CN115127664A - Optical fiber microsphere vibration sensing device and preparation method thereof - Google Patents
Optical fiber microsphere vibration sensing device and preparation method thereof Download PDFInfo
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- CN115127664A CN115127664A CN202210865828.8A CN202210865828A CN115127664A CN 115127664 A CN115127664 A CN 115127664A CN 202210865828 A CN202210865828 A CN 202210865828A CN 115127664 A CN115127664 A CN 115127664A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Abstract
The invention discloses an optical fiber microsphere vibration sensing device and a preparation method thereof, wherein the optical fiber microsphere vibration sensing device comprises: the optical fiber comprises a single-mode optical fiber, a cavity tube structure, a microsphere structure and a reflecting membrane; the single mode fiber is connected with the cavity tube structure; the cavity tube structure is connected between the single mode fiber and the reflection diaphragm; the microsphere structure is arranged in the cavity tube structure and is positioned between the single-mode fiber and the reflecting membrane; the light beam is transmitted into the cavity tube structure through the single-mode fiber and is in contact with the microsphere structure, a part of the light beam is reflected by the single-mode fiber and the microsphere structure to form a first reflected light beam and a second reflected light beam, and a part of the light beam passes through the microsphere structure to reach the reflecting membrane and is reflected by the reflecting membrane to form a third reflected light beam. The Fabry-Perot cavity length is changed by forming interference in the cavity tube structure through the microsphere structure, so that the Fabry-Perot cavity length requirement is lower compared with that of a diaphragm type vibration sensor, and the limitation of the diaphragm material is avoided.
Description
Technical Field
The invention relates to the technical field of optical fiber sensing, in particular to an optical fiber microsphere vibration sensing device and a preparation method thereof.
Background
The optical fiber Fabry-Perot vibration sensor can be used for measuring vibration signals and micro displacement, and can also be used for detecting multi-band sound wave signals and the like. The fiber Fabry-Perot vibration sensor generally comprises a Fabry-Perot micro-resonant cavity formed by an optical fiber end face and a diaphragm inner surface, and when external pressure acts on the diaphragm, the diaphragm is deformed, so that the Fabry-Perot cavity length is changed. Reflected light generated by the end face of the optical fiber and the inner surface of the diaphragm interferes and carries information of Fabry-Perot cavity length change, interference fringe information can be obtained by using a spectrum method or other demodulation methods, and then the Fabry-Perot cavity length change is demodulated, so that vibration, micro displacement and sound wave sensing are realized.
However, the diaphragm type vibration sensor has high requirements on the material, thickness, reflectivity, etc. of the diaphragm, and the stability of the material of the diaphragm, compatibility with the optical fiber, and firmness need to be considered, so the requirement on the diaphragm is high.
Accordingly, the prior art is yet to be improved and developed.
Disclosure of Invention
In view of the defects of the prior art, the invention aims to provide an optical fiber microsphere vibration sensing device and a preparation method thereof, so as to solve the problem that the existing diaphragm type vibration sensor has high requirements on a diaphragm.
The technical scheme of the invention is as follows:
a fiber optic microsphere vibration sensing device, comprising: the optical fiber comprises a single-mode optical fiber, a cavity tube structure, a microsphere structure and a reflecting membrane; wherein the content of the first and second substances,
the single-mode optical fiber is connected with the cavity tube structure;
the cavity tube structure is connected between the single mode fiber and the reflection diaphragm;
the microsphere structure is arranged in the cavity tube structure and is positioned between the single-mode optical fiber and the reflection diaphragm;
the light beam is transmitted into the cavity tube structure through the single-mode fiber and is in contact with the microsphere structure, a part of the light beam is reflected by the single-mode fiber and the microsphere structure to form a first reflected light beam and a second reflected light beam, and a part of the light beam passes through the microsphere structure and then reaches the reflecting membrane and is reflected by the reflecting membrane to form a third reflected light beam.
In a further arrangement of the present invention, the microsphere structure is made of a material having a refractive index.
The invention is further provided that the microsphere structure is made of one of silicon dioxide, quartz, alumina and silicon carbide.
According to a further configuration of the present invention, the cross section of the microsphere structure is circular or elliptical.
In a further arrangement of the present invention, the cavity tube structure has an accommodating cavity, and the microsphere structure is accommodated in the accommodating cavity and is in rolling connection with the accommodating cavity.
According to the invention, the cavity structure is one of a capillary tube, a hollow fiber and a photonic crystal fiber.
The invention is further provided that the reflection membrane is made of one material of ultraviolet light curing glue, polymethyl methacrylate and polydimethylsiloxane.
Based on the same inventive concept, the invention also provides a preparation method of the optical fiber microsphere vibration sensing device, which comprises the following steps:
welding the single-mode optical fiber with the cavity tube structure;
installing a microsphere structure into the cavity tube structure;
and sealing the cavity tube structure through a reflective membrane so as to encapsulate the microsphere structure in the cavity tube structure.
The invention further provides that the step of fusion-splicing the single-mode optical fiber and the cavity tube structure comprises:
peeling off the coating layer of the single-mode optical fiber, cutting, flattening and cleaning the optical fiber end surface of the single-mode optical fiber, and cutting, flattening and cleaning the cavity tube structure;
welding the cut, flattened and cleaned single-mode optical fiber with the cavity tube structure under the conditions of setting welding current and setting discharge time;
and cutting the length of the welded cavity tube structure to control the length of the cavity tube structure within a preset length range.
In a further aspect of the invention, the step of installing a microsphere structure into the cavity tube structure comprises:
placing the cut cavity tube structure in absolute ethyl alcohol for soaking, and drying the microsphere structure;
and contacting the cavity tube structure soaked with the absolute ethyl alcohol with the dry microsphere structure to attract the dry microsphere structure into the cavity tube structure.
The invention provides an optical fiber microsphere vibration sensing device and a preparation method thereof, wherein the optical fiber microsphere vibration sensing device comprises: the optical fiber comprises a single-mode optical fiber, a cavity tube structure, a microsphere structure and a reflecting membrane; wherein the single mode optical fiber is connected with the cavity tube structure; the cavity tube structure is connected between the single mode fiber and the reflection diaphragm; the microsphere structure is arranged in the cavity tube structure and is positioned between the single-mode optical fiber and the reflection diaphragm; the light beam is transmitted into the cavity tube structure through the single-mode fiber and is in contact with the microsphere structure, a part of the light beam is reflected by the single-mode fiber and the microsphere structure to form a first reflected light beam and a second reflected light beam, and a part of the light beam passes through the microsphere structure and then reaches the reflecting membrane and is reflected by the reflecting membrane to form a third reflected light beam. The invention discloses a Fabry-Perot interferometer which can form three light beam interference by splicing a single mode fiber with a cavity tube structure and packaging a microsphere structure in the cavity tube structure through a reflecting membrane, wherein a Fabry-Perot micro-resonant cavity is formed by the end face of the fiber and the surface of the reflecting membrane. When the microsphere structure is vibrated by the external environment in the cavity tube structure, the microsphere structure can move, so that the length of the Fabry-Perot cavity is changed, and vibration sensing can be realized according to the change of the length of the Fabry-Perot cavity. The Fabry-Perot cavity length is changed by forming interference in the cavity tube structure through the microsphere structure, so that the Fabry-Perot cavity length requirement is lower compared with that of a diaphragm type vibration sensor, and the limitation of the diaphragm material is avoided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic diagram of the overall structure of the optical fiber microsphere vibration sensing device of the present invention.
Fig. 2 is an exploded view of fig. 1.
FIG. 3 is a schematic diagram of the internal structure of the optical fiber microsphere vibration sensing device of the present invention.
FIG. 4 is a schematic flow chart of a method for manufacturing the optical fiber microsphere vibration sensing device according to the present invention.
The various symbols in the drawings: 1. a single mode optical fiber; 11. a fiber core; 2. a cavity tube structure; 3. a microsphere structure; 4. a reflective membrane.
Detailed Description
The invention provides an optical fiber microsphere vibration sensing device and a preparation method thereof, and in order to make the purposes, technical schemes and effects of the invention clearer and clearer, the invention is further described in detail by referring to the attached drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description and claims, the terms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. If there is a description relating to "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or to imply that the number of technical features indicated is implicit. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature.
It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or wirelessly coupled. As used herein, the term "and/or" includes all or any element and all combinations of one or more of the associated listed items.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
Referring to fig. 1 to 3, the present invention provides a preferred embodiment of a fiber optic microsphere vibration sensing device.
As shown in fig. 1, the present invention provides an optical fiber microsphere vibration sensing device, which includes: the optical fiber comprises a single mode fiber 1, a cavity tube structure 2, a microsphere structure 3 and a reflecting membrane 4; wherein the single mode optical fiber 1 is connected with the cavity tube structure 2; the cavity tube structure 2 is connected between the single-mode optical fiber 1 and the reflection diaphragm 4; the microsphere structure 3 is arranged in the cavity tube structure 2 and is positioned between the single-mode optical fiber 1 and the reflective membrane 4; the light beam is transmitted into the cavity tube structure 2 through the single-mode fiber 1 and contacts with the microsphere structure 3, a part of the light beam is reflected by the single-mode fiber 1 and the microsphere structure 3 to form a first reflected light beam and a second reflected light beam, and a part of the light beam passes through the microsphere structure 3 and reaches the reflective membrane 4 and is reflected by the reflective membrane 4 to form a third reflected light beam.
Specifically, the single-mode fiber 1 is spliced with the cavity tube structure 2, and the microsphere structure 3 is packaged in the cavity tube structure 2 through the reflective membrane 4 to form a fabry-perot interferometer capable of forming three-beam interference, wherein the fiber end face of the single-mode fiber 1 and the surface of the reflective membrane 4 form a fabry-perot micro-resonator. The microsphere structure 3 is arranged in the cavity tube structure 2 and is positioned between the single mode fiber 1 and the reflective membrane 4.
In specific implementation, in the process of transmitting the light beam to the cavity tube structure 2 through the single-mode fiber 1, part of the light beam is reflected by the fiber core 11 of the single-mode fiber 1 to form a first reflected light beam, and the other part of the light beam enters the cavity tube structure 2 to be transmitted forward, when the light beam contacts the microsphere structure 3, part of the light beam is reflected by the microsphere structure 3 to form a second reflected light beam, and the rest of the light beam passes through the microsphere structure 3 to reach the reflective membrane 4 and is reflected by the reflective membrane 4 to form a third reflected light beam, so that interference of multiple light beams can be formed. When the micro-sphere structure 3 is vibrated by the external environment in the cavity tube structure 2, the motion can be generated, so that the length of the Fabry-Perot cavity is changed, and vibration sensing can be realized according to the change of the length of the Fabry-Perot cavity. Through comparison and test with the existing vibration sensor, the vibration sensor has accurate vibration response, the measured vibration response range is 700Hz to 35KHz, the signal-to-noise amplitude ratio is 37.74dB, and the vibration sensor can be used as the vibration sensor.
Therefore, the Fabry-Perot cavity length is changed by the interference formed in the cavity tube structure 2 by the microsphere structure 3, the requirements are lower compared with that of a diaphragm type vibration sensor, the manufacturing is simpler, and the limitation caused by factors such as the material, thickness, reflectivity of the diaphragm, compatibility with optical fibers, firmness and the like is avoided.
In some embodiments, the microsphere structures 3 are made of a material having a refractive index. For example, the microsphere structure 3 may be made of one of silica, quartz, alumina, and silicon carbide. In one implementation, the present invention utilizes a silica material to make a silica microsphere structure.
In a further embodiment of an embodiment, the cross-section of the microsphere structure 3 is circular or elliptical in shape.
Further, the cavity tube structure 2 has an accommodating cavity, and the microsphere structure 3 is accommodated in the accommodating cavity and is in rolling connection with the accommodating cavity.
Specifically, microballon structure 3 is ball or oval sphere can in the holding cavity with cavity tubular structure 2 roll connection for work as microballon structure 3 is in can move when receiving external environment's vibration in the cavity tubular structure 2, thereby make the length of Fabry-Perot cavity change, can realize vibration sensing according to the length of Fabry-Perot cavity change.
In some embodiments, the cavity tube structure 2 is one of a capillary tube, a hollow core fiber, and a photonic crystal fiber.
Specifically, the cavity structure 2 may be, but is not limited to, a capillary, a hollow fiber, a photonic crystal fiber, or other optical fiber with a cavity, so as to accommodate the microsphere structure 3. In one implementation, the cavity tube structure 2 may be a capillary tube.
In some embodiments, the reflective film 4 is made of one of uv curable glue, polymethyl methacrylate, and polydimethylsiloxane.
Specifically, the reflective membrane 4 can reflect light beams, and the reflective membrane 4 may be, but is not limited to, made of materials selected from uv curable glue, polymethyl methacrylate, and polydimethylsiloxane. In one implementation, the reflective membrane 4 is made of ultraviolet light curing glue (UV glue).
Referring to fig. 4, in some embodiments, the present disclosure further provides a method for manufacturing an optical fiber microsphere vibration sensing device, which includes:
s100, welding the single-mode optical fiber with the cavity tube structure;
s200, installing a microsphere structure into the cavity pipe structure;
s300, sealing the cavity tube structure through a reflection membrane so as to encapsulate the microsphere structure in the cavity tube structure.
In the technical scheme, the single-mode optical fiber is spliced with the cavity tube structure, the microsphere structure is packaged in the cavity tube structure through the reflecting membrane to form the Fabry-Perot interferometer with three beams of light beam interference, and the end face of the optical fiber and the surface of the reflecting membrane form a Fabry-Perot micro-resonant cavity. When the microsphere structure is vibrated by the external environment in the cavity tube structure, the microsphere structure can move, so that the length of the Fabry-Perot cavity is changed, and vibration sensing can be realized according to the change of the length of the Fabry-Perot cavity. Therefore, the Fabry-Perot cavity length sensor has the advantages that interference is formed in the cavity tube structure through the microsphere structure, so that the Fabry-Perot cavity length can be changed, the requirement is lower compared with that of a diaphragm type vibration sensor, and the limitation of the diaphragm material is avoided.
In some embodiments, step S100 comprises the steps of:
s110, after a coating layer of the single-mode optical fiber is stripped, cutting, flattening and cleaning the optical fiber end surface of the single-mode optical fiber, and cutting, flattening and cleaning a cavity tube structure;
s120, welding the cut, flattened and cleaned single-mode optical fiber and the cavity pipe structure under the conditions of set welding current and set discharging time;
s130, cutting the length of the welded cavity tube structure to control the length of the cavity tube structure within a preset length range.
Specifically, after a section of single-mode optical fiber is stripped of a coating layer, the end face of the single-mode optical fiber is cut flatly and cleaned in a dry cleaning mode, and the single-mode optical fiber and a cavity tube structure which is cut flatly and cleaned in the same mode are placed in an optical fiber fusion splicer to be fused.
Taking the hollow tube structure as an example, because the internal structure of the capillary tube is hollow, it is necessary to select a proper welding current and discharge time, and the capillary tube may be shrunk due to an excessive discharge intensity and an excessive discharge time. In this embodiment, when the single-mode optical fiber and the capillary are fusion-spliced, the fusion-splicing is performed using parameters of a discharge intensity of 30 bits and a discharge time of 800 ms.
When the single-mode optical fiber and the capillary are welded, the length of the capillary needs to be controlled, if the length of the capillary is too long, interference can occur in the tube wall of the capillary, and in order to avoid the interference, the length of the capillary needs to be controlled to be less than 100 micrometers. After the single mode fiber and the capillary tube are welded, the welded single mode fiber and the capillary tube are fixed on a three-dimensional displacement platform and are positioned in the observation field of a microscope, and then a fiber cutter is used for cutting, so that the length of the capillary tube is controlled within 100 micrometers.
In some embodiments, step S200 includes the steps of:
s210, placing the cut cavity tube structure in absolute ethyl alcohol for infiltration, and drying the microsphere structure;
s220, contacting the cavity tube structure soaked with the absolute ethyl alcohol with the dry microsphere structure to attract the dry microsphere structure into the cavity tube structure.
Specifically, after the cavity tube structure is cut, the single-mode optical fiber and the cavity optical structure which are welded together are placed in absolute ethyl alcohol for infiltration, and then the single-mode optical fiber and the cavity optical structure are in quick contact with the dry microsphere structure, so that attraction is generated on the surface of the solid microsphere structure through the surface tension of the absolute ethyl alcohol through the capillary phenomenon, and the dry microsphere structure is attracted into the accommodating cavity of the cavity tube structure.
After the microsphere structure is placed in the cavity tube structure, a reflective membrane is required to be adopted to seal one side of the cavity tube structure, which is far away from the single-mode optical fiber.
In some embodiments, the reflective film may be a UV glue film. When the UV adhesive film is used for packaging the microsphere structure, firstly, the cavity tube structure (taking a capillary tube as an example) provided with the microsphere structure is fixed on a clamp at one side of a fiber melting machine, and an optical fiber adhered with UV adhesive is placed on a clamp at the other side. Under the observation of a camera arranged in the fiber melting machine, the clamp on the right side of the fiber melting machine is controlled to slowly enable the UV glue to be close to the capillary tube, the UV glue is rapidly moved away from the capillary tube after contacting the capillary tube, the UV glue can be sealed on the end face of the capillary tube to form a layer of thin film, and then the sensing device after being sealed with the thin film is placed under an ultraviolet lamp to irradiate for 30 seconds to cure the UV glue. After the UV adhesive is irradiated and cured by an ultraviolet lamp, the sensing device is placed in a drying box, and the temperature is adjusted to 65 ℃ for baking for 5 hours, so that the UV adhesive is completely cured and has the degradation effect.
In summary, the present invention provides an optical fiber microsphere vibration sensing device and a method for manufacturing the same, the optical fiber microsphere vibration sensing device includes: the optical fiber comprises a single-mode optical fiber, a cavity tube structure, a microsphere structure and a reflecting membrane; wherein the single mode fiber is connected with the cavity tube structure; the cavity tube structure is connected between the single mode fiber and the reflection diaphragm; the microsphere structure is arranged in the cavity tube structure and is positioned between the single-mode optical fiber and the reflecting membrane; the light beam is transmitted into the cavity tube structure through the single-mode fiber and is in contact with the microsphere structure, a part of the light beam is reflected by the single-mode fiber and the microsphere structure to form a first reflected light beam and a second reflected light beam, and a part of the light beam passes through the microsphere structure and then reaches the reflecting membrane and is reflected by the reflecting membrane to form a third reflected light beam. The invention discloses a Fabry-Perot interferometer which can form three light beam interference by splicing a single mode fiber with a cavity tube structure and packaging a microsphere structure in the cavity tube structure through a reflecting membrane, wherein a Fabry-Perot micro-resonant cavity is formed by the end face of the fiber and the surface of the reflecting membrane. When the microsphere structure is vibrated by the external environment in the hollow cavity tube structure, the microsphere structure can move, so that the length of the Fabry-Perot cavity is changed, and vibration sensing can be realized according to the change of the length of the Fabry-Perot cavity. The Fabry-Perot cavity length is changed by forming interference in the cavity tube structure through the microsphere structure, so that the Fabry-Perot cavity length requirement is lower compared with that of a diaphragm type vibration sensor, and the limitation of the diaphragm material is avoided.
It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.
Claims (10)
1. An optical fiber microsphere vibration sensing device, comprising: the optical fiber comprises a single-mode optical fiber, a cavity tube structure, a microsphere structure and a reflecting membrane; wherein, the first and the second end of the pipe are connected with each other,
the single mode optical fiber is connected with the cavity tube structure;
the cavity tube structure is connected between the single mode fiber and the reflection diaphragm;
the microsphere structure is arranged in the cavity tube structure and is positioned between the single-mode optical fiber and the reflection diaphragm;
the light beam is transmitted into the cavity tube structure through the single mode fiber and is in contact with the microsphere structure, a part of the light beam is reflected by the single mode fiber and the microsphere structure to form a first reflected light beam and a second reflected light beam, and a part of the light beam passes through the microsphere structure and then reaches the reflecting membrane and is reflected by the reflecting membrane to form a third reflected light beam.
2. The optical fiber microsphere vibration sensing device of claim 1, wherein the microsphere structure is made of a material having a refractive index.
3. The optical fiber microsphere vibration sensing device of claim 2, wherein the microsphere structure is made of one of silica, quartz, alumina and silicon carbide.
4. The fiber optic microsphere vibration sensing device of claim 1, wherein the cross-section of the microsphere structure is circular or elliptical in shape.
5. The optical fiber microsphere vibration sensing device according to claim 1 or 4, wherein the cavity tube structure has a receiving cavity, and the microsphere structure is received in the receiving cavity and is in rolling connection with the receiving cavity.
6. The fiber optic microsphere vibration sensing device of claim 1, wherein the cavity tube structure is one of a capillary tube, a hollow fiber or a photonic crystal fiber.
7. The optical fiber microsphere vibration sensing device according to claim 1, wherein the reflective membrane is made of one of ultraviolet light curing glue, polymethyl methacrylate and polydimethylsiloxane.
8. A method for preparing a fiber optic microsphere vibration sensing device according to any one of claims 1 to 7, comprising:
welding the single-mode optical fiber with the cavity tube structure;
installing a microsphere structure into the cavity tube structure;
and sealing the cavity tube structure through a reflective membrane so as to encapsulate the microsphere structure in the cavity tube structure.
9. The method for manufacturing an optical fiber microsphere vibration sensing device according to claim 8, wherein the step of fusion-splicing the single-mode optical fiber and the cavity tube structure comprises:
after a coating layer of the single-mode optical fiber is stripped, cutting, flattening and cleaning the optical fiber end surface of the single-mode optical fiber, and cutting, flattening and cleaning a cavity tube structure;
welding the cut, flattened and cleaned single-mode optical fiber with the cavity tube structure under the conditions of set welding current and set discharge time;
and cutting the length of the welded cavity tube structure to control the length of the cavity tube structure within a preset length range.
10. The method for preparing a fiber optic microsphere vibration sensing device according to claim 8, wherein the step of installing a microsphere structure into the cavity tube structure comprises:
placing the cut cavity tube structure in absolute ethyl alcohol for soaking, and drying the microsphere structure;
and contacting the cavity tube structure soaked with the absolute ethyl alcohol with the dry microsphere structure to attract the dry microsphere structure into the cavity tube structure.
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