CN115060217A - Bolt height calibration tool and calibration method applied to chemical vapor deposition equipment - