CN115094522A - Water cooling equipment for silicon carbide production - Google Patents
Water cooling equipment for silicon carbide production Download PDFInfo
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- CN115094522A CN115094522A CN202210666843.XA CN202210666843A CN115094522A CN 115094522 A CN115094522 A CN 115094522A CN 202210666843 A CN202210666843 A CN 202210666843A CN 115094522 A CN115094522 A CN 115094522A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention belongs to the field of single crystal furnace heat exchangers, and particularly relates to water cooling equipment for silicon carbide production; comprises a single crystal furnace; the top of the single crystal furnace is fixedly connected with a water inlet pipe and a water outlet pipe respectively; the inner wall of the single crystal furnace is fixedly connected with a heating bin; the inner wall of the heating bin close to the top is fixedly connected with a water cooling bin; an annular partition plate is fixedly connected in the water cooling bin; one side of the annular partition plate is provided with a first annular water channel which is communicated with the water inlet pipe; the other side of the annular partition plate is provided with a second annular water channel, and the first annular water channel is communicated with the water outlet pipe; the first annular water channel is communicated with the second annular water channel at the bottom; make cooling water can be preferred to get into first annular water course through the inlet tube to gaseous cooling around, gaseous realization is cooled down to the silicon carbide rod body around the rethread, and then promotes the growth of silicon carbide crystal, and finally forms finished product silicon carbide rod, and takes out from the single crystal growing furnace top.
Description
Technical Field
The invention belongs to the field of single crystal furnace heat exchangers, and particularly relates to water cooling equipment for silicon carbide production.
Background
At present, a vertical induction synthesis furnace is generally adopted for producing silicon carbide, and the vertical induction synthesis furnace is mainly used for heating high-purity carbon powder and high-purity silicon powder which are proportioned according to a molar ratio in a medium-frequency induction heating mode, and cooling is carried out through a stainless steel water-cooling upper furnace chamber after heating is finished, so that a silicon carbide rod is formed.
Solutions have also been proposed in the prior art, such as the one disclosed in chinese patent publication No. CN114018072A, which discloses an injection mold comprising a heat exchanger body installed in a single crystal furnace body, the heat exchanger body is made of chromium-zirconium-copper material and comprises an outer shell and an inner shell, a water inlet pipe is fixedly arranged at the bottom end of one side of the inner shell, a water outlet pipe is fixedly arranged at the top end of the other side of the inner shell, the inner shell is integrally arranged in a round table shape, a spiral heat exchange cavity is arranged between the outer shell and the inner shell, because the heat exchanger body is made of the chromium-zirconium-copper material, the chromium-zirconium-copper material has better heat conduction effect compared with 316 stainless steel commonly used on the world, and has excellent electrical conductivity, heat conductivity, high hardness, wear resistance, explosion resistance, crack resistance and high softening temperature, through the improvement of the material, not only the heat exchange efficiency is improved, but also the service life of the equipment is prolonged.
Through changing the material among the prior art, realize higher heat exchange efficiency, nevertheless at the in-process that lets in the cooling water, because the stirring of cold water flow can be with among the excessive air area heat exchanger to reduce heat exchange efficiency of heat exchanger, the cooling water can produce the incrustation scale on heat exchanger's inner wall simultaneously, causes the jam.
Therefore, the invention provides water cooling equipment for producing silicon carbide.
Disclosure of Invention
To remedy the deficiencies of the prior art, at least one of the technical problems set forth in the background is addressed.
The technical scheme adopted by the invention for solving the technical problems is as follows: the invention relates to water cooling equipment for producing silicon carbide, which comprises a single crystal furnace; the top of the single crystal furnace is fixedly connected with a water inlet pipe and a water outlet pipe respectively; the inner wall of the single crystal furnace is fixedly connected with a heating bin; the inner wall of the heating bin close to the top is fixedly connected with a water cooling bin; an annular partition plate is fixedly connected in the water cooling bin; one side of the annular partition plate is provided with a first annular water channel which is communicated with the water inlet pipe; the other side of the annular partition plate is provided with a second annular water channel, and the first annular water channel is communicated with the water outlet pipe; the first annular water channel is communicated with the second annular water channel at the bottom; when in work, in the process of forming the silicon carbide rod by the silicon carbide, the silicon carbide rod is finally formed by firstly heating the silicon carbide rod in the heating bin in a medium-frequency induction mode and then cooling the silicon carbide rod by the cooling device, when cooling operation is carried out, a user needs to firstly guide water into the first annular water channel through the water inlet pipe, then guide cooling water into the second annular water channel through the first annular water channel, and then guide the cooling water out from the water outlet pipe at the top through the second annular water channel, because the first annular water channel is positioned at the inner side of the heating bin, when the silicon carbide rod passes through the middle of the water cooling bin, cooling water can preferentially enter the first annular water channel through the water inlet pipe, and the surrounding gas outside the water cooling bin is cooled, and then the silicon carbide rod body is cooled through the surrounding gas, thereby promoting the growth of the silicon carbide crystal and finally forming a finished silicon carbide rod which is extracted from the top of the single crystal furnace.
