CN115260019A - Hyperbranched perfluoroketone and application thereof in heat conduction work - Google Patents

Hyperbranched perfluoroketone and application thereof in heat conduction work Download PDF

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CN115260019A
CN115260019A CN202210932281.9A CN202210932281A CN115260019A CN 115260019 A CN115260019 A CN 115260019A CN 202210932281 A CN202210932281 A CN 202210932281A CN 115260019 A CN115260019 A CN 115260019A
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perfluoroketone
hyperbranched
heat
cooling liquid
highly branched
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CN115260019B (en
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吴成英
谢伟东
林登高
邹灿
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Sanming Hexafluo Chemicals Co Ltd
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Sanming Hexafluo Chemicals Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
    • C07C49/04—Saturated compounds containing keto groups bound to acyclic carbon atoms
    • C07C49/175—Saturated compounds containing keto groups bound to acyclic carbon atoms containing ether groups, groups, groups, or groups
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
    • C07C49/04—Saturated compounds containing keto groups bound to acyclic carbon atoms
    • C07C49/16—Saturated compounds containing keto groups bound to acyclic carbon atoms containing halogen
    • C07C49/167—Saturated compounds containing keto groups bound to acyclic carbon atoms containing halogen containing only fluorine as halogen
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08—Materials not undergoing a change of physical state when used
    • C09K5/10—Liquid materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03D—WIND MOTORS
    • F03D80/00—Details, components or accessories not provided for in groups F03D1/00 - F03D17/00
    • F03D80/60—Cooling or heating of wind motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03D—WIND MOTORS
    • F03D9/00—Adaptations of wind motors for special use; Combinations of wind motors with apparatus driven thereby; Wind motors specially adapted for installation in particular locations
    • F03D9/20—Wind motors characterised by the driven apparatus
    • F03D9/25—Wind motors characterised by the driven apparatus the apparatus being an electrical generator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3737—Organic materials with or without a thermoconductive filler
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/20709—Modifications to facilitate cooling, ventilating, or heating for server racks or cabinets; for data centers, e.g. 19-inch computer racks
    • H05K7/20763—Liquid cooling without phase change
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00—Road transport of goods or passengers
    • Y02T10/60—Other road transportation technologies with climate change mitigation effect
    • Y02T10/70—Energy storage systems for electromobility, e.g. batteries

Abstract

The invention discloses a highly branched perfluoroketone and a heat conduction use method thereof. In the hyperbranched perfluoroketone compound, two sides of a carbonyl group are connected with-CF-groups, and the-CF-groups are simultaneously connected with 2 perfluoroalkyl groups or perfluoroalkoxy groups, as shown in a formula 1. The highly branched perfluoroketone compound of the invention has high dielectric strength, low dielectric constant and good hydrolysis resistance, and the same asThe novel heat-conducting electric energy storage battery has low global warming potential and is suitable for heat conduction in the fields of electronic power devices, data centers, IGBTs (insulated gate bipolar transistors), ultra-fast charging piles and the like.

Description

Hyperbranched perfluoroketone and application thereof in heat conduction work
Technical Field
The invention relates to the technical field of liquid cooling media, in particular to hyperbranched perfluoroketone and application thereof in heat conduction.
Background
With the rapid development of aerospace technology, 5G communication, semiconductors and high-power density equipment, electronic equipment becomes smaller and more powerful, but the problems of high energy consumption, inaccurate temperature control and the like are increasingly prominent, and the cooling problem becomes a main factor restricting the development of the electronic equipment.
Liquid cooling is a good choice for power electronics with high power density. The liquid cooling system utilizes the circulating pump to ensure that the cooling liquid circulates between the heat source and the cold source to exchange heat, and the heat dissipation efficiency of the water-cooling plate radiator is extremely high.
Fluorocarbon has high insulation and electromagnetic shielding effect, so the fluorocarbon is widely applied to high-voltage high-power electronic devices. Common heat transfer fluids are fluorocarbons such as perfluorocarbons, perfluoroalkylamines, perfluoropolyether compounds that have excellent dielectric properties, however such perfluorocarbons have a high Global Warming Potential (GWP), have a large impact on climate, and are not suitable for large-scale use. The fluoroketone compound-containing heat transfer fluid has the same electrical compatibility and safety as those of the above fluorocarbon compound, has good environmental protection characteristics, has a Global Warming Potential (GWP) of 1, and is very advantageous for reducing the greenhouse effect.
Common perfluoroketones such as perfluoropentanone and perfluorohexanone have high insulation, non-combustion, non-explosive, green safety and other properties, but have strong hydrolyzability and instability, and the hydrolysis product is pentafluoropropionic acid which has strong corrosivity and can bring certain destructiveness to a system, so that the application is limited to a certain extent. The hyperbranched perfluoroketone provided by the invention can effectively reduce the hydrolysis performance of the hyperbranched perfluoroketone, and meets the use requirement of the heat transfer fluid in the work of the immersed heat transfer field.
Chinese patent CN112360706B discloses an immersed liquid phase change cooling medium, wherein the cooling component contains perfluorohexanone, and the cooling component has the characteristics of high electrical insulation property, low viscosity, lower boiling point, high latent heat of vaporization, good compatibility and stability, non-flammability, capability of inhibiting combustion, low global warming potential, zero ozone depletion potential, and the like. However, the perfluorohexanone and hexafluoropropylene dimers used in this patent are poorly stable to hydrolysis, and can release hydrogen fluoride, and pentafluoropropionic acid, for example, which can cause corrosion of critical precision parts.
Chinese patent CN101809114B discloses dispersion compositions comprising a fluorinated ether fluid, a perfluoropolyether dispersing agent, and fine particles. These dispersion compositions have improved thermal conductivity characteristics which can translate into improved energy efficiency performance in a variety of applications that rely on thermal conductivity. However, the perfluoropolyether compounds used in the patent have high Global Warming Potential (GWP) and are not favorable for climate protection.
Chinese patent CN101346335B discloses a fluorochemical ketone compound consisting of two independent terminal branched fluoroalkyl carbonyl or perfluoroalkyl carbonyl groups and an intervening linear perfluoropolyether segment, which shows a lower low-temperature viscosity in the product performance, but the hydrolytic stability is still poor, which will cause corrosion of part of the device, and is not suitable for some equipments requiring long-term reliability of fluorine fluid.
Disclosure of Invention
The fluorine-containing compounds currently used for heat transfer are generally of several types, such as freon, perfluoroalkylamines, perfluoroalkanes, hydrofluoroethers. Among them, freon contains chlorine and bromine, and damages the ozone layer, and its use has been prohibited. The perfluoroalkane and perfluoroalkylamine compounds have high dielectric strength and low dielectric constant (Dk) < 2.0, but have high GWP which is more than 10000, and can cause great global warming effect, thus being not beneficial to climate protection. Hydrofluoroethers (HFEs) are non-toxic, non-flammable, but generally have dielectric constants (Dk) greater than 5, which can cause signal integrity problems in high frequency applications such as data centers, and have low dielectric strength, which is not suitable for contacting electronic devices.
The invention aims to provide a highly branched perfluoroketone heat transfer fluid which can ensure low dielectric constant and high dielectric strength, simultaneously meet the requirements of hydrolysis resistance stability and low Global Warming Potential (GWP), and can show safe, green and environment-friendly comprehensive performance in a heat transfer working medium. The invention provides a highly branched perfluoroketone thermal conductive liquid, both sides of carbonyl of a compound are highly branched, and the structural formula is as shown in formula I:
Figure BDA0003781962150000031
in the formula I, R 1 Represents CF 3 、CF 3 O、CF 3 CF 2 、CF 3 CF 2 O、CF 3 CF 2 CF 2 、(CF 3 ) 2 Any one of the CFOs.
The highly branched perfluoroketone is at least one of perfluoro (2, 4-dimethyl-3-pentanone), perfluoro (2-methoxy-4-methyl-3-pentanone), perfluoro (2, 4-dimethyl-3-hexanone), perfluoro (2-ethoxy-4-methyl-3-pentanone), perfluoro (2, 4-dimethyl-3-heptanone) and perfluoro (2-isopropoxy-4-methyl-3-pentanone).
In some embodiments, a thermal conduction use method is provided. The method comprises providing a device and conducting heat to or from the device using a cooling fluid comprising a hyperbranched perfluoroketone compound as described above.
The heat conduction using method includes transferring heat between a heat source device and a heat sink by using a heat conducting liquid containing at least one of the above-described highly-branched perfluoroketone compounds.
The heat sink is for transferring heat to the heat source device, the heat sink comprising a thermally conductive fluid having a highly branched perfluoroketone of structural formula (I) above.
The heat source device is selected from a microprocessor, a semiconductor wafer, a power semiconductor, a lithium ion battery, a power transformer, a fuel cell and a laser.
