CN115290925A - High-sensitivity fluid flow velocity optical measurement sensor and measurement method - Google Patents
High-sensitivity fluid flow velocity optical measurement sensor and measurement method Download PDFInfo
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- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
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Abstract
The invention provides a high-sensitivity fluid flow velocity optical measurement sensor, which comprises: the optical fiber comprises a single-mode optical fiber with a flattened end face, a light reflecting mirror and an elastic strip connected with the reflecting mirror; the single-mode optical fiber is fixed in a fixed sleeve made of stainless steel or materials suitable for underwater use, and the reflector is fixed at one end of the elastic strip and faces one end face of the single-mode optical fiber, so that the single-mode optical fiber and the reflector are arranged back and forth along the direction of water flow in the water tank to form a Fabry-Perot optical interferometer structure; and the other end face of the single-mode optical fiber is connected with a light source. The invention also provides a measuring method of the flow velocity sensor, light is respectively reflected at the end face of the single-mode fiber and the reflector and then interferes, when the reflector is impacted by fluid flow to generate displacement, the flow velocity to be measured is obtained according to the cavity length change of the Fabry-Perot interferometer, and high-sensitivity flow velocity measurement is realized.
Description
Technical Field
The invention relates to a high-sensitivity fluid flow velocity optical measurement sensor.
Background
The flow velocity and the flow rate are important parameters in industrial production and automatic control, and accurate measurement of the flow velocity and the flow rate is of great significance in various fields such as energy measurement, weather forecast, agricultural production, biomedical treatment and the like, so that various flow velocity and flow sensors are widely applied. The laser Doppler velocimeter calculates the flow velocity to be measured by detecting the Doppler frequency shift of scattered waves caused by moving particles in fluid by using the Doppler principle. Due to the principle of laser scattering, the method is easily influenced by the properties of the fluid to be measured, and has higher measurement accuracy but is accompanied by a high-cost and complex signal processing system; the flow velocity measurement based on the tracer technology is to put tracer substances into fluid, and when the tracer substances flow along with the fluid, the flow velocity to be measured can be obtained by detecting the motion law of the tracer substances. However, the tracer may affect water quality and pollute the environment, and especially when the tracer is a radioactive element or isotope, the energy of the emitted rays is difficult to capture and may cause harm to human health. When the application requirements of micro flow velocity measurement such as seepage detection are met, the method needs long measurement time and a stable measurement environment; the thermal flow meter measures the flow velocity according to the convection heat transfer principle, and obtains the flow velocity to be measured according to the heat transfer between the fluid and the heat source and the heat exchange relationship between the fluid and the heat source. However, when the heat source in the fluid needs to supply power, the safety problem of power utilization in the fluid is caused, and the problems of large power consumption and high cost of the whole measuring system are faced in practical application. In addition to the above-mentioned type of sensor, the target type flow rate meter is also widely used in daily life and production, and the sensor structure mainly comprises a target sheet and a metal sheet (rod) connected with the target sheet, and a strain sensor, such as a Fiber Bragg Grating (FBG), is attached to the metal sheet (rod), and the measurement principle is that the target sheet is impacted by fluid flow to generate an acting force, so that the metal sheet (rod) is stressed to generate strain, and the central wavelength of the FBG attached to the metal sheet (rod) is moved. Therefore, the flow velocity to be measured can be obtained by measuring the change of the central wavelength of the FBG. Although the sensor has the advantages of small volume, point-type real-time measurement, easy multiplexing and the like, the sensor is limited by the low strain sensitivity (about 1.2 pm/. Mu.. Epsilon.) of the common FBG, when a tiny flow velocity is measured, the impact force of the fluid on the target piece is small, and the FBG on the metal piece (rod) is difficult to generate large wavelength change. In application scenes such as deep sea and underground water seepage and the like needing to measure the tiny flow velocity change of fluid, the sensitivity of the sensor is not high enough, and the tiny flow velocity is difficult to measure.
Disclosure of Invention
Aiming at the problems, the invention provides a flow velocity measurement sensor structure design based on a Fabry-Perot interferometer (F-P, fabry-Perot) and a sensitivity enhancement measurement method combined with a virtual reference interferometer, so that high-sensitivity measurement of micro flow velocity is realized.
