CN115181955A

CN115181955A - Multifunctional observation window for electron beam evaporation table

Info

Publication number: CN115181955A
Application number: CN202210596546.2A
Authority: CN
Inventors: 马溢华; 赵志强
Original assignee: Wuxi Core Spectrum Semiconductor Technology Co ltd
Current assignee: Wuxi Core Spectrum Semiconductor Technology Co ltd
Priority date: 2022-05-30
Filing date: 2022-05-30
Publication date: 2022-10-14
Anticipated expiration: 2042-05-30
Also published as: CN115181955B

Abstract

The invention discloses an observation window for a multifunctional electron beam evaporation table, which comprises a plate body and a rotation adjusting mechanism, wherein the rotation adjusting mechanism is arranged inside the plate body, connecting boxes in the rotation adjusting mechanism are respectively arranged on two sides of the back surface of the plate body, and the rotation adjusting mechanism further comprises a first motor, a driving gear, a gear ring, a connecting plate, a driven gear, a limiting groove and a sliding ball; the lens has the advantages that the lens has the function of rotary adjustment through the arrangement of the rotary adjusting mechanism, the observation effect can be improved, the multidirectional functionality can also be improved, the lens can have the functions of angle adjustment and up-and-down position adjustment through the arrangement of the angle position adjusting mechanism, the observation effect and the multidirectional performance can be improved for the second time, and the lens can be demisted and adhered sundries can be scraped by utilizing the arrangement of the demisting mechanism, so that the cleanliness and the definition of the lens can be ensured, and meanwhile, the effect of assisting people in clear observation can be achieved.

Description

Multifunctional observation window for electron beam evaporation table

Technical Field

The invention belongs to the technical field of nuclear instruments, and particularly relates to an observation window for a multifunctional electron beam evaporation table.

Background

An electron beam evaporation table is a nuclear instrument used in the field of physics, and the metallization is a process of depositing a metal film on an insulating medium film and then engraving patterns so as to form a metal interconnection metal wire and a hole filling plug of an integrated circuit in the manufacturing process of a semiconductor chip.

However, the observation window for the existing electron beam evaporation table does not have the function of rotary adjustment, and because the traditional observation window has a certain dead angle, the observation angle of the observation window can effectively prevent people from watching, and meanwhile, the observation window can not be adjusted and observed according to the requirements of people, and because certain difference exists between the internal temperature and the external temperature, certain fog can exist in the observation glass, so that pollutants can be generated, and the observation result can be influenced.

Therefore, a viewing window for a multi-functional electron beam evaporation stage is needed.

Disclosure of Invention

The invention aims to provide an observation window for a multifunctional electron beam evaporation table, which has a rotation adjusting function, can improve the observation effect, can also improve the multidirectional functionality, can be adjusted and used according to the requirements of people, and can take out the existing fog and pollutants to solve the problems in the background technology.

In order to achieve the purpose, the invention provides the following technical scheme: an observation window for a multifunctional electron beam evaporation table comprises a plate body and a rotation adjusting mechanism, wherein the rotation adjusting mechanism is arranged inside the plate body, and connecting boxes in the rotation adjusting mechanism are respectively arranged on two sides of the back surface of the plate body;

the rotation adjusting mechanism further comprises a first motor, a driving gear, a gear ring, a connecting plate, a driven gear, a limiting groove and a sliding ball, the first motor is installed in an inner cavity of the connecting box on one side, the driving gear is connected to an output shaft of the first motor in a keyed mode, the gear ring is meshed with one side of the driving gear, the connecting plate is installed on the inner wall of the gear ring, the driven gear is meshed with one side of the gear ring, the limiting groove is formed in the front side and the rear side of the plate body, and the sliding ball is connected to the inside of the limiting groove in a sliding mode.

Wherein, branch is installed to one side of ball, the backplate is installed to the one end of branch, the lower part and the connecting plate installation of backplate one side.

The back surface of the driven gear is provided with a support rod, one end of the support rod is movably installed on the inner wall of the plate body on the other side, and the surface of the connecting plate is provided with a through hole.

The surface of the connecting plate is provided with an angle position adjusting mechanism, the angle position adjusting mechanism comprises a first electric slide rail, a second motor, a connecting frame, a lens, a support rod, a sliding sleeve and a slide rod, and the first electric slide rail is respectively arranged at the upper part and the lower part of one side of the surface of the connecting plate.

The second motor is installed on one side of the first electric sliding rail, the connecting frame is connected to an output shaft of the second motor in a keyed mode, and the lens is installed inside the connecting frame.

The supporting rod is installed on one side of the connecting frame, the sliding sleeve is movably installed at one end of the supporting rod, the sliding rod is connected to the inner wall of the sliding sleeve in a sliding mode, and the sliding rod is installed on the upper portion and the lower portion of the other side of the surface of the connecting plate.

The demisting mechanism comprises a second electric slide rail, a transverse plate, a connecting cylinder, a spring, an inner rod, a mounting plate and a rubber plate, and the second electric slide rail is mounted on one side of the top and the bottom of the connecting frame.

The transverse plate is installed on one side of the second electric sliding rail, the connecting cylinders are installed at two ends of one side of the transverse plate respectively, and the springs are installed at one ends of the inner cavities of the connecting cylinders.

The inner rod is installed at one end of the spring, the mounting plate is installed at one end of the inner rod, and the rubber plate is bolted to one side of the mounting plate.

In summary, due to the adoption of the technology, the invention has the beneficial effects that:

according to the invention, through the arrangement of the rotation adjusting mechanism, the rotation adjusting mechanism has a rotation adjusting function, so that not only can the observation effect be improved, but also the multidirectional functionality of the rotation adjusting mechanism can be improved, the rotation adjusting mechanism can be adjusted and used according to the requirements of people, and meanwhile, the fog and pollutants existing in the rotation adjusting mechanism can be taken out.

The angle position adjusting mechanism can be used for adjusting the angle and the up-down position, so that the observation effect and the multi-directionality can be improved for the second time, and the observation work can be more conveniently carried out by people.

According to the invention, the defogging mechanism is arranged, so that the lens can be defogged and attached impurities can be scraped, the cleanliness and the definition of the lens can be ensured, meanwhile, the effect of assisting people in clear observation is achieved, and the lens cleaning device can also be used for cleaning the lens.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the motor structure of the present invention;

FIG. 3 is a schematic view of a slider ball according to the present invention;

FIG. 4 is an enlarged view of a portion A of FIG. 1 according to the present invention;

fig. 5 is a schematic perspective view of the mounting plate of the present invention.

In the figure: 1. a plate body; 2. a rotation adjustment mechanism; 21. a connection box; 22. a first motor; 23. a driving gear; 24. a ring gear; 25. a connecting plate; 26. a driven gear; 27. a limiting groove; 28. a sliding ball; 3. an angular position adjustment mechanism; 31. a first electric slide rail; 32. a second motor; 33. a connecting frame; 34. a lens; 35. a strut; 36. a sliding sleeve; 37. a slide bar; 4. a demisting mechanism; 41. a second electric slide rail; 42. a transverse plate; 43. a connecting cylinder; 44. a spring; 45. an inner rod; 46. mounting a plate; 47. a rubber plate; 5. and (6) a through opening.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.

In the description of the present invention, it is to be understood that the terms indicating an orientation or positional relationship are based on the orientation or positional relationship shown in the drawings only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the present invention, unless otherwise explicitly stated or limited, the terms "mounted," "connected," "fixed," and the like are to be construed broadly, e.g., as being permanently connected, detachably connected, or integral; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art from the specification.

Example 1

The invention provides an observation window for a multifunctional electron beam evaporation table as shown in figures 1-3, which comprises a plate body 1 and a rotation adjusting mechanism 2, wherein the rotation adjusting mechanism 2 is arranged inside the plate body 1, connecting boxes 21 in the rotation adjusting mechanism 2 are respectively arranged at two sides of the back surface of the plate body 1, and the connecting boxes 21 are used for facilitating the installation and bearing of a first motor 22 and a support rod so as to ensure that the observation window can work stably;

it should be noted that, as shown in fig. 1, 2 and 3, the rotation adjusting mechanism 2 further includes a first motor 22, a driving gear 23, a gear ring 24, a connecting plate 25, a driven gear 26, a limiting groove 27 and a sliding ball 28, the first motor 22 is installed in an inner cavity of the connecting box 21 on one side, the driving gear 23 is connected to an output shaft of the first motor 22 in a key manner, the gear ring 24 is engaged with one side of the driving gear 23, the first motor 22 is utilized to perform a driving function so as to drive the driving gear 23 to rotate, and the driving gear 23 performs a transmission function when rotating, so as to drive the gear ring 24 to rotate;

the connecting plate 25 is installed in the inner wall of ring gear 24, driven gear 26 meshes in one side of ring gear 24, spacing groove 27 is seted up in plate body 1 both sides around, slide ball 28 sliding connection is in the inside of spacing groove 27, and ring gear 24 can drive connecting plate 25 and rotate together when rotating, and just need carry out the reversal to the normal position after its corotation round connecting plate 25, just need turn around to the normal position after its reversal round like this, driven gear 26 then is used for assisting ring gear 24 to rotate the work, the relation of utilizing spacing groove 27 and slide ball 28 sliding connection can be used for supporting connecting plate 25, and still can be used for assisting it to rotate the work.

Wherein, the cooperation through upper portion uses alright make it possess the function of rotation adjustment, not only can improve the observation effect, makes its adjustment according to people's demand use moreover to do benefit to people's operation and observation work, and easy operation is convenient.

In addition, when adjustment is needed, the first motor 22 is started firstly, then the first motor 22 is used for driving the driving gear 23 to rotate, the driving gear 23 can drive the gear ring 24 and the connecting plate 25 to rotate together, in addition, the gear ring 24 can drive the driven gear 26 to rotate together through the teeth while rotating, the driven gear 26 plays a role in assisting the driven gear to rotate, and in addition, the sliding ball 28 can slide in the inner cavity of the limiting groove 27 during rotation, so that the supporting and the rotating of the sliding ball are assisted.

In addition, as shown in fig. 1 and 3, a strut is installed at one side of the sliding ball 28, a back plate is installed at one end of the strut, and a lower portion of one side of the back plate is installed with the connecting plate 25, so that the connection and the support of the sliding ball 28 are facilitated by the strut, and the connecting plate 25 can be used for not only connecting and supporting the strut, but also connecting and supporting the connecting plate 25 through the sliding ball 28 and the strut, thereby ensuring the stable operation of the connecting plate 25.

In addition, as shown in fig. 1 and 2, a stay bar is mounted on the back surface of the driven gear 26, one end of the stay bar is movably mounted on the inner wall of the other side plate body 1, through holes 5 are formed in the surface of the connecting plate 25, the stay bar can be used for mounting and supporting the driven gear 26, and meanwhile, when the stay bar is driven, the stay bar can assist the driven gear 26 to rotate so as to ensure that the driven gear 26 stably rotates, the rotation angle of the connecting frame 33 and the rotation angle of the lens 34 can be conveniently adjusted by using the through holes 5, and the subsequent observation work of people can be facilitated.

Example 2

Referring to fig. 1, 4 and 5, the present embodiment 2 is different from the present embodiment 1 in that:

preferably, as shown in fig. 1, 4 and 5, the surface of the connecting plate 25 is provided with an angular position adjusting mechanism 3, the angular position adjusting mechanism 3 includes a first electric slide rail 31, a second motor 32, a connecting frame 33, a lens 34, a supporting rod 35, a sliding sleeve 36 and a sliding rod 37, the first electric slide rail 31 is respectively installed at the upper part and the lower part of one side of the surface of the connecting plate 25, the first electric slide rail 31 is used for assisting in connecting and supporting the connecting frame 33 and the lens 34, and the first electric slide rail 31 is mainly adjusted to the high-low position of the lens 34, so that people can better observe.

In addition, as shown in fig. 1, 4 and 5, the second motor 32 is installed at one side of the first electric sliding rail 31, the connection frame 33 is connected to an output shaft of the second motor 32 in a keyed manner, the lens 34 is installed inside the connection frame 33, the second motor 32 can be used for driving, so as to drive the connection frame 33 to rotate, the connection frame 33 is used for driving the lens 34 to rotate together, so as to perform angle adjustment work, and the second motor 32 rotates clockwise and counterclockwise for one circle and then rotates to the original position, and then the counterclockwise and clockwise rotation can be performed again to the original position in the same manner, and the lens 34 is used for assisting people to observe, and meanwhile, the lens can be disassembled, assembled and replaced.

In addition, as shown in fig. 1, 4 and 5, the supporting rod 35 is installed at one side of the connecting frame 33, the sliding sleeve 36 is movably installed at one end of the supporting rod 35, the sliding rod 37 is slidably connected to the inner wall of the sliding sleeve 36, the sliding rod 37 is installed at the upper and lower portions of the other side of the surface of the connecting plate 25, the supporting rod 35 is used for conveniently supporting the connecting frame 33 and assisting the connecting frame to rotate, and the sliding relationship between the sliding sleeve 36 and the sliding rod 37 can be used for assisting the first electric sliding rail 31 to perform the position moving operation, so that the moving stability of the first electric sliding rail 31 is ensured.

Wherein, can be used to possess the function of angle and upper and lower position adjustment, not only can improve its effect and the multi-directionality of observing for the secondary, but also can do benefit to the more convenient work of observing of people.

In addition, after the position adjustment is needed, the first electric slide rail 31 is used to drive the weapon to move up and down, so that the required adjustment work can be realized, the sliding connection relationship between the slide rod 37 and the slide sleeve 36 can be used to assist the weapon to move when the weapon moves, the support property can be increased to ensure the moving stability of the weapon, the second electric motor 32 can be used to drive the connecting frame 33 and the lens 34 to rotate together when the weapon needs angle adjustment, so that the required angle can be adjusted, the rotating range does not exceed a positive or negative circle, and the rotation of the weapon needs to be adjusted before the position adjustment.

Example 3

Referring to fig. 1, 4 and 5, the difference between the embodiment 3 and the

embodiments

1 and 2 is:

further, as shown in fig. 1, 4 and 5, the top and the bottom of the connecting frame 33 are provided with the defogging mechanism 4, the defogging mechanism 4 includes a second electric slide rail 41, a horizontal plate 42, a connecting cylinder 43, a spring 44, an inner rod 45, a mounting plate 46 and a rubber plate 47, the second electric slide rail 41 is mounted on one side of the top and the bottom of the connecting frame 33, the second electric slide rail 41 is utilized to facilitate driving the rubber plate 47 to perform the position movement function, and the second electric slide rail 41 can also be used for supporting the rubber plate.

In addition, as shown in fig. 1, 4 and 5, the transverse plate 42 is installed at one side of the second electric slide rail 41, the connecting cylinders 43 are respectively installed at two ends of one side of the transverse plate 42, the springs 44 are installed at one end of the inner cavity of the connecting cylinders 43, the transverse plate 42 is used for facilitating the bearing connection of the components below the connecting cylinders, the connecting cylinders 43 are used for facilitating the installation of the springs 44, and simultaneously, the inner rod 45 can be accommodated, and the springs 44 are used for elastically pushing the inner rod 45.

In addition, as shown in fig. 1, 4 and 5, an inner rod 45 is installed at one end of the spring 44, a mounting plate 46 is installed at one end of the inner rod 45, a rubber plate 47 is bolted at one side of the mounting plate 46, the inner rod 45 can be used for connecting the mounting plate 46, and the mounting plate 46 is pushed to move downwards after being pushed, the mounting plate 46 is used for connecting and mounting the rubber plate 47, the rubber plate 47 is used for scraping and cleaning, meanwhile, the rubber plate 47 can be replaced according to the abrasion performance of use, and one side of the rubber plate 47 is attached to one side of the lens 34.

Wherein, can make it possess the defogging and strike off adnexed debris to in order to guarantee the cleanliness factor and the definition of lens 34, reached the effect of supplementary people's clear observation simultaneously, and still can be used to reach the effect of clearance to lens 34.

In addition, when it needs defogging or clearance, utilize second electric slide rail 41 to drive rubber slab 47 and carry out the position and move to can reach required effect, and because rubber slab 47 is promoted by the elasticity of spring 44 indirectness can effectual messenger's laminating lens 34, in order to improve its defogging and effect of clearance, and the cooperation between diaphragm 42, connecting cylinder 43, interior pole 45 and the mounting panel 46 plays the effect of support, in order to guarantee its steady movement work.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Claims

1. The utility model provides a multi-functional electron beam is observation window for evaporation station, includes plate body (1) and rotation guiding mechanism (2), its characterized in that: the rotation adjusting mechanism (2) is arranged inside the plate body (1), and connecting boxes (21) in the rotation adjusting mechanism (2) are respectively arranged on two sides of the back surface of the plate body (1);

rotate guiding mechanism (2) and still including first motor (22), driving gear (23), ring gear (24), connecting plate (25), driven gear (26), spacing groove (27) and smooth ball (28), install the inner chamber in one side connecting box (21) first motor (22), driving gear (23) key-type is connected in the output shaft of first motor (22), ring gear (24) mesh in one side of driving gear (23), install the inner wall in ring gear (24) connecting plate (25), driven gear (26) mesh in one side of ring gear (24), both sides around plate body (1) are seted up to spacing groove (27), smooth ball (28) sliding connection is in the inside of spacing groove (27).

2. The observation window for a multifunctional electron beam evaporation stage according to claim 1, wherein: a supporting rod is installed on one side of the sliding ball (28), a back plate is installed at one end of the supporting rod, and the lower portion of one side of the back plate is installed with the connecting plate (25).

3. The observation window for a multifunctional electron beam evaporation stage of claim 1, wherein: the back surface of the driven gear (26) is provided with a support rod, one end of the support rod is movably installed on the inner wall of the other side plate body (1), and the surface of the connecting plate (25) is provided with an opening (5).

4. The observation window for a multifunctional electron beam evaporation stage according to claim 1, wherein: the surface of connecting plate (25) is provided with angular position guiding mechanism (3), angular position guiding mechanism (3) include first electronic slide rail (31), second motor (32), connecting frame (33), lens (34), branch (35), sliding sleeve (36) and slide bar (37), two upper and lower portions in connecting plate (25) surface one side are installed respectively in first electronic slide rail (31).

5. The observation window for a multifunctional electron beam evaporation stage according to claim 4, wherein: the second motor (32) is installed on one side of the first electric sliding rail (31), the connecting frame (33) is connected to an output shaft of the second motor (32) in a key mode, and the lens (34) is installed inside the connecting frame (33).

6. The observation window for a multifunctional electron beam evaporation stage according to claim 5, wherein: the supporting rod (35) is installed on one side of the connecting frame (33), the sliding sleeve (36) is movably installed at one end of the supporting rod (35), the sliding rod (37) is connected to the inner wall of the sliding sleeve (36) in a sliding mode, and the sliding rod (37) is installed on the upper portion and the lower portion of the other side of the surface of the connecting plate (25).

7. The observation window for a multifunctional electron beam evaporation stage according to claim 6, wherein: the defogging device is characterized in that defogging mechanisms (4) are arranged at the top and the bottom of the connecting frame (33), each defogging mechanism (4) comprises a second electric sliding rail (41), a transverse plate (42), a connecting cylinder (43), a spring (44), an inner rod (45), a mounting plate (46) and a rubber plate (47), and the second electric sliding rails (41) are mounted on one sides of the top and the bottom of the connecting frame (33).

8. The observation window for a multifunctional electron beam evaporation stage according to claim 7, wherein: the transverse plate (42) is installed on one side of the second electric sliding rail (41), the connecting cylinders (43) are installed at two ends of one side of the transverse plate (42) respectively, and the springs (44) are installed at one ends of inner cavities of the connecting cylinders (43).

9. The observation window for a multifunctional electron beam evaporation stage according to claim 8, wherein: the inner rod (45) is installed at one end of the spring (44), the installation plate (46) is installed at one end of the inner rod (45), and the rubber plate (47) is bolted to one side of the installation plate (46).