CN115060982A - Active near-field composite probe, detection device and calibration method of probe - Google Patents
Active near-field composite probe, detection device and calibration method of probe Download PDFInfo
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- CN115060982A CN115060982A CN202210573694.2A CN202210573694A CN115060982A CN 115060982 A CN115060982 A CN 115060982A CN 202210573694 A CN202210573694 A CN 202210573694A CN 115060982 A CN115060982 A CN 115060982A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/0864—Measuring electromagnetic field characteristics characterised by constructional or functional features
- G01R29/0878—Sensors; antennas; probes; detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
Abstract
The application relates to an active near-field composite probe, a detection device and a calibration method of the probe, wherein the probe comprises: a wiring layer; the signal transmission layer is arranged on the wiring layer, and is provided with a detection coil, a first transmission part and a second transmission part, wherein the detection coil is used for detecting an electromagnetic field of a piece to be detected so as to acquire a radio frequency signal; the first shielding layer is arranged on the signal transmission layer, a first amplifying circuit, a second amplifying circuit, a first output port and a second output port are arranged on the first shielding layer, wherein the input ends of the first amplifying circuit and the second amplifying circuit are respectively connected with the detection coil and used for receiving the radio-frequency signals, and the first output port and the second output port are used for outputting the radio-frequency signals to the analyzer after amplification processing. The active near-field composite probe provided by the application can be used for realizing high-sensitivity electromagnetic field measurement.
Description
Technical Field
The application relates to the technical field of electromagnetic detection, in particular to an active near-field composite probe, an active near-field detection device and a calibration method of the active near-field composite probe.
Background
In order to solve the problem of locating a transmission source in a complex electromagnetic environment, the IEC 61967 standard proposes using a probe to perform near-field scanning measurement. However, as the integration degree and frequency of the chip are higher, and the power consumption, area and voltage are smaller, the electromagnetic environment of the chip is more and more complex, and the radiated electromagnetic interference is weaker and weaker, which brings certain difficulty to detection and positioning. In general, the amplitude of the captured radiation signal is usually small, and in special scenarios it is necessary to detect both electric and magnetic field information.
Disclosure of Invention
In view of the above, it is desirable to provide an active near-field composite probe, an active near-field detection device, and a calibration method for an active near-field composite probe, which can simultaneously detect an electromagnetic field.
In a first aspect, an embodiment of the present application provides an active near-field composite probe, including:
the wiring layer is provided with power transmission wiring;
the signal transmission layer is arranged on the wiring layer, and is provided with a detection coil, a first transmission part and a second transmission part, wherein the detection coil is used for detecting an electromagnetic field of a piece to be detected so as to acquire a radio frequency signal;
the first shielding layer is arranged on the signal transmission layer, a first amplifying circuit, a second amplifying circuit, a first output port and a second output port are arranged on the first shielding layer, wherein the input end of the first amplifying circuit is connected with the first end of the detection coil, the output end of the first amplifying circuit is connected with the first output port through the first transmission component, the input end of the second amplifying circuit is connected with the second end of the detection coil, the output end of the second amplifying circuit is connected with the second output port through the second transmission component, the first amplifying circuit and the second amplifying circuit are respectively used for receiving the radio-frequency signals for amplification, and the first output port and the second output port are used for outputting the radio-frequency signals after amplification to the analyzer.
In one embodiment, the active near field composite probe is provided with a plurality of first coaxial through holes, and the plurality of first coaxial through holes are arranged on the peripheral sides of the first amplifying circuit and the second amplifying circuit at intervals.
In one embodiment, the plurality of first coaxial through holes are symmetrically arranged on the peripheral sides of the first amplifying circuit and the second amplifying circuit.
In one embodiment, the first transmission section includes a first microstrip line, the second transmission section includes a second microstrip line, and the first microstrip line and the second microstrip line are symmetrically disposed.
In one embodiment, the active near field composite probe is further provided with a via array, the via array includes a plurality of second coaxial through holes arranged at intervals, and each second coaxial through hole is arranged at an interval with the first transmission component and the second transmission component respectively.
In one embodiment, the active near-field composite probe further includes a plurality of third coaxial through holes, and the third coaxial through holes are arranged at intervals on the peripheral side edge of the first shielding layer and used for shielding external interference signals.
