CN115314626B - Integrated quantitative phase imaging camera, method and image processing method - Google Patents

Integrated quantitative phase imaging camera, method and image processing method Download PDF

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CN115314626B
CN115314626B CN202211195406.0A CN202211195406A CN115314626B CN 115314626 B CN115314626 B CN 115314626B CN 202211195406 A CN202211195406 A CN 202211195406A CN 115314626 B CN115314626 B CN 115314626B
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light
polarization
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CN115314626A (en
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闵俊伟
姚保利
但旦
于湘华
薛雨阁
袁勋
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The invention belongs to the technical field of optical instruments, and particularly relates to an integrated quantitative phase imaging camera, an integrated quantitative phase imaging method and an image processing method, which solve the problem that the existing camera cannot image intensity and phase at the same time. The camera comprises a shell, and an integrated image sensor and an image processing circuit board which are positioned in the shell; the shell is provided with a light-passing interface for connecting the optical lens in an overlap mode; the integrated image sensor comprises a linear polarizer layer, a polarization two-dimensional diffraction beam splitting layer and a two-dimensional pixilated digital image photosensitive chip which are sequentially arranged in a laminated manner; the image processing circuit board receives the electric signal output by the integrated image sensor and converts the electric signal into an interference dot matrix image. And processing the interference dot matrix image based on an image processing method to obtain a target intensity image and a quantitative phase image. The camera of the invention can reproduce the intensity and quantitative phase distribution of the target from the recorded single interference dot matrix image only by aligning the camera to the transmitted light passing through the target or the reflected light reflected by the target and recording the corresponding interference dot matrix image.

Description

Integrated quantitative phase imaging camera, method and image processing method
Technical Field
The invention belongs to the technical field of optical instruments, and particularly relates to an integrated quantitative phase imaging camera, an integrated quantitative phase imaging method and an image processing method, which can realize intensity imaging and quantitative phase imaging of a target.
Background
With the continuous development of the photoelectric imaging technology, various cameras come out in succession, and great convenience is brought to daily shooting recording, scientific research, industrial detection and the like. However, the existing camera can only respond to the intensity signal of the target, and cannot directly realize phase imaging.
While phase is another important property of light waves in addition to intensity. By imaging the phase of the target, not only can the three-dimensional profile of the transparent object be observed, but also information such as the internal structural composition can be obtained. Therefore, the quantitative phase imaging has very important significance and application value for industrial detection, biomedical research, adaptive optical imaging and the like.
In order to achieve phase imaging, it is known to convert the phase distribution of the object into an intensity distribution in such a way that the phase information can be recorded by the camera, and then to calculate the phase distribution of the object from the recorded intensity map or maps. According to different conversion modes, the current quantitative phase imaging can be divided into two categories, namely interference imaging and non-interference imaging. The interference imaging method converts phase information of a target into intensity distribution of an interference pattern in an interference mode, and then quantitatively reproduces the phase of the measured target by adjusting the recorded interference pattern. Common interferometric imaging devices are michelson interferometers, mach zehnder interferometers, linik interferometers, shearing interferometers, and the like. The equipment can realize nanometer-precision quantitative phase imaging, but object parameter separation type interference imaging equipment with object light and reference light transmitted along different paths, such as a Michelson interferometer, a Mach Zehnder interferometer, a Linik interferometer and the like, is easily influenced by external disturbance during imaging, so that the equipment has strict requirements on the use environment, can be used only in a laboratory mostly, and has a limited application range. Although the object reference common-path interference imaging equipment with the object light and the reference light propagating along almost the same path, such as the shearing interferometer, has strong anti-environmental disturbance capability, an additional light splitting regulation and control component is mostly needed, and the structure is complex and the volume is large. The non-interference quantitative phase imaging method comprises the steps of firstly, utilizing a camera to record diffraction intensity images of a plurality of targets at different positions in sequence, and then, utilizing mathematical calculation methods such as a genetic iteration algorithm or a light intensity transmission equation and the like to calculate phase distribution of the targets from the recorded intensity images. Compared with an interference imaging method, the device has a simple structure, but diffraction intensity images of a target need to be recorded at different positions along a light propagation direction during phase imaging, real-time phase imaging cannot be achieved, and the phase imaging precision is only in a submicron level. In addition, although the phase detector taking the hartmann wavefront detector as an example can also measure the phase distribution of the target, the imaging resolution is low, and the phase detection accuracy is limited by the size of a single lens in the micro lens array at the front end of the detector.
Disclosure of Invention
The invention aims to overcome the problem that the existing camera cannot image the intensity and the phase at the same time, and provides an integrated quantitative phase imaging camera, a method and an image processing method capable of imaging the intensity and the phase of a target at the same time. Compared with the existing object parameter separation type interference imaging equipment, the interference imaging equipment has the advantage of strong environmental disturbance resistance; compared with the prior object parameter common-path type interference imaging equipment, the device has the advantages of simple structure, small volume, convenient use and wide application range; compared with the existing non-interference quantitative phase imaging device, the phase imaging device has the advantages of high phase imaging precision and real-time phase imaging; compared with the existing phase detector, the phase detector has the advantage of high imaging precision.
The technical scheme of the invention is as follows:
an integrate quantitative phase imaging camera, includes the casing, its special character lies in: the integrated image sensor and the image processing circuit board are positioned in the shell;
the shell is provided with an optical interface; the optical lens refers to an external component and is not a camera structure;
the integrated image sensor comprises a linear polarizer layer, a polarization two-dimensional diffraction beam splitting layer and a two-dimensional pixilated digital image photosensitive chip which are sequentially arranged in a laminated manner; the linear polarizer layer is used for receiving the target light passing through the light transmission interface and enabling the target light to become horizontal linear polarized light; the polarization two-dimensional diffraction beam splitting layer is used for diffracting one horizontal linear polarization light beam passing through the linear polarizer layer into four diffraction light beams containing the same information, wherein the two diffraction light beams are transmitted along the horizontal direction, the polarization direction of the two diffraction light beams is the same as the transmission direction of the linear polarizer layer, the other two diffraction light beams are transmitted along the vertical direction, and the polarization direction of the two diffraction light beams is vertical to the transmission direction of the linear polarizer layer; the two-dimensional pixelized digital image photosensitive chip is electrically connected with the image processing circuit board and is used for receiving the light intensity of four beams of diffracted light containing the same information output by the polarization two-dimensional diffraction light splitting layer, performing photoelectric conversion on the light intensity, converting the light intensity distribution into corresponding electric signals and transmitting the electric signals to the image processing circuit board;
the image processing circuit board is used for converting the received electric signals into interference dot matrix images capable of obtaining target intensity images and quantitative phase images.
Furthermore, in order to simplify the structure and obtain a larger effective target surface, the polarization two-dimensional diffraction light splitting layer is a transmission type liquid crystal polymer polarization two-dimensional grating or a super-structure component.
Furthermore, the periods of the two-dimensional polarization grating of the transmissive liquid crystal polymer in the horizontal direction and the vertical direction are both Λ, and the size of Λ is 4-8 times of the side length p of the pixel of the two-dimensional pixelized digital image photosensitive chip.
Furthermore, the thickness of the substrate of the polarization two-dimensional diffraction light splitting layer is d, and d is more than 0 and less than or equal to 4mm; the diffraction angle range of the diffraction light beams transmitted through the polarization two-dimensional diffraction light splitting layer is [ lambda/8 p, lambda/4 p ], wherein lambda is the central wavelength of the target light.
Further, the size of the lambda is 6 times of the side length p of the pixel of the two-dimensional pixelized digital image photosensitive chip; the substrate thickness d =1.8mm of the polarization two-dimensional diffraction light splitting layer; the diffraction angle of the diffracted light beam transmitted through the polarized two-dimensional diffraction splitting layer is lambda/6 p. The space bandwidth product of the camera can be fully utilized, namely, the highest imaging resolution and the best imaging effect are obtained.
Further, the two-dimensional pixelized digital image sensing chip is a two-dimensional CCD or CMOS image sensing chip; the linear polarizer layer is a broadband linear polarizer.
Furthermore, the integrated quantitative phase imaging camera further comprises an image processing unit, wherein the image processing unit is used for collecting the interference dot matrix image and processing the interference dot matrix image based on an image processing algorithm to obtain an intensity image and a quantitative phase image.
Further, the image processing unit processes the interference dot matrix image based on the image processing algorithm to obtain an intensity image
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And target phase distribution image:
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in the formula (I), the compound is shown in the specification,
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in order to interfere with the intensity distribution of the dot matrix image,
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in order to be a function of the fourier transform,W 0 in order to be the initial filtering window,
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is a function of the inverse fourier transform,
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a target phase distribution image;
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and
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is composed of
Figure 347619DEST_PATH_IMAGE007
The phase gradient information in two orthogonal directions,x0 isThe abscissa of the starting point of the path integral,y0 is the ordinate of the starting point of the path integration.
