CN115079401A - Multi-axis driven micro reflector - Google Patents
Multi-axis driven micro reflector Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
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- H—ELECTRICITY
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- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
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- H—ELECTRICITY
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- H—ELECTRICITY
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Abstract
The invention discloses a multi-axis driven micro reflector, which mainly comprises a directional magnetic field and a reflector kit, wherein the reflector kit comprises: the reflecting mirror surface is arranged on the upper side surface of the movable substrate, and a coil device is arranged between the back surface of the movable substrate and the fixed substrate; the fixed base plate is positioned below the movable base plate and is connected with the movable base plate through a positioning device or a fixed outer frame; the reversing substrate is arranged in the fixed substrate or on the lower side of the fixed substrate, and a current reversing circuit is arranged in the reversing substrate and used for electrically connecting a coil group of the coil device; the directional magnetic field is positioned at the lower sides of the movable substrate and the coil device, the outer ring magnetic pole of the directional magnetic field is an S pole, the inner ring magnetic pole is an N pole correspondingly, radial magnetic lines of force are formed between the inner ring magnetic pole and the outer ring magnetic pole, and one conductor edge of each coil group of the coil device is positioned in the magnetic field of the magnetic lines of force. The design mainly utilizes a plurality of coil windings in a magnetic field to respectively control the current directions of the coil windings, so that the requirement of deflection around different axes can be realized.
Description
Technical Field
The invention belongs to the technical field of reflector deflection, and particularly relates to a multi-axis driven micro reflector.
Background
Chinese granted patent CN201110297787 digital micromirror device and a forming method thereof disclose a micro vibrating mirror array, which forms compressive stress and tensile stress by disposing a first polar plate, a second polar plate, a conductive layer and a dielectric layer, so that when there is a potential difference between the first polar plate and the second polar plate, the first polar plate and the second polar plate attract each other to drive a lens to move around a transverse rotating shaft. However, the electrostatic attraction formed on the two polar plates is very weak, so that the problems of small driving force, asymmetrical driving, high working voltage and incapability of driving the polar plates and the lenses to turn over exist, and the limitation of single-axis deflection exist.
Chinese patent 201711033201.1 discloses a MEMS biaxial micromirror structure and a micromirror array chip, which is a technology that generates driving force of micromirror array by means of thermal deformation of biaxial material, however, there are the problems of slow heat conduction, low response speed and low working frequency due to the processes of power up, heat generation and re-conduction. In addition, the reflecting mirror surface uses X and Y double axes (namely a rotating hinge or a beam) for the turnover of the mirror surface, and the hinge has the problems of low impact resistance, easy fracture and smaller mirror reflection area than the frame area.
Chinese granted patent 201621103386.X a MEMS device, a MEMS micro-mirror system and a MEMS pico-projector disclose MEMS mirrors that achieve biaxial deflection using an electrostatic, electromagnetic or piezoelectric based actuation system, although the structure of the electrostatic, electromagnetic or piezoelectric based actuation system is not shown. However, the proposal has a biaxial frame hinge, the reflecting mirror surface is positioned in the frame, the effective reflecting area is small, and the proposal is not suitable for forming an array of a multi-reflecting platform.
Chinese patents CN202110561169 and CN201810205101 disclose a two-dimensional scanning micromirror machine manufacturing method, which realizes the function of two-dimensional scanning of the MEMS micromirror by the force generated in a single electrified coil through a magnetic field set at 45 ° with the micromirror. However, only one working coil is provided, and the setting of current in both forward and reverse directions can be satisfied, and the purpose of multi-axis driving cannot be satisfied obviously.
Chinese patent 200780040211 discloses a micromirror device with vertical hinges, which changes the frame hinge into hinge posts arranged side by side perpendicular to the mirror surface, which of course increases the strength of the hinge, but still has the limitation of only being able to deflect around a single axis. Meanwhile, the electrostatic driving force is too small, and contradiction exists between the electrostatic driving force and the strength of the hinge, so that implementation of a scheme is influenced.
In order to solve the problems of small driving force, single-axis or double-axis deflection and low working frequency of the micro mirror, the micro mirror device which has multi-axis deflection scanning capability, can form an independent reflection unit, has a simple structure and has a large area reflection ratio is provided.
The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art that is already known to a person skilled in the art.
Disclosure of Invention
It is an object of the present invention to provide a multi-axis driven micromirror with fine control of deflection angle, thereby overcoming the above-mentioned drawbacks of the prior art.
In order to achieve the above object, the present invention provides a multi-axis driven micro mirror, which mainly comprises a directional magnetic field and a mirror kit, wherein the mirror kit comprises:
the reflecting mirror surface is arranged on the upper side surface of the movable substrate, and a coil device is arranged between the back surface of the movable substrate and the fixed substrate;
the fixed base plate is positioned below the movable base plate and is connected with the movable base plate through a positioning device or a fixed outer frame;
the reversing substrate is arranged in the fixed substrate or on the lower side of the fixed substrate, is internally provided with a current reversing circuit and is used for electrically connecting a coil group of the coil device;
the directional magnetic field is positioned at the lower sides of the movable substrate and the coil device, the directional magnetic field is provided with an inner magnetic pole and an outer magnetic pole, the outer magnetic pole is S or N, the inner magnetic pole is corresponding to N or S, radial magnetic lines of force are formed between the inner magnetic pole and the outer magnetic pole, and one conductor edge of each coil group of the coil device is positioned in the magnetic field of the magnetic lines of force;
the coil device is fixed on the lower side surface of the movable base plate and is an umbrella-shaped or columnar coil group consisting of at least 4 groups, an angle alpha is formed between the umbrella-shaped cambered surface or the plane of each group of coils and the movable base plate, the angle alpha is 0 degree or 15 degrees to 90 degrees, one conductor edge in each coil group is fixed on the lower side surface of the movable base plate, and the other conductor edge is arranged in a directional magnetic field.
Preferably, in the above technical solution, the outer ring magnetic pole and the inner ring magnetic pole are both cylindrical.
Preferably, in the above technical solution, the positioning device includes an elastic connector including an elastic positioning post, or a spring, a torsion spring device, and an outer frame fixed to the fixed substrate, the movable substrate is linked to the outer frame through the spring or the torsion spring device, so as to position and fix the movable substrate.
Preferably, in the above technical solution, the corresponding coil group having the coil device applies a current, and the movable substrate and the mirror deflect and can be maintained in the first state at the position-1; and a second state in which the movable substrate and the mirror are returned from the position-1 to the original position-2 after the current of the coil assembly is removed.
Preferably, in the above technical solution, the top of the positioning device is fixedly connected to the bottom surface of the movable base plate through a universal steering gear, the universal steering gear and the cylinder are made of magnetic conductive materials, the universal steering gear is spherical, the fixed connection surface of the universal steering gear to the bottom surface of the movable base plate is a plane, the fitting surface with the cylinder is a spherical surface, the connection between the top of the corresponding cylinder and the spherical universal steering gear is a concave spherical surface, the two are magnetized by the inner magnetic pole of the directional magnetic field and then kept attracted, and lubricant is coated between the attraction surfaces, when the coil assembly receives magnetic field force, the movable base plate drives the spherical steering gear to rotate in the spherical concave spherical surface of the cylinder, thereby realizing deflection of the reflector surface.
Preferably, the universal steering gear is formed by a rotating sphere arranged in the spherical positioner, the fixedly connected joint surface of the rotating sphere and the bottom surface of the movable base plate is a plane, the rotating sphere can rotate or deflect freely in the inner cavity of the spherical positioner, the volume of the rotating sphere contained by the spherical positioner is larger than 51% of that of the rotating sphere, and the spherical positioner is fixed at the top end of the cylinder.
Preferably, in the above technical solution, a fixed outer frame is disposed outside the movable substrate, and the movable substrate and the mirror plate are fixed at circumferential angles by at least 2 elastic connectors, so as to prevent the movable substrate from rotating circumferentially around the axial direction of the cylinder.
Preferably, in the above technical solution, the coil device is formed by 4 independent coil groups symmetrically distributed along an X axis and a Y axis, and a connection line of each coil group reaches the commutation substrate along a surface of the elastic positioning device or through an elastic connection guide piece to be electrically connected with a respective current control circuit on the current commutation substrate, so that when at least one pair of coil groups supplies power, the movable substrate can drive the mirror surface to perform a deflection motion around the X axis or around the Y axis, respectively.
Preferably, in the above technical solution, the coil device is formed by 8 independent coil sets, which are symmetrically distributed with the X axis and the Y axis, and the a axis and the B axis forming 45 ° with the two XY axes, and the connection line of each coil set is electrically connected to the respective current control circuit on the current commutation substrate along the surface of the elastic positioning device or through the elastic connection guide piece to reach the commutation substrate, so that when at least one pair of coil sets shown in the figure is powered, the action that the movable substrate drives the mirror surface to deflect around the X axis or around the Y axis, or around the a axis or around the B axis, respectively, can be realized.
Preferably, in the above technical solution, the coil device is formed by 8 independent coil sets, and when two coil sets are powered as shown in the figure, the movable substrate can drive the mirror surface to perform angular deflection around C, D axes other than X, Y, A, B axes.
Preferably, in the above technical solution, the reflecting mirror surface is a reflecting material layer formed by fixing the reflecting mirror on the movable substrate or formed by spraying an optical reflecting material on an upper surface thereof or attached with a reflecting power.
A directional magnetic field device is provided with a magnetic field of inner and outer ring magnetic poles, the outer ring magnetic pole is S or N pole, the inner ring magnetic pole is corresponding to N or S pole, and radial magnetic lines of force are formed between the inner ring magnetic pole and the outer ring magnetic pole.
Preferably, in the above technical solution, the directional magnetic field is composed of a cylindrical magnetic pole and a hollow cylindrical magnetic conductive material, the hollow cylindrical magnetic conductive material is connected with one of the magnetic poles to form an extension of an N pole or an S pole, and magnetic lines of force forming the directional magnetic field are radial and perpendicular to the central axis.
Preferably, in the above technical solution, the directional magnetic field is composed of a hollow cylindrical magnetic pole and a cylindrical magnetic conductive material, the cylindrical magnetic conductive material is connected with one of the poles to form an extension of an N pole or an S pole, and magnetic lines of force forming the directional magnetic field are radial and perpendicular to the central axis.
Compared with the prior art, the invention has the following beneficial effects: the technical scheme has the advantages that in a magnetic field, the current directions of the coil windings are respectively controlled by utilizing the coil windings, so that the requirement of deflection around different axes can be met, when 4 pairs of coil windings are adopted, deflection around 6 axes can be simultaneously achieved through the combination of energization of different coils, and the functional range of the micro-mirror is expanded. The electromagnetic driving scheme that the electrified conductor is stressed in the electromagnetic field is applied, so that the driving force is large, the driving of the mirror with a large size can be realized, and the arrangement of current can be reduced by increasing the number of turns of the coil, so that the power consumption of the mirror device is reduced.
Drawings
FIG. 1: the overall structure is schematic;
FIG. 2: schematic diagram of magnetic field lines and conductor ampere force in the magnetic field;
FIG. 3: magnetic pole schematic diagram and magnetic line direction;
FIG. 4 a: a schematic view of a connecting line along the surface of the elastic positioning device;
FIG. 4 b: a schematic diagram of the electrical connection of coil groups realized by elastic connecting guide sheets;
FIG. 5: a schematic view of a universal redirector;
FIG. 6A: a schematic view of a resilient connector;
FIG. 6 b: a spring positioning device and a schematic diagram;
FIG. 6 c: the movable base plate is fixed by a spring;
FIG. 7: x, Y shaft deflection diagram is realized by electrifying the coil;
FIG. 8: a, B schematic diagram of shaft deflection;
FIG. 9: a multi-axis deflection schematic diagram is realized by electrifying and combining a plurality of coils;
FIG. 10: the movable base plate is connected with the outline border schematic diagram through a spring/torsion spring;
FIG. 11: a schematic view of a horizontally disposed coil arrangement;
FIG. 12: a top view of the horizontally disposed coil arrangement;
FIG. 13: a schematic diagram of vertically arranging coils and magnetic poles;
FIG. 14: the forming schematic diagram of the directional magnetic field;
FIG. 15: the formation of the directional magnetic field is schematically illustrated.
Detailed Description
The following detailed description of specific embodiments of the invention is provided, but it should be understood that the scope of the invention is not limited to the specific embodiments.
Throughout the specification and claims, unless explicitly stated otherwise, the word "comprise", or variations such as "comprises" or "comprising", will be understood to imply the inclusion of a stated element or component but not the exclusion of any other element or component.
Example 1
A mirror arrangement deflectable about multiple axes consisting essentially of a directional magnetic field and a mirror assembly, the mirror assembly comprising:
the reflecting mirror surface is arranged on the upper side surface of the movable substrate, and a coil device is arranged between the back surface of the movable substrate and the fixed substrate;
the coil device is fixed on the lower side surface of the movable substrate and is an umbrella-shaped or columnar coil group consisting of at least 4 groups of coils, preferably 8 groups of coils, the umbrella-shaped cambered surface or the plane of each group of coils and the movable substrate form an angle alpha, the angle alpha is 0 degrees (embodiment 3), or 15 degrees to 90 degrees, one conductor edge in each coil group is fixed on the lower side surface of the movable substrate, and the other conductor edge is placed in a directional magnetic field.
The directional magnetic field is positioned at the lower sides of the movable substrate and the coil device, the directional magnetic field is provided with an inner magnetic pole and an outer magnetic pole, the outer magnetic pole is S or N, the inner magnetic pole is corresponding to N or S, the directional magnetic field is preferably circumferential, radial magnetic lines of force are formed between the inner magnetic pole and the outer magnetic pole, and one conductor edge of the coil group is positioned in the magnetic field of the magnetic lines of force.
The fixed base plate is positioned below the movable base plate and is connected with the fixed outer frame and the movable base plate through the positioning device;
the reversing substrate is arranged in the fixed substrate or on the lower side of the fixed substrate, is internally provided with a current reversing circuit and is used for electrically connecting a coil group of the coil device;
the coil groups of the coil device are symmetrically distributed around the center of the circle of the movable substrate.
The coil device is fixed on the lower side surface of the movable substrate and is an umbrella-shaped or columnar coil group consisting of at least 4, preferably 8 groups of coils, an angle alpha is formed between an umbrella-shaped cambered surface or a plane of each group of coils and the movable substrate, the angle alpha is 15-90 degrees, one conductor edge in each coil group is fixed on the lower side of the movable substrate, and the other conductor edge is vertically arranged in a directional magnetic field and is vertical to magnetic lines.
And the directional magnetic field is positioned between the coil device and the fixed substrate, the circumferential outer ring of the directional magnetic field is S or N pole, the inner ring of the directional magnetic field is corresponding to N or S pole, a working area of radial magnetic lines between the inner ring and the outer ring is formed, and one conductor edge of each group of coils is vertically arranged in the magnetic lines of the magnetic field.
The center of the inner ring magnetic pole is also provided with a round hole for the passing of a positioning device.
The positioning device is a flexible cylinder with elastic deformation performance, passes through the through hole of the directional magnetic field, and the top of the positioning device is fixedly connected with the bottom surface of the movable substrate. When the coil group is subjected to magnetic field force, the cylinder is bent and deformed to realize deflection of the reflecting mirror surface driven by the movable substrate.
The connecting wires of each coil group are distributed on the surface of the positioning device and form tooth shapes or curve shapes along the vertical axial direction, and the connecting wires reach the reversing substrate and are electrically connected with the control circuit of the reversing substrate.
The positioning device passes through the through hole of the directional magnetic field, and the top of the positioning device is fixedly connected with the bottom surface of the movable base plate through the universal steering gear. When the coil group is acted by the magnetic field force, the movable substrate drives the reflection mirror surface to deflect, and the universal steering gear is driven to rotate.
The top of the cylinder of the positioning device is fixedly connected with the bottom surface of the movable base plate through the universal steering gear, the universal steering gear and the cylinder are made of magnetic conductive materials, the universal steering gear is spherical, the surface of the bottom surface of the movable base plate is a plane, the surface of the universal steering gear is a spherical surface, the top of the corresponding cylinder is matched with the spherical universal steering gear to form a concave spherical surface, the universal steering gear and the cylinder are magnetized through the inner ring magnetic pole of the directional magnetic field and then have magnetism to keep attraction, a lubricant is coated between attraction surfaces, when a coil group receives magnetic field force, the movable base plate drives the spherical steering gear to rotate in the spherical concave spherical surface of the cylinder, and deflection of a reflector surface is realized.
The outer side of the movable base plate is provided with a fixed outer frame, and the movable base plate and the reflector are fixed at circumferential angles through at least 2 elastic connectors to prevent the movable base plate from rotating circumferentially around the axial direction of the cylinder.
The positioning device is composed of an elastic connector, a spring or torsion spring device and an outer frame fixed with the fixed base plate, and the movable base plate is linked with the outer frame through the spring or torsion spring device to realize the positioning and the fixing of the movable base plate. The movable substrate is connected with the fixed substrate or the magnetic poles of the directional magnetic field through springs.
In this arrangement, due to the reverse spring force of the spring, when a current of a certain direction and magnitude is applied to the coil conductor, the magnetic field force of the coil conductor enables the movable substrate and the reflector to deflect a specific angle, at this time, the reverse deflection torque of the spring acting force is equal to the deflection torque of the magnetic field force of the conductor, at this time, if the current magnitude is maintained, the movable substrate and the reflector can be stopped at the position, and if the current is withdrawn, the movable substrate and the reflector can be returned from the position.
The coil device is formed by 4 independent coil groups which are symmetrically distributed along an X axis and a Y axis, and connecting wires of each coil group reach the reversing substrate along the surface of the elastic positioning device and are electrically connected with respective current control circuits on the current reversing substrate, so that when at least one pair of coil groups are powered, the movable substrate can drive the reflector to deflect around the X axis or around the Y axis respectively.
The coil device is composed of 8 independent coil groups which are symmetrically distributed with an X axis and a Y axis and an A axis and a B axis which form an angle of 45 degrees with the X axis and the Y axis, and connecting lines of each coil group reach the reversing substrate along the surface of the elastic positioning device and are electrically connected with respective current control circuits on the current reversing substrate.
The coil device is composed of 8 independent coil groups, and when the two coil groups are powered as shown in the figure, the movable substrate can drive the reflector to respectively deflect around C, D axes except X, Y, A, B axes.
The reflecting mirror surface is a reflecting material layer which is formed by fixing a reflecting mirror on a movable substrate or spraying an optical reflecting material on the upper surface of the reflecting mirror surface or is provided with reflecting capacity.
Example 2
A mirror arrangement deflectable about multiple axes consisting essentially of a directional magnetic field and a mirror assembly, the mirror assembly comprising:
the reflecting mirror surface is arranged on the upper surface of the movable base plate, the lower side of the back surface of the movable base plate is provided with a coil device, and a spring, a torsion spring or a rotating shaft is arranged between the movable base plate and the fixed outer frame;
the coil device is fixed on the lower side surface of the movable substrate and is an umbrella-shaped or columnar coil group consisting of at least 4 groups of coils, preferably 8 groups of coils, an angle alpha is formed between the umbrella-shaped cambered surface or the plane of each group of coils and the movable substrate, the angle alpha is 0 degree or 15 degrees to 90 degrees, one conductor side in the coil group is fixed on the lower side of the movable substrate, and the other conductor side is arranged in a directional magnetic field.
And the directional magnetic field is positioned between the coil device and the fixed substrate, the directional magnetic field is a circumferential outer ring magnetic pole with an S or N pole, an inner ring magnetic pole is correspondingly an N or S pole, radial magnetic lines of force between the inner ring magnetic pole and the outer ring magnetic pole are formed, and one conductor edge of the coil group is positioned in the magnetic field of the magnetic lines of force.
And the reversing substrate is arranged in the fixed substrate or on the lower side of the fixed substrate, is internally provided with a current reversing circuit and is used for electrically connecting the coil group of the coil device.
Example 3
A mirror arrangement deflectable about multiple axes consisting essentially of a directional magnetic field and a mirror assembly, the mirror assembly comprising:
the reflecting mirror surface is arranged on the upper surface of the movable substrate, and the back surface of the movable substrate is connected with the coil device through a bracket;
the coil device is fixed on the lower side surface of the movable base plate and is composed of at least 4 groups of coil groups, preferably 8 groups of coil groups, the plane formed by the coil groups and the movable base plate form an angle alpha, alpha is 0 degree, and the coil groups are arranged in a directional magnetic field.
And the directional magnetic field is positioned at the lower side of the coil device, the directional magnetic field is a circumferential outer ring magnetic pole and is S or N, the inner ring magnetic pole is corresponding to the N or S, a radial magnetic line of force between the inner ring magnetic pole and the outer ring magnetic pole is formed, and one conductor edge of the coil group is positioned in the magnetic field of the magnetic line of force.
The reversing substrate is arranged in the fixed substrate or on the lower side of the fixed substrate, is internally provided with a current reversing circuit and is used for electrically connecting a coil group of the coil device;
each coil group is horizontally arranged and evenly distributed by taking the circle center of the movable substrate as the center to form a fan-shaped coil. When current is passed through the coils, each coil assembly is forced in the magnetic field as follows: the coil conductors positioned at the outer side and the conductors positioned at the inner side are approximately vertical to the direction of the magnetic force lines, so that the coil conductors and the conductors are all acted by ampere force, and the force arm of the outer side conductor is larger than that of the inner side conductor and the length of the conductor is larger than that of the inner side conductor relative to the center of the movable substrate, so that the combination of the ampere force of every two coil groups forms the deflection moment of the movable substrate, and the deflection of the movable substrate is driven.
The 8 groups of coil groups are respectively combined by at least two coils through current, so that the movable substrate drives the reflector to respectively carry out angle deflection around a C, D axis except an X, Y, A, B axis.
Example 4
A mirror arrangement deflectable about multiple axes consisting essentially of a directional magnetic field and a mirror assembly, the mirror assembly comprising:
the reflecting mirror surface is arranged on the upper surface of the movable substrate, and the back surface of the movable substrate is provided with a coil device;
the coil device is fixed on the lower side surface of the movable base plate and is a fan-shaped coil group consisting of at least 4 groups of coils, preferably 8 groups of coils, an angle alpha is formed between each group of coil planes and the movable base plate, the angle alpha is 90 degrees, and the coil groups are symmetrical and emit to enable a conductor edge at the bottom to be arranged in a directional magnetic field.
And the directional magnetic field is positioned at the lower side of the coil device and consists of a plurality of magnetic poles, so that one conductor side of the coil group is positioned in the magnetic force line of the magnetic field.
The reversing substrate is arranged in the fixed substrate or on the lower side of the fixed substrate, is internally provided with a current reversing circuit and is used for electrically connecting a coil group of the coil device;
each coil group is vertically arranged and evenly distributed by taking the circle center of the movable substrate as the center to form a fan-shaped coil. When current is passed through the coils, each coil assembly is forced in the magnetic field as follows: the conductors of the coils in the magnetic field are vertical to the direction of the magnetic force lines, so that all the conductors are acted by ampere force, and the combination of the ampere force of every two coil groups forms the deflection torque of the movable substrate to drive the deflection of the movable substrate.
The 8 groups of coil groups are respectively combined by at least two coils through current, so that the movable substrate drives the reflector to respectively carry out angle deflection around a C, D axis except an X, Y, A, B axis.
The advantage of this scheme, in a magnetic field, utilize a plurality of coil windings, the current direction of controlling coil winding respectively, can realize around the demand that the different axle deflects, when adopting 4 each coil windings, can realize simultaneously around the deflection of 4 axles, expanded the functional scope of micro mirror, because this scheme can adopt the principle of chip manufacturing to carry out the preparation of activity base plate, fixed baseplate, coil device, switching-over circuit, connecting wire, therefore can realize the processing preparation of little small-size digital micro mirror.
The driving force is larger due to the application of the electromagnetic driving scheme of the coil in the electromagnetism, so that the driving of the mirror surface with larger size can be realized, and the setting of current can be reduced by increasing the number of turns of the coil, so that the power consumption of the mirror surface device is reduced.
The foregoing descriptions of specific exemplary embodiments of the present invention have been presented for purposes of illustration and description. It is not intended to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain certain principles of the invention and its practical application to enable one skilled in the art to make and use various exemplary embodiments of the invention and various alternatives and modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims and their equivalents.
Claims (14)
1. A multi-axis driven micromirror, comprising: mainly constitute by directional magnetic field and speculum external member, speculum external member includes:
the reflecting mirror surface is arranged on the upper side surface of the movable substrate, and a coil device is arranged between the back surface of the movable substrate and the fixed substrate;
the fixed base plate is positioned below the movable base plate and is connected with the movable base plate through a positioning device or a fixed outer frame;
the reversing substrate is arranged in the fixed substrate or on the lower side of the fixed substrate, is internally provided with a current reversing circuit and is used for electrically connecting a coil group of the coil device;
the directional magnetic field is positioned at the lower sides of the movable substrate and the coil device, the directional magnetic field is provided with an inner magnetic pole and an outer magnetic pole, the outer magnetic pole is S or N, the inner magnetic pole is corresponding to N or S, radial magnetic lines of force are formed between the inner magnetic pole and the outer magnetic pole, and one conductor edge of each coil group of the coil device is positioned in the magnetic field of the magnetic lines of force;
the coil device is fixed on the lower side surface of the movable base plate and is an umbrella-shaped or columnar coil group consisting of at least 4 groups, an angle alpha is formed between the umbrella-shaped cambered surface or the plane of each group of coils and the movable base plate, the angle alpha is 0 degree or 15 degrees to 90 degrees, one conductor edge in each coil group is fixed on the lower side surface of the movable base plate, and the other conductor edge is arranged in a directional magnetic field.
2. The multi-axis actuated micro-mirror of claim 1, wherein: the outer ring magnetic pole and the inner ring magnetic pole are both cylindrical.
3. The multi-axis actuated micro-mirror of claim 1, wherein: the positioning device comprises an elastic positioning column, a spring, a torsion spring device and an outer frame, wherein the elastic positioning column is used for connecting the movable substrate and the fixed substrate, the outer frame is fixed with the fixed substrate, and the movable substrate is connected with the outer frame through the spring or the torsion spring device to realize the positioning and the fixing of the movable substrate.
4. The multi-axis actuated micro-mirror of claim 1, wherein: the coil device has: applying current to the coil assembly, deflecting the movable substrate and the mirror and maintaining the first state at the position-1; and a second state in which the movable substrate and the mirror are returned from the position-1 to the original position-2 after the current of the coil assembly is removed.
5. The multi-axis actuated micro-mirror of claim 3, wherein: the top of the positioning device is fixedly connected with the bottom surface of the movable base plate through a universal steering gear,
the universal steering gear and the cylinder are made of magnetic conductive materials, the universal steering gear is spherical, the surface of the universal steering gear, which is fixedly connected with the bottom surface of the movable base plate, is a plane, the matching surface of the universal steering gear and the cylinder is a spherical surface, the top of the corresponding cylinder and the universal steering gear are connected and matched to form a concave spherical surface, the universal steering gear and the cylinder are magnetized through the inner ring magnetic pole of the directional magnetic field and then have magnetism to keep attraction, lubricant is coated between the attraction surfaces, when the coil group receives magnetic field force, the movable base plate drives the spherical steering gear to rotate in the spherical concave spherical surface of the cylinder, and deflection positioning of the reflector surface is realized.
6. The multi-axis driven micromirror according to claim 3 or 5, wherein: the universal steering gear is formed by a rotary sphere arranged in the spherical positioner, the binding surface of the rotary sphere fixedly connected with the bottom surface of the movable base plate is a plane, the rotary sphere can rotate or deflect at will in the inner cavity of the spherical positioner, the volume of the rotary sphere contained in the spherical positioner is larger than 51% of the rotary sphere, and the spherical positioner is fixed at the top end of the cylinder.
7. The multi-axis driven micromirror according to claim 3 or 5, wherein: the outer side of the movable substrate is provided with a fixed outer frame, and the movable substrate and the reflector are fixed at circumferential angles through at least 2 elastic connectors, so that the movable substrate is prevented from rotating circumferentially around the axial direction of the cylinder.
8. The multi-axis actuated micro-mirror of claim 1, wherein: the coil device is formed by 4 independent coil groups which are symmetrically distributed along an X axis and a Y axis, and connecting lines of each coil group reach the reversing substrate along the surface of the elastic positioning device or through elastic connecting guide sheets to be electrically connected with respective current control circuits on the current reversing substrate, so that when at least one pair of coil groups are powered, the movable substrate can drive the reflecting mirror surface to deflect around the X axis or around the Y axis respectively.
9. The multi-axis actuated micro-mirror of claim 1, wherein: the coil device is composed of 8 independent coil groups which are symmetrically distributed with an X axis and a Y axis and an A axis and a B axis which form an angle of 45 degrees with the X axis and the Y axis, and connecting lines of each coil group reach the reversing substrate along the surface of the elastic positioning device or through elastic connecting guide sheets to be electrically connected with respective current control circuits on the current reversing substrate.
10. Mirror device deflectable around multiple axes according to claim 1 or 8, characterized in that: the coil device is composed of 8 independent coil groups, and when the two coil groups are powered as shown in the figure, the movable substrate can drive the reflector to respectively deflect around C, D axes except X, Y, A, B axes.
11. The multi-axis actuated micro-mirror of claim 1, wherein: the reflecting mirror surface is a reflecting material layer which is formed by fixing a reflecting mirror on a movable substrate or spraying an optical reflecting material on the upper surface of the reflecting mirror surface or has reflecting capacity.
12. A directional magnetic field apparatus, characterized by: the directional magnetic field device is provided with a magnetic field of inner and outer magnetic poles, the outer magnetic pole is S or N, the inner magnetic pole is N or S correspondingly, and radial magnetic lines of force are formed between the inner magnetic pole and the outer magnetic pole.
13. The directional magnetic field apparatus of claim 11, wherein: the directional magnetic field is composed of a columnar magnetic pole and a hollow cylindrical magnetic conduction material, the hollow cylindrical magnetic conduction material is connected with one pole of the magnetic pole to form extension of an N pole or an S pole, and magnetic lines of force forming the directional magnetic field are radial and vertical to the central shaft.
14. The directional magnetic field apparatus of claim 11, wherein: the directional magnetic field is composed of a hollow cylindrical magnetic pole and a cylindrical magnetic conduction material, the cylindrical magnetic conduction material is connected with one pole of the magnetic pole to form extension of an N pole or an S pole, and magnetic lines of force forming the directional magnetic field are radial and vertical to the central shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210556938.6A CN115079401A (en) | 2022-05-19 | 2022-05-19 | Multi-axis driven micro reflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210556938.6A CN115079401A (en) | 2022-05-19 | 2022-05-19 | Multi-axis driven micro reflector |
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| Publication Number | Publication Date |
|---|---|
| CN115079401A true CN115079401A (en) | 2022-09-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210556938.6A Pending CN115079401A (en) | 2022-05-19 | 2022-05-19 | Multi-axis driven micro reflector |
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| Country | Link |
|---|---|
| CN (1) | CN115079401A (en) |
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2022
- 2022-05-19 CN CN202210556938.6A patent/CN115079401A/en active Pending
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