CN115241105A - Integrated circuit production and processing equipment for computer - Google Patents
Integrated circuit production and processing equipment for computer Download PDFInfo
- Publication number
- CN115241105A CN115241105A CN202210861913.7A CN202210861913A CN115241105A CN 115241105 A CN115241105 A CN 115241105A CN 202210861913 A CN202210861913 A CN 202210861913A CN 115241105 A CN115241105 A CN 115241105A
- Authority
- CN
- China
- Prior art keywords
- loading
- seat
- integrated circuit
- starting switch
- circuit production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses integrated circuit production and processing equipment for a computer, which comprises a carrying seat, wherein an inflating seat is fixedly arranged on the carrying seat and is connected to an inert gas storage tank in the carrying seat through a conveying pipe, a loading seat is fixedly arranged on the inflating seat, a separation loading part and a sealing part are arranged in the loading seat, round crystal is positioned and fixed through the separation loading part, the space of the loading seat is sealed through the sealing part, a starting switch of the sealing part is positioned below the separation loading part, the height of the starting switch is adjusted through an adjusting structure on the carrying seat, and the bottom of the separation loading part is provided with a balance weighing structure; the integrated circuit production and processing equipment is used for safely transferring the round crystal, can realize the effect of automatically sealing and protecting the inert gas after a certain amount of round crystal is loaded, and can automatically adjust the loading capacity according to the actual production requirement.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to integrated circuit production and processing equipment for a computer.
Background
Due to the application of integrated circuits, computers have developed a new direction, namely, miniaturization of computers. The progress of integrated circuits is benefited by the development of the semiconductor industry, which belongs to micro electronic devices, and is a circuit with specific functions, which integrates a certain number of common electronic components, such as resistors, capacitors, transistors, and the like, and connecting lines among the components through a semiconductor process.
The main carrier of the integrated circuit is a wafer, and the commonly used integrated circuit preparation process comprises the following steps: wafer manufacturing, deposition, photoetching, etching, ion implantation, heat treatment, chemical mechanical polishing, wafer detection and inspection, wafer probe testing, packaging and finished product testing. It can be seen that the production process of integrated circuits starts with the manufacture of wafers, and during the process, the wafers are frequently transferred.
Most wafers are currently loaded using a wafer carrier (FOUP) to increase convenience and maintain cleanliness, and inert gas is introduced into the FOUP to reduce the possibility of oxidation during storage. However, the existing wafer carrier mechanism is difficult to adjust the inert gas charging time, manual intervention is usually needed, the carrier mechanism is manually closed, an inflation switch is opened, and the working efficiency is low. And the enclosed construction of manual switching carrier easily has the gas leakage point, causes inert gas to reveal.
Disclosure of Invention
The present invention is directed to an integrated circuit manufacturing apparatus for a computer, so as to achieve the purpose of automatically sealing and protecting a wafer and adjusting the sealing time, and to solve the problems mentioned in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides an integrated circuit production processing equipment for computer, includes the carrier seat, fixed mounting has the seat of aerifing on the carrier seat, and aerifys the seat and pass through the conveyer pipe and connect on the inert gas storage tank in the carrier seat, fixed mounting has the loading seat on the seat of aerifing, be provided with partition loading part and seal in the loading seat, carry out the location of round brilliant fixedly through separating the loading part, and carry out the sealed of loading seat space through the seal, the starting switch of seal is located the below of separating the loading part, and the height of starting switch adjusts through the regulation structure on the carrier seat, the bottom of separating the loading part sets up to balanced weighing structure, changes the contact position of balanced weighing structure and starting switch through the height of adjusting the starting switch, reaches the effect that the seal closed loading seat was automatic after the ration loaded round brilliant.
Preferably, the separating and loading part comprises loading pieces arranged in a loading seat, the loading pieces are fixedly connected with a bottom plate, a bottom support is slidably mounted on the bottom plate, a rotating arm is rotatably mounted on the bottom support, a limiting clamp is fixedly mounted on the rotating arm, a supporting spring is fixedly connected on the bottom support, and the supporting spring is connected to the balance weighing structure.
Preferably, the loading pieces are arranged at equal intervals, a limiting space is formed between every two adjacent loading pieces for loading the wafers, the bottom plate is arranged at the bottom of the loading pieces, the bottom support is slidably arranged in the through groove of the bottom plate, the rotating arms are arranged on two sides of the bottom support, and the limiting clamps are arranged at the end parts of the rotating arms.
Preferably, the balance weighing structure comprises at least four balance springs fixedly connected to the bottom of the loading seat, the balance springs are used for carrying out balance support on the weighing plate, and the support springs are connected to the top surface of the weighing plate.
Preferably, the bottom slidable mounting of loading seat has the ramp board, and fixedly connected with reset spring on the ramp board, starting switch supports through the ramp board, and starting switch's height depends on the horizontal position of ramp board.
Preferably, the adjusting structure comprises a support fixedly mounted on the carrying seat, an adjusting rod is slidably mounted on the support, a control handle is fixedly connected to the adjusting rod, scales and a positioning groove are formed in the adjusting rod, and the positioning of the adjusting rod is carried out through a positioning piece on the support.
Preferably, fixed mounting has the rack on the regulation pole, and rack toothing is on the gear, gear coaxial coupling has the rolling dish, and the installation hub rotation of gear and rolling dish installs on the seat of aerifing, be provided with the driving rope on the rolling dish, and driving rope fixed connection is on the ramp plate.
Preferably, the sealing part comprises a top cover and a front blocking cover which are arranged on the loading seat through a driving shaft, the loading seat is provided with a sealing strip which is in sealing connection with the top cover, the front blocking cover is provided with a sealing sleeve which is in sealing connection with the loading seat, and the driving shafts of the top cover and the front blocking cover are controlled through a starting switch.
Preferably, fixed mounting has the absorption piece on the top cap, and is provided with the external member on the preceding fender cover, the absorption piece adopts the electromagnetism piece, and the external member adopts the magnetic part, carries out the top cap and adsorbs connecting from inhaling of piece, it controls through the inductor to adsorb the piece, be provided with the blend stop on the top cap, and preceding blend stop passes through the adapter sleeve and is connected with the blend stop, be provided with the physiosis strip in the adapter sleeve, and the physiosis strip has the gasbag through pipe connection, and is provided with the clamp plate on the top cap and carries out the extrusion of gasbag, and the gasbag is elastic air bag.
Compared with the prior art, the invention has the beneficial effects that:
1. the integrated circuit production and processing equipment is used for safely transferring the round crystal, can realize the effect of automatically sealing and protecting the inert gas after a certain amount of round crystal is loaded, can automatically adjust the loading capacity according to the actual production requirement, determines the time of sealing protection, improves the efficiency of round crystal transportation, and effectively prevents the inert gas from leaking;
2. according to the invention, the loading seat is mainly used for positioning and fixing the round crystal by separating the loading part, an independent loading space can be formed, the round crystal is prevented from shaking and colliding, the bottom of the loading piece is provided with a movable bottom support, a limiting clamp on the loading piece can be automatically clamped on the round crystal from two sides, the round crystal is prevented from rotating accidentally, meanwhile, the weight of the round crystal can act on the bottom support and further transmitted to the balance weighing structure to accumulate the weight, when the number of the round crystals reaches a certain degree, the balance weighing structure triggers the starting switch, the balance weighing structure can balance the weight of the round crystal, and in the process that the round crystal is gradually increased, the weighing plate gradually moves downwards until the weighing plate is in contact connection with the starting switch, and the sealing part is triggered;
3. the height of the starting switch can be controlled by moving the ramp plate, so that the limit number of the round crystals in the loading seat is changed, the contact between the weighing plate and the starting switch is expected artificially, the starting switch can be opened after a certain amount of round crystals are loaded, the loading seat is sealed by the sealing part, the inert gas is conveniently filled into the loading seat by the inflating seat, and the position of the ramp plate is controlled by the adjusting structure, so that the adjustment is very convenient;
4. the sealing part of the invention can automatically seal the loading seat, the top cover and the front baffle cover are driven to rotate by the driving shaft, the top cover firstly covers the top of the loading seat to complete sealing, then the front baffle cover covers the front surface of the loading seat and is connected with the top cover to complete sealing, the front baffle cover and the top cover also have self-absorption function, when the sensor detects that the front baffle cover is close to the top cover, the suction accessory can be electrified to generate magnetic attraction force to act on the kit, the front baffle cover is tightly adsorbed on the top cover, and an air bag on the front baffle cover can be compressed by the pressing plate to send air into the inflatable strip, so that the inflatable strip expands, the gap between the connecting sleeve and the baffle strip is eliminated, and better sealing effect is achieved.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a first schematic view of the open state of the present invention;
FIG. 3 is a second schematic view of the open state of the present invention;
FIG. 4 is a schematic view of the structure of the loading seat of the present invention;
FIG. 5 is a second schematic view of the load lock configuration of the present invention;
FIG. 6 is a schematic view of the present invention in a loaded state;
FIG. 7 is a schematic view of a spacing structure of the present invention;
FIG. 8 is a schematic view of a loading configuration of the present invention;
FIG. 9 is a schematic view of an adjustment mechanism of the present invention;
fig. 10 is a schematic view of a closure structure of the present invention.
In the figure: the device comprises a carrying seat 1, an inflating seat 2, a conveying pipe 3, a loading seat 4, a loading sheet 5, a bottom plate 6, a bottom support 7, a rotating arm 8, a limiting clamp 9, a supporting spring 10, a weighing plate 11, a balance spring 12, a return spring 13, a ramp plate 14, a starting switch 15, a support 16, an adjusting rod 17, a control handle 18, scales 19, a positioning groove 20, a positioning piece 21, a rack 22, a gear 23, a winding disc 24, a driving rope 25, a top cover 26, a front baffle 27, a sealing strip 28, a sealing sleeve 29, an adsorbing piece 30, a sleeve piece 31, an inductor 32, a baffle strip 33, a connecting sleeve 34, an inflatable strip 35, an air bag 36 and a pressure plate 37.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and the detailed description, wherein various embodiments or technical features described below can be arbitrarily combined to form a new embodiment without conflict, and it should be understood that the described embodiments are only a part of embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 10, the present invention provides a technical solution: the utility model provides an integrated circuit production processing equipment for computer, including carrier seat 1, fixed mounting has the seat of aerifing 2 on carrier seat 1, and aerify the seat 2 and connect on the inert gas storage tank in carrier seat 1 through conveyer pipe 3, fixed mounting has loading seat 4 on the seat of aerifing 2, be provided with partition loading portion and seal in the loading seat 4, the location of carrying out the round brilliant through separating loading portion is fixed, and carry out the sealed of loading seat 4 space through the seal, seal's starting switch 15 is located the below of separating loading portion, and the height of starting switch 15 is adjusted through the regulation structure on carrier seat 1, the bottom of separating loading portion sets up to balanced weighing structure, through adjusting starting switch 15's height to change balanced weighing structure and starting switch 15's contact position, reach the effect that seal part self-sealing carried seat 4 after the ration loaded round brilliant.
The integrated circuit production and processing equipment is mainly used for safely transferring the round crystal, can realize the effect of automatically sealing and protecting the inert gas after a certain amount of round crystal is loaded, can automatically adjust the loading capacity according to the actual production requirement, determines the time of sealing protection, improves the efficiency of round crystal transportation, and effectively prevents the inert gas from leaking;
the separated loading part comprises loading pieces 5 arranged in a loading seat 4, a bottom plate 6 is fixedly connected onto the loading pieces 5, a bottom support 7 is slidably mounted on the bottom plate 6, a rotating arm 8 is rotatably mounted on the bottom support 7, a limiting clamp 9 is fixedly mounted on the rotating arm 8, a supporting spring 10 is fixedly connected onto the bottom support 7, and the supporting spring 10 is connected onto the balance weighing structure;
the loading seat 4 is mainly used for positioning and fixing the round crystal by separating the loading part, and can form an independent loading space to prevent the round crystal from shaking and colliding;
the loading pieces 5 are arranged at equal intervals, a limiting space is formed between every two adjacent loading pieces 5 for loading the round crystal, the bottom plate 6 is arranged at the bottom of the loading pieces 5, the bottom support 7 is arranged in a through groove of the bottom plate 6 in a sliding mode, the rotating arms 8 are arranged on two sides of the bottom support 7, and the limiting clamps 9 are arranged at the end portions of the rotating arms 8;
the wafer is placed between two loading pieces 5 and is separated through the loading pieces 5, a movable bottom support 7 is arranged at the bottom of each loading piece 5, the bottom of each wafer is pressed on the bottom support 7 after the wafer is loaded, the bottom support 7 moves downwards, meanwhile, a rotating arm 8 on the bottom support 7 is extruded by a bottom plate 6 to rotate, limiting clamps 9 on the wafer can be clamped on the wafer from two sides, the wafer is prevented from rotating accidentally, meanwhile, the weight of the wafer can act on the bottom support 7 and is further transmitted to a balance weighing structure, weight accumulation is carried out, and when the number of the wafers reaches a certain degree, the balance weighing structure triggers a starting switch 15;
the balance weighing structure comprises balance springs 12 fixedly connected to the bottom of the loading seat 4, at least four balance springs 12 are arranged to perform balance support on the weighing plate 11, and the support springs 10 are connected to the top surface of the weighing plate 11;
the balance weighing structure can balance the weight of the round crystal, and in the process that the round crystal is gradually increased, the weighing plate 11 gradually moves downwards until the weighing plate 11 is in contact connection with the starting switch 15 to trigger the closed part;
a ramp plate 14 is slidably mounted at the bottom of the loading seat 4, a return spring 13 is fixedly connected to the ramp plate 14, a starting switch 15 is supported by the ramp plate 14, and the height of the starting switch 15 depends on the horizontal position of the ramp plate 14;
according to actual needs, the height of the starting switch 15 can be controlled by moving the ramp plate 14, so that the limit number of the round crystals in the loading seat 4 is changed, the contact between the weighing plate 11 and the starting switch 15 is expected artificially, the starting switch 15 is opened after a certain amount of round crystals are loaded, the loading seat 4 is closed through the closed part, and the gas-filled seat 2 is convenient to fill inert gas into the loading seat 4;
the adjusting structure comprises a bracket 16 fixedly arranged on the carrying seat 1, an adjusting rod 17 is slidably arranged on the bracket 16, a control handle 18 is fixedly connected on the adjusting rod 17, a scale 19 and a positioning groove 20 are arranged on the adjusting rod 17, and the adjusting rod 17 is positioned through a positioning piece 21 on the bracket 16;
the position of the ramp plate 14 is controlled by an adjusting structure, the control position of the adjusting structure is positioned at the rear part of the carrying seat 1 and at the pushing position of the carrying seat 1, and the adjusting structure can be controlled more conveniently while the carrying seat 1 is moved;
a rack 22 is fixedly installed on the adjusting rod 17, the rack 22 is meshed with a gear 23, the gear 23 is coaxially connected with a winding disc 24, installation shafts of the gear 23 and the winding disc 24 are rotatably installed on the inflating seat 2, a driving rope 25 is arranged on the winding disc 24, and the driving rope 25 is fixedly connected to the ramp plate 14;
during adjustment, the adjusting rod 17 is moved through the control handle 18 to drive the rack 22 on the adjusting rod to move, so that the gear 23 rotates to drive the winding disc 24 to rotate, the winding disc 24 can pull the driving rope 25 to drive the ramp plate 15 to move, and the effect of adjusting the height of the starting switch 15 is achieved;
the closed part comprises a top cover 26 and a front baffle cover 27 which are arranged on the loading seat 4 through a driving shaft, a sealing strip 28 is arranged on the loading seat 4 and is connected with the top cover 26 in a sealing way, a sealing sleeve 29 is arranged on the front baffle cover 27 and is connected with the loading seat 4 in a sealing way, and the driving shafts of the top cover 26 and the front baffle cover 27 are controlled through a starting switch 15;
when the start switch 15 is turned on, the closing part can be started, the top cover 26 and the front cover 27 are driven by the driving shaft to rotate, the top cover 26 firstly covers the top of the loading seat 4 to complete sealing, and then the front cover 27 covers the front surface of the loading seat 4 and is connected with the top cover 26 to complete sealing;
the top cover 26 is fixedly provided with an adsorption piece 30, the front baffle cover 27 is provided with a sleeve piece 31, the adsorption piece 30 adopts an electromagnetic block, the sleeve piece 31 adopts a magnetic piece to perform self-absorption connection of the top cover 26 and the adsorption piece 30, the adsorption piece 30 is controlled by an inductor 32, the top cover 26 is provided with a baffle strip 33, the front baffle cover 27 is connected with the baffle strip 33 through a connecting sleeve 34, an inflatable strip 35 is arranged in the connecting sleeve 34, the inflatable strip 35 is connected with an air bag 36 through a pipeline, the top cover 26 is provided with a pressing plate 37 to extrude the air bag 36, and the air bag 36 is an elastic air bag;
the front blocking cover 27 and the top cover 26 also have a self-sucking function, when the sensor 32 detects that the front blocking cover 27 is close to the top cover 26, the suction attachment 30 can be electrified to generate a magnetic suction force to act on the sleeve 31, the front blocking cover 27 is tightly adsorbed on the top cover 26, and the air bag 36 on the front blocking cover 27 can be compressed by the pressing plate 37 to send air into the inflatable strip 35, so that the inflatable strip 35 is expanded, a gap between the connecting sleeve 34 and the blocking strip 33 is eliminated, and a better sealing effect is achieved;
when the invention is used: firstly, the integrated circuit production and processing equipment is mainly used for safe transportation of the round crystal, can realize the effects of automatic sealing and inert gas protection after a certain amount of round crystal is loaded, can autonomously adjust the loading capacity according to the actual production requirement, determines the time of sealing protection, improves the round crystal transportation efficiency, and effectively prevents the inert gas from leaking, the loading seat 4 is mainly used for positioning and fixing the round crystal by separating the loading part, can form an independent loading space to prevent the round crystal from shaking and colliding, the round crystal is placed between two loading pieces 5 and separated by the loading pieces 5, the bottom of the loading piece 5 is provided with a movable bottom support 7, the bottom of the round crystal is pressed on the bottom support 7 after being loaded, so that the rotating arm 8 on the bottom support 7 rotates when the bottom support 7 moves downwards under the extrusion of the bottom plate 6, the limiting clamp 9 on the round crystal can be clamped on the round crystal from two sides to prevent the round crystal from rotating accidentally, meanwhile, the weight of the round crystal can act on the bottom support 7 and then be transmitted to the balance weighing structure to accumulate the weight, when the number of the round crystal reaches a certain degree, the balance weighing structure triggers the starting switch 15, the balance weighing structure can balance the weight of the round crystal, in the process that the round crystal is gradually increased, the weighing plate 11 gradually moves downwards until the weighing plate 11 is in contact connection with the starting switch 15 to trigger the closed part, and according to actual needs, the height of the starting switch 15 can be controlled by moving the ramp plate 14, so that the limit number of the round crystal in the loading seat 4 is changed, the contact between the weighing plate 11 and the starting switch 15 is artificially expected, after a certain amount of the round crystal is loaded, the starting switch 15 is opened, further, the loading seat 4 is closed through the closing portion, so that the inflating seat 2 can conveniently fill inert gas into the loading seat 4, the position of the ramp plate 14 is controlled through the adjusting structure, during adjustment, the adjusting rod 17 is moved through the control handle 18 to drive the rack 22 on the adjusting rod to move, so that the gear 23 rotates, and the winding disc 24 is driven to rotate, the winding disc 24 can pull the driving rope 25 to drive the ramp plate 15 to move, and the effect of adjusting the height of the starting switch 15 is achieved, when the starting switch 15 is opened, the closing portion can be started, the top cover 26 and the front cover 27 are driven to rotate through the driving shaft, the top cover 26 firstly covers the top of the loading seat 4 to complete sealing, then the front cover 27 covers the front surface of the loading seat 4 and is connected with the top cover 26 to complete sealing, the front cover 27 and the top cover 26 further have a self-absorption function, when the sensor 32 detects that the front cover 27 is close to the top cover 26, the accessory 30 can be electrified, magnetic attraction force is generated to act on the sleeve 31, the front cover 27 is tightly adsorbed on the top cover 26, and the air bag 27 can further receive a compressed air bag 36 on the sealing strip, so that the air bag 35 and the gap between the sealing strip 35 and the air bag 35 is better removed, and the gap between the sealing strip is better sent into the gap between the sealing strip 34.
The above embodiments are only preferred embodiments of the present invention, and the scope of the present invention is not limited thereto, and those skilled in the art will be able to make various modifications without inventive skill from the above conception and within the scope of the present invention.
Claims (9)
1. The utility model provides an integrated circuit production and processing equipment for computer, includes carrier seat (1), fixed mounting has inflatable seat (2) on carrier seat (1), and inflatable seat (2) are connected on the inert gas storage tank in carrier seat (1) through conveyer pipe (3), inflatable seat (2) are gone up fixed mounting and are loaded seat (4), its characterized in that: the automatic wafer loading device is characterized in that a separated loading part and a closed part are arranged in the loading seat (4), the wafer is positioned and fixed through the separated loading part, the space of the loading seat (4) is sealed through the closed part, a starting switch (15) of the closed part is positioned below the separated loading part, the height of the starting switch (15) is adjusted through an adjusting structure on the loading seat (1), the bottom of the separated loading part is provided with a balance weighing structure, the contact position of the balance weighing structure and the starting switch (15) is changed by adjusting the height of the starting switch (15), and the effect that the closed part automatically seals the loading seat (4) after the wafer is quantitatively loaded is achieved.
2. The integrated circuit production and processing apparatus for a computer according to claim 1, wherein: the separating and loading part comprises loading pieces (5) arranged in a loading seat (4), a bottom plate (6) is fixedly connected onto the loading pieces (5), a bottom support (7) is slidably mounted on the bottom plate (6), a rotating arm (8) is rotatably mounted on the bottom support (7), a limiting clamp (9) is fixedly mounted on the rotating arm (8), a supporting spring (10) is fixedly connected onto the bottom support (7), and the supporting spring (10) is connected onto a balance weighing structure.
3. The integrated circuit production and processing apparatus for a computer according to claim 2, wherein: dress slide glass (5) equidistance is arranged and is set up, and constitutes spacing space between adjacent loading piece (5) and carry out the loading of circle brilliant, bottom plate (6) are installed in the bottom of dress slide glass (5), and collet (7) slidable mounting in the logical groove of bottom plate (6), the both sides at collet (7) are installed in rotor arm (8), and the tip at rotor arm (8) is installed in spacing clamp (9).
4. The integrated circuit production and processing apparatus for computers according to claim 3, wherein: the balance weighing structure comprises balance springs (12) fixedly connected to the bottom of the loading seat (4), at least four balance springs (12) are arranged, balance support of the weighing plate (11) is conducted, and the support springs (10) are connected to the top face of the weighing plate (11).
5. The integrated circuit production and processing apparatus for a computer according to claim 1, wherein: the bottom slidable mounting of loading seat (4) has ramp plate (14), and fixedly connected with reset spring (13) on ramp plate (14), starting switch (15) support through ramp plate (14), and starting switch (15) highly depend on the horizontal position of ramp plate (14).
6. The integrated circuit production and processing apparatus for computers according to claim 5, wherein: adjust the structure including support (16) of fixed mounting on carrier seat (1), and slidable mounting has regulation pole (17) on support (16), fixedly connected with control handle (18) on adjusting pole (17), and be provided with scale (19) and constant head tank (20) on adjusting pole (17), adjust the location of pole (17) through setting element (21) on support (16).
7. The integrated circuit production and processing apparatus for a computer according to claim 6, wherein: fixed mounting has rack (22) on adjusting pole (17), and rack (22) meshing is on gear (23), gear (23) coaxial coupling has rolling dish (24), and the installation axle rotation of gear (23) and rolling dish (24) is installed on inflating seat (2), be provided with driving rope (25) on rolling dish (24), and driving rope (25) fixed connection is on ramp board (14).
8. The integrated circuit production and processing apparatus for a computer according to claim 1, wherein: the sealing part comprises a top cover (26) and a front blocking cover (27), wherein the top cover (26) and the front blocking cover (27) are installed on the loading seat (4) through a driving shaft, a sealing strip (28) is arranged on the loading seat (4) and is connected with the top cover (26) in a sealing mode, a sealing sleeve (29) is arranged on the front blocking cover (27) and is connected with the loading seat (4) in a sealing mode, and the driving shafts of the top cover (26) and the front blocking cover (27) are controlled through a starting switch (15).
9. The integrated circuit production and processing apparatus for computers according to claim 8, wherein: fixed mounting has an absorption piece (30) on top cap (26), and is provided with external member (31) on preceding fender lid (27), absorption piece (30) adopt the electromagnetism piece, and external member (31) adopt the magnetic part, carry out top cap (26) and adsorb being connected from inhaling of piece (30), it controls through inductor (32) to adsorb piece (30), be provided with blend stop (33) on top cap (26), and preceding fender lid (27) are connected with blend stop (33) through adapter sleeve (34), be provided with physiosis strip (35) in adapter sleeve (34), and physiosis strip (35) have gasbag (36) through the pipe connection, and be provided with clamp plate (37) on top cap (26) and carry out the extrusion of gasbag (36), and gasbag (36) are the elasticity gasbag.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210861913.7A CN115241105B (en) | 2022-07-21 | 2022-07-21 | Integrated circuit production and processing equipment for computer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210861913.7A CN115241105B (en) | 2022-07-21 | 2022-07-21 | Integrated circuit production and processing equipment for computer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115241105A true CN115241105A (en) | 2022-10-25 |
| CN115241105B CN115241105B (en) | 2023-05-16 |
Family
ID=83675601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210861913.7A Active CN115241105B (en) | 2022-07-21 | 2022-07-21 | Integrated circuit production and processing equipment for computer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115241105B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11238777A (en) * | 1998-02-23 | 1999-08-31 | Mitsubishi Electric Corp | Cassette carrier and cassette carrier system provided therewith |
| US20030187537A1 (en) * | 2002-03-27 | 2003-10-02 | Christoph Hocke | Installation for processing a semiconductor wafer and method for operating the installation |
| JP2004128428A (en) * | 2002-09-30 | 2004-04-22 | Tadashi Kamimura | Device for replacing gas in foup |
