CN115261697B - High-performance wedge chopper for wire bonding and manufacturing method thereof - Google Patents
High-performance wedge chopper for wire bonding and manufacturing method thereof Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
- C22C29/02—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
- C22C29/06—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds
- C22C29/08—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds based on tungsten carbide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
- B22F1/108—Mixtures obtained by warm mixing
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- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/1003—Use of special medium during sintering, e.g. sintering aid
- B22F3/1007—Atmosphere
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/1017—Multiple heating or additional steps
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/22—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip
- B22F3/225—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip by injection molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/05—Mixtures of metal powder with non-metallic powder
- C22C1/051—Making hard metals based on borides, carbides, nitrides, oxides or silicides; Preparation of the powder mixture used as the starting material therefor
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
- C22C29/02—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
- C22C29/06—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds
- C22C29/067—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds comprising a particular metallic binder
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
- B22F2005/001—Cutting tools, earth boring or grinding tool other than table ware
Abstract
The invention relates to a high-performance wedge chopper for wire bonding and a manufacturing method thereof, belonging to the technical field of development of wire bonding tools in microelectronic packaging. The wedge-shaped chopper comprises the following components in percentage by mass: 86-95% of WC, 2.0-4.0% of CO and Cr 3 C 2 0.5-1.0%, VC 0.5-0.8%, siC 0.3-0.7%, ni 1.5-4.0%, W0.2-0.5% and M0.5-3.5%. The preparation method comprises the following steps: selecting proper components according to design components, performing wet high-energy ball milling, drying, sorting and banburying with proper parameters, and performing injection molding to prepare a hard alloy riving knife blank; finally degreasing and sintering with proper parameters to obtain a chopper blank; and carrying out local machining to obtain the finished product of the riving knife. The invention obtains the high-performance wedge-shaped riving knife with the welding times more than 100 ten thousand times, and has high production efficiency, low cost and good consistency of products.
Description
Technical Field
The invention relates to a high-performance wedge chopper for wire bonding and a manufacturing method thereof, belonging to the technical field of development of wire bonding tools in microelectronic packaging.
Background
In the field of IC packaging, wire bonding is commonly used between integrated circuit die and between an integrated circuit chip and peripheral circuitry to effect circuit connection and signal transmission. The wedge welding process has the characteristics of high welding density, small welding spot size, low radian interconnection, deep cavity welding, small parasitic effect and the like, is one of common lead bonding methods, and is widely applied to the fields of microwave and optoelectronic device packaging and the like. Wedge cleavers are important tools in wire bonding processes, and their performance directly determines the quality, efficiency and economy of bonding. The commonly used wedge cleavers are made of a high hardness, high toughness material. Such as tungsten carbide, titanium alloy, ceramic, etc., the riving knife is processed with a wire via to provide wire feed during bonding.
Common wedge riving knife materials include: cemented carbide (tungsten carbide-cobalt), titanium carbide, ceramics, and the like; at present, except for the special application field, a ceramic riving knife is generally adopted. Compared with a ceramic chopper, the hard alloy has better machining performance, so that a totally new height can be achieved in product precision, the production cost is lower, and the application is wider; however, at present, the service life of the cemented carbide cleaver is not long. The service life of the cemented carbide cleaver known in the domestic industry communication process is generally as follows: the number of welding is less than 100 ten thousand times.
With the rapid development of the IC industry, the wedge welding is increasingly widely applied, and the performance requirement on the hard alloy wedge cleaver is also increasingly high. On a high-speed automatic bonding machine, the riving knife is often required to have good welding stability and excellent service life. In the presently disclosed technology, a scheme of optimizing a structure and/or designing a coating is generally adopted to prolong the service life, such as patents CN202120246332.3, CN202120231217.9 and CN202110422334.8; none of the above techniques gives a relevant value for the increase in life of the product and the specific life of the product. In Wen Zehai et al, which discloses a research on the aging phenomena of a wire bonding wedge-shaped chopper and a chopper, the phenomenon of insufficient welding such as overlarge welding spot deformation or incomplete welding spot after 7000-9000 times of welding of a titanium carbide chopper is mentioned. The ceramic cleaver is said to have a lifetime of up to 100 tens of thousands of times when used on an automatic bonding device, but it does not disclose specific components, and it is not mentioned how to further increase the lifetime of the wedge cleaver.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a high-performance wedge-shaped riving knife with the welding life longer than 110 ten thousand times and a manufacturing method thereof for the first time.
The invention relates to a high-performance wedge-shaped riving knife which comprises the following components in percentage by mass: 86-95% of WC, 2.0-4.0% of CO and Cr 3 C 2 0.5-1.0%, VC 0.5-0.8%, siC 0.3-0.7%, ni 1.5-4.0%, W0.2-0.5%, M0.5-3.5%, M is selected from at least one of carbide of hafnium, carbide of tantalum, carbide of rhenium, oxide of yttrium, and oxide of lanthanum.
Preferably, the M is selected from HfC, Y 2 O 3 At least one of TaC.
As a preferable scheme, the high-performance wedge-shaped riving knife comprises the following components in percentage by mass: 86-94.5% of WC, 2.0-4.0% of Co and Cr 3 C 2 0.5-1.0%, VC 0.5-0.8%, siC 0.3-0.7%, ni 1.5-4.0%, W0.2-0.5%, M0.5-3.0%, M being selected from HfC, Y 2 O 3 At least two of TaC.
As a further preferable scheme, the high-performance wedge-shaped riving knife comprises the following components in percentage by mass: 94-94.5% of WC, 2.0-2.5% of Co and Cr 3 C 2 0.5-0.6%, VC 0.5-0.6%, siC 0.3-0.4%, ni 1.5-1.6%, W0.2-0.3%, M0.5-0.6%, wherein M is composed of HfC and Y 2 O 3 The composition is formed.
The high-performance wedge-shaped riving knife has the hardness of 96.0-97.5 HRA, the bending strength of more than 4450MPa, and excellent welding stability, wear resistance, strength and toughness, and the welding times of the wedge-shaped riving knife can reach more than 110 ten thousand times when the automatic bonding equipment is used.
The invention discloses a preparation method of a high-performance wedge-shaped riving knife, which comprises the following steps:
step one
According to the design composition, tungsten carbide powder, cobalt powder, chromium carbide powder, vanadium carbide powder, silicon carbide powder, nickel powder, tungsten powder and M powder are taken; the M powder is selected from carbide of hafnium, carbide of tantalum, carbide of rhenium and yttriumAt least one of an oxide of lanthanum and an oxide of lanthanum; preferably, the M powder is selected from HfC powder and Y powder 2 O 3 At least one of powder and TaC powder.
Step two
Sequentially placing the prepared tungsten carbide powder, cobalt powder, nickel powder, chromium carbide powder, vanadium carbide powder, silicon carbide powder, tungsten powder and M powder into a high-energy ball mill, adding hard alloy balls with phi of 2.0-6.0mm, preferably 2.5-4mm, further preferably 3.0mm and absolute ethyl alcohol, and performing high-energy ball milling under the protection of argon; the total weight ratio of the hard alloy balls to the powder is 5:1-15:1, the total weight ratio of the added absolute ethyl alcohol to the powder is 2:5-3:5, the rotating speed of the ball mill is 150-300 r/min, and the ball milling time is 36-48 h.
Step three
Drying the mixed wet powder subjected to high-energy ball milling under a vacuum condition for 48-56 hours, and screening the dried mixed powder under a 325-mesh screen; taking the sieved powder for standby; the temperature of the drying is 70-90 ℃.
Step four
Adding the standby powder and the forming agent into a vacuum internal mixer in proportion for banburying, wherein the adding weight of the forming agent is 3.0-5.0% of the standby weight, the banburying time is 50-60 min, the materials are crushed by a crusher after banburying to obtain a feed (the grain diameter of the feed is 3.0-5.0 mm), and the crusher is filled with protective gas; the forming agent is composed of F, paraffin and stearic acid, wherein F is at least one selected from polypropylene, polyethylene glycol and polyvinyl alcohol.
Step five
And (5) injecting the feed on an injection machine to form the hard alloy riving knife green body.
Step six
Degreasing and sintering: and degreasing and sintering the injection-molded green body by adopting a vacuum degreasing and sintering integrated furnace.
The degreasing treatment is hydrogen positive pressure degreasing, the pressure in the furnace is controlled to be 1.0-2.0 kPa, and the hydrogen flow is controlled to be 0.5-1.0 m 3 Degreasing comprises four stages: in the first stage, the temperature is increased from A ℃ to B ℃ and takes 30-60 min; a second stage of heating from B DEG CThe temperature reaches C, the time is 40to 90 minutes, and the temperature is kept at C for 60 to 90 minutes; in the third stage, the temperature is raised from C to D, which takes 60 to 90 minutes, and the temperature is kept at D for 90 to 120 minutes; and in the fourth stage, the temperature is increased from D ℃ to E ℃ and the time is 120-150 min.
Hydrogen discharge stage: at the temperature E ℃, introducing nitrogen to clean the hydrogen in the furnace, wherein the flow rate of the nitrogen is 1000-1500L/h, and the duration time is 40-60 min; sintering after hydrogen removal to obtain the wedge-shaped chopper.
The value of A is less than or equal to 30; the value of the B is 220-240; the value of C is 340-360, and the value of D is 440-460; the value of E is 640-660.
The sintering is as follows: the first stage, vacuuming the furnace to a pressure lower than 40Pa, heating from E ℃ to 1190-1210 ℃ at a heating rate of 5.0-8.0 ℃/min; and in the second stage, the temperature is raised from 1190-1210 ℃ to 1290-1310 ℃ at the rate of 4.0-6.0 ℃/min, and the temperature is kept for 60-90 min. High temperature nitrogen partial pressure sintering also includes two stages: firstly, after finishing heat preservation at 1290-1310 ℃, immediately introducing nitrogen until the pressure in the furnace is 1000-2000 Pa, and simultaneously raising the temperature from 1290-1310 ℃ to 1420-1500 ℃ at a speed of 4.0-6.0 ℃/min, and preserving heat for 60-90 min; and in the second stage, the temperature is reduced to 990-1010 ℃ and takes 120-150 min, and finally nitrogen is introduced for rapid cooling.
In industrial application, the wedge-shaped chopper after hydrogen discharge can be processed to obtain a final product.
Preferably, the high-performance wedge-shaped riving knife is prepared from tungsten carbide powder with an average granularity of 0.05-2.0 mu M, cobalt powder, chromium carbide powder, vanadium carbide powder and silicon carbide powder with an average granularity of 0.02-1.0 mu M, nickel powder with high-purity carbonyl nickel powder with an average granularity of 2.0-3.0 mu M, tungsten powder with an average granularity of 0.5-2.0 mu M and M powder with an average granularity of 0.3-0.8 mu M.
In the invention, long-time high-energy ball milling is adopted, so that not only can products with finer particle sizes be obtained, but also the activation of powder can be promoted; thereby providing a necessary condition for obtaining a product with a long service life.
Preferably, the invention relates to a preparation method of a high-performance wedge-shaped chopper, wherein a forming agent comprises the following components by weight: paraffin wax: stearic acid = 32% -48%:50% -60%:2% -8%.
Preferably, the invention relates to a preparation method of a high-performance wedge-shaped chopper.
In industrial applications, the molds used for injection molding include deep cavity welded wedge molds, wedge molds for ribbon bonding, and other complex shaped riving knife molds. Of course, other molds may be used in the present invention.
Preferably, the degreasing treatment is hydrogen positive pressure degreasing, the pressure in the furnace is controlled to be 1.0-2.0 kPa, and the hydrogen flow is controlled to be 0.5-1.0 m 3 Degreasing comprises four stages: in the first stage, the temperature is increased from 30 ℃ to 230 ℃ and takes 30 to 60 minutes; the second stage, heating from 230 ℃ to 350 ℃ for 40-90 min, and preserving heat for 60-90 min at 350 ℃; in the third stage, the temperature is raised from 350 ℃ to 450 ℃ and takes 60 to 90 minutes, and the temperature is kept for 90 to 120 minutes at 450 ℃; and in the fourth stage, the temperature is increased from 450 ℃ to 650 ℃ and the time is 120-150 min.
Hydrogen discharge stage: at 650 ℃, introducing nitrogen to remove the hydrogen in the furnace, wherein the flow rate of the nitrogen is 1000-1500L/h, and the duration time is 40-60 min.
As a preference; the sintering process is low-temperature vacuum sintering and high-temperature nitrogen partial pressure sintering, and the low-temperature vacuum sintering mainly comprises two stages: the first stage, firstly, vacuumizing the furnace until the pressure is lower than 40Pa, and heating from 650 ℃ to 1200 ℃ at a heating rate of 8 ℃/min; and in the second stage, the temperature is increased from 1200 ℃ to 1300 ℃, the heating rate is 6 ℃/min, and the temperature is kept for 90min. High temperature nitrogen partial pressure sintering also includes two stages: in the first stage, after the heat preservation at 1300 ℃ is finished, nitrogen is immediately introduced until the pressure in the furnace is 1000-1500 Pa, and the temperature is increased from 1300 ℃ to 1480 ℃, the heating rate is 6 ℃/min, and the heat preservation is carried out for 90min; and in the second stage, the temperature is reduced to 1000 ℃ and takes 150 minutes, and finally nitrogen is introduced for rapid cooling.
The invention adopts a vacuum degreasing sintering integrated furnace, and the degreasing section adopts hydrogen positive pressure degreasing and sintering, which is divided into low-temperature vacuum sintering and high-temperature nitrogen partial pressure sintering, thereby greatly improving the production efficiency and the excellent performance of the hard alloy.
Advantages and advantages
The hardness of the wedge-shaped riving knife obtained by the invention is 96.0-97.5 HRA, the bending strength is more than 4450MPa, the welding stability, the wear resistance, the strength and the toughness are excellent, the welding times of the wedge-shaped riving knife reach 110 ten-thousand times or more when the automatic bonding equipment is used, and after the optimization, the hardness of the wedge-shaped riving knife is 96.0-97.5 HRA, the bending strength is more than 4500MPa, and the welding times are more than 120 ten-thousand times.
Drawings
FIG. 1 is a photograph of an injection blank in example 1;
FIG. 2 is a photograph of a finished wedge of example 1.
Detailed Description
Process conditions for thermosonic wedge bonding in examples and comparative examples: the bonding wire is gold wire, the bonding pad material is gold, the ultrasonic power is 1.2W, the ultrasonic frequency is 63kHz, the welding time is 150ms, the bonding pressure is 0.4N, and the preheating temperature is 200 ℃.
Example 1
Step one, the present embodiment provides a high performance wedge and a method for manufacturing the same, wherein the components and the original powder parameters of the high performance wedge are shown in table 1.
TABLE 1
Sequentially placing tungsten carbide powder, cobalt powder, nickel carbonyl powder, chromium carbide powder, vanadium carbide powder, silicon carbide powder, tungsten powder and hafnium carbide powder into a high-energy ball mill, and adding
And (3) carrying out high-energy ball milling on the hard alloy balls and absolute ethyl alcohol under the protection of argon. The total weight ratio of the hard alloy balls to the powder is 10:1, the total weight ratio of the added absolute ethyl alcohol to the powder is 4:5, the rotating speed of the ball mill is 250r/min, and the ball milling time is 42h.
And thirdly, drying the mixed wet powder subjected to high-energy ball milling by using water vapor under a vacuum condition for 52 hours, and sieving the dried mixed powder under a 325-mesh sieve.
And step four, adding the mixed powder and a forming agent into a vacuum internal mixer in proportion for banburying, wherein the added weight of the forming agent is 4.0% of the weight of the mixed powder, and the forming agent is polypropylene, polyethylene, paraffin and stearic acid (the weight ratio of the polypropylene, the polyethylene, the paraffin and the stearic acid is 25% to 15% to 55% to 5%). The banburying time is 55min, the materials are crushed by a crusher after banburying to obtain a feed (the grain diameter of the feed is 3.0-5.0 mm), and the crusher is filled with argon for protection.
And fifthly, injecting the feed on an injection machine to form a hard alloy deep cavity welding wedge-shaped riving knife blank. The injection conditions were: rapid-fire 28-32 cm 3 And/s, the injection pressure is 85-95 MPa, the holding pressure is 50-60 MPa, the holding time is 0.5-1.0 s, the cooling time is 2.0-2.5 s, and the mold locking force is 35-40 tons.
And step six, degreasing and sintering the injection-molded blank by adopting a vacuum degreasing and sintering integrated furnace.
The degreasing treatment is hydrogen positive pressure degreasing, the pressure in the furnace is controlled to be 1.5-2.0 kPa, and the hydrogen flow is 0.8m 3 Degreasing comprises four stages: in the first stage, the temperature is increased from 30 ℃ to 230 ℃ and takes 50 minutes; the second stage, heating from 230 ℃ to 350 ℃ for 70min, and preserving heat at 350 ℃ for 80min; in the third stage, the temperature is increased from 350 ℃ to 450 ℃ and takes 70min, and the temperature is kept at 450 ℃ for 110min; in the fourth stage, the temperature is increased from 450 ℃ to 650 ℃ and the time is 130min.
Hydrogen discharge stage: at the temperature of 650 ℃, introducing nitrogen to remove the hydrogen in the furnace, wherein the flow rate of the nitrogen is 1200L/h, and the duration is 50min.
The sintering process is low-temperature vacuum sintering and high-temperature nitrogen partial pressure sintering, and the low-temperature vacuum sintering mainly comprises two stages: the first stage, firstly, vacuumizing the furnace until the pressure is lower than 40Pa, and heating from 650 ℃ to 1200 ℃ at a heating rate of 7 ℃/min; and in the second stage, the temperature is increased from 1200 ℃ to 1300 ℃, the heating rate is 5 ℃/min, and the temperature is kept for 70min. High temperature nitrogen partial pressure sintering also includes two stages: firstly, after the heat preservation at 1300 ℃ is finished, introducing nitrogen until the pressure in the furnace is 1500-2000 Pa, and simultaneously raising the temperature from 1300 ℃ to 1440 ℃, wherein the temperature raising rate is 5 ℃/min, and preserving the heat for 70min; and in the second stage, the temperature is reduced to 1000 ℃ and takes 140 minutes, and finally nitrogen is introduced to cool rapidly.
And step seven, performing simple machining on the sintered product to obtain the wedge-shaped riving knife meeting the size requirement. The properties of the obtained product are shown in Table 6.
Example 2
Step one, the composition and original powder parameters of the high performance wedge of this example are shown in Table 2.
TABLE 2
And step two, the total weight ratio of the hard alloy balls to the powder is 15:1, the total weight ratio of the added absolute ethyl alcohol to the powder is 3:5, the rotating speed of the ball mill is 300r/min, and the ball milling time is 36h.
And thirdly, drying the mixed wet powder subjected to high-energy ball milling by using water vapor under a vacuum condition for 56 hours, and sieving the dried mixed powder under a 325-mesh sieve.
And step four, adding the mixed powder and a forming agent into a vacuum internal mixer in proportion for banburying, wherein the added weight of the forming agent is 5.0% of the weight of the mixed powder, and the forming agent is polypropylene, paraffin and stearic acid (the weight ratio of the polypropylene, the paraffin and the stearic acid is 32% to 60% to 8%). The banburying time is 60min, the materials are crushed by a crusher after banburying to obtain a feed (the grain diameter of the feed is 3.0-5.0 mm), and the crusher is filled with argon for protection.
