CN115265605B

CN115265605B - Sensor circuit and motion data detection device

Info

Publication number: CN115265605B
Application number: CN202210773992.6A
Authority: CN
Inventors: 袁辅德
Original assignee: Suzhou Novosense Microelectronics Co ltd
Current assignee: Suzhou Novosense Microelectronics Co ltd
Priority date: 2021-12-01
Filing date: 2022-07-01
Publication date: 2024-03-12
Anticipated expiration: 2042-07-01
Also published as: CN115265605A

Abstract

The invention discloses a sensor circuit and a motion data detection device, which comprises: the signal processing module is used for connecting the first sensing branch, the second sensing branch, the third sensing branch and the fourth sensing branch in parallel; the sensor comprises a first sensing element, a first node, a second sensing element, a third sensing element, a second node, a fourth sensing element, a fifth sensing element, a third node, a sixth sensing element, a seventh sensing element, a fourth node and an eighth sensing element; the signal processing module is connected with at least one of the nodes; the first, fourth, fifth and eighth sensing elements have the same first magnetoresistance effect coefficient, and the second, third, sixth and seventh sensing elements are configured to have the same second magnetoresistance effect coefficient. The sensor circuit provided by the invention has complete output data and high sensitivity.

Description

Sensor circuit and motion data detection device

Technical Field

The invention relates to the technical field of test and measurement, in particular to a sensor circuit and a motion data detection device.

Background

In industrial, automotive and commercial scenes, how to realize the detection of object motion data, especially the accurate detection and obstacle removal of the data such as the rotation angle, displacement length, motion speed and the like of a mechanical device is an important point in the field. The common practice is to use magnetic field interaction to measure the physical data so as to exert the advantages of non-contact measurement characteristics, strong vibration resistance and strong oil stain resistance of the magnetic sensing technology, and greatly reduce the loss of physical data detection to the corresponding sensor.

The technical scheme provided in the prior art is that the above measurement purpose is achieved by utilizing the cooperation of the magnetic sensor and the magnetic device, specifically, the magnetic device is arranged on the object to be detected, and the magnetic sensor is arranged close to the magnetic device, so that when the object to be detected moves or other actions sufficient to change physical data, the magnetic sensor receives the magnetic flux change condition from the magnetic device, and at least the movement data of the object to be detected can be correspondingly analyzed.

However, due to interference of external magnetic fields and/or other arrangements of control magnetic sensors for combining analysis physical data, subtraction is often performed to obtain change data representing such changes when analyzing the direction of change (particularly the direction of movement) of the physical data, resulting in loss of raw data and reduced sensitivity of the sensor; if no external magnetic field or contrast magnetic sensor is provided, various comprehensive physical data cannot be obtained, the relation between the current state and the target state cannot be analyzed, and the purpose of state monitoring cannot be achieved.

Disclosure of Invention

One of the purposes of the present invention is to provide a sensor circuit, which solves the technical problems that the sensor circuit in the prior art has incomplete sensing data, low sensing sensitivity and cannot perform self-checking of abnormal state.

One of the objects of the present invention is to provide a motion data detection device.

To achieve one of the above objects, an embodiment of the present invention provides a sensor circuit, including: the signal processing module is used for connecting the first sensing branch, the second sensing branch, the third sensing branch and the fourth sensing branch in parallel; the first sensing branch comprises a first sensing element, a first node and a second sensing element which are sequentially arranged; the second sensing branch comprises a third sensing element, a second node and a fourth sensing element which are sequentially arranged; the third sensing branch comprises a fifth sensing element, a third node and a sixth sensing element which are sequentially arranged; the fourth sensing branch comprises a seventh sensing element, a fourth node and an eighth sensing element which are sequentially arranged; the signal processing module is connected with at least one of the first node, the second node, the third node and the fourth node, and is configured to receive an electric signal and correspondingly calculate an output signal carrying data to be detected; the first, fourth, fifth and eighth sensing elements are configured to have the same first magnetoresistance effect coefficient, and the second, third, sixth and seventh sensing elements are configured to have the same second magnetoresistance effect coefficient.

As a further improvement of an embodiment of the present invention, the first magnetoresistance effect coefficient and the second magnetoresistance effect coefficient are opposite numbers to each other.

As a further improvement of an embodiment of the present invention, the first sensing branch, the second sensing branch, the third sensing branch and the fourth sensing branch are sequentially arranged along a first direction, and the first direction is a relative movement direction of the sensor circuit.

As a further refinement of an embodiment of the invention, the first and second sensing elements extend in a second direction on the first sensing branch, the third and fourth sensing elements extend in the second direction on the second sensing branch, the fifth and sixth sensing elements extend in the second direction on the third sensing branch, the seventh and eighth sensing elements extend in the second direction on the fourth sensing branch, the second direction being perpendicular to the first direction.

As a further improvement of an embodiment of the present invention, the first sensing element and the third sensing element are disposed adjacently in the first direction and at the same position in the second direction, and the sixth sensing element and the eighth sensing element are disposed adjacently in the first direction and at the same position in the second direction.

As a further improvement of an embodiment of the present invention, the first sensing element and the second sensing element are connected in series and form the first node, the third sensing element and the fourth sensing element are connected in series and form the second node, the fifth sensing element and the sixth sensing element are connected in series and form the third node, and the seventh sensing element and the eighth sensing element are connected in series and form the fourth node.

As a further improvement of an embodiment of the present invention, a first sensing element is connected in series with the fourth sensing element and forms the first node, a second sensing element is connected in series with the third sensing element and forms the second node, a fifth sensing element is connected in series with the eighth sensing element and forms the third node, and a sixth sensing element is connected in series with the seventh sensing element and forms the fourth node.

As a further improvement of an embodiment of the present invention, the first magnetoresistance effect coefficient and the second magnetoresistance effect coefficient are equal.

As a further improvement of an embodiment of the present invention, the signal processing module selectively connects at least one of the first node, the second node, the third node and the fourth node, and uses an electrical signal at a node as data to be processed.

As a further improvement of an embodiment of the present invention, the signal processing module includes at least two preprocessing units, where the preprocessing units are configured to connect at least two nodes of the first node, the second node, the third node, and the fourth node, and perform operation processing according to electrical signals output by the at least two nodes to obtain intermediate data, where the intermediate data is used to calculate at least part of data information in the data to be detected.

As a further development of an embodiment of the invention, the preprocessing unit is at least configured to perform a subtraction of the electrical signals output by the at least two nodes, the intermediate data characterizing absolute magnetic field data at an intermediate position of the sensing branch where the at least two nodes are located.

As a further improvement of an embodiment of the present invention, the signal processing module further includes: the operation processing unit is configured to perform subtraction operation on the received intermediate data to obtain magnetic field change data representing the relative motion data, and/or perform addition operation on the received intermediate data to obtain diagnosis data representing the running condition.

As a further improvement of an embodiment of the present invention, the signal processing module includes: the second preprocessing unit is connected with the first node and the second node and outputs second intermediate data according to a first voltage signal of the first node and a second voltage signal of the second node; and the third preprocessing unit is connected with the third node and the fourth node and outputs third intermediate data according to a third voltage signal of the third node and a fourth voltage signal of the fourth node.

As a further improvement of an embodiment of the present invention, the signal processing module further includes an arithmetic processing unit, where the arithmetic processing unit is connected to the second preprocessing unit and the third preprocessing unit, receives the second intermediate data and the third intermediate data, and calculates and outputs an output signal carrying the relative motion data of the sensor circuit.

As a further improvement of an embodiment of the present invention, the signal processing module further includes: and the first preprocessing unit is connected with the first node and the fourth node and outputs first intermediate data according to the first voltage signal of the first node and the fourth voltage signal of the fourth node.

As a further improvement of an embodiment of the present invention, the signal processing module further includes: and the fourth preprocessing unit is connected with the second node and the third node and outputs fourth intermediate data according to the second voltage signal of the second node and the third voltage signal of the third node.

As a further improvement of an embodiment of the present invention, the signal processing module further includes: and the operation processing unit is connected with the first preprocessing unit, the second preprocessing unit, the third preprocessing unit and the fourth preprocessing unit, receives and performs subtraction operation on the first intermediate data and the fourth intermediate data to obtain first output data, and receives and performs subtraction operation on the second intermediate data and the third intermediate data to obtain second output data.

As a further improvement of an embodiment of the present invention, the signal processing module includes: the first preprocessing unit is connected with the first node and the third node and outputs fifth intermediate data according to a first voltage signal of the first node and a third voltage signal of the third node; and the second preprocessing unit is connected with the second node and the fourth node and outputs sixth intermediate data according to a second voltage signal of the second node and a fourth voltage signal of the fourth node.

As a further improvement of an embodiment of the present invention, the first sensing element includes a sensing body and conductive terminals located at two ends of the extending direction of the sensing body, the sensing body is configured to have a material with high magnetic permeability, and the internal current of the sensing body flows in the extending direction of the sensing body, and correspondingly outputs an electrical signal under the action of an external magnetic field.

As a further improvement of an embodiment of the present invention, the first sensing element includes an antiferromagnetic layer, a first soft magnetic layer, a nonmagnetic layer, and a second soft magnetic layer, which are laminated in this order; the anti-magnetic layers are configured to be arranged in anti-parallel with magnetic moments of adjacent atoms, the first soft magnetic layer and the second soft magnetic layer are configured to have low coercive force, the anti-magnetic layers form magnetic bias action on the first soft magnetic layer, and the magnetization direction of the second soft magnetic layer correspondingly outputs an electric signal under the action of an external magnetic field.

In order to achieve one of the above objects, an embodiment of the present invention provides a motion data detection device, including a sensor circuit according to any one of the above embodiments.

In order to achieve one of the above objects, an embodiment of the present invention provides a motion data detection system, including a magnetic encoder and a motion data detection device according to the above technical solution; the motion data detection device is configured to detect and output relative motion data by utilizing magnetic flux changes formed by relative motion; the magnetic encoder is configured in a linear bar shape or a circular ring shape and comprises at least a first magnetic element and a second magnetic element which are alternately arranged, wherein the polarities of the first magnetic element and the second magnetic element are configured to be opposite.

In order to achieve one of the above objects, an embodiment of the present invention provides a motion data detection method, including: receiving a first electric signal of a first node and a fourth electric signal of a fourth node, and generating and outputting first intermediate data; receiving a first electric signal of a first node and a second electric signal of a second node, and generating and outputting second intermediate data; receiving a third electric signal of a third node and a fourth electric signal of a fourth node, and generating and outputting third intermediate data; and calculating and outputting an output signal carrying the data to be detected according to the first intermediate data, the second intermediate data and the third intermediate data.

Compared with the prior art, the sensor circuit provided by the invention has the advantages that through arranging four groups of sensing branches connected in parallel, each group of sensing branches is provided with two sensing elements with the same or different magnetic resistance characteristics and connected in series, and the collected electric signals of intermediate nodes of the two sensing elements are used as original calculation data, so that absolute data which are different from change data can be calculated among the sensing branches with the same sensing element configuration, and the output signals carrying data to be detected are obtained by utilizing multiple groups of absolute data operation, so that the comprehensive and complete technical effect of the output data is achieved on the premise of keeping high anti-interference capability and high sensitivity, and the abnormal self-detection of states under multiple working conditions can be dealt with.

Drawings

FIG. 1 is a schematic diagram of a motion data detection system according to an embodiment of the present invention;

FIG. 2 is an enlarged schematic view of a portion of a magnetic encoder of a motion data detection system in accordance with an embodiment of the present invention;

FIG. 3 is a schematic view of a portion of a motion data detecting apparatus according to an embodiment of the present invention;

FIG. 4 is a schematic diagram of a sensor circuit according to an embodiment of the invention;

FIG. 5 is a schematic diagram showing the change of initial data output by a sensing element of a sensor circuit following a relative movement distance according to an embodiment of the present invention;

FIG. 6 is a schematic diagram showing the change of the output data of the signal processing module of the sensor circuit following the relative movement distance according to an embodiment of the present invention;

FIG. 7 is a schematic diagram of a sensor circuit in another embodiment of the invention;

FIG. 8 is a schematic diagram showing the change of the intermediate data output by the preprocessing unit of the sensor circuit following the relative movement distance according to another embodiment of the present invention;

FIG. 9 is a schematic diagram of a sensor circuit according to yet another embodiment of the present invention;

FIG. 10 is a schematic diagram of a first example of a sensing element of a sensor circuit in an embodiment of the invention;

FIG. 11 is a schematic diagram showing initial data output by a sensing element of a sensor circuit according to an embodiment of the present invention following a change in an applied magnetic field;

FIG. 12 is a schematic diagram of a second example of a sensing element of a sensor circuit in an embodiment of the invention;

FIG. 13 is a schematic diagram of a third example of a sensing element of a sensor circuit in an embodiment of the invention;

FIG. 14 is a schematic diagram of the sensing element of a sensor circuit in another embodiment of the invention;

FIG. 15 is a diagram showing the structure and resistance change of a sensing element of a sensor circuit according to another embodiment of the present invention when a first externally applied magnetic field is applied;

FIG. 16 is a schematic diagram showing the structure and resistance change of a sensing element of a sensor circuit according to another embodiment of the present invention when a second external magnetic field is applied;

FIG. 17 is a diagram showing the structure and resistance change of a sensing element of a sensor circuit according to another embodiment of the present invention when a third externally applied magnetic field is applied;

FIG. 18 is a schematic diagram showing the structure and resistance change of a sensing element of a sensor circuit according to another embodiment of the present invention without an applied magnetic field.

Detailed Description

The present invention will be described in detail below with reference to specific embodiments shown in the drawings. These embodiments are not intended to limit the invention and structural, methodological, or functional modifications of these embodiments that may be made by one of ordinary skill in the art are included within the scope of the invention.

It should be noted that the term "comprises," "comprising," or any other variation thereof is intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Furthermore, the terms "first," "second," "third," "fourth," "fifth," "sixth," "seventh," "eighth," "ninth," "tenth," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

The sensor circuit for measuring physical data such as angle, stroke, speed and direction can be widely applied to various scenes, for example, the measurement of the rotation quantity of gears in a mechanical device and the measurement of the opening and closing stroke of a valve. Based on the above, the device including wheel-shaped devices such as automobiles can be subjected to idle sliding detection, and the device can also be subjected to motion feedback detection of an automatic production line.

In order to adapt to various difficult working conditions, it is necessary to use a physical data measurement mode with non-contact measurement, vibration resistance and oil stain resistance, high accuracy and high response speed, so that detection by using a magnetic sensor is clearly a better choice, and the magnetic sensor can be generally divided into components manufactured by using a hall effect as a principle and components manufactured by using a magneto-resistance effect as a principle. The former has the advantages of strong compatibility with CMOS (Complementary Metal Oxide Semiconductor ) process, small size and high cost performance, while the latter has higher sensitivity, smaller IC (Integrated Circuit ) power consumption and higher detection accuracy. Any of the magnetic sensors described above, or other sensors not mentioned that can be used to sense physical data, can be used instead with its own advantages in any of the embodiments provided hereinafter.

The invention provides a motion data detection system, as shown in fig. 1, comprising a magnetic encoder 100 and a motion data detection device 200, wherein at least one of the magnetic encoder 100 and the motion data detection device 200 is arranged on an object to be detected, so that at least one signal output is generated by utilizing magnetic flux changes formed by relative motion of the magnetic encoder 100 and the motion data detection device 200 for an operator to acquire and correspondingly analyze, and data to be detected is obtained.

In one embodiment, the data to be detected may be any physical data that can be generated or obtained through relative motion, or any physical data that can be generated or obtained through magnetic effect, and the invention is not limited to a specific application scenario of the motion data detection system, and any application that can be achieved through the internal structure of the motion data detection system is within the scope of protection of the invention.

The magnetic encoder 100 may include at least one pair of a first magnetic element and a second magnetic element disposed adjacent to each other, and the magnetic induction line is emitted through one of the first magnetic element and the second magnetic element and converges to the other of the second magnetic element and the first magnetic element. Based on this, the motion data detection device 200 is at least partially in contact with the magnetic induction line region, and the magnetic encoder 100 and the motion data detection device 200 may relatively move on at least one extension component of the contact portion, so that the motion data detection device 200 can detect a magnetic flux change.

