CN115198349A - Crucible and crucible side cooling assembly - Google Patents

Crucible and crucible side cooling assembly Download PDF

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Publication number
CN115198349A
CN115198349A CN202210895130.0A CN202210895130A CN115198349A CN 115198349 A CN115198349 A CN 115198349A CN 202210895130 A CN202210895130 A CN 202210895130A CN 115198349 A CN115198349 A CN 115198349A
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CN
China
Prior art keywords
crucible
group
cooling assembly
crucible side
seted
Prior art date
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Pending
Application number
CN202210895130.0A
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Chinese (zh)
Inventor
温洋
周小渊
苏波
马占东
贺俊杰
董长海
周志鹏
沙彦文
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Ningxia Zhongjing Semiconductor Materials Co ltd
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Ningxia Zhongjing Semiconductor Materials Co ltd
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Priority to CN202210895130.0A priority Critical patent/CN115198349A/en
Publication of CN115198349A publication Critical patent/CN115198349A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10Crucibles or containers for supporting the melt
    • C30B15/12Double crucible methods

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention provides a crucible and a crucible side cooling assembly, which comprises a crucible side, wherein the inner side of the crucible side is provided with a shallow groove, the inside of the shallow groove is filled with resin which is a silane resin layer, the bottom of the crucible side is coated with a wear-resistant layer, the side of the wear-resistant layer is provided with a high-temperature heat-insulating layer, the side walls of two sides of the top of the crucible side are obliquely arranged into a cylindrical shape, the shallow grooves are symmetrically arranged, the crucible is sleeved inside the crucible side, the outer side of the crucible is coated with a graphite powder layer, and the softening temperature of the crucible side is higher than that of the crucible.

