CN115108841A - Heat treatment method for high-strength quartz crucible - Google Patents

Heat treatment method for high-strength quartz crucible Download PDF

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Publication number
CN115108841A
CN115108841A CN202110309801.6A CN202110309801A CN115108841A CN 115108841 A CN115108841 A CN 115108841A CN 202110309801 A CN202110309801 A CN 202110309801A CN 115108841 A CN115108841 A CN 115108841A
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quartz crucible
heat treatment
namely
crucible
strength
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嵇亚明
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Xinyi Zhongxin Photoelectric Technology Co ltd
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Xinyi Zhongxin Photoelectric Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64Burning or sintering processes
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/14Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silica
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6562Heating rate
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567Treatment time

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention relates to the technical field of quartz crucible processing, and discloses a high-strength quartz crucible heat treatment method, which comprises the following steps: s1: inspecting the raw materials, and detecting the quartz crucible after the dissolution and the demoulding; s2: performing sand blasting and grinding, namely performing sand blasting and grinding treatment on the quartz crucible which is qualified; s3: washing, namely washing the quartz crucible ground by sand blasting by using tap water, and inversely buckling the quartz crucible on a rack after washing to remove water drops on the surface; s4: soaking, namely placing the washed quartz crucible into a quartz crucible basket, and then placing the quartz crucible basket and the quartz crucible basket into the mixed solution for soaking; s5: and (5) cleaning. The invention can make the quartz crucible have good strength and prolong the service life of the quartz crucible by the step of heat treatment on the quartz crucible, can reduce the content of metal impurities on the surface of the quartz crucible and the concentration of bubbles on the inner surface of the crucible by soaking treatment, and can clear away microparticles on the surface of the quartz crucible.

