CN115266856B - High-temperature multi-component smoke sensor and preparation method thereof - Google Patents
High-temperature multi-component smoke sensor and preparation method thereof Download PDFInfo
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- CN115266856B CN115266856B CN202210672812.5A CN202210672812A CN115266856B CN 115266856 B CN115266856 B CN 115266856B CN 202210672812 A CN202210672812 A CN 202210672812A CN 115266856 B CN115266856 B CN 115266856B
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- 239000000779 smoke Substances 0.000 title claims abstract description 12
- 238000002360 preparation method Methods 0.000 title abstract description 7
- 239000000919 ceramic Substances 0.000 claims abstract description 72
- 238000007789 sealing Methods 0.000 claims abstract description 38
- 238000003825 pressing Methods 0.000 claims abstract description 15
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000003546 flue gas Substances 0.000 claims abstract description 12
- 230000006698 induction Effects 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 22
- 238000003466 welding Methods 0.000 claims description 12
- 238000010344 co-firing Methods 0.000 claims description 6
- FPAFDBFIGPHWGO-UHFFFAOYSA-N dioxosilane;oxomagnesium;hydrate Chemical compound O.[Mg]=O.[Mg]=O.[Mg]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O FPAFDBFIGPHWGO-UHFFFAOYSA-N 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 239000000843 powder Substances 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 6
- 238000007650 screen-printing Methods 0.000 claims description 6
- 238000005245 sintering Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 239000011159 matrix material Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 238000005137 deposition process Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 238000007639 printing Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000010345 tape casting Methods 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 3
- 238000009826 distribution Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000738 capillary electrophoresis-mass spectrometry Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/27—Association of two or more measuring systems or cells, each measuring a different parameter, where the measurement results may be either used independently, the systems or cells being physically associated, or combined to produce a value for a further parameter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Abstract
The invention relates to the field of sensors, in particular to a high-temperature multi-component smoke sensor and a preparation method thereof. The sensor comprises a sheath, a thermocouple, a first connecting electrode, a second connecting electrode, a ceramic sensing chip, an insulating ring, a sealing block, a ceramic pressing block and a cable, wherein the thermocouple, the first connecting electrode, the second connecting electrode, the ceramic sensing chip, the insulating ring, the sealing block and the ceramic pressing block are arranged in the sheath, the ceramic sensing chip sequentially penetrates through the insulating ring, the sealing block and the ceramic pressing block, and the first connecting electrode and the second connecting electrode are respectively in contact with the ceramic sensing chip. The invention can simultaneously detect the O in the flue gas 2 、NO、NO 2 、H 2 O、CO 2 And SO 2 Gas composition. The requirements of dense arrangement and reliable connection of the sensor signal electrodes are met through distribution of the first connecting electrode and the second connecting electrode around the ceramic sensing chip. The tail end is sealed by adopting a multi-line armored cable, so that the requirement of closed and reliable transmission of multiple paths of signals in a high-temperature environment is met.
Description
Technical Field
The invention relates to the field of sensors, in particular to a high-temperature multi-component smoke sensor and a preparation method thereof.
Background
The fixed source industrial flue gas emission in China has become the key point of preventing and controlling the atmospheric pollution, but the continuous flue gas emission monitoring system CEMS used in the industry at present adopts a single-component analysis module mainly integrating various optical principles to realize multi-component monitoring of flue gas, and needs a separate laboratory environment, so that the system has high cost, poor weather resistance and high maintenance cost, and therefore, only large industrial flue gas emission enterprises are conditionally installed, and for a large number of small and medium enterprises, the supervision cost and difficulty of the system are high. More importantly, the optical analysis module is not high-temperature resistant, cannot monitor in situ in real time, can only sample and analyze, and has the condition of component loss.
Disclosure of Invention
In order to overcome the defect of high cost of the existing flue gas detection, the invention provides a high-temperature multi-component flue gas sensor and a preparation method thereof.