Preferably, the top surface of the first annular water channel is fixedly connected with an annular water storage pipe; the top surface of the annular pipeline is communicated with a water inlet pipe; a plurality of water outlets are uniformly formed in the bottom surface of the annular water storage pipe; a blocking rod is connected in the water outlet in a sliding manner; one end of the blocking rod, which is far away from the water outlet, is fixedly connected with a circular pressing plate; one end of the blocking rod close to the water outlet is fixedly connected with a plug; a spring is fixedly connected between the circular pressing plate and the inner wall of the annular water storage pipe; when the water storage device works, when cooling water is not introduced into the annular water storage pipe, the spring is in a compressed state, the bottom surface of the circular pressing plate is extruded, the blocking rod and the blocking head are driven by the circular baffle plate, the blocking head is attached to the bottom surface of the water outlet, the water outlet is blocked, cooling water is introduced into the water inlet pipe at the moment, the cooling water is introduced into the annular water storage pipe through the water inlet pipe and is stored in the annular water pipe, after the annular water storage pipe is filled with water, the water pressure in the annular water storage pipe is increased, the circular pressing plate is pushed to move towards the water outlet, the spring is further compressed, the blocking rod is pushed at the same time, the blocking head is driven by the blocking rod to be far away from the water outlet, the water outlet is opened, the cooling water flows into the first annular water channel from the water outlet, and the cooling water can simultaneously and uniformly fall into the first annular water channel due to the plurality of water outlets which are uniformly arranged, the uneven temperature of the cooling water in the first annular water channel caused by the introduction of the cooling water from one side is prevented, and the uneven growth of the silicon carbide rod is prevented.
Preferably, the bottom surface of the annular water storage pipe is fixedly connected with a plurality of upright posts at the corresponding positions of the circular pressing plates; the top surface of the upright post is fixedly connected with a first magnet; the during operation, hold full water back in the annular water pipe, can extrude circular clamp plate, make circular clamp plate move towards the direction of delivery port, contact the first magnet of stand top surface when circular clamp plate, and make circular clamp plate and first magnet adsorb together, prevent because the water pressure of the cooling water of inlet tube transport is unstable, and lead to the end cap can not be stable pressed from the delivery port, and then the water yield of the cooling water that causes the delivery port is unstable, make the cooling water in the first annular water course can not in time be impressed the second annular water course, discharge by the outlet pipe again, accomplish the circulation of cooling water, cause the decline of radiating efficiency.
Preferably, the top surface of the plug is uniformly provided with a plurality of flow guide holes; a flow channel is formed in the bottom surface of the plug; the flow channel is communicated with the flow guide hole; the during operation, when cooling water was full of whole water-cooling storehouse, the export was kept away from to the end cap under hydraulic effect, and the cooling water in the annular water storage pipe passes through the delivery port simultaneously and flows to loop through water conservancy diversion hole and runner and flow, prevent that the cooling water from because the hindrance of end cap, and lead to the velocity of flow decline of cooling water, flow through water conservancy diversion hole and runner, reduce the hindrance to the cooling water, and then improve the cooling water at water-cooling storehouse circulation efficiency, thereby improve cooling efficiency.
Preferably, the annular partition plate is connected with a plurality of guide plates on the surface of the inner wall of the first annular water channel; and the guide plates are all positioned below the water outlet; the during operation, hold the water back when full in the annular retaining pipe, the inlet tube continues to the intraductal input cooling water of annular retaining, lead to the water pressure in the annular retaining pipe to rise, and then promote the end cap and open the delivery port, the cooling water flows from the delivery port, fall to the deflector surface, and cross the lateral wall of the first annular water course of deflector flow direction, prevent that the cooling water from directly dropping the bottom surface at first annular water course, cause first annular water course can sneak into a large amount of air when beginning to let in the cooling water, cause first annular water course to produce a large amount of bubbles and cavity, radiating efficiency has been reduced, and paste the inner wall landing of first annular water course with the cooling water through the deflector water conservancy diversion, bubble and cavity production quantity have been reduced, help strengthening the radiating efficiency of the water-cooling storehouse just beginning during operation.