Further, it is obtained based on the following formula
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And
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Figure DEST_PATH_IMAGE010
Figure DEST_PATH_IMAGE011
in the formula (I), the compound is shown in the specification,W 1 andW 2 a first filter window and a second filter window, respectively.
Further, the housing includes a camera front case and a camera rear case; the light-transmitting interface is arranged in the right center of the front shell of the camera; the integrated image sensor is fixed on the front camera shell, and the image processing circuit board is fixed on the rear camera shell; the camera rear shell is provided with a camera data output interface.
Further, the two-dimensional diffraction light splitting layer is prepared based on the following steps:
step a, spin-coating an orientation layer on a quartz/glass substrate with a certain thickness;
b, exposing the orientation layer by using two linearly polarized light beams with the same light intensity and orthogonal polarization states, and recording the polarization states of the two linearly polarized light beams by the orientation layer;
and c, spin-coating a liquid crystal layer on the exposed orientation layer, wherein the orientation layer influences the orientation arrangement of liquid crystal polymer molecules in the liquid crystal layer through self anchoring, and a transmission type liquid crystal polymer polarization two-dimensional grating with the period of lambda is formed.
The invention also provides an integrated quantitative phase imaging method, which is characterized in that: the method comprises the following steps:
step 1, converting target light into horizontal linear polarized light;
step 2, diffracting one horizontal linear polarized light into four diffracted lights containing the same information, wherein two diffracted lights are transmitted along the horizontal direction, and the other two diffracted lights are transmitted along the vertical direction;
step 3, performing photoelectric conversion on the light intensity of the four beams of diffracted light containing the same information, and converting the light intensity distribution into corresponding electric signals;
and 4, converting the received electric signals into interference dot matrix images capable of obtaining target intensity images and quantitative phase images.
The invention also provides an image processing method for processing the interference dot matrix image output by the integrated quantitative phase imaging camera, which is characterized by comprising the following steps of:
step 1, performing Fourier transform on a recorded interference dot matrix image to obtain a spectrogram of the interference dot matrix image;
step 2, utilizing an initial filtering windowW 0 Filtering out zero-order frequency spectrum in the center of the spectrogram, and performing inverse Fourier transform on the zero-order frequency spectrum to obtain an intensity image of the target
Figure 997540DEST_PATH_IMAGE001
Figure DEST_PATH_IMAGE012
In the formula
Figure 706870DEST_PATH_IMAGE004
Intensity distribution of the interference dot matrix image;
Figure 624885DEST_PATH_IMAGE005
in order to be a function of the fourier transform,
Figure 976232DEST_PATH_IMAGE006
is an inverse Fourier transform function;
step 3, utilizing the first filteringWindow openingW 1 And a second filter windowW 2 Separately filter out
Figure 797558DEST_PATH_IMAGE008
Frequency spectrum sum of
Figure 208947DEST_PATH_IMAGE009
Then inverse fourier transformed, resulting in two orthogonal phase gradients:
Figure 115723DEST_PATH_IMAGE010
Figure 5182DEST_PATH_IMAGE011
in the formula, arg represents taking complex phase angle operation;
Figure 681014DEST_PATH_IMAGE007
is a target phase profile;
Figure 263305DEST_PATH_IMAGE008
and
Figure 436140DEST_PATH_IMAGE009
is composed of
Figure 129290DEST_PATH_IMAGE007
Phase gradient information in two orthogonal directions;
step 4, performing path integral calculation by using two orthogonal phase gradients to obtain quantitative phase imaging:
Figure DEST_PATH_IMAGE013
wherein the content of the first and second substances,x0 is the abscissa of the starting point of the path integral,y0 is the ordinate of the starting point of the path integration.
The beneficial effects of the invention are:
1. the camera integrates a polarization regulation technology, a diffraction light splitting technology and an interference imaging technology, only needs to align the transmitted light passing through a target or the reflected light reflected by the target and records the corresponding interference dot matrix image, and can reproduce the intensity and quantitative phase distribution of the target from the recorded single interference dot matrix image, thereby not only realizing the traditional intensity imaging, but also realizing the quantitative phase imaging and obtaining the three-dimensional profile image of the target.
2. Because the camera of the invention uses the integrated image sensor, additional reference light is not needed, and four beams of diffracted light are transmitted along basically the same path, compared with the prior object-parameter separation type interference imaging equipment, the camera has the advantages of strong environmental disturbance resistance and high stability.
