CN115195264A - Stacking workbench and stacking machine - Google Patents
Stacking workbench and stacking machine Download PDFInfo
- Publication number
- CN115195264A CN115195264A CN202210918195.2A CN202210918195A CN115195264A CN 115195264 A CN115195264 A CN 115195264A CN 202210918195 A CN202210918195 A CN 202210918195A CN 115195264 A CN115195264 A CN 115195264A
- Authority
- CN
- China
- Prior art keywords
- plate
- heating plate
- adjustment
- backup pad
- laminating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 64
- 238000010030 laminating Methods 0.000 claims description 41
- 238000001816 cooling Methods 0.000 claims description 15
- 239000000919 ceramic Substances 0.000 abstract description 17
- 239000012528 membrane Substances 0.000 abstract description 13
- 238000000034 method Methods 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000007493 shaping process Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 abstract 1
- 238000003825 pressing Methods 0.000 description 19
- 238000009413 insulation Methods 0.000 description 10
- 230000009286 beneficial effect Effects 0.000 description 8
- 238000003475 lamination Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000011265 semifinished product Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/06—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to a semiconductor processing technology field particularly, relates to a fold and press workstation and fold machine, include from the top down bearing plate, backup pad and the bearing block of superpose in proper order the bottom of bearing plate is provided with the boss the middle part of backup pad be provided with the corresponding through-hole of boss, the backup pad be used for with the guider cooperation the bearing plate with be provided with elastic support spare between the backup pad, so that in vertical direction the bearing plate with be formed with first clearance between the backup pad, and in vertical direction the boss with be formed with the second clearance between the bearing block, the size in first clearance is not less than the size in second clearance. The utility model provides a fold and press workstation and fold machine is provided to the in-process that carries out ceramic membrane stack shaping to folding processing position, guider can bear great work load, often can damage guider's technical problem.
Description
Technical Field
The application relates to the technical field of semiconductor processing, in particular to a laminating workbench and a laminating machine.
Background
In order to meet the lamination processing requirements of the laminated electronic component, the pretreated ceramic membrane needs to be transferred to a lamination processing position, and the laminated finished product (or semi-finished product) is moved out of the function, and the lamination workbench of the existing laminating machine is used for realizing the function. The laminating workbench receives the pretreated ceramic diaphragm at the feeding position, then the laminating workbench moves to the laminating processing position on the guide device, so that the pretreated ceramic diaphragm is laminated and molded under the action of a large load, and finally the semi-finished product (or the finished product) is transferred to the feeding position (or the blanking position). However, in the process of laminating the ceramic membrane at the laminating position, the guide device may bear a large working load, and the guide device may be damaged.
Disclosure of Invention
The utility model provides a fold and press workstation and fold machine is provided to the in-process that carries out ceramic membrane stack shaping to fold to add to press the processing position, and guider can bear great work load, often can damage guider's technical problem.
In order to achieve the purpose, the following technical scheme is adopted in the application:
an aspect of the application provides a fold and press workstation, includes bearing plate, backup pad and the bearing piece of superpose from the top down in proper order the bottom of bearing plate is provided with the boss the middle part of backup pad be provided with the corresponding through-hole of boss, the backup pad be used for with the guider cooperation the bearing plate with be provided with elastic support spare between the backup pad, so that in the vertical direction the bearing plate with be formed with first clearance between the backup pad, and in the vertical direction the boss with be formed with the second clearance between the bearing piece, the size in first clearance is not less than the size in second clearance.
Optionally, a guide sleeve is mounted on the pressure bearing plate, and a guide shaft in sliding fit with the guide sleeve is formed on the support plate.
The technical scheme has the beneficial effects that: through the cooperation of guiding axle and uide bushing, avoid bearing plate to take place the skew in the removal of vertical direction.
Optionally, the elastic supporting member is a disk spring, a mounting groove is formed in the top surface of the supporting plate, and the disk spring is mounted in the mounting groove.
Optionally, the heating plate and the lower pressing die are further included, the lower pressing die is located above the heating plate, the heating plate is located above the pressure bearing plate, and the heating plate is used for heating the lower pressing die.
The technical scheme has the beneficial effects that: the heating of the lower die by the heating plate can lead the ceramic membrane to be laminated under the heating condition.
