CN115265782B - Double-grating folding light path optical fiber spectrometer - Google Patents
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 35
- 230000005540 biological transmission Effects 0.000 claims abstract description 53
- 230000003287 optical effect Effects 0.000 claims description 28
- 239000000835 fiber Substances 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 238000001228 spectrum Methods 0.000 abstract description 7
- 230000008901 benefit Effects 0.000 abstract description 4
- 230000004075 alteration Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000012938 design process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000005350 fused silica glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000003891 environmental analysis Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000011104 metalized film Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
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Abstract
The invention discloses a double-grating folded light path optical fiber spectrometer, which comprises an incident optical fiber port, a collimating mirror, a grating, a focusing mirror and a detector module, wherein the detector module is a linear array CCD image sensor or an area array CCD image sensor, the grating comprises a first transmission grating and a second transmission grating, the first transmission grating forms an included angle of 135 degrees with the horizontal direction, and the second transmission grating forms an included angle of 45 degrees with the horizontal direction; light enters from an incident optical fiber port, irradiates onto a first transmission grating after passing through a collimating lens to generate first diffraction, enters onto a second transmission grating to generate second diffraction, and reflects the second diffraction light to the outside of the two transmission gratings by a focusing lens, so that a focusing light spot falls on a light sensing surface of a CCD image sensor. The double-grating folded light path optical fiber spectrometer provided by the invention has the advantages of small volume, simplicity and convenience in adjustment, and meets the requirements of high sensitivity, high resolution and pixel resolution in a larger spectrum range.
Description
Technical Field
The invention relates to an optical fiber spectrometer, in particular to a double-grating folded light path optical fiber spectrometer.
Background
Compared with a large-scale spectrometer, the optical fiber spectrometer has wide application in the fields of life science, medical diagnosis, solid-state lighting, environmental analysis including water quality analysis, smoke detection and the like due to small size, light weight and low price.
The widely used dispersive elements for fiber spectrometers are gratings, the most common gratings currently being reflective and transmissive. Among them, reflective gratings are generally produced with a reticle substrate material, metallized films, and have diffraction efficiencies of 60% -80% at blazed wavelengths, while the diffraction efficiencies are reduced in the case of non-blazed angle designs.
The monochromator mentioned in the high-resolution double-grating monochromator optical path device disclosed in patent document CN106940291a, the optical path structure is made of an optical circulator, an optical fiber incident and emergent structure, a collimating and focusing mirror, a first grating, a second grating and related mechanical auxiliary structures. After being collimated by the collimating and focusing lens, the incident light is diffracted for the first time by the first grating and is incident on the second grating, the second grating is a reflection type grating, so that the light is returned to the grating for the third diffraction after being diffracted for the second time, and finally, the incident light is focused by the primary collimating and focusing lens, and the primary path is returned to the optical fiber emergent mechanism. The spectrum range available becomes very narrow due to the total of three dispersions occurring in the present structure; in addition, the monochromator in the patent has the advantages that the collimating and focusing mirror and the first grating are repeatedly utilized, so that the incident and emergent double-pass debugging effect is considered, and the actual debugging process is difficult. Therefore, the structure is generally used as a monochromator, and when the structure is applied to the condition of wider spectrum range, the structure needs to be matched with precise mechanical design and can only output one wavelength at the same time point.
WAVELENGTH DIVISION MULTIPLEXED DEVICE disclosed in patent document US6978062B2, in which a light splitting device of a wavelength division multiplexer adopts a structure that a light beam is collimated by a collimating mirror, and is incident on a transmission grating one for first diffraction, diffracted light is continuously incident on a grating two for second diffraction, and is continuously incident on a concave mirror, and the focused light beam passes through a space between the grating one and the grating two to become a focused dispersion light spot and then is incident on a waveguide array. The structure has the advantages of compact structure, and the incident and emergent light are along opposite directions (the included angle is about 180 degrees), so that the arrangement process of the optical fiber and the waveguide is more convenient. When the light output end of the light splitting structure is changed into a CCD image sensor and optimized, it is found that in the optical design process, the light is always transmitted in the same direction (the light is always clockwise or anticlockwise) from beginning to end, so that the accumulated difference between the shortest wavelength and the longest wavelength is larger, and the final output end cannot receive the light signal in the orthogonal direction, but has a certain included angle with the light, which leads to the generation of geometrical aberration of the final light spot. Such designs are difficult to employ in real spectrometer designs and applications.