3. The camera integrates the functions of polarization regulation, diffraction light splitting interference and image recording into a single integrated image sensor, and can realize object-parameter common-path type interference imaging without other components, so compared with the existing object-parameter common-path type interference imaging equipment, the camera has the advantages of simple structure, small volume, convenience in use and wide application range.
4. Because the shearing interference among the four beams of diffracted light is recorded, the intensity and the phase distribution of the target are reproduced through the interference dot pattern, and the camera is essentially the principle of interference imaging, compared with the conventional non-interference quantitative phase imaging device, the camera has the advantages of high phase imaging precision and real-time phase imaging.
5. The camera only has the two-dimensional pixelized digital image photosensitive chip pixel side length size because the period of the polarized two-dimensional diffraction light splitting layer in the integrated image sensor is the two-dimensional pixelized digital image photosensitive chip pixel side length sizep4-8 times of the total unit size of the diffraction element, such as a micro-lens array, added at the front end of the existing phase detector, such as a Hartmann wavefront detector, is generally more than 10 times of the side length of the pixel of the two-dimensional pixelized digital image photosensitive chip. The larger the unit size of the element added at the front end is, the more easily the imaging accuracy is reduced, so that the phase detector has the advantage of high imaging accuracy compared with the existing phase detector.
Drawings
FIG. 1 is a schematic diagram of an exploded view of an integrated quantitative phase imaging camera according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an exploded view of an integrated image sensor in an integrated quantitative phase imaging camera according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a local explosion structure of an image sensor in an integrated quantitative phase imaging camera according to an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of an image sensor in an integrated quantitative phase imaging camera according to an embodiment of the present invention;
FIG. 5 is an interference dot matrix image of PMMA microspheres recorded by an integrated quantitative phase imaging camera according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of the frequency spectrum distribution and filtering of an interference dot matrix image recorded by an integrated quantitative phase imaging camera according to an embodiment of the present invention;
FIG. 7 is an intensity image of PMMA microspheres obtained with an example of the present invention;
FIG. 8 is a diagram showing the quantitative height distribution of PMMA microspheres obtained in the example of the present invention;
FIG. 9 is a schematic diagram of a quantitative height profile of PMMA microspheres obtained by an example of the present invention;
the reference numbers in the figures are:
1. a camera front housing; 2. an integrated image sensor; 3. an image processing circuit board; 4. a camera back case; 2-1, a linear polarizer layer; 2-2, polarizing a two-dimensional diffraction light splitting layer; 2-3, two-dimensional pixelization digital image photosensitive chip.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, specific embodiments accompanied with figures are described in detail below, and it is apparent that the described embodiments are a part of the embodiments of the present invention, not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, shall fall within the protection scope of the present invention.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than those specifically described and will be readily apparent to those of ordinary skill in the art without departing from the spirit of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.
As shown in fig. 1, the integrated quantitative phase imaging camera of the present embodiment includes a camera front case 1, an integrated image sensor 2, an image processing circuit board 3, and a camera back case 4. The center of the camera front shell 1 is provided with a light-passing interface capable of being connected with an optical lens (note that the optical lens refers to an external component and a non-camera structure, such as a microscope or a telescope, can be connected with commercial devices according to the use environment), four corners are provided with bolt mounting through holes, and bolts can be used for being connected with threaded mounting holes at the four corners of the camera rear shell 4 to form a closed cavity.
Integrated image sensor 2 is located the camera front shell 1 and the camera rear shell 4 cavity of formation, has the screw thread mounting hole on the 1 rear panel of camera front shell, uses the bolt to be fixed in integrated image sensor 2 on the 1 rear panel of camera front shell. As shown in FIG. 2, the integrated image sensor 2 is a three-layer structure, which is composed of a linear polarizer layer 2-1, a polarization two-dimensional diffraction beam splitting layer 2-2, and a two-dimensional pixilated digital image sensor chip 2-3, which are sequentially connected with each other in a sealing manner. The linear polarizer layer 2-1 receives the target light of the light transmission interface and makes the target light become horizontal linear polarized light; the polarization two-dimensional diffraction light-splitting layer 2-2 diffracts one horizontal line polarization incident light passing through the linear polarizer layer 2-1 into four beams of diffracted light which contains the same information and is transmitted along different directions, wherein two beams of diffracted light are transmitted along the horizontal direction, the other two beams of diffracted light are transmitted along the vertical direction, the polarization directions of the two beams of diffracted light transmitted along the horizontal direction are the same as the transmission vibration direction of the linear polarizer layer 2-1, and the polarization directions of the two beams of diffracted light transmitted along the vertical direction are perpendicular to the transmission vibration direction of the linear polarizer layer 2-1.
As shown in FIG. 3, the substrate thickness of the polarization two-dimensional diffraction spectroscopic layer 2-2 isdThat is, the distance between the polarization two-dimensional diffraction beam splitting layer 2-2 and the two-dimensional pixelized digital image photosensitive chip 2-3 isd. Four beams of diffracted light pass throughdAfter the distance is propagated, shearing interference occurs between two diffraction beams which are propagated along the horizontal directionIn this regard, shear interference occurs between two diffracted beams propagating in the vertical direction, while no interference occurs between a diffracted beam propagating in the horizontal direction and a diffracted beam propagating in the vertical direction. Photoelectric signals received by the two-dimensional pixelized digital image photosensitive chips 2-3 are transmitted to the image processing circuit board 3 fixed on the front panel of the camera rear shell 4 through the flat cable to be processed, and then are converted into interference dot matrix images capable of obtaining target intensity images and quantitative phase images, and finally the interference dot matrix images can be output to a computer through a camera data output interface on the rear panel of the camera rear shell 4. And processing the received interference dot-matrix by using image processing software to obtain an intensity image and a quantitative phase image of the target simultaneously.
The principle of the embodiment is as follows:
when the transmitted light beam transmitted through the target or the light beam reflected by the target surface passes through the light-transmitting interface on the front camera housing 1, the light beam irradiates the integrated image sensor 2. The incident light is changed into horizontal linear polarized light with the same transmission direction as the linear polarizer layer 2-1 to irradiate on the polarization two-dimensional diffraction light splitting layer 2-2 of the integrated image sensor 2 after passing through the linear polarizer layer 2-1 of the integrated image sensor 2. In this embodiment, the polarization two-dimensional diffraction beam splitting layer 2-2 is a transmission-type liquid crystal polymer polarization two-dimensional grating (in other embodiments, other elements such as a super-structure element can also be used, but compared with the super-structure element, the transmission-type liquid crystal polymer polarization two-dimensional grating has the advantages of simple structure, easy implementation and large effective target surface). The method comprises the steps of spin-coating an orientation layer on a quartz/glass substrate with a certain thickness, and exposing the quartz/glass substrate by two linearly polarized lights with the same light intensity and orthogonal polarization states, wherein the polarization states of the two linearly polarized lights can be recorded by the orientation layer. Then a new liquid crystal layer is spin-coated on the exposed alignment layer. At this time, the alignment layer "recording" the polarization state of the light beam affects the alignment of the liquid crystal polymer molecules in the liquid crystal layer by anchoring itself, and forms a liquid crystal polarization grating having a period Λ. The period Λ of the liquid crystal polarization grating is typically the pixel side length dimension in the two-dimensional pixelated digital image sensor chip 2-3p4 to 8 times of the polarization direction of the polarized two-dimensional diffraction splitting layer 2-2, diffraction of the diffracted light beam transmitted therethroughThe angular range is [ lambda/8 ]p, λ/4p]Where λ is the center wavelength of the target beam. In this embodiment, as shown in FIG. 3, the grating period Λ of the liquid crystal polarization grating is the pixel side length dimension of the two-dimensional pixelized digital image sensor chip 2-3p6 times of Λ =6p(ii) a The diffraction angle of the diffracted light beam passing through the polarized two-dimensional diffraction splitting layer 2-2 is lambda/6p. When horizontally linearly polarized light passing through the linear polarizer layer 2-1 is incident on the polarization two-dimensional diffraction splitting layer 2-2, the light beam will be diffracted into four diffracted lights containing the same information but propagating in different directions due to the optical rotation characteristics of the liquid crystal polymer molecules. The included angles between the two diffracted light beams which are transmitted along the horizontal direction and the optical axis are respectively-lambda/lambda and lambda/lambda, the polarization direction of the two diffracted light beams is the same as the polarization direction of the linearly polarized light which is transmitted through the linear polarizer layer 2-1, the included angles between the other two diffracted light beams which are transmitted along the vertical direction and the optical axis are respectively-lambda/lambda and lambda/lambda, and the polarization direction of the two diffracted light beams is orthogonal to the polarization direction of the linearly polarized light which is transmitted through the linear polarizer layer 2-1. Therefore, the polarization states of the two diffracted lights propagating in the horizontal direction and the two diffracted lights propagating in the vertical direction are perpendicular to each other. The substrate thickness of the polarization two-dimensional diffraction light splitting layer 2-2 isdThat is, the distance between the polarization two-dimensional diffraction beam splitting layer 2-2 and the two-dimensional pixelized digital image photosensitive chip 2-3 isd. When the four diffracted lights pass throughdAfter the distance is transmitted, shearing interference occurs between the four diffracted lights with the same polarization direction, namely, shearing interference occurs between the two linearly polarized lights which are transmitted along the horizontal direction, shearing interference occurs between the two linearly polarized lights which are transmitted along the vertical direction, interference does not occur between the two linearly polarized lights which are transmitted along the horizontal direction and the two linearly polarized lights which are transmitted along the vertical direction, and only intensity is superposed. Photoelectric signals collected by the two-dimensional pixelization digital image light-sensitive chip 2-3 are transmitted to the image processing circuit board 3 through a flat cable to be processed, and then are changed into interference dot matrix images to be output to a computer. Intensity distribution of the interference lattice image
Figure 862890DEST_PATH_IMAGE004
Can be expressed as:
Figure 881662DEST_PATH_IMAGE014
(1)
wherein the content of the first and second substances,I 0 for the light intensity of the light beam incident on the integrated quantitative phase imaging camera,g(x,y) Is the target phase profile.
As can be seen from equation (1), the recorded interference dot pattern includes a target phase distributiong(x,y) Gradient information in two orthogonal directions
Figure 497451DEST_PATH_IMAGE008
And
Figure 259871DEST_PATH_IMAGE009
. And performing Fourier transform on the recorded interference dot-matrix image to obtain a spectrogram of the interference dot-matrix image. Zero frequency of the target,
Figure 644716DEST_PATH_IMAGE008
The frequency spectrum of,
Figure 67345DEST_PATH_IMAGE009
The conjugate spectrum of,
Figure 170430DEST_PATH_IMAGE008
Frequency spectrum sum of
Figure 205382DEST_PATH_IMAGE009
Will be distributed at different positions in the spectrogram respectively. Using an initial filtering window of suitable sizeW 0 Filtering out zero-order frequency spectrum in the center of spectrogram, performing inverse Fourier transform to obtain intensity image of targetInt(x,y) And realizing the intensity imaging of the target.
Figure 975892DEST_PATH_IMAGE012
(2)
Using a first filtering window of suitable sizeW 1 And a firstTwo filtering windowsW 2 Separately filter out
Figure 805308DEST_PATH_IMAGE008
Frequency spectrum sum of
Figure 661268DEST_PATH_IMAGE009
And then inverse fourier transforming them can result in phase gradients in two orthogonal directions:
Figure 499911DEST_PATH_IMAGE015
(3)
wherein arg represents taking a complex phase angle operation. The two orthogonal phase gradients are used for path integral calculation, quantitative phase distribution of a target can be reproduced, and quantitative phase imaging is achieved.
Figure 859348DEST_PATH_IMAGE013
(4)
Wherein, the first and the second end of the pipe are connected with each other,x0 is the abscissa of the starting point of the path integral,y0 is the ordinate of the starting point of the path integration, which starting point is the reconstructed phase gradient map
Figure 626709DEST_PATH_IMAGE008
And
Figure 704387DEST_PATH_IMAGE009
the point where the median value is the smallest.
Based on the principle, the light-transmitting interface of the camera of the embodiment is aligned to the transmitted light beam which transmits the target or the light beam which is reflected by the surface of the target, so that the interference dot matrix image which can extract the intensity image and the quantitative phase image can be obtained. And controlling the camera to acquire an interference dot matrix image by using control software. And processing the acquired interference dot-matrix by using image processing software to obtain an intensity image and a quantitative phase image of the observed target.
The camera of the embodiment adopts the IMX432LLJ-And the C-type CMOS chip is a two-dimensional pixelized digital image photosensitive chip 2-3. The chip has a pixel size of 9 μm × 9 μm and a pixel count of 1600 × 1100. The period of the polarization two-dimensional diffraction splitting layer 2-2 was 54 μm × 54 μm. The substrate thickness was 1.8mm. The linear polarizer layer 2-1 is a wide-band linear polarizer with the working range of 400 to 700nm. A PMMA (polymethyl methacrylate) microsphere with the diameter of 105 microns soaked in glycerol is used as an observation object, and the intensity and phase distribution of the PMMA microsphere are observed by using the camera. Because of the small size of the microspheres, observation using a microscope is required. The camera of this example was mounted at the camera interface of a commercial trinocular optical microscope (Phoenix, china, PH100-3B 41L-IPL), illuminated with an LED light source on the microscope, and the microspheres were observed using a 40-fold objective lens (40X/0.65). The interference lattice pattern recorded by the camera of the present embodiment is shown in fig. 5. The spectral distribution and filtering of the interference lattice diagram is schematically shown in fig. 6. As is evident from fig. 6, the frequency spectrum of the recorded interference pattern is mainly distributed over five different regions. By using a suitably sized filter window W 0 、W 1 And W 2 The required zeroth order spectrum, horizontal direction gradient spectrum and vertical direction gradient spectrum can be filtered out separately. The intensity map of the resulting PMMA microspheres can be reproduced using equation (2), as shown in fig. 7. The phase distribution of PMMA microspheres can be reproduced by using the formulas (3) and (4), as shown in FIG. 8. A section is taken from the reconstructed phase diagram and analyzed, the position of the section is shown by dotted lines in fig. 8, and the phase distribution of the section is shown in fig. 9, which shows that the height measurement of the target can be realized by using the camera.

Claims (11)

1. An integrate quantitative phase imaging camera, includes the casing, its characterized in that: the integrated image sensor (2) and the image processing circuit board (3) are positioned in the shell;
the shell is provided with an optical interface; the integrated image sensor (2) comprises a linear polarizer layer (2-1), a polarization two-dimensional diffraction beam splitting layer (2-2) and a two-dimensional pixilated digital image photosensitive chip (2-3) which are sequentially arranged in a laminated manner; the linear polarizer layer (2-1) is used for receiving the target light passing through the light transmission interface and enabling the target light to become horizontally linearly polarized light; the polarization two-dimensional diffraction light splitting layer (2-2) is used for diffracting one horizontal linear polarization light beam passing through the linear polarizer layer (2-1) into four diffraction light beams containing the same information, wherein the two diffraction light beams are transmitted along the horizontal direction, the polarization direction of the two diffraction light beams is the same as the transmission direction of the linear polarizer layer (2-1), the other two diffraction light beams are transmitted along the vertical direction, and the polarization direction of the two diffraction light beams is vertical to the transmission direction of the linear polarizer layer (2-1); the two-dimensional pixelization digital image photosensitive chip (2-3) is electrically connected with the image processing circuit board (3) and is used for receiving the light intensity of four beams of diffracted light containing the same information output by the polarization two-dimensional diffraction light splitting layer (2-2), carrying out photoelectric conversion on the light intensity, converting the light intensity distribution into corresponding electric signals and transmitting the electric signals to the image processing circuit board (3);
the image processing circuit board (3) is used for converting the received electric signals into interference dot matrix images capable of obtaining target intensity images and quantitative phase images;
the interference matrix image acquisition device further comprises an image processing unit, wherein the image processing unit is used for acquiring the interference matrix image and processing the interference matrix image based on an image processing algorithm to obtain a target intensity image and a quantitative phase image.
2. The integrated quantitative phase imaging camera of claim 1, wherein: the polarization two-dimensional diffraction light splitting layer (2-2) is a transmission type liquid crystal polymer polarization two-dimensional grating or a super-structure component.
3. The integrated quantitative phase imaging camera of claim 2, wherein: the periods of the transmission type liquid crystal polymer polarization two-dimensional grating in the horizontal direction and the vertical direction are both lambda, and the size of lambda is 4-8 times of the side length p of the pixel of the two-dimensional pixelized digital image photosensitive chip (2-3).
4. The integrated quantitative phase imaging camera of claim 3, wherein: the substrate thickness of the polarization two-dimensional diffraction light splitting layer (2-2) is d, and d is more than 0 and less than or equal to 4mm; the diffraction angle range of the diffracted light beam transmitted through the polarization two-dimensional diffraction light splitting layer (2-2) is [ lambda/8 p, lambda/4 p ], wherein lambda is the central wavelength of the target light.
5. The integrated quantitative phase imaging camera of claim 4, wherein: the size of the lambda is 6 times of the side length p of the pixels of the two-dimensional pixelized digital image photosensitive chip (2-3); the substrate thickness d =1.8mm of the polarization two-dimensional diffraction splitting layer (2-2); the diffraction angle of the diffracted light beam transmitted through the polarization two-dimensional diffraction splitting layer (2-2) is lambda/6 p.
6. The integrated quantitative phase imaging camera of claim 5, wherein: the two-dimensional pixelized digital image photosensitive chip (2-3) is a two-dimensional CCD or CMOS image sensing chip; the linear polarizer layer (2-1) is a broadband linear polarizer.
7. An integrated quantitative phase imaging camera according to any one of claims 1-6 and wherein: the image processing unit processes the interference lattice image based on the following image processing algorithm to obtain a target intensity image Int (x, y) and a target phase distribution image:
Int(x,y)=|IFFT{W 0 ·FFT[I(x,y)]}| 2
Figure FDA0004015143640000021
wherein I (x, y) is intensity distribution of the interference lattice image, FFT (-) is Fourier transform function, W 0 For the initial filtering window, IFFT (·) is the inverse fourier transform function, g (x, y) is the target phase distribution image;
Figure FDA0004015143640000022
and &>
Figure FDA0004015143640000023
Phase gradient information of two orthogonal directions of g (x, y), wherein x0 is an abscissa of a path integration starting point, and y0 is an ordinate of the path integration starting point; based on the formulaGet->
Figure FDA0004015143640000024
And &>
Figure FDA0004015143640000025
Figure FDA0004015143640000026
Figure FDA0004015143640000027
Wherein arg represents a complex phase angle operation, W 1 And W 2 A first filter window and a second filter window, respectively.
8. The integrated quantitative phase imaging camera of claim 7, wherein: the shell comprises a camera front shell (1) and a camera rear shell (4); the light-transmitting interface is arranged in the right center of the front camera shell (1); the integrated image sensor (2) is fixed on the front camera shell (1), and the image processing circuit board (3) is fixed on the rear camera shell (4); and a camera data output interface is arranged on the camera rear shell (4).
9. The integrated quantitative phase imaging camera of claim 8, wherein: the polarization two-dimensional diffraction light splitting layer (2-2) is prepared by the following steps:
step a, spin-coating an orientation layer on a quartz/glass substrate with a set thickness;
b, exposing the orientation layer by using two linearly polarized light beams with the same light intensity and orthogonal polarization states, and recording the polarization states of the two linearly polarized light beams by the orientation layer;
and c, spin-coating a liquid crystal layer on the exposed orientation layer to form a polarization two-dimensional diffraction light splitting layer with periods in the horizontal direction and the vertical direction being respectively reversed V.
10. An imaging method of an integrated quantitative phase imaging camera according to any one of claims 1 to 9, characterized in that: the method comprises the following steps:
step 1, converting target light into horizontal linear polarized light;
step 2, diffracting one horizontal linear polarized light into four diffracted lights containing the same information, wherein two diffracted lights are transmitted along the horizontal direction, and the other two diffracted lights are transmitted along the vertical direction;
step 3, performing photoelectric conversion on the light intensity of the four beams of diffracted light containing the same information, and converting the light intensity distribution into corresponding electric signals;
and 4, converting the received electric signals into an interference dot matrix image capable of obtaining a target intensity image and a quantitative phase image.
11. An image processing method for processing the interference lattice image output by the integrated quantitative phase imaging camera according to any one of claims 1 to 9, comprising the following steps:
step 1, performing Fourier transform on the recorded interference dot matrix image to obtain a spectrogram of the interference dot matrix image;
step 2, utilizing an initial filtering window W 0 Filtering out a zero-order frequency spectrum in the center of the spectrogram, and performing inverse Fourier transform on the zero-order frequency spectrum to obtain an intensity image Int (x, y) of the target:
Int(x,y)=|IFFT{W 0 ·FFT[I(x,y)]}| 2
wherein I (x, y) is the intensity distribution of the interference dot matrix image; FFT (-) is a Fourier transform function, IFFT (-) is an inverse Fourier transform function;
step 3, utilizing the first filtering window W 1 And a second filter window W 2 Filtering out the spectrograms respectively
Figure FDA0004015143640000031
Frequency spectrum sum of
Figure FDA0004015143640000032
Then inverse fourier transformed, resulting in two orthogonal phase gradients: />
Figure FDA0004015143640000033
Figure FDA0004015143640000034
In the formula, arg represents the operation of taking a complex phase angle; g (x, y) is a target phase distribution;
Figure FDA0004015143640000035
and &>
Figure FDA0004015143640000036
Phase gradient information for two orthogonal directions of g (x, y);
step 4, performing path integral calculation by using two orthogonal phase gradients to obtain quantitative phase imaging:
Figure FDA0004015143640000037
wherein x0 is the abscissa of the starting point of the path integration, and y0 is the ordinate of the starting point of the path integration.
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