Description

Heat treatment method for high-strength quartz crucible
Technical Field
The invention relates to the technical field of quartz crucible processing, in particular to a high-strength quartz crucible heat treatment method.
Background
The quartz crucible has the advantages of high purity, strong temperature resistance, large size, high precision, good heat preservation, energy conservation, stable quality and the like, is more and more widely applied, is a consumable utensil for pulling monocrystalline silicon in the photovoltaic field, is used when producing a furnace of monocrystalline silicon, and is a key necessity for monocrystalline silicon production. The number of crucibles required in the national monocrystalline silicon industry is about 280 plus 360 thousands, while the annual production capacity in China is only 200 thousands at present, which can not meet the requirement of the national monocrystalline silicon industry.
The surface of the quartz crucible needs to be treated in the production process, particularly, the surface of the quartz crucible needs to be treated, but the general heat treatment is only one-time heating and cannot be carried out by segmented heating, and the surface of the quartz crucible cannot be treated before heating, so that the produced quartz crucible has poor strength and high metal impurity content and cannot meet the requirements of people.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a high-strength quartz crucible heat treatment method, which mainly solves the problems that the prior quartz crucible cannot be heated in a segmented mode during heat treatment, and the surface of the quartz crucible cannot be treated before heating, so that the produced quartz crucible is not good enough in strength, high in metal impurity content and incapable of meeting the requirements of people.
(II) technical scheme
In order to achieve the purpose, the invention provides the following technical scheme:
a heat treatment method of a high-strength quartz crucible comprises the following steps:
s1: inspecting the raw materials, and detecting the dissolved and demoulded quartz crucible;
s2: performing sand blasting and grinding, namely performing sand blasting and grinding treatment on the quartz crucible which is qualified;
s3: washing, namely washing the quartz crucible ground by sand blasting by using tap water, and inversely buckling the quartz crucible on a rack after washing to remove water drops on the surface;
s4: soaking, namely placing the washed quartz crucible into a quartz crucible basket, and then placing the quartz crucible basket and the quartz crucible basket into the mixed solution for soaking;
s5: cleaning, namely leaching the soaked quartz crucible on a cleaning machine by using deionized water with the resistance of 8-14M omega cm;
s6: heat treatment, namely preheating the cleaned quartz crucible semi-finished product for 40-60 minutes under the control of intermediate frequency and under the condition of 5-10KW power, then increasing the power to 18-22KW, heating the quartz crucible semi-finished product for 50-80 minutes, and when the heating temperature reaches 1400-1490 ℃, reducing the power to 5-8KW, continuing to heat for 45-70 minutes, and then closing the intermediate frequency power supply;
s7: and packaging, namely packaging and containing the quartz crucible after heat treatment.
As a still further aspect of the present invention, the characteristics detected in S1 include transparency, thickness, and surface defects, and a product with high transparency, uniform thickness, and no obvious defects on the surface is a good product, otherwise a product is a bad product.
Further, in S2, the quartz crucible after the sand blasting is subjected to a cutting and chamfering process.
On the basis of the scheme, the mixed solution in the S4 is formed by mixing fluoride-bearing salt, hydrochloric acid and peroxide, the mass concentrations of the fluoride-bearing salt, the hydrochloric acid and the peroxide are respectively 20-80%, and the volume ratio of the three reagents is 1-3: 2-5: 2-7, placing the mixed solution in a special water tank, wherein the water tank is provided with a circulating water pump, and allowing the mixed solution to circulate in the water tank.
Further, in the step S4, the quartz crucible is soaked in the mixed liquid for 20-48 minutes, and the temperature of the mixed liquid is 60-90 ℃.
On the basis of the scheme, after being cleaned in the step S5, the quartz crucible is placed into a baking oven to be baked for 20-40 minutes, and the baking temperature is 30-80 ℃.
In a further scheme of the invention, the pressure around the S6 is controlled during the heat treatment, the pressure is-0.09 MPa to-0.1 MPa, then the protective gas argon is filled, and the pressure after the filling is 0-0.015 MPa.
Further, in the step S6, after the heat treatment, the quartz crucible is placed in a ventilated place and naturally cooled for 2 to 3 hours.
(III) advantageous effects
Compared with the prior art, the invention provides a high-strength quartz crucible heat treatment method, which has the following beneficial effects:
1. according to the invention, the soaked quartz crucible is cleaned by using deionized water, so that the soaking solution on the surface of the quartz crucible can be fully removed, and the subsequent heat treatment effect is prevented from being influenced.
2. According to the invention, through the step of carrying out heat treatment on the quartz crucible, the quartz crucible has good strength, and the service life of the quartz crucible is prolonged.
3. The water tank is provided with the circulating water pump during soaking, so that the mixed solution circulates in the water tank, the mixed solution is ensured to fully react with the surface of the quartz crucible during soaking, and the soaking effect is improved.
4. The invention can reduce the content of metal impurities on the surface of the quartz crucible through soaking treatment, reduce the concentration of bubbles on the inner surface of the crucible, and simultaneously can remove microparticles on the surface of the quartz crucible.
Drawings
FIG. 1 is a schematic view of the flow structure of a heat treatment method for a high-strength quartz crucible according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1, a heat treatment method of a high-strength quartz crucible includes the steps of:
s1: inspecting the raw materials, and detecting the quartz crucible after the dissolution and the demoulding;
s2: performing sand blasting and grinding, namely performing sand blasting and grinding treatment on the quartz crucible which is qualified in detection to improve the surface strength of the quartz crucible;
s3: washing, namely washing the quartz crucible ground by sand blasting by using tap water, and inversely buckling the quartz crucible on a rack after washing to remove water drops on the surface of the quartz crucible so as to prevent dust on the surface of the quartz crucible from influencing the subsequent operation;
