CN115228767A - Buffering power adjustable Z axle pushes down mechanism - Google Patents
Buffering power adjustable Z axle pushes down mechanism Download PDFInfo
- Publication number
- CN115228767A CN115228767A CN202210880822.8A CN202210880822A CN115228767A CN 115228767 A CN115228767 A CN 115228767A CN 202210880822 A CN202210880822 A CN 202210880822A CN 115228767 A CN115228767 A CN 115228767A
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- Prior art keywords
- block
- cylinder
- buffer
- cam
- pressing
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B1/00—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen
- B30B1/26—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen by cams, eccentrics, or cranks
- B30B1/261—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen by cams, eccentrics, or cranks by cams
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
- B30B15/0094—Press load monitoring means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C2301/00—Sorting according to destination
- B07C2301/0008—Electronic Devices, e.g. keyboard, displays
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The invention belongs to the technical field of semiconductor testing and sorting equipment, and particularly relates to a Z-axis pressing mechanism with adjustable buffer force, which comprises a fixed block, wherein a servo motor is fixedly arranged on the fixed block, a linear guide rail is fixedly arranged on one side of the fixed block, and a pressing support plate is fixedly arranged on a slide block on the side surface of the linear guide rail; the cam is fastened with the shaft end of the servo motor through a jackscrew, and the lower pressing rod realizes the Z-axis reciprocating motion of the lower pressing rod through angular rotation; the lower pressing bracket is fastened on a slide block of the linear guide rail through a screw; the uplifting reset tension spring acts between the pressing support plate and the mechanism fixing block, so that the cam and the cam follower can not overshoot and break away in the high-speed pressing process, and the cam follower can always keep in a contact state.
Description
Technical Field
The invention belongs to the technical field of semiconductor testing and sorting equipment, and particularly relates to a Z-axis pressing mechanism with adjustable buffer force.
Background
Semiconductors are used in the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power conversion, etc., for example, diodes are devices fabricated using semiconductors.
In the semiconductor industry, sorting and checking are needed in the production process, most of Z-axis pressing mechanisms of test sorting equipment on the market at present are motor cams directly pressed without buffer sliding blocks or buffer structures, the thickness error of devices or equipment action abnormity causes stroke overvoltage, and excessive impact force causes damage to IC chips or hidden cracks in the IC chips or the like; or the slide block which is pressed down is provided with a spring buffer structure, and the spring buffer structure has the following defects:
1. the current loop of the motor controls the magnitude of the downward pressure in the downward pressing mechanism, and through the conversion of the mechanism, the precision is low, and particularly for an extremely thin IC chip, the precise setting of the force between 50 and 200g cannot be realized;
2. a compression spring is used as a buffer in the pressing mechanism, and the software adjustment of the buffer force cannot be realized;
3. the pressing abnormality is monitored by a groove type sensor, and the height abnormality with the thickness of less than 0.3mm cannot be accurately monitored.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides the Z-axis pressing mechanism with adjustable buffering force, which has the characteristics of improving precision and stability, and avoiding damage of an IC chip and internal hidden cracking.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a buffer power adjustable Z axle pushes down mechanism, includes the fixed block, fixed mounting has servo motor on the fixed block, fixed block one side is fixed and is provided with linear guide, fixed mounting has the extension board of pushing down on the slider of linear guide side, it lifts the extension spring that resets to go back to articulate still between the fixed block of extension board and servo motor below to push down, servo motor output fixed mounting has the cam of pushing down, it has cam follower to push down extension board upper end fixed mounting, it has the cylinder to push down the inboard top fixed mounting of extension board, the flexible fixed mounting of cylinder has the buffer block, the buffer block is kept away from the one end of connecting the cylinder and is still fixed mounting has the depression bar down, it is provided with linear bearing to push down the inboard inside below of extension board, it deviates from the one end fixed mounting that linear guide connects the fixed block to push down the extension board, fixed mounting has the abnormal detection air cock of pushing down on the cylinder, fixed mounting has on the fixed block and lifts the position sensor.
As the preferable technical scheme of the Z-axis pressing mechanism with the adjustable buffering force, the pressing support plate is of a C-shaped structure with two straight ends, the air cylinder is installed on the upper end straight surface of the inner side of the C-shaped structure, the linear bearing is installed on the lower end straight surface of the inner part of the C-shaped structure, and the air cylinder and the linear bearing are concentric.
According to the preferable technical scheme of the Z-axis pressing mechanism with the adjustable buffering force, the spiral groove is formed in the pressing cam, one end, far away from the end fixed with the pressing support plate, of the cam follower block is located in the spiral groove, the cam follower block rotates at different angles along with the spiral groove, and moves up and down in a reciprocating mode under the action force of the lifting reset tension spring.
As a preferable technical scheme of the Z-axis pressing mechanism with the adjustable buffering force, the air cylinder is always in the maximum telescopic state when not working and not under the action of pressure, and one side of the lower surface of the buffering block is always in contact with the limiting block.
As the preferable technical scheme of the Z-axis pressing mechanism with the adjustable buffering force, the joint of the buffering block and the pressing rod is fixed through the connecting rod, and the connecting rod penetrates through the linear bearing.
As the preferable technical scheme of the Z-axis pressing mechanism with the adjustable buffering force, the pressing rod and the pressing support plate slide up and down in parallel through the pressing cam, the cam follower block and the lifting return tension spring.
As the preferable technical scheme of the Z-axis pressing mechanism with the adjustable buffering force, the cylinder diameter is 4mm.
As the preferable technical scheme of the Z-axis pressing mechanism with the adjustable buffering force, a buffering pad is arranged at one end, close to the telescopic end of the connecting cylinder, of the buffering block.
According to the preferable technical scheme of the Z-axis pressing mechanism with the adjustable buffering force, the fixed block and the pressing support plate are respectively provided with the hanging grooves for hanging the lifting and resetting tension springs, the lifting and resetting tension springs are symmetrically distributed between the fixed block and the pressing support plate, and the lifting and resetting tension springs are also positioned on the same straight line with the air cylinder.
As a preferable technical scheme of the Z-axis pressing mechanism with the adjustable buffering force, the upward-lifting position sensor is also positioned on the rear side of the pressing support plate.
Compared with the prior art, the invention has the beneficial effects that: the invention avoids the hidden troubles of damage of the IC chip or hidden crack of the inner part and the like caused by stroke overpressure due to the thickness error of the device or abnormal equipment action when adsorbing the extremely thin IC chip; the cam is fastened with the shaft end of the servo motor through a jackscrew, and the lower pressing rod realizes the Z-axis reciprocating motion of the lower pressing rod through angular rotation; the lower pressing bracket is fastened on a slide block of the linear guide rail through a screw; the uplifting reset tension spring acts between the downward pressing support plate and the mechanism fixing block, so that the cam and the cam follower cannot overshoot and break away in the high-speed downward pressing process, and the cam follower are always kept in a contact state; the air cylinder is always kept in an extending state under the set air pressure, if the lower pressing rod is blocked in a section of stroke, the lower pressing cam can continue to rotate to a target angle, the redundant stroke is passively retracted by the rod of the air cylinder to absorb and buffer, and the buffer force is the set force of the air cylinder; the cylinder diameter of the cylinder is 4mm, and the magnitude of the buffer force can be calculated according to a formula of air pressure and the output force of a cylinder rod; when the buffer stroke, the buffer block upwards displaces, breaks away from the limiting block, and the monitoring is pressed down the atmospheric pressure of unusual detection air cock, and whether the monitoring has the unusual emergence.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic isometric view of the present invention;
FIG. 2 is a side view of the present invention;
FIG. 3 is a schematic structural view of a front view of the present invention;
FIG. 4 is a schematic view of the present invention in a partially assembled configuration;
FIG. 5 is a schematic view of the cam and cam follower of the present invention;
in the figure: 1. a fixed block; 2. a servo motor; 3. a linear guide rail; 4. pressing down the support plate; 5. lifting the reset tension spring; 6. pressing down the cam; 7. a cam follower block; 8. a cylinder; 9. a buffer block; 10. a lower pressure lever; 11. a linear bearing; 12. a limiting block; 13. pressing an abnormal detection air nozzle; 14. up to the position sensor.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Examples
Referring to fig. 1-5, the present invention provides the following technical solutions: the utility model provides a Z axle of buffer power adjustable pushes down mechanism, including fixed block 1, fixed block 1 is last fixedly mounted with servo motor 2, fixed block 1 one side is fixed with linear guide 3, fixedly mounted with down the extension board 4 on the slider of linear guide 3 side, it lifts the extension spring 5 that resets still to articulate between extension board 4 and the fixed block 1 of servo motor 2 below, servo motor 2 output end fixed mounting has down cam 6, it has cam follower 7 to push down extension board 4 upper end fixed mounting, it has cylinder 8 to push down extension board 4 inboard top fixed mounting, the flexible end fixed mounting of cylinder 8 has buffer 9, buffer 9 keeps away from the one end of connecting cylinder 8 and still fixed mounting has down depression bar 10, it is provided with linear bearing 11 to push down extension board 4 inboard inside below, it deviates from linear guide 3 and connects the one end fixed mounting of fixed block 1 to push down extension board 4, fixed mounting has down and presses unusual detection air cock 13 on the cylinder 8, fixed mounting has on fixed block 1 and lifts to the position sensor 14, avoid when adsorbing extremely thin IC chip, because the thickness error of device itself or the stroke that the equipment action is unusual leads to damage or hidden danger such as the internal crack.
Specifically, the pressing support plate 4 is of a C-shaped structure with straight two ends, the cylinder 8 is mounted on the inner upper end straight surface of the C-shaped structure, the linear bearing 11 is mounted on the inner lower end straight surface of the C-shaped structure, and the cylinder 8 and the linear bearing 11 are concentric.
Specifically, a spiral groove is formed in the pressing cam 6, one end, far away from the end fixed with the pressing support plate 4, of the cam follower block 7 is located in the spiral groove, the cam follower block 7 moves up and down in a reciprocating mode under the action of the lifting reset tension spring 5 along different rotating angles of the spiral groove.
Specifically, cylinder 8 is out of work and is not located the biggest telescopic state all the time under the pressure effect, and 9 lower surface one side of buffer block also contact with stopper 12 all the time this moment, and depression bar 10 if meet the hindrance in one section stroke down in this embodiment, pushes down cam 6 and can continue to rotate to the target angle, and the buffering is absorbed in the passive withdrawal of the pole of unnecessary stroke by cylinder 8, and the cushion effect is the settlement power of cylinder 8.
Specifically, the junction of the buffer block 9 and the lower press rod 10 is fixed through a connecting rod, and the connecting rod further penetrates through the linear bearing 11, in this embodiment, the connecting rod penetrates through the linear bearing 11, and the effects of positioning and improving the working stability are achieved.
Specifically, the lower pressing rod 10 and the lower pressing support plate 4 slide up and down in parallel through the lower pressing cam 6, the cam follower block 7 and the lifting return tension spring 5.
Specifically, the cylinder 8 has a cylinder diameter of 4mm, and the magnitude of the damping force can be calculated according to a formula of air pressure and output force of a cylinder rod in the embodiment.
Specifically, the buffer block 9 is provided with a buffer pad near the telescopic end of the connecting cylinder 8, and the buffer pad avoids the buffer block 9 and the cylinder 8 from generating rigid impact in the embodiment.
Specifically, the fixed block 1 and the pressing support plate 4 are both provided with a hanging groove for hanging the reset tension spring 5, the reset tension spring 5 is lifted and symmetrically distributed between the fixed block 1 and the pressing support plate 4, the reset tension spring 5 is lifted and is still in the same straight line with the air cylinder 8, the reset tension spring 5 is lifted and is still vertically distributed with the pressing rod 10 in the embodiment, the force is in a vertical state when the reset tension spring 5 is lifted and stretched and rebounded, the use stability is ensured, the reset tension spring 5 is lifted, the pressing cam 6 and the cam follower 7 cannot overshoot and break away in the high-speed pressing process, and the contact state is always kept.
Specifically, the up-and-down position sensor 14 is also located at the rear side of the down-pressing plate 4, and the up-and-down position sensor 14 senses the up-and-down movement range of the down-pressing plate 4 in real time in this embodiment.
The working principle and the using process of the invention are as follows: the invention is fixedly arranged on a semiconductor sorting machine through a fixed block 1, a servo motor 2 is controlled to rotate, the servo motor 2 drives a linear guide rail 3 to rotate, a spiral groove on the linear guide rail 3 is matched with a cam follow-up block 7, the cam follow-up block 7 presses down and simultaneously drives a structure of a slide block connecting part of the linear guide rail 3 to move downwards, a press-down rod 10 is pressed down, a reset tension spring 5 is lifted and reset while pressing down, the cam follow-up block is stretched by a stretching cylinder 8 to keep a set air pressure in a state of extending all the time, if the press-down rod is blocked in a section of stroke, the press-down cam can continue to rotate to a target angle, the rest stroke is passively retracted by a rod of the cylinder to absorb and buffer, the buffer force is the set force of the cylinder, the cylinder diameter of the cylinder is 4mm, the size of the buffer force can be calculated according to a formula of the air pressure and the output force of the cylinder rod, the buffer block moves upwards and breaks away from a limit block, and the air pressure of an air tap can be detected by monitoring abnormal press-down, so as to detect whether an abnormality or not.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described above, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a cushion effect adjustable Z axle pushes down mechanism which characterized in that: including fixed block (1), fixed mounting has servo motor (2) on fixed block (1), fixed block (1) one side is fixed and is provided with linear guide (3), fixed mounting has down extension board (4) on the slider of linear guide (3) side, it lifts extension spring (5) that resets still to articulate between fixed block (1) of extension board (4) and servo motor (2) below down, servo motor (2) output fixed mounting has down cam (6), it has cam follower block (7) to push down extension board (4) upper end fixed mounting, it has cylinder (8) to push down extension board (4) inboard top fixed mounting, the flexible fixed mounting of cylinder (8) has buffer block (9), the one end that connects cylinder (8) is kept away from in buffer block (9) is fixed mounting still down depression bar (10), it is provided with linear bearing (11) to push down extension board (4) inboard inside below, it deviates from linear guide (3) and connects one end fixed mounting has stopper (12) to push down, fixed mounting has down abnormally to detect air cock (13) on the fixed block (8), lift the position sensor (14).
