CN115106300A - Chip detecting and sorting machine - Google Patents

Abstract

The invention discloses a chip detection sorting machine which comprises a first upper tray conveying mechanism, a second upper tray conveying mechanism, a plurality of lower tray conveying mechanisms, a tray overturning mechanical arm, a sorting mechanical arm, a first visual detection device, a second visual detection device and a third visual detection device, wherein the first visual detection device is arranged on the first upper tray conveying mechanism; the first feeding tray conveying mechanism is used for feeding trays full of chips; the second feeding tray conveying mechanism is used for feeding unloaded trays; the blanking disc conveying mechanism is used for blanking a blanking disc; the first visual detection device and the second visual detection device sequentially photograph and detect chips on the material tray; the material tray overturning manipulator is used for overturning and transferring the material tray; the sorting manipulator is used for photographing and detecting the bottom surface of the chip and sorting and transferring the chip. The chip detection sorting machine can automatically sort and discharge materials after detecting the front and back surfaces of the chip through vision, and automatically test, thereby reducing the labor intensity of workers and improving the production efficiency.

Description

Chip detecting and sorting machine

Technical Field

The invention relates to a semiconductor detection sorting machine, in particular to a chip detection sorting machine which automatically sorts and discharges materials after detecting the front and back surfaces of a chip through vision.

Background

Because the semiconductor or the chip has individual difference in the production process, the performance is high or low, the quality is good or bad, and the appearance has flaws, the chip needs to be sorted in time in the production process, thereby providing reference for subsequent production. However, in the prior art, testing and sorting of the semiconductor or the chip often requires manual assistance, for example, workers are required to put the chip into a tester for testing, and then the tester is required to take out the chip and turn over the chip or put a new chip into the tester for testing after the testing is completed. And workers are required to manually classify the chips according to the measurement results after the detection is finished. Therefore, the existing mode has low automation degree, high working strength of workers and low production efficiency, and is not beneficial to mass production.

Disclosure of Invention

The invention aims to provide a chip detection sorting machine for automatically sorting and discharging chips after front and back sides of the chips are detected by vision, which can realize full-automatic detection, reduce the labor intensity of workers and improve the production efficiency.

In order to achieve the purpose, the chip detection sorting machine provided by the invention comprises a first feeding tray conveying mechanism, a second feeding tray conveying mechanism, a plurality of discharging tray conveying mechanisms, a tray overturning mechanical arm, a sorting mechanical arm, a first visual detection device, a second visual detection device and a third visual detection device; the first feeding tray conveying mechanism, the second feeding tray conveying mechanism and the plurality of discharging tray conveying mechanisms are sequentially arranged side by side; the first feeding tray conveying mechanism is used for feeding a tray full of chips; the second feeding tray conveying mechanism is used for feeding unloaded trays; the blanking disc conveying mechanism is used for blanking a material disc fully loaded with sorting chips; the first visual detection device and the second visual detection device are sequentially arranged above the middle part of the first upper material tray conveying mechanism along the conveying direction so as to sequentially photograph and detect the reverse sides of the chips on the material trays; the material tray overturning manipulator stretches over the first material tray feeding mechanism, the second material tray feeding mechanism and the end parts of the lower material tray feeding mechanisms so as to overturn and transfer material trays on the first material tray feeding mechanism onto the lower material tray feeding mechanism or transfer empty material trays of the second material tray feeding mechanism onto the lower material tray feeding mechanism; the third visual detection device is used for carrying out photographing detection on the front side of the turned chip; the sorting manipulator spans above the plurality of feeding disc conveying mechanisms; the sorting manipulator comprises a sorting arm and a fourth visual detection device, and is used for photographing and detecting the front surface of the chip and sorting and transferring the chip among the material trays of the feeding tray conveying mechanism.

Compared with the prior art, the invention has the advantages that the first feeding tray conveying mechanism is arranged to feed the feeding tray full of chips, the first visual detection device and the second visual detection device are arranged in the middle of the first feeding tray conveying mechanism, and the first visual detection device and the second visual detection device are utilized to visually detect the reverse sides of the chips on the feeding tray, so that the difference of each chip can be detected. And finally, detecting the front surfaces of the chips by using a third visual detection device and a fourth visual detection device, classifying the chips by using the sorting manipulator and transferring the chips of different types to different discharging disc conveying mechanisms. Therefore, the chip detection sorting machine does not need manual detection and sorting, the whole process is automatically finished from feeding, detection, sorting and discharging, the automation degree is extremely high, the labor intensity is greatly reduced, and the production efficiency is improved.

Preferably, the tray turnover manipulator comprises a base frame, a transverse moving mechanism, a moving support, two vertical moving mechanisms, a tray holding cylinder, a claw and a turnover jig, wherein the transverse moving mechanism is arranged on the base frame, and an output end of the transverse moving mechanism is connected with the moving support so as to drive the moving support to move transversely; the vertical moving mechanism is arranged on the moving support, and the output end of the vertical moving mechanism is connected with the disc holding air disc so as to drive the disc holding air cylinder to vertically move; the output end of the tray holding cylinder is connected with the claw to drive the claw to grab or release the material tray; and the other vertical moving mechanism is arranged on the moving support, the output end of the vertical moving mechanism is connected with the overturning jig, and the overturning jig can drive the charging tray to overturn. Through setting embrace a set cylinder and cleft hand, utilize it can be quick centre gripping to embrace a set cylinder drive cleft hand and place on the upset tool to empty charging tray, recycle again the upset tool overturns empty charging tray to can make empty charging tray upset 180 degrees, later recycle and embrace a set cylinder and cleft hand and place the empty charging tray after overturning on the charging tray that loads the chip, then make empty charging tray and load the charging tray of chip overturn once more simultaneously, thereby can make the chip shift from a charging tray to another charging tray and realize the positive and negative upset, reach the purpose of automatic upset, degree of automation is high, effectively reduces intensity of labour.