In addition, the hyperbranched perfluoroketones of the present invention can be used in a number of different applications, including
The heat-conducting material can be used for heat conduction of heat-dissipating devices, and the devices are selected from microprocessors, power lithium ion batteries, distribution switch gears, power transformers, circuit boards, integrated circuit modules, lasers, inverters, semiconductor special temperature control devices (Chillers) and data center immersion cooling.
The method is characterized in that a server is soaked in insulating cooling liquid containing the hyperbranched perfluoroketone, so that the operation of electronic components at a specified temperature can be ensured, and the hyperbranched perfluoroketone cooling liquid is connected with an external cold source through a pump body to realize heat exchange.
The method for cooling the charging cable of the super charging pile by using the hyperbranched perfluoroketone comprises the steps of arranging a special circulating jacket layer between the cable and a charging gun, adding cooling liquid containing the hyperbranched perfluoroketone with a heat dissipation effect into the jacket layer, and pushing the hyperbranched perfluoroketone cooling liquid to circulate by using a liquid pump so as to take heat out.
The method for cooling the IGBT (Insulated Gate Bipolar Transistor) by using the highly branched perfluoroketone comprises the steps of directly or indirectly contacting a highly branched perfluoroketone cooling liquid with an IGBT module, reducing contact thermal resistance, and removing the surface of the IGBT by contacting the highly branched perfluoroketone cooling liquid.
The method is characterized in that cooling liquid containing the highly branched perfluoroketone is placed in a cooling liquid collecting tank inside a system, and the highly branched perfluoroketone cooling liquid is respectively conveyed into a generator radiator, a gear radiator and a variable frequency radiator by using the power of a pump, so that a heating component generates a large amount of heat when a wind driven generator works, the cooling liquid in the radiator is heated, and the generator set is cooled.
The temperature control method of the etching substrate for applying the hyperbranched perfluoroketone to semiconductor dry etching is characterized in that cooling liquid containing the hyperbranched perfluoroketone is placed in a temperature control system, and the precise temperature control is realized through a frequency converter and a PID (Packet Identifier) controller and pump circulation.
Compared with the prior art, the invention has the following beneficial effects:
(1) The hyperbranched perfluoroketone provided by the invention has the characteristics of low global warming potential (GWP is approximately equal to 1), good hydrolysis resistance, high electrical insulation performance, low viscosity, low dielectric constant, good compatibility and stability, incombustibility, capability of inhibiting combustion and the like.
(2) Compared with the existing fluorocarbon cooling medium, the highly branched perfluoroketone provided by the invention has low global warming potential (GWP ≈ 1).
The above summary of the present disclosure is not intended to describe each embodiment of the present disclosure. The details of one or more embodiments of the disclosure are also set forth in the description below. Other features, objects, and advantages of the disclosure will be apparent from the description and from the claims.
Detailed Description
Hyperbranched perfluoroketone compound
The dielectric property and the physicochemical property of the highly branched perfluoroketone provided by the invention are compared with those of the existing fluorinated liquid, and the following table 1 shows that:
TABLE 1
Figure BDA0003781962150000051
Note: the method for testing the dielectric constant, the volume resistivity, the dielectric strength and the kinematic viscosity of the hyperbranched perfluoroketone composition refers to national standard GB/T5654-2007 measurement of relative permittivity, dielectric loss factor and direct current resistivity of liquid insulating materials, industry standard DL/T421-2009 measurement of volume resistivity of oil for electric power, national standard GB/T507-2002 measurement of breakdown voltage of insulating oil, and national standard GB/T265-1988 measurement of kinematic viscosity and kinetic viscosity calculation of petroleum products.
1) As can be seen from Table 1, the hyperbranched perfluoroketone provided by the present invention has excellent dielectric properties, and the hyperbranched perfluoroketone compound generally exhibits a high volume resistivity (e.g., 10) 12 Ω · cm), which makes them extremely suitable for use in the field of semiconductor industry and the like.
2) As can be seen from Table 1, compared with the existing perfluoroalkyl amines and perfluoropolyethers in the prior art, the GWP of the highly branched perfluoroketone component of the invention is 1, the potential value of global warming effect is extremely low, and the highly branched perfluoroketone component has obvious environmental protection effect.
The present invention is further illustrated below with reference to specific test examples and examples, but the scope of the present invention is not limited thereto.
Test example 1:
the physicochemical properties of the hyperbranched perfluoroketone and the non-hyperbranched perfluoroketone provided by the invention are compared as shown in the following table 2:
TABLE 2
Figure BDA0003781962150000061
Figure BDA0003781962150000071
Test example 2:
hydrolysis stability test 1
Examples 1 to 5: respectively mixing the compounds I-V in the table 2 with water according to the mass ratio of 1:1, mixing, fully stirring at 25 ℃ for 24h and 48h, testing corresponding acidity before and after experiment, and analyzing hydrolysis of each example. The corresponding test results are shown in Table 3-1.
Comparative examples 1 to 3: comparing compounds I-III in the table 2 with water according to a mass ratio of 1:1, and after fully stirring at 25 ℃ for 24h and 48h respectively, testing the corresponding acidity before and after the experiment, and analyzing the hydrolysis condition of each example. The corresponding test results are shown in Table 3-1.
Acidity test method (in KOH): firstly, weighing 50 g of ultrapure water and 2-3 drops of bromothyme blue, and titrating the bromothyme blue to brilliant blue by using a 0.01mol/L potassium hydroxide standard solution; then, 50 g of the sample was weighed and mixed with ultrapure water from which a blank was subtracted, and after sufficiently shaking up, liquid separation was performed using a separatory funnel and an upper layer liquid was taken out, and the mixture was titrated to a bright blue color with a 0.01mol/L potassium hydroxide standard solution, and the volume consumed was recorded. The acidity (mg/g) of the sample was calculated according to the formula 1, and the results are shown in Table 3-1.
Figure BDA0003781962150000072
Wherein: a-KOH concentration/(mol/L);
b-volume of KOH consumed/(mL);
M KOH -relative molecular mass of KOH/(g/moL);
m-sample mass/(g).
TABLE 3-1
Figure BDA0003781962150000073
Figure BDA0003781962150000081
Hydrolysis stability test 2
Examples 6 to 10: respectively mixing the compounds I-V in the table 2 with water according to the mass ratio of 1:1, the hydrolysis of each example was analyzed by thoroughly stirring at 70 ℃ for 1h and 5h, respectively, and then measuring the corresponding acidity before and after the experiment. The corresponding test results are shown in Table 3-2.
Comparative examples 4 to 6: respectively mixing the comparative compounds I-III in the table 2 with water according to the mass ratio of 1:1, the hydrolysis of each example was analyzed by thoroughly stirring at 70 ℃ for 1h and 5h, respectively, and then measuring the corresponding acidity before and after the experiment. The corresponding test results are shown in Table 3-2.
TABLE 3-2
Figure BDA0003781962150000082
As can be seen from tables 3-1 and 3-2, the highly branched perfluoroketone-containing compound of the present invention exhibits good hydrolysis resistance; the comparative compounds I-III in the prior art all show obvious easy hydrolysis capability.
Test example 3:
stability test in the Presence of an oxidizing agent
To evaluate the oxidation stability, potassium permanganate (20 g, 0.126 mol) was dissolved in acetoneIn the resulting solution, highly branched perfluoroketone compounds I to V (500g, 99.9%) in Table 2 were added, respectively, and the solution was refluxed for four hours, indicating that potassium permanganate was not consumed (in the absence of brown MnO) 2 As evidence). The layers were then separated by water and dried to yield 490 grams of product. Gas chromatography analysis of the product showed that the fluorochemical was not degraded and had a purity of 99.9% excluding acetone, i.e., the hyperbranched perfluoroketone compound was stable in the presence of the oxidizing agent.
Application examples
Example 11:
data center temperature control cooling
The data center temperature control cooling test steps and results are as follows: in a data center immersion type cooling machine platform, 200kg of the highly branched perfluoroketone compound V is injected into a server integrated box to serve as cooling liquid for heat dissipation, and the cooling liquid is connected to a pump through a cooling liquid outlet and pumped into an external heat exchange system to realize heat exchange. And after the server integration box is added with the heat dissipation cooling liquid, sealing by adopting a sealing cover. Starting a power supply, operating a server, controlling the temperature of a Central Processing Unit (CPU) to be 27-38 ℃, and after 180 days, carrying out related tests on the added hyperbranched perfluoroketone compound V, wherein the purity of the gas chromatography is still 99.9%, and the acidity is not detected.
