CN107012501A - A kind of monocrystalline silicon growing furnace water cooling covering device - Google Patents
A kind of monocrystalline silicon growing furnace water cooling covering device Download PDFInfo
- Publication number
- CN107012501A CN107012501A CN201710197664.5A CN201710197664A CN107012501A CN 107012501 A CN107012501 A CN 107012501A CN 201710197664 A CN201710197664 A CN 201710197664A CN 107012501 A CN107012501 A CN 107012501A
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- water
- cooling
- cooled cylinder
- monocrystalline silicon
- flange
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention provides a kind of monocrystalline silicon growing furnace water cooling covering device, including water-cooling flange, two water inlet pipes, two outlet pipes and water-cooled cylinder；Water-cooled cylinder includes inner cylinder, outer barrel and the second water-stop sheet being arranged between inner cylinder and outer barrel；Two independent water-cooled cylinder chilled(cooling) water return (CWR)s of the supporting composition of wooden partition of the inner tank theca, outer tube inner wall and the second water-stop sheet, each independent water-cooled cylinder chilled(cooling) water return (CWR) includes a vertical straight line loop and a S-shaped loop；Straight line loop top sets water-cooled cylinder water inlet, bottom connection S-shaped loop bottom；S-shaped loop top sets water-cooled cylinder delivery port；Pulling rate can be effectively improved, the boule growth time is reduced；Install additional after water cooling covering device, the isodiametric growth average pull rate of 8.5 cun of monocrystal rods brings up to 1.2 1.3mm/min, can obtain in high yield, high-quality, the lower crystal ingot of cost.
Description
Technical field
The present invention relates to monocrystalline silicon growing equipment, and in particular to a kind of water cooling covering device applied to monocrystalline silicon growing furnace.
Background technology
Existing main flow monocrystalline silicon growing furnace is not furnished with water collar device, the isodiametric growth average pull rate of current 8.5 cun of crystal bars
For 0.8~0.9mm/min, long crystalline substance speed is relatively low, it is difficult to obtain in high yield, high-quality, inexpensive crystal ingot.
The content of the invention
The problem of existing for prior art, the present invention provides a kind of monocrystalline silicon growing furnace water cooling covering device, can be effective
Pulling rate is improved, the boule growth time is reduced；Install additional after water cooling covering device, the isodiametric growth average pull rate of 8.5 cun of monocrystal rods
Bring up to 1.2-1.3mm/min, can obtain in high yield, high-quality, the lower crystal ingot of cost.
The technical scheme is that：A kind of monocrystalline silicon growing furnace water cooling covering device, including water-cooling flange, two water inlets
Pipe, two outlet pipes and water-cooled cylinder；
Separate annular water-cooling groove and annular argon gas groove is provided with the flange disk of the water-cooling flange；
An argon gas import through flange disk is offered on the argon gas groove and passes through flange disk and energy with several
Enough argon gas exports to outlet below flange disk；
The water-cooling groove side is offered to be packed on a water collar water inlet for passing through flange disk, water-cooling groove with water cooling
The relative opposite side in the mouth of a river offers a water collar delivery port for passing through flange disk；The water collar delivery port both sides are set
There is Inlet and outlet water dividing plate that water-cooling groove is divided into the inhalant region with water collar water inlet and the exhalant region with water collar delivery port, institute
State to offer in inhalant region and two water-cooling flange water inlets are offered in two water-cooling flange delivery ports, the exhalant region；
The water-cooled cylinder includes inner cylinder, outer barrel and the second water-stop sheet being arranged between inner cylinder and outer barrel；Outside the inner cylinder
Two independent water-cooled cylinder chilled(cooling) water return (CWR)s of the supporting composition of wooden partition of wall, outer tube inner wall and the second water-stop sheet, each independent water
Cold cylinder chilled(cooling) water return (CWR) includes a vertical straight line loop and a S-shaped loop；Straight line loop top sets water-cooled cylinder
Water inlet, bottom connection S-shaped loop bottom；S-shaped loop top sets water-cooled cylinder delivery port；
Described water inlet pipe one end connects water-cooling flange delivery port, one end connection water-cooled cylinder water inlet；
Described outlet pipe one end connects water-cooling flange water inlet, one end connection water-cooled cylinder delivery port.
