CN115218932A - 一种基于微环谐振器的波分复用波长解调系统 - Google Patents

一种基于微环谐振器的波分复用波长解调系统 Download PDF

Info

Publication number
CN115218932A
CN115218932A CN202210682925.3A CN202210682925A CN115218932A CN 115218932 A CN115218932 A CN 115218932A CN 202210682925 A CN202210682925 A CN 202210682925A CN 115218932 A CN115218932 A CN 115218932A
Authority
CN
China
Prior art keywords
micro
ring resonator
signal
circuit
modulation signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210682925.3A
Other languages
English (en)
Inventor
陶继方
张凯峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shandong University
Original Assignee
Shandong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shandong University filed Critical Shandong University
Priority to CN202210682925.3A priority Critical patent/CN115218932A/zh
Publication of CN115218932A publication Critical patent/CN115218932A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35312Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35316Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Bragg gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

本发明公开了一种基于微环谐振器的波分复用波长解调系统,包括微环谐振器芯片、调制信号发生电路、光电信号转化电路和混频滤波电路;所述调制信号发生电路生成带有直流偏置的正弦波振荡调制信号,并传输至微环谐振器芯片和混频滤波电路;所述微环谐振器芯片将输入的不同波长的光信号转换为与波长相关的光信号,并传输至光电信号转化电路;所述光电信号转化电路将微环谐振器芯片输出的光信号转换为电信号,并放大后传输至混频滤波电路,所述混频滤波电路实现调制信号发生电路传输的正弦波振荡调制信号和转换的电信号的混频和滤波,并输出解调后的电压信号。本发明所公开的解调系统可对基于宽谱光源的传感器反射信号进行解调,成本低、体积小,能实现大规模复用。