Example 12:
semiconductor temperature control cooling
The semiconductor temperature control cooling test steps and results are as follows: in the dry etching process of a semiconductor, the highly branched perfluoroketone compound II of the present invention is injected as a coolant into a temperature control device (Chiller) dedicated to the semiconductor by a pump. In a semiconductor processing platform, dry etching chemical reaction generates heat on a wafer, the heat generated by the platform is carried to a heat exchanger through circulation of cooling liquid in a special temperature control device (Chiller) of a semiconductor, and the heat is compressed and refrigerated by a refrigerant. By entering various parameters, including the pump flow rate set at 0.5-2.0 liters/minute and the outlet pressure at 200-800kPa. The cooling temperature control in the process is stable, the temperature control precision is better than +/-0.5 ℃ under the loading condition, and the working condition can be switched at any working condition of-20 ℃ to 80 ℃.
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions that can be obtained by a person skilled in the art through logical analysis, reasoning or limited experiments based on the prior art according to the concepts of the present invention should be within the scope of protection determined by the claims.

Claims (10)

1. A hyperbranched perfluoroketone, wherein-CF-group is connected to both sides of carbonyl group of the hyperbranched perfluoroketone, 2 perfluoroalkyl or perfluoroalkoxy groups are simultaneously connected to the-CF-group, and the structural formula is shown as formula I:
Figure FDA0003781962140000011
in the formula I, R 1 ，R 2 ，R 3 ，R 4 May be respectively CF 3 、CF 3 O、CF 3 CF 2 、CF 3 CF 2 O、CF 3 CF 2 CF 2 、(CF 3 ) 2 Any one of the CFOs.
2. A hyperbranched perfluoroketone as claimed in claim 1 wherein: the hyperbranched perfluoroketone comprises at least one of perfluoro (2, 4-dimethyl-3-pentanone), perfluoro (2-methoxy-4-methyl-3-pentanone), perfluoro (2, 4-dimethyl-3-hexanone), perfluoro (2-ethoxy-4-methyl-3-pentanone), perfluoro (2, 4-dimethyl-3-heptanone) and perfluoro (2-isopropoxy-4-methyl-3-pentanone).
3. A heat conduction using method of highly branched perfluoroketone is characterized in that: comprising transferring heat between a heat source device and a heat sink by using a heat transfer fluid containing at least one hyperbranched perfluoroketone compound as defined in claims 1 and 2.
4. The method of using a hyperbranched perfluoroketone for heat transfer according to claim 3, wherein: the heat sink for transferring heat to the heat source device, the heat sink comprising a thermally conductive liquid of a hyperbranched perfluoroketone having a structural formula (I) of claim 1.
5. The use of a hyperbranched perfluoroketone for heat transfer according to claim 3 or 4, wherein: the heat source device is selected from a microprocessor, a semiconductor wafer, a power semiconductor, a lithium ion battery, a power transformer, a fuel cell and a laser.
6. A method for using hyperbranched perfluoroketone for immersion cooling of a data center, the method comprising: the method comprises the steps that the server is soaked in insulating cooling liquid containing the hyperbranched perfluoroketone, the operation of the electronic components at the specified temperature can be ensured, and the hyperbranched perfluoroketone cooling liquid is connected with an external cold source through a pump body to realize heat exchange.
7. The utility model provides a high branching perfluoroketone is used for super charging pile's charging cable cooling which characterized in that: the method is characterized in that a special circulating jacket layer is arranged between a cable and a charging gun, cooling liquid containing highly branched perfluoroketone with a heat dissipation effect is added into the jacket layer, and the highly branched perfluoroketone cooling liquid can be pushed to circulate through a liquid pump so as to take heat out.
8. A hyperbranched perfluoroketone is used for cooling an IGBT, and is characterized in that: the cooling liquid containing the hyperbranched perfluoroketone is directly or indirectly contacted with the IGBT module, so that the contact thermal resistance is reduced, and the surface of the IGBT is removed through the contact of the hyperbranched perfluoroketone cooling liquid.
9. A method for using highly branched perfluoroketone for cooling a generator set is characterized by comprising the following steps: the cooling liquid containing the highly branched perfluoroketone is placed in a cooling liquid collecting tank in the system, the cooling liquid containing the highly branched perfluoroketone is respectively conveyed into a generator radiator, a gear radiator and a variable frequency radiator by utilizing the power of a pump, and when the wind driven generator works, a heating component generates a large amount of heat to heat the cooling liquid in the radiator, so that the generator set is cooled.
10. A temperature control method for an etching substrate of semiconductor dry etching by using highly branched perfluoroketone is characterized by comprising the following steps: the highly branched perfluoroketone cooling liquid is placed in a temperature control system, and is circulated by a pump through a frequency converter and a PID controller to realize accurate temperature control.
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