Optionally, the heating plate further comprises a heat insulation plate, and the heat insulation plate is mounted on the bottom surface of the heating plate.
The technical scheme has the beneficial effects that: the heat insulation plate is arranged, so that heat is not easy to dissipate from all parts below.
Optionally, the heating plate further comprises a cooling plate, the cooling plate is fixed to the bottom surface of the heat insulation plate, and the lower pressing die, the heating plate, the heat insulation plate, the cooling plate and the pressure bearing plate are sequentially stacked from top to bottom.
The technical scheme has the beneficial effects that: the cooling plate absorbs the heat transferred by the heating plate, so that the heat is further not easy to influence the lower part.
Optionally, the heating device further comprises an adjusting plate, the lower pressing die, the adjusting plate and the heating plate are sequentially stacked, the lower pressing die is fixed on the adjusting plate, an adjusting device matched with the heating plate is installed on the bottom surface of the adjusting plate, and the adjusting device is used for adjusting the relative position between the heating plate and the adjusting plate.
The technical scheme has the beneficial effects that: the adjusting device can adjust the positions of the lower pressing die and the ceramic membrane on the lower pressing die by adjusting the relative position between the heating plate and the adjusting plate.
Optionally, adjusting device is including adjusting seat and adjusting screw, adjust the seat and be fixed in the adjusting plate adjust the seat and go up to be formed with the screw hole, adjusting screw with the screw hole cooperation open flutedly on the hot plate, in the first direction the notch of recess towards the outside of hot plate, adjusting device is located in the recess in the first direction adjusting screw with the hot plate butt in the first direction the both sides of hot plate all are provided with the recess with adjusting device, the first direction is on a parallel with the horizontal plane.
The technical scheme has the beneficial effects that: therefore, the adjusting screw acts on the heating plate through the position of the adjusting screw relative to the adjusting seat, and further the adjusting plate is pushed to move relative to the heating plate, so that the position of the lower pressing die is adjusted.
Optionally, the heating plate comprises four adjusting devices, two grooves are formed in two sides of the heating plate in the first direction, and the adjusting devices are correspondingly arranged in the grooves one to one.
The technical scheme has the beneficial effects that: thus, the four adjusting devices are arranged diagonally in pairs, the two adjusting devices on the same diagonal line enable the screw to move in the direction away from the heating plate, and the two adjusting devices on the other diagonal line enable the screw to move in the direction of extruding the heating plate, so that the adjusting plate can rotate relative to the heating plate to a certain extent, and the positions of the lower pressing die and the ceramic membrane on the lower pressing die are adjusted in the circumferential direction; of course, it is also possible to adjust the position of the lower die and the ceramic diaphragm on the lower die in the first direction.
Another aspect of the application provides a laminating machine, which comprises the laminating workbench provided by the embodiment of the application.
The technical scheme provided by the application can achieve the following beneficial effects:
the application provides a fold and press workstation and fold machine, during the use, move to fold and press the processing position under guider's guide, at the fashioned in-process of ceramic diaphragm fold under the heavy load effect of preliminary treatment, the pressure-bearing plate moves down constantly relative backup pad and pressure-bearing piece, make the boss move down constantly relative backup pad and pressure-bearing piece, first clearance and second clearance all constantly reduce, when the size of second clearance reduces to zero, namely boss and pressure-bearing piece contact, the size of first clearance is zero or not changing, the pressure-bearing piece bears most load, the load that guider bore no longer changes, like this, can be when folding workstation production, through the size control of control first clearance and the size control maximum load that guider bore, and then control this maximum load in guider's allowable load, make guider.
Additional features of the present application and advantages thereof will be set forth in the description which follows, or may be learned by practice of the present application.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings used in the description of the embodiments will be briefly described below. It should be apparent that the drawings in the following description are of some embodiments of the application and that other drawings may be derived from those drawings by a person skilled in the art without inventive effort.
FIG. 1 is a schematic front view of an embodiment of a laminating workbench according to an embodiment of the present disclosure;
FIG. 2 is a schematic partial cross-sectional view of one embodiment of a laminating station provided in an embodiment of the present application;
FIG. 3 is a schematic right-view structural diagram of an embodiment of a laminating workbench provided by an embodiment of the present application;
fig. 4 is a schematic perspective view of an embodiment of a bearing plate according to an embodiment of the present disclosure;
FIG. 5 is a schematic perspective view of an embodiment of a support plate provided in an example of the present application;
FIG. 6 is a schematic top view of a portion of one embodiment of a laminating station provided in an embodiment of the present application;
fig. 7 is a schematic perspective view of an embodiment of a cooling plate according to an embodiment of the present disclosure.
