CN115121139B - Liquid source bubbler - Google Patents
Liquid source bubbler Download PDFInfo
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- CN115121139B CN115121139B CN202210320150.5A CN202210320150A CN115121139B CN 115121139 B CN115121139 B CN 115121139B CN 202210320150 A CN202210320150 A CN 202210320150A CN 115121139 B CN115121139 B CN 115121139B
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Abstract
The application relates to a liquid source bubbler in the field of semiconductor epitaxial equipment, which comprises a cylinder, an air inlet pipe, an air outlet pipe, a liquid filling pipe and a bubble distributor; the cylinder body is a sealed cylindrical cylinder body, one end of the air inlet pipe enters from the top plate of the cylinder body and extends to a position close to the bottom plate of the cylinder body, the air bubble distributor is positioned above the air outlet of the air inlet pipe, one end of the liquid filling pipe enters into the cylinder body from the top plate of the cylinder body, and one end of the air outlet pipe is in sealing connection with a through hole on the top plate of the cylinder body; the liquid is added into the cylinder body through the liquid filling pipe, gas enters the cylinder body through the gas outlet and forms bubbles, the bubbles which move upwards pass through the bubble distributor and then are diffused along the radial direction of the cylinder body, and the adhered bubbles are separated, and the bubbles which are diffused and separated move upwards and are introduced into an external reaction device through the gas outlet pipe. The application improves the independence of bubbles and the distribution area of the bubbles through the bubble distributor, thereby improving the efficiency of the bubbles for taking away the liquid.
Description
Technical Field
The application relates to the field of semiconductor epitaxial equipment, in particular to a liquid source bubbler.
Background
The bubbling method is generally a method of introducing a precisely measured process gas or inert gas as a carrier gas into a liquid source to form bubbles containing vapor of the liquid source and outputting the bubbles to a process tool. Since the output of the liquid source is affected by the flow rate and carrying efficiency of the carrier gas, the linearity between the flow rate of the carrier gas and the carrying amount of the liquid source, i.e. the carrying efficiency determines the quality of the product.
There is a bubbler in the prior art, such as chinese patent publication No. CN205329209U, which discloses a bubbler comprising a tube body for storing a liquid reactant; a first gas inlet pipe is inserted into the pipe body and used for introducing gas into the liquid reactant of the pipe body so as to foam and form saturated gas containing the reactant; the waste liquid pipe is connected with the pipe body; the waste liquid treatment device also comprises a second air inlet pipe, one end of which is communicated with the air inlet end of the first air inlet pipe, and the other end of which is communicated with the waste liquid pipe, and the second air inlet pipe is used for leading air into the pipe body from the waste liquid pipe under the condition that the first air inlet pipe is blocked; the first valve is arranged on the waste liquid pipe and is positioned between the pipe body and the connecting point of the second air inlet pipe and used for controlling the opening and closing of the waste liquid pipe; the flow monitor is connected with the first air inlet pipe and is used for monitoring the air flow of the first air inlet pipe; the valve controller is connected with the flow monitor and the first valve and is used for controlling the first valve to be opened under the condition that the gas flow of the first air inlet pipe monitored by the flow monitor is smaller than a preset value. The bubbler can bubble the hydrogen after being led into the pipe body, and the foamed trichlorosilane solution is discharged through the exhaust pipe for epitaxial growth. However, there are disadvantages in that the air bubble efficiency and the carrying efficiency are poor.
Disclosure of Invention
In view of the drawbacks of the prior art, an object of the present application is to provide a liquid source bubbler.
The application provides a liquid source bubbler, which comprises a cylinder, an air inlet pipe, an air outlet pipe, a liquid filling pipe and a bubble distributor;
the cylinder body is a sealed cylindrical cylinder body, one end of the air inlet pipe enters from the top plate of the cylinder body and extends to a position close to the bottom plate of the cylinder body, a port of the air inlet pipe positioned in the cylinder body is marked as an air outlet, one end of the air outlet pipe is in sealing connection with a through hole on the top plate of the cylinder body, one end of the liquid filling pipe enters into the cylinder body from the top plate of the cylinder body, the air bubble distributor comprises a central disc and laths, a plurality of laths are uniformly distributed along the circumferential direction of the central disc to form a disc shape, slits are arranged between two adjacent laths, the air bubble distributor is positioned above the air outlet, and the air bubble distributor is provided with a notch for accommodating and allowing the air inlet pipe and the liquid filling pipe to enter and exit;
the liquid is added into the cylinder body to a preset height through the liquid filling pipe, the air outlet and the air bubble distributor are positioned below the liquid level, air enters the cylinder body through the air outlet and forms air bubbles, the upward moving air bubbles diffuse along the radial direction of the cylinder body after passing through the slit, and the diffused air bubbles continuously move upwards and are introduced into an external reaction device through the air outlet pipe.
In some embodiments, the width of the slit is 1.2 to 1.8 times the average diameter of the bubble.
In some embodiments, the width of the slit gradually increases from the central disk to the free ends of the slats.
In some embodiments, the central disk and/or the ribbon are densely covered with air holes, and the pore diameter of the air holes is 1.2-1.8 times of the average diameter of the air bubbles.
In some embodiments, the air holes are formed on the central disc and the ribbon board, and the density of the air holes is reduced from the center of the central disc to the free end of the ribbon board.
In some embodiments, a gap is provided between the edge of the bubble distributor and the inner surface of the barrel arm of the barrel, the gap enabling multiple bubbles to pass through simultaneously.
In some embodiments, the gas distributor is installed on the gas outlet and communicated with the gas outlet, and the gas distributor is a micropore structure body formed by sintering metal powder.
In some embodiments, the pores on the gas distributor have an average pore size of 10-100 μm.
In some embodiments, the safety relief valve is mounted on the cylinder.
In some embodiments, the method further comprises a pre-buried pipe, wherein the pre-buried pipe is used as a standby pipe of the liquid injection pipe.
Compared with the prior art, the application has the following beneficial effects:
1. according to the application, through the structural design of the slit on the bubble distributor, not only is the distribution area of bubbles increased, but also the total area of bubbles in the liquid is increased by separating adhered bubbles, so that the efficiency of the bubbles for bringing the liquid away is practically improved.
2. The width of the slit is designed to be of a gradual change structure, so that bubbles at the far end can pass through the slit rapidly, the moving speed of the bubbles is improved, and the efficiency of the bubbles for carrying liquid away is improved.
3. According to the application, the air holes are arranged on the central disc and/or the ribbon board, so that the distribution uniformity of bubbles in the liquid is improved, the upward moving speed of the bubbles is improved, and the efficiency of the bubbles for bringing the liquid away is further improved.
4. According to the application, the gas distributor is communicated with the gas outlet of the gas inlet pipe, so that the density of bubbles in the liquid is improved, and the distribution uniformity of the bubbles is further improved.
5. According to the application, by arranging the corresponding auxiliary device, the operation convenience of the device, the safety in the operation process and the liquid carrying capacity of the bubbles are improved.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a schematic diagram of the overall structure of the present application;
FIG. 2 is a schematic diagram of a bubble distributor according to the present application;
FIG. 3 is a schematic view of a bubble distributor of the present application with air holes.
Detailed Description
The present application will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present application, but are not intended to limit the application in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present application.
Example 1
The application provides a liquid source bubbler, which is shown in figures 1-2 and comprises a cylinder body 1, an air inlet pipe 2, an air outlet pipe 3, a liquid filling pipe 4 and a bubble distributor 5. The cylinder body 1 is a cylindrical sealed container, preferably, the top plate of the cylinder body 1 and the cylinder body of the cylinder body 1 are of a split structure, and the cylinder body is convenient to maintain through sealing connection. The air inlet pipe 2, the air outlet pipe 3 and the liquid filling pipe 4 are all communicated with the inner cavity of the cylinder 1, specifically, the air inlet pipe 2 is used for introducing air into the cylinder 1 to form air bubbles, one end of the air inlet pipe 2 enters the cylinder 1 from the top plate of the cylinder 1, the port of the air inlet pipe 2 is close to the bottom plate of the cylinder 1, the port of the air inlet pipe 2 close to the bottom plate of the cylinder 1 is marked as an air outlet 21, and the port of the air inlet pipe 2 positioned outside the top plate of the cylinder 1 is correspondingly marked as an air inlet 22. Because the air bubbles move upwards to a certain distance for forming saturated air bubbles, the position of the air outlet 21 is close to the bottom plate of the cylinder 1, the height of the cylinder 1 can be integrally reduced, and the structure is more compact. One end of the air outlet pipe 3 is in sealing connection with a through hole formed in the cylinder body 1, and saturated air bubbles formed in the cylinder body 1 are discharged from the air outlet pipe 3 and are introduced into an external reaction device. One end of the liquid filling pipe 4 extends into the cylinder 1 through the top plate of the cylinder 1, and the port of the liquid filling pipe 4 is preferably close to the bottom plate of the cylinder 1, so that the influence on upward movement bubbles can be reduced when liquid is filled through the liquid filling pipe 4.
The air bubble distributor 5 is arranged above the air outlet 21, the air bubble distributor 5 mainly comprises a central disc 51 and strips 52, the central disc 51 is preferably in a disc-shaped structure, a plurality of strips 52 are uniformly distributed along the circumferential direction of the central disc 51, the strips 52 are radially connected to the central disc 51 to form a disc-shaped structure, a slit 520 is formed between two adjacent strips 52, the slit 520 is used for allowing air bubbles to pass through, preferably, the width of the slit 520 is 1.2-1.8 times of the average diameter of the air bubbles, namely, the slit 520 basically allows single air bubbles to pass through, and the meaning that the single air bubbles basically allow the single air bubbles to pass through is as follows: since the diameters of the bubbles formed after the gas flow from the gas outlet 21 enters the liquid are not completely identical, there are two cases where two bubbles smaller than the average diameter pass through the slit 520 together, but a few cases are said to substantially ensure the passage of a single bubble. The bubble distributor 5 is preferably suspended above the air outlet 21 by a connecting rod 6, and preferably, one end of the connecting rod 6 is connected with the upper surface of the central disc 51, and the other end of the connecting rod 6 is connected with the top plate of the cylinder 1, so that the bubble distributor 5 is suspended above the air outlet 21.
The working principle of the application is as follows: the liquid is injected into the cylinder 1 to a preset height through the liquid injection pipe 4, namely, the distance between the height of the liquid level in the cylinder 1 and the inner surface of the top plate of the cylinder 1 can enable saturated bubbles to be separated from the liquid level after the saturated bubbles escape from the liquid, so that the saturated bubbles can be smoothly introduced into an external reaction device through the air outlet pipe 3. After hydrogen is introduced from the air inlet 22 of the air inlet pipe 2, gas enters the liquid from the air outlet 21 to form bubbles, the formation of the bubbles is continuous, the moving direction is relatively fixed, so that the bubble area in the liquid is relatively concentrated, after the bubble distributor 5 is arranged above the air outlet 21, the relatively concentrated bubbles can be promoted to diffuse from the area of the central disk 51 to the periphery by the slit 520, so that the bubbles are distributed in the liquid more uniformly, and due to the arrangement of the width of the slit 520, most of adhered bubbles are separated into single bubbles when passing through the slit 520, the total area of the bubbles in the liquid is increased after the adhered bubbles are separated, the liquid amount carried when the bubbles move upwards to form saturated bubbles is increased as a whole, and the moving speed of the saturated bubbles formed by the adhered saturated bubbles formed by the single bubbles is increased under the action of gas pressure, so that the efficiency of the liquid carrying away by the bubbles is practically improved.
Preferably, the width of the slit 520 is designed to be a gradual change structure, and the gradual change rule of the slit is that the slit gradually increases from the center plate 51 to the free end of the ribbon 52, and the width between the plates of the slit 520 at the far end of the center plate 51 is larger, and the larger width makes the pressure between the plates smaller, so that the rapid passing of bubbles can be facilitated, the moving speed of the bubbles is improved, and the efficiency is improved. The free end of the slat 52 here means the end which is not connected to the center disk 51. Further, since the diameters of the air bubbles formed from the air outlet 21 are not completely the same, in order to prevent the air bubbles with larger diameters from continuously moving upwards through the air holes, a certain distance is kept between the free end edge of the strip plate 52 and the inner wall of the cylinder 1, so that the air bubbles with larger diameters can continuously move upwards through the gap between the strip plate 52 and the inner wall of the cylinder 1, and meanwhile, the end part of the strip plate 52 is not contacted with the inner wall of the cylinder 1, and part of the air bubbles can be effectively prevented from being detained at the position of an included angle after the end part of the strip plate 52 is contacted with the inner wall of the cylinder 1, so that the flow rate of the air bubbles is affected.
In addition, through setting up corresponding auxiliary device, improve the liquid carrying volume of device's simple operation nature, operation process security and bubble. Specifically: the cylinder body 1 is provided with a safety relief valve 8, the safety relief valve 8 is arranged on the top plate of the cylinder body 1, and the safety relief valve 8 is used for ensuring that the pressure in the cylinder body 1 is in a stable state so as to avoid safety accidents. The bottom of the cylinder body 1 is communicated with a waste liquid pipe 11, and the waste liquid pipe 11 is used for discharging liquid in the cylinder body 1, so that the operation is convenient. The embedded pipe 9 is also arranged in the cylinder body 1, the embedded pipe 9 is used as a standby pipe of the liquid injection pipe 4, and when the liquid injection pipe 4 cannot be smoothly filled with liquid due to blockage and other problems, the liquid can be quickly injected through the embedded pipe 9, so that the sustainability of the operation process is ensured.
Example 2
In the embodiment 2, the air holes are formed on the basis of the embodiment 1, so that the distribution uniformity of the air bubbles in the liquid is improved, the upward moving speed of the air bubbles is improved, and the efficiency of the air bubbles to carry away the liquid is further improved. Specifically:
as shown in fig. 1-3, the central disc 51 and the ribbon 52 of the air bubble distributor 5 may be provided with air holes 521 alone, that is, the central disc 51 may be provided with air holes 521 alone, or the ribbon 52 may be provided with air holes 521 alone, preferably, both the central disc 51 and the ribbon 52 are provided with air holes 521, the air holes 521 are used for passing air bubbles, and the aperture of the air holes 521 is also set to be 1.2-1.8 times the average diameter of the air bubbles, so that the air holes 521 also basically keep allowing single air bubbles to pass, improving the separation effect of the air bubbles, and improving the amount of liquid carried by the air bubbles.
Further, the air holes 521 are densely distributed at the center and sparsely distributed at the edges, so that the air bubbles formed at the air outlet 21 pass through the slit 520 and the air holes 521 at the fastest speed, so that the air bubbles can be separated and move upwards continuously, and the efficiency of the air bubbles for carrying away the liquid is further improved. It is particularly preferred that the density of the air holes 521 gradually decreases from the center of the center plate 51 toward the free end of the slat 52.
Example 3
In example 3, the gas distributor was connected to the gas outlet of the gas inlet pipe to increase the density of bubbles in the liquid and further increase the uniformity of the distribution of bubbles, which was formed on the basis of example 1 or example 2. Specifically:
as shown in fig. 1 to 3, the gas distributor 7 is installed on the gas inlet 21 and communicates, the gas distributor 7 is a microporous structure, preferably, the gas distributor 7 is a cylindrical microporous structure formed by sintering metal powder, and the average pore size of pores formed on the gas distributor 7 is 10 to 100 μm. Since the gas distributor 7 is a microporous structure, after gas enters from the gas inlet pipe 2, bubbles entering liquid through the gas distributor 7 are micro-diameter bubbles, the density of the bubbles in the liquid can be greatly improved by the micro-diameter bubbles, and the distribution of the air holes on the cylindrical gas distributor 7 is distributed along the circumferential direction, so that the bubbles formed by the gas exiting from the gas distributor 7 are radiated outwards circumferentially by taking the gas distributor 7 as the center, so that the bubbles are not concentrated in one or more directions any more, which is equivalent to the preliminary diffusion of the bubbles, and after the preliminary diffusion of the bubbles are further separated and diffused by the bubble distributor 5, the distribution of the bubbles in the liquid is more uniform, and the rate of the bubbles carried away from the liquid is further improved.
In the description of the present application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.
The foregoing describes specific embodiments of the present application. It is to be understood that the application is not limited to the particular embodiments described above, and that various changes or modifications may be made by those skilled in the art within the scope of the appended claims without affecting the spirit of the application. The embodiments of the application and the features of the embodiments may be combined with each other arbitrarily without conflict.
Claims (7)
1. The liquid source bubbler is characterized by comprising a cylinder (1), an air inlet pipe (2), an air outlet pipe (3), a liquid filling pipe (4) and a bubble distributor (5);
the cylinder body (1) is a sealed cylindrical cylinder body, one end of the air inlet pipe (2) enters from a top plate of the cylinder body (1) and extends to a position close to a bottom plate of the cylinder body (1), a port of the air inlet pipe (2) in the cylinder body (1) is marked as an air outlet (21), one end of the air outlet pipe (3) is in sealing connection with a through hole on the top plate of the cylinder body (1), one end of the liquid filling pipe (4) enters into the cylinder body (1) from the top plate of the cylinder body (1), the air bubble distributor (5) comprises a central disc (51) and laths (52), a plurality of laths (52) are uniformly distributed along the circumferential direction of the central disc (51) to form a disc shape, slits (520) are arranged between two adjacent laths (52), the air bubble distributor (5) is positioned above the air outlet (21), and the air bubble distributor (5) is provided with notches (53) for accommodating and allowing the air inlet pipe (2) and the liquid filling pipe (4) to enter into and exit from the cylinder body (4);
liquid is added into the cylinder (1) to a preset height through the liquid filling pipe (4), the air outlet (21) and the air bubble distributor (5) are positioned below the liquid level, air enters the cylinder (1) through the air outlet (21) and forms air bubbles, the air bubbles which move upwards diffuse along the radial direction of the cylinder (1) after passing through the slit (520), and the diffused air bubbles continue to move upwards and are introduced into an external reaction device through the air outlet pipe (3);
the width of the slit (520) is 1.2-1.8 times of the average diameter of the air bubble;
the central disc (51) and/or the ribbon board (52) are densely provided with air holes (521), and the aperture of the air holes (521) is 1.2-1.8 times of the average diameter of the air bubbles;
the center plate (51) and the ribbon board (52) are both provided with the air holes (521), and the density of the air holes (521) is reduced from the center of the center plate (51) to the free end of the ribbon board (52).
2. The liquid source bubbler as claimed in claim 1, wherein the width of said slit (520) gradually increases from said central disc (51) to the free end of said slat (52).
3. A liquid source bubbler as claimed in claim 1 wherein a gap is provided between the edge of said bubble distributor (5) and the inner surface of the arm of said barrel (1) which enables the passage of a plurality of bubbles simultaneously.
4. A liquid source bubbler according to any one of claims 1-3 further comprising a gas distributor (7), said gas distributor (7) being mounted on said gas outlet (21) and communicating, said gas distributor (7) being a microporous structure sintered from metal powder.
5. The liquid source bubbler as claimed in claim 4, wherein the average pore size of the pores of said gas distributor (7) is 10-100 μm.
6. The liquid source bubbler as claimed in claim 1, further comprising a safety relief valve (8), said safety relief valve (8) being mounted on said barrel (1).
7. A liquid source bubbler as claimed in claim 1 further comprising an embedded tube (9), said embedded tube (9) being a back-up tube for said liquid fill tube (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210320150.5A CN115121139B (en) | 2022-03-29 | 2022-03-29 | Liquid source bubbler |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210320150.5A CN115121139B (en) | 2022-03-29 | 2022-03-29 | Liquid source bubbler |
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| CN115121139A CN115121139A (en) | 2022-09-30 |
| CN115121139B true CN115121139B (en) | 2023-08-25 |
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| CN202210320150.5A Active CN115121139B (en) | 2022-03-29 | 2022-03-29 | Liquid source bubbler |
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| CN116575014B (en) * | 2023-05-10 | 2024-02-27 | 上海良薇机电工程有限公司 | Bubbling device, liquid source bubbling system, method and semiconductor process system |
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