In order to solve the above technical problem, the present invention provides a highly sensitive optical measurement sensor for fluid flow rate, comprising: the end face of the single mode fiber is cut flat, the reflecting mirror is arranged on the end face of the single mode fiber, and the elastic strip is arranged on the reflecting mirror;
the single-mode optical fiber is fixed in the sleeve, the reflector is fixed at one end of the elastic strip and faces one end face of the single-mode optical fiber, so that the single-mode optical fiber and the reflector are arranged back and forth along the direction of water flow in the water tank to form a Fabry-Perot interferometer structure; and the other end face of the single-mode optical fiber is connected with a light source.
In a preferred embodiment: the diameter of the stainless steel sleeve is 0.3mm.
In a preferred embodiment: the reflector is a circular glass slide with the radius of 10mm and the thickness of 0.1 mm.
In a preferred embodiment: the surface of the reflector is plated with a gold film with the thickness of 200nm by a magnetron sputtering technology.
The invention also provides a measuring method for enhancing the sensitivity of the flow velocity sensor based on the optical vernier effect, namely, firstly, light is respectively reflected at the end surface of the single-mode optical fiber and the reflector and then interfered, and when the reflector is impacted by fluid flow to generate displacement, the flow velocity to be measured is obtained according to the cavity length change of the Fabry-Perot interferometer; and then constructing a virtual interferometer with the cavity length close to the cavity length according to the interferometer cavity length obtained by measurement, and superposing the spectrum of the virtual interferometer and the spectrum of the sensing interferometer to obtain the spectrum with the envelope period change. The flow velocity measurement with high sensitivity is realized by measuring the change of the free spectral width of the envelope spectrum along with the flow velocity of the fluid.
In a preferred embodiment: when light is reflected from the end surface of the single-mode fiber and the reflector respectively and then interferes, the reflection spectrum intensity I can be represented by the following formula:
wherein I 1 And I 2 Respectively, the intensity of two coherent reflected lights, phi represents the phase difference between the two.
In a preferred embodiment: the phase difference φ is expressed as:
where λ is the wavelength of the light and L is the cavity length of the interferometer. The intensity I will vary periodically with lambda.
In a preferred embodiment: let λ 1 And λ 2 Respectively representing the wavelengths of two adjacent peaks or valleys in the spectrum, the free spectral width FSR of the flow velocity sensor and the cavity length L of the fabry-perot structure are calculated by the following formula:
FSR＝|λ 2 -λ 1 | (3)
and constructing a virtual reference interferometer with the cavity length close to the L according to the measured L. According to our theoretical analysis, this vernier effect based sensitivity enhancement factor M is related to the ratio g of the two cavity lengths, namely:
wherein L is R Is the cavity length of the virtual reference interferometer.
In practice, the length of the reference lumen can be calculated by setting M to 10-50 (or other values, determining the value of g, as desired).
And hence the spectral intensity I of the virtual reference interferometer R Can be expressed as:
thus, the output intensity I' of the superimposed spectrum of the sensing fabry-perot interferometer and the reference interferometer can be expressed as:
two adjacent peak wavelengths lambda around the center wavelength of the superimposed spectral envelope can be defined E1 And λ E2 Free spectral width FSR with difference of envelope E From which the free spectral range FSR of the superimposed spectral envelope can be derived E Is composed of
Free spectral Range FSR by superimposing spectral envelopes E And high-sensitivity flow velocity measurement is realized under the change of different flow velocities.
Compared with the prior art, the invention has the following outstanding technical effects and advantages:
the invention provides a high-sensitivity fluid flow velocity optical measurement sensor, which can carry out point-mode measurement, has high sensitivity, can meet different application requirements by flexibly adjusting the geometric parameters of a reflector and an elastic strip, has great practicability, constructs a virtual reference interferometer based on numerical simulation, and realizes high-sensitivity flow velocity measurement through a vernier effect.
Drawings
Fig. 1 is a block diagram of a fiber optic flow rate sensor.
Fig. 2 is a view of a flow rate measuring apparatus.
FIG. 3 is an interference spectrum of the sensor at different flow rates.
FIG. 4 is an experimental plot of free spectral width FSR versus flow velocity v at various flow rates.
FIG. 5 is an interference spectrum of a virtual reference interferometer.
