cutoff is designed to be cylindrical, especially conical, with its opening facing the beam direction, so as to contact the beam over a larger area to reduce the beam density.

相应地,所述保持件也优选地呈筒状,从而在背对束流的那侧贴合束流截止件,以便传导热量。优选的是,截束器还具有压板,所述压板位于束流截止件靠近束流来流方向那侧,用于与所述保持件共同压紧固定所述束流截止件。应当理解,如果压板由不同于束流截止材料的保持件材料制成,应当布置于束流的径向范围之外,但当压板由束流截止材料制成时,此时压板即便布置于束流的径向范围内也是可以的。Correspondingly, the retaining member is also preferably cylindrical, so that the side facing away from the beam fits the beam cutoff member so as to conduct heat. Preferably, the beam cutter further comprises a pressing plate, which is located on the side of the beam cutoff member close to the beam flow direction, and is used to press and fix the beam cutoff member together with the retaining member. It should be understood that if the pressing plate is made of a retaining member material different from the beam cutoff material, it should be arranged outside the radial range of the beam, but when the pressing plate is made of the beam cutoff material, it is acceptable to arrange the pressing plate within the radial range of the beam.

根据本发明的一种优选实施形式,截束器还具有测量引线,所述测量引线一端与束流截止件相连接,另一端与截束器壳体上贯穿安装法兰的绝缘端子相连接,由此实现测量信号的传输。According to a preferred embodiment of the present invention, the beam cutter further comprises a measuring lead, one end of which is connected to the beam cutoff piece, and the other end is connected to an insulating terminal on the beam cutter housing that passes through a mounting flange, thereby achieving transmission of a measuring signal.

本申请的其它特征和优点将在随后的说明书中阐述,并且,部分地从说明书中变得显而易见,或者通过实施本申请而了解。本申请的其他优点可通过在说明书以及附图中所描述的方案来实现和获得。Other features and advantages of the present application will be described in the following description, and partly become apparent from the description, or be understood by implementing the present application. Other advantages of the present application can be realized and obtained by the schemes described in the description and the drawings.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

下面结合附图详细解释本发明的实施方式。在附图中:The following is a detailed explanation of the embodiments of the present invention in conjunction with the accompanying drawings. In the accompanying drawings:

图1示意地示出了根据本发明的截束器的纵向剖面视图。FIG. 1 schematically shows a longitudinal cross-sectional view of a beam cutter according to the present invention.

附图用于解释本申请技术方案并构成说明书的一部分,与本申请的实施例一起用于解释本申请的技术方案,并不构成对本申请技术方案的限制。在附图中,相同的技术特征采用了相同的附图标记。The accompanying drawings are used to explain the technical solution of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the technical solution of the present application and do not constitute a limitation on the technical solution of the present application. In the accompanying drawings, the same technical features are marked with the same reference numerals.

具体实施方式Detailed ways

图1示意地示出了根据本发明的截束器10的纵向剖面视图。在此实施例中,根据本发明的截束器10安装在常规的小型真空诊断室内,在束线的真空诊断室下方设计接口通过真空室法兰152安装真空泵,从而实现真空室的真空环境。Fig. 1 schematically shows a longitudinal cross-sectional view of a beam cutter 10 according to the present invention. In this embodiment, the beam cutter 10 according to the present invention is installed in a conventional small vacuum diagnostic chamber, and an interface is designed below the vacuum diagnostic chamber of the beam line to install a vacuum pump through a vacuum chamber flange 152, thereby achieving a vacuum environment in the vacuum chamber.

在图1所示的截束器10中,束流截止件110呈锥筒状,由石墨材料制成。保持件120由铜制成,具有类似的锥筒形状,以铜腔水套121贴合在束流截止件背对能量束流20的束流方向的那侧。保持件120背对束流截止件110的那侧形成冷却系统130的冷却腔室。同时,在束流截止件110朝向束流方向的端面提供了压板111,用于与保持件共同压紧夹持束流截止件。束截束器10在图中的两侧通过束流孔法兰151与未示出的束流通道相连接。In the beam cutter 10 shown in FIG1 , the beam cutoff 110 is in the shape of a cone and is made of graphite. The holder 120 is made of copper and has a similar cone shape, and is attached to the side of the beam cutoff facing away from the beam direction of the energy beam 20 with a copper cavity water jacket 121. The side of the holder 120 facing away from the beam cutoff 110 forms a cooling chamber of the cooling system 130. At the same time, a pressure plate 111 is provided on the end face of the beam cutoff 110 facing the beam direction, which is used to press and clamp the beam cutoff together with the holder. The beam cutter 10 is connected to the beam channel (not shown) on both sides of the figure through the beam hole flange 151.