Of course, the first magnetic element and the second magnetic element defined above and disposed in the magnetic encoder 100 may be configured as a plurality of portions disposed separately, or may be configured as at least two magnetic regions having different magnetic properties in an integrally formed magnetic device. In order to expand the detection range, the first magnetic element and the second magnetic element on the magnetic encoder 100 may be arranged in a plurality of alternately arranged directions having an extension component at least in the relative movement direction of the magnetic encoder 100 and the movement data detecting device 200. As can be seen from the observation by taking the magnetic induction lines as angles, the magnetic induction lines formed by the first magnetic elements and the second magnetic elements are in a plurality of arc shapes, the emission convergence directions of the adjacent magnetic induction lines are opposite, and when the magnetic encoder 100 and the motion data detection device 200 perform relative motion, the motion data detection device 200 captures the adjacent opposite magnetic signals or the same magnetic signals arranged at intervals so as to analyze and obtain the data to be detected.

Taking the example that the first magnetic element of the magnetic encoder 100 has an N-pole polarity and the second magnetic element has an S-pole polarity, the relative motion of the magnetic encoder 100 and the motion data detecting device 200 is generated by the motion data detecting device 200, the motion data detecting device 200 may be moved along the first direction y, the first magnetic element N and the second magnetic element S of the magnetic encoder 100 may be alternately arranged in the first direction y, and the change of the magnetic field direction applied to the motion data detecting device 200 between the first magnetic element N and the second magnetic element S on both sides may be indicated by the arrow in fig. 2. Specifically, the magnetic field is configured to be applied to the motion data detection device 200 horizontally along the first direction y or the direction opposite to the first direction y at the boundary between any one of the first magnetic elements N and the adjacent second magnetic element S, and at the same time, the magnetic field is configured to gradually increase the included angle with the first direction y or the direction opposite thereto when gradually approaching the middle part of the first magnetic element N until the middle part of the first magnetic element N is in a state of being approximately perpendicular to the first magnetic element N.

And the motion data detection device 200 moving along the first direction y is isolated and observed, the degree of the motion data detection device 200 subjected to the magnetic field is gradually increased in the process of gradually approaching the first magnetic element N, the direction of the magnetic field is rotated by 90 degrees, the degree of the motion data detection device 200 subjected to the magnetic field is gradually reduced in the process of gradually separating from the first magnetic element N, and the direction of the magnetic field is continuously rotated by 90 degrees, so that an angle change of 180 degrees is formed between the motion data detection device 200 and the direction of the magnetic field subjected to the initial position. Based on this, the motion data detection device 200 generates an electrical signal output of sine and/or cosine waves at least at one of the magnetic elements (either the first magnetic element or the second magnetic element) when it moves relative to the magnetic encoder 100. Thus, any device in the motion data detection system (e.g., a host computer or a central processing unit, or the motion data detection device 200 itself) may be configured to collect the electrical signals or the processed electrical signals, so as to calculate the magnitude of the applied magnetic field according to the amplitude of the electrical signals, the amplitude differences of the electrical signals, or other data to determine the position and the moving direction, and calculate the change speed of the applied magnetic field according to the phase of the electrical signals, the phase differences of the electrical signals, or other data to obtain the speed information.

Of course, the magnetic encoder 100 may be configured not only in a linear bar shape as shown in fig. 1, but also in a circular ring shape, so as to be sleeved on a rotating mechanical workpiece to be detected to detect physical data such as at least a rotation speed and a rotation direction. It can be seen that the present invention is not limited to the specific shape of the magnetic encoder 100, as long as it is sufficient that there is an extension component in the direction of its relative movement with the movement data detecting apparatus 200 or in a direction having a small offset angle with the relative movement direction. In general, the magnetic encoder may be configured as a circular ring and/or linear bar having a plurality of magnetic regions disposed thereon and/or itself comprised of a plurality of magnetic elements, including first magnetic regions, second magnetic regions, and/or first magnetic elements, second magnetic elements, alternately arranged, wherein the polarities of the first magnetic regions and the second magnetic regions are configured to be opposite, and the polarities of the first magnetic elements and the second magnetic elements are configured to be opposite, and the magnetic encoder 100 generates a magnetic field having alternating directions based thereon.

In order to realize the output of the electric signal, the motion data detection device 200 needs to be configured with at least one sensor that outputs the electric signal synchronously with the change of the magnetic field, however, the single sensor has the technical problems that the output data is single and cannot be compared, and it is difficult to analyze and obtain multiple physical data.

The sensor circuit provided in the motion data detection device 200 may be specifically configured to include at least a first sensing branch 21, a second sensing branch 22, a third sensing branch 23, and a fourth sensing branch 24 connected in parallel with each other, the at least four sensing branches preferably being configured to be distributed at a plurality of different locations on the motion data detection device 200 so as to obtain magnetic field conditions at the different locations for conversion into analytically processable electrical signals. In one embodiment, the first sensing branch 21, the second sensing branch 22, the third sensing branch 23 and the fourth sensing branch 24 are sequentially arranged along a first direction y, preferably, the first direction y is a length direction of the motion data detecting device 200. Thus, the magnetic field conditions of different positions in the relative motion direction at the same moment and the magnetic field change conditions of the same position in the relative motion direction at different moments can be obtained in the relative motion occurrence process, so that a large amount of data for forming data to be detected can be obtained.

Of course, the above-mentioned first sensing branch 21, second sensing branch 22, third sensing branch 23 and fourth sensing branch 24 are not particularly limited in order thereof, as long as they can be contrasted with each other so as to sufficiently calculate physical data such as a relative movement speed and a relative movement direction by comparison. Meanwhile, the four sensing branches can be further configured to be adjustable in position, and because the four sensing branches do not have the sharing condition of the branch or component layers, the four sensing branches are not limited, the larger the distance between the branches is, the weaker the output signal is, and the smaller the distance is, the stronger the output signal is.

Therefore, the user can selectively increase/decrease the intervals of the sensing branches (the first sensing branch 21 and the fourth sensing branch 24 in one embodiment) disposed at both sides and/or the intervals of the two sensing branches (the second sensing branch 22 and the third sensing branch 23 in one embodiment) disposed at the middle position as needed, so that the plurality of sensing branches form more obvious magnetic field differences (magnetic field variation amounts), and the magnetic field sensitivity of the motion data detecting device 200 or the sensor circuit can be further improved.

Further, the first sensing branch 21 comprises a first sensing element 211 and a second sensing element 212 connected in series with each other, the second sensing branch 22 comprises a third sensing element 221 and a fourth sensing element 222 connected in series with each other, the third sensing branch 23 comprises a fifth sensing element 231 and a sixth sensing element 232 connected in series with each other, and the fourth sensing branch 24 comprises a seventh sensing element 241 and an eighth sensing element 242 connected in series with each other. In one embodiment, the first and second sensing elements 211 and 212 are configured to have the function of a magnetic sensor to detect the above-described magnetic field condition, and are specifically disposed to extend in the second direction x perpendicular to the first direction y and to be connected in series, preferably, the third and fourth sensing elements 221 and 222, the fifth and sixth sensing elements 231 and 232, and the seventh and eighth sensing elements 241 and 242 may each be configured to have the function of a magnetic sensor, and may each be specifically disposed to extend in the second direction x and to be connected in series, respectively. Thus, the sensing elements are arranged in a 2 x 4 matrix form, so that the magnetic field condition of multiple angles and multiple positions can be obtained and electric signals can be correspondingly generated.

Further, when at least two sensing elements on each sensing leg are configured to have magnetically sensitive properties that change in the same direction and/or in opposite directions, a single sensing leg may have an electrical signal output that characterizes the condition of its intermediate magnetic field. To illustrate the above features, continuing to refer to fig. 3, with the first direction y as the abscissa of the rectangular coordinate system and the second direction x as the ordinate of the rectangular coordinate system, defining the first sensing branch 21 to have the abscissa y7, the second sensing branch 22 to have the abscissa y5, the third sensing branch 23 to have the abscissa y3, and the fourth sensing branch 24 to have the abscissa y1, if the first sensing element 211 and the second sensing element 212 have the magnetic sensitivity characteristics of the same direction or opposite direction, the integrated electrical signal output of the first sensing branch 21 may be used to characterize the magnetic field condition at the coordinate (y 7, x 1) on the motion data detecting device 200 (or the sensor circuit, the same direction down), and/or if the third sensing element 221 and the fourth sensing element 222 have the magnetic sensitivity characteristics of the same direction or opposite direction, the integrated electrical signal output of the second sensing branch 22 may be used to characterize the magnetic field condition at the coordinate (y 5, x 1) on the motion data detecting device 200, and/or if the fifth sensing element 211 and the sixth sensing element 231 and the fourth sensing element 23 have the magnetic sensitivity characteristics of the same direction or opposite direction, and the integrated electrical signal output of the magnetic field condition at the coordinate (y 1, the fourth sensing element 23 and the integrated magnetic field output of the integrated magnetic sensing element 241) on the coordinate detecting the coordinate 1) on the coordinate detecting device 200 (the coordinate of the same direction or opposite direction or the coordinate 1).

Of course, any two of the four sensing branches may be configured to be connected to the same processing module, so as to form an electrical signal output in a combined manner, where the electrical signal output is sufficient to represent the magnetic field condition of the central position of the surrounding forming area of the two sensing branches. As an illustration of this feature, if the first sensing branch 21 and the second sensing branch 22 are connected to the same processing module, the integrated electrical signal output of the processing module may be used to characterize the magnetic field situation at the coordinate (y 6, x 1) on the motion data detection device 200, and/or if the first sensing branch 21 and the third sensing branch 23 are connected to the same processing module, the integrated electrical signal output of the processing module may be used to characterize the magnetic field situation at the coordinate (y 5, x 1) on the motion data detection device 200, and/or if the first sensing branch 21 and the fourth sensing branch 24 are connected to the same processing module, the integrated electrical signal output of the processing module may be used to characterize the magnetic field situation at the coordinate (y 4, x 1) on the motion data detection device 200, and/or if the second sensing branch 22 and the third sensing branch 23 are connected to the same processing module, the integrated electrical signal output of the processing module may be used to characterize the magnetic field situation at the coordinate (y 4, x 1) on the motion data detection device 200, and/or if the second sensing branch 22 and the fourth sensing branch 24 are connected to the same processing module, the integrated electrical signal output at the coordinate (y 4, x 1) on the motion data detection device 200, and the integrated electrical signal output of the integrated electrical signal at the coordinate (y 1) may be used to characterize the magnetic field situation at the coordinate (y 4, x 1) on the motion data detection device 200.

In addition, any electrical signal output that characterizes the magnetic field condition at the same location and/or the underlying data upon which the electrical signal is output (or electrical signal output of a single sensing branch, or electrical signal input of the processing module described above) may be used to characterize the direction of movement of the motion data detection device 200. This is because, although the composite electrical signal output has a positional correspondence between the composite electrical signal output or between the composite electrical signal and the single sensing branch point signal output from the geometric analysis, the data such as the motion direction and the motion speed will greatly affect the conditions of the motion data detection device 200 under the action of the magnetic field at different positions, and further affect the output of the electrical signal data. Naturally, the direction determination may be performed using relevant data characterizing the magnetic field conditions at the same location, while the present invention does not exclude embodiments in which the direction determination is performed using relevant data characterizing the magnetic field conditions at different locations.

For more stable and accurate data acquisition, as shown in connection with fig. 3 and 4, the data acquisition points are preferably arranged at the node positions between at least two sensing elements on each sensing branch. Specifically, the first sensing branch 21 includes a first sensing element 211, a first node 210, and a second sensing element 212 sequentially disposed, the second sensing branch 22 includes a third sensing element 221, a second node 220, and a fourth sensing element 222 sequentially disposed, the third sensing branch 23 includes a fifth sensing element 231, a third node 230, and a sixth sensing element 232 sequentially disposed, and the fourth sensing branch 24 includes a seventh sensing element 241, a fourth node 240, and an eighth sensing element 242 sequentially disposed. At least one simple processing module is configured to connect at least one of the first node 210, the second node 220, the third node 230, and the fourth node 240 to obtain an electrical signal indicative of a magnetic field condition at a corresponding location.

In an embodiment, the sensor circuit may be specifically configured to output an electrical signal representing absolute magnetic field data distinguished from magnetic field variation data, in such an embodiment, the first, fourth, fifth and eighth sensing elements 211, 222, 231 and 242 are configured to have the same first magnetoresistance effect coefficient, the second, third, sixth and seventh sensing elements 212, 221, 232 and 241 are configured to have the same second magnetoresistance effect coefficient, and the first and second magnetoresistance effect coefficients are configured to be opposite numbers to each other. Additionally, the first magnetoresistance effect coefficient and the second magnetoresistance effect coefficient may be summarized as the magnetosensitive characteristics above.

In this way, the sensing element with the first magnetoresistance effect coefficient and the sensing element with the second magnetoresistance effect coefficient are configured to have opposite magnetic field variation sensitivities, and different sensing elements at the same position in the first direction y of the single sensing branch have opposite magnetoresistance effect coefficients, so that a more stable and accurate signal output can be formed. Meanwhile, different sensing elements of different sensing branches adjacent to each other in the first direction y and at the same position in the second direction x also have opposite magnetoresistance effect coefficients (e.g., the first sensing element 211 and the third sensing element 221, and also, e.g., the sixth sensing element 232 and the eighth sensing element 242), so that the electrical signals of the adjacent branches output information expressing opposite magnetic field sensitivities for selective call by the subsequent processing module.

The selective calling can be achieved by switching the position of the processing module to the circuit (i.e. a switching contact can be provided between the processing module and the sensing branch), which aims at any device provided with the sensor circuit provided by the invention, wherein the output of one sensing branch can be selected individually as the data to be processed, and/or the output of two adjacent sensing branches with opposite magnetic field variation sensitivity and/or the output of two sensing branches with the same magnetic field variation sensitivity can be selected as the data to be processed, so that the effects of retaining the electric signal data and removing the influence of the external magnetic field exerted on the motion data detection device 200 (or the sensor circuit) can be achieved through calculation.

Based on this, the sensor circuit may further include a signal processing module 300 connected to the first node 210, the second node 220, the third node 230 and the fourth node 240, and configured to receive an electrical signal output from at least one of the first node 210, the second node 220, the third node 230 and the fourth node 240, and correspondingly calculate an output signal carrying data to be detected.

As shown in fig. 3 to 5, fig. 5 shows the output of the first sensing branch 21, the second sensing branch 22, the third sensing branch 23 and the fourth sensing branch 24 to the signal processing module 300 as a function of the relative movement distance. Of course, in embodiments in which the processing module is configured to connect the first node 210, the second node 220, the third node 230, and the fourth node 240, the four curves shown in fig. 5 may also be embodied to represent the point signal outputs at the four nodes, respectively.

Further, in the case that the magnetic encoder 100 moves relatively along the first direction y and contacts with the magnetic induction line emitted by the magnetic encoder 100, the different sensing branches form electrical signal outputs in sine or cosine form with different phase differences, and the waveforms of the output electrical signals tend to have consistency (such as consistent amplitude and variation trend) in the case that no anisotropic or irregularly changing external magnetic field interference exists, which is enough to indicate that the sensor circuit provided by the invention has strong anti-interference capability. It should be noted that, although the output is shown as the voltage U or Vout in the drawings (not limited to fig. 5), the present invention is not limited to the output of the sensing branch being only a voltage signal or voltage data, and any electrical signal sufficient to characterize the magnetic field condition may alternatively be used in the present invention.

Based on the phase difference, the phase difference carries not only the change information which is correspondingly formed by the change of different sensing branches positioned at different positions under the action of a magnetic field in the moving process, but also the resistance change information of sensing elements with different magnetosensitive characteristics, so that the waveform and the phase difference of the electric signals can be utilized for processing so as to obtain physical data to be detected or other signals carrying the data to be detected after intermediate processing.

Thus, in a refinement of the present invention, the signal processing module 300 may specifically include three preprocessing units, configured to connect at least two nodes, and perform an operation process according to the electrical signals output by the two nodes to obtain intermediate data, where the intermediate data is used to calculate other data information (such as movement direction information) in the data to be detected, where the other data information cannot be obtained according to the electrical signals output by the nodes.

Further, as further shown in fig. 4, the signal processing module 300 may include a first pre-processing unit 31, a second pre-processing unit 32, and a third pre-processing unit 33. Wherein the first preprocessing unit 31 is configured to connect the first node 210 and the fourth node 240 and output first intermediate data according to the first voltage signal of the first node 210 and the fourth voltage signal of the fourth node 240, the second preprocessing unit 32 is configured to connect the first node 210 and the second node 220 and output second intermediate data according to the first voltage signal of the first node 210 and the second voltage signal of the second node 220, and the third preprocessing unit 33 is configured to connect the third node 230 and the fourth node 240 and output third intermediate data according to the third voltage signal of the third node 230 and the fourth voltage signal of the fourth node 240. It will be appreciated that in other embodiments, the above-described structural configuration of the connection node may be replaced by connecting corresponding sensing branches (e.g. the first pre-processing unit 31 may be configured to connect the first sensing branch 21 and the second sensing branch 22), while the above-described voltage signals output by different nodes may present a waveform output with reference to fig. 5 on the one hand, and may be other electrical signals not limited to voltage signals on the other hand.

The first, second and third preprocessing units 31, 32 and 33 may be further configured to have an arithmetic function to generate corresponding intermediate data through operations of addition, subtraction, scaling up, input comparison, and the like. In one embodiment, the preprocessing unit may be configured to have a subtraction function, where the above eight sensing elements respectively have opposite magnetoresistance effect coefficients, and after subtraction operation, the preprocessing unit may obtain the electrical signal data after the sensing elements act according to the magnetic field effect to represent absolute magnetic field data, rather than magnetic field variation data, so that the data carried by the output electrical signal has a higher degree of integrity. Of course, in a configuration in which the eight sensing elements have the same magnetoresistance effect coefficient, the preprocessing unit may of course also be configured as an architecture capable of performing addition operations, as well as capable of outputting an electrical signal for characterizing absolute magnetic field data, which may be adjusted as required by those skilled in the art.

Based on this, the first pre-processing unit 31 may obtain by subtraction an electrical signal or data representing absolute magnetic field data at the intermediate position of the first and fourth sensing branches 21, 24, preferably at the coordinates (y 4, x 1) in fig. 3, the second pre-processing unit 32 may obtain by subtraction an electrical signal or data representing absolute magnetic field data at the intermediate position of the first and second sensing branches 21, 22, preferably at the coordinates (y 6, x 1) in fig. 3, and the third pre-processing unit 33 may obtain by subtraction an electrical signal or data representing absolute magnetic field data at the intermediate position of the third and fourth sensing branches 23, 24, preferably at the coordinates (y 2, x 1) in fig. 3.

Since the subtraction operation is performed to obtain a double value of the absolute magnetic field data of the corresponding position, the preprocessing unit or other modules in the signal processing module 300 may further perform the scaling operation, so as to obtain accurate absolute magnetic field data of the corresponding position. For further processing to obtain an output signal for computing or carrying the data to be detected (which may be any of the at least one relative motion data).

Specifically, the signal processing module 300 is further provided therein with an arithmetic processing unit 30 for processing the intermediate data and generating an output signal. The arithmetic processing unit 30 is configured to connect the first preprocessing unit 31, the second preprocessing unit 32, and the third preprocessing unit 33, receive the first intermediate data, the second intermediate data, and the third intermediate data, and calculate and output an output signal carrying the relative motion data of the sensor circuit (or motion data detecting means).

In one embodiment, the operation processing unit 30 may be configured to perform subtraction on the received intermediate signal, so as to obtain magnetic field variation data for completing calculation of the relative motion data such as the relative motion direction and the relative motion speed on the basis of keeping the absolute magnetic field data without loss.

Specifically, the arithmetic processing unit 30 may be configured to generate and output the first output signal OUT1 from the second intermediate data and the third intermediate data, and generate and output the second output signal OUT2 from the first intermediate data, the second intermediate data, and the third intermediate data. The first output signal OUT1 may be specifically configured to carry first output data, and the first output data is equal to a difference between second intermediate data and third intermediate data, and the second output signal OUT2 may be specifically configured to carry second output data, and the second output data is equal to a difference between the first intermediate data (or a multiple thereof) and a sum of the second intermediate data and the third intermediate data.

Specifically, defining the first intermediate datase:Sub>A as m, the second intermediate datase:Sub>A as ase:Sub>A, and the third intermediate datase:Sub>A as B, the first output datase:Sub>A may be configured as any one of (ase:Sub>A-B) or (B-ase:Sub>A), and the second output datase:Sub>A may be configured as (n×m-ase:Sub>A-B); wherein n is greater than or equal to 1, preferably 2. Therefore, as the first output signal OUT1 and the second output signal OUT2 are used for differencing different data representing the magnetic field condition acquired by different position sensing branches, the interference of a single external magnetic field can be further eliminated. Meanwhile, because any one of the first output signal OUT1 and the second output signal OUT2 carries magnetic field change data, the current relative movement speed data can be calculated by using one of the first output signal OUT1 and the second output signal OUT2, and the current relative movement direction data can be obtained by using the first output signal OUT1 and the second output signal OUT2 to perform phase comparison calculation.

In summary, the present invention also provides a motion data detection method, where the detection method specifically includes:

step S1, receiving a first electric signal of the first node and a fourth electric signal of the fourth node, and generating and outputting first intermediate data;

step S3, receiving a first electric signal of the first node and a second electric signal of the second node, and generating and outputting second intermediate data;

step S5, receiving a third electric signal of the third node and a fourth electric signal of the fourth node, and generating and outputting third intermediate data;

and step S7, calculating and outputting an output signal carrying data to be detected according to the first intermediate data, the second intermediate data and the third intermediate data.

The sequence of the steps S1 to S5 is not a comparison feature of the present invention, and a person skilled in the art may adjust the sequence according to the need, or may configure the steps S1 to S5 to be performed simultaneously. The first electric signal, the second electric signal, the third electric signal, and the fourth electric signal are not limited to the above voltage signals, but may be other signals such as a current signal, a resistance signal, and an impedance signal that change with a magnetic field effect. As mentioned above, the data to be detected also include not only relative motion data.

The method may further preferably specifically comprise:

step S71, calculating to obtain a first output signal according to the second intermediate data and the third intermediate data; wherein the first output signal characterizes a magnetic field variation between adjacent sensing branch combinations;

step S72, calculating to obtain a second output signal according to the first intermediate data, the second intermediate data and the third intermediate data; wherein the second output signal characterizes a magnetic field variation of the sensor circuit as a whole.

Therefore, the relative movement speed data can be calculated according to one of the first output signal or the second output signal, and the relative movement direction data can be calculated by combining the two output signals.

The method may further preferably specifically comprise:

step S711, performing a difference between the second intermediate data and the third intermediate data to obtain first output data, and generating and outputting a first output signal according to the first output data;

step S721, the first intermediate data is differenced with the second intermediate data and the third intermediate data to obtain second output data, and a second output signal is generated and output according to the second output data.

Of course, the specific operation process described above may also have other embodiments when the circuit structure is changed or the magnetoresistance effect coefficient of the sensing element is changed, and those skilled in the art can expect the above scheme provided by the present invention.

Step S9, calculating the relative movement speed data according to the first output signal OUT1, and calculating the relative movement direction data according to the first output signal OUT1 and the second output signal OUT 2.

Further, the sensor circuit may further comprise a fourth pre-processing unit 34. The fourth preprocessing unit 34 is configured to connect the second node 220 and the third node 230, and output fourth intermediate data according to the second voltage signal of the second node 220 and the third voltage signal of the third node 230. Correspondingly, the fourth pre-processing unit 34 may also be further configured with an arithmetic function, and preferably with a subtraction function, to compute an electrical signal or data representing absolute magnetic field data at a position intermediate the second and third sensing branches 22, 23, preferably at coordinates (y 4, x 1) in fig. 3.

It will be appreciated that the sensor circuit may have the first preprocessing unit 31, the second preprocessing unit 32, the third preprocessing unit 33 and the fourth preprocessing unit 34 at the same time, or the first preprocessing unit 31 in the previous embodiment may be replaced by the fourth preprocessing unit 34, so that the sensor circuit also maintains the structure of the three preprocessing units, which can achieve the above technical effects and implement the above method.

illustratively,definingthefourthintermediatedataasM,thesecondoutputdatamaybeconfiguredtobeequalto(nxM-a-b)inthealternativeembodimentdescribedabove; wherein n is greater than or equal to 1, preferably 2. intheabove-describedsimultaneousembodiment(thesensorcircuithasfourpreprocessingunits),thesecondoutputdatamaybeconfiguredasanyoneof(m+m-a-b)and(n-M)inadditiontoanyoneof(n-M-a-b)and(n-M-a-b).

In the embodiment in which four preprocessing units are simultaneously arranged, it is preferable to arrange the first output data to Num 1= (a-B) and the second output data to Num2 = 2 x (M-M), so that a variation graph as shown in fig. 6 is formed. It can be seen that the difference in amplitude, curve change and the phase difference larger than that of fig. 5 exist in the two, so that at least the relative movement speed data and the relative movement direction data can be calculated clearly and reliably.

Based on this, the motion data detection method provided by the present invention may further preferably specifically include:

step S4, receiving a second electric signal of the second node and a third electric signal of the third node, and generating and outputting fourth intermediate data;

step S7', calculating and outputting an output signal carrying data to be detected according to the first intermediate data, the second intermediate data, the third intermediate data and the fourth intermediate data;

Step S71', calculating to obtain a first output signal according to the second intermediate data and the third intermediate data; wherein the first output signal characterizes a magnetic field variation between adjacent sensing branch combinations;

step S72', calculating to obtain a second output signal according to the first intermediate data and the fourth intermediate data; wherein the second output signal is indicative of a magnetic field variation between another adjacent combination of sensing branches.

Additionally, the sensor circuit provided by the present invention may further specifically include a diagnosis processing module configured to connect any two of the first pre-processing unit 31, the second pre-processing unit 32, the third pre-processing unit 33, and the fourth pre-processing unit 34, so as to implement the self-monitoring, self-diagnosis, and other extension functions of the motion data detection apparatus 200 by forming a comparison between two of the first intermediate data, the second intermediate data, the third intermediate data, and the fourth intermediate data. Preferably, the second intermediate data and the third intermediate data may be collected and summed, i.e. diagnostic data (a+b) is generated, to determine whether the motion detection device, the motion detection system and/or the object to be tested are malfunctioning.

Fig. 7 shows a sensor circuit configuration in another embodiment of the present invention, and fig. 8 shows an output of a corresponding preprocessing unit of the sensor circuit. Of course, this other embodiment of the present invention and the above-mentioned embodiment are not isolated from each other, and both may establish two sets of fixed or switchable sensor circuits through the operation processing unit 30 (switching may be achieved by setting the switching module, and the same applies below), and may also simultaneously share four sensing branches and establish a set of more complete fixed or switchable sensor circuits through the operation processing unit 30.

In this embodiment, the signal processing module 300 includes a first pre-processing unit 31 'and a second pre-processing unit 32' (of course, in the new embodiment formed by combining the two embodiments described above, the two pre-processing units may have other definition manners, such as a fifth pre-processing unit and a sixth pre-processing unit). Wherein the first preprocessing unit 31' is configured to connect the first node 210 and the third node 230, and output fifth intermediate data according to the first voltage signal of the first node 210 and the third voltage signal of the third node 230; the second preprocessing unit 32' is configured to connect the second node 220 and the fourth node 240, and output sixth intermediate data according to the second voltage signal of the second node 220 and the fourth voltage signal of the fourth node 240.

Specifically, the first and second preprocessing units 31 'and 32' may have the same functional configuration as the preprocessing units described previously. In this way, based on the fact that the sensing branches to which the first preprocessing unit 31 'and the second preprocessing unit 32' are connected have the same magnetoresistance effect coefficient configuration, the first preprocessing unit 31 'may obtain, through subtraction, an electrical signal or data for characterizing magnetic field variation data at an intermediate position (preferably at the coordinates (y 5, x 1) in fig. 3) of the first sensing branch 21 and the third sensing branch 23, and the second preprocessing unit 32' may obtain, through subtraction, an electrical signal or data for characterizing magnetic field variation data at an intermediate position (preferably at the coordinates (y 3, x 1) in fig. 3) of the second sensing branch 22 and the fourth sensing branch 24.

Of course, in this embodiment, the arithmetic processing unit 30 may be also configured. The arithmetic processing unit 30 is configured to connect the first preprocessing unit 31 'and the second preprocessing unit 32', receive the fifth intermediate data and the sixth intermediate data, calculate and output an output signal carrying the relative movement data of the sensor circuit.

For the calculation of the data to be detected, since the above-described process collects the magnetic field variation data, the arithmetic processing unit 30 may select one of the fifth intermediate data and the sixth intermediate data for the calculation of the relative movement velocity data. Meanwhile, the magnetic field change conditions at different positions are represented based on the fifth intermediate data and the sixth intermediate data, so that the fifth intermediate data and the sixth intermediate data can be compared, and the relative movement direction data can be calculated. It will be appreciated that the various motion data detection methods and their superior and inferior concepts thus generated may be similar to the previous embodiments and will not be described in detail herein.

Fig. 9 shows a sensor circuit structure in another embodiment of the present invention, which is the same as another embodiment of the present invention, but the sensor circuit structures provided in the first two embodiments are not isolated from each other, and can be combined to form other sensor circuits that are more complete or switchable with each other.

In this embodiment, although the sensor circuit is still configured to include at least four sensing branches connected in parallel with each other, and the positional arrangement relationship of the sensing elements inside the sensing branches has the same scheme as the first two embodiments, the magnetosensitive characteristics of the sensing elements themselves, and the interconnection relationship between the sensing elements are improved. In other words, this embodiment aims to provide a sensor circuit for outputting an electrical signal representing magnetic field variation data.

Based on this, all sensing elements are configured to have the same positive or negative magnetoresistance effect coefficient. Meanwhile, the first sensing element 211 and the fourth sensing element 222 are connected and form a first node 210″ therebetween, the second sensing element 212 and the third sensing element 221 are connected and form a second node 220″ therebetween, the fifth sensing element 231 and the eighth sensing element 242 are connected and form a third node 230″ therebetween, and the sixth sensing element 232 and the seventh sensing element 241 are connected and form a fourth node 240″ therebetween.

In this way, the positional arrangement difference between the sensing elements connected in series with each other forms a comparison output (or difference output) so as to be acquired and correspondingly calculated by the processing module provided later. Here, in particular, the output electrical signals at the first node 210 "and the second node 220" may be used to characterize the magnetic field case difference at the two locations of coordinates (y 5, x 1) and coordinates (y 7, x 1) in fig. 3, and the output electrical signals at the third node 230 "and the fourth node 240" may be used to characterize the magnetic field case difference at the two locations of coordinates (y 1, x 1) and (y 3, x 1) in fig. 3. Based on this, it is possible to easily select any one of the magnetic field situation differences to calculate the current relative movement speed data, and to compare the two magnetic field situation differences with each other to calculate the current relative movement direction data. Of course, a combination of the second node 220 "and the third node 230" and/or a combination of the first node 210 "and the fourth node 240" may also be collected, so as to obtain other data to be detected or perform functions of self-monitoring, self-diagnosis, and the like through operation.

In order to fit the above-mentioned sensing branch arrangement, the embodiment may further comprise a signal processing module 300", and the signal processing module 300" may comprise a second pre-processing unit 32 "and a third pre-processing unit 33" (of course, in the new embodiment formed by combining the above-mentioned two embodiments, the two pre-processing units may have other definition, such as an eighth pre-processing unit and a ninth pre-processing unit). Wherein the second pre-processing unit 32 "is configured to connect the first node 210" and the second node 220 "and output the seventh intermediate data according to the first voltage signal of the first node 210" and the second voltage signal of the second node 220", and the third pre-processing unit 33" is configured to connect the third node 230 "and the fourth node 240" and output the eighth intermediate data according to the third voltage signal of the third node 230 "and the fourth voltage signal of the fourth node 240".

Likewise, the second pre-processing unit 32 "and the third pre-processing unit 33" may be further configured to have the same or similar arithmetic function as before, preferably configured to have a subtraction arithmetic function. Thus, based on the fact that all the sensing branches have the same magnetoresistance effect coefficient configuration, the second preprocessing unit 32″ may obtain, through subtraction, an electrical signal or data representing magnetic field variation data of the region where the first sensing branch 21 and the second sensing branch 22 are located (preferably, the region covering the abscissa y5:y7 in fig. 3), and the third preprocessing unit 33″ may obtain, through subtraction, an electrical signal or data representing magnetic field variation data of the region where the third sensing branch 23 and the fourth sensing branch 24 are located (preferably, the region covering the abscissa y1:y3 in fig. 3).

Of course, in this embodiment, the arithmetic processing unit 30 may be also configured. The arithmetic processing unit 30 is configured to connect at least the second preprocessing unit 32″ and the third preprocessing unit 33″ to receive the seventh intermediate data and the eighth intermediate data, calculate and output an output signal carrying the relative motion data of the sensor circuit.

For the calculation of the data to be detected, since the above-described process collects the magnetic field variation data, the arithmetic processing unit 30 may select one of the seventh intermediate data and the eighth intermediate data for the calculation of the relative movement velocity data. Meanwhile, the magnetic field change conditions at different positions are characterized based on the seventh intermediate data and the eighth intermediate data, so that the seventh intermediate data and the eighth intermediate data can be compared, and the calculation of the relative movement direction data is calculated. It will be appreciated that the various motion data detection methods and their superior and inferior concepts thus generated may be similar to the previous embodiments and will not be described in detail herein.

Of course, the sensor circuit provided in this embodiment may further include a first preprocessing unit 31 "and a fourth preprocessing unit 34" for replacing the two preprocessing units, or for realizing more comprehensive data detection and/or facilitating self-monitoring and self-diagnosis. The first preprocessing unit 31″ is configured to connect the second node 220″ and the third node 230″ and output ninth intermediate data according to the second voltage signal of the second node 220″ and the third voltage signal of the third node 230″; the fourth preprocessing unit 34″ is configured to connect the first node 210″ and the fourth node 240″ and output tenth intermediate data according to the first voltage signal of the first node 210″ and the fourth voltage signal of the fourth node 240″. The arithmetic processing unit may be further configured to connect the first preprocessing unit 31″ and the fourth preprocessing unit 34″ and receive the ninth intermediate data and the tenth intermediate data.

For avoiding redundancy, the arrangement of the sensing branches in the first direction y and the second direction x is not described in the description of the sensor circuit, but the arrangement thereof can be clearly derived from fig. 4, 7 and 9 to assist in achieving the above technical effects, and of course, since the first direction y and the second direction x are provided only as relative positions and expressions of relative movement directions thereof, they are not limited in any essential sense, and can be adjusted by those skilled in the art to produce various embodiments.

The specific structure and operation of the individual sensing elements are described in detail in connection with fig. 10-18. The sensing element 20 is defined herein, it being understood that the sensing element 20 may be applied to any of the embodiments described above, such that the sensor circuit configuration described above has the technical effects provided by any of the embodiments described below.

As shown in fig. 10, a first embodiment of a sensing element 20 according to an embodiment of the present invention includes a sensing body 201 and conductive terminals 202 disposed at two ends of the sensing body 201 in an extending direction. Wherein the sensing body 201 is preferably configured with a high permeability material, in a specific embodiment a permalloy strip. The extending direction of the sensing body 201 is the direction of the current I inside the sensing element 20, when the external magnetic field H is not present, the magnetization direction M inside the sensing element 20 has the direction consistent with the direction of the current I inside, and the sensing element 20 has the maximum resistance value; when the external magnetic field H is applied to the sensing element 20, the magnetization direction M and the flow direction of the internal current I form an electromagnetic deflection angle θ, and at this time, the high permeability of the sensing body 201 can reduce the resistance value of the sensing element 20 with the increase of the external magnetic field H, so as to form a magnetic sensor that is sufficient for measuring the change of the external magnetic field and outputting a changed electric signal in response to the change.

Of course, based on the above description, the external magnetic field H is not necessarily perpendicular to the flow direction of the internal current I, but only needs to have a component perpendicular to the flow direction of the internal current I, and for the case of the external magnetic field H in other directions, it is expected that the above structural configuration is not repeated here. Further, fig. 11 discloses a graph of the initial data output by the sensing element 20 along with the change of the applied magnetic field H, on the one hand, the initial data may be voltage output, or may be other data which is generated along with the change of resistance and can be easily measured, on the other hand, as shown in fig. 11, the applied magnetic field H may operate the output of the sensing element 20 in a linear region within a certain intensity range, and when exceeding the range, the output of the sensing element may have a nonlinear relationship.

Based on this, the present invention provides a sensing element 20 based on the second example of this embodiment, the structure of which is shown in fig. 12. As proved by experimental deduction, when the electromagnetic deflection angle θ satisfies the value range [ -45 °, +45° ], the initial data outputted by the sensing element 20 will conform to the linear change to facilitate calculation. Accordingly, a plurality of conductors 203 are provided through the middle of the sensing body 201 to divide the sensing body 201 into a plurality of high magnetic permeability regions, and the plurality of conductors 203 have a deflection angle of 45 ° from the extending direction of the sensing body 201 from the beginning based on having a stronger conductivity than the sensing body 201. At this time, under the condition that the external magnetic field H is 0, the electromagnetic deflection angle θ between the magnetization direction M and the internal current I is-45 °, the magnitude of the external magnetic field H is gradually increased to make the magnetization direction infinitely trend to be perpendicular to the sensing body 201, and the electromagnetic deflection angle θ between the magnetization direction M and the internal current I is always smaller than +45°, so that the sensing element 20 always operates in the linear region, and the output initial data is favorable for improving the accuracy of the subsequent analysis.

In order to further improve the performance, the third embodiment of fig. 13, which is based on the above embodiment, avoids or delays the reverse output of the sensing element 20 in the high magnetic field intensity region, is to superimpose the auxiliary magnetic field H having an angle of 45 ° with respect to the extending direction of the sensing body 201 on the sensing element 20 from the beginning by configuring the permanent magnet, the coil or other magnetic field generating device, so as to achieve the technical effect that the electromagnetic deflection angle θ satisfies the value range of the linear operation.

In another embodiment, the sensing element 20 may also have a structural configuration as shown in fig. 14, including a antimagnetic layer 204, a first soft magnetic layer 205, a nonmagnetic layer 206, and a second soft magnetic layer 207, which are sequentially stacked from a first side to a second side. Preferably, the demagnetizing layer 204 is specifically configured such that adjacent atomic magnetic moments are antiparallel aligned, having the property of having a net magnetization of zero; the first soft magnetic layer 205 is specifically configured to have a relatively low coercivity such that the antiferromagnetic layer 204 is configured to magnetically bias the first soft magnetic layer 205 to define the first soft magnetic layer 205 to have a first magnetization direction P; the nonmagnetic layer 206 may be configured specifically as a conductor, or may be configured specifically as being made of an insulating material; the second soft magnetic layer 207 is specifically configured to have a low coercive force, and since there is no magnetic bias, the magnetization direction of the second soft magnetic layer 207 can be changed with the external or externally applied magnetic field direction, and when the external or externally applied magnetic field is zero, the second soft magnetic layer 207 has the second magnetization direction F.

Fig. 15 to 18 sequentially show the magnetization direction and the resistance value change when the first externally applied magnetic field, the second externally applied magnetic field, the third externally applied magnetic field, and the fourth externally applied magnetic field are applied to the sensing element 20 in this embodiment.

Fig. 15 shows that when the externally applied magnetic field B is parallel to the first magnetization direction P, the second soft magnetic layer 207 has the second magnetization direction F that is the same as the first magnetization direction P, and the sensing element 20 exhibits the minimum resistance value. Fig. 16 shows that when the applied magnetic field B is parallel and opposite to the first magnetization direction P, the second soft magnetic layer 207 has a second magnetization direction F opposite to the first magnetization direction P, and the sensing element 20 exhibits the maximum resistance value. FIG. 17 shows that when the applied magnetic field B is perpendicular to the first magnetization direction P, the second soft magnetic layer 207 has a second magnetization direction F perpendicular to the first magnetization direction P, and the sensing element 20 has an intermediate value. Fig. 18 shows that when the externally applied magnetic field b=0, the net magnetization amount of the second soft magnetic layer 207 projects an amount of zero in the direction of the first magnetization direction P, thereby exhibiting the same intermediate value as in fig. 17.