FIG. 6 shows different flow ratesFree spectral Range FSR of the underlapped Spectrum E Experimental curve with flow velocity v.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention; it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by those skilled in the art without any inventive work are within the scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "top/bottom", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "sleeved/connected," "connected," and the like, are used in a broad sense, and for example, "connected" may be a wall-mounted connection, a detachable connection, an integral connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection through an intermediate medium, and a communication between two elements, and those skilled in the art will understand the specific meaning of the terms in the present invention specifically.
Referring to fig. 1, the present invention provides a highly sensitive optical measurement sensor for fluid flow rate, comprising: the end surface of the single-mode optical fiber is cut flat, the surface of the single-mode optical fiber is plated with gold, and the single-mode optical fiber is provided with a reflecting mirror and a metal elastic strip;
the single mode optical fiber is fixed in the stainless steel sleeve, the reflector is fixed at one end of the metal elastic strip and faces to one end face of the single mode optical fiber, so that the single mode optical fiber and the reflector are arranged back and forth along the direction of water flow in the water tank to form a Fabry-Perot structure; and the other end face of the single-mode optical fiber is connected with a light source.
In this example, the diameter of the stainless steel sleeve is 0.3mm. The reflector is a circular glass slide with the radius of 10mm and the thickness of 0.1 mm. The surface of the reflector is plated with a gold film with the thickness of 200nm by a magnetron sputtering technology.
When the flow velocity sensor is used for measuring the flow velocity, the light emitted by the light source is respectively reflected from the end face of the single-mode optical fiber and the reflector and then interfered, and the reflection spectrum intensity I can be represented by the following formula:
in which I 1 And I 2 The intensity of two coherent reflected lights is shown, phi represents the phase difference between the two, and can be expressed as:
wherein λ is the wavelength of light; as can be seen from equations 1 and 2, the intensity I will vary periodically with λ; let λ 1 And λ 2 Representing the wavelengths of two adjacent peaks or valleys in the spectrum, respectively, the free spectral width FSR and cavity length L of the flow sensor can be calculated by:
FSR＝|λ 2 -λ 1 | (3)
therefore, when the reflector is impacted by fluid flow, the flow velocity to be measured can be obtained according to the length L of the F-P cavity and the change of the free spectral width FSR. And constructing a virtual reference interferometer with the cavity length close to the L according to the measured L. According to our theoretical analysis, this vernier effect based sensitivity enhancement factor M is related to the ratio g of the two cavity lengths, namely:
wherein L is R Is the cavity length of the virtual reference interferometer.
In practice, the length of the reference lumen can be calculated by setting M to 10-50 (or other values, determining the value of g, as desired).
Thereby virtually referencing the spectral intensity I of the interferometer R Can be expressed as:
thus, the output intensity I' of the superimposed spectrum of the sensed fabry-perot interferometer and the reference interferometer can be expressed as:
two adjacent peak wavelengths lambda around the center wavelength of the envelope of the superimposed spectrum can be defined E1 And λ E2 Free spectral width FSR with difference of envelope E From which the free spectral range FSR of the superimposed spectral envelope can be derived E Comprises the following steps:
free spectral Range FSR by superimposing spectral envelopes E And the flow velocity measurement with high sensitivity is realized under the change of different flow velocities.
The structure of the F-P flow velocity sensor is shown in figure 1 and mainly comprises a single-mode optical fiber with a flat end face, a reflector with a gold-plated surface and a metal elastic strip. The single-mode optical fiber is fixed in a stainless steel sleeve with the diameter of 0.3mm, a circular glass slide with the radius of 10mm and the thickness of 0.1mm is selected for the reflector and fixed at one end of a metal elastic strip, and in order to ensure that interference spectrum in water has good contrast, a gold film with the thickness of about 200nm is plated on the surface of the reflector through a magnetron sputtering technology so as to improve the reflectivity. When light is reflected from the end face of the single-mode fiber and the reflector respectively and then interferes, and when the reflector is impacted by fluid flow to generate displacement, the flow velocity to be measured can be obtained according to the change of the length of the F-P cavity. The derivation of the relevant formula for the F-P cavity length variation is given in the appendix herein.
The sensor can carry out point type measurement, has high sensitivity, can meet different application requirements by flexibly adjusting the geometric parameters of the reflector and the elastic strip, and has great practicability.
Examples of implementation:
the effectiveness of the sensor provided by the invention is verified through a flow velocity measurement experiment, the experimental device is shown in figure 2, the length, the width and the height of a customized 304 stainless steel water tank are 130cm, 21cm and 17.5cm in sequence, a water inlet and a water outlet are positioned at the central positions of cross sections at two ends of the water tank, two rotameters are respectively connected with the water inlet and the water outlet, the adjustable flow range is 0-160ml/min, and the equivalent flow velocity range is 0-80um/s according to the relationship between the flow, the cross section area and the flow velocity. The broadband light passes through the circulator to the flow velocity sensor, is reflected by the gold-plated reflector, returns to the circulator again, is recorded by the spectrometer, and is subjected to signal processing by the computer.
The interference spectra at different flow rates are shown in figure 3. When the wavelength lambda of two adjacent peaks in the interference spectrum 1 And λ 2 The free spectral width FSR of the spectrum, taken around 1550nm, can be calculated from equation (3). The change in FSR at different flow rates is shown in fig. 4, and after fitting, the free spectral width FSR versus flow rate v can be expressed as:
FSR＝-0.0000482321v 2 -0.00119v+2.31755
when the flow rate is changed from 0um/s to 80um/s, the FSR is changed by 0.41nm, and the measurement of the tiny flow rate is realized. The cavity length L of the sensor is 250.95um obtained from equation (4), and when the sensitivity enhancement factor M is set to 20 as an example, the cavity length L of the virtual reference interferometer is calculated according to equation (5) R At 238.40um, the spectrum of the virtual reference interferometer obtained according to equation (6) is shown in FIG. 5. Calculating the free spectral Range FSR of the superimposed spectral envelope E Thereby obtaining figure 6, and realizing high-sensitivity flow velocity measurement.
The above description is only a preferred embodiment of the present invention, but the design concept of the present invention is not limited thereto, and any person skilled in the art can make insubstantial changes in the technical scope of the present invention within the technical scope of the present invention, and the actions infringe the protection scope of the present invention are included in the present invention.
Claims (5)
1. A highly sensitive optical fluid flow rate measurement sensor, comprising: the end surface of the single-mode optical fiber is flattened, and the single-mode optical fiber comprises a single-mode optical fiber, a reflector and an elastic strip;
the single mode fiber is fixed in the sleeve, the reflector is fixed at one end of the elastic strip and faces one end face of the single mode fiber, so that the single mode fiber and the reflector are arranged back and forth along the direction of water flow in the water tank to form a Fabry-Perot interferometer structure; and the other end face of the single-mode optical fiber is connected with a light source.
2. The measurement method of a flow rate sensor according to claim 1, wherein: the light is reflected at the end face of the single-mode fiber and the reflector respectively and then interferes, and when the reflector is impacted by fluid flow to generate displacement, the flow speed to be measured is obtained according to the cavity length change of the Fabry-Perot structure.
3. The method of calculating a flow rate of a flow rate sensor of claim 2, wherein: when light is reflected from the end surface of the single-mode fiber and the reflector respectively and then interferes, the reflection spectrum intensity I can be represented by the following formula:
in which I 1 And I 2 Are respectively two beam phasesThe intensity of the dry reflected light, φ represents the phase difference between the two.
4. The method of calculating flow rate of a flow rate sensor according to claim 3, wherein: the phase difference φ is expressed as:
wherein lambda is the wavelength of light and L is the distance between the end face of the optical fiber and the reflector. The intensity I will vary periodically with lambda.
5. The method of calculating flow rate of a flow rate sensor of claim 4, wherein: let λ 1 And λ 2 Representing the wavelengths of two adjacent peaks or valleys in the spectrum, respectively, the free spectral width FSR of the flow sensor and the cavity length L of the fabry-perot interferometer are calculated by:
FSR＝|λ 2 -λ 1 | (3)
wherein n is the refractive index of the medium in the cavity of the Fabry-Perot interferometer; constructing a virtual reference interferometer with the cavity length close to L according to the L obtained by measurement; the vernier effect based sensitivity enhancement factor M is related to the ratio g of the two cavity lengths, i.e.:
wherein L is R Is the cavity length of the virtual reference interferometer; superposing the spectrum of the virtual interferometer and the spectrum of the sensing interferometer to obtain a superposed spectrum with envelope period variation; flow rate measurement is achieved by measuring the variation of the free spectral width of the envelope spectrum with the fluid flow rate.
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| CN115980386A (en) * | 2023-02-07 | 2023-04-18 | 中国海洋大学 | Seawater flow velocity measuring method based on panda optical fiber |
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