Description

一种基于微环谐振器的波分复用波长解调系统
技术领域
本发明涉及属于光电技术领域,特别涉及一种基于微环谐振器的波分复用波长解调系统。
背景技术
光纤布拉格光栅传感器、微环传感器和法布里-珀罗传感器等传感器是将物理量的变化转化为光波长的变化,对光波长进行解调即可获得传感物理量的变化。
目前,市面上的波长解调仪大多基于DFB激光器制造,通过控制温度,使激光器逐步对传感器进行波长扫描,通过对返回信号的光强度来识别传感器的工作波长。由于激光器成本高昂,解调器价格昂贵、可复用性较差。
发明内容
为解决上述技术问题,本发明提供了一种基于微环谐振器的波分复用波长解调系统,以达到可对基于宽谱光源的传感器反射信号进行解调,实现大规模复用的目的。
为达到上述目的,本发明的技术方案如下:
一种基于微环谐振器的波分复用波长解调系统,包括微环谐振器芯片、调制信号发生电路、光电信号转化电路和混频滤波电路;所述调制信号发生电路生成带有直流偏置的正弦波振荡调制信号,并传输至微环谐振器芯片和混频滤波电路;所述微环谐振器芯片将输入的不同波长的光信号转换为与波长相关的光信号,并传输至光电信号转化电路;所述光电信号转化电路将微环谐振器芯片输出的光信号转换为电信号,并放大后传输至混频滤波电路,所述混频滤波电路实现调制信号发生电路传输的正弦波振荡调制信号和转换的电信号的混频和滤波,并输出解调后的电压信号。
上述方案中,所述微环谐振器芯片包括硅基底和位于硅基底上的二氧化硅层,所述二氧化硅层内埋有波导层,所述波导层包括光栅耦合器、阵列波导光栅和多个微环谐振器,光纤中的光信号由光栅耦合器耦合进微环谐振器芯片,通过阵列波导光栅将不同波长的光信号分路到各个微环谐振器分别进行解调;所述微环谐振器上方的二氧化硅层中制备有氮化钛薄膜,所述氮化钛薄膜连接有电极,所述电极连接调制信号发生电路;正弦波振荡调制信号通过电极接到氮化钛薄膜上,对进入微环谐振器的光信号进行调制;微环谐振器芯片的输出端连接光电信号转化电路。
上述方案中,所述光电信号转换电路包括光电二极管、跨阻放大电路和运算放大电路,实现将微环谐振器芯片输出的光信号转换为电信号,并进行放大。
上述方案中,所述混频滤波电路包括模拟乘法器电路和低通滤波电路,模拟乘法器电路实现将正弦振荡调制信号和转换的电信号混频,低通滤波电路用于滤除混频后的高频分量。
进一步的技术方案中,所述微环谐振器为跑道型,圆形部分的半径为25μm,中间耦合部分长度为20μm,微环谐振器与输入端以及下载端的传输波导之间的耦合距离为300nm。
进一步的技术方案中,所述氮化钛薄膜位于微环谐振器上方1μm处,氮化钛薄膜的阻抗为760Ω。
通过上述技术方案,本发明提供的一种基于微环谐振器的波分复用波长解调系统具有如下有益效果:
本发明的波长解调系统,由阵列波导光栅对多路复用的光信号进行分路,每一路由一个微环谐振器进行解调,可在单个芯片上完成对多路信号的解调,实现多路复用。
本发明的波长解调系统可对使用低成本宽谱光源的传感器进行解调,而且解调光路尺寸小,在一个小的芯片上即可完成,实现低成本下的高精度波长解调。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍。
图1为本发明实施例所公开的一种基于微环谐振器的波分复用波长解调系统示意图;
图2为微环谐振器芯片的剖视图;
图3为微环谐振器芯片的平面布局图;
图4为图3中A部分放大示意图;
图5为微环传输函数;
图6为微环传输函数的一阶导函数。
图中,1、硅基底;2、二氧化硅层;3、光栅耦合器;4、阵列波导光栅;5、微环谐振器;6、光电二极管;7、电极;8、氮化钛薄膜;9、传输波导。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述。
本发明提供了一种基于微环谐振器5的波分复用波长解调系统,如图1所示,包括微环谐振器芯片、调制信号发生电路、光电信号转化电路和混频滤波电路。调制信号发生电路生成带有直流偏置的正弦波振荡调制信号,并传输至微环谐振器芯片和混频滤波电路;微环谐振器芯片将输入的不同波长的光信号转换为与波长相关的光信号,并传输至光电信号转化电路;光电信号转化电路将微环谐振器芯片输出的光信号转换为电信号,并放大后传输至混频滤波电路,混频滤波电路实现调制信号发生电路传输的正弦波振荡调制信号和转换的电信号的混频和滤波,并输出解调后的电压信号。
1、微环谐振器芯片
如图2所示,微环谐振器芯片包括硅基底1和位于硅基底1上的二氧化硅层2,二氧化硅层2内埋有波导层,波导层包括光栅耦合器3、阵列波导光栅4和多个微环谐振器5,光栅耦合器3、阵列波导光栅4和多个微环谐振器5之间依次通过传输波导9连接。光纤中的光信号由光栅耦合器3耦合进微环谐振器芯片,通过阵列波导光栅4将不同波长的光信号分路到各个微环谐振器5分别进行解调;微环谐振器5上方的二氧化硅层2中制备有氮化钛薄膜8,氮化钛薄膜8连接有电极7,电极7连接调制信号发生电路;正弦波振荡调制信号通过电极7接到氮化钛薄膜8上,对进入微环谐振器5的光信号进行调制;微环谐振器芯片的输出端连接光电信号转化电路。
微环谐振器5为跑道型,圆形部分的半径为25μm,中间耦合部分长度为20μm,微环谐振器5输入端和下载端的传输波导9之间的耦合距离为300nm。
氮化钛薄膜8位于微环谐振器5上方1μm处,氮化钛薄膜8的阻抗为760Ω。
2、调制信号发生电路
调制信号发生电路生成带有直流偏置的正弦波振荡调制信号,直流偏置大小、正弦信号频率、峰峰值可调。
3、光电信号转换电路
光电信号转换电路包括光电二极管6、跨阻放大电路和运算放大电路,光电二极管6将光信号转换为电流,跨阻放大电路将电流转换为电压,运算放大电路将电压放大。本发明中,将光电二极管6集成到微环谐振器芯片上,可以避免连接光纤带来的额外损耗。
4、混频滤波电路
混频滤波电路包括模拟乘法器电路和低通滤波电路,模拟乘法器电路实现将正弦振荡调制信号和转换的电信号混频,低通滤波电路用于滤除混频后的高频分量。
本发明的解调系统的工作原理如下:
光纤中的光信号由光栅耦合器3耦合进微环谐振器芯片,阵列波导光栅4将不同波长的光信号分路到各个微环谐振器5分别进行解调,正弦波振荡调制信号通过电极7接到微环谐振器芯片的氮化钛薄膜8上,对进入微环谐振器5的光信号进行调制。微环谐振器芯片的输出端通过光电二极管6连接到光电转换电路。光电二极管6完成对信号的光电转换,并通过跨阻放大电路和运算放大电路进一步放大。混频滤波电路通过对光电转换信号的频谱搬移和低通滤波实现对一次谐波分量的提取,最终获得一个与波长相关的电压信号,完成对波长的解调。
微环谐振器5对光信号的调制过程如下:
如图5所示,微环传输函数为:
Figure BDA0003699045360000041
其中,λR为微环谐振波长,λ为输入光信号波长。
对微环谐振器5施加正弦波振荡调制信号Acos(2πft),则微环谐振波长为λR=λ0+Δλcos(2πft)。
输出端光功率为:
Figure BDA0003699045360000042
光电二极管6对微环谐振器5输出的光信号进行光电转换,并通过跨阻放大电路和运算放大电路进一步放大。输出电压信号为:Vout=Pout×M,M为总的放大倍数。
混频滤波电路通过对光电转换信号的频谱搬移和低通滤波实现对一次谐波分量的提取,获得的电压信号与微环谐振器5传输函数的一阶导函数成正比。
微环传输函数的一阶导函数如图6所示,微环传输函数一阶导数中心对称点与调制信号的直流电压分量一一对应。可通过对直流分量的扫描来实现对波长的宽范围追踪。当直流分量确定时,可根据输出信号的波动对小范围内的波长变化进行精确追踪。
对所公开的实施例的上述说明,使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的,本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下,在其它实施例中实现。因此,本发明将不会被限制于本文所示的这些实施例,而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。