The technical scheme adopted for solving the technical problems is as follows: the utility model provides a high temperature multicomponent smoke transducer, including the sheath, the thermocouple, connecting electrode one, connecting electrode two, ceramic sensing chip, the insulating ring, the sealing piece, the ceramic briquetting, the cable, be equipped with the thermocouple in the sheath, connecting electrode one, connecting electrode two, ceramic sensing chip, the insulating ring, the sealing piece, the ceramic briquetting, ceramic sensing chip passes insulating ring in proper order, the sealing piece, the ceramic briquetting, connecting electrode one, connecting electrode two respectively with ceramic sensing chip contact, the sheath is worn out to thermocouple one end, the thermocouple other end links to each other with the cable, a plurality of sinle silk in the cable links to each other with connecting electrode one and connecting electrode two respectively.
According to another embodiment of the invention, the ceramic sense die array is further integrated with three limiting current measuring units and two mixed potential measuring units, the three limiting current measuring units including a sensor for detecting O 2 Main pump measuring unit for detecting H 2 O and CO 2 First pump measuring unit for concentration, for detecting NO x A second pump-by-pump measurement unit of concentration;
the two mixed potential measuring units comprise a sensor for detecting NO/NO 2 Proportional mixed potential electrode Ms2 for detection of SO 2 Mixed potential electrode Ms1 of concentration.
According to another embodiment of the invention, the ceramic sensing chip further comprises eight connecting electrodes I which are in a clip shape, and eight electrode contacts I which are used for being contacted with the connecting electrodes I are distributed on the circumference of the tail part of the ceramic sensing chip.
According to another embodiment of the invention, the ceramic induction chip further comprises a second connecting electrode which is in a top needle shape, the number of the second connecting electrode is two, and two electrode contacts II which are used for being in contact with the second connecting electrode are arranged on the tail end face of the ceramic induction chip.
According to another embodiment of the invention, it is further comprised that the cable is an armoured cable.
According to another embodiment of the present invention, the insulating ring is made of alumina.
According to another embodiment of the present invention, the sealing block further comprises talcum powder or glass powder.
According to another embodiment of the present invention, the method further comprises that the first connecting electrode and the second connecting electrode are connected to an electrode support, and the electrode support is fixed in the sheath through a fixing lock sleeve.
According to another embodiment of the invention, the sheath is composed of a probe sleeve, a sealing base and a main sleeve in a connecting and fixing mode.
The preparation method of the high-temperature multi-component smoke sensor comprises the following steps:
A. firstly, preparing a ceramic induction chip matrix through a ceramic tape casting forming process, a screen printing process and a high-temperature co-firing process, integrating an internal lead, three limiting current measuring units and a heating circuit into a whole through high-temperature co-firing, and only keeping the positions of 2 mixed potential measuring electrodes on the outer surface blank;
B. printing two mixed potential measuring units on corresponding positions on the outer surface of a ceramic induction chip substrate through a screen printing process or a sputtering deposition process or an evaporation process, and integrating the two mixed potential measuring units through secondary sintering to form a ceramic induction chip finished product;
C. then, the ceramic induction chip is sealed and fixed in a sealing base of the sheath through a glass powder sintering process or a talcum powder compacting process, and the end faces of the sealing base are exposed from an electrode contact I and an electrode contact II at the tail end of the ceramic induction chip;
D. pressing and riveting the upper port edge of the hexagonal seat by a clamp at room temperature, buckling and compacting the ceramic pressing block to finish cold riveting, heating the whole hexagonal seat to 500-700 ℃, and rapidly hot riveting;
E. inserting an electrode support with eight first connecting electrodes and two second connecting electrodes into the exposed end part of the ceramic induction chip, butting the eight first electrode contacts with the eight first connecting electrodes in the circumferential direction, butting the two second electrode contacts on the tail end surface of the ceramic induction chip with the two second connecting electrodes, sleeving a fixing lock sleeve to axially compress the electrode support, and fixing the electrode support with a sealing base through riveting or welding;
F. then, ten wire cores of the cable are in one-to-one correspondence with the eight first connecting electrodes and the eight second connecting electrodes through spot welding, and then a main sleeve is sleeved, so that the front end of the main sleeve is sealed with a sealing base through laser ring welding, the rear end of the main sleeve is sealed with the armored outer wall of the cable through riveting and laser ring welding, and further the sealing and the connection of the whole sensor main body are realized;
G. finally, the wire core signal at the tail end of the cable is led out, and the connection with the sensor control unit is realized through the combination of the high-temperature-resistant PTFE wire and the sealing rubber plug.