束流截止件与测量引线相连接,测量引线160的另一端连接至截束器壳体150上贯穿安装法兰153的绝缘端子161,从而能够实现对于截束器10的束流截止材料接收到的束流的在线连续检测。绝缘端子161焊接在安装法兰153上,以实现真空密封,同时实现绝缘端子161与截束器真空腔体的绝缘,从而实现束流截止件与截束器真空腔体的绝缘。The beam cutoff is connected to a measuring lead, and the other end of the measuring lead 160 is connected to an insulating terminal 161 on the beam cutter housing 150 that penetrates the mounting flange 153, so as to realize online continuous detection of the beam received by the beam cutoff material of the beam cutter 10. The insulating terminal 161 is welded to the mounting flange 153 to realize vacuum sealing, and at the same time, the insulating terminal 161 is insulated from the vacuum chamber of the beam cutter, so as to realize insulation between the beam cutoff and the vacuum chamber of the beam cutter.

进出水管132和可动连接装置140在此实施例中包括的螺杆同样与安装法兰153绝缘连接,以实现测量位置和大地的电气绝缘。图1中仅示出了水路绝缘块133。可动连接装置140必要时贯通安装法兰的位置的结构和绝缘方式在此并未详细示出。The water inlet and outlet pipes 132 and the screws included in the movable connecting device 140 in this embodiment are also insulated and connected to the mounting flange 153 to achieve electrical insulation between the measuring position and the ground. Only the waterway insulating block 133 is shown in FIG1 . The structure and insulation method of the position where the movable connecting device 140 passes through the mounting flange when necessary are not shown in detail here.

冷却腔室通过伸缩管(在此为波纹管)131与贯穿安装法兰153的进出水管132相连通,进而与外部的冷却介质源(未示出)连通而形成循环回路,不断带走束流截止件110传导给保持件120的热量。伸缩管设计确保了可动连接装置移动束流截止件110时水路始终保持连通。冷却介质在此是水,不过也不排除其它气体或液体的选择。The cooling chamber is connected to the water inlet and outlet pipes 132 penetrating the mounting flange 153 through the telescopic tube (here, a bellows) 131, and further connected to an external cooling medium source (not shown) to form a circulation loop, which continuously removes the heat transferred from the beam cutoff 110 to the holder 120. The telescopic tube design ensures that the water path remains connected when the movable connection device moves the beam cutoff 110. The cooling medium is water here, but other gases or liquids are not excluded.

尽管已经示出和描述了本发明的实施例,但是本领域的普通技术人员可以理解:在不背离本发明的原理和宗旨的情况下可以对这些实施例进行多种变化、修改、替换、变型以及任意组合,本发明的范围由权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, variations and any combination thereof may be made without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

附图标记列表Reference numerals list

10截束器10 Beam cutter

20能量束流20 Energy Beam

110束流截止件110 beam cutoff

111压板111 pressure plate

120保持件120 retaining parts

121铜腔水套121 copper cavity water jacket

130冷却系统130 Cooling System

131伸缩管131 Telescopic tube

132进出水管132 Inlet and outlet pipes

133水路绝缘块133 Waterway Insulation Block

140可动连接装置140 Movable connection device

150截束器壳体150 beam cutter housing

151束流孔法兰151 beam hole flange

152真空室法兰152 Vacuum chamber flange

153安装法兰153 Mounting flange

160测量引线160 measurement lead

161绝缘端子161 Insulated Terminals

Claims (12)

1. A beam cutter for cutting off an energy beam in a beam path, the beam cutter comprising:
a beam cut-off member having a beam cut-off surface made of a beam cut-off material capable of being exposed to a beam incoming direction;
a holding member that holds and contacts the beam cut-off member in a region other than the beam cut-off surface;
A cooling system in heat transfer connection with the holder for absorbing heat transferred from the beam stop to the holder when the beam stop stops the beam;
A movable connecting means for movably fixing the holder so that the beam cut-off member within the holder can be moved to a position to cut off or leave the beam;
a beam cutter housing accommodating the holder and the beam stop, wherein both sides of the beam cutter housing in a beam direction each have a beam hole connected to a beam passage through a beam hole flange, respectively, are connected to a vacuum pump through a vacuum chamber flange in a direction not affecting the beam, and have a mounting flange for mounting the movable connection device,
Wherein the beam cutter is also provided with a measuring lead, one end of the measuring lead is connected with the beam current stopping piece, the other end of the measuring lead is connected with an insulating terminal penetrating through the mounting flange on the beam cutter shell,
The cooling system comprises a plurality of cooling cavities formed on the side of the retainer opposite to the beam cutoff piece, and the cooling cavities penetrate through the mounting flange through a plurality of telescopic pipes to form a circulation loop with a cooling medium source outside the beam cutter shell.
2. The beam cutter of claim 1, wherein the source of cooling medium is a gas or a liquid.
3. The beam cutter of claim 1, wherein the movable connection means is adapted to laterally insert and remove the beam stop in a translational manner from the region of the beam.
4. The beam cutter according to claim 1, wherein the movable connection means is adapted to rotate the beam stop into and out of the region of the beam.
5. A beam cutter according to claim 3, wherein the movable connection means comprises a number of screws which connect the holder and the mounting flange respectively and enable the depth of insertion into the beam cutter housing to be adjusted outside the mounting flange.
6. The beam cutter according to claim 1, wherein the beam cut-off member has a cylindrical shape opening toward a beam direction.
7. The beam cutter according to claim 6, wherein the beam cut-off member has a tapered cylindrical shape opening toward the beam direction.
8. The beam cutter of claim 1, wherein the beam stop is planar or curved transverse to the beam direction.
9. The beam cutter according to claim 6, wherein the holder has a cylindrical shape opening in a beam direction, and surrounds the beam stop in a region other than the beam stop surface.
10. The beam cutter according to claim 1, further comprising a pressing plate located on a side of the beam stop member close to a beam incoming direction for pressing and fixing the beam stop member together with the holder.
11. The beam cutter of claim 1, wherein the beam stop is made of graphite.
12. The beam cutter of claim 1, wherein the retainer is made of copper.
CN202210995393.9A 2022-08-18 2022-08-18 High-power beam cutter with measurement function Active CN115315056B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210995393.9A CN115315056B (en) 2022-08-18 2022-08-18 High-power beam cutter with measurement function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210995393.9A CN115315056B (en) 2022-08-18 2022-08-18 High-power beam cutter with measurement function