Further, it is provided with the first water-stop sheet in the inhalant region of the water-cooling groove；First water-stop sheet is and water cooling
The concentric loop configuration of groove, is arranged in inhalant region radial direction on separated time, and water inlet is divided into interior inhalant region and outer inhalant region, and
One water-stop sheet two ends are not contacted with Inlet and outlet water dividing plate distance；
The 3rd dividing plate is additionally provided with the water-cooling groove, interior inhalant region is divided into the two of circumferential equalization by the 3rd dividing plate
Part, two water-cooling flange delivery ports are arranged at the 3rd dividing plate both sides；Water collar water inlet is located at corresponding with the 3rd dividing plate outer
In the middle part of inhalant region.
Further, the water cooling covering device is installed between isolating valve and bell；The water collar water inlet conduit connects
It is connected on monocrystalline silicon growing furnace main water inlet tube, connecting pipe and is provided with the first ball valve；The water collar delivery port pipeline is connected to
Flow sensor, temperature sensor and the second ball valve are provided with monocrystalline silicon growing furnace primary flow pipe, connecting pipe；The argon gas
Inlet pipeline is connected on monocrystalline silicon growing furnace argon gas unit, connecting pipe and is provided with flowmeter and magnetic valve.
Further, the argon gas export is circular hole, bigger apart from the more remote diameter of argon gas import.Because apart from more remote, gas
Body pressure is smaller, increases diameter, ensure that all argon gas export outlets are uniform, improves the efficiency of cleaning water collar outer wall.
Further, it is provided with reinforcing round steel between the water-cooling flange and water-cooled cylinder.Ensure water-cooling flange and water-cooled cylinder
Between support connection it is reliable, and reduce the pressure that water inlet pipe and outlet pipe are born, the service life of extension fixture.
Further, the water-cooled cylinder bottom is provided with several observation breach.CCD on monocrystalline silicon growing furnace can be facilitated
With the observation of single eyeglass.
The beneficial effects of the invention are as follows：
1st, install water cooling covering device additional on monocrystalline silicon growing furnace, effectively improve pulling rate, reduce the boule growth time.Plus
Fill after water cooling covering device, the isodiametric growth average pull rate of 8.5 cun of monocrystal rods brings up to 1.2-1.3mm/min, can obtain high receipts
Rate, high-quality, the lower crystal ingot of cost.
2nd, equipped with flow sensor and temperature sensor, the flow and temperature of cooling water can be monitored in real time, it is to avoid occur thing
Therefore, it is safe.
3rd, it can be transformed on existing single crystal growing furnace and install water cooling covering device additional, improvement cost is relatively low, effectively lifts existing single crystal growing furnace
Performance and production cost, will connect between water cooling covering device and the main water inlet tube and primary flow pipe of monocrystalline silicon growing furnace, eliminate
Single inlet and outlet pipe lines, reduce parts, cost-effective.
4th, water collar water inlet and water-cooling flange delivery port are separated with the 3rd dividing plate using the first water-stop sheet so that from water
The cooling water that cold set water inlet is come in is needed after a S-shaped, from the outflow of water-cooling flange delivery port, so as to improve water-cooling flange
Water cooling effect.
5th, using two independent water-cooled cylinder chilled(cooling) water return (CWR)s, each independent water-cooled cylinder chilled(cooling) water return (CWR) includes one and erected
Straight straight line loop and a S-shaped loop, straight line loop will be sent to water-cooled cylinder bottom between cooling water, then will be cold through S-shaped loop
But water is sent to top from bottom, and cooling effectiveness is high.Simultaneously using two independent water-cooled cylinder chilled(cooling) water return (CWR)s, preferably improve
Cooling effectiveness.