Description

Crucible and crucible side cooling assembly
Technical Field
The invention belongs to the technical field of crucibles, and particularly relates to a crucible and a crucible side cooling assembly.
Background
At present, with the development of economy, photovoltaic power generation is increasingly regarded as one of green energy sources and is developed, and a monocrystalline silicon wafer is used as a basic material of photovoltaic power generation and has a wide market. At present, when a monocrystalline silicon wafer is prepared, a carbon crucible side is required to be used as a carrier for supporting a quartz crucible filled with a silicon material, so that crystal pulling work is carried out. Therefore, the carbon-carbon crucible side is used as a support carrier and becomes an essential part for preparing the monocrystalline silicon.
Among them, the "crucible combination" disclosed in "CN202121785718.8" is also an increasingly mature technology, which "includes a crucible support; the crucible side is arranged on the crucible support and is provided with a crucible mounting cavity which gradually increases from the crucible support to the direction far away from the crucible support; the crucible, set up in the crucible installation cavity, the lateral surface of crucible is for certainly the crucible holds in the palm to keeping away from the crucible holds in the palm the lateral surface that the direction crescent is held in the palm to the crucible, the lateral surface with the medial surface of crucible installation cavity sets up relatively, just the softening temperature of crucible group is greater than the softening temperature "of crucible, but this kind of crucible still has following defect in the in-service use process:
1) The graphite crucible side cooling time prolongs the thermal field temperature, the heat cannot be dissipated in time, the charging process is abnormal, and the separation between the crucible side and the crucible cannot be carried out, so that the cracking damage is caused.
2) The service life of the graphite crucible side is reduced.
Disclosure of Invention
The invention aims to provide a crucible and a crucible side cooling assembly, and aims to solve the problems that the existing graphite crucible side cooling time is prolonged, the temperature of a thermal field cannot be timely radiated, the charging process is abnormal, the crucible side and the crucible cannot be separated, the cracking damage is caused, and the service life of the graphite crucible side is reduced in the prior art.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a crucible and crucible group cooling module, includes the crucible group, the shallow slot has been seted up to the inboard of crucible group, the inside packing resin of shallow slot is the silane resin layer, the bottom of crucible group scribbles the wearing layer, the avris of wearing layer is provided with the high temperature insulating layer, the slope of the top both sides group wall of crucible group sets up to the tube-shape, the symmetry sets up between the shallow slot.
In order to facilitate taking of the crucible, the crucible is preferably sleeved inside the crucible side, a graphite powder layer is coated on the outer side of the crucible, and the softening temperature of the crucible side is higher than that of the crucible.
In order to facilitate cooling of the high-temperature graphite crucible side and reduce the temperature of a thermal field and avoid abnormal working hours, the bottom of the crucible side is preferably provided with a slot, a supporting block is connected inside the slot in a sliding manner, clamping blocks are arranged on two sides of the supporting block, a plurality of first radiating grooves are formed in the middle of the bottom of the supporting block, the bottom surface of the crucible is in contact fit with the inner surface of the crucible side, and a plurality of second radiating grooves are formed in two sides of the bottom end of the crucible side.
In order to enable smooth detachment and avoid adhesion, the bottom of the crucible side and the bottom of the crucible are preferably arc-shaped and are sealed and attached, and the top surface of the bottom end of the inner part of the crucible side is supported on the top surface of the bottom end of the crucible side.
In order to avoid extrusion cracking, preferably, the clearance between the outer side of the crucible and the inner side of the crucible side is D, and D is more than 0mm and less than or equal to 2.5mm.
In order to facilitate taking of the crucible, the bottom ends of the crucible and the crucible side are preferably inverted frustum-shaped cavities, an included angle between a generatrix of the inverted frustum and a central line of the inverted frustum is alpha, the alpha is more than or equal to 0 degree and less than or equal to 3 degrees, and the top of the crucible wall of the crucible is higher than the top of the crucible side wall.
In order to prevent cracking after thermal expansion and cold contraction, the crucible is preferably 7-25 mm in wall thickness, and the crucible side is preferably 8-30 mm in wall thickness.
In order to avoid cracking after high temperature, as a preferable mode of the invention, the crucible side is a carbon crucible side or a graphite crucible side; the crucible is a quartz crucible or a silicon carbide crucible.
In order to make it possible to satisfy the high temperature resistance of the side and the crucible, it is preferable as one of the present invention that the density of the carbon side and the graphite side is 1.0g/cm3 to 1.3g/cm3; the density of the quartz crucible or the silicon carbide crucible is 1.1g/cm 3-1.84 g/cm3.
Compared with the prior art, the invention has the beneficial effects that:
1) High temperature insulating layer through the crucible help is convenient for carry out thermal-insulated processing to the crucible under high temperature processing, plays the effect that must prevent that the crucible from taking place the inflation, avoids the crucible inflation can't break away from the inside of crucible help, and need cool off a period after the dismouting crucible, reduces the graphite crucible through the high temperature insulating layer that sets up simultaneously and helps the proportion increase cost rise the condition, guarantees the life of crucible help, avoids taking place the fracture, reduces the cost that damages simultaneously.
2) Through the fluting of crucible group bottom, be convenient for dispel the heat the cooling to the inside temperature of crucible group to be convenient for carry out cooling process to the crucible group, through the first radiating groove and the second radiating groove that set up, be convenient for cool off the reduction thermal field temperature to the high temperature graphite crucible group and avoid taking place unusual man-hour.
3) The clearance between the outer side of the crucible and the outer side of the crucible side is more than 0mm and less than or equal to 2.5mm, and the crucible expands after being heated and is attached to the crucible side, so that extrusion cracking is avoided; through the inclined included angle that alpha is less than or equal to 3 on crucible and the crucible group, break away from between crucible and the crucible group of being convenient for, contact cracking between avoiding, and the crucible wall top of crucible is higher than the top of crucible group wall, is convenient for take the crucible.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the crucible side structure of the present invention;
FIG. 3 is a schematic view of the crucible structure of the present invention.
In the figure: 1. a crucible edge; 11. shallow-trough; 12. a high-temperature heat insulation layer; 13. slotting; 14. a supporting block; 15. a clamping block; 16. a first heat sink; 17. a second heat sink; 2. a crucible.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides the following technical solutions: the utility model provides a crucible and crucible group cooling module, includes crucible group 1, and shallow slot 11 has been seted up to crucible group 1's inboard, and the resin is filled for silane resin layer 12 to shallow slot 11's inside, and the bottom of crucible group 1 scribbles the wearing layer, and the avris of wearing layer is provided with high temperature thermal-protective layer 12, and the slope of the top both sides group wall of crucible group 1 sets up to the tube-shape, and the symmetry sets up between the shallow slot 11.
During the specific use, quartz crucible after the high temperature heating cools off behind the room temperature, can generate heat and expand shrinkage's deformation, cause the crucible can't get back to initial condition, can cause the inflation extrusion to the crucible group, make easy block between crucible group 1 and the crucible 2, be not convenient for separate crucible group 1 and crucible 2, need beat crucible group 1 through manual use tools, make beat between crucible group 1 and the crucible 2 and rock, cause the damage of crucible group 1 to break easily at the in-process of beating, crucible 2 can only be taken off at last, then this crucible group 1's inside is provided with shallow slot 11, and it has the silane resin layer to fill in shallow slot 11's inside, protect crucible 2 when breaking away from the crucible group, be convenient for carry out thermal-insulated processing under high temperature processing to crucible 2 through high temperature thermal-protective coating 12 on crucible group 1 simultaneously, play the certain effect that prevents crucible 2 from taking place the inflation, avoid crucible group 2 inflation can's inside to break away from the crucible group 1, and need cool off for a period after 2, reduce the high temperature thermal-insulating layer 12 through the setting simultaneously, the increase cost of crucible group increases the condition that the cost of cracking, the cost of avoiding crucible group 1 to reduce simultaneously, the life-time of the cost of avoiding the crucible group to reduce, the cost of the low loss of taking place, the crucible group of taking place, the life-load.
The crucible 2 is sleeved inside the crucible side 1, a graphite powder layer is coated on the outer side of the crucible 2, and the softening temperature of the crucible side 1 is higher than that of the crucible 2.
During the specific use, the softening temperature through crucible group 1 is greater than the softening temperature of crucible 2 to 2 thermal expansions of crucible of being convenient for take place to warp, and 1 thermal expansions of crucible group warp, and convenient expansion avoids carrying out the block to crucible 2, and the convenience is taken crucible 1.
Fluting 13 has been seted up to the bottom of crucible group 1, and fluting 13 inside sliding connection has supporting shoe 14, and the both sides block 15 of supporting shoe 14, supporting shoe 14 bottom are located the middle part and have seted up the first radiating groove 16 of a plurality of, and the bottom surface of crucible 2 cooperates with the inside surface contact of crucible group 1, and a plurality of second radiating groove 17 has been seted up to the bottom both sides of crucible group 1.
During the specific use, through the fluting 13 of the 1 bottom of crucible group, the supporting shoe 14 inside fluting 13 of being convenient for slides and takes out for fluting 13 can dispel the heat to the temperature of 1 inside of crucible group and cool down, thereby is convenient for carry out cooling treatment to crucible group 1, through the first radiating groove 16 and the second radiating groove 17 that set up, is convenient for cool off the reduction thermal field temperature to high temperature graphite crucible group and avoids taking place unusual man-hour.
The bottom of the crucible side 1 and the bottom of the crucible side 2 are arc-shaped and are sealed and attached, and the top surface of the bottom end inside the crucible side 1 is supported on the top surface of the bottom end of the crucible side 1.
During the specific use, through crucible 2 and 1 bottom arc limit of crucible group, the laminating of crucible 2 and crucible group 1 of being convenient for to after the high temperature heating of being convenient for, can break away from smoothly and avoid the adhesion.
The clearance between the outer side of the crucible 2 and the inner side of the crucible side 1, the clearance between the outer side of the crucible 2 and the inner side of the crucible side 1 is D, and D is more than 0mm and less than or equal to 2.5mm.
When the crucible is used specifically, the gap between the outer side of the crucible 2 and the outer side of the crucible edge 1 is more than 0mm and less than or equal to 2.5mm, the crucible 2 expands after being heated and is attached to the crucible edge 1, and extrusion cracking is avoided.
The bottom of crucible 2 and crucible group 1 is back taper platform chamber, and the generating line of back taper platform is alpha rather than the contained angle of central line, and 0 is less than or equal to alpha and is less than or equal to 3, and the crucible wall top of crucible 2 is higher than the top of crucible group 1 group wall.
During the specific use, through the slope contained angle that 0 is greater than or equal to alpha and is less than or equal to 3 on crucible 2 and the crucible group 1, break away from between crucible 2 and the crucible group 1 of being convenient for, contact cracking between avoiding, and the crucible wall top of crucible 2 is higher than the top of crucible group 1 group wall, is convenient for take crucible 2.
The wall thickness of the crucible 2 is 7 mm-25 mm, and the wall thickness of the crucible side 1 is 8 mm-30 mm.
When the crucible is used specifically, the crucible 2 and the crucible side 1 are respectively 7-25 mm thick and 8-30 mm thick, so that cracking after thermal expansion and cold contraction is prevented.
The crucible side 1 is a carbon crucible side or a graphite crucible side; the crucible 2 is a quartz crucible or a silicon carbide crucible.
When the crucible is used specifically, the service lives of the crucible side 1 and the crucible 2 are prolonged, and cracking after high temperature is avoided.
The density of the carbon crucible side and the graphite crucible side is 1.0g/cm 3-1.3 g/cm3; the density of the quartz crucible or the silicon carbide crucible is 1.1g/cm3 to 1.84g/cm3.
When the crucible edge is used specifically, the density range is adopted, so that the crucible edge 2 can be ensured to have enough strength, and the high temperature resistance of the crucible edge 1 and the crucible edge 2 can be met.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (9)