And fifthly, injecting the feed on an injection machine to form a wedge-shaped riving knife blank for bonding the hard alloy strip. The injection conditions were: rapid-fire 28-32 cm 3 And/s, the injection pressure is 85-95 MPa, the holding pressure is 50-60 MPa, the holding time is 0.5-1.0 s, the cooling time is 2.0-2.5 s, and the mold locking force is 35-40 tons.
And step six, degreasing and sintering the injection-molded blank by adopting a vacuum degreasing and sintering integrated furnace.
The degreasing treatment is hydrogen positive pressure degreasing, the pressure in the furnace is controlled to be 1.0-1.5 kPa, and the hydrogen flow is 1.0m 3 Degreasing comprises four stages: in the first stage, the temperature is raised from 30 ℃ to 230 ℃ for 60min; in the second stage, the temperature is increased from 230 ℃ to 350 ℃ for 90min, and the temperature is kept for 90min; in the third stage, the temperature is increased from 350 ℃ to 450 ℃ for 90min, and the temperature is kept for 120min; in the fourth stage, the temperature is raised from 450 ℃ to 650 ℃ for 150min.
Hydrogen discharge stage: at the temperature of 650 ℃, introducing nitrogen to remove the hydrogen in the furnace, wherein the flow rate of the nitrogen is 1500L/h, and the duration is 40min.
The sintering process is low-temperature vacuum sintering and high-temperature nitrogen partial pressure sintering, and the low-temperature vacuum sintering mainly comprises two stages: the first stage, firstly, vacuumizing the furnace until the pressure is lower than 40Pa, and heating from 650 ℃ to 1200 ℃ at a heating rate of 8 ℃/min; and in the second stage, the temperature is increased from 1200 ℃ to 1300 ℃, the heating rate is 6 ℃/min, and the temperature is kept for 90min. High temperature nitrogen partial pressure sintering also includes two stages: in the first stage, after the heat preservation at 1300 ℃ is finished, nitrogen is immediately introduced until the pressure in the furnace is 1000-1500 Pa, and the temperature is increased from 1300 ℃ to 1480 ℃, the heating rate is 6 ℃/min, and the heat preservation is carried out for 90min; and in the second stage, the temperature is reduced to 1000 ℃ and takes 150 minutes, and finally nitrogen is introduced for rapid cooling.
And step seven, performing simple machining on the sintered product to obtain the wedge-shaped riving knife meeting the size requirement.
Example 3
Step one, the composition and original powder parameters of the high performance wedge of this example are shown in Table 3.
TABLE 3 Table 3
And step two, the total weight ratio of the hard alloy balls to the powder is 5:1, the total weight ratio of the added absolute ethyl alcohol to the powder is 2:5, the rotating speed of the ball mill is 150r/min, and the ball milling time is 48h.
And thirdly, drying the mixed wet powder subjected to high-energy ball milling by using water vapor under a vacuum condition for 48 hours, and sieving the dried mixed powder under a 325-mesh sieve.
And step four, adding the mixed powder and a forming agent into a vacuum internal mixer in proportion for banburying, wherein the added weight of the forming agent is 3.0% of the weight of the mixed powder, and the forming agent is polyethylene, polyethylene glycol, polyvinyl alcohol, paraffin and stearic acid (the weight ratio of the polyethylene, the polyethylene glycol, the polyvinyl alcohol, the paraffin and the stearic acid is 21% to 15% to 10% to 52% to 2%). The banburying time is 50min, the materials are crushed by a crusher after banburying to obtain a feed (the grain diameter of the feed is 3.0-5.0 mm), and the crusher is filled with argon for protection.
And fifthly, injecting the feed on an injection machine to form a hard alloy wire bonding wedge-shaped riving knife blank.
And step six, degreasing and sintering the injection-molded green body by adopting a vacuum degreasing and sintering integrated furnace.
The degreasing treatment is hydrogen positive pressure degreasing, the pressure in the furnace is controlled to be 1.2-1.7 kPa, and the hydrogen flow is 0.5m 3 Degreasing comprises four stages: in the first stage, the temperature is increased from 30 ℃ to 230 ℃ for 30 min; in the second stage, the temperature is raised from 230 ℃ to 350 ℃ for 40min, and the temperature is kept for 60min; in the third stage, the temperature is raised from 350 ℃ to 450 ℃ for 60min, and the temperature is kept for 90min; in the fourth stage, the temperature is increased from 450 ℃ to 650 ℃ for 120 min.
Hydrogen discharge stage: at the temperature of 650 ℃, introducing nitrogen to remove the hydrogen in the furnace, wherein the flow rate of the nitrogen is 1000L/h, and the duration is 60min.
The sintering process is low-temperature vacuum sintering and high-temperature nitrogen partial pressure sintering, and the low-temperature vacuum sintering mainly comprises two stages: the first stage, firstly, vacuumizing the furnace until the pressure is lower than 40Pa, and heating from 650 ℃ to 1200 ℃ at a heating rate of 5 ℃/min; and in the second stage, the temperature is increased from 1200 ℃ to 1300 ℃, the heating rate is 4 ℃/min, and the temperature is kept for 60min. High temperature nitrogen partial pressure sintering also includes two stages: firstly, after the heat preservation at 1300 ℃ is finished, immediately introducing nitrogen until the pressure in the furnace is 1200-1800 Pa, and simultaneously raising the temperature from 1300 ℃ to 1420 ℃, wherein the temperature raising rate is 4 ℃/min, and preserving the heat for 60min; and in the second stage, the temperature is reduced to 1000 ℃ and takes 120min, and finally nitrogen is introduced for rapid cooling.
And step seven, performing simple machining on the sintered product to obtain the wedge-shaped riving knife meeting the size requirement.
Comparative example 1
Step one, selecting a conventional hard alloy brand YG6 as a material, wherein specific powder parameters are shown in Table 4.
TABLE 4 Table 4
| Composition of the components | WC | Co |
| Proportion (wt.) | 94.0 | 6.0 |
| Raw powder | WC powder | Co powder |
| Average particle size D50 (μm) | 1.3 | 0.8 |
Step two, wet mixing: sequentially placing tungsten carbide powder and cobalt powder into a common wet mixer, and adding
And carrying out wet mixing on the hard alloy balls and absolute ethyl alcohol under the protection of argon. The total weight ratio of the hard alloy balls to the powder is 10:1, the total weight ratio of the added absolute ethyl alcohol to the powder is 4:5, and the rotating speed of the wet mixer is 50r/miAnd n, the wet mixing time is 42h.
The slurry drying, banburying, injection molding, degreasing and sintering processes are the same as those of the steps three to six in the embodiment 1, and the YG6 hard alloy wedge-shaped riving knife is obtained.
Comparative example 2
The alloy grade in comparative example 1 was changed to YG10, and specific powder parameters are shown in table 5.
TABLE 5
| Composition of the components | WC | Co |
| Proportion (wt.) | 90.0 | 10.0 |
| Raw powder | WC powder | Co powder |
| Average particle size D50 (μm) | 1.3 | 0.8 |
The high-energy ball milling, drying, banburying, injection molding, degreasing and sintering processes are the same as the steps two to six in the embodiment 1, and the YG10 hard alloy wedge-shaped riving knife is obtained.
Comparative example 3
The wet mixing in comparative example 1 was changed to high-energy ball milling, the raw material powder was the same as in table 4, and the high-energy ball milling, drying, banburying, injection molding, degreasing sintering processes were the same as in steps two to six in example 1, to obtain a cemented carbide wedge-shaped chopper.
Comparative example 4
Step one, the raw material powders and ingredients used in this comparative example were the same as in table 1 of example 1.
Step two, the high-energy ball milling, drying, banburying and injection molding are sequentially carried out, and the high-energy ball milling, drying, banburying and injection molding processes of the comparative example are the same as those of the step two to the step five of the embodiment 1.
And thirdly, degreasing and sintering the injection-molded blank by adopting a vacuum degreasing and sintering integrated furnace in the comparative example.
The degreasing treatment is hydrogen positive pressure degreasing, the pressure in the furnace is controlled to be 1.5-2.0 kPa, and the hydrogen flow is 0.8m 3 And/h, the temperature is increased from 30 ℃ to 650 ℃ and 150min is consumed.
Hydrogen discharge stage: at the temperature of 650 ℃, introducing nitrogen to remove the hydrogen in the furnace, wherein the flow rate of the nitrogen is 1200L/h, and the duration is 50min.
The sintering process is vacuum sintering, the temperature is raised from 650 ℃ for 160min to 1440 ℃, the temperature is kept for 70min, then the temperature is lowered to 1000 ℃ for 140min, and finally nitrogen is introduced for rapid cooling.
And step four, performing simple machining on the sintered product to obtain the wedge-shaped riving knife meeting the size requirement.
Comparative example 5
Step one, the original powder of this comparative example and the component proportions are in accordance with Table 2 in example 2.
Step two, wet mixing: sequentially placing tungsten carbide powder, cobalt powder, nickel carbonyl powder, chromium carbide powder, vanadium carbide powder, silicon carbide powder, tungsten powder, hafnium carbide powder and yttrium oxide powder into a common wet mixer, and adding
And carrying out wet mixing ball milling on the hard alloy balls and absolute ethyl alcohol under the protection of argon. The total weight ratio of the hard alloy balls to the powder is 15:1, the total weight ratio of the added absolute ethyl alcohol to the powder is 3:5, the rotating speed of the ball mill is 50r/min,the ball milling time was 42h.
Step three, drying, banburying and injection molding are sequentially carried out, and the drying, banburying and injection molding process parameters of the comparative example are the same as those in the embodiment 2.
Step four, the degreasing sintering process of the comparative example is identical to that of comparative example 4.
And fifthly, simply machining the sintered product to obtain the wedge-shaped riving knife meeting the size requirement.
TABLE 6 Properties of wedge-type riving knife prepared in examples 1-3 and comparative examples 1-5
| Hardness, HRA | Flexural Strength, MPa | Number of welding, ten thousand times | |
| Example 1 | 96.2 | 4460 | 112 |
| Example 2 | 97.4 | 4520 | 124 |
| Example 3 | 96.8. | 4485 | 117 |
| Comparative example 1 | 92.3 | 2500 | 57 |
| Comparative example 2 | 91.4 | 2750 | 50 |
| Comparative example 3 | 92.9 | 2830 | 61 |
| Comparative example 4 | 94.1 | 3260 | 78 |
| Comparative example 5 | 92.7 | 2784 | 59 |
Claims (9)
1. A high performance wedge for wire bonding, characterized by: the components of the composition in percentage by mass are as follows: 86-95% of WC, 2.0-4.0% of CO and Cr 3 C 2 0.5-1.0%, VC 0.5-0.8%, siC 0.3-0.7%, ni 1.5-4.0%, W0.2-0.5%, M0.5-3.5%, M is selected from at least one of carbide of hafnium, carbide of tantalum, carbide of rhenium, oxide of yttrium, and oxide of lanthanum;
the wedge-shaped riving knife is prepared by the following steps:
step one
According to the design composition, tungsten carbide powder, cobalt powder, chromium carbide powder, vanadium carbide powder, silicon carbide powder, nickel powder, tungsten powder and M powder are taken; the M powder is at least one selected from carbide of hafnium, carbide of tantalum, carbide of rhenium, oxide of yttrium and oxide of lanthanum;
step two
Sequentially placing the prepared tungsten carbide powder, cobalt powder, nickel powder, chromium carbide powder, vanadium carbide powder, silicon carbide powder, tungsten powder and M powder into a high-energy ball mill, adding hard alloy balls with the diameter of 2.0-6.0mm and absolute ethyl alcohol, and performing high-energy ball milling under the protection of argon; the total weight ratio of the hard alloy balls to the powder is 5:1-15:1, the total weight ratio of the added absolute ethyl alcohol to the powder is 2:5-3:5, the rotating speed of the ball mill is 150-300 r/min, and the ball milling time is 36-48 h;
step three
Drying the mixed wet powder subjected to high-energy ball milling under a vacuum condition for 48-56 hours, and screening the dried mixed powder under a 325-mesh screen; taking the sieved powder for standby; the temperature of the drying is 70-90 ℃;
step four
Adding the standby powder and the forming agent into a vacuum internal mixer in proportion for banburying, wherein the adding weight of the forming agent is 3.0% -5.0% of the standby weight, the banburying time is 50-60 min, crushing the materials by a crusher after banburying to obtain a feed, and introducing protective gas into the crusher; the forming agent consists of F, paraffin and stearic acid, wherein F is at least one selected from polypropylene, polyethylene glycol and polyvinyl alcohol; the grain size of the feed is 3.0-5.0 mm;
step five
Injecting the feed on an injector to form a hard alloy chopper green body;
step six
Degreasing and sintering: degreasing and sintering the injection-molded green body by adopting a vacuum degreasing and sintering integrated furnace;
the degreasing treatment is hydrogen positive pressure degreasing, the pressure in the furnace is controlled to be 1.0-2.0 kPa, and the hydrogen flow is controlled to be 0.5-1.0 m 3 Degreasing comprises four stages: first stageHeating from A ℃ to B ℃ for 30-60 min; the second stage, heating from the temperature of B to the temperature of C, taking 40-90 min, and preserving heat at the temperature of C for 60-90 min; in the third stage, the temperature is increased from C to D, the time is 60-90 min, and the temperature is kept at D for 90-120 min; the fourth stage, heating from D ℃ to E ℃ for 120-150 min; at the temperature E ℃, introducing nitrogen to clean the hydrogen in the furnace, wherein the flow rate of the nitrogen is 1000-1500L/h, and the duration time is 40-60 min; sintering after hydrogen removal to obtain a wedge-shaped chopper;
the value of A is less than or equal to 30; the value of the B is 220-240; the value of C is 340-360, and the value of D is 440-460; the value of E is 640-660;
the sintering is as follows: the first stage, vacuumizing the furnace to a pressure lower than 40Pa, and heating from E ℃ to 1190-1210 ℃ at a heating rate of 5.0-8.0 ℃/min; a second stage, namely heating from 1190-1210 ℃ to 1290-1310 ℃, heating at a speed of 4.0-6.0 ℃/min, and preserving heat for 60-90 min; high temperature nitrogen partial pressure sintering also includes two stages: firstly, after finishing heat preservation at 1290-1310 ℃, immediately introducing nitrogen until the pressure in the furnace is 1000-2000 Pa, and simultaneously raising the temperature from 1290-1310 ℃ to 1420-1500 ℃ at a speed of 4.0-6.0 ℃/min, and preserving heat for 60-90 min; and in the second stage, the temperature is reduced to 990-1010 ℃ and takes 120-150 min, and finally nitrogen is introduced for cooling.
2. A high performance wedge for wire bonding as claimed in claim 1, wherein: the components of the composition in percentage by mass are as follows: 86-94.5% of WC, 2.0-4.0% of Co and Cr 3 C 2 0.5-1.0%, VC 0.5-0.8%, siC 0.3-0.7%, ni 1.5-4.0%, W0.2-0.5%, M0.5-3.0%, M being selected from HfC, Y 2 O 3 At least two of TaC.
3. A high performance wedge for wire bonding as claimed in claim 2, wherein: the components of the composition in percentage by mass are as follows: 94-94.5% of WC, 2.0-2.5% of Co and Cr 3 C 2 0.5-0.6%, VC 0.5-0.6%, siC 0.3-0.4%, ni 1.5-1.6%, W0.2-0.3%, M0.5-0.6%, wherein M is composed of HfC and HfCY 2 O 3 The composition is formed.
4. A high performance wedge for wire bonding as claimed in claim 3, wherein: the hardness of the chopper is 96.0-97.5 HRA, and the bending strength is more than 4450MPa; the number of times of welding the wedge-shaped chopper reaches more than 110 ten thousand times when the automatic bonding equipment is used.
5. A high performance wedge for wire bonding as claimed in claim 1, wherein:
the M powder is selected from HfC powder and Y powder 2 O 3 At least one of powder and TaC powder;
in the second step, the diameter of the hard alloy ball is 2.5-4mm.
6. A high performance wedge for wire bonding as claimed in claim 1, wherein: the average particle size of the tungsten carbide powder is 0.05-2.0 mu M, the average particle size of the cobalt powder, the chromium carbide powder, the vanadium carbide powder and the silicon carbide powder is 0.02-1.0 mu M, the nickel powder adopts high-purity nickel carbonyl powder, the average particle size is 2.0-3.0 mu M, the average particle size of the tungsten powder is 0.5-2.0 mu M, and the average particle size of the M powder is 0.3-0.8 mu M.
7. A high performance wedge for wire bonding as claimed in claim 1, wherein: the forming agent consists of F, paraffin and stearic acid, wherein the weight ratio of the F: paraffin wax: stearic acid = 32% -48%:50% -60%:2% -8%, wherein F is at least one selected from polypropylene, polyethylene glycol and polyvinyl alcohol.
8. A high performance wedge for wire bonding as claimed in claim 1, wherein: the degreasing treatment is hydrogen positive pressure degreasing, the pressure in the furnace is controlled to be 1.0-2.0 kPa, and the hydrogen flow is controlled to be 0.5-1.0 m 3 Degreasing comprises four stages: in the first stage, the temperature is increased from 30 ℃ to 230 ℃ and takes 30-60 min; in the second stage, the temperature is increased from 230 ℃ to 350 ℃ and takes 40-90 min, and meanwhile, the temperature is kept at 350 ℃ for 60-90 min; in the third stage, the temperature is raised from 350 DEG CThe temperature is 450 ℃, the time is 60-90 min, and the temperature is kept for 90-120 min at the temperature of 450 ℃; the fourth stage, heating from 450 ℃ to 650 ℃ for 120-150 min;
hydrogen discharge stage: and (3) introducing nitrogen to clean the hydrogen in the furnace at the temperature of 650 ℃, wherein the flow rate of the nitrogen is 1000-1500L/h, and the duration is 40-60 min.
9. A high performance wedge for wire bonding as claimed in claim 1, wherein: the sintering process is low-temperature vacuum sintering and high-temperature nitrogen partial pressure sintering, and the low-temperature vacuum sintering mainly comprises two stages: the first stage, firstly, vacuumizing the furnace until the pressure is lower than 40Pa, and heating from 650 ℃ to 1200 ℃ at a heating rate of 8 ℃/min; a second stage, namely heating from 1200 ℃ to 1300 ℃, heating at a speed of 6 ℃/min, and preserving heat for 90min; high temperature nitrogen partial pressure sintering also includes two stages: firstly, after the heat preservation at 1300 ℃ is finished, immediately introducing nitrogen until the pressure in the furnace is 1000-1500 Pa, and simultaneously raising the temperature from 1300 ℃ to 1480 ℃, wherein the temperature raising rate is 6 ℃/min, and preserving the heat for 90min; in the second stage, the temperature is then reduced to 1000 ℃ for 150min, and finally nitrogen is introduced for cooling.
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| CN116573939A (en) * | 2023-07-07 | 2023-08-11 | 有研工程技术研究院有限公司 | Tungsten carbide material for high-performance wedge welding chopper and production method thereof |
| CN116573938A (en) * | 2023-07-07 | 2023-08-11 | 有研工程技术研究院有限公司 | Tungsten carbide material for wedge welding chopper and production method thereof |
| CN116553932A (en) * | 2023-07-07 | 2023-08-08 | 有研工程技术研究院有限公司 | Tungsten carbide material for high-reliability wedge welding chopper and production method thereof |
| CN117206988B (en) * | 2023-11-06 | 2024-02-27 | 苏州芯合半导体材料有限公司 | Chopper and surface roughening method thereof |
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