2. The Z-axis press mechanism with adjustable buffer force of claim 1, wherein: the pressing support plate (4) is of a C-shaped structure with two straight ends, the cylinder (8) is installed on the inner upper end straight surface of the C-shaped structure, the linear bearing (11) is installed on the inner lower end straight surface of the C-shaped structure, and the cylinder (8) and the linear bearing (11) are concentric.
3. The Z-axis press mechanism with adjustable buffer force of claim 1, wherein: the spiral groove is formed in the pressing cam (6), one end, far away from the end fixed with the pressing support plate (4), of the cam follow-up block (7) is located inside the spiral groove, the cam follow-up block (7) follows different rotating angles of the spiral groove and reciprocates up and down under the action force of the lifting reset tension spring (5).
4. The Z-axis press mechanism with adjustable damping force of claim 1, wherein: the cylinder (8) is located the biggest flexible state all the time at out of work and under the pressure-free effect, and buffer block (9) lower surface one side also contacts with stopper (12) all the time this moment.
5. The Z-axis press mechanism with adjustable damping force of claim 1, wherein: the connection part of the buffer block (9) and the lower pressure rod (10) is fixed through a connecting rod, and the connecting rod also penetrates through the linear bearing (11).
6. The Z-axis press mechanism with adjustable buffer force of claim 1, wherein: the pressing rod (10) and the pressing support plate (4) slide up and down in parallel through the pressing cam (6), the cam follower block (7) and the lifting return tension spring (5).
7. The Z-axis press mechanism with adjustable buffer force of claim 1, wherein: the cylinder (8) has a cylinder diameter of 4mm.
8. The Z-axis press mechanism with adjustable buffer force of claim 1, wherein: and a buffer cushion is arranged at one end, close to the telescopic end of the connecting cylinder (8), of the buffer block (9).
9. The Z-axis press mechanism with adjustable damping force of claim 1, wherein: the fixed block (1) and the downward pressing support plate (4) are respectively provided with a hanging groove for hanging the lifting reset tension spring (5), the lifting reset tension spring (5) is symmetrically distributed between the fixed block (1) and the downward pressing support plate (4), and the lifting reset tension spring (5) is also positioned on the same straight line with the cylinder (8).
10. The Z-axis press mechanism with adjustable buffer force of claim 1, wherein: the upward and downward position sensor (14) is also positioned at the rear side of the downward pressing support plate (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210880822.8A CN115228767A (en) | 2022-07-26 | 2022-07-26 | Buffering power adjustable Z axle pushes down mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210880822.8A CN115228767A (en) | 2022-07-26 | 2022-07-26 | Buffering power adjustable Z axle pushes down mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115228767A true CN115228767A (en) | 2022-10-25 |
Family
ID=83674787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210880822.8A Pending CN115228767A (en) | 2022-07-26 | 2022-07-26 | Buffering power adjustable Z axle pushes down mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115228767A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115608626A (en) * | 2022-10-31 | 2023-01-17 | 厦门柯尔自动化设备有限公司 | High-speed multi-head chip sorting device |
| CN117299618A (en) * | 2023-11-28 | 2023-12-29 | 北京七星华创微电子有限责任公司 | Translational chip sorting machine |
-
2022
- 2022-07-26 CN CN202210880822.8A patent/CN115228767A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115608626A (en) * | 2022-10-31 | 2023-01-17 | 厦门柯尔自动化设备有限公司 | High-speed multi-head chip sorting device |
| CN117299618A (en) * | 2023-11-28 | 2023-12-29 | 北京七星华创微电子有限责任公司 | Translational chip sorting machine |
| CN117299618B (en) * | 2023-11-28 | 2024-02-13 | 北京七星华创微电子有限责任公司 | Translational chip sorting machine |
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