| JP2009239102A (en) * | 2008-03-27 | 2009-10-15 | Shin Etsu Polymer Co Ltd | Load port device, and method of mapping semiconductor wafer |
| CN104299934A (en) * | 2013-07-16 | 2015-01-21 | 昕芙旎雅有限公司 | EFEM and load port |
| CN106384724A (en) * | 2016-11-23 | 2017-02-08 | 北京亿微纳科技有限公司 | Automatic wafer loading device |
| CN110491812A (en) * | 2019-09-25 | 2019-11-22 | 沈阳芯达半导体设备有限公司 | A kind of high-cleanness, high semiconductor crystal wafer automatic loading device |
| CN111052336A (en) * | 2017-09-01 | 2020-04-21 | 株式会社国际电气 | Substrate processing apparatus, method of manufacturing semiconductor device, and program |
| CN211198267U (en) * | 2019-11-16 | 2020-08-07 | 湖南中智信息科技有限公司 | Monitoring device for elevator |
-
2022
- 2022-07-21 CN CN202210861913.7A patent/CN115241105B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11238777A (en) * | 1998-02-23 | 1999-08-31 | Mitsubishi Electric Corp | Cassette carrier and cassette carrier system provided therewith |
| US20030187537A1 (en) * | 2002-03-27 | 2003-10-02 | Christoph Hocke | Installation for processing a semiconductor wafer and method for operating the installation |
| JP2004128428A (en) * | 2002-09-30 | 2004-04-22 | Tadashi Kamimura | Device for replacing gas in foup |
| JP2009239102A (en) * | 2008-03-27 | 2009-10-15 | Shin Etsu Polymer Co Ltd | Load port device, and method of mapping semiconductor wafer |
| CN104299934A (en) * | 2013-07-16 | 2015-01-21 | 昕芙旎雅有限公司 | EFEM and load port |
| CN106384724A (en) * | 2016-11-23 | 2017-02-08 | 北京亿微纳科技有限公司 | Automatic wafer loading device |
| CN111052336A (en) * | 2017-09-01 | 2020-04-21 | 株式会社国际电气 | Substrate processing apparatus, method of manufacturing semiconductor device, and program |
| CN110491812A (en) * | 2019-09-25 | 2019-11-22 | 沈阳芯达半导体设备有限公司 | A kind of high-cleanness, high semiconductor crystal wafer automatic loading device |
| CN211198267U (en) * | 2019-11-16 | 2020-08-07 | 湖南中智信息科技有限公司 | Monitoring device for elevator |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115241105B (en) | 2023-05-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102097294B (en) | Adhesive tape joining apparatus and adhesive tape joining method | |
| JP3775987B2 (en) | Plasma processing equipment | |
| CN115241105A (en) | Integrated circuit production and processing equipment for computer | |
| CN112498762B (en) | Fruit selling equipment with automatic weighing and packing functions | |
| JPH0927541A (en) | Substrate holder | |
| CN115783420A (en) | Automatic package and bag sewing device for industrial powdery explosive | |
| CN114313453B (en) | Electronic components packs plastic packaging device in batches | |
| CN116106225A (en) | Thyroid stimulating hormone detection device | |
| CN113213169B (en) | Turnover system and method for glass production | |
| CN214700008U (en) | Animation presentation device based on digital media uses | |
| CN112423575B (en) | Efficient surface mounting method for LED lamp beads | |
| CN211165548U (en) | Wrapping bag scalds end equipment | |
| CN114899134A (en) | Flexible recovery unit of wafer cleaning and drying | |
| CN113753275A (en) | Agricultural rice fertilizer encapsulation equipment | |
| CN218578066U (en) | PVC sizing material granule ration partial shipment device | |
| CN112086386A (en) | Full-automatic sticking film machine of brilliant circle | |
| CN117246620B (en) | Double-sided tape dyestripping machine | |
| CN118651472B (en) | Packaging machine for brake block processing | |
| CN215316388U (en) | Overturning adsorption mechanism and laser processing device | |
| CN220465939U (en) | Traditional chinese medicine granule packing transmission device that dispenses | |
| CN216311720U (en) | Integrated circuit packaging device capable of preventing dislocation | |
| CN216128527U (en) | Electromagnetic induction package sealing mechanism for Chinese wolfberry | |
| CN219172818U (en) | Bagging device for filling | |
| CN220998405U (en) | Sample sealing and handing-over transmission device | |
| CN117657543A (en) | Boxing and packaging equipment for reel disk |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |