CN115162902A - Vacuum sealing door plate structure for transmission cavity - Google Patents
Vacuum sealing door plate structure for transmission cavity Download PDFInfo
- Publication number
- CN115162902A CN115162902A CN202210718331.3A CN202210718331A CN115162902A CN 115162902 A CN115162902 A CN 115162902A CN 202210718331 A CN202210718331 A CN 202210718331A CN 115162902 A CN115162902 A CN 115162902A
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- China
- Prior art keywords
- sealing door
- box body
- vacuum
- vacuum box
- door plate
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Links
- 238000007789 sealing Methods 0.000 title claims abstract description 99
- 230000005540 biological transmission Effects 0.000 title claims abstract description 34
- 230000000670 limiting effect Effects 0.000 claims abstract description 29
- 230000007246 mechanism Effects 0.000 claims abstract description 15
- 238000003825 pressing Methods 0.000 claims abstract description 11
- 230000000712 assembly Effects 0.000 claims abstract description 4
- 238000000429 assembly Methods 0.000 claims abstract description 4
- 238000012546 transfer Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000009471 action Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
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- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/32—Arrangements of wings characterised by the manner of movement; Arrangements of movable wings in openings; Features of wings or frames relating solely to the manner of movement of the wing
- E06B3/34—Arrangements of wings characterised by the manner of movement; Arrangements of movable wings in openings; Features of wings or frames relating solely to the manner of movement of the wing with only one kind of movement
- E06B3/42—Sliding wings; Details of frames with respect to guiding
- E06B3/44—Vertically-sliding wings
- E06B3/4407—Single-hung, i.e. having a single vertical sliding panel
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- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05C—BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
- E05C17/00—Devices for holding wings open; Devices for limiting opening of wings or for holding wings open by a movable member extending between frame and wing; Braking devices, stops or buffers, combined therewith
- E05C17/60—Devices for holding wings open; Devices for limiting opening of wings or for holding wings open by a movable member extending between frame and wing; Braking devices, stops or buffers, combined therewith holding sliding wings open
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- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05D—HINGES OR SUSPENSION DEVICES FOR DOORS, WINDOWS OR WINGS
- E05D15/00—Suspension arrangements for wings
- E05D15/16—Suspension arrangements for wings for wings sliding vertically more or less in their own plane
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- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05F—DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
- E05F15/00—Power-operated mechanisms for wings
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B7/00—Special arrangements or measures in connection with doors or windows
- E06B7/16—Sealing arrangements on wings or parts co-operating with the wings
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- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
- E05Y2999/00—Subject-matter not otherwise provided for in this subclass
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Abstract
The invention relates to a vacuum sealing door plate structure for a transmission cavity, which comprises a vacuum box body, a transmission port arranged at the end part of the vacuum box body, a sealing ring arranged on the outer ring of the transmission port, a sealing door plate arranged at the transmission port and a driving pressing mechanism for driving the sealing door plate to press the sealing ring; the driving pressing mechanism comprises a parallelogram connecting rod assembly and a limiting piece which are respectively arranged at two sides of the vacuum box body, and a power assembly arranged below the vacuum box body; each group of parallelogram connecting rod assemblies comprises a strip plate which is vertically arranged in a sliding manner, two connecting blocks which are respectively vertically arranged on the side surface of the sealing door plate at intervals, and two connecting rods of which two ends are respectively hinged with the end part of the strip plate and the connecting blocks; when the power assembly drives the sealing door plate to ascend, the limiting piece can enable the sealing door plate to horizontally move to press the sealing ring; the invention has simple and compact structure and reduces the production cost, and the driving pressing mechanism and the transmission port are arranged in a staggered way, thereby reducing the working space.
Description
Technical Field
The invention relates to the technical field of vacuum equipment, in particular to a vacuum sealing door plate structure for a transmission cavity.
Background
Vacuum seal door plant structure is a bearing structure who carries out door plant vacuum seal, and current sealing function has the door plant extrusion sealing washer of seal groove to realize and the sealing washer receives the pressure face to be the plane through removing, and in order to reduce the wearing and tearing of sealing washer, the door plant displacement mainly can be divided into following several kinds of forms: the function is realized by turning over the door plate; firstly, horizontally moving the door plate and then vertically moving the door plate; the door plant is removed in slope again to horizontal migration door plant earlier, and along with the continuous development of science and technology, people also are higher and higher to the manufacturing process requirement of vacuum seal door plant structure.
For example, in a gate valve for sealing a vacuum chamber and a vacuum chamber using the gate valve disclosed in the prior art 201822210676.X, and in a vacuum chamber sealing device based on a link mechanism disclosed in the prior art 202021470168.6, driving components for driving a door panel to seal are all arranged on an end face of a sealing port of the vacuum chamber, so that the structure is complex, the manufacturing cost is increased, and a working space is greatly occupied, thereby limiting the use of the gate valve in the semiconductor industry.
Disclosure of Invention
The present invention is directed to overcoming the disadvantages of the prior art by providing a vacuum sealing door panel structure for a transfer chamber.
In order to achieve the purpose, the invention adopts the technical scheme that: a vacuum sealing door plate structure for a transmission cavity comprises a vacuum box body, a transmission cavity arranged in the vacuum box body, a transmission port arranged at the end part of the vacuum box body and communicated with the transmission cavity, a sealing groove arranged at the end part of the vacuum box body and positioned at the outer ring of the transmission port, a sealing ring arranged in the sealing groove, a sealing door plate arranged at the transmission port and a driving pressing mechanism used for driving the sealing door plate to press the sealing ring to seal the transmission port;
the driving pressing mechanism comprises a parallelogram connecting rod assembly and a limiting piece which are respectively arranged at two sides of the vacuum box body, and a power assembly arranged below the vacuum box body;
each group of parallelogram connecting rod assemblies respectively comprise a guide rail vertically arranged on the side surface of the vacuum box, a strip plate vertically and slidably arranged on the guide rail, two connecting blocks respectively vertically arranged on the side surface of the sealing door plate at intervals, and two connecting rods of which two ends are respectively hinged with the end part of the connecting strip plate and the connecting blocks;
when the power assembly drives the parallelogram connecting rod assembly to drive the sealing door plate to ascend, the limiting piece can enable the sealing door plate to horizontally move to press the sealing ring;
the power assembly comprises a U-shaped connecting piece and a driver, wherein two ends of the U-shaped connecting piece are respectively connected with the bottoms of the long strips on two sides of the vacuum box body, and the driver is used for driving the U-shaped connecting piece to ascend and descend.
Preferably, each strip plate is hinged with a telescopic supporting rod; the telescopic end of the supporting rod is hinged with the middle part of the connecting rod positioned above the supporting rod.
Preferably, the limiting part is provided with a clamping groove in a n-shaped structure; the width of draw-in groove slightly is greater than the width of connecting block, and when drive hold-down mechanism drive sealing door board compressed tightly the sealing washer, the connecting block can be blocked in the draw-in groove.
Preferably, the bottom of the outer side of the limiting part is provided with a limiting part; the connecting rod is hinged with the connecting block through a rotating shaft; and the rotating shaft is sleeved with a roller under the limiting part.
Preferably, the two sides of the vacuum box body are provided with positioning grooves which are vertically arranged; part of the guide rail is arranged in the positioning groove, and the rest part extends to the lower part of the vacuum box body.
Preferably, the guide rail has a length at least to allow the transfer opening to be completely exposed when the closure panel is lowered.
Preferably, two sliding blocks which are arranged at intervals up and down are arranged on the guide rail; the upper end and the lower end of the long strip plate are respectively arranged on the two sliding blocks.
Preferably, the sealing door plate is arranged in a staggered manner with respect to the drive, and the sealing door plate is arranged on the outer side of the drive.
Preferably, the driver is one of an air cylinder, a linear module and a servo electric cylinder.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
1. when the power assembly drives the parallelogram connecting rod assembly to drive the sealing door plate to ascend, the limiting piece can enable the sealing door plate to horizontally move to compress the sealing ring, the structure is simple and compact, the production cost is reduced, and the driving compressing mechanism and the transmission port are arranged in a staggered mode, so that the working space is reduced;
2. according to the invention, the telescopic supporting rod is arranged to form a triangular structure together with the strip plate and the connecting rod, and the supporting rod can maintain the sealing door plate at a certain specific position under the action of no external force, so that the end surfaces of the sealing ring and the transmission cavity are not rubbed during the vertical movement of the sealing door plate;
3. the invention has convenient maintenance and assembly and is easy to maintain the sealing ring and other parts.
Drawings
The technical scheme of the invention is further explained by combining the drawings as follows:
FIG. 1 is a state diagram of the closure door panel of the present invention when closed;
FIG. 2 is a state diagram of the closure door panel of the present invention before it is closed;
FIG. 3 is a view showing the state of the closure panel of the present invention when opened;
FIG. 4 is a perspective view of the closure door panel of the present invention when closed;
FIG. 5 is an enlarged view of a portion A of FIG. 4;
fig. 6 is a perspective view of the closure panel of the present invention when open.
Wherein: 1. a vacuum box body; 11. a transfer chamber; 12. a seal ring; 2. a sealing door panel; 3. driving the pressing mechanism; 31. a parallelogram linkage assembly; 311. a guide rail; 312. a long slat; 313. connecting blocks; 314. a connecting rod; 315. a support bar; 316. a roller; 317. a positioning groove; 318. a slider; 32. a limiting member; 321. a limiting part; 33. a power assembly; 331. a U-shaped connector; 332. a driver.
Detailed Description
The invention is described in further detail below with reference to the figures and the embodiments.
Fig. 1-5 show a vacuum sealing door panel structure for a transmission cavity according to the present invention, which comprises a vacuum box 1, a transmission cavity 11 disposed inside the vacuum box 1, a transmission port disposed at an end of the vacuum box 1 and communicated with the transmission cavity 11, a sealing groove disposed at an end of the vacuum box 1 and located at an outer ring of the transmission port, a sealing ring 12 disposed in the sealing groove, a sealing door panel 2 disposed at the transmission port, and a driving pressing mechanism 3 for driving the sealing door panel 2 to press the sealing ring 12 to seal the transmission port;
the driving pressing mechanism 3 comprises a parallelogram connecting rod assembly 31 and a limiting piece 32 which are respectively arranged at two sides of the vacuum box body 1, and a power assembly 33 arranged below the vacuum box body 1;
each group of parallelogram connecting rod assemblies 31 comprises a guide rail 311 vertically arranged on the side surface of the vacuum box body 1, a strip plate 312 vertically and slidably arranged on the guide rail 311, two connecting blocks 313 respectively vertically arranged on the side surface of the sealing door plate 2 at intervals, and two connecting rods 314 with two ends respectively hinged with the end part of the strip plate 312 and the connecting blocks 313;
when the power assembly 33 drives the parallelogram connecting rod assembly 31 to drive the sealing door panel 2 to ascend, the limiting piece 32 can enable the sealing door panel 2 to horizontally move to press the sealing ring 12 tightly;
the power assembly 33 comprises a U-shaped connecting piece 331 with two ends respectively connected with the bottoms of the long strip plates 312 at two sides of the vacuum box body 1, and a driver 332 for driving the U-shaped connecting piece 331 to ascend and descend.
When in work: the vacuum box body 1 and the driver 332 are both arranged on the frame; when the sealing door panel 2 needs to be opened, the driver 332 drives the U-shaped connecting piece 331 to drive the strip plates 312 on the two sides of the vacuum box body 1 to move downwards along the guide rails 311, and the strip plates 312 are hinged with the sealing door panel 2 through the two connecting rods 314, so that the sealing door panel 2 is driven to move downwards together, and the sealing door panel 2 is opened to expose the conveying port; when the sealing door plate 2 needs to be closed, the driver 332 drives the U-shaped connecting piece 331 to drive the strip plates 312 on the two sides of the vacuum box body 1 to move upwards along the guide rail 311, and as the strip plates 312 are hinged to the sealing door plate 2 through the two connecting rods 314, the sealing door plate 2 is driven to move upwards together, when the connecting rod 314 at the top touches the limiting part 32, the driver 332 continues to drive the strip plates 312 to move upwards, and under the effect of the limiting part 32, the sealing door plate 2 can move horizontally to press the sealing ring 12, so that the transmission port is sealed, the structure is simple and compact, and the production cost is reduced.
Furthermore, each strip plate 312 is hinged with a telescopic support rod 315; the telescopic end of the support rod 315 is hinged with the middle part of the connecting rod 314 positioned above; according to the invention, the telescopic support rod 315 is arranged to form a triangular structure together with the strip plate 312 and the connecting rod 314, and the support rod 315 can maintain the sealing door panel 2 at a certain specific position under the action of no external force, so that the end surfaces of the sealing ring 12 and the transmission cavity 11 are not rubbed during the vertical movement of the sealing door panel 2.
Further, the limiting member 32 is provided with a slot in a n-shaped structure; the width of the clamping groove is slightly larger than that of the connecting block 313, and when the pressing mechanism 3 is driven to drive the sealing door plate 2 to press the sealing ring 12, the connecting block 313 can be clamped into the clamping groove; according to the invention, the limiting piece 32 is provided with the clamping groove, so that the sealing door plate 2 can be clamped into the clamping groove when the sealing door plate 2 is closed, the limiting effect is achieved, and the left and right movement of the sealing door plate 2 can be effectively prevented.
Further, a limiting portion 321 is disposed at the bottom of the outer side of the limiting member 32; the connecting rod 314 is hinged with the connecting block 313 through a rotating shaft; the roller 316 is sleeved under the limiting part 321 on the rotating shaft; according to the invention, the roller 316 is sleeved under the limiting part 321, so that the abrasion can be reduced, and the service life is prolonged.
Further, two sides of the vacuum box body 1 are provided with positioning grooves 317 which are vertically arranged; part of the guide rail 311 is arranged in the positioning groove 317, and the rest part extends to the lower part of the vacuum box body 1; in the invention, because the part of the guide rail 311 is arranged in the positioning groove 317, not only the positioning function can be realized, but also the integral structure can be more compact.
Further, the length of the guide rail 311 is twice the height of the sealing door panel 2, so that the transfer opening can be completely exposed when the sealing door panel 2 descends.
Further, two sliders 318 which are arranged at intervals up and down are arranged on the guide rail 311; the upper end and the lower end of the long strip plate 312 are respectively arranged on the two sliding blocks 318; according to the invention, the two sliders 318 which are arranged at intervals up and down are arranged on the guide rail 311, so that the long strip plate 312 is more stable in the up-and-down movement process.
Further, the sealing door panel 2 and the driver 332 are arranged in a staggered manner, and the sealing door panel 2 is arranged on the outer side of the driver 332, so that the working space is reduced.
Further, the driver 332 is one of a cylinder, a linear module, and a servo cylinder, which can be selected according to the working situation.
The above are only specific application examples of the present invention, and do not limit the scope of the present invention in any way. All the technical solutions formed by equivalent transformation or equivalent replacement fall within the protection scope of the present invention.
Claims (9)
1. A vacuum sealing door panel structure for a transmission cavity is characterized in that: the vacuum box comprises a vacuum box body, a transmission cavity arranged in the vacuum box body, a transmission port arranged at the end part of the vacuum box body and communicated with the transmission cavity, a sealing groove arranged at the end part of the vacuum box body and positioned at the outer ring of the transmission port, a sealing ring arranged in the sealing groove, a sealing door plate arranged at the transmission port and a driving pressing mechanism for driving the sealing door plate to press the sealing ring to seal the transmission port;
the driving pressing mechanism comprises a parallelogram connecting rod assembly and a limiting piece which are respectively arranged at two sides of the vacuum box body, and a power assembly arranged below the vacuum box body;
each group of parallelogram connecting rod assemblies respectively comprise a guide rail vertically arranged on the side surface of the vacuum box, a strip plate vertically and slidably arranged on the guide rail, two connecting blocks respectively vertically arranged on the side surface of the sealing door plate at intervals, and two connecting rods of which two ends are respectively hinged with the end part of the connecting strip plate and the connecting blocks;
when the power assembly drives the parallelogram connecting rod assembly to drive the sealing door plate to ascend, the limiting piece can enable the sealing door plate to horizontally move to press the sealing ring;
the power assembly comprises a U-shaped connecting piece and a driver, wherein two ends of the U-shaped connecting piece are respectively connected with the bottoms of the long strips on two sides of the vacuum box body, and the driver is used for driving the U-shaped connecting piece to ascend and descend.
2. The vacuum sealing door panel structure for a transfer chamber according to claim 1, wherein: each strip plate is hinged with a telescopic supporting rod; the telescopic end of the supporting rod is hinged with the middle part of the connecting rod positioned above the telescopic end of the supporting rod.
3. The vacuum sealing door panel structure for a transfer chamber according to claim 2, wherein: the limiting part is provided with a clamping groove which is of an inverted U-shaped structure; the width of draw-in groove slightly is greater than the width of connecting block, and when drive hold-down mechanism drive sealing door board compressed tightly the sealing washer, the connecting block can be blocked in the draw-in groove.
4. The vacuum sealing door panel structure for a transfer chamber according to claim 3, wherein: the bottom of the outer side of the limiting piece is provided with a limiting part; the connecting rod is hinged with the connecting block through a rotating shaft; and the rotating shaft is sleeved with a roller under the limiting part.
5. The vacuum sealing door panel structure for a transfer chamber according to any one of claims 1 to 4, wherein: two sides of the vacuum box body are provided with positioning grooves which are vertically arranged; part of the guide rail is arranged in the positioning groove, and the rest part extends to the lower part of the vacuum box body.
6. The vacuum sealing door panel structure for a transfer chamber of claim 5, wherein: the length of the guide rail at least can enable the sealing door panel to be completely exposed out of the transmission port when descending.
7. The vacuum sealing door panel structure for a transfer chamber of claim 6, wherein: two sliding blocks which are arranged at intervals up and down are arranged on the guide rail; the upper end and the lower end of the long strip plate are respectively arranged on the two sliding blocks.
8. The vacuum sealing door panel structure for the transfer chamber according to claim 7, wherein: the sealing door plate and the driver are arranged in a staggered mode, and the sealing door plate is arranged on the outer side of the driver.
9. The vacuum sealing door panel structure for a transfer chamber of claim 8, wherein: the driver is one of a cylinder, a linear module and a servo electric cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210718331.3A CN115162902A (en) | 2022-06-23 | 2022-06-23 | Vacuum sealing door plate structure for transmission cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210718331.3A CN115162902A (en) | 2022-06-23 | 2022-06-23 | Vacuum sealing door plate structure for transmission cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115162902A true CN115162902A (en) | 2022-10-11 |
Family
ID=83486559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210718331.3A Pending CN115162902A (en) | 2022-06-23 | 2022-06-23 | Vacuum sealing door plate structure for transmission cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115162902A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116936419A (en) * | 2023-09-13 | 2023-10-24 | 上海普达特半导体设备有限公司 | Semiconductor process equipment and lifting sealing door mechanism thereof |
-
2022
- 2022-06-23 CN CN202210718331.3A patent/CN115162902A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116936419A (en) * | 2023-09-13 | 2023-10-24 | 上海普达特半导体设备有限公司 | Semiconductor process equipment and lifting sealing door mechanism thereof |
| CN116936419B (en) * | 2023-09-13 | 2023-12-01 | 上海普达特半导体设备有限公司 | Semiconductor process equipment and lifting sealing door mechanism thereof |
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