The turnover jig comprises a base plate, a disc separating cylinder, a lower plate cylinder, a pressing cylinder and a rotating device, wherein the base plate is of a frame structure with a hollow-out middle part, the disc separating cylinder is arranged on two opposite sides of the upper surface of the base plate, the lower plate is respectively arranged on two opposite sides of the lower bottom surface of the base plate, and the lower plate cylinder is arranged between the lower plate and the base plate so as to drive the lower plate to be close to or far away from the middle part of the base plate; the pressing air cylinder is arranged between the substrate and the lower plate so as to drive the lower plate to be close to or far away from the bottom surface of the substrate. Through utilizing the tight charging tray of upper plate 472, recycling rotary device overturns for the empty charging tray realizes the positive and negative upset, again through setting up hypoplastron and hypoplastron cylinder, can make the charging tray of two reverse superpositions can bear in on the upset tool, thereby can pass through divide a set cylinder and compress tightly the cylinder with the charging tray location of two reverse superpositions and compress tightly, and then make the chip accurately shift to another charging tray from a charging tray on, realize automatic upset.

Specifically, the overturning jig further comprises an upper plate and an upper plate cylinder, wherein the upper plate is arranged on two opposite sides of the upper surface of the substrate respectively, and the upper plate cylinder is arranged between the upper plate and the substrate to drive the upper plate to be close to or far away from the middle part of the substrate.

Specifically, a sliding block is arranged on the lower plate, a sliding rail is arranged on the substrate, and the sliding block is in sliding fit with the sliding rail; the slider is provided with a guide post, the lower plate is arranged on the guide post in a sliding manner, and an elastic part is arranged between the lower plate and the slider to provide elastic force for enabling the lower plate to be far away from the slider. Through set up the guide post on the slider, and be equipped with the elastic component between hypoplastron and the slider, thereby can make the hypoplastron is automatic to be kept away from the base plate, and cooperate the compress tightly cylinder, and then can will make two charging trays automatic each other compress tightly or automatic release.

Specifically, the overturning jig further comprises a vibration disc cylinder, and the vibration disc cylinder is arranged on the base plate to enable the material disc to vibrate. Set up shake a set cylinder, it can shake the charging tray production at the in-process that the chip overturned another charging tray from a charging tray, and then avoids the chip because of the unable upset of adhesion on the charging tray, effectively improves the success rate of chip upset.

Specifically, the output end of the pressing cylinder is connected with a pressing plate, and the pressing plate extends to the bottom surfaces of the two lower plates so as to push the lower plates to be close to the substrate through the pressing plate during pressing. Through set up in the clamp plate can utilize a compressing cylinder to compress tightly two simultaneously the hypoplastron, effectively reduce compressing cylinder's quantity, make the structure simplify more.

Preferably, the first visual inspection device includes a first support, a first transverse driving mechanism, a first platform, a first vertical driving mechanism and a first camera, the first transverse driving mechanism is disposed on the first support, and an output end of the first transverse driving mechanism is connected to the first platform so as to drive the first platform to drive the first camera to slide along a transverse direction; the first vertical driving mechanism is arranged on the first platform, and the output end of the first vertical driving mechanism is connected with the first camera so as to drive the first camera to be close to or far away from the material tray. Therefore, the first camera can effectively detect each chip on the material disc, and missing detection is avoided.

Preferably, the second visual inspection device includes a second support, a second transverse driving mechanism, a second platform, a second vertical driving mechanism, and a second camera, the second transverse driving mechanism is disposed on the second support, and an output end of the second transverse driving mechanism is connected to the second platform to drive the second camera to slide along the transverse direction; the second vertical driving mechanism is arranged on the second platform, and the output end of the second vertical driving mechanism is connected with the second camera so as to drive the second camera to be close to or far away from the material tray; the number of the second cameras is at least two. Therefore, the second camera can effectively detect each chip on the material tray, and missing detection is avoided.

Preferably, the first upper tray conveying mechanism, the second upper tray conveying mechanism and the lower tray conveying mechanism have the same structure; the first feeding tray conveying mechanism comprises a track groove, a tray stacking clamp, a tray separating mechanism, a chuck driving mechanism and a jacking mechanism, wherein the chuck mechanism is slidably arranged in the track groove, and the chuck driving mechanism is arranged in the track groove and drives the chuck mechanism to move along the track groove; the tray stacking clamp is arranged above the input end of the track groove and can stack trays, and the tray separating mechanism is arranged on the track groove and positioned at the bottom of the tray stacking clamp so as to separate one tray which is positioned at the lowest layer in sequence; the jacking mechanism is arranged below the track groove and located below the tray stacking clamp so as to drive the tray to be in the tray stacking clamp and to be transferred between the chuck mechanisms. Through setting up the mechanism of dividing the dish, can with the charging tray that is located the lowest layer in the charging tray piles up anchor clamps separates with other charging trays, and then can utilize climbing mechanism descends this charging tray to on the (holding) chuck mechanism. And the chuck driving mechanism is arranged in the track groove, so that the chuck mechanism can move along the direction of the track groove, the chuck mechanism is utilized to clamp the material tray, the material tray can realize linear movement output, the material tray can be sequentially conveyed to the visual detection device and the material tray manipulator, the purposes of automatic detection, automatic material tray feeding and automatic material tray transferring are realized, and the automation degree is high.

Drawings

FIG. 1 is a perspective view of the chip detecting sorter of the present invention.

FIG. 2 is a top view of the chip inspection sorter of the present invention.

FIG. 3 is a perspective view of the first tray feeding mechanism of the chip detecting and sorting machine according to the present invention.

FIG. 4 is a top view of the first tray feeding mechanism of the chip detecting and sorting machine according to the present invention.

FIG. 5 is a side view of the first upper tray conveying mechanism of the chip detecting and sorting machine of the present invention.

Fig. 6 is a structural view of a chuck mechanism of the first charging tray conveying mechanism of the present invention.

Fig. 7 is a structural view of the tray dividing mechanism of the first charging tray conveying mechanism according to the present invention.

FIG. 8 is a perspective view of the tray flipping robot of the chip detecting and sorting machine of the present invention.

Fig. 9 is a perspective view of the holding cylinder and the turning jig of the tray turning manipulator of the chip detection and sorting machine according to the present invention.

Fig. 10 is a perspective view of the turnover jig of the tray turnover manipulator of the chip detection and sorting machine according to the present invention.

Fig. 11 is a front view of the turnover jig of the tray turnover manipulator of the chip detection and sorting machine according to the present invention.

Fig. 12 is a side view of the turnover jig of the tray turnover robot of the chip inspection and sorting machine according to the present invention.

Fig. 13 is an enlarged view of a portion a in fig. 11.

Fig. 14 is a perspective view of a first visual inspection device and a second visual inspection device of the chip inspection and sorting machine according to the present invention.

Fig. 15 is a plan view of the first and second visual inspection devices of the chip inspection and sorting machine according to the present invention.

Fig. 16 is a perspective view of a third visual inspection device and a sorting robot of the chip inspection sorter of the present invention.

Fig. 17 is another perspective view of the third visual inspection device and the sorting robot of the chip inspection sorter of the present invention.

FIG. 18 is a view showing the configuration of a sorting arm of a sorting robot of the chip inspecting and sorting machine according to the present invention.

Detailed Description

In order to explain technical contents, structural features, and effects achieved by the present invention in detail, the following detailed description is given with reference to the embodiments and the accompanying drawings.

As shown in fig. 1, 2 and 16, the chip detecting and sorting machine 100 of the present invention includes a first feeding tray conveying mechanism 1, a second feeding tray conveying mechanism 2, a plurality of discharging tray conveying mechanisms 3, a tray turning manipulator 4, a sorting manipulator 5, a first visual detecting device 6, a second visual detecting device 7 and a third visual detecting device 52; the first upper tray conveying mechanism 1, the second upper tray conveying mechanism 2 and the plurality of lower tray conveying mechanisms 3 are sequentially arranged side by side; the first feeding tray conveying mechanism 1 is used for feeding a tray full of chips; the second feeding tray conveying mechanism 2 is used for feeding unloaded trays; the blanking plate conveying mechanism 3 is used for blanking a material plate fully loaded with sorting chips; the first visual detection device 6 and the second visual detection device 7 are sequentially arranged above the middle part of the first upper tray conveying mechanism 1 along the conveying direction so as to sequentially photograph the reverse sides of the chips on the trays for detection; the charging tray overturning manipulator 4 stretches over the first charging tray conveying mechanism 1, the second charging tray conveying mechanism 2 and the end parts of the plurality of discharging tray conveying mechanisms 3 so as to overturn and transfer the charging tray on the first charging tray conveying mechanism 1 onto the discharging tray conveying mechanism 3 or transfer the empty charging tray of the second charging tray conveying mechanism 2 onto the discharging tray conveying mechanism 3; the third visual inspection device 52 performs photographing inspection on the front side of the turned chip; the sorting manipulator 5 spans above the blanking tray conveying mechanisms 3; the sorting manipulator 5 comprises a sorting arm 51 and a fourth visual detection device 53, so as to photograph and detect the front surfaces of the chips and sort and transfer the chips among a plurality of material trays of the material tray conveying mechanism 3.

Referring to fig. 3 to 7, the first feeding tray conveying mechanism 1 includes a track groove 11, a tray stacking fixture 12, a tray separating mechanism 13, a chuck mechanism 14, a chuck driving mechanism 15 and a jacking mechanism 16, wherein the chuck mechanism 14 is slidably disposed in the track groove 11, the chuck driving mechanism 15 is disposed in the track groove 11 and drives the chuck mechanism 14 to move along the track groove 11; the chuck driving mechanism 15 includes a servo motor 151 and a belt 152, the motor is disposed at the outer bottom of the track groove 11, the output end of the servo motor 151 is connected to the belt pulley, and the belt 152 is wound between the two belt pulleys, so that the belt 152 is disposed in the track groove 11 and driven by the servo motor 151 to operate. The belt 152 is provided along the extending direction of the track groove 11. The tray stacking jig 12 is provided above the input end of the track groove 11 and can stack trays. Specifically, the charging tray stacking jig 12 has four limiting columns 121 that are right angles, the limiting columns 121 are right angle steel, the limiting columns 121 are distributed at four corners to form square spaces with the same appearance of the charging tray, and the charging tray can be sequentially stacked in the space surrounded by the limiting columns 121. The tray separating mechanism 13 is arranged on the track groove 11 and located on two sides of the bottom of the tray stacking clamp 12 so as to separate a tray located on the lowest layer in sequence. The disc separating mechanism 13 comprises a disc separating cylinder 131 and a disc separating inserting plate 132, wherein the output end of the disc separating cylinder 131 is connected with the disc separating inserting plate 132 to drive the disc separating inserting plate 132 to stretch and retract. The jacking mechanism 16 is disposed below the track groove 11 and below the tray stacking fixture 12 to drive the tray to be transferred between the tray stacking fixture 12 and the chuck mechanism 14. By providing the tray separating mechanism 13, the tray located at the lowest layer in the tray stacking jig 12 can be separated from other trays, and the tray can be lowered onto the chuck mechanism 14 by using the jacking mechanism 16. The chuck driving mechanism 15 is arranged in the track groove 11, so that the chuck mechanism 14 can move along the track groove 11, the chuck mechanism 14 is utilized to clamp the material tray, the material tray can be linearly moved and output, the material tray can be conveyed to the visual detection device and the material tray overturning manipulator 4, the purposes of automatic detection, automatic material tray feeding and automatic material tray transferring are achieved, and the automation degree is high. The jacking mechanism 16 comprises a jacking motor 161 and a jacking plate 162, the jacking motor 161 is arranged below the track groove 11 and the output end faces upwards, and the jacking plate 162 is connected to the output end of the jacking motor 161. The jacking motor 161 is a stepping screw motor, a screw nut is arranged on the motor, and the tractor-ploughing lifting plate 162 can be driven to lift through the screw nut driven by a screw.

As shown in fig. 6, the chuck mechanism 14 includes a seat 141, a front chuck cylinder 142 and a rear chuck cylinder 143, and the seat 141 is connected to the output end of the chuck driving mechanism 15 and slidably disposed in the track groove 11. The front chuck cylinder 142 is arranged at one end of the seat body 141, an output end of the front chuck cylinder 142 extends upwards out of the seat body 141, the rear chuck cylinder 143 is arranged at the other end of the seat body 141, an output end of the rear chuck cylinder 143 extends out transversely, the output end of the rear chuck cylinder 143 is further connected with a clamping block 1431, and the clamping block 1431 extends upwards out of the seat body 141 so as to clamp a tray together with the output end of the front chuck cylinder 142. Through setting up preceding (holding) chuck cylinder 142 and back (holding) chuck cylinder 143, can make the charging tray can be steadily fixed a position in the pedestal 141, guarantee (holding) chuck mechanism 14 and moving the charging tray can not take place to shift, improve the accuracy that the charging tray was carried and was fixed a position.

As shown in fig. 3 and 4, a sensing device (not shown) is disposed on a side of the track groove 11 facing the tray stacking fixture 12 to detect whether there is a tray in the tray stacking fixture 12. And a sensing device (not shown) is arranged on one side of the track groove 11, which faces the two visual detection devices, so as to detect whether a material tray is arranged on the visual detection device. And a height limit detection device 8 is arranged on the track groove 11, and the height limit detection device 8 is a height limit optical fiber to detect whether the height of the chip on the material tray exceeds a set value. And an induction device is arranged on one side of the track groove 11, which is far away from the material tray stacking clamp 12, and is used for detecting whether a material tray is arranged at the end of the track groove 11.

Referring to fig. 3 to 5, the first feeding tray conveying mechanism 1, the second feeding tray conveying mechanism 2 and the discharging tray conveying mechanism 3 have substantially the same structure. The different points are that the first feeding tray conveying mechanism 11 and the second feeding tray conveying mechanism 2 stack the feeding tray on the feeding tray stacking clamp 12, then separate the feeding tray at a lower layer by the feeding tray mechanism 13, then place the feeding tray on the chuck mechanism 14 by the jacking mechanism 16, and finally drive the chuck mechanism 14 to move by the chuck driving mechanism 15, so as to realize the feeding output of the feeding tray. And the action of the blanking tray conveying mechanism 3 is opposite to the action of the blanking tray conveying mechanism. It is after holding chuck mechanism 14 receives the charging tray, drive holding chuck mechanism 14 through holding chuck actuating mechanism 15 and remove, with the charging tray transfer the below that anchor clamps 12 were piled up to the charging tray, rethread climbing mechanism 16 with the charging tray jacking the bottom that anchor clamps 12 were piled up to the charging tray for the charging tray with other charging trays on the anchor clamps 12 are piled up together, utilize at last branch dish mechanism 13 supports this charging tray, make climbing mechanism 16 can leave, and then pile up the charging tray one by one on anchor clamps 12. In this embodiment, the first tray feeding mechanism 1 has two sets of chuck mechanisms 14 and chuck driving mechanisms 15 respectively disposed at two opposite sides of the track groove 11, so that the chuck mechanisms 14 can feed the trays in a staggered manner, thereby improving the feeding efficiency. In addition, the feeding tray conveying mechanism 1 further comprises a buffer jacking mechanism 17 and a buffer supporting block 18, the buffer jacking mechanism 17 is located below one end, away from the feeding and discharging area, of the track groove 11, the buffer supporting block 18 is arranged at one end, away from the feeding tray stacking clamp 12, of the track groove 11, the buffer supporting block 18 can be upwards overturned after being pushed upwards by the feeding tray to avoid the feeding tray, and can be automatically downwards overturned after the feeding tray is lifted in place to prevent the feeding tray from falling. Therefore, when the trays are too much to be sorted, the buffer jacking mechanism 17 and the buffer supporting block 18 can receive the trays and stack the trays.

As shown in fig. 8 to 13, the tray flipping robot 4 includes a base frame 41, a horizontal moving mechanism 42, a moving bracket 43, two vertical moving mechanisms 44 and 48, a tray holding cylinder 45, a claw 46, and a flipping fixture 47, wherein the horizontal moving mechanism 42 is disposed on the base frame 41, and an output end of the horizontal moving mechanism is connected to the moving bracket 43 to drive the moving bracket 43 to move horizontally. One of the vertical moving mechanisms 44 is disposed on the moving support 43, and an output end of the vertical moving mechanism is connected to the disk holding air disk to drive the disk holding air cylinder 45 to move vertically. The output end of the tray holding cylinder 45 is connected with the claws 46 at two opposite sides so as to drive the claws 46 to grab or release the tray. The other vertical moving mechanism 48 is disposed on the moving bracket 43, and the output end of the other vertical moving mechanism is connected to the turnover fixture 47 to drive the turnover fixture 47 to move up and down, and the turnover fixture 47 can drive the tray to turn over. Through setting embrace a set cylinder 45 and claw 46, utilize it can be quick centre gripping to embrace a set cylinder 45 drive claw 46 and place on upset tool 47 to empty charging tray, recycle again upset tool 47 overturns empty charging tray to can make empty charging tray upset 180 degrees, later recycle and embrace a set cylinder 45 and claw 46 and place the empty charging tray after overturning on the charging tray that loads the chip, then make empty charging tray and load the charging tray of chip overturn once more simultaneously, thereby can make the chip shift from a charging tray to another charging tray and realize the positive and negative upset, reach the purpose of automatic upset, degree of automation is high, effectively reduces intensity of labour.

Referring to fig. 10 to 12, the flipping fixture 47 includes a substrate 471, an upper plate 472, an upper plate cylinder 473, a dividing plate cylinder 474, a lower plate 475, a lower plate cylinder 476, a rotating device 478, and a pressing cylinder 479, wherein the substrate 471 is a frame structure with a hollow center, the upper plates 472 are respectively disposed on two opposite sides of an upper surface of the substrate 471, and the upper plate cylinder 473 is disposed between the upper plate 472 and the substrate 471 to drive the upper plate 472 to approach or separate from a middle portion of the substrate 471; the tray cylinder 474 is connected to the base plate 471. The distributing cylinders 474 are distributed on two opposite sides of the upper surface of the substrate 471. The lower plates 475 are respectively disposed on two opposite sides of the bottom surface of the substrate 471, and the lower plate cylinders 476 are disposed between the lower plates 475 and the substrate 471 to drive the lower plates 475 to approach or separate from the middle of the substrate 471. The pressing cylinder 479 is disposed between the substrate 471 and the lower plate 475 to drive the lower plate 475 to approach or separate from the bottom surface of the substrate 471. Through utilizing upper plate 472 and hypoplastron 475 press from both sides tight charging tray, recycle rotary device 478 overturns for empty charging tray realizes overturning between the front and back, again through setting up hypoplastron 475 and hypoplastron cylinder 476, can make the charging tray of two reverse superpositions bear in on the upset tool 47, through compressing tightly cylinder 479 with the charging tray location of two reverse superpositions and compress tightly, and then make the chip accurately transfer to another charging tray from a charging tray on, realize automatic upset.

Referring to fig. 10 to 12, specifically, two ends of one side of the upper plate 475 are provided with sliders, one side of the base plate 471 facing the upper plate is provided with slide rails, two ends of one side of the lower plate 475 are provided with sliders 4751, two ends of one side of the base plate 471 facing the lower plate 475 are provided with slide rails 4711, and the sliders 4751 and the slide rails 4711 are slidably engaged, so that the two lower plates 475 can approach to or be away from the middle of the base plate 471; the slider 4751 is provided with a guide post 4752, the lower plate 475 is slidably disposed on the guide post 4752, an elastic member 4753 is disposed between the lower plate 475 and the slider 4751 to provide an elastic force for separating the lower plate 475 from the slider 4751, and the elastic member 4753 is a compression spring. The slide block 4751 is provided with the guide post 4752, and the elastic member 4753 is arranged between the lower plate 475 and the slide block 4751, so that the lower plate 475 can be automatically separated from the base plate 471, and the lower plate 475 can be matched with the pressing cylinder 479, and further, the two material trays can be automatically pressed or released mutually.

The overturning jig 47 further comprises a vibration disc cylinder (not shown), the vibration disc cylinder is arranged on the substrate 471, and an output end of the vibration disc cylinder extends out towards the middle of the substrate 471, so that the output end of the vibration disc cylinder can be in contact with the material disc to vibrate the material disc. Set up shake a set cylinder, it can shake the charging tray at the in-process that the chip overturned another charging tray from a charging tray, and then avoids the chip because of the adhesion can't overturn on the charging tray, effectively improves the success rate of chip upset.

As shown in fig. 13, a pressing plate 4791 is connected to the output end of the pressing cylinder 479, and the pressing plate 4791 extends to the bottom surfaces of the two lower plates 475 to push the lower plates 475 close to the substrate 471 by the pressing plate 4791 during pressing. Through setting up in the clamp plate 4791 can utilize a pressure cylinder 479 to compress tightly two simultaneously hypoplastron 475, effectively reduce the quantity of pressure cylinder 479 makes the structure more simplified.

Referring to fig. 14 and 15, the first visual inspection device 6 includes a first bracket 61, a first horizontal driving mechanism 62, a first platform 63, a first vertical driving mechanism 64 and a first camera 65, wherein the first horizontal driving mechanism 62 is disposed on the first bracket 61, and an output end of the first horizontal driving mechanism is connected to the first platform 63 to drive the first platform 63 to slide along a horizontal direction; the first vertical driving mechanism 64 is disposed on the first platform 63, and the output end of the first vertical driving mechanism is connected with the first camera 65, so as to drive the first camera 65 to be close to or far away from the material tray. The first camera 65 is a 2D camera. Therefore, the first camera 65 can effectively detect each chip on the material tray, and missing detection is avoided.

Referring to fig. 14 and 15 again, the second visual inspection device 7 includes a second bracket 71, a second horizontal driving mechanism 72, a second platform 73, a second vertical driving mechanism 74 and a second camera 75, the second horizontal driving mechanism 72 is disposed on the second bracket 71, and an output end of the second horizontal driving mechanism is connected to the second platform 73 to drive the second platform 73 to slide along the horizontal direction; the second vertical driving mechanism 74 is disposed on the second platform 73, and the output end of the second vertical driving mechanism is connected to the second camera 75, so as to drive the second camera 75 to approach or move away from the tray; the second camera 75 is a 3D camera. The number of the second cameras 75 is at least two. Therefore, the second camera 75 can effectively detect each chip on the tray, and missing detection is avoided. In the present invention, the first visual inspection device 6 and the second visual inspection device 7 are disposed adjacent to each other, so that the first bracket 61 and the second bracket 71 can be formed as an integral structure.

As shown in fig. 16 to 18, the sorting arm 51 includes a third support 511, a third lateral driving mechanism 512, a third platform 513, a third vertical driving mechanism 514, a pitch changing mechanism 515, an air cylinder 516, and a suction nozzle 517, and the third lateral driving mechanism 512 is disposed on the third support 511 and drives the third platform 513 to move laterally. The third vertical driving mechanism 514 is disposed on the third platform 513 and drives the pitch varying mechanism 515 to move vertically, and the pitch varying mechanism 515 can drive the air cylinder 516 and the suction nozzle 517 to adjust the distance between the adjacent suction nozzle 517. The air cylinder 516 is disposed at the output end of the pitch-variable mechanism 515, and the output end is connected to the suction nozzle 517. The fourth visual inspection device 53 is disposed on the third platform 513 to slide along with the third platform 513, and can photograph and inspect the turned chip, and the fourth visual inspection device 53 is a 3D camera. The variable pitch mechanism 515 comprises a variable pitch motor (not shown), an installation frame, a driving plate and an installation frame body, the installation frame is connected to the output end of the third vertical driving mechanism 514, the variable pitch motor is arranged on the installation frame, the conveying end of the variable pitch motor is connected with the driving plate, the driving plate is vertically and slidably arranged on the installation frame, and the side surface of the driving plate is provided with a plurality of guide rails which radiate outwards; the installation support body is transversely arranged on the installation support in a sliding manner, and one end of the installation support body is matched with the guide rail in a sliding manner. The cylinder set up in on the installation support body. The variable pitch motor drives the driving plate to vertically move, so that the mounting frame bodies are far away from or close to each other. Because the arrangement intervals of the chips on different types of trays may be different, the chips with different arrangement intervals can be clamped by using the pitch varying mechanism 515, so that the sorting manipulator 5 can adapt to different types of trays, and the use convenience is improved. The third visual inspection device 52 is disposed at the other end of the third bracket 511, a fourth transverse driving mechanism 521 is further disposed on the third visual inspection device 52, and the fourth transverse driving mechanism 521 is disposed on the third bracket 511 and can drive the third visual inspection device 52 to move transversely. The third visual inspection device 52 is a 2D camera.

In combination with the above description and the above drawings, the operation principle of the tray turning manipulator 4 for turning the tray will be described as follows:

in an initial state, the vibration disc cylinder, the lower plate cylinder 476 and the disc separating cylinder 474) retract, and the other cylinders extend; the upper plate 472 is above. When the material tray needs to be turned over, firstly, the vertical moving mechanism 44 drives the claw 46 to descend to an empty material tray position, and the plate holding cylinder 45 drives the claw 46 to hold an empty material tray and then ascend; simultaneously, the upper plate cylinder 473 is folded with the upper plate 472; the tray separating cylinder 474 extends to position the tray on the upper layer. Then the tray separating cylinder 474 drives the claw 46 to open, and the vertical moving mechanism 44 rises; while the claw 46 is lifted away. At this time, the empty tray is held by the turnover jig 47. Then, the rotating device 478 drives the overturning jig 47 to overturn, so that the empty tray is overturned by 180 °. Then, the vertical moving mechanism 44 drives the claw hand 46 to descend, the claw hand 46 holds the empty tray after being turned over, then the tray separating cylinder 474 retracts, and the claw hand 46 drives the empty tray to be placed back to the original position of the empty tray. Then, the vertical moving mechanism 44 is raised, and the rotating device 478 is reset. After that, the claw 46 descends to pick and place the empty tray on the upper layer of the turnover jig 47 again. The transverse moving mechanism 42 drives the turnover jig 47 to move to the upper part of the full tray. The empty tray on the gripper 46 is then placed on top of the full tray to stack the two trays. Then, the claw 46 descends to grab two trays and ascends (an empty tray is arranged at the upper part, and a full tray is arranged at the lower part); at this time, the lower plate cylinder 476 and the plate dividing cylinder 474 extend to make the lower plate 475 extend to support the lower tray, the plate dividing cylinder 474 clamps the upper tray, meanwhile, the pressing cylinder 479 drives the pressing plate 4791 to make the pressing plate 4791 abut against the lower plate 475, and finally the lower plate 475 presses the two trays. Then, the claw 46 is released to ascend and avoid, and the rotating device 478 drives the jig to turn over, so that the two trays turn over by 180 °. At the moment, a full-load tray is positioned above, an empty tray is positioned below, meanwhile, the tray vibrating cylinder vibrates and strikes the tray, so that the chip is turned over from the full-load tray above to the empty tray below (the bottom surface of the chip is downward), finally, the claw 46 descends to hold the two trays, the pressing cylinder 479 is loosened, then the lower plate 475 is opened, and the claw 46 drives the full-load tray to descend to be placed on the lower tray conveying mechanism 3.