Disclosure of Invention
The invention aims to solve the technical problem of providing a double-grating folded light path optical fiber spectrometer which has small volume and simple and convenient adjustment and meets the requirements of high sensitivity, high resolution and pixel resolution in a larger spectrum range.
The invention provides a double-grating folded light path optical fiber spectrometer which aims at solving the technical problems and comprises an incident optical fiber port, a collimating mirror, a grating, a focusing mirror and a detector module, wherein the detector module is a linear array CCD image sensor or an area array CCD image sensor, the grating comprises a first transmission grating and a second transmission grating, the first transmission grating forms an included angle of 135 degrees with the horizontal direction, and the second transmission grating forms an included angle of 45 degrees with the horizontal direction; light enters from an incident optical fiber port, irradiates onto a first transmission grating after passing through a collimating lens to generate first diffraction, enters onto a second transmission grating to generate second diffraction, and reflects the second diffraction light to the outside of the two transmission gratings by a focusing lens, so that a focusing light spot falls on a light sensing surface of a CCD image sensor.
The double-grating folded light path fiber spectrometer, wherein the first transmission grating and the second transmission grating are both near infrared band transmission gratings.
The double-grating folded light path optical fiber spectrometer, wherein the collimating lens is an achromatic double-cemented lens or an aspheric lens.
The double-grating folded light path optical fiber spectrometer, wherein the focusing mirror is a concave reflecting mirror with a metal plating film.
The double-grating folded light path optical fiber spectrometer, wherein the included angle between the concave reflecting mirror and the horizontal direction is between 135 degrees and 180 degrees, so that light is reflected by the concave reflecting mirror to deflect towards the second direction after being deflected towards the first direction continuously by twice diffraction, and is emitted from the outside of the two gratings, so that the optical path difference accumulated by the rotation angles of the two transmission gratings in the same direction in the earlier stage is offset.
The double-grating folded light path optical fiber spectrometer, wherein the incidence numerical aperture limited by the focusing mirror and the optical fiber is more than or equal to 0.15; the incident optical fibers are arranged linearly and are consistent with the slit in height.
The double-grating folded light path optical fiber spectrometer is characterized in that a cylindrical lens is arranged in front of the linear array CCD image sensor, and light diffracted for the second time is reflected by the focusing mirror, longitudinally compressed and transmitted through the cylindrical lens and then falls on the CCD image sensor.
Compared with the prior art, the invention has the following beneficial effects: according to the double-grating folded light path fiber spectrometer provided by the invention, light is diffracted twice through the transmission grating, and the resolution is greatly increased. The material of the transmission grating fused quartz ensures that the loss of light in the transmission process is extremely low, and provides a solid physical basis for improving the sensitivity of the spectrometer. The two transmission gratings are respectively arranged at specific angles of 45 degrees and 135 degrees, and the design similar to the U shape ensures that the plane movement and rotation of the optical element are very convenient in the optical design process, and mechanical interference is avoided easily, so that the spatial arrangement of the element is more reasonable due to the high design freedom. Meanwhile, when the grating is slightly deviated from 45 degrees and 135 degrees, the change of resolution is extremely insensitive to the change of angles, so that the tolerance of the actual debugging process to the angle error of the grating is extremely high, and the debugging difficulty is greatly reduced. The invention controls the light to deflect towards the first direction by twice diffraction, and then is emitted from the outside of the two gratings instead of passing through between the two gratings after being deflected towards the second direction by the focusing mirror, so that the geometrical aberration accumulated in the earlier stage is balanced, the CCD image sensor can finally present better light spots, and the risks of secondary light, stray light, mechanical interference and the like are avoided.
Drawings
FIG. 1 is a schematic diagram of a dual-grating folded optical path fiber spectrometer of the present invention;
FIG. 2 is a schematic view of the optical path of a dual-grating folded optical path fiber spectrometer of the present invention;
FIG. 3 is a spot plot of several wavelengths taken in the spectral range 1525nm to 1575nm of the present invention;
fig. 4 is a schematic view of the optical path in the one-way rotation angle mode.
In the figure:
1 first transmission grating of incident optical fiber port 2 collimating lens 3
4 Second transmission grating 5 focusing lens 6 cylindrical lens
7CCD image sensor
Detailed Description
The invention is further described below with reference to the drawings and examples.
FIG. 1 is a schematic diagram of a dual-grating folded optical path fiber spectrometer of the present invention.