1. The utility model provides a crucible and crucible group cooling module, includes crucible group (1), its characterized in that, shallow slot (11) have been seted up to the inboard of crucible group (1), the inside packing resin of shallow slot (11) is silane resin layer (12), the bottom of crucible group (1) scribbles the wearing layer, the avris of wearing layer is provided with high temperature insulating layer (12), the slope of the top both sides group wall of crucible group (1) sets up to the tube-shape, the symmetry sets up between shallow slot (11).
2. The crucible and crucible side cooling assembly of claim 1, wherein: the crucible side structure is characterized in that a crucible (2) is sleeved inside the crucible side (1), a graphite powder layer is coated on the outer side of the crucible (2), and the softening temperature of the crucible side (1) is higher than that of the crucible (2).
3. The crucible and crucible side cooling assembly of claim 1, wherein: fluting (13) has been seted up to the bottom of crucible group (1), fluting (13) inside sliding connection has supporting shoe (14), the both sides block piece (15) of supporting shoe (14), supporting shoe (14) bottom is located the middle part and has seted up first radiating groove of a plurality of (16), the bottom surface of crucible (2) cooperates with the inside surface contact of crucible group (1), a plurality of second radiating groove (17) has been seted up to the bottom both sides of crucible group (1).
4. The crucible and crucible side cooling assembly of claim 1, wherein: the crucible side (1) bottom and the crucible (2) bottom are arc-shaped, and are sealed, sealed and attached, and the top surface of the internal bottom end of the crucible side (1) is supported on the top surface of the bottom end of the crucible side (1).
5. The crucible and crucible edge cooling assembly of claim 1, wherein: the crucible is characterized in that a gap is formed between the outer side of the crucible (2) and the inner side of the crucible side (1), a gap between the outer side of the crucible (2) and the inner side of the crucible side (1) is D, and D is larger than 0mm and smaller than or equal to 2.5mm.
6. The crucible and crucible side cooling assembly of claim 1, wherein: the crucible comprises a crucible body (2) and a crucible side (1), wherein the bottom ends of the crucible body (2) and the crucible side (1) are inverted frustum-shaped cavities, the included angle between a bus of the inverted frustum and the central line of the inverted frustum is alpha, alpha is larger than or equal to 0 degree and smaller than or equal to 3 degrees, and the top of the crucible wall of the crucible body (2) is higher than the top of the side wall of the crucible side (1).
7. The crucible and crucible edge cooling assembly of claim 1, wherein: the wall thickness of the crucible (2) is 7 mm-25 mm, and the wall thickness of the crucible side (1) is 8 mm-30 mm.
8. The crucible and crucible side cooling assembly of claim 1, wherein: the crucible side (1) is a carbon crucible side or a graphite crucible side; the crucible (2) is a quartz crucible or a silicon carbide crucible.
9. The crucible and crucible side cooling assembly of claim 8, wherein: the density of the carbon crucible side and the graphite crucible side is 1.0g/cm 3-1.3 g/cm3; the density of the quartz crucible or the silicon carbide crucible is 1.1g/cm 3-1.84 g/cm3.
CN202210895130.0A 2022-07-28 2022-07-28 Crucible and crucible side cooling assembly Pending CN115198349A (en)

