CN115182036B

CN115182036B - Current stabilizer and crystal pulling furnace

Info

Publication number: CN115182036B
Application number: CN202210824125.0A
Authority: CN
Inventors: 赵亮; 吕国强; 马文会; 门长友
Original assignee: Qujing Sunshine New Energy Co ltd; Kunming University of Science and Technology
Current assignee: Qujing Sunshine New Energy Co ltd; Kunming University of Science and Technology
Priority date: 2022-07-13
Filing date: 2022-07-13
Publication date: 2023-04-18
Anticipated expiration: 2042-07-13
Also published as: CN115182036A

Abstract

The invention discloses a flow stabilizer which comprises a flow stabilizer body, wherein the flow stabilizer body comprises a first flow stabilizing piece and a second flow stabilizing piece, the first flow stabilizing piece is positioned above the second flow stabilizing piece, the first flow stabilizing piece and the second flow stabilizing piece are both arranged in a cooling bin, and a plurality of flow stabilizing holes are formed in the second flow stabilizing piece. The flow stabilizer body is arranged in the cooling bin, and the inert gas entering from the inert gas inlet on the cooling bin is subjected to flow stabilization, so that the problem that the quality of the crystal bar is influenced because the crystal bar is slightly vibrated under the action of air flow after the inert gas for cooling the crystal bar enters the crystal bar due to the fact that the flow stabilizer is not arranged in the conventional crystal pulling furnace is solved.

Description

Current stabilizer and crystal pulling furnace

Technical Field

The invention relates to the technical field of semiconductors, in particular to a current stabilizer and a crystal pulling furnace.

Background

Monocrystalline silicon is today the base material for most semiconductor components, the vast majority of which is produced by the czochralski single crystal manufacturing process. The method comprises the steps of placing a polycrystalline silicon material in a quartz crucible to melt, contacting a seed crystal with a melt during the Czochralski single crystal pulling process, cooling and crystallizing the melt at a solid-liquid interface along the seed crystal, slowly pulling out the seed crystal to grow, amplifying the growth diameter of the crystal until the growth diameter reaches a target diameter by reducing the pulling speed or the melt temperature after necking, controlling the pulling speed and the melt temperature to enable the crystal to grow into an equal-diameter growth stage after shoulder rotation, and finally gradually reducing the diameter of a crystal growth surface to form a tail cone by increasing the pulling speed and the melt temperature until the crystal leaves the surface of the melt, thereby finishing the growth of a crystal rod.

However, no current stabilizer is arranged in the conventional crystal pulling furnace, and after inert gas for cooling the crystal bar enters the furnace, the crystal bar is slightly vibrated under the action of airflow to influence the quality of the crystal bar.

Disclosure of Invention

Aiming at the defects of the prior art, the invention provides a flow stabilizer and a crystal pulling furnace, and solves the problem that the quality of a crystal bar is influenced because the crystal bar is slightly vibrated under the action of airflow after inert gas for cooling the crystal bar enters the crystal pulling furnace provided by the background art and provided by the invention and without the flow stabilizer.

In order to achieve the purpose, the invention is realized by the following technical scheme: a flow stabilizer comprises a flow stabilizer body, wherein the flow stabilizer body comprises a first flow stabilizing piece and a second flow stabilizing piece, the first flow stabilizing piece is positioned above the second flow stabilizing piece, the first flow stabilizing piece and the second flow stabilizing piece are both arranged in a cooling bin, and a plurality of flow stabilizing holes are formed in the second flow stabilizing piece.

Preferably, first stationary flow spare includes piece, adjusting device down, and the piece is all fixed connection in the cooling chamber inner wall for the piece, and adjusting device is located between piece, the piece down, all is provided with a plurality of stationary flow holes on piece, the piece down.

Preferably, a power bin is arranged above the cooling bin, and a driving assembly is arranged in the power bin.

Preferably, the driving assembly comprises a motor, a first gear, a second gear, a limiting baffle and a crystal pulling rod;

the motor is fixedly connected to the lower surface of the power bin, the output end of the motor penetrates through the limiting baffles positioned below the motor, the output end of the motor is fixedly connected with a first gear, the first gear is meshed with a second gear, the second gear is positioned between the two limiting baffles, the second gear is sleeved outside the crystal pulling rod, the outer surface of the crystal pulling rod is provided with threads, and the second gear is in threaded connection with the crystal pulling rod.

Preferably, the lower end of the crystal pulling rod penetrates through the upper wall of the cooling bin, a limiting clamping block is arranged at the joint of the cooling bin and the crystal pulling rod, the limiting clamping block is embedded in the crystal pulling rod, and the limiting clamping block is connected with the crystal pulling rod in a sliding mode.

Preferably, the adjusting device comprises a driving gear, a rotating shaft, a first limiting plate, a second limiting plate and an adjusting piece;

the second limiting plate is fixedly connected to the inner side wall of the cooling bin, the first limiting plate is arranged on the lower side of the second limiting plate, the first limiting plate is rotatably connected with the inner side wall of the cooling bin, and an adjusting piece is arranged between the first limiting plate and the second limiting plate;

the periphery of the first limiting plate is provided with teeth, and the driving gear penetrates through the side wall of the cooling bin and is meshed with the first limiting plate;

the driving gear is rotationally connected to the rotating shaft, and the rotating shaft is fixedly connected with the side wall of the cooling bin through a fixing piece.

Preferably, the first limiting plate is provided with a first sliding chute and a first through hole, the first sliding chute is arranged on the adjacent surface of the first limiting plate and the second limiting plate, the first sliding chute is hexagonal, and the first through hole is positioned in the center of the first limiting plate;

the second limiting plate is provided with a fixing rod, a second chute, a fixing ring and a second through hole, the fixing ring is fixedly connected with the periphery of the second limiting plate through the fixing rod, the fixing rod is provided with the second chute, and the fixing ring is internally provided with the second through hole;

the adjacent surface of the adjusting piece and the first limiting plate is fixedly connected with a second sliding block, the adjusting piece and the second limiting plate are fixedly connected with a first sliding block, and a third through hole is formed in the splicing center of the adjusting pieces;

the second sliding block is connected with the first sliding groove in a sliding mode.

Preferably, the cooling bin is provided with a stabilizing device which is fixedly connected with the cooling bin;

the stabilizing device comprises a shell, a threaded rod, a third gear, a fourth gear, a moving plate, a connecting plate, a mounting plate, a moving rod, a first stabilizing hoop, a second stabilizing hoop, a sliding plate, a connecting rod, a fixing plate, a first spring and a second spring;

the shell is fixedly connected to the outer sides of the cooling bin and the power bin, a threaded rod is rotatably connected in the shell, a third gear is fixedly connected to the upper end of the threaded rod and meshed with a fourth gear, the fourth gear penetrates through the side wall of the joint of the shell and the power bin, the fourth gear is rotatably connected to the limiting baffle, and the fourth gear is meshed with the second gear;

the lower end of the threaded rod is provided with a movable plate which is in threaded connection with the threaded rod;

the movable plate is fixedly connected with a connecting plate which penetrates through the side wall of the cooling bin, the connecting plate is connected to the side wall of the cooling bin in a sliding manner, and one end of the connecting plate, which is positioned in the cooling bin, is fixedly connected with an installation plate;

the movable rod penetrates through the mounting plate, is connected to the mounting plate in a sliding manner, and is fixedly connected with a fixing plate at one end of the connecting plate;

a first spring is arranged between the fixed plate and the mounting plate, the first spring is sleeved outside the moving rod, and two ends of the first spring are fixedly connected to the fixed plate and the mounting plate respectively;

one end of the movable rod, which is far away from the fixed plate, is fixedly connected with a first stabilizing clamp, a sliding plate is arranged between the first stabilizing clamp and the mounting plate, and the sliding plate is connected to the movable rod in a sliding manner;

a second spring is arranged between the sliding plate and the mounting plate, the second spring is sleeved outside the moving rod, and two ends of the second spring are fixedly connected to the sliding plate and the mounting plate respectively;

the first stable clamp both ends are rotated and are connected with the stable clamp of second, and the stable clamp middle section position of second is rotated and is connected with connecting rod one end, and the connecting rod other end is rotated and is connected in the slide.

A crystal pulling furnace comprises a flow stabilizer.

Preferably, including the furnace body, furnace body fixed connection is in cooling storehouse below, and furnace body and cooling storehouse intercommunication are provided with guiding device, heating cylinder in the furnace body, and guiding device is located heating cylinder top, and guiding device, heating cylinder all fixed connection in the furnace body inner wall.

Drawings

FIG. 1 is a schematic front view of a flow stabilizer body structure according to the present invention;

FIG. 2 is a schematic view of a connection structure of a crystal pulling rod and a cooling chamber according to the present invention;

FIG. 3 is a schematic front view of a crystal pulling furnace according to the present invention;

FIG. 4 is a schematic front view of the structure of the stabilizing device of the present invention;

FIG. 5 is a schematic top view of the structure of the stabilizing device of the present invention;

FIG. 6 is a schematic top view of the adjusting device of the present invention in a closed configuration;

FIG. 7 is a schematic top view of the adjustment device of the present invention in an open configuration;

FIG. 8 is a schematic top view of a second stopper structure according to the present invention;

FIG. 9 is a schematic top view of a first stopper structure according to the present invention;

fig. 10 is a schematic top view of the adjusting member structure of the present invention.

In the figure: 1. a flow stabilizer body; 11. a first flow stabilizer; 12. a second flow stabilizer; 111. loading the wafer; 112. carrying out sheet discharging; 113. an adjustment device; 1131. a drive gear; 1132. a rotating shaft; 1133. a first limit plate; 11331. a first chute; 11332. a first through hole; 1134. a second limiting plate; 11341. fixing the rod; 11342. a second chute; 11343. a fixing ring; 11344. a second through hole; 1135. an adjustment member; 11351. a first slider; 11352. a second slider; 11353. a third through hole; 2. a cooling bin; 21. a limiting clamping block; 3. a power bin; 4. a drive assembly; 41. a motor; 42. a first gear; 43. a second gear; 44. a limit baffle; 45. pulling a crystal rod; 5. a flow guide device; 6. a heating cylinder; 7. a stabilizing device; 701. a housing; 702. a threaded rod; 703. a third gear; 704. a fourth gear; 705. moving the plate; 706. a connecting plate; 707. mounting a plate; 708. a travel bar; 709. a first stabilizing collar; 710. a second stabilizing clip; 711. a slide plate; 712. a connecting rod; 713. a fixing plate; 714. a first spring; 715. a second spring; 8. a furnace body.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

Example 1

Referring to fig. 1, the present invention provides a technical solution: a flow stabilizer comprises a flow stabilizer body 1, wherein the flow stabilizer body 1 comprises a first flow stabilizer 11 and a second flow stabilizer 12, the first flow stabilizer 11 is positioned above the second flow stabilizer 12, the first flow stabilizer 11 and the second flow stabilizer 12 are both arranged in a cooling bin 2, and a plurality of flow stabilizing holes are formed in the second flow stabilizer 12;

preferably, the cooling bin 2 is provided with an inert gas inlet;

preferably, the first flow stabilizer 11 comprises an upper plate 111, a lower plate 112 and an adjusting device 113, wherein the upper plate 111 and the lower plate 112 are both fixedly connected to the inner wall of the cooling chamber 2, the adjusting device 113 is located between the upper plate 111 and the lower plate 112, and a plurality of flow stabilizing holes are respectively formed in the upper plate 111 and the lower plate 112.

The working principle and the beneficial effects of the scheme are as follows: the flow stabilizer body 1 is arranged in the cooling bin 2, and the inert gas entering from the inert gas inlet on the cooling bin 2 is stabilized, so that the gas flow contacting with the crystal bar is ensured to be in a stable state, the crystal bar is prevented from slightly vibrating under the action of the gas flow, and the quality of the crystal bar is improved;

the flow stabilizer body 1 is provided with a plurality of flow stabilizing holes through an upper plate 111, a lower plate 112 and a second flow stabilizing piece 12 of a first flow stabilizing piece 11, inert gas is subjected to primary flow stabilization through the flow stabilizing holes of the upper plate 111 and the lower plate 112 of the first flow stabilizing piece 11, the inert gas is converged between the first flow stabilizing piece 11 and the second flow stabilizing piece 12, then secondary flow stabilization is performed through the plurality of flow stabilizing holes of the second flow stabilizing piece 12, then heat dissipation is performed on a crystal bar, the inert gas entering is scattered and subjected to flow stabilization through the first flow stabilizing piece 11 and the second flow stabilizing piece 12, and the quality stability of the crystal bar is ensured;

an adjusting device 113 is arranged between the upper plate 111 and the lower plate 112 to adjust the amount of inert gas entering so as to ensure the stability of the temperature of the crystal bar during heat dissipation and further ensure the quality of the crystal bar.

Example 2

Referring to fig. 1-3, in embodiment 1, a power cabin 3 is disposed above a cooling cabin 2, and a driving component 4 is disposed in the power cabin 3;

preferably, the driving assembly 4 comprises a motor 41, a first gear 42, a second gear 43, a limit baffle 44 and a pulling rod 45;

the motor 41 is fixedly connected to the lower surface of the power bin 3, the output end of the motor 41 penetrates through the limiting baffle 44 positioned below, the output end of the motor 41 is fixedly connected with the first gear 42, the first gear 42 is meshed with the second gear 43, the second gear 43 is positioned between the two limiting baffles 44, the second gear 43 is sleeved outside the crystal pulling rod 45, the outer surface of the crystal pulling rod 45 is provided with threads, and the second gear 43 is in threaded connection with the crystal pulling rod 45;

preferably, the lower end of the crystal pulling rod 45 penetrates through the upper wall of the cooling bin 2, a limiting fixture block 21 is arranged at the joint of the cooling bin 2 and the crystal pulling rod 45, the limiting fixture block 21 is embedded in the crystal pulling rod 45, and the limiting fixture block 21 is slidably connected with the crystal pulling rod 45.

The working principle and the beneficial effects of the scheme are as follows: the motor 41 drives the second gear 43 to rotate through the first gear 42, and due to the threaded connection between the second gear 43 and the crystal pulling rod 45, the second gear 43 is limited to rotate between the two limiting baffles 44, and the limiting fixture block 21 is arranged between the crystal pulling rod 45 and the upper wall of the cooling bin 2 to limit the crystal pulling rod 45 to move only up and down, so that when the second gear 43 rotates, the crystal pulling rod 45 moves upwards, crystal seeds below the crystal pulling rod 45 can slowly precipitate crystal bars, and the production of the crystal bars is completed.

Example 3

Referring to fig. 6-10, in the embodiment 1-2, the adjusting device 113 includes a driving gear 1131, a rotating shaft 1132, a first limiting plate 1133, a second limiting plate 1134, and an adjusting member 1135;

the second limiting plate 1134 is fixedly connected to the inner side wall of the cooling bin 2, the first limiting plate 1133 is arranged on the lower side of the second limiting plate 1134, the first limiting plate 1133 is rotatably connected with the inner side wall of the cooling bin 2, and an adjusting piece 1135 is arranged between the first limiting plate 1133 and the second limiting plate 1134;

the periphery of the first limiting plate 1133 is provided with teeth, and the driving gear 1131 penetrates through the side wall of the cooling bin 2 and is meshed with the first limiting plate 1133;

the driving gear 1131 is rotatably connected to the rotating shaft 1132, and the rotating shaft 1132 is fixedly connected with the side wall of the cooling bin 2 through a fixing piece;

the first limiting plate 1133 is provided with a first sliding groove 11331 and a first through hole 11332, the first sliding groove 11331 is arranged on the surface of the first limiting plate 1133 adjacent to the second limiting plate 1134, the first sliding groove 11331 is hexagonal, and the first through hole 11332 is located in the center of the first limiting plate 1133;

the second limiting plate 1134 is provided with a fixing rod 11341, a second chute 11342, a fixing ring 11343 and a second through hole 11344, the fixing ring 11343 is fixedly connected with the periphery of the second limiting plate 1134 through the fixing rod 11341, the fixing rod 11341 is provided with the second chute 11342, and the fixing ring 11343 is provided with the second through hole 11344;

the adjacent surfaces of the adjusting pieces 1135 and the first limiting plate 1133 are fixedly connected with a second slide block 11352, the adjusting pieces 1135 and the second limiting plate 1134 are fixedly connected with a first slide block 11351, and a third through hole 11353 is formed in the splicing center of the adjusting pieces 1135;

11351 is slidably connected to second runner 11342, and second slider 11352 is slidably connected to first runner 11331.

The working principle and the beneficial effects of the scheme are as follows: the adjusting device 113 is arranged to adjust the amount of inert gas entering so as to ensure the temperature stability of the crystal bar during cooling and further ensure the quality of the crystal bar;

through external force (this external force does not restrict, but manual rotation, also can set up motor drive) make drive gear 1131 rotate around pivot 1132, and the drive rotates with the first limiting plate 1133 of drive gear 1131 meshing, make second slider 11352 of regulating part 1135 slide in first spout 11331 of first limiting plate 1133, first slider 11351 of regulating part 1135 slides in second spout 11342 of second limiting plate 1134, make a plurality of regulating parts 1135 relative movement, the first through-hole 11332 that is sheltered from by regulating part 1135, the sheltered area of second through-hole 11344 changes, and then change the inert gas and pass through first through-hole 11332, second through-hole 11344, and the inert gas's of contact with the crystal bar flow, make the inert gas to the crystal bar cooling be in adjustable state, the stability of the temperature when having guaranteed the crystal bar cooling, the quality of crystal bar has been guaranteed.

Example 4

Referring to fig. 4-5, on the basis of the embodiments 1-3, the cooling chamber 2 is provided with a stabilizing device 7, and the stabilizing device 7 is fixedly connected to the cooling chamber 2;

the stabilizing device 7 comprises a shell 701, a threaded rod 702, a third gear 703, a fourth gear 704, a moving plate 705, a connecting plate 706, a mounting plate 707, a moving rod 708, a first stabilizing clamp 709, a second stabilizing clamp 710, a sliding plate 711, a connecting rod 712, a fixing plate 713, a first spring 714 and a second spring 715;

the outer shell 701 is fixedly connected to the outer sides of the cooling bin 2 and the power bin 3, a threaded rod 702 is rotatably connected in the outer shell 701, a third gear 703 is fixedly connected to the upper end of the threaded rod 702, the third gear 703 is meshed with a fourth gear 704, the fourth gear 704 penetrates through the side wall of the joint of the outer shell 701 and the power bin 3, the fourth gear 704 is rotatably connected to the limit baffle 44, and the fourth gear 704 is meshed with the second gear 43;

a moving plate 705 is arranged at the lower end of the threaded rod 702, and the moving plate 705 is in threaded connection with the threaded rod 702;

a connecting plate 706 is fixedly connected to the moving plate 705, the connecting plate 706 penetrates through the side wall of the cooling bin 2, the connecting plate 706 is connected to the side wall of the cooling bin 2 in a sliding manner, and a mounting plate 707 is fixedly connected to one end, located in the cooling bin 2, of the connecting plate 706;

the moving rod 708 penetrates through the mounting plate 707, the moving rod 708 is slidably connected to the mounting plate 707, and a fixing plate 713 is fixedly connected to one end of the moving rod 708, which is located on the connecting plate 706;

a first spring 714 is arranged between the fixing plate 713 and the mounting plate 707, the first spring 714 is sleeved outside the moving rod 708, and two ends of the first spring 714 are fixedly connected to the fixing plate 713 and the mounting plate 707 respectively;

a first stabilizing hoop 709 is fixedly connected to one end, far away from the fixing plate 713, of the moving rod 708, a sliding plate 711 is arranged between the first stabilizing hoop 709 and the mounting plate 707, and the sliding plate 711 is connected to the moving rod 708 in a sliding manner;

a second spring 715 is arranged between the sliding plate 711 and the mounting plate 707, the second spring 715 is sleeved outside the moving rod 708, and two ends of the second spring 715 are fixedly connected to the sliding plate 711 and the mounting plate 707 respectively;

the two ends of the first stabilizing hoop 709 are rotatably connected with a second stabilizing hoop 710, the middle section of the second stabilizing hoop 710 is rotatably connected with one end of a connecting rod 712, and the other end of the connecting rod 712 is rotatably connected with a sliding plate 711.

The working principle and the beneficial effects of the scheme are as follows: the second gear 43 rotates, the fourth gear 704 meshed with the second gear rotates, the third gear 703 fixed at the upper end of the threaded rod 702 also rotates along with the third gear, the threaded rod 702 is driven to rotate, the connecting plate 706 is fixedly connected to the moving plate 705 in threaded connection with the lower end of the threaded rod 702, and the connecting plate 706 is connected to the side wall of the cooling bin 2 in a sliding mode, so that the possibility of rotation of the moving plate 705 is limited, under the rotating action of the threaded rod 702, the moving plate 705 in threaded connection with the threaded rod 702 moves along with the movement of the crystal pulling rod 45, the first stabilizing hoop 709 and the second stabilizing hoop 710 are always clamped at the lower position of the crystal pulling rod 45, the upper end and the lower end of the crystal pulling rod 45 are in a stable state, and the stability of the crystal pulling rod 45 during movement is guaranteed;

first stable clamp 709, the rotation of second stable clamp 710 is connected, and the carriage release lever 708 that first stable clamp 709 is fixed is sliding connection on the mounting panel 707 with connecting plate 706 is fixed, and receive first spring 714, the spring action of second spring 715, rotate through connecting rod 712 between second stable clamp 710 and the slide 711 and be connected, and connecting rod 712 sliding connection is in carriage release lever 708, and receive the spring action of second spring 715, when having avoided meetting the unexpected circumstances, stabilising arrangement 7 causes the damage to pull rod 45, the practicality of device has been improved.

Example 5

Referring to fig. 1-3, in embodiments 1-4, a crystal pulling furnace includes a flow stabilizer;

preferably, still include furnace body 8, furnace body 8 fixed connection is in cooling storehouse 2 below, and furnace body 8 and cooling storehouse 2 intercommunication, is provided with guiding device 5, heating cylinder 6 in the furnace body 8, and guiding device 5 is located heating cylinder 6 top, and guiding device 5, the equal fixed connection of heating cylinder 6 in furnace body 8 inner wall.

The working principle and the beneficial effects of the scheme are as follows: the heating cylinder 6 melts the raw materials, the crystal seeds arranged at the bottom end of the crystal pulling rod 45 are separated out under certain conditions, the flow guide device 5 guides the entering inert gas to prevent the inert gas from contacting with the melting surface of the raw materials in the heating cylinder 6, the flow stabilizing device body 1 in the cooling bin 2 ensures that the inert gas for cooling the crystal bar is in a stable state, the crystal bar is prevented from slightly vibrating under the action of airflow, and the quality of the crystal bar is improved.

Example 6

On the basis of embodiments 1 to 5, a stability detection device is included for detecting the stability of the crystal puller 45, the stability detection device comprising:

the flow velocity sensor is arranged below the second flow stabilizing piece 12 and used for detecting the flow velocity of the inert gas passing through the second flow stabilizing piece 12;

the temperature sensor is arranged in the flow stabilizer body 1 and is used for detecting the working environment temperature of the flow stabilizer body 1;

the timer is used for recording the service life of the equipment;

the alarm is arranged on the outer side of the cooling bin 2;

the controller, the controller respectively with flow sensor, time-recorder, temperature sensor, alarm electric connection, the controller is based on flow sensor, temperature sensor, the work of time-recorder control alarm, including following step:

step 1: the controller obtains a crystal puller 45 stability index based on a flow rate sensor, a temperature sensor, a timer, and a formula:

wherein, the first and the second end of the pipe are connected with each other,

for the stability index of the pull rod 45>

The flow rate of the inert gas passing through the second flow stabilizer 12 is detected for detection by the flow rate sensor, and the ratio of the inert gas passing through the second flow stabilizer is adjusted>

For a wear factor of the apparatus (which increases with increasing use time of the apparatus), ->

The length of use of the apparatus recorded for the timer, <' >>

In unit time length>

In order to cool the cross-sectional area of the compartment 2>

Is the length of the pull rod 45>

The temperature of the working environment of the flow stabilizing device body 1 detected by the temperature sensor is greater than or equal to>

Is the temperature at which water freezes under standard atmospheric pressure>

Is->

Based on a logarithmic function>

Is based on->

A base exponential function;

step 2: and (3) based on the calculation result of the step 1, when the stability index of the crystal pulling rod 45 is smaller than a preset reference value, controlling an alarm to give an alarm by the controller.

It is assumed that the flow rate sensor detects the flow rate of the inert gas passing through the second flow stabilizer 12

Wear factor of the device->

Timer recording the duration of use of the device->

Based on unit time length>

And the temperature of the working environment of the flow stabilizing device body 1 detected by the temperature sensor is->

Temperature of freezing of water at standard atmospheric pressure

The cross-sectional area of the cooling chamber 2->

Length of the pull rod 45>

The stability index ≥ of the pull rod 45 can be determined by calculation as described above>

(three decimal places) the calculated stability index for the pull rod 45 is greater or less>

And when the current value is less than the preset reference value 3, the controller controls the alarm to give an alarm prompt.

The working principle and the beneficial effects of the scheme are as follows: the flow velocity sensor is arranged for detecting the flow velocity of the inert gas passing through the second flow stabilizing piece 12, the timer is arranged for recording the service life of the equipment, the flow velocity of the inert gas passing through the second flow stabilizing piece 12 detected by the flow velocity sensor, the service life of the equipment recorded by the timer and a formula are calculated to obtain the stability index of the crystal pulling rod 45, when the stability index of the crystal pulling rod 45 is smaller than a preset reference value, the controller controls the alarm to give an alarm to inform a user of checking the current equipment, the reason that the stability of the crystal pulling rod 45 is reduced due to checking is solved, the quality of the crystal pulling rod is guaranteed, the controller is arranged for controlling the alarm to give an alarm, related workers are informed of checking in time, and the intelligence of the device is improved.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A flow stabilizer is characterized in that:

the cooling device comprises a flow stabilizer body (1), wherein the flow stabilizer body (1) comprises a first flow stabilizing piece (11) and a second flow stabilizing piece (12), the first flow stabilizing piece (11) is positioned above the second flow stabilizing piece (12), the first flow stabilizing piece (11) and the second flow stabilizing piece (12) are both arranged in a cooling bin (2), and a plurality of flow stabilizing holes are formed in the second flow stabilizing piece (12);

a power bin (3) is arranged above the cooling bin (2), and a driving assembly (4) is arranged in the power bin (3);

the driving assembly (4) comprises a motor (41), a first gear (42), a second gear (43), a limiting baffle (44) and a crystal pulling rod (45);

the motor (41) is fixedly connected to the lower surface of the power bin (3), the output end of the motor (41) penetrates through the limiting baffle (44) positioned below, the output end of the motor (41) is fixedly connected with a first gear (42), the first gear (42) is meshed with a second gear (43), the second gear (43) is positioned between the two limiting baffles (44), the second gear (43) is sleeved outside the crystal pulling rod (45), threads are arranged on the outer surface of the crystal pulling rod (45), and the second gear (43) is in threaded connection with the crystal pulling rod (45);

including stability detection device for detect the stability of crystal pulling rod 45, stability detection device includes:

the timer is used for recording the service life of the equipment;

the alarm is arranged on the outer side of the cooling bin 2;

the controller, the controller respectively with flow rate sensor, time-recorder, temperature sensor, alarm electric connection, the controller is based on flow rate sensor, temperature sensor, the work of time-recorder control alarm, including following step:

；

wherein the content of the first and second substances,

for a stability index of the pull rod 45>

Detects the flow rate of the inert gas passing through the second flow stabilizer 12 for the detection by the flow rate sensor, and->

Is a wear factor of the apparatus, which increases with the length of time the apparatus is used, is based on>

The length of use of the apparatus recorded for the timer, <' >>

Is a unit time length>

In order to cool the cross-sectional area of the compartment 2>

Is the length of the pull rod 45>

Is the temperature at which water freezes under standard atmospheric pressure>

Is based on->

A base logarithmic function>

Is based on->

A base exponential function;

step 2: and (4) based on the calculation result of the step 1, when the stability index of the crystal pulling rod 45 is smaller than a preset reference value, controlling an alarm to give an alarm by the controller.

2. A flow stabilizer according to claim 1, wherein:

the first flow stabilizing piece (11) comprises an upper piece (111), a lower piece (112) and an adjusting device (113), wherein the upper piece (111) and the lower piece (112) are fixedly connected to the inner wall of the cooling bin (2), the adjusting device (113) is located between the upper piece (111) and the lower piece (112), and a plurality of flow stabilizing holes are formed in the upper piece (111) and the lower piece (112).

3. A flow stabilizer according to claim 1, wherein:

the lower end of the crystal pulling rod (45) penetrates through the upper wall of the cooling bin (2), a limiting clamping block (21) is arranged at the joint of the cooling bin (2) and the crystal pulling rod (45), the limiting clamping block (21) is embedded in the crystal pulling rod (45), and the limiting clamping block (21) is connected with the crystal pulling rod (45) in a sliding mode.

4. A flow stabilizer according to claim 2, wherein:

the adjusting device (113) comprises a driving gear (1131), a rotating shaft (1132), a first limiting plate (1133), a second limiting plate (1134) and an adjusting piece (1135);

the second limiting plate (1134) is fixedly connected to the inner side wall of the cooling bin (2), a first limiting plate (1133) is arranged on the lower side of the second limiting plate (1134), the first limiting plate (1133) is rotatably connected with the inner side wall of the cooling bin (2), and an adjusting piece (1135) is arranged between the first limiting plate (1133) and the second limiting plate (1134);

the periphery of the first limiting plate (1133) is provided with teeth, and the driving gear (1131) penetrates through the side wall of the cooling bin (2) and is meshed with the first limiting plate (1133);

drive gear (1131) rotates and connects in pivot (1132), and pivot (1132) pass through mounting and cooling storehouse (2) lateral wall fixed connection.

5. A flow stabilizer according to claim 4, characterised in that:

the first limiting plate (1133) is provided with a first sliding groove (11331) and a first through hole (11332), the first sliding groove (11331) is arranged on the surface, adjacent to the second limiting plate (1134), of the first limiting plate (1133), the first sliding groove (11331) is in a hexagonal shape, and the first through hole (11332) is located in the center of the first limiting plate (1133);

a fixing rod (11341), a second sliding chute (11342), a fixing ring (11343) and a second through hole (11344) are arranged on the second limiting plate (1134), the fixing ring (11343) is fixedly connected with the periphery of the second limiting plate (1134) through the fixing rod (11341), the second sliding chute (11342) is arranged on the fixing rod (11341), and a second through hole (11344) is formed in the fixing ring (11343);

the adjacent surfaces of the adjusting pieces (1135) and the first limit plate (1133) are fixedly connected with second sliding blocks (11352), the adjusting pieces (1135) and the second limit plate (1134) are fixedly connected with first sliding blocks (11351), and a third through hole (11353) is formed in the splicing center of the adjusting pieces (1135);

(11351) The second slide block (11352) is connected with the first slide groove (11331) in a sliding manner.

6. A flow stabilizer according to claim 1, wherein:

a stabilizing device (7) is arranged on the cooling bin (2), and the stabilizing device (7) is fixedly connected to the cooling bin (2);

the stabilizing device (7) comprises a shell (701), a threaded rod (702), a third gear (703), a fourth gear (704), a moving plate (705), a connecting plate (706), a mounting plate (707), a moving rod (708), a first stabilizing clamp (709), a second stabilizing clamp (710), a sliding plate (711), a connecting rod (712), a fixing plate (713), a first spring (714) and a second spring (715);

the shell (701) is fixedly connected to the outer sides of the cooling bin (2) and the power bin (3), a threaded rod (702) is connected in the shell (701) in a rotating mode, a third gear (703) is fixedly connected to the upper end of the threaded rod (702), the third gear (703) is meshed with a fourth gear (704), the fourth gear (704) penetrates through the side wall of the joint of the shell (701) and the power bin (3), the fourth gear (704) is connected to the limiting baffle (44) in a rotating mode, and the fourth gear (704) is meshed with the second gear (43);

a moving plate (705) is arranged at the lower end of the threaded rod (702), and the moving plate (705) is in threaded connection with the threaded rod (702);

a connecting plate (706) is fixedly connected to the moving plate (705), the connecting plate (706) penetrates through the side wall of the cooling bin (2), the connecting plate (706) is connected to the side wall of the cooling bin (2) in a sliding mode, and a mounting plate (707) is fixedly connected to one end, located in the cooling bin (2), of the connecting plate (706);

the moving rod (708) penetrates through the mounting plate (707), the moving rod (708) is connected to the mounting plate (707) in a sliding mode, and one end, located on the connecting plate (706), of the moving rod (708) is fixedly connected with a fixing plate (713);

a first spring (714) is arranged between the fixing plate (713) and the mounting plate (707), the first spring (714) is sleeved outside the movable rod (708), and two ends of the first spring (714) are respectively fixedly connected to the fixing plate (713) and the mounting plate (707);

one end of the moving rod (708) far away from the fixing plate (713) is fixedly connected with a first stabilizing clamp (709), a sliding plate (711) is arranged between the first stabilizing clamp (709) and the mounting plate (707), and the sliding plate (711) is connected to the moving rod (708) in a sliding mode;

a second spring (715) is arranged between the sliding plate (711) and the mounting plate (707), the second spring (715) is sleeved outside the moving rod (708), and two ends of the second spring (715) are fixedly connected to the sliding plate (711) and the mounting plate (707) respectively;

the two ends of the first stabilizing hoop (709) are rotatably connected with a second stabilizing hoop (710), the middle section of the second stabilizing hoop (710) is rotatably connected with one end of a connecting rod (712), and the other end of the connecting rod (712) is rotatably connected with a sliding plate (711).

7. A crystal pulling furnace is characterized in that:

a flow stabilizer comprising a flow stabilizer according to any one of claims 1 to 6.

8. A crystal pulling furnace as set forth in claim 7 wherein:

the furnace comprises a furnace body (8), wherein the furnace body (8) is fixedly connected below a cooling bin (2), the furnace body (8) is communicated with the cooling bin (2), a flow guide device (5) and a heating cylinder (6) are arranged in the furnace body (8), the flow guide device (5) is positioned above the heating cylinder (6), and the flow guide device (5) and the heating cylinder (6) are fixedly connected to the inner wall of the furnace body (8).