The operation of the chip detecting and sorting machine 100 of the present invention will be described with reference to the above drawings, as follows:

firstly, a tray full of chips (with the bottom surface of the chips facing upward) is manually placed on the tray stacking jig 12 of the first tray feeding mechanism 1, and an empty tray is also manually placed on the second tray feeding mechanism 2. Then, the jacking mechanism 16 jacks and carries the material tray, and the tray dividing mechanism 13 contracts and separates from the material tray. The jacking mechanism 16 then moves down a distance of one tray height. At this time, the tray separating cylinder 474 of the tray separating mechanism 13 extends, and the tray separating inserting plate is inserted between the lowest tray and the tray on the lowest tray, so that the tray on the lowest tray is separated from the tray on the upper tray. At this time, the jacking mechanism 16 drives the material tray at the lowest layer to descend and enables the material tray to be borne on the seat body, and at this time, the front chuck plate cylinder and the rear chuck plate cylinder sequentially extend out to clamp and position the material tray. The chuck driving mechanism 15 may drive the chuck mechanism 14 to move toward the other end along the track groove 11. When moving to the below of first visual detection device 6 and second visual detection device 7 in proper order, the induction system response back that corresponds, chuck actuating mechanism 15 stops, at this moment, first visual detection device 6 shoots the detection to the chip on the charging tray, second visual detection device 7 shoots the detection to the chip on the charging tray to with the result record to control system on. And then, the chuck driving mechanism 15 drives the chuck mechanism 14 to move again, the chuck mechanism 14 reaches the other end of the track groove 11 after the height limiting detection of the height limiting optical fiber, the chuck mechanism 14 releases the material tray, and the cache jacking mechanism 17 jacks the detected material tray to the cache supporting block 18 to receive the material tray, so that the material tray is stacked. Meanwhile, the second feeding tray conveying mechanism 2 conveys the unloaded tray to the other end thereof. At this time, the material tray turning manipulator 4 transfers an empty material tray to one of the lower material tray conveying mechanisms 3, turns over the full-load material tray on the first upper material tray conveying mechanism 1 and respectively transfers the full-load material tray to the other lower material tray conveying mechanisms 3, so that two lower material tray conveying mechanisms 3 are both provided with a material tray full of chips, and the other lower material tray conveying mechanism 3 is provided with an empty material tray. Thereafter, each of the tray transfer mechanisms 3 transfers the tray to a position below the sorting robot 5. At this time, the third and fourth visual inspection devices 52 and 53 sequentially inspect the chips, and then the sorting robot 5 sorts the chips. Specifically, the control system divides the chips into at least two types, for example, a qualified type and an unqualified type, according to the result of the visual detection, so as to control the sorting manipulator 5, place the first type of chips on one of the trays on the blanking tray conveying mechanism 3, and place the second type of chips on the other tray on the blanking tray conveying mechanism 3, so as to place the same type of chips on the same tray. After each charging tray is filled, the charging tray is conveyed to the discharging end by the discharging tray conveying mechanism 3 corresponding to the charging tray, stacked on the charging tray stacking jig and waiting to be taken out. When no material tray exists on the lower material tray conveying mechanism 3, the material tray overturning manipulator 4 transfers the full-loaded material tray on the first upper material tray conveying mechanism 1 to the lower material tray conveying mechanism 3; or the empty tray on the second upper tray conveying mechanism 2 is transferred to the lower tray conveying mechanism 3, so that sorting can be continuously carried out.

Compared with the prior art, the invention has the advantages that the first feeding tray conveying mechanism 1 is arranged to feed the feeding tray full of chips, the first visual detection device 6 and the second visual detection device 7 are arranged in the middle of the first feeding tray conveying mechanism 1, and the first visual detection device 6 and the second visual detection device 7 are utilized to visually detect the reverse sides of the chips on the feeding tray, so that the difference of each chip can be detected. And then, arranging a second feeding tray conveying mechanism 2 and a plurality of feeding tray conveying mechanisms side by side, turning over the trays full of chips by using the second feeding tray conveying mechanism 2 and the tray turning manipulator 4, transferring the turned trays to the discharging tray conveying mechanism 3, detecting the front surfaces of the chips by using the third visual detection device 52 and the fourth visual detection device 53, classifying the chips by using the sorting manipulator 5, and transferring the chips of different types to different discharging tray conveying mechanisms 3. Therefore, the chip detection sorting machine 100 of the invention does not need manual detection and sorting, the whole process is automatically finished from feeding, detection, sorting and discharging, the automation degree is extremely high, the labor intensity is greatly reduced, and the production efficiency is improved.

The above disclosure is only a preferred embodiment of the present invention, and certainly should not be taken as limiting the scope of the present invention, which is therefore intended to cover all equivalent changes and modifications within the scope of the present invention.

Claims (10)

1. A chip detecting and sorting machine, comprising: the automatic sorting machine comprises a first feeding tray conveying mechanism, a second feeding tray conveying mechanism, a plurality of discharging tray conveying mechanisms, a tray overturning mechanical arm, a sorting mechanical arm, a first visual detection device, a second visual detection device and a third visual detection device; the first feeding tray conveying mechanism, the second feeding tray conveying mechanism and the plurality of discharging tray conveying mechanisms are sequentially arranged side by side; the first feeding tray conveying mechanism is used for feeding a tray full of chips; the second feeding tray conveying mechanism is used for feeding unloaded trays; the blanking disc conveying mechanism is used for blanking a material disc fully loaded with sorting chips; the first visual detection device and the second visual detection device are sequentially arranged above the middle part of the first upper tray conveying mechanism along the conveying direction so as to sequentially photograph and detect the reverse side of the chip on the tray; the material tray overturning manipulator stretches over the first material tray feeding mechanism, the second material tray feeding mechanism and the end parts of the lower material tray feeding mechanisms so as to overturn and transfer material trays on the first material tray feeding mechanism onto the lower material tray feeding mechanism or transfer empty material trays of the second material tray feeding mechanism onto the lower material tray feeding mechanism; the third visual detection device is used for carrying out photographing detection on the front side of the turned chip; the sorting manipulator spans above the plurality of feeding disc conveying mechanisms; the sorting manipulator comprises a sorting arm and a fourth visual detection device, and is used for photographing and detecting the front surface of the chip and sorting and transferring the chip among the material trays of the feeding tray conveying mechanism.

2. The chip detecting and sorting machine according to claim 1, wherein: the tray overturning manipulator comprises a base frame, a transverse moving mechanism, a moving support, two vertical moving mechanisms, a tray holding cylinder, a claw and an overturning jig, wherein the transverse moving mechanism is arranged on the base frame, and the output end of the transverse moving mechanism is connected with the moving support so as to drive the moving support to transversely move; the vertical moving mechanism is arranged on the moving support, and the output end of the vertical moving mechanism is connected with the disc holding air disc so as to drive the disc holding air cylinder to vertically move; the output end of the tray holding cylinder is connected with the claw to drive the claw to grab or release the material tray; and the other vertical moving mechanism is arranged on the moving support, the output end of the vertical moving mechanism is connected with the overturning jig, and the overturning jig can drive the charging tray to overturn.

3. The chip inspection sorter of claim 2, wherein: the turnover jig comprises a substrate, a disc separating cylinder, a lower plate cylinder, a pressing cylinder and a rotating device, wherein the substrate is of a frame structure with a hollow middle part, the disc separating cylinder is arranged on two opposite sides of the upper surface of the substrate, the lower plate is respectively arranged on two opposite sides of the lower bottom surface of the substrate, and the lower plate cylinder is arranged between the lower plate and the substrate so as to drive the lower plate to be close to or far away from the middle part of the substrate; the pressing air cylinder is arranged between the substrate and the lower plate so as to drive the lower plate to be close to or far away from the bottom surface of the substrate.

4. The chip detecting and sorting machine according to claim 3, wherein: the overturning jig further comprises an upper plate and an upper plate air cylinder, wherein the upper plate is respectively arranged on two opposite sides of the upper surface of the substrate, and the upper plate air cylinder is arranged between the upper plate and the substrate to drive the upper plate to be close to or far away from the middle part of the substrate.

5. The chip detecting and sorting machine according to claim 3, wherein: the lower plate is provided with a sliding block, the substrate is provided with a sliding rail, and the sliding block is in sliding fit with the sliding rail; the slider is provided with a guide post, the lower plate is arranged on the guide post in a sliding manner, and an elastic part is arranged between the lower plate and the slider to provide elastic force for enabling the lower plate to be far away from the slider.

6. The chip detecting and sorting machine according to claim 3, wherein: the overturning jig further comprises a vibration disc cylinder, and the vibration disc cylinder is arranged on the base plate to enable the material disc to vibrate.

7. The chip detecting and sorting machine according to claim 6, wherein: the output end of the pressing cylinder is connected with a pressing plate, and the pressing plate extends to the bottom surfaces of the two lower plates so as to push the lower plates to be close to the substrate through the pressing plate during pressing.

8. The chip detecting and sorting machine according to claim 1, wherein: the first visual detection device comprises a first support, a first transverse driving mechanism, a first platform, a first vertical driving mechanism and a first camera, wherein the first transverse driving mechanism is arranged on the first support, and the output end of the first transverse driving mechanism is connected with the first platform so as to drive the first platform to drive the first camera to slide along the transverse direction; the first vertical driving mechanism is arranged on the first platform, and the output end of the first vertical driving mechanism is connected with the first camera so as to drive the first camera to be close to or far away from the material tray.

9. The chip detecting and sorting machine according to claim 1, wherein: the second visual detection device comprises a second support, a second transverse driving mechanism, a second platform, a second vertical driving mechanism and a second camera, wherein the second transverse driving mechanism is arranged on the second support, and the output end of the second transverse driving mechanism is connected with the second platform so as to drive the second platform to drive the second camera to slide along the transverse direction; the second vertical driving mechanism is arranged on the second platform, and the output end of the second vertical driving mechanism is connected with the second camera so as to drive the second camera to be close to or far away from the material tray; the number of the second cameras is at least two.

10. The chip detecting and sorting machine according to claim 1, wherein: the first upper tray conveying mechanism, the second upper tray conveying mechanism and the lower tray conveying mechanism have the same structure; the first feeding tray conveying mechanism comprises a track groove, a tray stacking clamp, a tray separating mechanism, a chuck driving mechanism and a jacking mechanism, wherein the chuck mechanism is slidably arranged in the track groove, and the chuck driving mechanism is arranged in the track groove and drives the chuck mechanism to move along the track groove; the tray stacking fixture is arranged above the input end of the track groove and can stack trays, and the tray separating mechanism is arranged on the track groove and positioned at the bottom of the tray stacking fixture so as to separate a tray which is positioned at the lowest layer in sequence; the jacking mechanism is arranged below the track groove and located below the tray stacking clamp so as to drive the tray to be in the tray stacking clamp and to be transferred between the chuck mechanisms.

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