Reference numerals:
1, insulating boards; 2-heating the plate;
3-heating a tube; 4-lower pressing die;
5-a pressure bearing block; 6-a second gap;
7-a first gap; 8-a pressure bearing plate;
9-a cooling plate; 10-an adjusting plate;
11-a support plate; 12-a boss;
13-an adjusting seat; 14-an adjusting screw;
15-a resilient support; 16-a guide sleeve;
17-a guide shaft; 18-a via hole;
19-mounting grooves; 20-channels;
21-groove.
Detailed Description
The technical solutions of the present application will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
As shown in fig. 1 to 7, one aspect of the present application provides a laminating table including a pressure-bearing plate 8, a support plate 11 and a pressure-bearing block 5 stacked in this order from top to bottom, a boss 12 is provided at the bottom of the pressure-bearing plate 8, a through hole 18 corresponding to the boss 12 is provided at the middle of the support plate 11, the support plate 11 is used for cooperating with a guide device, an elastic support 15 is provided between the pressure-bearing plate 8 and the support plate 11, so that a first gap 7 is formed between the pressure-bearing plate 8 and the support plate 11 in the vertical direction, and a second gap 6 is formed between the boss 12 and the pressure-bearing block 5 in the vertical direction, the size of the first gap 7 is not smaller than the size of the second gap 6.
When the laminating workbench provided by the embodiment of the application is used, the laminating workbench is moved to a laminating processing position under the guide of the guide device, in the laminating and forming process of the pretreated ceramic membrane under the action of a large load, the pressure-bearing plate 8 continuously moves downwards relative to the support plate 11 and the pressure-bearing block 5, so that the boss 12 continuously moves downwards relative to the support plate 11 and the pressure-bearing block 5, the first gap 7 and the second gap 6 are continuously reduced, when the size of the second gap 6 is reduced to zero, namely the boss 12 is contacted with the pressure-bearing block 5, the size of the first gap 7 is zero or is not changed, the pressure-bearing block 5 bears most of load, and the load borne by the guide device is not changed any more, so that when the laminating workbench is produced, the maximum load borne by the guide device is controlled by controlling the size of the first gap 7 and the size of the second gap 6, and the maximum load is controlled within the allowable load of the guide device, so that the guide device is enabled.
Optionally, a guide sleeve is installed on the pressure bearing plate 8, and a guide shaft 17 slidably fitted with the guide sleeve is formed on the support plate 11. The deflection of the bearing plate 8 in the vertical direction is avoided by the cooperation of the guide shaft 17 with the guide sleeve.
Optionally, the elastic support 15 is a disk spring, and an installation groove 19 is formed in the top surface of the support plate 11, and the disk spring is installed in the installation groove 19.
Optionally, the pressure-superposed workbench provided by the embodiment of the application further comprises a heating plate 2 and a lower pressing die 4, wherein the lower pressing die 4 is located above the heating plate 2, the heating plate 2 is located above the pressure bearing plate 8, and the heating plate 2 is used for heating the lower pressing die 4. The heating of the lower die 4 by the heating plate 2 can lead the ceramic membrane to be laminated under the heating condition. A heating pipe 3 is arranged on the heating plate 2.
Optionally, the laminating workbench provided in the embodiment of the present application further includes a heat insulation plate 1, and the heat insulation plate 1 is installed on the bottom surface of the heating plate 2. The heat insulation plate 1 is arranged, so that heat is not easy to dissipate from all parts below.
Optionally, the laminating workbench provided in the embodiment of the present application further includes a cooling plate 9, the cooling plate 9 is fixed to the bottom surface of the heat insulation plate 1, and from top to bottom the lower pressing die 4, the heating plate 2, the heat insulation plate 1, the cooling plate 9 and the pressure bearing plate 8 are sequentially stacked. The heat transferred from the heating panel 2 is absorbed by the cooling panel 9, and the heat is further less likely to affect the components below. In the present embodiment, the cooling plate 9 is preferably a compressed air cooling plate 9, and a passage 20 through which compressed air flows is provided in the cooling plate 9.