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CN202210895130.0A CN115198349A (en) 2022-07-28 2022-07-28 Crucible and crucible side cooling assembly

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080056406A (en) * 2006-12-18 2008-06-23 주식회사 실트론 Apparatus of manufacturing silicon single crystal ingot
CN202187084U (en) * 2011-08-04 2012-04-11 湖南金博复合材料科技有限公司 Carbon-carbon composite material crucible capable of conveniently cleaning quartz residual body in crucible
CN107759189A (en) * 2016-08-22 2018-03-06 银川隆基硅材料有限公司 Thermostable heat-isolating coating and the method for improving single crystal growing furnace crucible side service life
CN216006085U (en) * 2021-08-02 2022-03-11 隆基绿能科技股份有限公司 Crucible combination
CN216614931U (en) * 2021-11-01 2022-05-27 内蒙古中环协鑫光伏材料有限公司 Carbon-carbon composite material crucible side for silicon crystal growth

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080056406A (en) * 2006-12-18 2008-06-23 주식회사 실트론 Apparatus of manufacturing silicon single crystal ingot
CN202187084U (en) * 2011-08-04 2012-04-11 湖南金博复合材料科技有限公司 Carbon-carbon composite material crucible capable of conveniently cleaning quartz residual body in crucible
CN107759189A (en) * 2016-08-22 2018-03-06 银川隆基硅材料有限公司 Thermostable heat-isolating coating and the method for improving single crystal growing furnace crucible side service life
CN216006085U (en) * 2021-08-02 2022-03-11 隆基绿能科技股份有限公司 Crucible combination
CN216614931U (en) * 2021-11-01 2022-05-27 内蒙古中环协鑫光伏材料有限公司 Carbon-carbon composite material crucible side for silicon crystal growth

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