Referring to fig. 1, the dual-grating folded optical path fiber spectrometer provided by the invention comprises an incident optical fiber port 1, a collimating mirror 2, a first transmission grating 3, a second transmission grating 4, a focusing mirror 5, a cylindrical lens 6 and a CCD image sensor 7. Light is incident from an incident optical fiber port 1, irradiates onto a first transmission grating 3 through a collimating lens 2 to generate first diffraction, irradiates onto a second transmission grating 4 to generate second diffraction, is reflected and focused by a focusing lens 5, is focused by a cylindrical lens 6 and is transmitted to a CCD image sensor 7; high resolution in a certain spectral range is achieved. The folding light path has the main function of obtaining a high-resolution spectrum, and simultaneously can compress an incident focal length and an emergent focal length, so that the volume of the spectrometer is reduced. The invention can allow light with larger NA numerical aperture to enter the grating for light splitting while the incident focal length is reduced, which means that the invention can obtain higher sensitivity compared with the spectrum of a single grating.
The incident optical fiber port 1 in the invention is generally connected with an optical fiber by using a standard SMA seat, and a proper slit can be selected to shape the incident light due to the large core diameter of the optical fiber. Preferably, the incident optical fibers are arranged linearly and are consistent with the slit in height, so that the sensitivity of the whole optical path can be improved to the greatest extent.
The collimator lens 2 in the invention adopts an achromatic double-cemented lens or an aspherical lens so as to well improve the chromatic aberration and the beam quality of the subsequent light path.
The dispersive elements in the present invention are two transmissive gratings: a first transmission grating 3 and a second transmission grating 4; the two transmission gratings adopt fused quartz as a matrix, do not contain polymer, glue or epoxy resin, and are insulated by 100 percent; the two transmission gratings are near infrared band transmission gratings, the diffraction efficiency can reach more than 95% in a certain spectral range, the polarization-dependent loss is lower than 0.05dB, and the reflection type optical grating is obviously superior to the reflection type optical grating. The two transmission gratings in the invention adopt the same type, namely the same size and the same line number; the light-receiving area can be different, the number of lines can be different according to actual conditions so as to better realize actual application requirements, and the corresponding size is correspondingly different due to the change of the light-receiving area. The two transmission gratings are placed at 45 degrees and 135 degrees, and can also deviate from the actual condition within the basic range of the angle. The scattering effect is twice that of a single scattering grating through the scattering of two transmission gratings, the resolution of the whole spectrometer is doubled compared with that of the traditional single grating design, and the spectrum range is narrowed by half.
The focusing mirror 5 in the present invention adopts a concave mirror with a metal coating, and is arranged in such a manner that light is emitted from the outside of the two gratings instead of passing through between the two gratings. Preferably, the included angle between the concave reflecting mirror and the horizontal direction is between 135 degrees and 180 degrees, so that after light is continuously deflected in a first direction by twice diffraction, the light is reflected by the concave reflecting mirror to deflect in a second direction and is emitted from the outside of the two gratings, and the accumulated optical path difference caused by the rotation angle of the two transmission gratings in the same direction in the prior stage is offset. The first direction is opposite to the second direction, e.g., the first direction is counter-clockwise and the second direction is clockwise. The incidence numerical aperture limited by the focusing lens 5 and the optical fiber is large, and the numerical aperture is more than or equal to 0.15. A larger N.A indicates more light is entering, and to some extent, no light is available and is not entering the system. If the numerical aperture is smaller than 0.15, the light flux and sensitivity decrease in the case of gradual decrease, but there is an advantage in that the resolution is good and stray light is small. Preferably, in the optical system of the present invention, the numerical aperture of the integrated design is about 0.15.
The invention adopts a linear array CCD image sensor or an area array CCD image sensor as a detector module; the linear array CCD image sensor needs to be matched with the front cylindrical lens 6 for use together so as to compress the longitudinal light spots on the CCD photosurface and improve the sensitivity of the spectrometer; and the planar array CCD image sensor can be used as a detector module, so that the planar array CCD image sensor does not need to be matched with a cylindrical lens.