Brief description of the drawings
Fig. 1 is the connection block diagram of the system；
Fig. 2 is the structural representation of the system；
Fig. 3 is the sectional view of vertical direction；
Fig. 4 is the sectional view with water-cooling groove；
Fig. 5 is the sectional view with argon gas groove；
Fig. 6 is schematic perspective view；
Fig. 7 is schematic perspective view.
In figure：1 is water-cooling flange, and 2 be water-cooled cylinder, and 3 be water inlet pipe, and 4 be outlet pipe, and 5 is reinforce round steel, 6 be first every
Water plate, 7 be the second water-stop sheet, and 8 be annular water-cooling groove, and 9 be annular argon gas groove, and 10 be argon gas export, and 11 be argon gas import,
12 be water collar water inlet, and 13 be water-cooling flange delivery port, and 14 be water-cooling flange water inlet, and 15 be water collar delivery port, and 16 are
Breach is observed, 17 be Inlet and outlet water dividing plate, and 18 be the 3rd dividing plate, and 31 be the first ball valve, and 32 be water cooling covering device, and 33 be flow sensing
Device, 34 be temperature sensor, and 35 be flowmeter, and 36 be the second ball valve, and 37 be magnetic valve.
Embodiment
The present invention is described further below in conjunction with the accompanying drawings.
As illustrated in figs. 2-7, a kind of monocrystalline silicon growing furnace water cooling covering device, including water-cooling flange 1, two water inlet pipes 3, two
Outlet pipe 4 and water-cooled cylinder 2；Separate annular water-cooling groove 8 and annular is provided with the flange disk of the water-cooling flange 1
Argon gas groove 9；Offered on the argon gas groove 9 one through the argon gas import 11 of flange disk and several through flange disk and
Can to outlet below flange disk argon gas export 10；The side of water-cooling groove 8 offers the water for passing through flange disk
The opposite side relative with water collar water inlet 12 offers the water for passing through flange disk on cold set water inlet 12, water-cooling groove 8
Cold set delivery port 15；It is with water collar that the both sides of water collar delivery port 15, which are provided with Inlet and outlet water dividing plate 17 by 8 points of water-cooling groove,
Two water-cooling flanges are offered in the inhalant region of water inlet 12 and the exhalant region with water collar delivery port 15, the inhalant region to go out
Two water-cooling flange water inlets 14 are offered in the mouth of a river 13, the exhalant region；The water-cooled cylinder 2 includes inner cylinder, outer barrel and setting
The second water-stop sheet 7 between inner cylinder and outer barrel；The wooden partition of the inner tank theca, outer tube inner wall and the second water-stop sheet 7 matches somebody with somebody set group
Into two independent water-cooled cylinder chilled(cooling) water return (CWR)s, each independent water-cooled cylinder chilled(cooling) water return (CWR) includes a vertical straight line loop
With a S-shaped loop；Straight line loop top sets water-cooled cylinder water inlet, bottom connection S-shaped loop bottom；The S-shaped is returned
Road top sets water-cooled cylinder delivery port；The one end of water inlet pipe 3 connection water-cooling flange delivery port 13, one end connection water-cooled cylinder water inlet
Mouthful；The one end of outlet pipe 4 connection water-cooling flange water inlet 14, one end connection water-cooled cylinder delivery port.The bottom of water-cooled cylinder 2 is set
It is equipped with 3 observation breach 16.The observation of CCD and single eyeglass on monocrystalline silicon growing furnace can be facilitated.
The present apparatus includes one using two independent water-cooled cylinder chilled(cooling) water return (CWR)s, each independent water-cooled cylinder chilled(cooling) water return (CWR)
The vertical straight line loop of bar and a S-shaped loop, straight line loop will be sent to water-cooled cylinder bottom between cooling water, then through S-shaped loop
Cooling water is sent to top from bottom, cooling effectiveness is high.Simultaneously using two independent water-cooled cylinder chilled(cooling) water return (CWR)s, preferably
Improve cooling effectiveness.Install water cooling covering device additional on monocrystalline silicon growing furnace, effectively improve pulling rate, when reducing boule growth
Between.Install additional after water cooling covering device, the isodiametric growth average pull rate of 8.5 cun of monocrystal rods brings up to 1.2-1.3mm/min, can obtain
In high yield, high-quality, the lower crystal ingot of cost.
As preferred embodiment, the first water-stop sheet 6 is provided with the inhalant region of the water-cooling groove 8；Described first every
Water plate 6 is the loop configuration concentric with water-cooling groove 8, is arranged in inhalant region radial direction on separated time, water inlet is divided into interior inhalant region
With outer inhalant region, and the two ends of the first water-stop sheet 6 and Inlet and outlet water dividing plate 17 be not apart from contacting；Is additionally provided with the water-cooling groove 8
Interior inhalant region is divided into two parts of circumferential equalization, two water-cooling flange delivery ports 13 by three dividing plates 18, the 3rd dividing plate 18
It is arranged at the both sides of the 3rd dividing plate 18；Water collar water inlet 12 is located at and the corresponding outer inhalant region middle part of the 3rd dividing plate 18.Utilize
One water-stop sheet separates water collar water inlet and water-cooling flange delivery port with the 3rd dividing plate so that come in from water collar water inlet
Cooling water is needed after a S-shaped, from the outflow of water-cooling flange delivery port, so as to improve the water cooling effect of water-cooling flange.
As shown in figure 1, the water cooling covering device 32 is installed between isolating valve and bell；The water collar water inlet 12 is managed
Road, which is connected on monocrystalline silicon growing furnace main water inlet tube, connecting pipe, is provided with the first ball valve 31；The water collar delivery port 15 is managed
Road, which is connected on monocrystalline silicon growing furnace primary flow pipe, connecting pipe, is provided with flow sensor 33, temperature sensor 34 and second
Ball valve 36；The pipeline of argon gas import 11 is connected on monocrystalline silicon growing furnace argon gas unit, connecting pipe and is provided with flowmeter 35
With magnetic valve 37.Equipped with flow sensor and temperature sensor, the flow and temperature of cooling water can be monitored in real time, it is to avoid occur thing
Therefore, it is safe；It can be transformed on existing single crystal growing furnace and install water cooling covering device additional, improvement cost is relatively low, effectively lifts existing monocrystalline
Stove performance and production cost.It will connect, save between water cooling covering device and the main water inlet tube and primary flow pipe of monocrystalline silicon growing furnace
Single inlet and outlet pipe lines, reduce parts, cost-effective.
As preferred embodiment, the argon gas export 10 is circular hole, bigger apart from the more remote diameter of argon gas import 11.Cause
More remote for distance, gas pressure is smaller, increases diameter, ensure that all argon gas export outlets are uniform, improves cleaning water cooling
Cover the efficiency of outer wall.
Round steel 5 are reinforced as preferred embodiment, being provided with 2 between the water-cooling flange 1 and water-cooled cylinder 2.Ensure
Support connection is reliable between water-cooling flange and water-cooled cylinder, and reduce the pressure that water inlet pipe and outlet pipe are born, and extension fixture makes
Use the life-span.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (6)
1. a kind of monocrystalline silicon growing furnace water cooling covering device, it is characterised in that：Including water-cooling flange (1), two water inlet pipes (3), two
Individual outlet pipe (4) and water-cooled cylinder (2)；
Separate annular water-cooling groove (8) and annular argon gas groove is provided with the flange disk of the water-cooling flange (1)
(9)；
Offered on the argon gas groove (9) one through flange disk argon gas import (11) and several pass through flange disk and
Can to outlet below flange disk argon gas export (10)；
Water-cooling groove (8) side is offered on a water collar water inlet (12) for passing through flange disk, water-cooling groove (8) and water
The relative opposite side of cold set water inlet (12) offers a water collar delivery port (15) for passing through flange disk；The water collar
Delivery port (15) both sides are provided with Inlet and outlet water dividing plate (17) and water-cooling groove (8) are divided into the inhalant region with water collar water inlet (12)
With the exhalant region with water collar delivery port (15), two water-cooling flange delivery ports (13) are offered in the inhalant region, it is described
Two water-cooling flange water inlets (14) are offered in exhalant region；
The water-cooled cylinder (2) includes inner cylinder, outer barrel and the second water-stop sheet (7) being arranged between inner cylinder and outer barrel；The inner cylinder
Two independent water-cooled cylinder chilled(cooling) water return (CWR)s of the supporting composition of wooden partition of outer wall, outer tube inner wall and the second water-stop sheet (7), it is each independent
Water-cooled cylinder chilled(cooling) water return (CWR) include a vertical straight line loop and a S-shaped loop；Straight line loop top sets water
Cold cylinder water inlet, bottom connection S-shaped loop bottom；S-shaped loop top sets water-cooled cylinder delivery port；
Water inlet pipe (3) one end connection water-cooling flange delivery port (13), one end connection water-cooled cylinder water inlet；
Outlet pipe (4) one end connection water-cooling flange water inlet (14), one end connection water-cooled cylinder delivery port.
2. a kind of monocrystalline silicon growing furnace water cooling covering device according to claim 1, it is characterised in that：The water-cooling groove (8)
Inhalant region in be provided with the first water-stop sheet (6)；First water-stop sheet (6) is the loop configuration concentric with water-cooling groove (8), if
It is placed in inhalant region radial direction on separated time, interior inhalant region and outer inhalant region is divided into water inlet, and the first water-stop sheet (6) two ends are with entering
Water outlet dividing plate (17) distance is not contacted；
The 3rd dividing plate (18) is additionally provided with the water-cooling groove (8), interior inhalant region is divided into circumference by the 3rd dividing plate (18)
Impartial two parts, two water-cooling flange delivery ports (13) are arranged at the 3rd dividing plate (18) both sides；Water collar water inlet (12) position
In the middle part of outer inhalant region corresponding with the 3rd dividing plate (18).
3. a kind of monocrystalline silicon growing furnace water cooling covering device according to claim 1, it is characterised in that：The water cooling covering device
(32) it is installed between isolating valve and bell；Water collar water inlet (12) pipeline is connected to the main water inlet of monocrystalline silicon growing furnace
The first ball valve (31) is provided with pipe, connecting pipe；Water collar delivery port (15) pipeline is connected to monocrystalline silicon growing furnace master
Flow sensor (33), temperature sensor (34) and the second ball valve (36) are provided with outlet pipe, connecting pipe；The argon gas enters
Mouth (11) pipeline, which is connected on monocrystalline silicon growing furnace argon gas unit, connecting pipe, is provided with flowmeter (35) and magnetic valve (37).
4. a kind of monocrystalline silicon growing furnace water cooling covering device according to claim 1, it is characterised in that：The argon gas export
(10) it is circular hole, apart from argon gas import (11), more remote diameter is bigger.
5. a kind of monocrystalline silicon growing furnace water cooling covering device according to claim 1, it is characterised in that：The water-cooling flange
(1) reinforcing round steel (5) is provided between water-cooled cylinder (2).
6. a kind of monocrystalline silicon growing furnace water cooling covering device according to claim 1, it is characterised in that：The water-cooled cylinder (2)
Bottom is provided with several observation breach (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710197664.5A CN107012501B (en) | 2017-03-29 | 2017-03-29 | A kind of monocrystalline silicon growing furnace water cooling covering device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710197664.5A CN107012501B (en) | 2017-03-29 | 2017-03-29 | A kind of monocrystalline silicon growing furnace water cooling covering device |
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| Publication Number | Publication Date |
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| CN107012501A true CN107012501A (en) | 2017-08-04 |
| CN107012501B CN107012501B (en) | 2019-05-17 |
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| CN201710197664.5A Active CN107012501B (en) | 2017-03-29 | 2017-03-29 | A kind of monocrystalline silicon growing furnace water cooling covering device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108626424A (en) * | 2018-06-25 | 2018-10-09 | 上海汉虹精密机械有限公司 | The sealed special-shaped valve of semiconductor monocrystal furnace gas capsule |
| CN109943882A (en) * | 2019-03-28 | 2019-06-28 | 浙江晶鸿精密机械制造有限公司 | One kind being applied to single crystal growing furnace integral type water cooling nested structure |
| CN110923804A (en) * | 2019-11-13 | 2020-03-27 | 苏州三原流体科技有限公司 | A lantern ring formula water-cooled tube for monocrystalline silicon growth furnace |
| CN113774482A (en) * | 2021-09-16 | 2021-12-10 | 青海高景太阳能科技有限公司 | Water cooling system for drawing large-size single crystal |
| US20220136129A1 (en) * | 2020-11-04 | 2022-05-05 | Globalwafers Co., Ltd. | Crystal pulling systems having fluid-filled exhaust tubes that extend through the housing |
| CN114963656A (en) * | 2022-06-28 | 2022-08-30 | 四川晶科能源有限公司 | Water cooling device |
| CN115094522A (en) * | 2022-06-13 | 2022-09-23 | 连城凯克斯科技有限公司 | Water cooling equipment for silicon carbide production |
| CN115637487A (en) * | 2022-10-19 | 2023-01-24 | 浙江晶盛机电股份有限公司 | Crystal growth furnace and temperature control method |
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| CN110461053A (en) * | 2019-08-16 | 2019-11-15 | 重庆市赛特刚玉有限公司 | Dumping furnace smelts Brown Alundum self-baking electrode cooling system |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108626424A (en) * | 2018-06-25 | 2018-10-09 | 上海汉虹精密机械有限公司 | The sealed special-shaped valve of semiconductor monocrystal furnace gas capsule |
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| CN109943882A (en) * | 2019-03-28 | 2019-06-28 | 浙江晶鸿精密机械制造有限公司 | One kind being applied to single crystal growing furnace integral type water cooling nested structure |
| CN110923804A (en) * | 2019-11-13 | 2020-03-27 | 苏州三原流体科技有限公司 | A lantern ring formula water-cooled tube for monocrystalline silicon growth furnace |
| US20220136129A1 (en) * | 2020-11-04 | 2022-05-05 | Globalwafers Co., Ltd. | Crystal pulling systems having fluid-filled exhaust tubes that extend through the housing |
| US11976379B2 (en) * | 2020-11-04 | 2024-05-07 | Globalwafers Co., Ltd. | Crystal pulling systems having fluid-filled exhaust tubes that extend through the housing |
| CN113774482A (en) * | 2021-09-16 | 2021-12-10 | 青海高景太阳能科技有限公司 | Water cooling system for drawing large-size single crystal |
| CN115094522A (en) * | 2022-06-13 | 2022-09-23 | 连城凯克斯科技有限公司 | Water cooling equipment for silicon carbide production |
| CN114963656A (en) * | 2022-06-28 | 2022-08-30 | 四川晶科能源有限公司 | Water cooling device |
| CN114963656B (en) * | 2022-06-28 | 2024-01-26 | 四川晶科能源有限公司 | Water cooling device |
| CN115637487A (en) * | 2022-10-19 | 2023-01-24 | 浙江晶盛机电股份有限公司 | Crystal growth furnace and temperature control method |
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