Preferably, the guide plate is rotatably connected with the partition plate, and a torsion spring is arranged at the connection part; the inside of the guide plate is fixedly connected with a second magnet; the during operation, when first annular water course holds when full cooling water, the cooling water continues to be leading-in to first annular water course rice by the delivery port, and the pressure reinforcing of water conservancy diversion to the top drives the guide plate and rotates towards the direction of baffle to finally adsorb on the baffle surface through second magnet, thereby reduce the hindrance of cooling water formula of flowing, further promote heat exchange efficiency.
Preferably, a plurality of arc-shaped grooves are uniformly formed in the surface of the outer wall of the inner side of the water cooling bin; when the silicon carbide rod cooling device works, the arc-shaped grooves in the surface of the outer wall of the inner side of the water cooling bin increase the contact area between the water cooling bin and the gas on the inner side, so that the surrounding gas is cooled, and the cooling effect of the water cooling bin on the silicon carbide rod is improved.
Preferably, the bottom surface of the communication part of the first annular water channel and the second annular water channel is fixedly connected with a plurality of pairs of supporting columns; the side surfaces of the two support columns are rotatably connected with a large roller, a motor is arranged at the joint, and an output shaft of the motor is fixedly connected with the large roller; the surface of the large roller is uniformly and fixedly connected with brushes; the connection mode of the motor is the prior art, and redundant description is not needed in the embodiment; the during operation, hold full cooling water back in first annular water course and the second annular water course, user's startable motor to drive big cylinder through the motor and rotate, the brush on big cylinder surface can be continuous scrapes the inner wall of brushing first annular water course and second annular water course intercommunication department, prevents that the incrustation scale from gathering in first annular water course and second annular water course intercommunication department, causes the flow of cooling water to be obstructed, blocks up even, has improved the circulation efficiency of cooling water, has prolonged the life in water-cooling storehouse.
Preferably, the surface of the large roller is provided with a plurality of through holes; the inner wall of the large roller is provided with a plurality of paired supporting rods; one end of the support rod, which is far away from the inner wall of the large roller, is rotatably connected with a rotating shaft; the surface of the rotating shaft is rotatably connected with a material storage roller; a descaling agent is arranged in the storage roller, and a plurality of capillary holes are uniformly formed in the surface of the storage roller; the during operation, when the cooling water flows from first annular water course to second annular water course, inside the through-hole that the cooling water was returned through big cylinder surface entered into big cylinder, and the inside detergent of storage cylinder is appeared from the capillary this moment, spreads to the cooling water in, softens the quality of water of cooling water, prevents to have the incrustation scale adhesion on the inner wall of first annular water course and second annular water course intercommunication department to influence the flow of cooling water, further carry the life in water-cooling storehouse and reduce the cost of manpower clearance.
Preferably, the outer surface of the material storage roller is fixedly connected with a plurality of fan blades; when the large roller is driven by the motor to rotate, the fan blades are also driven to rotate, so that the descaling agent can be fully mixed in the large roller, and the effects of descaling and cooling water softening are further promoted.
The invention has the following beneficial effects:
1. according to the water cooling equipment for producing the silicon carbide, cooling water can enter the first annular water channel through the water inlet pipe preferentially, the ambient gas is cooled, the silicon carbide rod body is cooled through the ambient gas, the growth of the silicon carbide crystal is promoted, the finished silicon carbide rod is formed finally, and the silicon carbide rod is extracted from the top of the single crystal furnace.
2. According to the water cooling equipment for silicon carbide production, the blocking rod, the plug and the water outlet are matched, so that cooling water can uniformly fall into the first annular water channel at the same time, and the phenomenon that the temperature of the cooling water in the first annular water channel is not uniform due to the fact that the cooling water is led in from one side, and the silicon carbide rod grows unevenly is avoided.
Drawings
The invention will be further described with reference to the accompanying drawings.
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a cross-sectional view of the present invention;
FIG. 3 is a cross-sectional view of a water cooled silo of the present invention;
FIG. 4 is a view taken along line A of FIG. 3;
FIG. 5 is an enlarged view of a portion of FIG. 3 at B;
FIG. 6 is a schematic view showing the construction of a large drum according to the present invention;
FIG. 7 is a schematic view of the construction of the magazine roll of the present invention;
in the figure: 1. a single crystal furnace; 2. a water inlet pipe; 3. a water outlet pipe; 4. a heating chamber; 5. a water cooling bin; 6. an annular partition plate; 7. a first annular waterway; 8. a second annular waterway; 9. an annular water storage pipe; 10. a water outlet; 11. blocking the rod; 12. a circular pressing plate; 13. a plug; 14. a spring; 15. a column; 16. a first magnet; 17. a flow guide hole; 18. a flow channel; 19. a baffle; 20. a second magnet; 21. an arc-shaped groove; 22. a large drum; 23. a support pillar; 24. a brush; 25. a through hole; 26. a support bar; 27. a rotating shaft; 28. a material storage roller; 29. a scale remover; 30. capillary pores; 31. a fan blade.
Detailed Description
The present invention will be further described with reference to the following detailed description so that the technical means, the creation features, the achievement purposes and the effects of the present invention can be easily understood.
Example one
As shown in fig. 1 to 3, a water cooling apparatus for silicon carbide production according to an embodiment of the present invention includes a single crystal furnace 1; the top of the single crystal furnace 1 is fixedly connected with a water inlet pipe 2 and a water outlet pipe 3 respectively; the inner wall of the single crystal furnace 1 is fixedly connected with a heating bin 4; the inner wall of the heating bin 4 close to the top is fixedly connected with a water cooling bin 5; an annular partition plate 6 is fixedly connected in the water cooling bin 5; one side of the annular partition plate 6 is provided with a first annular water channel 7, and the first annular water channel 7 is communicated with the water inlet pipe 2; the other side of the annular partition plate 6 is provided with a second annular water channel 8, and the first annular water channel 7 is communicated with the water outlet pipe 3; the first annular water channel 7 is communicated with the second annular water channel 8 at the bottom; during operation, in the process of forming the silicon carbide rod from the silicon carbide, the silicon carbide rod is heated in the heating bin 4 in a medium-frequency induction mode and finally formed by the cooling device, when cooling operation is performed, a user needs to firstly guide water into the first annular water channel 7 through the water inlet pipe 2, then guide cooling water into the second annular water channel 8 through the first annular water channel 7 and then guide the cooling water out of the water outlet pipe 3 at the top through the second annular water channel 8, because the first annular water channel 7 is positioned on the inner side of the heating bin 4, when the silicon carbide rod passes through the water cooling bin 5, the cooling water can preferentially enter the first annular water channel 7 through the water inlet pipe 2 and cool the ambient gas outside the water cooling bin 5, and then cool the silicon carbide rod body through the ambient gas, so that the growth of the silicon carbide crystal is promoted and the finished silicon carbide rod is finally formed, and is extracted from the top of the single crystal furnace 1.
As shown in fig. 3 to 4, an annular water storage pipe 9 is fixedly connected to the top surface of the first annular water channel 7; the top surface of the annular pipeline is communicated with the water inlet pipe 2; a plurality of water outlets 10 are uniformly formed in the bottom surface of the annular water storage pipe 9; a blocking rod 11 is slidably connected in the water outlet 10; one end of the blocking rod 11, which is far away from the water outlet 10, is fixedly connected with a circular pressing plate 12; a plug 13 is fixedly connected with one end of the plug rod 11 close to the water outlet 10; a spring 14 is fixedly connected between the circular pressing plate 12 and the inner wall of the annular water storage pipe 9; when the water cooling device works, when cooling water is not introduced into the annular water storage pipe 9, the spring 14 is in a compressed state, the bottom surface of the circular pressing plate 12 is extruded, the blocking rod 11 and the blocking head 13 are driven by the circular baffle plate, the blocking head 13 is attached to the bottom surface of the water outlet 10, the water outlet 10 is blocked, cooling water is introduced into the water inlet pipe 2 at the moment, the cooling water is introduced into the annular water storage pipe 9 through the water inlet pipe 2 and is accumulated in the annular water pipe, after the annular water storage pipe 9 is filled with water, the water inlet pipe 2 continues to input the cooling water into the annular water storage pipe 9, the water pressure in the annular water storage pipe 9 is increased, the circular pressing plate 12 is pushed to move towards the water outlet 10, the spring 14 is further compressed, the blocking rod 11 is pushed at the same time, the blocking head 13 is driven by the blocking rod 11 to be far away from the water outlet 10, so that the water outlet 10 is opened, the cooling water flows into the first annular water channel 7 from the water outlet 10, and the water outlets 10 are uniformly distributed because of the plurality of the water outlets 10, however, the cooling water simultaneously and uniformly falls into the first annular water passage 7, and the temperature of the cooling water in the first annular water passage 7 is prevented from being non-uniform due to the introduction of the cooling water from one side, and the growth of the silicon carbide rod is prevented from being non-uniform.
As shown in fig. 3 to 4, a plurality of upright posts 15 are fixedly connected to the bottom surface of the annular water storage pipe 9 at positions corresponding to the circular pressing plates 12; the top surface of the upright post 15 is fixedly connected with a first magnet 16; when the circular water pipe works, after the circular water pipe is filled with water, the circular pressing plate 12 can be extruded, the circular pressing plate 12 moves towards the water outlet 10, the circular pressing plate 12 contacts the first magnet 16 on the top surface of the upright post 15, the circular pressing plate 12 and the first magnet 16 are attracted together, the problem that the plug 13 cannot be stably pressed away from the water outlet 10 due to unstable water pressure of cooling water conveyed by the water inlet pipe 2 is solved, the water outlet quantity of the cooling water of the water outlet 10 is unstable, the cooling water in the first circular water pipe 7 cannot be timely pressed into the second circular water pipe 8 and then discharged by the water outlet pipe 3, the circulation of the cooling water is completed, and the reduction of the heat dissipation efficiency is caused.
As shown in fig. 3 to 4, a plurality of flow guiding holes 17 are uniformly formed on the top surface of the plug 13; a flow channel 18 is formed in the bottom surface of the plug 13; the flow passage 18 is communicated with the diversion hole 17; the during operation, when cooling water was full of whole water-cooling storehouse 5, end cap 13 kept away from the export under hydraulic effect, the interior cooling water of annular water storage pipe 9 simultaneously flows through delivery port 10, and loop through water conservancy diversion hole 17 and runner 18 and flow, prevent that the cooling water is because end cap 13's hindrance, and lead to the velocity of flow decline of cooling water, flow through water conservancy diversion hole 17 and runner 18, reduce the hindrance to the cooling water, and then improve the cooling water at 5 circulation efficiency in water-cooling storehouse, thereby improve cooling efficiency.
As shown in fig. 3 and 5, the annular partition plate 6 is connected with a plurality of flow deflectors 19 on the inner wall surface of the first annular water channel 7; and the guide plates 19 are all positioned below the water outlet 10; in operation, after full water is stored in the annular water storage pipe 9, the water inlet pipe 2 continues to input cooling water into the annular water storage pipe 9, the water pressure in the annular water storage pipe 9 is increased, the plug 13 is further pushed to open the water outlet 10, the cooling water flows out from the water outlet 10 and falls to the surface of the guide plate 19, the side wall of the first annular water channel 7 flows through the guide plate 19, the cooling water is prevented from directly falling on the bottom surface of the first annular water channel 7, a large amount of air can be mixed in the first annular water channel 7 when the cooling water starts to be introduced, the first annular water channel 7 is caused to generate a large amount of bubbles and cavities, the heat dissipation efficiency is reduced, the cooling water is attached to the inner wall of the first annular water channel 7 through the guide plate 19 in a diversion mode, the generation amount of the bubbles and the cavities is reduced, and the heat dissipation efficiency of the water cooling bin 5 during work is facilitated to be enhanced.
As shown in fig. 3 and 5, the baffle 19 is rotatably connected with the partition board, and a torsion spring is arranged at the connection position; the inside of the guide plate 19 is fixedly connected with a second magnet 20; during operation, when first annular water course 7 holds full cooling water, the cooling water continues to be leading-in to first annular water course 7 rice by delivery port 10, and the pressure reinforcing of water conservancy diversion to the top drives guide plate 19 and rotates towards the direction of baffle to finally adsorb on the baffle surface through second magnet 20, thereby reduce the hindrance of cooling water flow formula, further promote heat exchange efficiency.
As shown in fig. 3 and 5, a plurality of arc-shaped grooves 21 are uniformly formed on the surface of the outer wall of the inner side of the water cooling bin 5; during operation, the arc-shaped groove 21 on the surface of the outer wall of the inner side of the water cooling bin 5 increases the contact area between the water cooling bin 5 and the gas on the inner side, so that the surrounding gas is cooled, and the cooling effect of the water cooling bin 5 on the silicon carbide rod is improved.
