CN115101593A - 胆固醇生物传感器及其制备方法 - Google Patents

胆固醇生物传感器及其制备方法 Download PDF

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CN115101593A
CN115101593A CN202210559846.3A CN202210559846A CN115101593A CN 115101593 A CN115101593 A CN 115101593A CN 202210559846 A CN202210559846 A CN 202210559846A CN 115101593 A CN115101593 A CN 115101593A
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丰建波
陈鹏
潘传真
安慧敏
谢自力
修向前
陈敦军
刘斌
赵红
张�荣
郑有炓
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Abstract

本发明公开了一种胆固醇生物传感器，其特征在于：以HEMT为换能器，在换能器的栅极上固定胆固醇氧化酶，所述栅极表面材料为金。还公开了其制备方法。本发明运用GaN基高电子迁移率晶体管(HEMT)结构作为换能器，将胆固醇氧化酶固定到器件的金栅上，实现对胆固醇的探测。这样不仅具备了电化学的性能，如测试简单，结构简化，实时反应，成本低等优点，同时由于HEMT结构的本征信号低，受外界其他环境影响小，灵敏度有一个很大的提高。促使胆固醇生物传感器提高了对胆固醇的准确性、专一性、稳定性。

Description

胆固醇生物传感器及其制备方法
技术领域
本发明涉及一种胆固醇生物传感器及其制备方法，属于电化学生物传感器技 术领域。
背景技术
胆固醇是人身体重要的脂类物质，有助于维持细胞膜的通透性和流动性，是 细胞膜的重要组成部分。胆固醇溶度过高或者过低都会对人产生很大的伤害。当 人体类的胆固醇过高时，会导致动脉粥样硬化、脑中风和心血管疾病的重要危险 因素之一。同时胆固醇过低，则需要检查是否有重病或者营养不良，而且研究表 明胆固醇过低会增加抑郁、自闭等心理疾病。所以胆固醇一定要衡量并保持在一 个标准范围内。而胆固醇过高是影响猝死和心血管的重要因素，因为开发一种高 灵敏度的检测胆固醇含量的设备或者方法在医学领域有着重要意义。
到目前为止，已报道的胆固醇检测方法较多，气相色谱法、液相色谱法、气 液色谱-质谱联用法、温度测定法、分子发光法、比色法、电化学方法等。这些 方法度可以检测胆固醇，但依旧存在着很多缺点，如费时，设备复杂，设备昂贵， 样品需要处理，操作复杂，需要有经验的操作人员，不能及时反应，更为重要的 是之前的方法大多灵敏度偏低。虽然电化学分析方法能克服这些缺点，但是现在 已知的电化学都是直接用高性能的材料，如石墨烯材料。直接将胆固醇氧化酶固 定石墨烯材料上，运用石墨烯自身的高速电子迁移率，来实现对胆固醇的探测。 但是实际上这种电化学方法由于石墨烯材料或者其他高性能材料本身的本征信 号比较大，并且传导通道裸露在外，受到外界环境影响较大，更加加剧了本征信 号的过大，而本征信号越低对灵敏度的提升很大。本发明是运用GaN基高电子 迁移率晶体管(HEMT)结构的独特的二维电子气性质，迄今为止，未见到报 道基于GaN基高电子迁移率晶体管(HEMT)来探测胆固醇溶液。
发明内容
本发明的目的在于提供一种具有高灵敏度的胆固醇生物传感器。
本发明的目的通过以下技术方案实现：
一种胆固醇生物传感器，以HEMT为换能器，在换能器的栅极上固定胆固 醇氧化酶，所述栅极表面材料为金。
优选的，所述胆固醇氧化酶通过共价键固定的方式固定在HEMT的栅极。
优选的，所述HEMT的结构自下而上依次包括：衬底层，GaN成核层，碳 掺杂的GaN缓冲层，GaN沟道层，AlN夹层，AlGaN/GaN势垒层或InAlN/GaN 势垒层，GaN帽层，还包括与GaN沟道层接触的源极，以及设置在GaN帽层上 的漏极和栅极，所述源极和漏极上覆盖保护层。
优选的，所述栅极有两个，两个栅极共用漏极，源极环绕栅极形成的感应区。
本发明还公开了上述的胆固醇生物传感器的制备方法，其特征在于其步骤包 括：
(1)洗涤栅极，干燥，将洗涤过的栅极用1.6-已二硫醇浸润，得到含有硫 键的栅极；
(2)将金纳米颗粒溶液滴在栅极上，得到表面分布金纳米颗粒的栅极；
(3)用11-巯基十一烷酸乙醇溶液处理表面含有金纳米颗粒的栅极，在金纳 米颗粒表面生成AU-S键；
(4)用胆固醇氧化酶溶液滴在经过11-巯基十一烷酸乙醇溶液处理过的栅极 表面，形成胆固醇生物敏感膜，得到胆固醇生物传感器。
本发明运用GaN基高电子迁移率晶体管(HEMT)结构作为换能器，将胆 固醇氧化酶固定到器件的金栅上，实现对胆固醇的探测。这样不仅具备了电化学 的性能，如测试简单，结构简化，实时反应，成本低等优点，同时由于HEMT 结构的本征信号低，受外界其他环境影响小，灵敏度有一个很大的提高。促使胆 固醇生物传感器提高了对胆固醇的准确性、专一性、稳定性。
相对于现有技术，本发明有着以下优点：
(1)本发明中胆固醇生物传感器的总面积小，但是感应区面积却有着一 个很大提高，因为采用了双栅结构。总面积小可以更好的集成，且受外界其他因 素影响也小。感应区面积较大，可以提高对胆固醇的探测度。
(2)本发明中胆固醇生物传感器的结构是GaN HEMT结构，在沟道层有 一层高迁移率的二维电子气，有着良好的导电性，大大缩短了反应时间。同时由 于有着保护层的存在，使得本发明中胆固醇生物传感器的干扰信号较小，对灵敏 度也有很大的提高。
(3)本发明中胆固醇生物传感器的采用的胆固醇氧化酶，与胆固醇特异 性结合，对胆固醇的选择性好，专一性好。可以避开对血液中其他物质的干扰。
附图说明
图1为本发明的胆固醇生物传感器结构剖视图。
图2为本发明的胆固醇生物传感器的结构的俯视图。
图3为单栅和双栅，灵敏度与栅极长度的关系图。
具体实施方式
以下是结合本发明实施例中的附图，对本发明实施例中的技术方案进行清 楚、完整地描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全 部的实施例。基于本发明中的实施例，本领普通技术人员在没有做出创造性劳动 的前提下所获得的所有其他实施例，都属于本发明保护的范围。
实施例1
如图1是本发明高灵敏度胆固醇传感器的一个实施例的结构示意图剖面图， 如图2是本发明高灵敏度胆固醇传感器的一个实施例的结构示意图俯视图。如图 1所示，该器件是双栅结构。其结构自下而上大致为：衬底层，成核层，缓冲层， 沟道层，夹层，势垒层，帽层，栅极(源极、漏极)，保护层，在相应的胆固醇 生物敏感膜和相关处理。
具体的步骤如下
在该实例中，衬底为蓝宝石衬底。成核层为GaN材料，生长厚度为25nm。 缓冲层为碳掺杂的GaN，生长厚度可为2-3μm之间。沟道层为GaN材料。夹层 为AlN材料，生长厚度为2nm。势垒层为AlGaN/GaN，生长厚度为25nm，AI 组分的含量为0.33，势垒层作为肖特基栅和二维电子气之间的电介质。帽层为 GaN材料，厚度为3nm。
该实施例的源极、漏极使用的材料为钛，铝，镍，金，厚度分别为 Ti/Al/Ni/Au(30nm/150nm/50nm/100nm)，并在850℃的氮气环境下，热退火。得 到电阻率很低的欧姆接触。
该实施例的栅极使用的材料钛、金，厚度分别为Ti/Au(500nm/500nm)。
该实施例的保护层为二氧化硅，保护器件不受外界其他环境的影响，厚度为250nm或者以上，防止击穿。
该实施例的栅极是表面金栅极，厚度为10nm，栅极长为25μm，栅极宽为 100μm。总的感应区面积为5000μm2。
该实施例中的生物胆固醇敏感膜的步骤如下，
(1)用70％的乙醇和去离子水分别处理(洗涤)金栅极，最后在空气中干 燥，将洗涤过的金栅极用1.6-已二硫醇浸润24小时，然后用去离子水冲洗，得 到含有硫键的金栅极。
(2)将金纳米颗粒溶液滴在金栅极上，处理时间为6个小时，得到表面分 布有金纳米颗粒的金栅极。
(3)用溶度为10mg/ml的11-巯基十一烷酸乙醇溶液处理表面含有金纳米 颗粒的金栅极，处理时间为6个小时，使得金纳米颗粒表面生成AU-S键，作为 通过共价键固定胆固醇氧化酶的基础。
(4)用胆固醇氧化酶溶液滴在经过11-巯基十一烷酸乙醇溶液处理表面含有 金纳米颗粒的金栅极，浸润时间为12个小时，得到最后胆固醇生物敏感膜，用 于胆固醇检测。
以其他结构都与实施例1一致，仅设置一个栅极的器件作为对比例，模拟计 算实施例1和对比例的器件的探测特性，如图3所示。数据图可以看到，在相同 的源漏间距双栅结构比单栅结构在灵敏度方面有着很大优势，采用双栅结构可以 提升HEMT器件在生物传感器领域的灵敏度。

Claims (5)

1.一种胆固醇生物传感器，其特征在于：以HEMT为换能器，在换能器的栅极上固定胆固醇氧化酶，所述栅极表面材料为金。
2.根据权利要求1所述的胆固醇生物传感器，其特征在于：所述胆固醇氧化酶与HEMT栅极表面的AU-S键反应，通过共价键固定的方式固定在HEMT的栅极。
3.根据权利要求2所述的胆固醇生物传感器，其特征在于：所述HEMT的结构自下而上依次包括：衬底层，GaN成核层，碳掺杂的GaN缓冲层，GaN沟道层，AlN夹层，AlGaN/GaN势垒层或InAlN/GaN势垒层，GaN帽层，还包括与GaN沟道层接触的源极，以及设置在GaN帽层上的漏极和栅极，所述源极和漏极上覆盖保护层。
4.根据权利要求3所述的胆固醇生物传感器，其特征在于：所述栅极有两个，两个栅极共用漏极，源极半环绕栅极形成的感应区。
5.根据权利要求1-4中任一项所述的胆固醇生物传感器的制备方法，其特征在于其步骤包括：
(1)洗涤栅极，干燥，将洗涤过的栅极用1.6-已二硫醇浸润，得到含有硫键的栅极；
(2)将金纳米颗粒溶液滴在栅极上，得到表面分布有金纳米颗粒的栅极；
(3)用11-巯基十一烷酸乙醇溶液处理表面含有金纳米颗粒的栅极，在金纳米颗粒表面生成AU-S键；
(4)用胆固醇氧化酶溶液滴在经过11-巯基十一烷酸乙醇溶液处理过的栅极表面，形成胆固醇生物敏感膜，得到胆固醇生物传感器。
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Cited By (1)

* Cited by examiner, † Cited by third party
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CN117373988A (zh) * 2023-11-27 2024-01-09 苏州恩腾半导体科技有限公司 一种基于伯努利卡盘的晶圆保持装置

Cited By (2)

* Cited by examiner, † Cited by third party
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CN117373988A (zh) * 2023-11-27 2024-01-09 苏州恩腾半导体科技有限公司 一种基于伯努利卡盘的晶圆保持装置
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