Based on this, the magnetic field sensing element 20 can be made to operate in the linear region all the time by making the projection amount of the second magnetization direction F on the first magnetization direction P zero in the same manner as the electric adjustment and the additional auxiliary magnetic field adjustment of the previous embodiment.

In summary, according to the sensor circuit provided by the invention, four groups of sensing branches connected in parallel are arranged, each group of sensing branches is provided with two sensing elements with the same or different magnetic resistance characteristics and connected in series, and the collected electric signals of intermediate nodes of the two sensing elements are used as original calculation data, so that absolute data which are different from change data can be calculated among the sensing branches with the same sensing element configuration, and the output signals carrying data to be detected are obtained by utilizing multiple groups of absolute data operation.

It should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is for clarity only, and that the skilled artisan should recognize that the embodiments may be combined as appropriate to form other embodiments that will be understood by those skilled in the art.

The above list of detailed descriptions is only specific to practical embodiments of the present invention, and they are not intended to limit the scope of the present invention, and all equivalent embodiments or modifications that do not depart from the spirit of the present invention should be included in the scope of the present invention.

Claims

1. A sensor circuit, comprising: the signal processing module is used for connecting the first sensing branch, the second sensing branch, the third sensing branch and the fourth sensing branch in parallel;

the first sensing branch comprises a first sensing element, a first node and a second sensing element which are sequentially arranged; the second sensing branch comprises a third sensing element, a second node and a fourth sensing element which are sequentially arranged; the third sensing branch comprises a fifth sensing element, a third node and a sixth sensing element which are sequentially arranged; the fourth sensing branch comprises a seventh sensing element, a fourth node and an eighth sensing element which are sequentially arranged; the signal processing module is connected with at least one of the first node, the second node, the third node and the fourth node, and is configured to receive an electric signal and correspondingly calculate an output signal carrying data to be detected;

the first, fourth, fifth and eighth sensing elements are configured to have the same first magnetoresistance effect coefficient, and the second, third, sixth and seventh sensing elements are configured to have the same second magnetoresistance effect coefficient;

The first magnetoresistance effect coefficient and the second magnetoresistance effect coefficient are opposite numbers to each other; the first sensing branch, the second sensing branch, the third sensing branch and the fourth sensing branch are sequentially arranged along a first direction, and the first direction is the relative movement direction of the sensor circuit.

2. The sensor circuit of claim 1, wherein the first and second sensing elements extend in a second direction on the first sensing leg, the third and fourth sensing elements extend in the second direction on the second sensing leg, the fifth and sixth sensing elements extend in the second direction on the third sensing leg, the seventh and eighth sensing elements extend in the second direction on the fourth sensing leg, the second direction being perpendicular to the first direction.

3. The sensor circuit of claim 2, wherein the first and third sensing elements are disposed adjacent in the first direction and in the same position in the second direction, and the sixth and eighth sensing elements are disposed adjacent in the first direction and in the same position in the second direction.

4. The sensor circuit of claim 2, wherein the first sensing element and the second sensing element are in series and form the first node, the third sensing element and the fourth sensing element are in series and form the second node, the fifth sensing element and the sixth sensing element are in series and form the third node, and the seventh sensing element and the eighth sensing element are in series and form the fourth node.

5. The sensor circuit of claim 2, wherein a first sensing element is in series with the fourth sensing element and forms the first node, wherein the second sensing element is in series with the third sensing element and forms the second node, wherein the fifth sensing element is in series with the eighth sensing element and forms the third node, and wherein the sixth sensing element is in series with the seventh sensing element and forms the fourth node.

6. The sensor circuit of claim 1, wherein the signal processing module selectively connects at least one of the first node, the second node, the third node, and the fourth node with an electrical signal at a node as data to be processed.

7. The sensor circuit according to claim 1, wherein the signal processing module comprises at least two preprocessing units, the preprocessing units are used for connecting at least two nodes of a first node, the second node, the third node and the fourth node, and performing operation processing according to electric signals output by the at least two nodes to obtain intermediate data, and the intermediate data is used for calculating at least part of data information in the data to be detected.

8. The sensor circuit of claim 7, wherein the pre-processing unit is configured to perform a subtraction of the electrical signals output by the at least two nodes, the intermediate data characterizing absolute magnetic field data at an intermediate location of the sensing branch where the at least two nodes are located.

9. The sensor circuit of claim 8, wherein the signal processing module further comprises:

the operation processing unit is configured to perform subtraction operation on the received intermediate data to obtain magnetic field change data representing the relative motion data, and/or perform addition operation on the received intermediate data to obtain diagnosis data representing the running condition.

10. The sensor circuit of claim 7, wherein the signal processing module comprises:

the second preprocessing unit is connected with the first node and the second node and outputs second intermediate data according to a first voltage signal of the first node and a second voltage signal of the second node;

and the third preprocessing unit is connected with the third node and the fourth node and outputs third intermediate data according to a third voltage signal of the third node and a fourth voltage signal of the fourth node.

11. The sensor circuit of claim 10, wherein the signal processing module further comprises an arithmetic processing unit, the arithmetic processing unit being coupled to the second and third pre-processing units, receiving the second and third intermediate data, calculating and outputting an output signal carrying the relative motion data of the sensor circuit.

12. The sensor circuit of claim 10, wherein the signal processing module further comprises:

and the first preprocessing unit is connected with the first node and the fourth node and outputs first intermediate data according to the first voltage signal of the first node and the fourth voltage signal of the fourth node.

13. The sensor circuit of claim 12, wherein the signal processing module further comprises:

and the fourth preprocessing unit is connected with the second node and the third node and outputs fourth intermediate data according to the second voltage signal of the second node and the third voltage signal of the third node.

14. The sensor circuit of claim 13, wherein the signal processing module further comprises:

and the operation processing unit is connected with the first preprocessing unit, the second preprocessing unit, the third preprocessing unit and the fourth preprocessing unit, receives and performs subtraction operation on the first intermediate data and the fourth intermediate data to obtain first output data, and receives and performs subtraction operation on the second intermediate data and the third intermediate data to obtain second output data.

15. The sensor circuit of claim 7, wherein the signal processing module comprises:

the first preprocessing unit is connected with the first node and the third node and outputs fifth intermediate data according to a first voltage signal of the first node and a third voltage signal of the third node;

And the second preprocessing unit is connected with the second node and the fourth node and outputs sixth intermediate data according to a second voltage signal of the second node and a fourth voltage signal of the fourth node.

16. The sensor circuit of claim 1, wherein the first sensing element comprises a sensing body and conductive terminals at two ends of the extending direction of the sensing body, the sensing body is configured to have a material with high magnetic permeability, the internal current of the sensing body flows in the extending direction of the sensing body, and the external magnetic field is applied to correspondingly output an electric signal.

17. The sensor circuit of claim 1, wherein the first sensing element comprises an antiferromagnetic layer, a first soft magnetic layer, a nonmagnetic layer, and a second soft magnetic layer, which are sequentially stacked; the anti-magnetic layers are configured to be arranged in anti-parallel with magnetic moments of adjacent atoms, the first soft magnetic layer and the second soft magnetic layer are configured to have low coercive force, the anti-magnetic layers form magnetic bias action on the first soft magnetic layer, and the magnetization direction of the second soft magnetic layer correspondingly outputs an electric signal under the action of an external magnetic field.

18. A motion data detection apparatus comprising a sensor circuit as claimed in any one of claims 1 to 17.

19. A motion data detection system comprising a magnetic encoder and the motion data detection apparatus of claim 18; the motion data detection device is configured to detect and output relative motion data by utilizing magnetic flux changes formed by relative motion;

the magnetic encoder is configured in a linear bar shape or a circular ring shape and comprises at least a first magnetic element and a second magnetic element which are alternately arranged, wherein the polarities of the first magnetic element and the second magnetic element are configured to be opposite.

20. A method of motion data detection, the method of motion data detection being implemented in the sensor circuit of any one of claims 1-17, the method of motion data detection comprising:

receiving a first electric signal of a first node and a fourth electric signal of a fourth node, and generating and outputting first intermediate data;

receiving a first electric signal of a first node and a second electric signal of a second node, and generating and outputting second intermediate data;

receiving a third electric signal of a third node and a fourth electric signal of a fourth node, and generating and outputting third intermediate data;

and calculating and outputting an output signal carrying the data to be detected according to the first intermediate data, the second intermediate data and the third intermediate data.