In one embodiment, the first amplifying circuit includes: the input end of the first low-noise amplifier is connected with the first end of the detection coil, and the output end of the first low-noise amplifier is connected with the first output port through the first transmission component;
the second amplification circuit includes: and the input end of the second low-noise amplifier is connected with the second end of the detection coil, and the output end of the second low-noise amplifier is connected with the second output port through the second transmission component.
In one embodiment, the first amplifying circuit further includes:
the first power supply conversion circuit is used for receiving power supply voltage and carrying out voltage drop processing on the power supply voltage;
the first bias control circuit is respectively connected with the first power supply conversion circuit and the power supply end of the first low-noise amplifier and is used for providing bias voltage for the first low-noise amplifier according to the power supply voltage after voltage drop;
the second amplification circuit further includes:
the second power supply conversion circuit is used for receiving the power supply voltage and carrying out voltage drop processing on the power supply voltage;
and the second bias control circuit is respectively connected with the second power supply conversion circuit and the power supply end of the second low-noise amplifier and is used for providing bias voltage for the second low-noise amplifier according to the power supply voltage after voltage drop.
In one embodiment, the first amplifying circuit further includes: the first decoupling capacitor is connected with the power transmission wiring and used for receiving the power voltage and filtering the received power voltage so as to output the power voltage to the first power conversion circuit;
the second amplification circuit further includes: and the second decoupling capacitor is connected with the power transmission wiring and used for receiving the power voltage and filtering the received power voltage so as to output the power voltage to the second power conversion circuit.
In one embodiment, the probe further comprises: and the wiring layer is arranged on the second shielding layer.
Above-mentioned active near field composite probe, including routing layer, signal transmission layer, first shielding layer, through set up detecting coil on the signal transmission layer, can measure in order to obtain radiofrequency signal the electromagnetic field of awaiting measuring the piece, and pass through first amplifier circuit and the second amplifier circuit of first shielding layer are right radiofrequency signal carries out amplification processing, first transmission part and the second transmission part on signal transmission layer will amplify the back radiofrequency signal transmission extremely the first output port and the second output port of first shielding layer, so that first output port with the second output port will amplify the back radiofrequency signal exports to the analysis appearance, can realize surveying when electromagnetic field signal and carry out amplification processing and analysis to electromagnetic field signal, improve the application scope and the detectivity of probe.
In a second aspect, an embodiment of the present application provides an active near-field detection apparatus, including:
an active near field composite probe as claimed in any preceding embodiment;
and the analyzer is respectively connected with the first output port and the second output port, and is used for receiving the first radio-frequency signal output by the first output port and the second radio-frequency signal output by the second output port, analyzing the first radio-frequency signal and the second radio-frequency signal to obtain a parameter factor of the electromagnetic field, wherein the parameter factor is used for calibrating the active near-field composite probe.
According to the active near field detection device, the electromagnetic field signal of the piece to be detected is detected through the active near field composite probe and amplified to output a radio frequency signal, the output port of the active near field composite probe is connected with the output port of the analyzer, the radio frequency signal output by the probe is received, the radio frequency signal can be analyzed, parameter factors related to the electromagnetic field to be detected are obtained, the parameter factors can be corrected according to the detection performance of the probe, and the detection accuracy of the probe is improved.
In a third aspect, there is provided a calibration method for an active near-field composite probe, applied to the active near-field detection apparatus according to the foregoing embodiments, where the probe includes a first output port and a second output port, and is respectively used for outputting a first radio frequency signal and a second radio frequency signal to an analyzer, and the method includes:
applying a near field to the probe to obtain a first radio frequency signal and a second radio frequency signal of the near field of the active near field composite probe under a preset angle condition;
constructing a transfer model of the active near-field composite probe according to the first radio frequency signal, the second radio frequency signal and the calibration matrix;
and calculating to obtain parameter factors of the calibration matrix according to the transfer model, and calibrating the active near-field composite probe according to the parameter factors.
According to the calibration method of the active near-field composite probe, the near field is applied to the probe, the first radio frequency signal and the second radio frequency signal of the near field under a preset angle are obtained, the transmission model of the probe is constructed according to the first radio frequency signal and the second radio frequency signal, the parameter factor of the calibration matrix can be calculated according to the transmission model, the effect of calibrating the detection performance of the probe according to the parameter factor is achieved, and the detection accuracy of the probe is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments or the conventional technologies of the present application, the drawings used in the descriptions of the embodiments or the conventional technologies will be briefly introduced below, it is obvious that the drawings in the following descriptions are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of an embodiment of a routing layer;
FIG. 2 is a schematic diagram of a signal transmission layer according to an embodiment;
FIG. 3 is a schematic diagram of a first shielding layer according to one embodiment;
FIG. 4 is a schematic diagram of a second shield layer in one embodiment;
FIG. 5 is a flowchart illustrating a calibration method of the active near-field composite probe according to an embodiment.
Detailed Description
To facilitate an understanding of the present application, the present application will now be described more fully with reference to the accompanying drawings. Embodiments of the present application are given in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
It is to be understood that the terms "first", "second", and the like, as used herein, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit to a number of technical features being indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. The terms "first," "second," and the like may be used herein to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish one element from another. Further, in the description of the present application, "a plurality" means at least two, e.g., two, three, etc., unless explicitly specified otherwise. In the description of the present application, "a number" means at least one, such as one, two, etc., unless specifically limited otherwise.
Spatial relational terms, such as "under," "below," "under," "over," and the like may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements or features described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "under" can encompass both an orientation of above and below. In addition, the device may also include additional orientations (e.g., rotated 90 degrees or other orientations) and the spatial descriptors used herein interpreted accordingly.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or be connected to the other element through intervening elements. Further, "connection" in the following embodiments is understood to mean "electrical connection", "communication connection", or the like, if there is a transfer of electrical signals or data between the connected objects.
As used herein, the singular forms "a", "an" and "the" may include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises/comprising," "includes" or "including," etc., specify the presence of stated features, integers, steps, operations, components, parts, or combinations thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.
In one embodiment, the present application provides an active near field composite probe, which includes a first shielding layer 10, a signal transmission layer 20, and a routing layer 30.
The routing layer 30 has a structure shown in fig. 1, and a power transmission line (not shown in the figure) is disposed on the routing layer 30, and the power transmission line is used for acquiring an external power voltage and forming a power supply path to supply power to the probe.
The signal transmission layer 20 is arranged on the wiring layer 30, and the signal transmission layer 20 is provided with a first transmission part 201, a second transmission part 202 and a detection coil 203, as shown in fig. 2, wherein the detection coil 203 is used for detecting an electromagnetic field of a to-be-detected object to obtain a radio frequency signal.
The detection coil 203 is a composite coil, and can be used for detecting an electric field signal and a magnetic field signal to obtain a corresponding radio frequency signal, where the radio frequency signal is output to the output end of the probe through the first transmission component 201 and the second transmission component 202.
The first shielding layer 10 is configured as shown in fig. 3, the first shielding layer 10 is disposed on the signal transmission layer 20, and the first shielding layer 10 is disposed with a first amplifying circuit F1 and a second amplifying circuit F2, a first output port (not shown in the figure) and a second output port (not shown in the figure).
With continued reference to fig. 2 and fig. 3, an input terminal of the first amplifying circuit F1 is connected to the first end 2031 of the detection coil, and is configured to receive the radio frequency signal acquired by the detection coil 203 and amplify the radio frequency signal. The output end of the first amplifying circuit F1 is connected to the first output port via the first transmission component 201, and is configured to output and transmit the amplified radio frequency signal to the first output port, and output the radio frequency signal from the first output port to the analyzer, so that the analyzer analyzes the detected electromagnetic field according to the radio frequency signal.
The input end of the second amplifying circuit F2 is connected to the second end 2032 of the detection coil, and is configured to receive the radio frequency signal acquired by the detection coil 203 and amplify the radio frequency signal. The output end of the second amplifying circuit F2 is connected to the second output port via the second transmission component 202, and is configured to output and transmit the amplified radio frequency signal to the second output port, and output the amplified radio frequency signal from the second output port to an analyzer, so that the analyzer analyzes the detected electromagnetic field according to the radio frequency signal.
The analyzer can be a spectrum analyzer or a network analyzer, and is further configured to perform comprehensive analysis according to the radio frequency signals output by the first output port and the second output port, and calibrate the detection performance of the probe according to an analysis result.
The active near-field composite probe of the embodiment comprises a wiring layer, a signal transmission layer and a first shielding layer, wherein a detection coil is arranged on the signal transmission layer, the electromagnetic field of the piece to be measured can be measured to obtain a radio frequency signal, the radio frequency signal is amplified through the first amplifying circuit and the second amplifying circuit of the first shielding layer, the first transmission part and the second transmission part of the signal transmission layer transmit the amplified radio frequency signal to the first output port and the second output port of the first shielding layer, so that the first output port and the second output port output the amplified radio frequency signal to an analyzer, the electromagnetic field signal can be detected simultaneously, amplified and analyzed, and the application range and detection sensitivity of the probe are improved.
In one embodiment, referring to fig. 4, the probe further includes a second shielding layer 40, and the routing layer 30 is disposed on the second shielding layer 40, that is, the first shielding layer 10, the signal transmission layer 20, the routing layer 30, and the second shielding layer 40 are sequentially arranged.
Wherein, the first shielding layer 10 and the second shielding layer 40 can be used for shielding external interference signals.
In one embodiment, with continued reference to fig. 2 and 3, the first amplifying circuit F1 includes: an input end of the first low noise amplifier 101 is connected to the first end 2031 of the detection coil, and is configured to receive the radio frequency signal detected by the detection coil 203 and amplify the radio frequency signal, an output end of the first low noise amplifier 101 is configured to output the amplified radio frequency signal, and the amplified radio frequency signal is transmitted to the first output port through the first transmission component 201.
The second amplifying circuit F2 includes: an input end of the second low noise amplifier 102 is connected to the second end 2032 of the detection coil, and is configured to receive the radio frequency signal detected by the detection coil 203 and amplify the radio frequency signal, an output end of the second low noise amplifier 102 is configured to output the amplified radio frequency signal, and the amplified radio frequency signal is transmitted to the second output port through the second transmission component 202.
Wherein, the first low noise amplifier 101 and the second low noise amplifier 102 can amplify weak radio frequency signals by 14 dB.
In this embodiment, the first low-noise amplifier and the second low-noise amplifier are arranged on the first shielding layer of the probe, so that the radio-frequency signal detected by the detection coil can be amplified, and the detection precision and sensitivity of the probe can be improved.
In one embodiment, with continued reference to fig. 1-4, the probe further includes a power receiving port E for receiving an external power voltage. For example, the external power supply voltage may be a 12V dc voltage.
The first amplifying circuit F1 further includes a first decoupling capacitor 109 connected to the power transmission trace, and configured to receive the power voltage input from the port E, and perform filtering processing on the received power voltage, so as to eliminate ripples in the direct-current voltage, and output a filtered voltage.
The second amplifying circuit F2 further includes: and a second decoupling capacitor 110, connected to the power transmission line, and configured to receive the power voltage input from the port E, perform filtering processing on the received power voltage, so as to eliminate ripples in the dc voltage, and output a filtered voltage.
In this embodiment, the first decoupling capacitor and the second decoupling capacitor are respectively provided in the first amplifying circuit and the second amplifying circuit, so that the power supply voltage can be filtered.
In one embodiment, the first amplifying circuit F1 further includes: a first power conversion circuit 107 and a first bias control circuit 103.
The first power conversion circuit 107 is connected to the first decoupling capacitor 109, and is configured to receive the filtered power voltage and perform voltage drop processing on the filtered power voltage. For example, a 12V dc voltage may be converted to 8V or 3.3V.
And a first bias control circuit 103, connected to the first power conversion circuit 107 and a power supply terminal of the first low noise amplifier 101, respectively, and configured to provide a bias voltage to the first low noise amplifier 101 according to the power supply voltage after voltage drop. The first low noise amplifier 101 operates at a bias voltage provided by the first bias circuit 103.
The second amplifying circuit F2 further includes: and a second power conversion circuit 108, connected to the second decoupling capacitor 110, for receiving the filtered power voltage and performing voltage drop processing on the power voltage. The first power conversion circuit 107 and the second power conversion circuit 108 may respectively include a Low Dropout Regulator (LDO).
And a second bias control circuit 104, connected to the second power conversion circuit 108 and a power supply terminal of the second low noise amplifier 102, respectively, for providing a bias voltage to the second low noise amplifier 102 according to the power supply voltage after voltage drop. The second low noise amplifier 102 operates at a bias voltage provided by the second bias circuit 104.
In this embodiment, it is provided that a power conversion circuit and a bias control circuit are respectively provided in the first amplification circuit and the second amplification circuit, and bias voltages corresponding to the low noise amplifiers can be generated and respectively input to the first low noise amplifier and the second low noise amplifier, so that the first low noise amplifier and the second low noise amplifier operate under the condition of power supply of the bias voltages.
In one embodiment, with reference to fig. 1 to 4, a plurality of first coaxial through holes a are formed in the active near field composite probe, and the first coaxial through holes a are spaced and symmetrically disposed around the first amplifying circuit and the second amplifying circuit.
In the transmission process, a plurality of first coaxial through holes a are symmetrically arranged at intervals on the peripheral sides of the first amplifying circuit and the second amplifying circuit, so that a coaxial through hole array can be adopted to eliminate a resonance signal at the joint of the first shielding layer 10 and the signal transmission layer 20.
In one embodiment, referring to fig. 2, the first transmission unit 201 includes a first microstrip line 2011 and a first coplanar waveguide 2012 for transmitting the rf signal. The first microstrip line 2011 and the first coplanar waveguide 2012 are connected by a coaxial via D1. A first SMA connector is welded to the first coplanar waveguide 2012, and an output port of the first SMA connector is the first output port.
The second transmission section 202 includes a second microstrip line 2021 and a second coplanar waveguide line 2022, and is configured to transmit the radio frequency signal. The second microstrip line 2021 and the second coplanar waveguide line 2022 are connected by a coaxial via D2. A second SMA connector is welded on the second surface waveguide line 2022, and an output port of the second SMA connector is the second output port.
The first microstrip line 2011 and the second microstrip line 2021 are symmetrically disposed, and the characteristic impedances of the first transmission part 201 and the second transmission part 202 may be respectively designed to be 50 ohms.
In one embodiment, with continuing reference to fig. 1 to fig. 4, the active near-field composite probe is further provided with a via array, where the via array includes a plurality of second coaxial through holes B arranged at intervals, and each of the second coaxial through holes B is arranged at an interval with the first transmission component 201 and the second transmission component 202, respectively.
As can be seen in fig. 2, the plurality of second coaxial through holes B are uniformly distributed on the peripheral sides of the first transmission member 201 and the second transmission member 202, and are spaced from the first transmission member 201 and the second transmission member 202, and the plurality of second coaxial through holes B are used for improving the transmission performance of the transmission structure.
In one embodiment, with continuing reference to fig. 1 to fig. 4, the active near-field probe further includes a plurality of third coaxial through holes C, and the plurality of third coaxial through holes C are uniformly spaced at peripheral side edges of the first shielding layer 10, the signal transmission layer 20, the routing layer 30, and the second shielding layer 40, and can be used for shielding external interference signals.
In one embodiment, the present application provides an active near-field detection device comprising: an active near field composite probe and analyser as claimed in any preceding embodiment. The analyzer is respectively connected with a first output port and a second output port of the probe, and is used for receiving the first radio-frequency signal output by the first output port and the second radio-frequency signal output by the second output port, and analyzing the first radio-frequency signal and the second radio-frequency signal to obtain the parameter factor of the electromagnetic field. The parameter factor is related to the transmission performance of the probe and can be used for calibrating the probe.
The analyzer may be a network analyzer and a spectrum analyzer. And connecting the first output port and the second output port of the SMA connector of the active near-field probe to the input end of the spectrum analyzer, namely measuring the magnetic radiation signal emitted by the measured object by using the detection part of the probe, and analyzing to obtain the magnitude of the electromagnetic field signal of the measured object. The network analyzer is respectively connected with the standard microstrip line and the first output port and the second output port of the active near-field probe, the magnetic field near-field probe is used for detecting a magnetic field signal generated above the standard microstrip line, and the probe can be calibrated by using the obtained detection result.
In this embodiment, the active near field composite probe detects an electromagnetic field signal of a to-be-detected element and amplifies the electromagnetic field signal to output a radio frequency signal, the analyzer is connected to an output port of the active near field composite probe and receives the radio frequency signal output by the probe, the radio frequency signal can be analyzed, a parameter factor related to the to-be-detected electromagnetic field is obtained, and the detection performance of the probe can be calibrated according to the obtained parameter factor.
The active near-field composite probe can improve detection sensitivity, but cannot realize complete symmetry due to defects of process and circuit design, so that detection frequency response, isolation and other parameters of the designed active near-field probe are reduced. It is therefore desirable to introduce a de-embedding method for an active near-field probe to correct for errors caused by asymmetric transmission.
In one embodiment, as shown in fig. 5, there is further provided a calibration method for an active near-field composite probe, which is applied to the active near-field detection apparatus according to the foregoing embodiments, and the probe includes a first output port and a second output port, and is used for outputting a first radio frequency signal and a second radio frequency signal to an analyzer, respectively. The first output port is configured to be connected to a first input end of an analyzer, the second output port is connected to a second input end of the analyzer, the detection coil 230 of the probe forms a first transmission link with the first output port and the first input end, the second output port is connected to a second input end of the analyzer, and the detection coil 230 of the probe forms a second transmission link with the second output port and the second input end.
Wherein the method comprises steps 502-506:
The preset angle can be an included angle between the probe and the direction of the electric field or the direction of the magnetic field to be detected, the angle is between 0 degree and 180 degrees and at least comprises a first angle and a second angle, and the first angle and the second angle are different.
Applying a near field to the probe at the first angle to obtain a first radio frequency signal output by a first output port of the probe, a second radio frequency signal output by a second output port of the probe, and a first characteristic parameter, wherein the first characteristic parameter may be characteristic information such as strength and direction of an electric field and a magnetic field at the first angle, and the first radio frequency signal is recorded as a first total output signal, and the second radio frequency signal is recorded as a second total output signal.
And applying a near field to the probe at the second angle to obtain a first radio frequency signal output by a first output port of the probe, a second radio frequency signal output by a second output port of the probe, and a second characteristic parameter, wherein the second characteristic parameter may be characteristic information of strength, direction and the like of an electric field and a magnetic field at the second angle, and the first radio frequency signal is recorded as a third total output signal, and the second radio frequency signal is recorded as a fourth total output signal.
Specifically, under the first angle, the first total output signal and the second total output signal are characterized through a calibration matrix and the first characteristic parameter, and a first transfer model is constructed. The first transfer model establishes a relationship between the calibration matrix and the first total output signal, the second total output signal, the first characteristic parameter.
And under the second angle, the third total output signal and the fourth total output signal are characterized through a calibration matrix and the second characteristic parameter, and a second transfer model is constructed. The second transfer model establishes a relationship between the calibration matrix and the third total output signal, the fourth total output signal, the second characteristic parameter.
After the first transfer model and the second transfer model that are constructed are obtained, specific values of the obtained first total output signal, second total output signal, third total output signal, fourth total output signal, first characteristic parameter and second characteristic parameter are taken in, and specific parameter factors in the calibration matrix can be calculated and obtained. The calibration matrix can be used for characterizing characteristics of two signal transmission channels, namely a first transmission link and a second transmission link of the active near-field probe, and calibrating the first transmission link and the second transmission link of the active near-field probe according to the parameter factors to eliminate influences caused by asymmetry of the first transmission link and the second transmission link. After the calibration matrix is obtained through calculation, the calibrated measurement value is obtained by introducing the calculation of the calibration matrix in the measurement process of the active near-field probe, and the calibration of the active near-field probe is realized.
In this embodiment, by applying a near field to the probe, acquiring a first radio frequency signal and a second radio frequency signal of the near field at a preset angle, and constructing a transmission model of the probe according to the first radio frequency signal and the second radio frequency signal, a parameter factor of a calibration matrix can be calculated according to the transmission model, so as to achieve an effect of calibrating the detection performance of the probe according to the parameter factor, eliminate an influence caused by asymmetry of a transmission link of the probe, and improve the detection accuracy of the probe.
In the description herein, references to the description of "some embodiments," "other embodiments," "desired embodiments," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, a schematic description of the above terminology may not necessarily refer to the same embodiment or example.
The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (12)
1. An active near field composite probe, comprising:
the wiring layer is provided with power transmission wiring;
the signal transmission layer is arranged on the wiring layer, and is provided with a detection coil, a first transmission part and a second transmission part, wherein the detection coil is used for detecting an electromagnetic field of a piece to be detected so as to acquire a radio frequency signal;
the first shielding layer is arranged on the signal transmission layer, a first amplifying circuit, a second amplifying circuit, a first output port and a second output port are arranged on the first shielding layer, wherein the input end of the first amplifying circuit is connected with the first end of the detection coil, the output end of the first amplifying circuit is connected with the first output port through the first transmission component, the input end of the second amplifying circuit is connected with the second end of the detection coil, the output end of the second amplifying circuit is connected with the second output port through the second transmission component, the first amplifying circuit and the second amplifying circuit are respectively used for receiving the radio-frequency signals for amplification, and the first output port and the second output port are used for outputting the radio-frequency signals after amplification to the analyzer.
2. The active near field composite probe of claim 1, wherein a plurality of first coaxial through holes are formed in the active near field composite probe, and the plurality of first coaxial through holes are arranged at intervals around the first amplification circuit and the second amplification circuit.
3. The active near-field composite probe of claim 2, wherein a plurality of first coaxial through holes are symmetrically disposed on a peripheral side of the first amplification circuit and the second amplification circuit.
4. The active near-field composite probe of claim 1, wherein the first transmission section comprises a first microstrip line, the second transmission section comprises a second microstrip line, and the first microstrip line and the second microstrip line are symmetrically arranged.
5. The active near field composite probe of claim 4, further comprising a via array, wherein the via array comprises a plurality of second coaxial through holes arranged at intervals, and each second coaxial through hole is arranged at an interval with the first transmission member and the second transmission member respectively.
6. The active near-field composite probe of claim 1, further comprising a plurality of third coaxial vias spaced apart at a peripheral side edge of the first shielding layer for shielding external interference signals.
7. An active near field composite probe according to any of claims 1-6 wherein the first amplification circuit comprises: the input end of the first low-noise amplifier is connected with the first end of the detection coil, and the output end of the first low-noise amplifier is connected with the first output port through the first transmission component;
the second amplification circuit includes: and the input end of the second low-noise amplifier is connected with the second end of the detection coil, and the output end of the second low-noise amplifier is connected with the second output port through the second transmission component.
8. The active near-field composite probe of claim 7, wherein the first amplification circuit further comprises:
the first power supply conversion circuit is used for receiving power supply voltage and carrying out voltage drop processing on the power supply voltage;
the first bias control circuit is respectively connected with the first power supply conversion circuit and the power supply end of the first low-noise amplifier and is used for providing bias voltage for the first low-noise amplifier according to the power supply voltage after voltage drop;
the second amplification circuit further includes:
the second power supply conversion circuit is used for receiving the power supply voltage and carrying out voltage drop processing on the power supply voltage;
and the second bias control circuit is respectively connected with the second power supply conversion circuit and the power supply end of the second low-noise amplifier and is used for providing bias voltage for the second low-noise amplifier according to the power supply voltage after voltage drop.
9. The active near-field composite probe of claim 8, wherein the first amplification circuit further comprises: the first decoupling capacitor is connected with the power transmission wiring and used for receiving the power voltage and filtering the received power voltage so as to output the power voltage to the first power conversion circuit;
the second amplification circuit further includes: and the second decoupling capacitor is connected with the power transmission wiring and used for receiving the power voltage and filtering the received power voltage so as to output the power voltage to the second power conversion circuit.
10. The active near-field composite probe of claim 1, further comprising:
and the wiring layer is arranged on the second shielding layer.
11. An active near-field detection device, comprising:
an active near field composite probe according to any of claims 1-10;
and the analyzer is respectively connected with the first output port and the second output port, and is used for receiving the first radio-frequency signal output by the first output port and the second radio-frequency signal output by the second output port, analyzing the first radio-frequency signal and the second radio-frequency signal, and obtaining a parameter factor of the electromagnetic field, wherein the parameter factor is used for calibrating the probe.
12. A method of calibrating an active near field composite probe for use with an active near field probe apparatus as claimed in claim 11 wherein the probe includes first and second output ports for outputting first and second radio frequency signals, respectively, to an analyzer, the method comprising:
applying a near field to the active near field composite probe to obtain a first radio frequency signal and a second radio frequency signal of the near field of the active near field composite probe under a preset angle condition;
constructing a transfer model of the probe according to the first radio frequency signal, the second radio frequency signal and a calibration matrix;
and calculating to obtain parameter factors of the calibration matrix according to the transfer model, and calibrating the probe according to the parameter factors.
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| CN202210573694.2A CN115060982A (en) | 2022-05-25 | 2022-05-25 | Active near-field composite probe, detection device and calibration method of probe |
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| CN202210573694.2A CN115060982A (en) | 2022-05-25 | 2022-05-25 | Active near-field composite probe, detection device and calibration method of probe |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117554710A (en) * | 2024-01-11 | 2024-02-13 | 深圳市航顺芯片技术研发有限公司 | Near field probe and near field probe device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117554710A (en) * | 2024-01-11 | 2024-02-13 | 深圳市航顺芯片技术研发有限公司 | Near field probe and near field probe device |
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