CN115128308A - Interface conversion device and method for testing performance of low-pass filter in semiconductor equipment - Google Patents

Interface conversion device and method for testing performance of low-pass filter in semiconductor equipment Download PDF

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Publication number
CN115128308A
CN115128308A CN202210737336.0A CN202210737336A CN115128308A CN 115128308 A CN115128308 A CN 115128308A CN 202210737336 A CN202210737336 A CN 202210737336A CN 115128308 A CN115128308 A CN 115128308A
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China
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connector
interface
radio frequency
test
pass filter
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赵长江
慕晓航
任攀
王凯
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Beijing Naura Microelectronics Equipment Co Ltd
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Beijing Naura Microelectronics Equipment Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416—Connectors, terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere

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  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

The invention discloses an interface conversion device and a method for testing the performance of a low-pass filter in semiconductor equipment. The device includes: the device comprises an input adapter, a first test interface and a second test interface, wherein the input adapter comprises a first connector, a second connector and a first radio frequency cable for connecting the first connector and the second connector, the first connector is an N-type coaxial male connector or female connector, the second connector is an SMPW-K type non-coaxial male connector or female connector, the first connector is used for being connected with the first test interface, and the second connector is used for being connected with the radio frequency input interface; the input adaptor comprises a third connector, a fourth connector and a second radio frequency cable for connecting the third connector and the fourth connector, the third connector is an N-type coaxial male connector or female connector, the fourth connector is an SMPW-K type non-coaxial male connector or female connector, the third connector is used for being connected with the second test interface, and the fourth connector is used for being connected with the radio frequency output interface or the second connector. The invention can improve the testing efficiency of the low-pass filter and the accuracy of the testing data.

Description

Interface conversion device and method for testing performance of low-pass filter in semiconductor equipment
Technical Field
The present invention relates to the field of semiconductor technologies, and in particular, to an interface conversion apparatus and a method for testing performance of a low pass filter in a semiconductor device.
Background
Parameters such as characteristic impedance, transmission parameter S21, reflection parameter S11 and the like of the filter characteristic of the filter are key parameters of radio frequency components in semiconductor equipment, wherein the parameter S21 is: when port2 is matched, the forward transmission coefficient (gain) from port1 to port2, and the parameter S11 is: when the ports 2 are matched, the reflection coefficient (input return loss) of the port1 can accurately reflect the filtering performance of the filter by accurately measuring the parameters, and also can provide data reference for the improvement and optimization of the filter, thereby being beneficial to shortening the design period of a radio frequency system of semiconductor equipment and the stable operation of the equipment. For example, the RF low-pass filter of the film deposition equipment with the RF module, which aims to protect the heating power transmission signal and the furnace thermocouple feedback signal from being interfered by the high-frequency signal (13.56MHz), is important for accurately measuring the filtering performance (S21). Because the heating power signal and the thermocouple feedback signal are transmitted by low-frequency signals (50Hz), the used connector and the cable are of a single-conductor structure (such as a quick connector with the model number of SMPW-K-F/M), and belong to an interface structure of a non-coaxial structure. The transmission parameter S11, the reflection parameter S21 and other parameters of the low-pass filter are tested by a vector network analyzer with a standard coaxial interface (an N-type or SMA-type coaxial radio frequency connector), and a test fixture for converting a non-coaxial interface into a coaxial interface is required to be manufactured to realize the connection of equipment.
A low-pass filter test fixture in an existing typical semiconductor device is shown in fig. 1, and the test fixture mainly includes two coaxial radio frequency cables, an inner conductor (an alternating-current heating signal line or a thermocouple signal line) of a low-pass filter SMPW-K type non-coaxial fast connector is directly connected to an inner conductor of an N-type coaxial radio frequency connector of a vector network analyzer through the radio frequency cables, an outer conductor of the N-type coaxial radio frequency connector of the vector network analyzer is grounded with a housing of a filter through the test fixture, and then, relevant parameters such as input impedance Zin of the low-pass filter, transmission parameter S21, reflection parameter S11 and the like are directly tested. The test fixture is inconvenient to operate and low in test efficiency during testing, measurement errors can be caused due to the introduction of the test fixture, and the measurement results cannot truly reflect the filtering performance of the filter.
Disclosure of Invention
The invention aims to provide an interface conversion device and a method for testing the performance of a low-pass filter in semiconductor equipment, which are used for improving the testing efficiency of the low-pass filter and improving the accuracy of test data.
In a first aspect, the present invention provides an interface conversion apparatus for connecting a vector network analyzer and an interface of a low-pass filter in a semiconductor device, where the low-pass filter has a radio frequency input interface and a radio frequency output interface, the radio frequency input interface is one of an SMPW-K type non-coaxial male header and a female header, the radio frequency output interface is the other of the SMPW-K type non-coaxial male header and the female header, the vector network analyzer has a first test interface and a second test interface, the first test interface is one of an N type coaxial male header and a female header, and the second test interface is the other of the N type coaxial male header and the female header, the apparatus includes:
the input adaptor comprises a first connector, a second connector and a first radio frequency cable for connecting the first connector and the second connector, the first connector is an N-type coaxial male head or female head, the second connector is an SMPW-K type non-coaxial male head or female head, the first connector is used for being connected with the first test interface, and the second connector is used for being connected with the radio frequency input interface;
the output adaptor, the input adaptor includes third joint, fourth joint and connects the third joint with the second radio frequency cable of fourth joint, the three interfaces are coaxial public head or female head of N type, the fourth joint is the non-coaxial public head or female head of SMPW-K type, the third joint be used for with second test interface connects, the fourth joint be used for with radio frequency output interface or the second articulate.
Optionally, the first connector has one first inner conductor and the second connector has a plurality of second inner conductors;
one end of the first radio frequency cable is connected with the first inner conductor, and the other end of the first radio frequency cable is connected with one second inner conductor.
Optionally, the third connector has one third inner conductor and the fourth connector has a plurality of fourth inner conductors;
one end of the second radio frequency cable is connected with the third inner conductor, and the other end of the second radio frequency cable is connected with one fourth inner conductor.
Optionally, the first and second radio frequency cables are the same length.
In a second aspect, the present invention provides a method for testing the performance of a low pass filter in a semiconductor device by using the interface conversion apparatus of the first aspect, where the method includes:
connecting the first joint of the input adaptor and the third joint of the output adaptor with the first test interface and the second test interface of a vector network analyzer respectively, and connecting the second joint of the input adaptor with the fourth joint of the output adaptor;
performing radio frequency test through the vector network analyzer to obtain first test data;
connecting the second joint and the fourth joint with the radio frequency input interface and the radio frequency output interface of a low-pass filter respectively;
performing radio frequency test again through the vector network analyzer to obtain second test data;
and calculating the test data of the low-pass filter according to the first test data and the second test data.
Optionally, the first test data and the second test data comprise measurements of transmission parameter S21 and reflection parameter S11.
Optionally, the test data of the low-pass filter is calculated by the following formula:
S21 practice of ＝S21 B -S21 A
S11 Practice of ＝S11 B -S11 A /2
Wherein, S21 In fact 、S11 Practice of Actual measured values of the transmission parameter S21 and the reflection parameter S11 of the low-pass filter, S21, respectively A And S11 A Measured values of transmission parameter S21 and reflection parameter S11, S21, respectively, in the first test data B And S11 B Measured values of transmission parameter S21 and reflection parameter S11, respectively, in the second test data.
Optionally, while the second connector and the fourth connector are respectively connected to the radio frequency input interface and the radio frequency output interface of the low pass filter, the method further includes:
grounding the outer conductors of the first test interface, the second test interface, the first connector and the third connector and grounding the housing of the low pass filter.
Optionally, before connecting the first connector of the input adaptor and the third connector of the output adaptor to the first test interface and the second test interface of the vector network analyzer, respectively, the method further includes:
and calibrating the vector network analyzer.
Optionally, the calibrating the vector network analyzer includes:
and carrying out full-dual-port direct connection calibration on the vector network analyzer.
The invention has the beneficial effects that:
the input adaptor and the output adaptor of the interface conversion device are connected with the N-type coaxial interface and the SMPW-K type non-coaxial interface by adopting coaxial cables, so that when the performance of a low-pass filter is tested, the N-type coaxial interface of the vector network analyzer can be directly connected with the SMPW-K type non-coaxial interface of the low-pass filter by the input adaptor and the output adaptor, the connection operation is convenient, and the test efficiency can be improved.
According to the testing method, the input conversion part and the output conversion part are directly connected, first testing data of the interface conversion device are tested, measuring errors brought by the interface conversion device are obtained, then the conversion device is used for completing the connection of the vector network analyzer and the low-pass filter, second testing data formed by the joint superposition of the interface conversion device and the low-pass filter are tested, and finally the second testing data can be corrected based on the first testing data to obtain the real testing data of the low-pass filter, so that the accuracy of the testing data of the low-pass filter can be effectively improved.
The apparatus of the present invention has other features and advantages which will be apparent from or are set forth in detail in the accompanying drawings and the following detailed description, which are incorporated herein, and which together serve to explain certain principles of the invention.
Drawings
The above and other objects, features and advantages of the present invention will become more apparent by describing in more detail exemplary embodiments thereof with reference to the attached drawings, in which like reference numerals generally represent like parts.
Fig. 1 shows a schematic diagram of a conventional low-pass filter measurement performed by a test fixture.
Fig. 2 shows a schematic interface structure of the low-pass filter.
Fig. 3 shows a schematic diagram of an interface structure of the vector network analyzer.
Fig. 4 to 5 are structural diagrams showing an interface conversion apparatus according to embodiment 1 of the present invention.
Fig. 6 to 7 are connection diagrams showing a method of testing the performance of the low pass filter in the semiconductor device according to embodiment 2 of the present invention.
Detailed Description
The impedance mismatching can be caused by a switching interface between an N-type coaxial interface introduced in the existing low-pass filter testing method and an SMPW-K-type non-coaxial interface, the impedance mismatching can be superposed in the measurement of the filter, so that errors exist between the measured result and the real input impedance Zin, the transmission parameter S21 and the reflection parameter S11 of the filter, and the error is not corrected by independently testing a rotary joint, so that the measurement result is inaccurate.
The invention provides an interface conversion device and a method for testing the performance of a low-pass filter in semiconductor equipment, which can improve the measurement precision of radio frequency parameters (input impedance Zin, transmission parameters S21 and reflection parameters S11) of a radio frequency filter of a non-coaxial interface in the semiconductor equipment and provide accurate data for optimization and improvement of EMC (Electro Magnetic Compatibility) design of the equipment.
The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
Example 1
As shown in fig. 2 to fig. 5, this embodiment provides an interface conversion apparatus for connecting a vector network analyzer and an interface of a low-pass filter in a semiconductor device, where the low-pass filter has a radio frequency input interface 401 and a radio frequency output interface 402, the radio frequency input interface 401 is one of an SMPW-K type non-coaxial male header and a female header, the radio frequency output interface 402 is the other of the SMPW-K type non-coaxial male header and the female header, the vector network analyzer has a first test interface 301 and a second test interface 302, the first test interface 301 is one of an N type coaxial male header and a female header, and the second test interface 302 is the other of the N type coaxial male header and the female header. In this embodiment, the radio frequency input interface 401 is an SMPW-K type non-coaxial female connector (SMPW-K-M), the radio frequency output interface 402 is an SMPW-K type non-coaxial male connector (SMPW-K-F), the vector network analyzer has a first test interface 301 and a second test interface 302, the first test interface 301 is an N-type coaxial male connector (N-M), the second test interface 302 is an N-type coaxial female connector (N-F), and the first test interface 301 and the second test interface 302 are respectively connected to two PORTs PORT1 and PORT2 of the vector network analyzer through coaxial cables.
The interface conversion device of the embodiment includes:
the input adaptor 1, the input adaptor 1 includes a first connector 101, a second connector 102 and a first radio frequency cable 103 connecting the first connector 101 and the second connector 102, the first connector 101 is an N-type coaxial female connector (N-F), the second connector 102 is an SMPW-K type non-coaxial male connector (N-M), the first connector 101 is used for connecting with the first test interface 301, and the second connector 102 is used for connecting with the radio frequency input interface 401;
the output adaptor 2 and the input adaptor 1 include a third connector 201, a fourth connector 202 and a second radio frequency cable 203 connected to the third connector 201 and the fourth connector 202, the third interface is an N-type coaxial male connector, the second connector 102 is an SMPW-K type non-coaxial female connector, the third connector 201 is used for being connected to the second test interface 302, and the fourth connector 202 is used for being connected to the radio frequency output interface 402.
In this embodiment, the first connector 101 has one first inner conductor, and the second connector 102 has a plurality of second inner conductors; one end of the first radio frequency cable 103 is connected to the first inner conductor and the other end of the first radio frequency cable 103 is connected to a second inner conductor.
The third connector 201 has a third inner conductor, and the fourth connector 202 has a plurality of fourth inner conductors; one end of the second rf cable 203 is connected to the third inner conductor and the other end of the second rf cable 203 is connected to a fourth inner conductor.
The connection between the radio frequency cable and the interface inner conductor can be realized by welding.
Preferably, the first radio frequency cable 103 and the second radio frequency cable 203 are the same length. The two radio frequency lines with the same length can ensure that the input adapter piece 1 and the output adapter piece 2 are of symmetrical structures, and the transmission parameters of the input adapter piece 1 and the output adapter piece 2 are equal, so that error correction calculation is facilitated.
In the interface conversion device of the embodiment, the input adaptor 1 and the output adaptor 2 are connected with the N-type coaxial interface and the SMPW-K-type non-coaxial interface by using the coaxial cable, and when the performance of the low-pass filter 4 is tested, the N-type coaxial interface of the vector network analyzer 3 can be directly connected with the SMPW-K-type non-coaxial interface of the low-pass filter 4 by the input adaptor 1 and the output adaptor 2.
Example 2
This embodiment provides a method for testing the performance of a low-pass filter in a semiconductor device by applying the interface conversion apparatus of embodiment 1, including:
as shown in fig. 6, step S1 is performed: connecting the first joint 101 of the input adapter 1 and the third joint 201 of the output adapter 2 with the first test interface 301 and the second test interface 302 of the vector network analyzer 3, respectively, and connecting the second joint 102 of the input adapter 1 with the fourth joint 202 of the output adapter 2;
step S0 is also included before step S1 is executed: the vector network analyzer 3 is calibrated.
In this embodiment, a full-dual port pass-through calibration of the vector network analyzer 3 is adopted.
Specifically, the vector network analyzer 3 is calibrated by using a direct calibration piece, a short calibration piece and an open calibration piece with known parameters, a corresponding calibration piece model is selected on a calibration interface of the vector network analyzer 3, and then direct calibration or reflection calibration is selected. For example, firstly, a through calibration piece is selected to connect the PORT1 and the PORT2 in a through manner, then the through calibration is selected to complete the through calibration of the PORT1 and the PORT2, then an open calibration piece is adopted to connect the PORT1, a reflection test is selected, an open calibration is carried out on the PORT1, then the open calibration piece is adopted to connect the PORT2, a reflection test is selected, an open calibration is carried out on the PORT2, then a short calibration piece is adopted to connect the PORT1, a reflection test is selected, a short calibration is carried out on the PORT1, then the short calibration piece is adopted to connect the PORT2, a reflection test is selected, the short calibration is carried out on the PORT2, finally, the load calibration piece is adopted to connect the PORT1, the reflection test is selected, the PORT1 is carried out on the load calibration piece, the PORT2 is adopted, the reflection test is selected, and the load calibration is carried out on the PORT 2. The calibration of the dual PORTs is completed, and the directional error, the crosstalk, the source matching error, the frequency response reflection tracking error and the frequency response transmission tracking error of the transmission or reflection of the PORT1 and PORT2 PORTs can be removed.
Step S2 is executed: performing radio frequency test through a vector network analyzer 3 to obtain first test data;
specifically, after the interface switching device is connected with the vector network analyzer 3, the transmission parameters S21 of PORTs 1-PORT 2 and the reflection parameters S11 of PORTs of PORT1 are tested to obtain first test data, and the record data is S21 A 、S11 A In dB;
as shown in fig. 7, step S3 is performed: the second connector 102 and the fourth connector 202 are respectively connected with a radio frequency input interface 401 and a radio frequency output interface 402 of the low-pass filter 4;
meanwhile, the outer conductors of the first test interface 301, the second test interface 302, the first connector 101, and the third connector 201 are grounded, and the housing of the low-pass filter 4 is grounded.
Step S4 is executed: performing radio frequency test again through the vector network analyzer 3 to obtain second test data;
specifically, after the low pass filter 4 is connected to the network analyzer 3, the N-type interface outer conductor of the interface adapter and the filter housing are grounded at the same time, the transmission parameter S21 of the INPUT-OUTPUT port of the filter and the sweet potato parameter S11 of the INPUT port of the filter are tested, the second test data is obtained, and the test data is recorded as S21 B 、S11 B In dB;
step S5 is executed: test data of the low-pass filter 4 are calculated from the first test data and the second test data.
The test data of the low-pass filter 4 is calculated by the following formula:
S21 in fact ＝S21 B -S21 A
S11 Practice of ＝S11 B -S11 A /2
Wherein, S21 In fact 、S11 Practice of Actual measured values of the transmission parameter S21 and the reflection parameter S11 of the low-pass filter 4, S21, respectively A And S11 A Measured values of the transmission parameter S21 and the reflection parameter S11, S21, respectively, in the first test data B And S11 B Measured values of the transmission parameter S21 and the reflection parameter S11 in the second test data, respectively。
Specifically, since the interface switching device is introduced into both the rf input end and the rf output end of the filter during the test, the transmission parameter test result is equivalent to "embedding" the transmission parameter values S21 of the first switching element and the second switching element A And the input adaptor 1 and the output adaptor 2 are symmetrical structures, and have equal transmission parameters, which are both S21 A 2(dB), the transmission parameter S21 of the test result B Subtracting the value of the adapter to obtain the transmission parameter of the real filter: s21 ═ S21 B -S21 A (ii) a Whereas the reflection parameter value measurement of the filter is superimposed only on the value of the input adapter 1, i.e. S11 A And/2, so the reflection parameter measurement result of the filter is: s11 In fact ＝S11 B -S11 A /2。
The invention improves the convenience of the test connection of the vector network analyzer 3 and the low-pass filter 4, namely the connection stability, by improving the structure of the interface adapter, eliminates the measurement error brought by the transmission parameter S21 and the reflection parameter S11 of the low-pass filter 4 by the interface adapter through a de-embedding method, and improves the measurement precision of non-coaxial interface radio frequency components such as the low-pass filter 4 and the like.
Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments.

Claims (10)

1. An interface conversion apparatus for connection between a vector network analyzer and an interface of a low pass filter in a semiconductor device, the low pass filter having a radio frequency input interface and a radio frequency output interface, the radio frequency input interface being one of an SMPW-K type non-coaxial male and female header, the radio frequency output interface being the other of the SMPW-K type non-coaxial male and female header, the vector network analyzer having a first test interface and a second test interface, the first test interface being one of an N-type coaxial male and female header, the second test interface being the other of the N-type coaxial male and female header, the apparatus comprising:
the input adaptor comprises a first connector, a second connector and a first radio frequency cable for connecting the first connector and the second connector, the first connector is an N-type coaxial male connector or female connector, the second connector is an SMPW-K type non-coaxial male connector or female connector, the first connector is used for being connected with the first test interface, and the second connector is used for being connected with the radio frequency input interface;
the output adaptor, the input adaptor includes third joint, fourth joint and connects the third joint with the second radio frequency cable of fourth joint, the three interfaces are coaxial public head or female head of N type, the fourth joint is the non-coaxial public head or female head of SMPW-K type, the third joint be used for with second test interface connects, the fourth joint be used for with radio frequency output interface or the second articulate.
2. The interface converting apparatus of claim 1, wherein said first connector has a first inner conductor, and said second connector has a plurality of second inner conductors;
one end of the first radio frequency cable is connected with the first inner conductor, and the other end of the first radio frequency cable is connected with one second inner conductor.
3. The interface converting apparatus of claim 1, wherein the third connector has a third inner conductor, and the fourth connector has a plurality of fourth inner conductors;
one end of the second radio frequency cable is connected with the third inner conductor, and the other end of the second radio frequency cable is connected with one fourth inner conductor.
4. The interface converting apparatus according to any one of claims 1 to 3, wherein the first radio frequency cable and the second radio frequency cable have the same length.
5. A method for testing the performance of an low pass filter in a semiconductor device using the interface converting apparatus according to any one of claims 1 to 4, the method comprising:
connecting the first joint of the input adaptor and the third joint of the output adaptor with the first test interface and the second test interface of a vector network analyzer respectively, and connecting the second joint of the input adaptor with the fourth joint of the output adaptor;
performing radio frequency test through the vector network analyzer to obtain first test data;
connecting the second joint and the fourth joint with the radio frequency input interface and the radio frequency output interface of the low-pass filter respectively;
performing radio frequency test again through the vector network analyzer to obtain second test data;
and calculating the test data of the low-pass filter according to the first test data and the second test data.
6. The method of claim 5, wherein the first test data and the second test data comprise measured values of a transmission parameter S21 and a reflection parameter S11.
7. The method of claim 6, wherein the test data for the low pass filter is calculated by the following equation:
S21 practice of ＝S21 B -S21 A
S11 Practice of ＝S11 B -S11 A /2
Wherein, S21 Practice of 、S11 Practice of Actual measured values of the transmission parameter S21 and the reflection parameter S11, S21, respectively, of the low-pass filter A And S11 A Measured values of transmission parameter S21 and reflection parameter S11, S21, respectively, in the first test data B And S11 B Are respectively asMeasured values of transmission parameter S21 and reflection parameter S11 in the second test data.
8. The method of claim 5, wherein the connecting the second connector and the fourth connector to the radio frequency input interface and the radio frequency output interface of a low pass filter respectively further comprises:
grounding the outer conductors of the first test interface, the second test interface, the first connector and the third connector and grounding the housing of the low pass filter.
9. The method of claim 5, further comprising, prior to connecting the first connector of the input interposer and the third connector of the output interposer to the first test interface and the second test interface, respectively, of a vector network analyzer:
and calibrating the vector network analyzer.
10. The method of claim 9, wherein the calibrating the vector network analyzer comprises:
and carrying out full-dual-port through calibration on the vector network analyzer.
CN202210737336.0A 2022-06-27 2022-06-27 Interface conversion device and method for testing performance of low-pass filter in semiconductor equipment Pending CN115128308A (en)

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Application Number Priority Date Filing Date Title
CN202210737336.0A CN115128308A (en) 2022-06-27 2022-06-27 Interface conversion device and method for testing performance of low-pass filter in semiconductor equipment

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