Example two
As shown in fig. 6 to 7, a first comparative example, in which another embodiment of the present invention is: the bottom surface of the communication part of the first annular water channel 7 and the second annular water channel 8 is fixedly connected with a plurality of pairs of supporting columns 23; the large rollers 22 are rotatably connected to the side surfaces of the two support columns 23, a motor is arranged at the connection position, and the output shaft of the motor is fixedly connected with the large rollers 22; the surface of the big roller 22 is evenly and fixedly connected with brushes 24; the connection mode of the motor is the prior art, and redundant description is not needed in the embodiment; the during operation, after storing up the cooling water in first annular water course 7 and second annular water course 8, user startable motor, and drive big cylinder 22 through the motor and rotate, the brush 24 on big cylinder 22 surface can be continuous scrapes the inner wall of brushing first annular water course 7 and 8 intercommunication departments of second annular water course, prevent that the incrustation scale from gathering in first annular water course 7 and 8 intercommunication departments of second annular water course, cause the flow of cooling water to be obstructed, block up even, the circulation efficiency of cooling water has been improved, the life in water-cooling storehouse 5 has been prolonged.
As shown in fig. 6 to 7, a plurality of through holes 25 are formed on the surface of the large drum 22; a plurality of paired supporting rods 26 are arranged on the inner wall of the large roller 22; one end of the support rod 26 far away from the inner wall of the large roller 22 is rotatably connected with a rotating shaft 27; the surface of the rotating shaft 27 is rotatably connected with a material storage roller 28; a scale remover 29 is arranged in the storage roller 28, and a plurality of capillary holes 30 are uniformly formed in the surface of the storage roller 28; during operation, when cooling water flows from the first annular water channel 7 to the second annular water channel 8, the cooling water flows back to the interior of the large roller 22 through the through hole 25 on the surface of the large roller 22, at the moment, the descaling agent 29 in the storage roller 28 is separated out from the capillary hole 30 and is diffused into the cooling water, the water quality of the cooling water is softened, and scale adhesion on the inner wall of the communication position of the first annular water channel 7 and the second annular water channel 8 is prevented, so that the flowing of the cooling water is influenced, the service life of the water cooling bin 5 is further prolonged, and the cost of manual cleaning is reduced.
As shown in fig. 6 to 7, a plurality of fan blades 31 are attached to the outer surface of the magazine roll 28; when the large roller 22 is driven by the motor to rotate, the fan blades 31 are driven to rotate, so that the descaling agent 29 can be fully mixed in the large roller 22, and the effects of descaling and softening cooling water are further promoted.
During operation, in the process of forming the silicon carbide rod from the silicon carbide, the silicon carbide rod is heated in the heating bin 4 in a medium-frequency induction mode and finally formed by the cooling device, when cooling operation is performed, a user needs to firstly guide water into the first annular water channel 7 through the water inlet pipe 2, then guide cooling water into the second annular water channel 8 through the first annular water channel 7 and then guide the cooling water out of the water outlet pipe 3 at the top through the second annular water channel 8, because the first annular water channel 7 is positioned on the inner side of the heating bin 4, when the silicon carbide rod passes through the water cooling bin 5, the cooling water can preferentially enter the first annular water channel 7 through the water inlet pipe 2 and cool the ambient gas outside the water cooling bin 5, and then cool the silicon carbide rod body through the ambient gas, so that the growth of the silicon carbide crystal is promoted and the finished silicon carbide rod is finally formed, and is extracted from the top of the single crystal furnace 1.
When no cooling water is introduced into the annular water storage pipe 9, the spring 14 is in a compressed state, the bottom surface of the circular pressing plate 12 is extruded, the blocking rod 11 and the blocking head 13 are driven by the circular baffle plate, the blocking head 13 is attached to the bottom surface of the water outlet 10, the water outlet 10 is blocked, cooling water is introduced into the water inlet pipe 2 at the moment, the cooling water is introduced into the annular water storage pipe 9 through the water inlet pipe 2 and is accumulated in the annular water pipe, after the annular water storage pipe 9 is filled with water, the water inlet pipe 2 continues to input the cooling water into the annular water storage pipe 9, the water pressure in the annular water storage pipe 9 is increased, the circular pressing plate 12 is pushed to move towards the water outlet 10, the spring 14 is further compressed, the blocking rod 11 is pushed at the same time, the blocking head 13 is driven by the blocking rod 11 to be far away from the water outlet 10, so that the water outlet 10 is opened, the cooling water flows into the first annular water channel 7 from the water outlet 10, and due to the plurality of water outlets 10 which are uniformly arranged, however, the cooling water simultaneously and uniformly falls into the first annular water passage 7, and the temperature of the cooling water in the first annular water passage 7 is prevented from being non-uniform due to the introduction of the cooling water from one side, and the growth of the silicon carbide rod is prevented from being non-uniform.
After the annular water pipe is filled with water, the circular pressing plate 12 can be extruded, the circular pressing plate 12 moves towards the water outlet 10, the circular pressing plate 12 contacts with the first magnet 16 on the top surface of the upright post 15, and the circular pressing plate 12 and the first magnet 16 are adsorbed together, so that the problem that the plug 13 cannot be stably pressed away from the water outlet 10 due to unstable water pressure of cooling water conveyed by the water inlet pipe 2 is solved, the water outlet quantity of the cooling water of the water outlet 10 is unstable, the cooling water in the first annular water channel 7 cannot be timely pressed into the second annular water channel 8, the cooling water is discharged through the water outlet pipe 3, the circulation of the cooling water is completed, and the reduction of the heat dissipation efficiency is caused.
When the cooling water is full of the whole water cooling bin 5, the plug 13 is far away from the outlet under the action of water pressure, meanwhile, the cooling water in the annular water storage pipe 9 flows out through the water outlet 10 and sequentially flows out through the flow guide holes 17 and the flow channel 18, the cooling water is prevented from being blocked by the plug 13, the flow speed of the cooling water is reduced, the cooling water flows out through the flow guide holes 17 and the flow channel 18, the blocking of the cooling water is reduced, the circulation efficiency of the cooling water in the water cooling bin 5 is further improved, and the cooling efficiency is further improved.
After the annular water storage pipe 9 is filled with water, the water inlet pipe 2 continues to input cooling water into the annular water storage pipe 9, so that the water pressure in the annular water storage pipe 9 rises, the water outlet 10 is further pushed to be opened by the plug 13, the cooling water flows out from the water outlet 10 and falls to the surface of the guide plate 19, the side wall of the guide plate 19 flowing to the first annular water channel 7 is crossed, the cooling water is prevented from directly falling on the bottom surface of the first annular water channel 7, a large amount of air can be mixed in the first annular water channel 7 when the cooling water starts to be introduced, the first annular water channel 7 generates a large amount of bubbles and cavities, the heat dissipation efficiency is reduced, the cooling water is attached to the inner wall of the first annular water channel 7 through the guide plate 19 in a flow guiding mode, the generation amount of the bubbles and the cavities is reduced, and the heat dissipation efficiency of the water cooling bin 5 during the work is facilitated to be enhanced.
When first annular water course 7 holds full cooling water, the cooling water continues to be leading-in to first annular water course 7 rice by delivery port 10, and the pressure reinforcing of water conservancy diversion to the top drives guide plate 19 and rotates towards the direction of baffle to adsorb on the baffle surface through second magnet 20 finally, thereby reduce the hindrance of cooling water mobile formula, further promote heat exchange efficiency.
The arc-shaped groove 21 on the surface of the outer wall of the inner side of the water cooling bin 5 increases the contact area between the water cooling bin 5 and the gas on the inner side, so that the surrounding gas is cooled, and the cooling effect of the water cooling bin 5 on the silicon carbide rod is improved.
After the cooling water is fully stored in the first annular water channel 7 and the second annular water channel 8, the motor can be started by a user, the large roller 22 is driven to rotate through the motor, the brush 24 on the surface of the large roller 22 can continuously scrape the inner wall of the communication position of the first annular water channel 7 and the second annular water channel 8, the scale is prevented from accumulating at the communication position of the first annular water channel 7 and the second annular water channel 8, the flowing of the cooling water is blocked or even blocked, the circulation efficiency of the cooling water is improved, and the service life of the water cooling bin 5 is prolonged.
When the cooling water flows from the first annular water channel 7 to the second annular water channel 8, the cooling water flows back to the large roller 22 through the through holes 25 on the surface of the large roller 22, at the moment, the descaling agent 29 in the storage roller 28 is separated out from the capillary holes 30 and is diffused into the cooling water, the water quality of the cooling water is softened, the adhesion of scale on the inner wall of the communication part of the first annular water channel 7 and the second annular water channel 8 is prevented, the flowing of the cooling water is influenced, the service life of the water cooling bin 5 is further prolonged, and the cost of manual cleaning is reduced.
When the motor drives the large roller 22 to rotate, the fan blades 31 are also driven to rotate, so that the descaling agent 29 can be fully mixed in the large roller 22, and the effects of descaling and softening cooling water are further promoted.
The front, the back, the left, the right, the upper and the lower are all based on figure 1 in the attached drawings of the specification, according to the standard of the observation angle of a person, the side of the device facing an observer is defined as the front, the left side of the observer is defined as the left, and so on.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings, which are merely for convenience in describing the present invention and to simplify the description, and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the scope of the present invention.