The invention has the beneficial effects that the invention can detect the O in the flue gas simultaneously 2 、NO、NO 2 、H 2 O、CO 2 And SO 2 Gas composition. The requirements of dense arrangement and reliable connection of the sensor signal electrodes are met through distribution of the first connecting electrode and the second connecting electrode around the ceramic sensing chip. The tail end is sealed by adopting a multi-line armored cable, so that the requirement of closed and reliable transmission of multiple paths of signals in a high-temperature environment is met.
Drawings
The invention will be further described with reference to the drawings and examples.
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic diagram of a ceramic sense die of the present invention;
in the figure, a sheath 1, a thermocouple 2, a connecting electrode I, a connecting electrode II, a ceramic sensing chip 5, an insulating ring 6, a sealing block 7, a ceramic pressing block 8, an electrode support 9, a fixing lock 11, a probe sleeve 12, a sealing base 13, a main sleeve 14, a cable 15, an electrode contact I and an electrode contact II.
Detailed Description
FIG. 1 is a schematic diagram of the structure of the present invention; fig. 2 is a schematic structural diagram of a ceramic sense die of the present invention.
As shown in the attached figure 1, the high-temperature multicomponent smoke sensor comprises a sheath 1, a thermocouple 2, a first connecting electrode 3, a second connecting electrode 4, a ceramic sensing chip 5, an insulating ring 6, a sealing block 7, a ceramic pressing block 8 and a cable 14, wherein the thermocouple 2, the first connecting electrode 3, the second connecting electrode 4, the ceramic sensing chip 5, the insulating ring 6, the sealing block 7 and the ceramic pressing block 8 are arranged in the sheath 1, the ceramic sensing chip 5 sequentially passes through the insulating ring 6, the sealing block 7 and the ceramic pressing block 8, the first connecting electrode 3 and the second connecting electrode 4 are respectively contacted with the ceramic sensing chip 5, one end of the thermocouple 2 penetrates out of the sheath 1, the other end of the thermocouple 2 is connected with the cable 14, and a plurality of wire cores in the cable 14 are respectively connected with the first connecting electrode 3 and the second connecting electrode 4.
The ceramic sense die 5 array integrates three limiting current measuring units and two mixed potential measuring units, wherein the three limiting current measuring units are used for detecting O 2 Main pump measuring unit for detecting H 2 O and CO 2 First pump measuring unit for concentration, for detecting NO x A second pump-by-pump measurement unit of concentration;
the two mixed potential measuring units comprise a sensor for detecting NO/NO 2 Proportional mixed potential electrode Ms2 for detection of SO 2 Mixed potential electrode Ms1 of concentration.
The main pump measuring unit detects O by limiting pump current characteristic Ip0 2 Is a concentration of (2); the first slave cylinder measuring unit electrolyzes H by high pressure 2 O and CO 2 The oxygen partial pressure of the water is electrolyzed to form pump currents Ip1 and Ip1+, so as to realize concentration detection; the second sub-pump measuring unit uses the active electrode to measure NO x The oxygen in the mixture is catalyzed and decomposed to form pump current Ip2, and NO is obtained x The total amount is detected to be NO/NO according to the signal of the NiO-based mixed potential electrode Ms2 2 The ratio can be used to calculate their respective concentrations; another optional mixed potential electrode Ms1 is used to detect SO 2 Concentration.
As shown in fig. 2, the first connecting electrodes 3 are clip-shaped, the number of the first connecting electrodes 3 is eight, and eight electrode contacts 15 for contacting with the first connecting electrodes 3 are distributed on the circumference of the tail of the ceramic sensing chip 5.
The second connecting electrodes 4 are in a top needle shape, the number of the second connecting electrodes 4 is two, and two electrode contacts 16 for contacting with the second connecting electrodes 4 are arranged on the end face of the tail part of the ceramic sensing chip 5.
The arrangement mode of the first connecting electrode 3 and the second connecting electrode 4 meets the requirements of densely arranging and reliably connecting the signal leads of the sensor 10.
The cable 14 is an armored cable. The multi-wire core armoured cable is adopted for closed connection, so that the requirements of closed and reliable transmission of multiple paths of physical signals in a high-temperature flue gas environment are met, and interference is isolated.
The insulating ring 6 is made of alumina.
The sealing block 7 is made of talcum powder or glass powder.
The first connecting electrode 3 and the second connecting electrode 4 are connected to an electrode support 9, and the electrode support 9 is fixed in the sheath 1 through a fixing lock sleeve 10.
The sheath 1 is composed of a probe sleeve 11, a sealing base 12 and a main sleeve 13 which are connected and fixed.
The preparation method of the high-temperature multi-component smoke sensor comprises the following steps:
A. firstly, preparing a ceramic induction chip 5 substrate through a ceramic tape casting forming process, a screen printing process and a high-temperature co-firing process, integrating an internal lead, three limiting current measuring units and a heating circuit into a whole through high-temperature co-firing, and only keeping the positions of 2 mixed potential measuring electrodes on the outer surface blank;
B. printing two mixed potential measuring units on corresponding positions on the outer surface of a matrix of the ceramic induction chip 5 through a screen printing process or a sputtering deposition process or an evaporation process, and integrating the two mixed potential measuring units through secondary sintering to form a finished ceramic induction chip 5;
C. then, the ceramic induction chip 5 is sealed and fixed in the sealing base 12 of the sheath 1 through a glass powder sintering process or a talcum powder compacting process, and the end faces of the sealing base 12 are exposed from the electrode contact one 15 and the electrode contact two 16 at the tail end of the ceramic induction chip 5;
D. pressing and riveting the upper port edge of the hexagonal seat by a clamp at room temperature, buckling and pressing the ceramic pressing block 8 to finish cold riveting, heating the whole hexagonal seat to 500-700 ℃, and rapidly hot riveting;
E. inserting an electrode support 9 which is penetrated with eight first connecting electrodes 3 and two second connecting electrodes 4 into the ceramic induction chip 5 to expose the end part, butting eight first electrode contacts 15 in the circumferential direction with the eight first connecting electrodes 3, butting two second electrode contacts 16 on the tail end surface of the ceramic induction chip 5 with the two second connecting electrodes 4, sleeving a fixing lock sleeve 10 to axially compress the electrode support 9, and fixing the electrode support with a sealing base 12 through riveting or welding;
F. then, ten wire cores of the cable 14 are in one-to-one correspondence with the eight first connecting electrodes 3 and the two second connecting electrodes 4 through spot welding, and then the main sleeve 13 is sleeved, so that the front end of the main sleeve 13 is sealed with the sealing base 12 through laser ring welding, the rear end of the main sleeve 13 is sealed with the armored outer wall of the cable 14 through riveting and laser ring welding, and further the sealing and the connection of the whole sensor main body are realized;
G. finally, the wire core signal at the tail end of the cable 14 is led out, and the connection with the sensor control unit is realized through the combination of the high-temperature-resistant PTFE wire and the sealing rubber plug.
The probe part of the thermocouple 2 is integrated with an ultrafine thermocouple, so that the real-time measurement of the gas temperature can be realized.
Claims (7)
1. The utility model provides a high temperature multicomponent flue gas sensor, a serial communication port, including sheath (1), thermocouple (2), connecting electrode one (3), connecting electrode two (4), ceramic sense chip (5), insulating ring (6), sealing block (7), ceramic briquetting (8), cable (14), be equipped with thermocouple (2) in sheath (1), connecting electrode one (3), connecting electrode two (4), ceramic sense chip (5), insulating ring (6), sealing block (7), ceramic briquetting (8), ceramic sense chip (5) pass insulating ring (6) in proper order, sealing block (7), ceramic briquetting (8), connecting electrode one (3), connecting electrode two (4) respectively with the potteryThe ceramic induction chip (5) is in contact, one end of the thermocouple (2) penetrates out of the sheath (1), the other end of the thermocouple (2) is connected with the cable (14), a plurality of wire cores in the cable (14) are respectively connected with the first connecting electrode (3) and the second connecting electrode (4), the ceramic induction chip (5) array integrates three limiting current measuring units and two mixed potential measuring units, and the three limiting current measuring units comprise a sensor for detecting O 2 Main pump measuring unit for detecting H 2 O and CO 2 First pump measuring unit for concentration, for detecting NO x A second pump-by-pump measurement unit of concentration; the two mixed potential measuring units comprise a sensor for detecting NO/NO 2 Proportional mixed potential electrode Ms2 for detection of SO 2 The mixed potential electrode Ms1 with concentration, the first connecting electrode (3) is clip-shaped, the number of the first connecting electrode (3) is eight, eight electrode contacts (15) for contacting with the first connecting electrode (3) are distributed on the circumference of the tail of the ceramic sensing chip (5), the second connecting electrode (4) is top needle-shaped, the number of the second connecting electrode (4) is two, and two electrode contacts (16) for contacting with the second connecting electrode (4) are arranged on the end face of the tail of the ceramic sensing chip (5).
2. The high temperature multi-component smoke sensor according to claim 1, characterised in that said cable (14) is an armoured cable.
3. The high temperature multi-component flue gas sensor according to claim 1, wherein the insulating ring (6) is made of alumina.
4. The high-temperature multi-component smoke sensor according to claim 1, characterized in that the sealing block (7) is made of talcum powder or glass powder.
5. The high-temperature multicomponent smoke sensor according to claim 1, wherein the first connecting electrode (3) and the second connecting electrode (4) are connected to an electrode support (9), and the electrode support (9) is fixed in the sheath (1) through a fixing lock sleeve (10).
6. The high-temperature multicomponent smoke sensor according to claim 1, wherein the sheath (1) is formed by connecting and fixing a probe sleeve (11), a sealing base (12) and a main sleeve (13).
7. The method of manufacturing a high temperature multi-component flue gas sensor according to any one of claims 1 to 6, comprising the steps of:
A. firstly, preparing a ceramic induction chip (5) matrix through a ceramic tape casting forming process, a screen printing process and a high-temperature co-firing process, integrating an internal lead, three limiting current measuring units and a heating circuit into a whole through high-temperature co-firing, and only keeping the positions of 2 mixed potential measuring electrodes on the outer surface blank;
B. printing two mixed potential measuring units on corresponding positions on the outer surface of a matrix of the ceramic induction chip (5) through a screen printing process or a sputtering deposition process or an evaporation process, and integrating the two mixed potential measuring units through secondary sintering to form a finished ceramic induction chip (5);
C. then, the ceramic induction chip (5) is sealed and fixed in a sealing base (12) of the sheath (1) through a glass powder sintering process or a talcum powder compacting process, and the end faces of the sealing base (12) are exposed out of an electrode contact I (15) and an electrode contact II (16) at the tail end of the ceramic induction chip (5);
D. pressing and riveting the upper port edge of the hexagonal seat through a clamp at room temperature, buckling and pressing a ceramic pressing block (8) to finish cold riveting, heating the whole hexagonal seat to 500-700 ℃, and rapidly performing hot riveting;
E. inserting electrode supports (9) penetrating through eight first connecting electrodes (3) and two second connecting electrodes (4) into exposed end parts of a ceramic induction chip (5), butting eight first electrode contacts (15) in the circumferential direction with the eight first connecting electrodes (3), butting two second electrode contacts (16) on the tail end surface of the ceramic induction chip (5) with the two second connecting electrodes (4), sleeving a fixing lock sleeve (10) to axially compress the electrode supports (9), and fixing the electrode supports with a sealing base (12) through riveting or welding;
F. then, ten wire cores of the cable (14) are in one-to-one correspondence with the eight first connecting electrodes (3) and the two second connecting electrodes (4) through spot welding, and then the main sleeve (13) is sleeved, so that the front end of the main sleeve (13) is sealed with the sealing base (12) through laser ring welding, the rear end of the main sleeve (13) is sealed with the armored outer wall of the cable (14) through riveting and laser ring welding, and further the sealing and the connection of the whole sensor main body are realized;
G. finally, the wire core signal at the tail end of the cable (14) is led out, and the connection with the sensor control unit is realized through the combination of the high-temperature-resistant PTFE wire and the sealing rubber plug.
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