CN115217891A - 精密设备主动气磁隔振与阻尼防护转运装置 - Google Patents
精密设备主动气磁隔振与阻尼防护转运装置 Download PDFInfo
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- CN115217891A CN115217891A CN202210835004.6A CN202210835004A CN115217891A CN 115217891 A CN115217891 A CN 115217891A CN 202210835004 A CN202210835004 A CN 202210835004A CN 115217891 A CN115217891 A CN 115217891A
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- vibration isolation
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- 238000002955 isolation Methods 0.000 title claims abstract description 117
- 238000013016 damping Methods 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 26
- 230000000670 limiting effect Effects 0.000 claims abstract description 16
- 238000001514 detection method Methods 0.000 claims description 25
- 238000006073 displacement reaction Methods 0.000 claims description 17
- 230000021715 photosynthesis, light harvesting Effects 0.000 claims description 4
- 230000008569 process Effects 0.000 abstract description 21
- 230000009471 action Effects 0.000 abstract description 12
- 230000000694 effects Effects 0.000 description 17
- 238000005188 flotation Methods 0.000 description 8
- 238000007667 floating Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 238000007599 discharging Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/022—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using dampers and springs in combination
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60P—VEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS
- B60P7/00—Securing or covering of load on vehicles
- B60P7/06—Securing of load
- B60P7/16—Protecting against shocks
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/046—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means using combinations of springs of different kinds
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/063—Negative stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/066—Variable stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/0047—Measuring, indicating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/06—Fluid filling or discharging
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Electromagnetism (AREA)
- Transportation (AREA)
- General Physics & Mathematics (AREA)
- Vibration Prevention Devices (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210835004.6A CN115217891B (zh) | 2022-07-15 | 2022-07-15 | 精密设备主动气磁隔振与阻尼防护转运装置 |
Applications Claiming Priority (1)
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CN202210835004.6A CN115217891B (zh) | 2022-07-15 | 2022-07-15 | 精密设备主动气磁隔振与阻尼防护转运装置 |
Publications (2)
Publication Number | Publication Date |
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CN115217891A true CN115217891A (zh) | 2022-10-21 |
CN115217891B CN115217891B (zh) | 2023-11-03 |
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CN202210835004.6A Active CN115217891B (zh) | 2022-07-15 | 2022-07-15 | 精密设备主动气磁隔振与阻尼防护转运装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115217889A (zh) * | 2022-07-15 | 2022-10-21 | 哈尔滨工业大学 | 大型精密设备气磁隔振与主被动阻尼转运装置 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4877136A (en) * | 1987-04-17 | 1989-10-31 | Bridgestone Corporation | Vibration free container for transportation |
US5141201A (en) * | 1988-11-07 | 1992-08-25 | Bridgestone Corporation | Vibration damping apparatus for transportation |
JPH1082448A (ja) * | 1996-06-21 | 1998-03-31 | Ebara Corp | 除振装置 |
JP2002120722A (ja) * | 2000-08-10 | 2002-04-23 | Sumitomo Metal Ind Ltd | 鉄道車両用台車のストッパー装置及び鉄道車両用台車並びに輪重変動抑制方法 |
US20030090645A1 (en) * | 2001-11-13 | 2003-05-15 | Canon Kabushiki Kaisha | Vibration damping apparatus, control method therefor, exposure apparatus having the vibration damping apparatus, maintenance method therefor, semiconductor device fabrication method, and semiconductor fabrication factory |
JP2003185514A (ja) * | 2001-12-21 | 2003-07-03 | Lion Corp | 三次元負荷荷重測定装置 |
CN1696631A (zh) * | 2005-05-23 | 2005-11-16 | 苏州试验仪器总厂 | 三轴六自由度气动振动、运输颠簸、倾斜摇摆试验台 |
CN103047345A (zh) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | 双层气浮正交解耦与气浮球轴承角度解耦的电磁阻尼隔振器 |
CN112682461A (zh) * | 2021-01-05 | 2021-04-20 | 中国人民解放军海军工程大学 | 一种极低频气囊隔振系统 |
-
2022
- 2022-07-15 CN CN202210835004.6A patent/CN115217891B/zh active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4877136A (en) * | 1987-04-17 | 1989-10-31 | Bridgestone Corporation | Vibration free container for transportation |
US5141201A (en) * | 1988-11-07 | 1992-08-25 | Bridgestone Corporation | Vibration damping apparatus for transportation |
JPH1082448A (ja) * | 1996-06-21 | 1998-03-31 | Ebara Corp | 除振装置 |
JP2002120722A (ja) * | 2000-08-10 | 2002-04-23 | Sumitomo Metal Ind Ltd | 鉄道車両用台車のストッパー装置及び鉄道車両用台車並びに輪重変動抑制方法 |
US20030090645A1 (en) * | 2001-11-13 | 2003-05-15 | Canon Kabushiki Kaisha | Vibration damping apparatus, control method therefor, exposure apparatus having the vibration damping apparatus, maintenance method therefor, semiconductor device fabrication method, and semiconductor fabrication factory |
JP2003185514A (ja) * | 2001-12-21 | 2003-07-03 | Lion Corp | 三次元負荷荷重測定装置 |
CN1696631A (zh) * | 2005-05-23 | 2005-11-16 | 苏州试验仪器总厂 | 三轴六自由度气动振动、运输颠簸、倾斜摇摆试验台 |
CN103047345A (zh) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | 双层气浮正交解耦与气浮球轴承角度解耦的电磁阻尼隔振器 |
CN112682461A (zh) * | 2021-01-05 | 2021-04-20 | 中国人民解放军海军工程大学 | 一种极低频气囊隔振系统 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115217889A (zh) * | 2022-07-15 | 2022-10-21 | 哈尔滨工业大学 | 大型精密设备气磁隔振与主被动阻尼转运装置 |
CN115217889B (zh) * | 2022-07-15 | 2023-11-24 | 哈尔滨工业大学 | 大型精密设备气磁隔振与主被动阻尼转运装置 |
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CN115217891B (zh) | 2023-11-03 |
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Inventor after: Cheng Zhongyi Inventor after: Cui Wenwen Inventor after: Bian Xingyuan Inventor after: Tan Jiubin Inventor before: Cui Junning Inventor before: Cheng Zhongyi Inventor before: Cui Wenwen Inventor before: Bian Xingyuan Inventor before: Tan Jiubin |
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Inventor after: Cui Junning Inventor after: Cheng Zhongyi Inventor after: Cui Wenwen Inventor after: Bian Xingyuan Inventor after: Tan Jiubin Inventor before: Cui Junning Inventor before: Cheng Zhongyi Inventor before: Cui Wenwen Inventor before: Bian Xingyuan Inventor before: Tan Jiubin |
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