s4: soaking, namely placing the washed quartz crucible into a quartz crucible basket, and then placing the quartz crucible basket and the quartz crucible basket into the mixed solution for soaking;
s5: washing, namely leaching the soaked quartz crucible on a washing machine by using deionized water with the resistance of 9M omega cm, and fully removing the soaking solution on the surface of the quartz crucible by washing the quartz crucible by using the deionized water;
s6: heat treatment, under the control of intermediate frequency, under the condition that the power is 8KW, the cleaned quartz crucible semi-finished product is preheated for 40 minutes, then the power is increased to 20KW, the quartz crucible semi-finished product is heated for 60 minutes, when the heating temperature reaches 1400 ℃ plus 1490 ℃, the power is reduced to 5-8KW, the intermediate frequency power supply is closed after the quartz crucible is continuously heated for 45-70 minutes, and the quartz crucible is subjected to heat treatment, so that the quartz crucible has good strength, and the service life of the quartz crucible is prolonged;
s7: and packaging, namely packaging and storing the quartz crucible after heat treatment.
The characteristics detected in S1 of the invention include transparency, thickness and surface flaws, the quartz crucible after sand blasting and grinding is cut and chamfered in S2, the mixed liquid in S4 is formed by mixing fluoric salt, hydrochloric acid and peroxide, the mass concentrations of the fluoric salt, the hydrochloric acid and the peroxide are respectively 20% -80%, the volume ratio of the three reagents is 1: 2: and 2, placing the mixed solution in a special water tank, wherein a circulating water pump is arranged in the water tank, so that the mixed solution circulates in the water tank, and the mixed solution is ensured to fully react with the surface of the quartz crucible in the soaking process.
It should be particularly noted that in S4, the quartz crucible is soaked in the mixed liquid for 30 minutes, the temperature of the mixed liquid is 70 ℃, the content of metal impurities on the surface of the quartz crucible can be reduced through soaking treatment, the bubble concentration on the inner surface of the crucible can be reduced, and at the same time, microparticles on the surface of the quartz crucible can be removed, after cleaning in S5, the quartz crucible is put into a baking oven to be baked for 25 minutes, the baking temperature is 35 ℃, the quartz crucible is baked to be dry, so that the subsequent heat treatment work is facilitated, in S6, the pressure around the quartz crucible is controlled during heat treatment, the pressure is-0.09 to-0.1 MPa, then protective gas argon is filled, the pressure is 0-0.015MPa, and after heat treatment in S6, the quartz crucible is put into a ventilated position to be naturally cooled, and the cooling time is 2-3 hours.
Example 2
Referring to fig. 1, a heat treatment method of a high-strength quartz crucible includes the steps of:
s1: inspecting the raw materials, and detecting the quartz crucible after the dissolution and the demoulding;
s2: performing sand blasting and grinding, namely performing sand blasting and grinding treatment on the quartz crucible which is qualified in detection to improve the surface strength of the quartz crucible;
s3: washing, namely washing the quartz crucible ground by sand blasting by using tap water, and inversely buckling the quartz crucible on a rack after washing to remove water drops on the surface of the quartz crucible so as to prevent dust on the surface of the quartz crucible from influencing the subsequent operation;
s4: soaking, namely placing the washed quartz crucible into a quartz crucible basket, and then placing the quartz crucible basket and the quartz crucible basket into the mixed solution for soaking;
s5: cleaning, namely rinsing the soaked quartz crucible on a cleaning machine by using deionized water with the resistance of 9M omega cm, and fully removing the soaking solution on the surface of the quartz crucible by cleaning the deionized water;
s6: heat treatment, under the control of intermediate frequency, under the condition that the power is 10KW, the cleaned quartz crucible semi-finished product is preheated for 50 minutes, then the power is increased to 22KW, the quartz crucible semi-finished product is heated for 70 minutes, when the heating temperature reaches 1450 ℃, the power is reduced to 8KW, the intermediate frequency power supply is closed after the quartz crucible is continuously heated for 70 minutes, and the quartz crucible is subjected to heat treatment, so that the quartz crucible has good strength, and the service life of the quartz crucible is prolonged;
s7: and packaging, namely packaging and containing the quartz crucible after heat treatment.
The characteristics of the invention detected in S1 include transparency, thickness, surface flaw, high transparency, uniform thickness, no obvious flaw on the surface, qualified product, or unqualified product, in S2, the quartz crucible after sand blasting and grinding is cut and chamfered, through chamfering the quartz crucible, the product can be processed to proper specification, the quartz crucible has good smoothness, processing precision and performance are ensured, the quartz crucible is more beautiful, in S4, the mixed liquid is mixed by fluorine-bearing salt, hydrochloric acid and peroxide, the mass concentration of the fluorine-bearing salt, the mass concentration of the hydrochloric acid and the peroxide are respectively 20% -80%, the volume ratio of the three reagents is 1: 2.5: and 3, placing the mixed solution in a special water tank, wherein a circulating water pump is arranged in the water tank, so that the mixed solution circulates in the water tank, and the mixed solution is ensured to fully react with the surface of the quartz crucible in the soaking process.
It should be particularly noted that in S4, the quartz crucible is soaked in the mixed liquid for 30 minutes, the temperature of the mixed liquid is 80 ℃, the content of metal impurities on the surface of the quartz crucible can be reduced through soaking treatment, the bubble concentration on the inner surface of the crucible can be reduced, and meanwhile, microparticles on the surface of the quartz crucible can be removed, after cleaning in S5, the quartz crucible is put into a baking oven to be baked for 35 minutes, the baking temperature is 35 ℃, the quartz crucible is baked to be dry, so that the subsequent heat treatment work is facilitated, in S6, the pressure around the quartz crucible is controlled during heat treatment, the pressure is-0.09 to-0.1 MPa, then protective gas argon is filled, the pressure is 0-0.015MPa, and after heat treatment in S6, the quartz crucible is put into a ventilated position to be naturally cooled, and the cooling time is 2-3 hours.
In the description herein, it is noted that relational terms such as first and second, and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

1. A heat treatment method for a high-strength quartz crucible is characterized by comprising the following steps:
s1: inspecting the raw materials, and detecting the dissolved and demoulded quartz crucible;
s2: performing sand blasting and grinding, namely performing sand blasting and grinding treatment on the quartz crucible which is qualified;
s3: washing, namely washing the quartz crucible ground by sand blasting by using tap water, and inversely buckling the quartz crucible on a rack after washing to remove water drops on the surface;
s4: soaking, namely placing the washed quartz crucible into a quartz crucible basket, and then placing the quartz crucible basket and the quartz crucible basket into the mixed solution for soaking;
s5: cleaning, namely leaching the soaked quartz crucible on a cleaning machine by using deionized water with the resistance of 8-14M omega cm;
s6: heat treatment, namely preheating the cleaned quartz crucible semi-finished product for 40-60 minutes under the condition of medium frequency control and 5-10KW power, then increasing the power to 18-22KW, heating the quartz crucible semi-finished product for 50-80 minutes, reducing the power to 5-8KW when the heating temperature reaches 1400-1490 ℃, continuing to heat for 45-70 minutes, and then closing a medium frequency power supply;
s7: and packaging, namely packaging and containing the quartz crucible after heat treatment.
2. The method as claimed in claim 1, wherein the characteristics detected in S1 include transparency, thickness, surface defects, and the quality of the product is acceptable if the product has high transparency and uniform thickness and no obvious defects on the surface, otherwise the product is unacceptable.
3. The heat treatment method for a high-strength quartz crucible as claimed in claim 2, wherein the quartz crucible after sand blasting is subjected to cutting and chamfering treatment in S2.
4. The heat treatment method of the high-strength quartz crucible as claimed in claim 1, wherein the mixed solution in the S4 is prepared by mixing fluoride-bearing salt, hydrochloric acid and peroxide, the mass concentrations of the fluoride-bearing salt, the hydrochloric acid and the peroxide are respectively 20% -80%, and the volume ratio of the three reagents is 1-3: 2-5: 2-7, placing the mixed solution in a special water tank, wherein the water tank is provided with a circulating water pump, and allowing the mixed solution to circulate in the water tank.
5. The heat treatment method for the high-strength quartz crucible as claimed in claim 4, wherein in the step S4, the quartz crucible is immersed in the mixed solution for 20-48 minutes, and the temperature of the mixed solution is 60-90 ℃.
6. The heat treatment method of the high-strength quartz crucible as claimed in claim 1, wherein the quartz crucible is placed in an oven to be baked for 20-40 minutes after being cleaned in the step S5, and the baking temperature is 30-80 ℃.
7. The heat treatment method of a high-strength quartz crucible as claimed in claim 1, wherein in the step S6, the pressure around the crucible is controlled to be-0.09 MPa to-0.1 MPa during the heat treatment, and then argon gas as a protective gas is filled to have a pressure of 0 MPa to 0.015 MPa.
8. The method as claimed in claim 7, wherein the quartz crucible is placed in a ventilated place for natural cooling after the heat treatment in S6 for 2-3 hours.
CN202110309801.6A 2021-03-23 2021-03-23 Heat treatment method for high-strength quartz crucible Pending CN115108841A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102515555A (en) * 2011-11-30 2012-06-27 周燕平 Quartz crucible surface processing method
CN105084875A (en) * 2014-05-08 2015-11-25 徐州康纳陶瓷科技有限公司 Production method for square fused quartz ceramic crucible
CN106927802A (en) * 2017-03-17 2017-07-07 邹亚静 A kind of manufacture method for noting solidification forming fused silica crucible
RU2688705C1 (en) * 2018-08-22 2019-05-22 Федеральное государственное автономное образовательное учреждение высшего образования "Сибирский федеральный университет" Method of producing quartz crucibles

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102515555A (en) * 2011-11-30 2012-06-27 周燕平 Quartz crucible surface processing method
CN105084875A (en) * 2014-05-08 2015-11-25 徐州康纳陶瓷科技有限公司 Production method for square fused quartz ceramic crucible
CN106927802A (en) * 2017-03-17 2017-07-07 邹亚静 A kind of manufacture method for noting solidification forming fused silica crucible
RU2688705C1 (en) * 2018-08-22 2019-05-22 Федеральное государственное автономное образовательное учреждение высшего образования "Сибирский федеральный университет" Method of producing quartz crucibles

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
胡宝玉等: "《特种耐火材料实用技术手册》", 冶金工业出版社 *

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