CN110954142B - Optical micromotor sensor, substrate and electronic equipment - Google Patents
Optical micromotor sensor, substrate and electronic equipment Download PDFInfo
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- CN110954142B CN110954142B CN201911259052.XA CN201911259052A CN110954142B CN 110954142 B CN110954142 B CN 110954142B CN 201911259052 A CN201911259052 A CN 201911259052A CN 110954142 B CN110954142 B CN 110954142B
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- 239000000758 substrate Substances 0.000 title claims abstract description 124
- 230000003287 optical effect Effects 0.000 title claims abstract description 57
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- 239000000463 material Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 8
- 230000007306 turnover Effects 0.000 claims description 6
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical group [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 4
- 229910002113 barium titanate Inorganic materials 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 238000000926 separation method Methods 0.000 abstract 1
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- 230000008569 process Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
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- G—PHYSICS
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
- G01D5/285—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication using a movable mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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Abstract
The invention relates to the technical field of optical micromotor sensors, and discloses an optical micromotor sensor, a substrate and electronic equipment, wherein the optical micromotor sensor comprises a substrate, an annular substrate, a micromirror body and a driving circuit, wherein a plurality of groove groups comprising a first electrode, a second electrode for moving the micromirror body and a third electrode for turning the micromirror body are formed on the annular substrate; the micro mirror body is provided with extending shafts and a fourth electrode group used for being matched with the third electrode, and when the two extending shafts are rotationally arranged in the groove group, and the fourth electrode group and the third electrode are respectively switched between staggered arrangement and separation, the micro mirror body is positioned at a turning station; when the two extending shafts are respectively contacted with the second electrode and the plurality of fourth electrodes are positioned on one side of the annular substrate, which is far away from the substrate, the micro-mirror body is positioned at the transposition station, the optical micro-motor sensor realizes that the micro-mirror body is overturned along the overturning shafts in different directions to realize multi-dimensional scanning, and the optical micro-motor sensor has a simple structure and is convenient to control.
Description
Technical Field
The invention relates to the technical field of optical micromotor sensors, in particular to an optical micromotor sensor, a substrate and electronic equipment.
Background
The MEMS (Micro electro mechanical systems ) sensor has the advantages of small volume, light weight, low power consumption, high reliability, high sensitivity, easy integration, etc., and is widely applied in the fields of pressure sensing, gyroscopes, electrostatic actuation light projection displays, etc.
The MEMS micro-mirror is an optical MEMS sensor, and consists of a micro-light reflector and an MEMS driver, the MEMS micro-mirror is an indispensable key laser component for laser application, and the main application fields are three: laser scanning, optical communication, digital display, including aspects such as laser radar, 3D camera, bar code scanning, laser printer, medical imaging, high definition TV, laser micro projection, digital cinema, car new line display (HUD), laser keyboard, Augmented Reality (AR).
The existing MEMS micro-mirror is mostly single-axis, and a few double-axis MEMS micro-mirrors have complex structures and large volumes. Therefore, the MEMS micro-mirror in the prior art has high two-dimensional scanning difficulty due to the limitation of the number of rotating shafts, and three-dimensional and above scanning can not be realized, thereby greatly limiting the application range of the MEMS micro-mirror.
Disclosure of Invention
The invention provides an optical micromotor sensor, a substrate and electronic equipment, wherein the optical micromotor sensor realizes that a micro mirror body is turned over along turning shafts in different directions so as to realize multidimensional scanning, and has the advantages of simple structure and convenience in control.
In order to achieve the purpose, the invention provides the following technical scheme:
an optical micro-motor sensor comprising:
the circuit board comprises a substrate, wherein a circular first through hole is formed in the middle of the substrate;
the annular substrate is arranged on the substrate, a second through hole coaxial with the first through hole is formed in the middle of the annular substrate, a plurality of groove groups are formed on one side, away from the substrate, of the annular substrate, each groove group comprises two grooves extending along the diameter direction of the second through hole, the connecting line of the two grooves in each groove group is intersected with the axis of the second through hole, and a first electrode is arranged at the bottom of each groove; at least one second electrode arranged along the extending direction of the annular substrate is arranged between every two adjacent grooves, and each second electrode is positioned on the surface of one side, away from the substrate, of the annular substrate; a plurality of third electrodes arranged along the extending direction of the annular substrate are arranged between every two adjacent grooves, and the third electrodes are arranged on one side, facing the second through hole, of the annular substrate;
the micro-mirror body and the annular substrate are arranged on the same side of the substrate, the orthographic projection of the micro-mirror body on the substrate is positioned in the orthographic projection of the annular substrate on the substrate, and a reflecting surface is formed on the surface of one side of the micro-mirror body, which is far away from the substrate; protruding shafts are arranged on two sides of the micro mirror body, the axes of the two protruding shafts are on the same straight line, and the connecting line of the axes of the two protruding shafts is intersected with the axis of the second through hole; the two sides of the micro mirror body are respectively provided with a fourth electrode group, a connecting line between the two fourth electrode groups is vertical to a connecting line of axial leads of the two extension shafts, each fourth electrode group comprises a plurality of fourth electrodes which are arranged along the edge of the micro mirror body and staggered with the third electrodes, when the two extension shafts are respectively and rotatably arranged in the two grooves of one groove group along the axial leads, and the plurality of fourth electrodes are respectively and alternately arranged and separated with the third electrodes, the micro mirror body is positioned at a turnover station; when the two extending shafts are respectively contacted with the second electrode and the plurality of fourth electrodes are positioned on one side of the annular substrate, which is far away from the substrate, the micro-mirror body is positioned at a transposition station;
and the driving circuit is electrically connected with each of the first electrode, the second electrode, the third electrode and the fourth electrode.
The optical micromotor sensor comprises a substrate, an annular substrate, a micromirror body and a driving circuit, the optical micromotor sensor realizes the turnover of the micromirror body and the transposition of an extending shaft by means of the interaction between electrodes, and the turnover of the micromirror body is realized in the following manner: when two extending shafts are positioned in a groove group, namely each extending shaft is respectively positioned in two grooves of the same groove group, the first electrodes in the two grooves in the groove group are electrified through the driving circuit, the micro-mirror body and the extending shafts are electrified through the driving circuit, so that the polarity of the first electrodes in the two grooves is opposite to that of the extending shafts, the two extending shafts are limited in the groove group under the action of electrostatic attraction force between the first electrodes and the extending shafts, each third electrode opposite to two fourth electrode groups on the micro-mirror body is electrified through the driving circuit, the voltages applied to each third electrode opposite to one fourth electrode group in the two fourth electrode groups are different from the voltages applied to each third electrode opposite to the other fourth electrode group, the stress of the two fourth electrode groups is different, and the torque is generated between the two fourth electrode groups, so that the micro mirror body is turned in the second through hole, the two extension shafts are respectively rotated in the grooves, and the turning shaft of the micro mirror body is a connecting line of the axial leads of the two extension shafts; the realization mode of the transposition of the extension shaft is as follows: when the direction of the flip axis of the micromirror body is to be changed, i.e. two protruding axes are to be changed from one groove group to another groove group, first, the first electrode in the groove group from which the two protruding axes are to be moved is energized (or de-energized) with the same polarity as the two protruding axes by the driving circuit, and the second electrode between the groove into which the two protruding axes are to be moved and the groove to be moved is energized by the driving circuit, so that the polarity of the second electrode is opposite to that of the two protruding axes, the two protruding axes are moved to the side surface of the annular substrate away from the substrate by the electrostatic repulsion between the first electrode and the protruding axes (when the first electrode is not energized, no electrostatic repulsion is provided) and the electrostatic attraction between the second electrode and the protruding axes, then, the second electrode is de-energized by the driving circuit, and the first electrode in the groove group into which the two protruding axes are to be moved is energized with the opposite polarity to that of the protruding axes, so that the two extending shafts move into the groove group to be moved in under the action of electrostatic attraction force, and the two extending shafts are switched from one groove group to the other groove group, thereby realizing the change of the direction of the flip shaft of the micro mirror body. In the optical micromotor sensor provided by the invention, the overturning of the micromirror body along the overturning shafts in different directions can be realized by controlling the polarity of each electrode through the driving circuit, the structure is simple, the control is convenient, and the number of the groove groups can be set according to actual needs, so that the overturning of the micromirror body along the overturning shafts in the set direction is realized.
Preferably, three groove groups are formed on one side of the annular base, which faces away from the substrate, and angles formed by connecting lines of two grooves in each groove group and connecting lines of two grooves in an adjacent groove group are the same.
Preferably, three second electrodes arranged along the extending direction of the annular substrate are arranged between every two adjacent grooves, and the distance between every two adjacent second electrodes is the same.
Preferably, the annular base and the substrate are fixed in an adhesion mode.
Preferably, the material of the substrate is glass or resin.
Preferably, the material of the annular substrate is a material with a dielectric constant larger than 1000C ^2/(N ^ M ^ 2).
Preferably, the material of the annular substrate is barium titanate.
Preferably, the first electrode and the second electrode are both formed by a photolithography method.
Preferably, the micromirror device further comprises an annular cover plate arranged on the micromirror body and the annular substrate, a channel for the protruding shaft of the micromirror to pass through is formed between the annular cover plate and the annular substrate, a third through hole is formed in a region of the annular cover plate opposite to the micromirror body, and the diameter of the third through hole is larger than or equal to that of the second through hole.
Preferably, a protrusion protruding towards the inner side of the groove is formed at a position of the annular cover plate opposite to the groove of the annular substrate, and a channel for passing an extension shaft of the micromirror is formed between the protrusion and the groove.
The invention also provides a substrate which comprises any one of the optical micro-motor sensors provided in the technical scheme, and the optical micro-motor sensors are arranged in an array.
The invention also provides electronic equipment which comprises the substrate provided in the technical scheme.
Drawings
FIG. 1 is a schematic top view of an optical MEMS sensor according to the present invention;
FIG. 2 is a schematic circuit diagram of an optical MEMS sensor according to the present invention;
fig. 3a to 3d are schematic cross-sectional expanded views of an extension shaft of an optical micromotor sensor provided by the invention in a transposition process;
FIG. 4 is an expanded cross-sectional schematic view of an optical MEMS sensor including an annular cover plate according to the present invention;
FIG. 5 is a schematic cross-sectional view of an optical micromachined sensor according to the present invention with the protruding shaft located in one of the groove sets;
FIG. 6 is a schematic cross-sectional view of an extension shaft of an optical micromotor sensor of the present invention shown in a transposition station;
fig. 7 is a schematic structural diagram of a substrate according to the present invention.
Icon:
1-an annular base; 2-a drive circuit; 3-a groove; 4-a first electrode; 5-a second electrode; 6-a third electrode; 7-a micromirror body; 8-extending shaft; 9-a fourth electrode; 10-an annular cover plate; 11-a bump; 13-an optical micro-electromechanical sensor; 14-a gate line; 15-drive signal lines.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 and fig. 2, the present invention provides an optical micro-electromechanical sensor 13, including:
the circuit board comprises a substrate, a first through hole and a second through hole, wherein the first through hole is formed in the middle of the substrate;
the electrode structure comprises an annular base 1 arranged on a substrate, wherein a second through hole coaxial with a first through hole is formed in the middle of the annular base 1, a plurality of groove groups are formed on one side, away from the substrate, of the annular base 1, each groove group comprises two grooves 3 extending along the diameter direction of the second through hole, the connecting line of the two grooves 3 in each groove group is intersected with the axis of the second through hole, and a first electrode 4 is arranged at the bottom of each groove 3; at least one second electrode 5 arranged along the extending direction of the annular substrate 1 is arranged between every two adjacent grooves 3, and each second electrode 5 is positioned on the surface of one side, away from the substrate, of the annular substrate 1; a plurality of third electrodes 6 arranged along the extending direction of the annular substrate 1 are arranged between every two adjacent grooves 3, and the third electrodes 6 are arranged on one side of the annular substrate 1 facing the second through hole;
the micro-mirror body 7 is arranged on the same side of the substrate as the annular substrate 1, the orthographic projection of the micro-mirror body 7 on the substrate is positioned in the orthographic projection of the annular substrate 1 on the substrate, and the surface of one side, away from the substrate, of the micro-mirror body 7 forms a reflecting surface; protruding shafts 8 are arranged on two sides of the micro mirror body 7, the axis lines of the two protruding shafts 8 are on the same straight line, and the connecting line of the axis lines of the two protruding shafts 8 is intersected with the axis line of the second through hole; the two sides of the micro mirror body 7 are respectively provided with a fourth electrode group, a connecting line between the two fourth electrode groups is vertical to a connecting line of the axial lead of the two extending shafts 8, each fourth electrode group comprises a plurality of fourth electrodes 9 which are arranged along the edge of the micro mirror body 7 and are staggered with the third electrodes 6, when the two extending shafts 8 are respectively and rotatably arranged in the two grooves 3 of one groove group along the axial lead, and the plurality of fourth electrodes 9 are respectively and alternately arranged and separated with the third electrodes 6, the micro mirror body 7 is positioned at a turning station; when the two extending shafts 8 are respectively contacted with the second electrode 5 and the plurality of fourth electrodes 9 are positioned on one side of the annular substrate 1 departing from the substrate, the micromirror body 7 is positioned at a transposition station;
and a driving circuit 2 electrically connected to each of the first electrode 4, the second electrode 5, the third electrode 6, and the fourth electrode 9.
The optical micromotor sensor 13 comprises a substrate, an annular substrate 1, a micromirror body 7 and a driving circuit 2, the optical micromotor sensor 13 realizes the turnover of the micromirror body 7 and the transposition of the protruding shaft 8 by means of the interaction between the electrodes, and the turnover of the micromirror body 7 is realized in the following manner: as shown in fig. 2, 3a, 3b and 5, when two protruding axes 8 are located in a groove group, that is, each protruding axis 8 is located in two grooves 3 of the same groove group, the first electrodes 4 in the two grooves 3 in the groove group are energized by the driving circuit 2, and the micromirror body 7 and the protruding axes 8 are energized by the driving circuit 2, so that the polarities of the first electrodes 4 in the two grooves 3 are opposite to those of the protruding axes 8, the two protruding axes 8 are confined in the groove group by the electrostatic attraction force between the first electrodes 4 and the protruding axes 8, the third electrodes 6 opposite to the two fourth electrode groups on the micromirror body 7 are energized by the driving circuit 2, and the voltages applied to the third electrodes 6 opposite to one of the two fourth electrode groups are different from the voltages applied to the third electrodes 6 opposite to the other fourth electrode group, so that the two fourth electrode groups are stressed differently, and torque is generated between the two fourth electrode groups, so that the micro mirror body 7 is turned over in the second through hole, the two extension shafts 8 rotate in the groove 3 respectively, and the turning shaft of the micro mirror body 7 is a connecting line of the axial leads of the two extension shafts 8; as shown in fig. 2, 3b, 3c, 3d and 6, the extension shaft 8 is transposed as follows: when the direction of the flip axis of the micromirror body 7 is to be changed, i.e., two protruding axes 8 are to be changed from one groove group to another, first, the first electrode 4 in the groove group from which the two protruding axes 8 are to be moved is energized (or de-energized) with the same polarity as the two protruding axes 8 by the driving circuit 2, and the second electrode 5 between the groove 3 into which the two protruding axes 8 are to be moved and the groove 3 to be moved is energized by the driving circuit 2 so that the polarity of the second electrode 5 is opposite to that of the two protruding axes 8, the two protruding axes 8 are moved to a side surface of the annular base 1 away from the substrate by the electrostatic repulsive force between the first electrode 4 and the protruding axes 8 (when the first electrode 4 is not energized, the electrostatic repulsive force is not provided) and the electrostatic attractive force between the second electrode 5 and the protruding axes 8, and then the first electrode 4 in the groove group into which the two protruding axes 8 are to be moved is energized by the driving circuit 2 is energized and is energized with the protruding axes 8 and the protruding axes 8 And the voltages with opposite polarities enable the two protruding shafts 8 to move into the groove groups to be moved in under the action of electrostatic attraction force, so that the two protruding shafts 8 are switched from one groove group to another groove group, and the direction of the flip axis of the micromirror body 7 is changed. In the optical micromotor sensor 13 provided by the invention, the driving circuit 2 is used for controlling the polarity of each electrode, so that the overturning of the micromirror body 7 along the overturning axes in different directions can be realized, the structure is simple, the control is convenient, and the number of the groove groups can be set according to actual needs, so that the overturning of the micromirror body 7 along the overturning axes in the set direction is realized.
Specifically, as shown in fig. 1 and fig. 2, three groove groups are formed on one side of the annular base 1 away from the substrate, and the included angles formed by the connecting line of two grooves 3 in each groove group and the connecting line of two grooves 3 in the adjacent groove group are the same.
In an embodiment, three groove sets are formed on one side of the annular substrate 1 away from the substrate, and the three groove sets are uniformly distributed on the annular substrate 1, in this embodiment, the micromirror body 7 can be flipped along flipping axes in three directions, thereby realizing three-dimensional scanning.
Specifically, as shown in fig. 2, three second electrodes 5 arranged in the extending direction of the annular substrate 1 are disposed between every two adjacent grooves 3, and the distance between every two adjacent second electrodes 5 is the same.
In one embodiment, three second electrodes 5 are arranged between every two adjacent grooves 3, and when the micromirror body 7 is to change the flip axis direction, i.e. two protruding axes 8 are to be changed from one groove group to another groove group, the method comprises three steps, wherein the first step is to move two protruding axes 8 from the groove group to be removed to the surface of the annular base 1 on the side facing away from the substrate, as shown in fig. 3b and 3c, the second step is to move the protruding axes 8 from the groove group to be removed to the groove group to be moved on the surface of the annular base 1 on the side facing away from the substrate, as shown in fig. 3d, and finally, as shown in fig. 3d, to move two protruding axes 8 from the surface of the annular base 1 on the side facing away from the substrate into the groove group to be moved; in this process, the three second electrodes 5 are energized as follows: firstly, in the first step, a second electrode 5 close to one side of the groove group to be moved out needs to be electrified through the driving circuit 2, so that the second electrode 5 is opposite to the electric property of the extending shaft 8, so that the second electrode 5 generates electrostatic attraction force on the extending shaft 8, so that the extending shaft 8 is moved out of the groove group to be moved out, in the second step, the second electrode 5 close to the groove group to be moved out is powered off through the driving circuit 2, the second electrode 5 in the middle of the three second electrodes 5 is electrified to be opposite to the electric property of the extending shaft 8, so that the extending shaft 8 is moved towards the direction close to the groove group to be moved in under the action of the electrostatic attraction force, then the second electrode 5 in the middle of the three second electrodes 5 is powered off through the driving circuit 2, and the second electrode 5 close to the groove group to be moved in is electrified to be opposite to the electric property of the extending shaft 8, so that the protruding shaft 8 moves towards the direction close to the groove group to be moved in under the action of the electrostatic attraction force, and finally, in the third step, the second electrode 5 close to the groove group to be moved in is powered off, so that the electrostatic attraction force between the second electrode and the protruding shaft 8 disappears, and the protruding shaft 8 can conveniently fall into the groove group to be moved in.
Specifically, when a plurality of second electrodes 5 are arranged between every two adjacent grooves 3, the voltage required by the second electrodes 5 close to the groove group to be moved out is the largest, so that the electrostatic attraction force in the direction opposite to the gravity direction of the extension shaft 8 is provided for the extension shaft 8, the extension shaft 8 overcomes the gravity to do work, the other second electrodes 5 only need to enable the extension shaft 8 to move along the surface of one side, away from the substrate, of the annular substrate 1, the extension shaft 8 overcomes the friction force to do work, only a smaller voltage is needed, and when the friction force is overcome to do work, the size of the friction force can be greatly reduced by adding a lubricant and the like, so that the required voltage is reduced; when a second electrode 5 is arranged between every two adjacent grooves 3, the second electrode 5 needs to provide electrostatic attraction force in the direction opposite to the gravity direction of the extension shaft 8 for the extension shaft 8, so that the extension shaft 8 works against the gravity.
When a plurality of second electrodes 5 are provided between every two adjacent grooves 3, the voltage required for the second electrode 5 close to the group of grooves to be removed, or, when one second electrode 5 is provided between every two adjacent grooves, the voltage required for the second electrode 5 can be calculated by:
firstly, calculating the gravity sum of a micro-mirror body 7, two extending shafts 8 arranged on the micro-mirror body 7 and two fourth electrode groups;
and secondly, calculating the required voltage.
In the first step, the areas of the micromirror body 7, the two protruding axes 8 disposed on the micromirror body 7 and the two fourth electrode sets are calculated respectively, the volumes of the micromirror body 7, the two protruding axes 8 disposed on the micromirror body 7 and the two fourth electrode sets are calculated according to the areas of the micromirror body 7, the two protruding axes 8 disposed on the micromirror body 7 and the two fourth electrode sets, the masses of the micromirror body 7, the two protruding axes 8 disposed on the micromirror body 7 and the two fourth electrode sets are calculated according to the volumes of the micromirror body 7, the two protruding axes 8 disposed on the micromirror body 7 and the densities of the two fourth electrode sets, the masses of the micromirror body 7, the two protruding axes 8 disposed on the micromirror body 7 and the two fourth electrode sets are calculated according to the masses of the micromirror body 7, the two protruding axes 8 disposed on the micromirror body 7 and the two fourth electrode sets, The gravity of the two protruding shafts 8 and the two fourth electrode sets disposed on the micromirror body 7 is denoted as G.
In the second step, because the two sides of the micromirror body 7 are respectively provided with the protruding shafts 8, the electrostatic attraction force applied to each protruding shaft 8 only needs to be greater than 1/2G, and the method specifically includes:
the electrostatic attraction between each protruding shaft 8 and the second electrode 5 can be formulated by the electrostatic force, i.e.: f ═ k × Q1*Q2/d2(1) Where d is the distance between each protruding shaft 8 and the second electrode 5 close to the groove set to be removed, k is the electrostatic force constant, k 9 x 109；
The capacitor C is formed between the protruding shaft 8 and the second electrode 5 close to the groove group to be removed, and the charges of the capacitor C are equal and opposite in polarity, so that Q is1＝Q2And according to the formula: and C is Q/U (2), U is the voltage difference between the two, and the following is obtained: q1＝Q2＝Q＝C*U (3)；
Therefore, the electrostatic attraction force F ═ kQ between each protruding shaft 8 and the second electrode 5 can be obtained according to the formula (1), the formula (2), and the formula (3)2/d2＝k(CU)2/d2 (4)。
Since F > 1/2G, the micromirror can be actuated, i.e.:
k(CU)2/d2＞1/2G (5)；
obtaining: u > (G/2k)1/2(d/C) (6)；
Since C ═ S/4 π kd (7), k is the electrostatic force constant, k ═ 9 × 109(ii) a S is the relative area of the protruding shaft 8 and the second electrode 5 adjacent to the groove group to be removed; ε is the dielectric constant of the capacitive intermediate medium between the protruding shaft 8 and the second electrode 5 close to the set of grooves to be removed, i.e. the dielectric constant of the annular substrate 1; substituting equation (7) into equation (6) therefore results in the equation for the voltage U applied to the second electrode 5 close to the set of grooves to be removed:
U＞(G/2k)1/2[d/(εS/4πkd)] (6)；
namely: u > (G/2k)1/2(4πkd2/εS) (7)。
The parameters of the various parts of the optical micromotor sensor 13 in one embodiment are provided below and calculated by the above formula:
the diameter of the micromirror body 7 is denoted as D, the radius is denoted as R, and the thickness is denoted as H1，D＝3mm、R＝1.5mm，H1＝0.2mm；
The length of the single projecting shaft 8 is denoted L1Width is denoted as L2Thickness is recorded as H2，L1＝1.5mm，L2＝0.2mm，H2＝0.2mm；
The length of the single fourth electrode is denoted L3Width is denoted as L4Thickness is recorded as H3，L3＝0.75mm，L4＝0.2mm，H30.2 mm; and each fourth electrode group comprises two fourth electrodes;
the depth of the groove in each groove set (i.e. the distance between the protruding axis 8 and the second electrode 5 close to the groove set to be removed) is denoted d, d being 0.4 mm;
the dielectric constant epsilon of the annular substrate 1 is more than 1000C2/(N*M2)；
Each second electrode 5 has a length half of the extension shaft 8 and a width equal to the width of the extension shaft 8.
The sum of the gravities of the micromirror body 7, the two protruding axes 8 disposed on the micromirror body 7, and the two fourth electrode sets is first calculated according to the above data:
the volume of the micromirror body 7 is: v1＝πR2*H1＝3.14*1.5*1.5*0.2＝1.413mm3；
The volume of the single projecting shaft 8 is: v2＝L1*L2*H2＝1.5*0.2*0.2＝0.06mm3(ii) a Two rotating shafts are provided;
the volume of the single fourth electrode is: v3＝L3*L4*H3＝0.75*0.2*0.2＝0.03mm3(ii) a Each fourth electrode group comprises two fourth electrodesElectrodes, each micromirror body 7 is provided with two fourth electrode groups, thus four fourth electrodes are provided in total;
total volume V ═ V1+V2+4V3＝1.413+2*0.06+4*0.03＝1.653mm3＝1.653*10-3cm3；
The material of the micromirror body 7 is stainless steel as an example, the stainless steel surface can be polished to directly form a reflecting surface, and the density of the stainless steel is rho 7.9g/cm3；
The total mass of the micromirror body 7 is density volume, and the mass of the micromirror body 7 is denoted as M, i.e., M is ρ V7.9 1.653 10-3＝13.06*10-3g；
The gravity of the micromirror is denoted as G, and G-M-G-13.06-10-3*9.8*10-3＝128*10-6N。
Then according to the formula U > (G/2k) of the voltage U applied to the second electrode 5 adjacent to the group of recesses to be removed1/2(4πkd2,/ε S) (7) calculation:
first, the relative area S of the protruding shaft 8 and the second electrode 5 near the groove group to be removed is calculated, and since the length of the second electrode 5 is half of the output shaft and the width is the same, S is 1.5 × 0.2 × 1/2 is 0.15mm2＝0.15*10-6m2；
The dielectric constant epsilon of the annular substrate 1 is more than 1000C2/(N*M2)；
Substituting the above data into equation (7) yields: u > (G/2k)1/2(4πkd2/εS)＝(128*10-6/(2*9*109))1/2(4*3.14*9*109*0.4*10-3*0.4*10-3/(1000*0.15*10-6) 10V, namely U is more than 10V;
therefore, when the voltage supplied by the driving circuit 2 to the second electrode 5 close to the groove group to be removed exceeds 10 volts, the micromirror body 7 can be driven to flip.
Specifically, the annular base 1 is fixed to the substrate by adhesion.
The annular base 1 and the substrate are fixed in a bonding mode, and the fixing mode is simple.
Specifically, the material of the substrate is glass or resin.
Specifically, the material of the annular substrate 1 is a material having a dielectric constant greater than 1000C2/(N*M2) The material of (1).
Specifically, the material of the ring substrate 1 is barium titanate.
The annular substrate 1 is made of a material with a high dielectric constant, such as barium titanate, and the like, and is not limited herein.
Specifically, the first electrode 4 and the second electrode 5 are both formed by photolithography.
The first electrode 4 and the second electrode 5 are formed by photolithography, which is simple and saves steps such as fixing.
Specifically, as shown in fig. 4, the micromirror device further includes an annular cover plate 10 disposed on the micromirror body 7 and the annular substrate 1, a channel for the protruding axis 8 of the micromirror to pass through is formed between the annular cover plate 10 and the annular substrate, a third through hole is formed in a region of the annular cover plate 10 opposite to the micromirror body 7, and the diameter of the third through hole is greater than or equal to that of the second through hole.
The optical micromotor sensor further comprises an annular cover plate 10, the size of the annular cover plate 10 is the same as that of the annular substrate 1, a channel for movement of the protruding shaft 8 is formed between the annular cover plate 10 and the annular substrate 1 in a matching mode, and a third through hole for overturning the micro mirror body is formed in the position, opposite to the micro mirror body 7, of the annular cover plate 10.
Specifically, as shown in fig. 4, a protrusion 11 protruding toward the inner side of the groove is formed at a portion of the annular cover plate 10 opposite to the groove of the annular substrate, and a channel for passing the protruding axis 8 of the micromirror is formed between the protrusion 11 and the groove.
The position of the annular cover plate 10 opposite the recess prevents the channel from being too wide at the recess by providing a protrusion 11, the provision of the protrusion 11 helps to maintain the consistency of the parts of the channel, thereby allowing better movement of the protruding shaft 8 within the constraints of the channel.
The invention also provides a substrate comprising any one of the optical micro-electromechanical sensors provided in the above technical scheme, as shown in fig. 7, a plurality of optical micro-electromechanical sensors are arranged in an array.
In the substrate, a first electrode 4, a second electrode 5, a third electrode 6, a fourth electrode and a micromirror body 7 of the optical micro-electromechanical sensor are connected to a driving circuit 2 through wires, and relevant signals are inputted from the driving circuit 2. The other wires, the respective electrodes, and the ring-shaped substrate 1 except the micromirror body 7 can be fabricated on one substrate by a semiconductor process.
In the using process, the optical micromotor sensor generally forms an array for use, and the change of the angle of emergent light is realized by controlling the deflection angles of different micro-mirror bodies 7.
In one embodiment, an array of optical micro-electromechanical sensors is formed by fabricating a series of optical micro-electromechanical sensors on a substrate, each electrode controlled by a thin film transistor switch controlled by a gate line 14 running laterally therethrough, as shown in figure 7. The driving mode is line-by-line driving, the first line of gate lines 14 is opened, the driving circuit 2 inputs signals to each electrode in each optical micro-motor sensor in the first line through the driving signal line 15 to control the micro-mirror body 7 to rotate to a preset angle, then the first line of gate lines 14 is closed, the second line of gate lines 14 is opened, the driving circuit 2 inputs signals to each electrode in each optical micro-motor sensor in the second line through the driving signal line 15, and the micro-mirror body 7 rotates to a preset angle … … until the last line. The optical micromotor sensor array can be directly used for optical communication, and can also be applied to the field of 3D scanning and shooting after devices such as a light emitter, a light receiver and the like are added in the optical micromotor sensor array.
The invention also provides electronic equipment, and the substrate provided in the technical scheme.
The electronic equipment can be used for 3D camera shooting, optical communication, projectors and the like, and different functions are realized by designing the structure and the number of optical micromotor sensor arrays in the electronic equipment and adding other functional devices.
It will be apparent to those skilled in the art that various changes and modifications may be made in the embodiments of the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (12)
1. An optical micromotor sensor, comprising:
the circuit board comprises a substrate, wherein a circular first through hole is formed in the middle of the substrate;
the annular base is arranged on the substrate, the annular base which is coaxial with the first through hole is formed in the middle of the annular base, a plurality of groove groups are formed on one side, away from the substrate, of the annular base, each groove group comprises two grooves extending along the diameter direction of the second through hole, the connecting line of the two grooves in each groove group is intersected with the axis of the second through hole, and a first electrode is arranged at the bottom of each groove; at least one second electrode arranged along the extending direction of the annular substrate is arranged between every two adjacent grooves, and each second electrode is positioned on the surface of one side, away from the substrate, of the annular substrate; a plurality of third electrodes arranged along the extending direction of the annular substrate are arranged between every two adjacent grooves, and the third electrodes are arranged on one side, facing the second through hole, of the annular substrate;
the micro-mirror body and the annular substrate are arranged on the same side of the substrate, the orthographic projection of the micro-mirror body on the substrate is positioned in the orthographic projection of the annular substrate on the substrate, and a reflecting surface is formed on the surface of one side of the micro-mirror body, which is far away from the substrate; protruding shafts are arranged on two sides of the micro mirror body, the axes of the two protruding shafts are on the same straight line, and the connecting line of the axes of the two protruding shafts is intersected with the axis of the second through hole; the two sides of the micro mirror body are respectively provided with a fourth electrode group, a connecting line between the two fourth electrode groups is vertical to a connecting line of axial leads of the two extension shafts, each fourth electrode group comprises a plurality of fourth electrodes which are arranged along the edge of the micro mirror body and staggered with the third electrodes, when the two extension shafts are respectively and rotatably arranged in the two grooves of one groove group along the axial leads, and the plurality of fourth electrodes are respectively and alternately arranged and separated with the third electrodes, the micro mirror body is positioned at a turnover station; when the two extending shafts are respectively contacted with the second electrode and the plurality of fourth electrodes are positioned on one side of the annular substrate, which is far away from the substrate, the micro-mirror body is positioned at a transposition station;
and the driving circuit is electrically connected with each of the first electrode, the second electrode, the third electrode and the fourth electrode.
2. The optical micromotor sensor of claim 1, wherein the annular base has three groove sets formed on a side thereof facing away from the substrate, and wherein a line connecting two grooves in each groove set forms the same angle with a line connecting two grooves in an adjacent groove set.
3. The optical micro-electromechanical sensor according to claim 1, characterized in that three second electrodes arranged along the extension direction of the annular substrate are provided between every two adjacent grooves, and the distance between every two adjacent second electrodes is the same.
4. The optical micromotor sensor of claim 1 wherein the annular base is adhesively secured to the substrate.
5. The optical micro-electromechanical sensor according to claim 1, wherein the material of the substrate is glass or resin.
6. The optical micromotor sensor according to claim 1, wherein the material of said annular substrate is a material having a dielectric constant greater than 1000C ^2/(N ^ M ^ 2).
7. The optical micro-electromechanical sensor according to claim 1, wherein the material of the ring-shaped substrate is barium titanate.
8. The optical micro-electromechanical sensor according to claim 1, wherein the first and second electrodes are each formed by lithographic methods.
9. The optical micro-electromechanical sensor according to claim 1, further comprising an annular cover plate disposed on the micromirror body and the annular substrate, wherein a channel for passing an extension axis of the micromirror is formed between the annular cover plate and the annular substrate, and a third through hole is formed in a region of the annular cover plate opposite to the micromirror body, wherein a diameter of the third through hole is greater than or equal to a diameter of the second through hole.
10. The optical micro-electromechanical sensor according to claim 9, wherein a portion of the annular cover plate opposite to the groove of the annular substrate forms a protrusion protruding toward an inner side of the groove, and a channel for passing an extension axis of the micro-mirror is formed between the protrusion and the groove.
11. A substrate comprising a plurality of optical micro-electromechanical sensors according to any of claims 1 to 10, the plurality of optical micro-electromechanical sensors being arranged in an array.
12. An electronic device comprising the substrate according to claim 11.
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