Optionally, the fold and press workstation that this application embodiment provided still includes adjusting plate 10, lower die 4 adjusting plate 10 with heating plate 2 superposes in proper order, lower die 4 is fixed in adjusting plate 10 install on the bottom surface of adjusting plate 10 with heating plate 2 complex adjusting device, adjusting device is used for the adjustment heating plate 2 with relative position between the adjusting plate 10. The adjusting device can adjust the positions of the lower die 4 and the ceramic membrane on the lower die 4 by adjusting the relative position between the heating plate 2 and the adjusting plate 10.
Optionally, adjusting device includes adjusting seat 13 and adjusting screw 14, adjusting seat 13 is fixed in adjusting plate 10 adjust seat 13 is last to be formed with the screw hole, adjusting screw 14 with the screw hole cooperation it has recess 21 to open on hot plate 2, in the first direction the notch of recess 21 faces the outside of hot plate 2, adjusting device is located in recess 21 in the first direction adjusting screw 14 with hot plate 2 butt in the first direction the both sides of hot plate 2 all are provided with recess 21 with adjusting device, the first direction is on a parallel with the horizontal plane. Therefore, the adjusting screw 14 acts on the heating plate 2 through the position of the adjusting screw 14 relative to the adjusting seat 13, and further pushes the adjusting plate 10 to move relative to the heating plate 2, so as to realize the adjustment of the position of the lower pressing die 4.
Optionally, the pressure-superposed workbench provided by the embodiment of the present application includes four adjusting devices, two grooves 21 are respectively provided on two sides of the heating plate 2 in the first direction, and each adjusting device is correspondingly provided in each groove 21. Thus, the four adjusting devices are arranged diagonally in pairs, the two adjusting devices on the same diagonal line enable the screw to move in the direction away from the heating plate 2, and the two adjusting devices on the other diagonal line enable the screw to move in the direction of extruding the heating plate 2, so that the adjusting plate 10 can rotate relative to the heating plate 2 to a certain extent, and the positions of the ceramic membranes on the lower pressing die 4 and the lower pressing die 4 are adjusted in the circumferential direction; of course, the positions of the lower die 4 and the ceramic membrane on the lower die 4 may also be adjusted in the first direction.
Another aspect of the application provides a laminating machine, which comprises the laminating workbench provided by the embodiment of the application.
When the laminating machine provided by the embodiment of the application is used, the laminating workbench provided by the embodiment of the application is moved to a laminating processing position under the guide of the guide device, in the laminating and forming process of the pretreated ceramic membrane under the action of a large load, the bearing plate 8 continuously moves downwards relative to the supporting plate and the bearing block 5, so that the boss 12 continuously moves downwards relative to the supporting plate and the bearing block 5, the first gap 7 and the second gap 6 are continuously reduced, when the size of the second gap 6 is reduced to zero, namely the boss 12 is in contact with the bearing block 5, the size of the first gap 7 is zero or is not changed, the bearing block 5 bears most of load, and the load borne by the guide device is not changed any more, so that when the laminating workbench is produced, the maximum load borne by the guide device is controlled by controlling the size of the first gap 7 and the size of the second gap 6, and the maximum load borne by the guide device is controlled in the allowable load of the guide device, and the guide device is enabled.
Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present application.
Claims (10)
1. Fold and press workstation, its characterized in that includes bearing plate, backup pad and the bearing block that from the top down superposes in proper order the bottom of bearing plate is provided with the boss the middle part of backup pad be provided with the corresponding through-hole of boss, the backup pad be used for with the guider cooperation the bearing plate with be provided with elastic support spare between the backup pad, so that in the vertical direction the bearing plate with be formed with first clearance between the backup pad, and in the vertical direction the boss with be formed with the second clearance between the bearing block, the size in first clearance is not less than the size in second clearance.
2. The laminating table of claim 1, wherein a guide sleeve is mounted on said pressure bearing plate, and a guide shaft slidably fitted with said guide sleeve is formed on said support plate.
3. The laminating table according to claim 1, wherein said resilient support members are disc springs, and mounting slots are provided on the top surface of said support plate, said disc springs being mounted in said mounting slots.
4. The laminating station of claim 1, further comprising a heating plate and a lower die, said lower die being positioned above said heating plate, said heating plate being positioned above said pressure bearing plate, said heating plate being adapted to heat said lower die.
5. The laminating table of claim 4, further comprising a heat shield mounted to the bottom surface of said heating plate.
6. The laminating table according to claim 5, further comprising a cooling plate fixed to a bottom surface of the heat insulating plate, wherein the lower die, the heating plate, the heat insulating plate, the cooling plate and the pressure bearing plate are stacked in this order from top to bottom.
7. The laminating table according to claim 4, further comprising an adjustment plate, said lower die, said adjustment plate and said heating plate being stacked in sequence, said lower die being fixed to said adjustment plate, an adjustment means cooperating with said heating plate being mounted on a bottom surface of said adjustment plate, said adjustment means being adapted to adjust a relative position between said heating plate and said adjustment plate.
8. The laminating table of claim 7, wherein said adjustment means includes an adjustment seat fixed to said adjustment plate and having a threaded hole formed therein, and an adjustment screw engaged with said threaded hole, and wherein said heating plate has a recess formed therein, a notch of said recess facing an outer side of said heating plate in a first direction, said adjustment means being located in said recess, said adjustment screw abutting said heating plate in said first direction, said recess and said adjustment means being provided on both sides of said heating plate in said first direction, said first direction being parallel to a horizontal plane.
9. The laminating station of claim 8, including four of said adjustment means, two of said recesses being provided on either side of said heating plate in said first direction, each of said adjustment means being provided in a one-to-one correspondence with each of said recesses.
10. Laminating machine, characterized in that it comprises a laminating station according to any one of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210918195.2A CN115195264B (en) | 2022-08-01 | 2022-08-01 | Laminating workbench and laminating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210918195.2A CN115195264B (en) | 2022-08-01 | 2022-08-01 | Laminating workbench and laminating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115195264A true CN115195264A (en) | 2022-10-18 |
| CN115195264B CN115195264B (en) | 2024-01-19 |
Family
ID=83585108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210918195.2A Active CN115195264B (en) | 2022-08-01 | 2022-08-01 | Laminating workbench and laminating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115195264B (en) |
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| TW201030890A (en) * | 2008-11-14 | 2010-08-16 | Tokyo Electron Ltd | Bonding apparatus and bonding method |
| CN102709203A (en) * | 2011-03-28 | 2012-10-03 | 山田尖端科技株式会社 | Bonding apparatus and bonding method |
| WO2013168611A1 (en) * | 2012-05-11 | 2013-11-14 | 東京応化工業株式会社 | Adhering apparatus and adhering method |
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| CN106493806A (en) * | 2016-12-27 | 2017-03-15 | 郑州艾莫弗信息技术有限公司 | A kind of continuous-stable furniture board hot-press equipment |
| CN209312783U (en) * | 2018-08-22 | 2019-08-27 | 浙江隆基乐叶光伏科技有限公司 | A kind of stacking table device |
| CN210066854U (en) * | 2019-05-20 | 2020-02-14 | 天津市建桓地基基础检测有限公司 | Combined bearing plate for composite foundation load test |
| CN211591025U (en) * | 2020-01-06 | 2020-09-29 | 青岛科兴模塑有限公司 | But automotive interior stamping die of automatic collection material |
| CN112466805A (en) * | 2020-11-13 | 2021-03-09 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning equipment and bearing device thereof |
-
2022
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2692844Y (en) * | 2004-01-19 | 2005-04-13 | 温大明 | LED chip crimping mechanism |
| TW201030890A (en) * | 2008-11-14 | 2010-08-16 | Tokyo Electron Ltd | Bonding apparatus and bonding method |
| CN102709203A (en) * | 2011-03-28 | 2012-10-03 | 山田尖端科技株式会社 | Bonding apparatus and bonding method |
| WO2013168611A1 (en) * | 2012-05-11 | 2013-11-14 | 東京応化工業株式会社 | Adhering apparatus and adhering method |
| CN205057435U (en) * | 2015-05-28 | 2016-03-02 | 德清德曼汽车零部件有限公司 | Bearing inner race pressure equipment mould with shock -absorbing structure |
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| CN210066854U (en) * | 2019-05-20 | 2020-02-14 | 天津市建桓地基基础检测有限公司 | Combined bearing plate for composite foundation load test |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN115195264B (en) | 2024-01-19 |
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