Referring to fig. 1, when the light beam reaches the first transmission grating 3, since the incident light and the diffracted light are on the same side as normal, the optical path difference between two adjacent light beams is Δ= dsini +sin θ, and similarly, when the light beam continues to reach the second transmission grating 4, the optical path difference between two adjacent light beams is Δ' = dsini ' +sin θ '. From this, it can be seen that the shortest wavelength optical path is a1+a2+a3+a4 and the longest wavelength optical path is z1+z2+z3+z4 in the same medium from the start of the emission of the collimator lens 2 until the cut-off of the CCD image sensor 7. It can be seen that a1 < z1 and a2 < z2 in the early stage, therefore, the 45-degree and 135-degree grating structure increases the accumulated optical path difference of adjacent wavelengths, and in order to solve the difficulty in balancing aberration in the optical design in the later stage, the focusing mirror 5 is arranged according to the angle shown in fig. 1, so that a3 < z3, that is, the difference between the shortest wavelength and the longest wavelength optical path is continuously increased, and a4 is finally forced to be larger than z4. This arrangement makes a1+a2+a3+a4 almost the same as z1+z2+z3+z4, and balances the aberration; the CCD image sensor 7 can be positioned at a position almost orthogonal to the light rays, so that the resolution and the sensitivity are more excellent.
The system parameters of the examples are as follows:
The incident wavelength is selected from 1525nm-1575nm and the light with multiple colors is input into the spectrometer. The reticle density of the two transmission gratings was 1000lp/mm. The two high density transmission gratings make the light dispersion obvious, but the resolution difference between the typical values of the final wavelengths is not large, i.e. very uniform, because the spectral range chosen is only 50 nm. The angle of the focusing lens 5 enables light to exit from the side of the two gratings instead of passing through the space between the two gratings, so that the accumulated optical path difference caused by the rotation angle of the two transmission gratings in the same direction in the earlier stage is counteracted, and the geometric aberration is balanced. The corresponding point diagram is shown in fig. 3, the resolution of all wavelengths is basically 0.35-0.4 nm, and all light spots are flat, concentrated and rectangular. Fig. 2 shows a light path simulation structure corresponding to the present invention, and it can be found that the structure of the present invention is easier to avoid stray light and mechanical interference, and the degree of freedom of element design is higher. Comparing the light path simulation diagram of fig. 4, it is found that if the concave mirror is placed in such a way that the rotation angle is unidirectional (i.e. the control light always deflects clockwise or counterclockwise), the outgoing light passes through between the two transmission gratings, and in the optimization process, in order to balance the aberration, the included angle between the CCD and the light is not orthogonal, which directly results in oblique incidence of the light beam, degradation of resolution and sensitivity, and the maximum efficiency of the prism and the CCD cannot be utilized. And if one wants to change the concave mirror angle, one risks mechanical interference of the outgoing beam with the first transmission grating 3 or the second transmission grating 4.
While the invention has been described with reference to the preferred embodiments, it is not intended to limit the invention thereto, and it is to be understood that other modifications and improvements may be made by those skilled in the art without departing from the spirit and scope of the invention, which is therefore defined by the appended claims.
Claims (5)
1. The double-grating folded light path optical fiber spectrometer comprises an incident optical fiber port, a collimating mirror, a grating, a focusing mirror and a detector module, wherein the detector module is a linear array CCD image sensor or an area array CCD image sensor;
Light enters from an incident optical fiber port, irradiates onto a first transmission grating after passing through a collimating lens to generate first diffraction, enters onto a second transmission grating to generate second diffraction, and reflects the second diffraction light to the outside of the two transmission gratings by a focusing lens, so that a focusing light spot falls on a light sensing surface of a CCD image sensor;
the focusing mirror is a concave reflecting mirror with a metal plating film;
The included angle between the concave reflector and the horizontal direction is 135-180 degrees, so that light is reflected by the concave reflector to deflect towards the second direction after being deflected towards the first direction continuously by twice diffraction, and is emitted from the outside of the two gratings, and the optical path difference accumulated by the rotation angles of the two transmission gratings in the same direction in the earlier stage is offset.
2. The dual-grating folded-optical-path fiber spectrometer of claim 1, wherein the first transmission grating and the second transmission grating are both near-infrared band transmission gratings.
3. The dual-grating folded optical path fiber spectrometer of claim 1, wherein the collimating lens is an achromatic bi-cemented lens or an aspheric lens.
4. The dual-grating folded light path fiber optic spectrometer according to claim 1, wherein the focusing mirror and the fiber limit the incident numerical aperture to be greater than or equal to 0.15; the incident optical fibers are arranged linearly and are consistent with the slit in height.
5. The dual-grating folded light path fiber optic spectrometer according to claim 1, wherein a cylindrical lens is arranged in front of the linear array CCD image sensor, and the light diffracted for the second time is reflected by the focusing mirror, longitudinally compressed and transmitted by the cylindrical lens and then falls on the CCD image sensor.
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