CN115070524B - Crystal bar automatic overturning and feeding and discharging device and using method thereof - Google Patents
Crystal bar automatic overturning and feeding and discharging device and using method thereof Download PDFInfo
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- CN115070524B CN115070524B CN202210625402.5A CN202210625402A CN115070524B CN 115070524 B CN115070524 B CN 115070524B CN 202210625402 A CN202210625402 A CN 202210625402A CN 115070524 B CN115070524 B CN 115070524B
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- 239000013078 crystal Substances 0.000 title claims abstract description 81
- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000007599 discharging Methods 0.000 title claims description 10
- 230000007246 mechanism Effects 0.000 claims abstract description 127
- 238000000227 grinding Methods 0.000 claims abstract description 39
- 230000009471 action Effects 0.000 claims abstract description 23
- 238000013016 damping Methods 0.000 claims abstract description 13
- 230000008569 process Effects 0.000 claims description 26
- 230000007306 turnover Effects 0.000 claims description 17
- 238000007670 refining Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/36—Single-purpose machines or devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/067—Work supports, e.g. adjustable steadies radially supporting workpieces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/35—Accessories
- B24B5/355—Feeding means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/50—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground, e.g. strings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The invention discloses a crystal bar automatic turning loading and unloading device and a using method thereof, belonging to the field of wafer processing; a crystal bar automatic overturning and feeding device comprises a bottom plate, a three-jaw chuck, an ejector rod mechanism, an overturning and moving mechanism clamping mechanism, a damping mechanism and a clamping mechanism; the crystal bar is clamped by arranging the three-jaw chuck and the ejector rod mechanism at the upper end of the bottom plate, and the three-jaw chuck and the ejector rod mechanism are respectively controlled to move so as to facilitate loading and unloading; the crystal bar is movably overturned by arranging the overturning moving mechanism and the clamping mechanism on the bottom plate, and the second rack is arranged at a position far away from the fine grinding station to avoid the crystal bar from being overturned and interfered; the damping mechanism is arranged on the sliding block, so that the phenomenon that the crystal bar cannot be coaxial with the chuck and the feeding failure is caused due to the fact that the rotating shaft rotates under the action of inertia is prevented; through set up block mechanism on the slider, prevent that the crystal bar upset from accomplishing the back, the pivot receives external disturbance and rotates once more, influences the material loading precision.
Description
Technical Field
The invention belongs to the field of wafer processing, and particularly relates to a crystal bar automatic overturning loading and unloading device and a using method thereof.
Background
The manufacture of semiconductor wafers requires a number of different processes; generally, a semiconductor ingot is first produced by a pulling method, the produced semiconductor ingot having a cylindrical crystal body portion and a tapered end portion, and then the tapered end portion is cut off by a cutter to obtain a cylindrical semiconductor ingot; then, the semiconductor crystal bar enters a fine grinding process, and the outer circle grinding is carried out on the crystal bar; finally, cutting the crystal bar into wafers with accurate thickness; in the prior art, manual feeding and discharging are mostly adopted in the grinding process of the crystal bar, so that the efficiency is low.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide an automatic crystal bar overturning and feeding and discharging device and a using method thereof, and solves the problem of low manual feeding and discharging efficiency in the prior art.
The purpose of the invention can be realized by the following technical scheme:
an automatic crystal bar overturning and feeding and discharging device comprises a bottom plate, wherein a fine grinding station is arranged on the bottom plate, the fine grinding station comprises a first fixing plate connected with the bottom plate in a sliding manner, and a rotatable three-jaw chuck is arranged on the first fixing plate; the bottom plate is provided with a mandril mechanism, the mandril mechanism comprises a second fixed plate which is connected with the bottom plate in a sliding way, a mandril installation seat is rotationally connected onto the second fixed plate, one end of the mandril installation seat is connected with a mandril in a sliding way, the mandril is coaxial with the three-jaw chuck, and a first spring is arranged between the mandril and the mandril installation seat; the upper end of the bottom plate is provided with two driving mechanisms for respectively driving the first fixing plate and the second fixing plate to slide;
the upper end of the bottom plate is provided with a turnover moving mechanism, the turnover moving mechanism comprises a sliding block which is in sliding connection with the bottom plate, and the sliding direction of the sliding block is vertical to the axial direction of the three-jaw chuck; the upper end of the sliding block is rotatably connected with a rotating shaft, the upper end of the rotating shaft is fixedly provided with a cross rod, and the end part of the cross rod is provided with a clamping mechanism for clamping a crystal bar;
a second gear is fixed on the rotating shaft, a second rack is fixed on the bottom plate, and the second rack can be meshed with the second gear in the sliding process of the sliding block; the second rack is arranged on one side far away from the fine grinding station, so that the second rack cannot interfere with a mechanism on the fine grinding station in the process that the second gear is meshed to drive the crystal bar to turn over; when the slide block moves to the nearest end point away from the fine grinding station, the crystal bar on the clamping mechanism is just coaxial with the three-jaw chuck.
Further, fixture is including fixing the mounting panel in horizontal pole one end, and sliding connection has two clamp splices on the mounting panel, is fixed with a third rack on two clamp splices respectively, is fixed with third drive arrangement on the mounting panel, is fixed with the third gear in third drive arrangement's the drive shaft, and the third gear is located between two third racks to mesh with two third racks simultaneously, thereby make the synchronous reverse slip of two clamp splices.
Furthermore, a plurality of damping mechanisms are arranged at the upper end of the sliding block, each damping mechanism comprises a third fixing plate, and the third fixing plates are fixedly connected with the sliding block in a bolt connection mode; one side of third fixed plate is provided with the circular arc board, be provided with the circular arc surface of mutually supporting with the pivot excircle on the circular arc board, one side that the circular arc board is close to the third fixed plate is provided with two guide arms, the guide arm passes the third fixed plate, and with third fixed plate sliding connection, the cover has the second spring on the guide arm, the both ends of second spring respectively with the side of third fixed plate and the side fixed connection of circular arc board, under the spring action of second spring, the circular arc surface on the circular arc board hugs closely in the pivot, utilize frictional force to come the rotation production damping of pivot.
Furthermore, a clamping mechanism is arranged on the sliding block, the clamping mechanism comprises a fixed rod which is connected with the sliding block in a sliding manner, one end of the fixed rod is connected with a sliding rod in a sliding manner, and a third spring is arranged between the sliding rod and the fixed rod; a baffle is arranged on the sliding block, a fourth spring is arranged between the baffle and the fixed rod, and the end part of the sliding rod can be clamped with two adjacent teeth of the second gear under the action of the elastic force of the fourth spring;
the upper end of the sliding block is rotatably connected with a first rotating rod, a fourth gear and a fifth gear are fixed on the first rotating rod, a fourth rack is arranged on one side of the fixing rod and can be meshed with the fourth gear, a fifth rack is fixed at the upper end of the bottom plate, and the fifth rack can be meshed with the fifth gear along with the sliding of the sliding block;
in the process that the sliding block slides towards the direction far away from the fine grinding station, the fifth rack is meshed with the fifth gear and can drive the fixed rod to slide towards the direction far away from the rotating shaft, and before the second gear is meshed with the second rack, the end part of the sliding rod can leave the second gear, so that the crystal bar is prevented from being overturned; in the process that the sliding block slides towards the direction close to the fine grinding station, the fifth rack is meshed with the fifth gear and can drive the fixed rod to slide towards the direction close to the rotating shaft, and the end part of the sliding rod cannot be in contact clamping with the second gear before the second gear is separated from the second rack; and the end part of the sliding rod can be clamped with two adjacent teeth of the second gear under the action of the elastic force of the fourth spring.
And in the whole process of meshing the second gear with the second rack, the fifth rack is meshed with the fifth gear.
Furthermore, a second limiting block is arranged on the sliding rod, a second limiting groove is formed in the fixed rod, the second limiting block is located in the second limiting groove, and the second limiting block can be close to the end portion of the second limiting groove under the elastic action of a third spring.
Furthermore, the driving mechanism comprises a first fixing frame fixed at the upper end of the bottom plate, the first fixing frame is connected with first racks in a sliding manner, and the two first racks are fixedly connected with the first fixing plate and the second fixing plate respectively; a first driving device is fixed on the first fixing frame, a first gear is fixed on a driving shaft of the first driving device, and the first gear is meshed with the first rack;
the bottom plate is provided with two locking mechanisms which are respectively used for limiting the driving of the two driving mechanisms; the locking mechanism comprises a second fixing frame fixed at the upper end of the bottom plate, a lifting rod is connected onto the second fixing frame in a sliding mode, the sliding direction is vertical, a clamping block is arranged at the lower end of the lifting rod, and the clamping block can be clamped between two adjacent teeth of the first rack; the lifting rod is sleeved with a fifth spring, two ends of the fifth spring are respectively and fixedly connected with the second fixing frame and the clamping block, and the clamping block can be clamped with two adjacent teeth of the first rack under the elastic force action of the fifth spring.
Furthermore, two sides of the sliding block are respectively provided with a linkage mechanism, the linkage mechanism comprises a fourth fixing plate fixed on the bottom plate, a second rotating rod is rotatably connected onto the fourth fixing plate, a sixth gear is fixed onto the second rotating rod, a first connecting rod is fixed at the upper end of the lifting rod, a sixth rack is arranged on the first connecting rod, and the sixth rack is meshed with the sixth gear; a second connecting rod is fixed on one side of the sliding block, a seventh rack is fixed at the end part of the second connecting rod, and the seventh rack can be meshed with the sixth gear in the sliding process along with the sliding block; in addition, in the process that the sliding block slides close to the fine grinding station, the seventh rack is meshed with the sixth gear and can drive the first connecting rod to ascend;
when the slide block moves to the nearest end point away from the fine grinding station and the crystal bar is coaxial with the three-jaw chuck, the clamping block just leaves the first rack.
Furthermore, a first limiting block is arranged on the ejector rod, a first limiting groove is formed in the ejector rod mounting seat, the first limiting block is located in the first limiting groove, and the first limiting block can be tightly attached to one end of the first limiting groove under the elastic action of a first spring.
Furthermore, a plurality of threaded holes are formed in the upper end of the sliding block, and the third fixing plate can be fixed in the threaded holes respectively, so that the position of the third fixing plate on the sliding block can be adjusted, and the purpose of adjusting friction between the arc surface and the rotating shaft is achieved.
The invention has the beneficial effects that: the upper end of the bottom plate is provided with the three-jaw chuck and the ejector rod mechanism to clamp and fix the crystal bar so as to accurately grind the outer circle, and the two driving mechanisms are arranged to respectively drive the three-jaw chuck and the ejector rod mechanism to move so as to facilitate loading and unloading; the upper end of the bottom plate is provided with the turnover moving mechanism, the turnover mechanism is provided with the clamping mechanism, so that the crystal bar is moved and turned, loading and unloading are further realized, and the second rack is arranged at a position far away from the fine grinding station, so that the interference between the turning action of the crystal bar and the mechanism of the fine grinding station is prevented; the damping mechanism is arranged on the sliding block, so that the phenomenon that the crystal bar cannot be coaxial with the chuck and the feeding failure is caused due to the fact that the rotating shaft rotates under the condition that the rotating shaft is subjected to inertia or is not restrained by external force is prevented; the clamping mechanism is arranged on the sliding block, so that the rotating shaft is prevented from rotating again due to external interference after the crystal bar is turned over, and the feeding precision is influenced; through setting up two locking mechanism, restrict two actuating mechanism's drive to through set up a link gear respectively in the both sides of slider, come two locking mechanism's locking opportunity of control respectively, realize only when the slider slides and targets in place, when the crystal bar was coaxial with the three-jaw chuck, locking mechanism just can release actuating mechanism and move, avoid the crystal bar to fail to target in place, actuating mechanism just drives three-jaw chuck and ejector pin and is close to each other, thereby causes the interference to the removal of crystal bar.
Drawings
In order to more clearly illustrate the embodiments or technical solutions in the prior art of the present invention, the drawings used in the description of the embodiments or prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of the overall structure of an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a push rod mechanism according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of a drive mechanism of an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a turning and moving mechanism according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a damping mechanism according to an embodiment of the present invention
FIG. 6 is a schematic structural view of a clamping mechanism according to an embodiment of the invention;
FIG. 7 is a schematic structural diagram of a fastening mechanism according to an embodiment of the present invention;
FIG. 8 is a schematic view of a fixing rod structure according to an embodiment of the present invention;
FIG. 9 is a schematic view of a locking mechanism of an embodiment of the present invention;
FIG. 10 is a schematic structural diagram of a linkage mechanism according to an embodiment of the present invention
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, the automatic turning feeding and discharging device for the crystal bar comprises a base plate 1, wherein the upper end of the base plate 1 is provided with a fine grinding station for performing cylindrical grinding on the crystal bar; the accurate grinding station comprises a first fixing plate 2 which is in sliding connection with the bottom plate 1, a three-jaw chuck 21 which can rotate is installed on the first fixing plate 2, one end of a crystal bar can be clamped by the three-jaw chuck 21, and the rotation of the crystal bar can be controlled by driving the three-jaw chuck plate 21 to rotate, so that the rotation of the crystal bar is driven, and the outer circle is convenient to be accurately ground;
the fine grinding station also comprises an ejector rod mechanism 3, and the ejector rod mechanism 3 is used for supporting the non-clamping end of the crystal bar, reducing the deflection and ensuring the precision of external cylindrical grinding; as shown in fig. 2, the lift pin mechanism 3 includes a second fixing plate 31 slidably connected to the bottom plate 1, a lift pin mounting seat 32 is rotatably connected to the second fixing plate 31, a lift pin 33 is slidably connected to one end of the lift pin mounting seat 32, the lift pin 33 is coaxial with the three-jaw chuck 21, and a first spring 34 is installed between the lift pin 33 and the lift pin mounting seat 32, so as to achieve elastic connection between the lift pin 33 and the lift pin mounting seat 32, and avoid damage to the crystal bar due to too large extrusion force between the lift pin 33 and the end of the crystal bar; the ejector rod 33 is provided with a first limit block 331, the ejector rod mounting seat 32 is provided with a first limit groove 321, the first limit block 331 is positioned in the first limit groove 321, and under the elastic force action of the first spring 34, the first limit block 331 can be tightly attached to one end of the first limit groove 321, so that the ejector rod 33 can be prevented from being separated from the ejector rod mounting seat 32;
the two driving mechanisms 4 are arranged on the bottom plate, and the two driving mechanisms 4 are respectively used for driving the first fixing plate 2 and the second fixing plate 31 to slide, so that the three-jaw chuck 21 and the ejector rod 33 can be respectively controlled to move, and loading and unloading are facilitated;
as shown in fig. 3, the driving mechanism 4 includes a first fixing frame 41 fixed at the upper end of the bottom plate 1, a first rack 42 is slidably connected to the first fixing frame 41, the two first racks 42 are respectively fixedly connected to the first fixing plate 2 and the second fixing plate 31, and the two first racks 42 are respectively controlled to slide, so that the first fixing plate 2 and the second fixing plate 31 can be respectively driven to slide; the first driving device 43 is fixed to the first fixing frame 41, the first gear 44 is fixed to a driving shaft of the first driving device 43, the first gear 44 and the first rack 42 are engaged with each other, and the first driving device 43 is controlled to operate, so that the first rack 44 can be driven to slide, and the displacement of the three-jaw chuck 21 and the displacement of the ejector rod 33 can be controlled respectively.
The upper end of the base plate 1 is provided with a turnover moving mechanism 5, the turnover moving mechanism 5 is provided with a clamping mechanism 7, the clamping mechanism 7 is used for clamping crystal bars, and the crystal bars are fed and discharged on a fine grinding station under the action of the turnover moving mechanism 5;
as shown in fig. 4-5, the turnover moving mechanism 5 includes a sliding block 51 slidably connected to the base plate 1, a sliding direction of the sliding block 51 is perpendicular to an axial direction of the three-jaw chuck, two fixing blocks are disposed on the base plate 1, a screw rod 52 is rotatably connected between the two fixing blocks, the screw rod 52 penetrates through the sliding block 51 and is in threaded connection with the sliding block 51, and one end of the screw rod 52 is provided with a second driving device 53 for driving the screw rod 52 to rotate, so as to drive the sliding block 51 to slide; the upper end of the sliding block 51 is rotatably connected with a rotating shaft 54, the upper end of the rotating shaft 54 is fixedly provided with a cross rod 55, the end part of the cross rod 55 is provided with a clamping mechanism 7, and the clamped crystal bar can be moved and turned by controlling the sliding of the sliding block 51 and the rotation of the rotating shaft 54, so that the loading and unloading are realized;
a second gear 57 is fixed on the rotating shaft 54, a second rack 58 is fixed on the bottom plate 1, and in the sliding process of the sliding block 51, the second rack 58 can be meshed with the second gear 57, so that the rotating shaft 54 rotates to drive the crystal bar to turn over; the second rack 58 is arranged on one side far away from the fine grinding station, so that the second rack 58 cannot interfere with a mechanism on the fine grinding station in the process that the second gear 57 is meshed to drive the crystal bar to turn over, and stable feeding and discharging are ensured;
the containing box 10 is arranged on the bottom plate 1, when the slide block 51 moves to the farthest end point away from the fine grinding station, the fine-ground crystal bars on the clamping mechanism 7 can be overturned above the containing box 10, so that the crystal bars can be conveniently unloaded into the containing box 10, and new crystal bars are installed on the clamping mechanism 7 above the containing box 10; then, the slide block 51 is controlled to slide towards the refining station, when the slide block 51 moves to the nearest end point away from the refining station, the crystal bar on the clamping mechanism 7 is just coaxial with the chuck 21, and the two driving mechanisms 4 are controlled to complete feeding;
in the embodiment, the upper end of the slider 51 is provided with a plurality of damping mechanisms 56, so as to prevent the ingot from being unable to be coaxial with the chuck 21 and causing feeding failure due to inertia or rotation without being constrained by external force after the second gear 57 is separated from the second rack 58;
the damping mechanism 56 comprises a third fixing plate 561, and the third fixing plate 561 is fixedly connected with the slider 51 in a bolt connection manner, so that the later-stage disassembly and replacement are facilitated; an arc plate 562 is arranged on one side of the third fixed plate 561, an arc surface matched with the excircle of the rotating shaft 54 is arranged on the arc plate 562, two guide rods 563 are arranged on one side of the arc plate 562 close to the third fixed plate 561, the guide rods 563 penetrate through the third fixed plate 561 and are in sliding connection with the third fixed plate 561, a second spring 564 is sleeved on the guide rods 563, two ends of the second spring 564 are respectively and fixedly connected with the side surface of the third fixed plate 561 and the side surface of the arc plate 562, under the elastic force action of the second spring 564, the arc surface on the arc plate 562 is tightly attached to the rotating shaft 54, and the rotation of the rotating shaft 54 is damped by using friction force, so that the rotating shaft 54 is prevented from rotating under the condition of inertia or no external force constraint, the crystal bar cannot be coaxial with the chuck 21, and the feeding failure is avoided;
a circular truncated cone 5631 is arranged at the end of the guide rod 563, and the diameter of the circular truncated cone 5631 is larger than that of the guide rod 563, so that the guide rod 563 can be prevented from being separated from the third fixing plate 561 under the action of the elastic force of the second spring 564;
in this embodiment, the upper end of the slider 51 is provided with a plurality of threaded holes, and the third fixing plate 561 can be respectively fixed in the threaded holes, so that the position of the third fixing plate 561 on the slider 51 can be adjusted, thereby achieving the purpose of adjusting the friction between the arc surface 562 and the rotating shaft 54.
As shown in fig. 6, the clamping mechanism 7 includes a mounting plate 71 fixed at one end of the cross bar 55, two clamping blocks 72 are slidably connected to the mounting plate 71, a third rack 73 is fixed on each of the two clamping blocks 72, a third driving device 74 is fixed on the mounting plate 71, a third gear 75 is fixed on a driving shaft of the third driving device 74, and the third gear 75 is located between the two third racks 73 and is engaged with the two third racks 73 at the same time, so that synchronous and reverse sliding of the two clamping blocks 72 is realized, and clamping of the ingot can be realized.
The upper end of the sliding block 51 is provided with the clamping mechanism 6, the clamping mechanism 6 is used for limiting the rotation of the rotating shaft 54, and the rotating shaft 54 is prevented from rotating due to external interference in the process that the sliding block 51 slides and the second gear 57 is separated from the second rack 58, so that the feeding precision is influenced; in the gap where the second gear 57 is disengaged from the second rack 58 and does not act on the engaging mechanism 6, the damping mechanism 56 prevents the rotation shaft 54 from being rotated by the inertia of the rotation;
as shown in fig. 7-8, the engaging mechanism 6 includes a fixed rod 61 slidably connected to the slider 51, a sliding rod 62 is slidably connected to one end of the fixed rod 61, an end of the sliding rod 62 can engage with two adjacent teeth of the second gear 57, and a third spring 63 is installed between the sliding rod 62 and the fixed rod 61, so as to achieve an elastic connection between the sliding rod 62 and the fixed rod 61, so that the fixed rod 61 can still approach the second gear 57 after the end of the sliding rod 62 contacts the second gear 57, so as to reduce the possibility of interference; the slide block 51 is provided with a baffle 511, a fourth spring 64 is arranged between the baffle 511 and the fixed rod 61, two ends of the fourth spring 64 are respectively and fixedly connected with the side surface of the baffle 511 and the side surface of the fixed rod 61, and under the elastic force action of the fourth spring 64, the end part of the slide rod 62 can be clamped with two adjacent teeth of the second gear 57, so that the rotation of the rotating shaft 54 is limited;
the upper end of the sliding block 51 is rotatably connected with a first rotating rod 65, a fourth gear 66 and a fifth gear 67 are fixed on the first rotating rod 65, a fourth rack 612 is arranged on one side of the fixed rod 61, the fourth rack 612 can be meshed with the fourth gear 66, a fifth rack 68 is fixed on the upper end of the bottom plate 1, and the fifth rack 68 can be meshed with the fifth gear 67 along with the sliding of the sliding block 51;
in the embodiment, during the process that the slide block 51 slides towards the direction away from the refining station, the fifth rack 68 is meshed with the fifth gear 67 and can drive the fixed rod 61 to slide towards the direction away from the rotating shaft 54, and before the second gear 57 is meshed with the second rack 58, the end part of the slide rod 62 can leave the second gear 57, so that the crystal bars are prevented from being overturned; during the process that the slide block 51 slides towards the direction close to the refining station, the fifth rack 68 is meshed with the fifth gear 67 and can drive the fixed rod 61 to slide towards the direction close to the rotating shaft 54, and the end part of the sliding rod 62 is not in contact clamping with the second gear 57 before the second gear 57 is separated from the second rack 58; in the process that the sliding block 51 continues to slide towards the refining station, the fifth rack 68 is separated from the fifth gear 67, and under the action of the elastic force of the fourth spring 64, the end part of the sliding rod 62 can be clamped between two adjacent teeth of the second gear 57 to limit the rotation of the rotating shaft 54, so that the feeding precision is ensured;
in the whole process of meshing the second gear 57 and the second rack 58 of the slide block, the fifth rack 68 is meshed with the fifth gear 67, so that the end part of the slide rod 62 is prevented from being clamped between two adjacent teeth of the second gear 57 under the action of the elastic force of the fourth spring 64, and the rotation of the rotating shaft 54 and the overturning of the crystal bar are limited;
in this embodiment, the sliding rod 62 is provided with a second limiting block 621, the fixing rod 61 is provided with a second limiting groove 611, the second limiting block 621 is located in the second limiting groove 611, and under the elastic action of the third spring 63, the second limiting block 621 can be close to the end of the second limiting groove 611, so as to prevent the sliding rod 62 from being separated from the fixing rod 61.
The upper end of the bottom plate 1 is provided with two locking mechanisms 8, and the two locking mechanisms 8 are respectively used for limiting the driving of the two driving mechanisms 4;
as shown in fig. 9, the locking mechanism 8 includes a second fixing frame 81 fixed at the upper end of the bottom plate 1, a lifting rod 82 is connected to the second fixing frame 81 in a sliding manner, the sliding direction is a vertical direction, a latch 821 is arranged at the lower end of the lifting rod 82, and the latch 821 can be engaged with two adjacent teeth of the first rack 42; the lifting rod 82 is sleeved with a fifth spring 83, two ends of the fifth spring 83 are respectively and fixedly connected with the second fixing frame 81 and the fixture block 821, and under the elastic force of the fifth spring 83, the fixture block 821 can be clamped between two adjacent teeth of the first rack 42, so that the sliding of the first rack 42 is limited, and the purpose of limiting the driving of the driving mechanism 4 is achieved.
Two sides of the sliding block 51 are respectively provided with the linkage mechanisms 9, the two linkage mechanisms 9 are respectively used for controlling the locking time of the two locking mechanisms 8, so that the locking mechanisms 8 can release the driving mechanism 4 to operate only when the sliding block 51 slides in place and the crystal bar is coaxial with the three-jaw chuck 21, the situation that the crystal bar cannot be in place is avoided, and the driving mechanism 4 drives the three-jaw chuck 21 and the ejector rod 33 to mutually approach each other, so that the interference is caused on the movement of the crystal bar;
as shown in fig. 10, the linkage mechanism 9 includes a fourth fixing plate 91 fixed on the bottom plate, a second rotating rod 92 is rotatably connected to the fourth fixing plate 91, a sixth gear 93 is fixed on the second rotating rod 92, a first connecting rod 94 is fixed on the upper end of the lifting rod 82, a sixth rack 941 is arranged on the first connecting rod 94, and the sixth rack 941 is engaged with the sixth gear 93; a second connecting rod 95 is fixed on one side of the sliding block 51, a seventh rack 96 is fixed at the end part of the second connecting rod 95, and the seventh rack 96 can be meshed with the sixth gear 93 in the sliding process along with the sliding block 51; in addition, in the process that the sliding block 51 slides close to the fine grinding station, the seventh rack 96 is meshed with the sixth gear 93 and can drive the first connecting rod 94 to ascend;
in this embodiment, when the slide block 51 moves to the nearest end point from the finish grinding station and the ingot is coaxial with the three-jaw chuck 21, the fixture block 821 just leaves the first rack 42; at this time, under the driving of the first driving device 43, the three-jaw chuck 21 and the ejector rod 33 can both approach to the crystal bar and position and fix the crystal bar, which facilitates the fine grinding.
The use method of the automatic crystal bar overturning and loading and unloading device comprises the following steps:
s1, feeding: clamping the crystal bar by using the clamping mechanism 7, and controlling the second driving device 53 to operate so as to enable the slide block 51 to slide towards the fine grinding station;
s2, positioning and fixing: after the slide block 51 slides in place, the two first driving devices 43 are respectively controlled to operate, so that the three-jaw chuck 21 and the ejector rod 33 act on the crystal bar to complete positioning and fixing;
s3, fine grinding: controlling the three-jaw chuck 21 to rotate, and matching with an upper grinding wheel to carry out fine grinding on the outer circle of the crystal bar;
s4, unloading: controlling the clamping mechanism 7 to clamp the crystal bar, loosening the calipers of the three-jaw chuck 21, respectively controlling the two first driving devices 43 to operate to enable the three-jaw chuck 21 and the ejector rod 33 to retreat, and then controlling the second driving device 53 to operate to unload the finely ground crystal bar.
The working principle is as follows:
the upper end of the bottom plate 1 is provided with the three-jaw chuck 21 and the ejector rod mechanism 3 to clamp and fix the crystal bar so as to accurately grind the excircle, and the two driving mechanisms 4 are arranged to respectively drive the three-jaw chuck 21 and the ejector rod mechanism 3 to move so as to facilitate loading and unloading; the upper end of the bottom plate 1 is provided with the turnover moving mechanism 5, the turnover mechanism 5 is provided with the clamping mechanism 7, so that the crystal bar is moved and turned, loading and unloading are realized, and the second rack 58 is arranged at a position far away from the fine grinding station, so that the interference between the turnover action of the crystal bar and the mechanism of the fine grinding station is prevented; by arranging the damping mechanism 56 on the slide block 51, the phenomenon that the crystal bar cannot be coaxial with the chuck 21 and loading fails due to the fact that the rotating shaft 54 rotates under the condition of inertia or no external force is restrained is prevented; the clamping mechanism 6 is arranged on the slide block 51, so that the rotating shaft 54 is prevented from rotating again due to external interference after the crystal bar is turned over, and the feeding precision is influenced; through setting up two locking mechanism 8, restrict the drive of two actuating mechanism 4, and set up a link gear 9 respectively through the both sides at slider 51, come two locking mechanism 8's of control locking opportunity respectively, realize only reaching in place when slider 51 slides, when the crystal bar is coaxial with three-jaw chuck 21, locking mechanism 8 just can release actuating mechanism 4 and move, avoid the crystal bar to fail to reach in place, actuating mechanism 4 just drives three-jaw chuck 21 and ejector pin 33 and is close to each other, thereby cause the interference to the removal of crystal bar.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing shows and describes the general principles, principal features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.
Claims (6)
1. An automatic crystal bar overturning and feeding and discharging device comprises a base plate (1), wherein a fine grinding station is arranged on the base plate (1), and the automatic crystal bar overturning and feeding and discharging device is characterized in that the fine grinding station comprises a first fixing plate (2) in sliding connection with the base plate (1), and a three-jaw chuck (21) capable of rotating is arranged on the first fixing plate (2); the base plate (1) is provided with a push rod mechanism (3), the push rod mechanism (3) comprises a second fixing plate (31) which is connected with the base plate in a sliding mode, a push rod mounting seat (32) is connected to the second fixing plate (31) in a rotating mode, one end of the push rod mounting seat (32) is connected with a push rod (33) in a sliding mode, the push rod (33) is coaxial with the three-jaw chuck (21), and a first spring (34) is installed between the push rod (33) and the push rod mounting seat (32); the upper end of the bottom plate (1) is provided with two driving mechanisms (4) for respectively driving the first fixing plate (2) and the second fixing plate (31) to slide;
the upper end of the bottom plate (1) is provided with a turnover moving mechanism (5), the turnover moving mechanism (5) comprises a sliding block (51) which is in sliding connection with the bottom plate (1), and the sliding direction of the sliding block (51) is vertical to the axial direction of the three-jaw chuck (21); the upper end of the sliding block (51) is rotatably connected with a rotating shaft (54), the upper end of the rotating shaft (54) is fixedly provided with a cross rod (55), and the end part of the cross rod (55) is provided with a clamping mechanism (7) for clamping a crystal bar;
a second gear (57) is fixed on the rotating shaft (54), a second rack (58) is fixed on the bottom plate (1), and the second rack (58) can be meshed with the second gear (57) in the sliding process of the sliding block (51); the second rack (58) is arranged on one side far away from the fine grinding station, so that the second rack (58) cannot interfere with a mechanism on the fine grinding station in the process that the second gear (57) is meshed to drive the crystal bar to turn over; when the slide block (51) moves to the nearest end point away from the fine grinding station, the crystal bar on the clamping mechanism (7) is just coaxial with the three-jaw chuck (21);
the clamping mechanism (7) comprises a mounting plate (71) fixed at one end of the cross rod (55), the mounting plate (71) is connected with two clamping blocks (72) in a sliding mode, a third rack (73) is fixed on each of the two clamping blocks (72), a third driving device (74) is fixed on the mounting plate (71), a third gear (75) is fixed on a driving shaft of the third driving device (74), the third gear (75) is located between the two third racks (73) and is meshed with the two third racks (73) simultaneously, and therefore the two clamping blocks (72) can synchronously and reversely slide;
the upper end of the sliding block (51) is provided with a plurality of damping mechanisms (56), each damping mechanism (56) comprises a third fixing plate (561), and the third fixing plates (561) are fixedly connected with the sliding block (51) in a bolt connection mode; one side of the third fixing plate (561) is provided with an arc plate (562), an arc surface matched with the outer circle of the rotating shaft (54) is arranged on the arc plate (562), two guide rods (563) are arranged on one side, close to the third fixing plate (561), of the arc plate (562), the guide rods (563) penetrate through the third fixing plate (561) and are in sliding connection with the third fixing plate (561), second springs (564) are sleeved on the guide rods (563), two ends of each second spring (564) are fixedly connected with the side face of the third fixing plate (561) and the side face of the arc plate (562) respectively, under the elastic force action of the second springs (564), the arc surface on the arc plate (562) is tightly attached to the rotating shaft (54), and the rotation of the rotating shaft (54) is damped by friction force;
the clamping mechanism (6) is mounted on the sliding block (51), the clamping mechanism (6) comprises a fixed rod (61) in sliding connection with the sliding block (51), one end of the fixed rod (61) is in sliding connection with a sliding rod (62), and a third spring (63) is mounted between the sliding rod (62) and the fixed rod (61); a baffle (511) is arranged on the sliding block (51), a fourth spring (64) is arranged between the baffle (511) and the fixed rod (61), and the end part of the sliding rod (62) can be clamped with two adjacent teeth of the second gear (57) under the action of the elastic force of the fourth spring (64);
the upper end of the sliding block (51) is rotatably connected with a first rotating rod (65), a fourth gear (66) and a fifth gear (67) are fixed on the first rotating rod (65), a fourth rack (612) is arranged on one side of the fixing rod (61), the fourth rack (612) can be meshed with the fourth gear (66), a fifth rack (68) is fixed on the upper end of the bottom plate (1), and the fifth rack (68) can be meshed with the fifth gear (67) along with the sliding of the sliding block (51);
in the process that the sliding block (51) slides towards the direction far away from the refining station, the fifth rack (68) is meshed with the fifth gear (67) and can drive the fixing rod (61) to slide towards the direction far away from the rotating shaft (54), and before the second gear (57) is meshed with the second rack (58), the end part of the sliding rod (62) can leave the second gear (57) to avoid the blockage of the overturning of the crystal bar; in the process that the sliding block (51) slides towards the direction close to the refining station, the fifth rack (68) is meshed with the fifth gear (67) and can drive the fixing rod (61) to slide towards the direction close to the rotating shaft (54), and the end part of the sliding rod (62) cannot be in contact clamping with the second gear (57) before the second gear (57) is separated from the second rack (58); the fifth rack (68) is separated from the fifth gear (67) along with the process that the sliding block (51) continues to slide towards the refining station, and the end part of the sliding rod (62) can be clamped with two adjacent teeth of the second gear (57) under the action of the elastic force of the fourth spring (64);
the fifth rack (68) is engaged with the fifth gear (67) throughout the engagement of the second gear (57) with the second rack (58).
2. The automatic crystal bar overturning and loading and unloading device as claimed in claim 1, wherein a second limiting block (621) is arranged on the sliding rod (62), a second limiting groove (611) is formed on the fixing rod (61), the second limiting block (621) is located in the second limiting groove (611), and under the elastic force action of the third spring (63), the second limiting block (621) can be close to the end of the second limiting groove (611).
3. The automatic crystal bar overturning and loading and unloading device as claimed in claim 1, wherein the driving mechanism (4) comprises a first fixing frame (41) fixed at the upper end of the bottom plate (1), the first fixing frame (41) is connected with first racks (42) in a sliding manner, and the two first racks (42) are respectively and fixedly connected with the first fixing plate (2) and the second fixing plate (31); a first driving device (43) is fixed on the first fixing frame (41), a first gear (44) is fixed on a driving shaft of the first driving device (43), and the first gear (44) is meshed with the first rack (42);
the bottom plate (1) is provided with two locking mechanisms (8), and the two locking mechanisms (8) are respectively used for limiting the driving of the two driving mechanisms (4); the locking mechanism (8) comprises a second fixing frame (81) fixed at the upper end of the bottom plate (1), a lifting rod (82) is connected onto the second fixing frame (81) in a sliding mode, the sliding direction is vertical, a clamping block (821) is arranged at the lower end of the lifting rod (82), and the clamping block (821) can be clamped between two adjacent teeth of the first rack (42); the lifting rod (82) is sleeved with a fifth spring (83), two ends of the fifth spring (83) are respectively and fixedly connected with the second fixing frame (81) and the fixture block (821), and the fixture block (821) can be clamped with two adjacent teeth of the first rack (42) under the elastic force action of the fifth spring (83).
4. The automatic crystal bar overturning and loading and unloading device as claimed in claim 3, wherein two sides of the slider (51) are respectively provided with a linkage mechanism (9), the linkage mechanism (9) comprises a fourth fixed plate (91) fixed on the bottom plate, a second rotating rod (92) is rotatably connected to the fourth fixed plate (91), a sixth gear (93) is fixed on the second rotating rod (92), a first connecting rod (94) is fixed at the upper end of the lifting rod (82), a sixth rack (941) is arranged on the first connecting rod (94), and the sixth rack (941) is engaged with the sixth gear (93); a second connecting rod (95) is fixed on one side of the sliding block (51), a seventh rack (96) is fixed at the end part of the second connecting rod (95), and the seventh rack (96) can be meshed with the sixth gear (93) in the sliding process along with the sliding block (51); in addition, in the process that the sliding block (51) slides close to the fine grinding station, the seventh rack (96) is meshed with the sixth gear (93) and can drive the first connecting rod (94) to ascend;
when the slide block (51) moves to the nearest end point away from the refining station and the crystal bar is coaxial with the three-jaw chuck (21), the clamping block (821) just leaves the first rack (42).
5. The automatic crystal bar overturning and loading and unloading device as claimed in claim 1, wherein the ejector rod (33) is provided with a first limiting block (331), the ejector rod mounting seat (32) is provided with a first limiting groove (321), the first limiting block (331) is located in the first limiting groove (321), and under the elastic force action of the first spring (34), the first limiting block (331) can be tightly attached to one end of the first limiting groove (321).
6. The automatic crystal bar overturning and loading and unloading device as claimed in claim 1, wherein a plurality of threaded holes are formed in the upper end of the sliding block (51), and the third fixing plate (561) can be respectively fixed in the plurality of threaded holes, so that the position of the third fixing plate (561) on the sliding block (51) can be adjusted, and the purpose of adjusting friction between the arc surface and the rotating shaft (54) is achieved.
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| CN202210625402.5A CN115070524B (en) | 2022-06-02 | 2022-06-02 | Crystal bar automatic overturning and feeding and discharging device and using method thereof |
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| CN202210625402.5A CN115070524B (en) | 2022-06-02 | 2022-06-02 | Crystal bar automatic overturning and feeding and discharging device and using method thereof |
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| CN108326645A (en) * | 2018-03-08 | 2018-07-27 | 朱明德 | The working method of automatically grinding device on the outside of a kind of short tube |
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