Publications (2)

Publication Number Publication Date
CN115315056A CN115315056A (en) 2022-11-08
CN115315056B true CN115315056B (en) 2024-05-28

Family

ID=83862228

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210995393.9A Active CN115315056B (en) 2022-08-18 2022-08-18 High-power beam cutter with measurement function

Country Status (1)

Country Link
CN (1) CN115315056B (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09197098A (en) * 1996-01-22 1997-07-31 Ishikawajima Harima Heavy Ind Co Ltd Vacuum partition device for synchrotron radiation beam line
KR20070069464A (en) * 2005-12-28 2007-07-03 동부일렉트로닉스 주식회사 Beam drop prevention device in ion implantation equipment
KR20090126389A (en) * 2008-06-04 2009-12-09 주식회사 동부하이텍 Beam drop prevention device and method in ion implantation equipment
CN208888378U (en) * 2018-06-20 2019-05-21 北京大学 An angle neutron beam cut-off device
CN110604876A (en) * 2019-10-23 2019-12-24 北京中百源国际科技创新研究有限公司 Proton treatment equipment based on cyclotron
CN110850464A (en) * 2019-12-18 2020-02-28 中国原子能科学研究院 A proton beam intensity and cross section measuring device
CN112911783A (en) * 2021-03-25 2021-06-04 四川大学 Film energy degrader suitable for high-power beam

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09197098A (en) * 1996-01-22 1997-07-31 Ishikawajima Harima Heavy Ind Co Ltd Vacuum partition device for synchrotron radiation beam line
KR20070069464A (en) * 2005-12-28 2007-07-03 동부일렉트로닉스 주식회사 Beam drop prevention device in ion implantation equipment
KR20090126389A (en) * 2008-06-04 2009-12-09 주식회사 동부하이텍 Beam drop prevention device and method in ion implantation equipment
CN208888378U (en) * 2018-06-20 2019-05-21 北京大学 An angle neutron beam cut-off device
CN110604876A (en) * 2019-10-23 2019-12-24 北京中百源国际科技创新研究有限公司 Proton treatment equipment based on cyclotron
CN110850464A (en) * 2019-12-18 2020-02-28 中国原子能科学研究院 A proton beam intensity and cross section measuring device
CN112911783A (en) * 2021-03-25 2021-06-04 四川大学 Film energy degrader suitable for high-power beam

Also Published As

Publication number Publication date
CN115315056A (en) 2022-11-08

Similar Documents

Publication Publication Date Title
US4694264A (en) Radio frequency coaxial feedthrough device
JPH0212745A (en) Cooler of x-ray generator
JP2009527882A (en) Transfer arc type plasma torch
CN114446833B (en) Bearing device and semiconductor process equipment
CN115315056B (en) High-power beam cutter with measurement function
WO2018184554A1 (en) X-ray tube device and spring pin
JP3989584B2 (en) High power microwave plasma applicator
CN111122344A (en) A structure for realizing ultra-high temperature heating of synchrotron radiation source in situ tensile CT imaging experiments
EP3071915A2 (en) High power x-ray tube housing
JP2022132708A (en) Cooling block and industrial magnetron
CN214088662U (en) Sample substrate table and plasma chemical vapor deposition equipment
JPH09312285A (en) Double wall microwave plasma applicator
US2958830A (en) Coaxial line load device
US7456395B2 (en) Glow discharge source
JP4853940B2 (en) High frequency power measuring device in high frequency heating device
CN217011262U (en) Neutron generation target
JP2023048149A (en) Liquid-cooled test socket for testing semiconductor integrated circuit chips
CN214281680U (en) Heating electrode suitable for high temperature furnace heating elements of different lengths
TW201547330A (en) Radiation generating apparatus
CN109216840B (en) A waveguide load assembly for use in a vacuum environment
CN108322985B (en) Plasma generator
CN110364062B (en) Experimental device for thermionic power generation including temperature control vessel
CN113488360A (en) Method and device for prolonging service life of NEA GaN electron source
CN118843247B (en) A single- and double-film switchable compact liquid target based on W-shaped water cooling
JPS6089048A (en) Faraday cage for measuring beam current

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant