CN115064643A - Large-area perovskite solar cell module and manufacturing method thereof - Google Patents

Large-area perovskite solar cell module and manufacturing method thereof Download PDF

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Publication number
CN115064643A
CN115064643A CN202210483013.3A CN202210483013A CN115064643A CN 115064643 A CN115064643 A CN 115064643A CN 202210483013 A CN202210483013 A CN 202210483013A CN 115064643 A CN115064643 A CN 115064643A
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layer
perovskite
electrode
isolation groove
modification layer
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方主亮
林和华
葛文奇
钱家栋
牛欢欢
孙建侠
田清勇
范斌
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Kunshan Gcl Photoelectric Materials Co ltd
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    • HELECTRICITY
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Abstract

The invention discloses a large-area perovskite solar cell module and a manufacturing method thereof, and the large-area perovskite solar cell module comprises a first isolation groove which penetrates through a first electrode along the thickness direction and is formed in the first electrode, a first modification layer, a perovskite layer and a second modification layer are sequentially arranged on the first electrode, the second modification layer, the perovskite layer and the first modification layer are etched to form a second isolation groove which continuously penetrates through the second modification layer, the perovskite layer and the first modification layer along the thickness direction, a second electrode is arranged on the second modification layer, the second electrode, the second modification layer and the perovskite layer are etched to form a third isolation groove which continuously penetrates through the second electrode, the second modification layer and the perovskite layer along the thickness direction. According to the manufacturing method of the large-area perovskite solar cell module, most of perovskite can be removed, the second electrode can be completely removed, craters and edge explosion do not exist, the third isolation groove with more perfect cuts is obtained, and the stability of the large-area perovskite solar cell module is improved.

Description

Large-area perovskite solar cell module and manufacturing method thereof
Technical Field
The invention belongs to the technical field of perovskite photovoltaic module preparation, and particularly relates to a large-area perovskite solar cell module and a manufacturing method thereof.
Background
With the development of human beings, the consumption of non-renewable energy sources in modern times is faster and faster, and people are increasing the utilization of clean renewable energy sources such as solar energy, wind energy, tidal energy and the like. The perovskite solar cell as a novel solar cell has the advantages of simple preparation, low cost, high conversion efficiency, flexibility and the like, and is expected to gradually replace the current commercial silicon solar cell. At present, the efficiency of a laboratory small-area perovskite battery device exceeds 25%, the preparation of a large-size perovskite battery component still faces some challenges, and the laser process of the perovskite component is yet to be further researched. At present, laser etching, mechanical scribing, tape pasting and the like are generally adopted for processing the third isolation groove of the large-area perovskite component.
The mechanical scribing precision is easily limited, dust, harmful substances and the like which are not easy to collect are easily generated, and the yield is low; the adhesive tape has large area, so that excessive dead zone area is caused, and the adhesion and the tearing of the adhesive tape are not beneficial to industrial production, so that the third isolation groove of the large-area perovskite component is mostly etched by laser, and the laser processing of the third isolation groove is carried out by various choices, for example, a laser light source is infrared, ultraviolet, green light and the like; in addition, the difference of processing modes, such as upper surface processing, lower surface processing and the like, is that at present, green laser acts on perovskite through a first electrode so as to take away a second electrode (lower surface processing), and the processing mode is easy to generate the calculation of the affected area of edge explosion and the stability of the assembly; in addition, infrared laser is directly applied to the second electrode to complete etching (upper surface processing) of the third isolation groove, and the processing method can generate larger craters to influence subsequent processes, so that stability is influenced.
Disclosure of Invention
The invention mainly aims to provide a large-area perovskite solar cell module and a manufacturing method thereof, so as to overcome the defects in the prior art.
In order to achieve the above object, the embodiment of the present invention adopts a technical solution comprising:
the embodiment of the invention provides a large-area perovskite solar cell module which comprises a first electrode, a perovskite layer and a second electrode which are sequentially stacked; characterized in that, the solar cell module further comprises:
a first isolation groove penetrating the first electrode in a thickness direction,
a second isolation trench penetrating the perovskite layer at least in the thickness direction, and
a third isolation groove continuously penetrating the second electrode and the perovskite layer at least in the thickness direction;
and the first isolation groove, the second isolation groove and the third isolation groove are sequentially arranged along a designated direction, and the designated direction is parallel to the surface of the perovskite layer.
Further, the large-area perovskite solar cell module further comprises:
a first modification layer disposed between the first electrode and the perovskite layer,
the second modification layer is arranged between the second electrode and the perovskite layer;
the second isolation groove continuously penetrates through the first modification layer, the perovskite layer and the second modification layer along the thickness direction, and the third isolation groove continuously penetrates through the second electrode, the second modification layer and the perovskite layer along the thickness direction;
the first modification layer further comprises a first filling structure filled in the first isolation groove, and the second electrode further comprises a second filling structure filled in the second isolation groove.
Further, the groove bottom of the second isolation groove reaches the first electrode surface.
Further, the interval of the first isolation groove and the second isolation groove in the designated direction is 10-50um, and the interval of the second isolation groove and the third isolation groove in the designated direction is 10-50 um.
The embodiment of the invention also provides a manufacturing method of the large-area perovskite solar cell module, which comprises the steps of manufacturing a first electrode, a first modification layer, a perovskite layer, a second modification layer and a second electrode which are arranged in a laminated manner; the manufacturing method further comprises the following steps:
processing a first isolation groove in the first electrode, wherein the first isolation groove penetrates through the first electrode along the thickness direction,
the first electrode is sequentially provided with a first modification layer, a perovskite layer and a second modification layer, and the second modification layer, the perovskite layer and the first modification layer are subjected to physical processing and/or chemical etching, so that a second isolation groove is formed, and the second isolation groove continuously penetrates through the second modification layer, the perovskite layer and the first modification layer along the thickness direction;
and arranging a second electrode on the second modification layer, and carrying out physical processing and/or chemical etching on the second electrode, the second modification layer and the perovskite layer so as to form a third isolation groove, wherein the third isolation groove continuously penetrates through the second electrode, the second modification layer and the perovskite layer along the thickness direction.
Further, the second electrode, the second modification layer and the perovskite layer are etched by ultraviolet laser, so that a third isolation groove is formed.
Further, the preparation method of the first modification layer and the second modification layer comprises any one of magnetron sputtering, thermal evaporation, reactive plasma deposition, vapor deposition, atomic layer deposition, slit coating, spraying, blade coating or screen printing.
Further, the preparation of the perovskite layer comprises: uniformly coating the perovskite precursor solution on the first modification layer by adopting any one method of slit coating, spraying, blade coating or screen printing; and then drying and crystallizing the perovskite on the first modification layer by adopting any one or more solvent removal methods of a vacuum flash evaporation method, a wind knife method, a tunnel furnace, a hierarchical furnace drying method and a hot plate annealing method to form the perovskite layer, wherein preferably, the solvent in the perovskite precursor solution comprises any one or more of DMF, DMSO, NMP or gamma-GB.
Further, the preparation of the second electrode comprises: and preparing the second modification layer by one or more combined deposition methods of magnetron sputtering, thermal evaporation, reactive plasma deposition, vapor deposition or atomic layer deposition.
Compared with the prior art, the invention has the following beneficial effects:
according to the manufacturing method of the large-area perovskite solar cell module, most of perovskite can be removed, the second electrode can be completely removed, and the crater and the flash are not generated, so that the third isolation groove with more perfect cut is obtained, the stability of the large-area perovskite module is improved, the risk of subsequent process manufacturing is reduced, and the effective area of the cell can be calculated more accurately without the flash and the crater.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic structural view of a large-area perovskite solar cell module according to an embodiment of the present application.
Fig. 2 is a graph comparing the stability of large area perovskite solar cell modules prepared in example 2, comparative example I and comparative example 2.
Description of reference numerals: 1. the electrode comprises a first electrode, 2, a first modification layer, 3, a perovskite layer, 4, a second modification layer, 5, a second electrode, P1, a first isolation groove, P2, a second isolation groove, P3 and a third isolation groove
Detailed Description
The present invention will be more fully understood from the following detailed description, which should be read in conjunction with the accompanying drawings. Detailed embodiments of the present invention are disclosed herein; however, it is to be understood that the disclosed embodiments are merely exemplary of the invention, which can be embodied in various forms. Therefore, specific functional details disclosed herein are not to be interpreted as limiting, but merely as a basis for the claims and as a representative basis for teaching one skilled in the art to variously employ the present invention in virtually any appropriately detailed embodiment.
One aspect of an embodiment of the present invention provides a large-area perovskite solar cell module, including a first electrode, a perovskite layer, and a second electrode, which are sequentially stacked; characterized in that, the solar cell module further comprises:
a first isolation groove penetrating the first electrode in a thickness direction,
a second isolation trench penetrating the perovskite layer at least in the thickness direction, and
a third isolation groove continuously penetrating the second electrode and the perovskite layer at least in the thickness direction;
and the first isolation groove, the second isolation groove and the third isolation groove are sequentially arranged along a specified direction, and the specified direction is parallel to the surface of the perovskite layer.
In some preferred embodiments, the large area perovskite solar cell module further comprises:
a first modification layer disposed between the first electrode and the perovskite layer,
the second modification layer is arranged between the second electrode and the perovskite layer;
the second isolation groove continuously penetrates through the first modification layer, the perovskite layer and the second modification layer along the thickness direction, and the third isolation groove continuously penetrates through the second electrode, the second modification layer and the perovskite layer along the thickness direction;
the first modification layer further comprises a first filling structure filled in the first isolation groove, and the second electrode further comprises a second filling structure filled in the second isolation groove.
In some preferred embodiments, the groove bottom of the second isolation groove reaches the first electrode surface.
In some preferred embodiments, the distance between the first isolation groove and the second isolation groove in the designated direction is 10-50um, and the distance between the second isolation groove and the third isolation groove in the designated direction is 10-50 um.
Another aspect of the embodiment of the invention provides a method for manufacturing a large-area perovskite solar cell module, which includes the steps of manufacturing a first electrode, a first modification layer, a perovskite layer, a second modification layer and a second electrode which are arranged in a stacked manner; the manufacturing method further comprises the following steps:
processing a first isolation groove in the first electrode, wherein the first isolation groove penetrates through the first electrode along the thickness direction,
the first electrode is sequentially provided with a first modification layer, a perovskite layer and a second modification layer, and the second modification layer, the perovskite layer and the first modification layer are subjected to physical processing and/or chemical etching, so that a second isolation groove is formed, and the second isolation groove continuously penetrates through the second modification layer, the perovskite layer and the first modification layer along the thickness direction;
and arranging a second electrode on the second modification layer, and carrying out physical processing and/or chemical etching on the second electrode, the second modification layer and the perovskite layer so as to form a third isolation groove, wherein the third isolation groove continuously penetrates through the second electrode, the second modification layer and the perovskite layer along the thickness direction.
In some preferred embodiments, the second electrode, the second modification layer, and the perovskite layer are etched using an ultraviolet laser, thereby forming a third isolation trench.
In some preferred embodiments, the etching method of the first and second isolation grooves may include any one of laser etching, chemical etching, mechanical scribing, and the like, but is not limited thereto.
In some preferred embodiments, the preparation method of the first modification layer and the second modification layer may include any one of magnetron sputtering, thermal evaporation, reactive plasma deposition, vapor deposition, atomic layer deposition, slit coating, spray coating, blade coating, screen printing, and the like, but is not limited thereto.
In some preferred embodiments, the preparation of the perovskite layer comprises: uniformly coating the perovskite precursor solution on the first modification layer by adopting any one method of slit coating, spraying, blade coating or screen printing; and then adopting any one or more solvent removal methods of a vacuum flash evaporation method, an air knife method, a tunnel furnace, a hierarchical furnace drying method and a hot plate annealing method to dry and crystallize the perovskite on the first modification layer so as to form the perovskite layer.
In some more preferred embodiments, the solvent in the perovskite precursor solution may include, but is not limited to, any one or combination of DMF, DMSO, NMP, γ -GB, and the like.
In some preferred embodiments, the preparing of the second electrode comprises: the second modification layer is prepared by adopting one or more combined deposition methods of magnetron sputtering, thermal evaporation, reactive plasma deposition, vapor deposition or atomic layer deposition.
In some preferred embodiments, the first electrode is made of conductive glass.
In some more preferred embodiments, the conductive glass may include, but is not limited to, FTO glass or ITO glass.
In some preferred embodiments, the second electrode is a transparent electrode of metal oxide.
In some more preferred embodiments, the metal oxide may include any one or a combination of ITO, IWO, FTO, IZO, and the like, but is not limited thereto.
In some preferred embodiments, the first and second modifying layers are one of an electron transporting layer and a hole transporting layer, respectively.
In some more preferred embodiments, the electron transport layer may comprise PCBM, TiO 2 、SnO 2 、ZnO、Nb 2 O 5, etc In (1)Any one or a combination of more than one, but not limited thereto.
In some more preferred embodiments, the hole transport layer may include NiO, Spiro-OMeTAD, CuGaO 2 CuSCN, P3HT, PEDOT: PSS, and the like, but is not limited thereto.
In some preferred embodiments, the perovskite layer may have a structural formula including MAPbI 3 、FAPbI 3 、FAMAPbI 3 、 FACsPbI 3 、FAMACsPbI 3 (wherein MA is CH) 3 NH 3 FA is CH (NH) 2 ) 2 ) And the like, without being limited thereto.
According to the preparation method of the large-area perovskite solar cell module, provided by the embodiment of the invention, the second electrode and the perovskite layer are processed by ultraviolet light for two times, most of perovskite can be removed, the second electrode can be completely removed, and craters and explosion edges do not exist, so that a third isolation groove with more perfect cut is obtained, and the stability of the large-area perovskite module is improved.
The technical solution, its implementation and principles, etc. will be further explained as follows.
Example 1
The large-area perovskite solar cell module comprises a first electrode 1, a first modification layer 2, a perovskite layer 3, a second modification layer 4 and a second electrode 5 which are sequentially stacked, as shown in fig. 1; in this embodiment, the large-area perovskite solar cell module further includes a first isolation trench P1, a second isolation trench P2, and a third isolation trench P3, the first isolation trench P1 penetrates the first electrode 1 along the thickness direction, the second isolation trench P2 continuously penetrates the first modification layer 2, the perovskite layer 3, and the second modification layer 4 along the thickness direction, and the third isolation trench P3 continuously penetrates the second electrode 5, the second modification layer 4, and the perovskite layer 3 along the thickness direction; the first isolation groove P1, the second isolation groove P2, and the third isolation groove P3 are sequentially arranged in a predetermined direction parallel to the surface of the perovskite layer 3.
In this embodiment, the first modification layer 2 further includes a first filling structure filled in the first isolation trench P1, and the second electrode 5 further includes a second filling structure filled in the second isolation trench P2.
In the specific implementation process, the groove bottom of the second isolation groove P2 reaches the surface of the first electrode 1, the distance between the first isolation groove P1 and the second isolation groove P2 in the designated direction is 10-50um, and the distance between the second isolation groove P2 and the third isolation groove P3 in the designated direction is 10-50 um.
In specific implementation, the first electrode 1 is made of conductive glass, the conductive glass may be FTO glass or ITO glass, and in this embodiment, the conductive glass is FTO.
The second electrode 5 is a transparent electrode made of metal oxide, the metal oxide may be any one or combination of ITO, IWO, FTO, IZO, and the like, and in this embodiment, the transparent electrode made of IWO is used as the second electrode 5.
The first modification layer 2 and the second modification layer 4 are respectively one of an electron transport layer and a hole transport layer, in this embodiment, the first modification layer 2 is a hole transport layer, and the second modification layer 4 is an electron transport layer; wherein the electron transport layer can be PCBM or TiO 2 、SnO 2 、ZnO、Nb 2 O 5 And the like, the electron transport layer in this embodiment is PCBM; the hole transport layer can be NiOx, Spiro-OMeTAD, CuGaO 2 CuSCN, P3HT, PEDOT: PSS, etc., the hole transport layer in this embodiment is NIOX.
The perovskite layer 3 may have the formula MAPbI 3 、FAPbI 3 、FAMAPbI 3 、FACsPbI 3 、FAMACsPbI 3 (wherein MA is CH) 3 NH 3 FA is CH (NH) 2 ) 2 ) Etc. of
In this example, the perovskite layer 3 has the structural formula of famaspbi 3
Example 2
The embodiment provides a method for manufacturing a large-area perovskite solar cell module in embodiment 1, which includes:
a plurality of first isolation grooves P1 are etched on the first electrode 1 by any one of laser etching, chemical etching, mechanical scribing and the like;
preparing a first modification layer 2 on the first electrode 1 by any one of magnetron sputtering, thermal evaporation, reactive plasma deposition, vapor deposition, atomic layer deposition, slit coating, spraying, blade coating, screen printing and the like;
uniformly coating a solvent on the first modification layer 2 by adopting a perovskite precursor solution of DMF (dimethyl formamide) by adopting any one of slit coating, spraying, blade coating or screen printing; then adopting any one or more solvent removal methods of a vacuum flash evaporation method, a wind knife method, a tunnel furnace, a hierarchical furnace drying method and a hot plate annealing method to dry and crystallize perovskite on the first modification layer 2 so as to form a perovskite layer 3;
preparing a second modification layer 4 on the perovskite layer 3 by any one method of magnetron sputtering, thermal evaporation, reactive plasma deposition, vapor deposition, atomic layer deposition, slit coating, spraying, blade coating, screen printing and the like;
etching a plurality of second isolation grooves P2 on the second modification layer 4, the perovskite layer 3 and the first modification layer 1 by any one of laser etching, chemical etching, mechanical scribing and the like;
preparing a second electrode 5 on the second modification layer 4 by adopting one or more combined deposition methods of magnetron sputtering, thermal evaporation, reactive plasma deposition, vapor deposition or atomic layer deposition;
and processing the upper surfaces of the second electrode 5, the second modification layer 4 and the perovskite layer 3, and etching twice by using ultraviolet laser at the same position under the laser conditions of 200KHZ-600KHZ, 500mm/s-1200mm/s and 0.2W-0.4W to process a plurality of third isolation grooves P3.
Comparative example 1
The first 5 layers and the P1P2 were fabricated in the same manner as in example 1, by processing the lower surfaces of the second electrode 5, the second modification layer 4 and the perovskite layer 3, and etching once with green laser at the P3 position under the laser conditions of 50KHZ-80KHZ, 500mm/s-1200mm/s, and 0.18W-0.32W (since green light is different from ultraviolet light, the effect of etching once with green light is better than that of etching twice, comparative example 1 employs processing and etching once with green light, and similarly, processing of the lower surface with green light is better than that of processing of the upper surface), so as to fabricate a plurality of third isolation trenches P3.
Comparative example 2
The first 5 layers and the P1P2 are fabricated by the same method as in example 1, wherein the second electrode 5, the second modification layer 4 and the perovskite layer 3 are etched once by using infrared laser under the laser conditions of 40KHZ-60KHZ, 500mm/s-1200mm/s and 2W-4W at the position P3 (the infrared light and the ultraviolet light are different, and the effect of the infrared light etching is better than that of the infrared light etching twice), so that the comparative example 2 employs the infrared upper surface processing and etching once, and the first electrode 1 absorbs the infrared light, so that the infrared light cannot be processed by the lower surface processing), so as to process a plurality of third isolation grooves P3.
The stability of the large-area perovskite solar cell module prepared in example 2, comparative example 1 and comparative example 2 is compared, the comparison result is shown in fig. 2, as can be seen from fig. 2, MPPT is performed on example 2 and comparative example 1 and comparative example 2, power stability tracking is performed, and it can be seen that the initial efficiency and stability of example 2 are better than those of comparative example 1 and comparative example 2 under the same conditions, so that the stability of the perovskite module is improved by adopting the scheme of ultraviolet laser.
In addition, the inventors of the present invention have also made experiments with other materials, process operations, and process conditions described in the present specification with reference to the above examples, and have obtained preferable results.
While the invention has been described with reference to illustrative embodiments, it will be understood by those skilled in the art that various other changes, omissions and/or additions may be made and substantial equivalents may be substituted for elements thereof without departing from the spirit and scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from its scope. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed for carrying out this invention, but that the invention will include all embodiments falling within the scope of the appended claims. Moreover, unless specifically stated any use of the terms first, second, etc. do not denote any order or importance, but rather the terms first, second, etc. are used to distinguish one element from another.

Claims (10)

1. A large-area perovskite solar cell module comprises a first electrode, a perovskite layer and a second electrode which are sequentially stacked; characterized in that, the solar cell module further comprises:
a first isolation groove penetrating the first electrode in a thickness direction,
a second isolation trench penetrating the perovskite layer at least in the thickness direction, and
a third isolation groove continuously penetrating the second electrode and the perovskite layer at least in the thickness direction;
and the first isolation groove, the second isolation groove and the third isolation groove are sequentially arranged along a designated direction, and the designated direction is parallel to the surface of the perovskite layer.
2. The large area perovskite solar cell assembly of claim 1, further comprising:
a first modification layer disposed between the first electrode and the perovskite layer,
the second modification layer is arranged between the second electrode and the perovskite layer;
the second isolation groove continuously penetrates through the first modification layer, the perovskite layer and the second modification layer along the thickness direction, and the third isolation groove continuously penetrates through the second electrode, the second modification layer and the perovskite layer along the thickness direction;
the first modification layer further comprises a first filling structure filled in the first isolation groove, and the second electrode further comprises a second filling structure filled in the second isolation groove.
3. The large area perovskite solar cell module as claimed in claim 1 or 2, wherein: the groove bottom of the second isolation groove reaches the surface of the first electrode.
4. The large area perovskite solar cell assembly of claim 1, wherein:
the interval of the first isolation groove and the second isolation groove in the designated direction is 10-50um, and the interval of the second isolation groove and the third isolation groove in the designated direction is 10-50 um.
5. A manufacturing method of a large-area perovskite solar cell module comprises the steps of manufacturing a first electrode, a first modification layer, a perovskite layer, a second modification layer and a second electrode which are arranged in a stacked mode; the manufacturing method is characterized by further comprising the following steps:
processing a first isolation groove in the first electrode, wherein the first isolation groove penetrates through the first electrode along the thickness direction,
the first modification layer, the perovskite layer and the second modification layer are sequentially arranged on the first electrode, and the second modification layer, the perovskite layer and the first modification layer are subjected to physical processing and/or chemical etching, so that a second isolation groove is formed, and the second isolation groove continuously penetrates through the second modification layer, the perovskite layer and the first modification layer along the thickness direction;
and arranging a second electrode on the second modification layer, and carrying out physical processing and/or chemical etching on the second electrode, the second modification layer and the perovskite layer so as to form a third isolation groove, wherein the third isolation groove continuously penetrates through the second electrode, the second modification layer and the perovskite layer along the thickness direction.
6. The method of fabricating a large area perovskite solar cell module as claimed in claim 5, wherein: and etching the second electrode, the second modification layer and the perovskite layer by adopting ultraviolet laser so as to form a third isolation groove.
7. The method of fabricating a large area perovskite solar cell module as claimed in claim 6, wherein: and etching the second electrode, the second modification layer and the perovskite layer twice at the same position by using ultraviolet laser under the laser conditions of 200KHZ-600KHZ, 500mm/s-1200mm/s and 0.2W-0.4W.
8. The method of fabricating a large area perovskite solar cell module as claimed in claim 5, wherein: the preparation method of the first modification layer and the second modification layer comprises any one of magnetron sputtering, thermal evaporation, reactive plasma deposition, vapor deposition, atomic layer deposition, slit coating, spraying, blade coating or screen printing.
9. The method of fabricating a large area perovskite solar cell module as claimed in claim 5 wherein the preparation of the perovskite layer comprises: uniformly coating the perovskite precursor solution on the first modification layer by adopting any one method of slit coating, spraying, blade coating or screen printing; and then drying and crystallizing the perovskite on the first modification layer by adopting any one or more solvent removal methods of a vacuum flash evaporation method, a wind knife method, a tunnel furnace, a hierarchical furnace drying method and a hot plate annealing method to form the perovskite layer, wherein preferably, the solvent in the perovskite precursor solution comprises any one or more of DMF, DMSO, NMP or gamma-GB.
10. The method of fabricating a large area perovskite solar cell module as claimed in claim 5 wherein the preparation of the second electrode comprises: and preparing the second modification layer by one or more combined deposition methods of magnetron sputtering, thermal evaporation, reactive plasma deposition, vapor deposition or atomic layer deposition.
CN202210483013.3A 2022-05-05 2022-05-05 Large-area perovskite solar cell module and manufacturing method thereof Pending CN115064643A (en)

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