The foregoing shows and describes the general principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are merely illustrative of the principles of the present invention, but that various changes and modifications may be made without departing from the spirit and scope of the invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. A water cooling equipment for carborundum production which characterized in that: comprises a single crystal furnace (1); the top of the single crystal furnace (1) is fixedly connected with a water inlet pipe (2) and a water outlet pipe (3) respectively; the inner wall of the single crystal furnace (1) is fixedly connected with a heating bin (4); the inner wall of the heating bin (4) close to the top is fixedly connected with a water cooling bin (5); an annular partition plate (6) is fixedly connected in the water cooling bin (5); one side of the annular partition plate (6) is provided with a first annular water channel (7), and the first annular water channel (7) is communicated with the water inlet pipe (2); the other side of the annular partition plate (6) is provided with a second annular water channel (8), and the first annular water channel (7) is communicated with the water outlet pipe (3); the first annular water channel (7) is communicated with the second annular water channel (8) at the bottom.
2. The water cooling apparatus for silicon carbide production as recited in claim 1, wherein: the top surface of the first annular water channel (7) is fixedly connected with an annular water storage pipe (9); the top surface of the annular pipeline is communicated with the water inlet pipe (2); a plurality of water outlets (10) are uniformly formed in the bottom surface of the annular water storage pipe (9); a blocking rod (11) is connected in the water outlet (10) in a sliding manner; one end of the blocking rod (11) far away from the water outlet (10) is fixedly connected with a circular pressing plate (12); one end of the blocking rod (11) close to the water outlet (10) is fixedly connected with a plug (13); and a spring (14) is fixedly connected between the circular pressing plate (12) and the inner wall of the annular water storage pipe (9).
3. The water cooling apparatus for silicon carbide production as claimed in claim 2, wherein: the bottom surface of the annular water storage pipe (9) is fixedly connected with a plurality of upright posts (15) at the corresponding positions of the circular pressing plate (12); the top surface of the upright post (15) is fixedly connected with a first magnet (16).
4. The water cooling apparatus for silicon carbide production as claimed in claim 3, wherein: a plurality of flow guide holes (17) are uniformly formed in the top surface of the plug (13); a flow channel (18) is formed in the bottom surface of the plug (13); the flow passage (18) is communicated with the diversion hole (17).
5. The water cooling apparatus for silicon carbide production as claimed in claim 4, wherein: the annular partition plate (6) is connected with a plurality of guide plates (19) on the inner wall surface of the first annular water channel (7); and the guide plates (19) are all positioned below the water outlet (10).
6. The water cooling apparatus for silicon carbide production as recited in claim 5, wherein: the guide plate (19) is rotatably connected with the partition plate, and a torsional spring is arranged at the connection part; and a second magnet (20) is fixedly connected inside the guide plate (19).
7. The water cooling apparatus for silicon carbide production according to claim 1, wherein: a plurality of arc-shaped grooves (21) are uniformly formed in the surface of the inner side outer wall of the water cooling bin (5).
8. The water cooling apparatus for silicon carbide production as recited in claim 1, wherein: the bottom surface of the communication part of the first annular water channel (7) and the second annular water channel (8) is fixedly connected with a plurality of pairs of supporting columns (23); the side surfaces of the two support columns (23) are rotatably connected with a large roller (22), a motor is arranged at the joint, and the output shaft of the motor is fixedly connected with the large roller (22); the surface of the big roller (22) is evenly and fixedly connected with brushes (24).
9. The water cooling apparatus for silicon carbide production according to claim 8, wherein: a plurality of through holes (25) are formed in the surface of the large roller (22); a plurality of paired supporting rods (26) are arranged on the inner wall of the large roller (22); one end of the support rod (26) far away from the inner wall of the large roller (22) is rotatably connected with a rotating shaft (27); the surface of the rotating shaft (27) is rotationally connected with a material storage roller (28); the descaling agent (29) is arranged in the storage roller (28), and a plurality of capillary holes (30) are uniformly formed in the surface of the storage roller (28).
10. The water cooling apparatus for silicon carbide production as recited in claim 9, wherein: the outer surface of the material storage roller (28) is fixedly connected with a plurality of fan blades (31).
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CN202210666843.XA CN115094522A (en) | 2022-06-13 | 2022-06-13 | Water cooling equipment for silicon carbide production |
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CN202210666843.XA CN115094522A (en) | 2022-06-13 | 2022-06-13 | Water cooling equipment for silicon carbide production |
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CN117779189A (en) * | 2023-11-23 | 2024-03-29 | 连城凯克斯科技有限公司 | Single crystal furnace circulating water cooling device |
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