Claims (6)

1.一种基于微环谐振器的波分复用波长解调系统,其特征在于,包括微环谐振器芯片、调制信号发生电路、光电信号转化电路和混频滤波电路;所述调制信号发生电路生成带有直流偏置的正弦波振荡调制信号,并传输至微环谐振器芯片和混频滤波电路;所述微环谐振器芯片将输入的不同波长的光信号转换为与波长相关的光信号,并传输至光电信号转化电路;所述光电信号转化电路将微环谐振器芯片输出的光信号转换为电信号,并放大后传输至混频滤波电路,所述混频滤波电路实现调制信号发生电路传输的正弦波振荡调制信号和转换的电信号的混频和滤波,并输出解调后的电压信号。
2.根据权利要求1所述的一种基于微环谐振器的波分复用波长解调系统,其特征在于,所述微环谐振器芯片包括硅基底和位于硅基底上的二氧化硅层,所述二氧化硅层内埋有波导层,所述波导层包括光栅耦合器、阵列波导光栅和多个微环谐振器,光纤中的光信号由光栅耦合器耦合进微环谐振器芯片,通过阵列波导光栅将不同波长的光信号分路到各个微环谐振器分别进行解调;所述微环谐振器上方的二氧化硅层中制备有氮化钛薄膜,所述氮化钛薄膜连接有电极,所述电极连接调制信号发生电路;正弦波振荡调制信号通过电极接到氮化钛薄膜上,对进入微环谐振器的光信号进行调制;微环谐振器芯片的输出端连接光电信号转化电路。
3.根据权利要求1所述的一种基于微环谐振器的波分复用波长解调系统,其特征在于,所述光电信号转换电路包括光电二极管、跨阻放大电路和运算放大电路,实现将微环谐振器芯片输出的光信号转换为电信号,并进行放大。
4.根据权利要求1所述的一种基于微环谐振器的波分复用波长解调系统,其特征在于,所述混频滤波电路包括模拟乘法器电路和低通滤波电路,模拟乘法器电路实现将正弦振荡调制信号和转换的电信号混频,低通滤波电路用于滤除混频后的高频分量。
5.根据权利要求2所述的一种基于微环谐振器的波分复用波长解调系统,其特征在于,所述微环谐振器为跑道型,圆形部分的半径为25μm,中间耦合部分长度为20μm,微环谐振器与输入端以及下载端的传输波导之间的耦合距离为300nm。
6.根据权利要求2所述的一种基于微环谐振器的波分复用波长解调系统,其特征在于,所述氮化钛薄膜位于微环谐振器上方1μm处,氮化钛薄膜的阻抗为760Ω。
CN202210682925.3A 2022-06-17 2022-06-17 一种基于微环谐振器的波分复用波长解调系统 Pending CN115218932A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210682925.3A CN115218932A (zh) 2022-06-17 2022-06-17 一种基于微环谐振器的波分复用波长解调系统

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210682925.3A CN115218932A (zh) 2022-06-17 2022-06-17 一种基于微环谐振器的波分复用波长解调系统

Publications (1)

Publication Number Publication Date
CN115218932A true CN115218932A (zh) 2022-10-21

Family

ID=83607238

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210682925.3A Pending CN115218932A (zh) 2022-06-17 2022-06-17 一种基于微环谐振器的波分复用波长解调系统

Country Status (1)

Country Link
CN (1) CN115218932A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116743259A (zh) * 2023-08-14 2023-09-12 之江实验室 异质异构集成光发射芯片

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116743259A (zh) * 2023-08-14 2023-09-12 之江实验室 异质异构集成光发射芯片
CN116743259B (zh) * 2023-08-14 2023-11-14 之江实验室 异质异构集成光发射芯片

Similar Documents

Publication Publication Date Title
US11418160B2 (en) Method and system for a feedback transimpedance amplifier with sub-40khz low-frequency cutoff
US9020001B2 (en) Tunable laser using III-V gain materials
US9791761B1 (en) Integrated chip
US7280721B2 (en) Multi-ring resonator implementation of optical spectrum reshaper for chirp managed laser technology
US20020085266A1 (en) Wavelength converter with an impedance matched electro-absorption modulator pair
CN112532325B (zh) 一种多维复用的光子太赫兹通信系统
CN113810118B (zh) 单体集成相干收发器
JP2010092904A (ja) 光モジュール
Marin et al. Integrated dynamic wavelength division multiplexed FBG sensor interrogator on a silicon photonic chip
CN115218932A (zh) 一种基于微环谐振器的波分复用波长解调系统
CN209102958U (zh) 光接收模组及光接收器件
Agashe et al. A monolithically integrated long-wavelength balanced photodiode using asymmetric twin-waveguide technology
Barton et al. 2.5-Gb/s error-free wavelength conversion using a monolithically integrated widely tunable SGDBR-SOA-MZ transmitter and integrated photodetector
Marin et al. Silicon photonic chip for dynamic wavelength division multiplexed FBG sensors interrogation
JP2014202913A (ja) 差動位相変調信号復調回路およびその復調方法
Raz et al. A single InP membrane disc cavity for both transmission and detection of 10Gb/s signals in on chip interconnects
JP3686580B2 (ja) 光電界センサ装置
CN112865913B (zh) 一种基于移动前传的放大饱和rsoa光源装置
CN114200581A (zh) 微波光子滤波器
CN114221202A (zh) 光电振荡器
Deng et al. Single-Chip Silicon Photonic Processor for Analog Optical and Microwave Signals
KR100479851B1 (ko) 광모듈의 능동정렬방법 및 그 장치
JPH0566334A (ja) 受光器モジユール
CN111399305A (zh) 一种用于光学相控阵芯片的接口、芯片和相位调制方法
Faralli et al. 25 Gbaud DQPSK receiver integrated on the hybrid silicon platform

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination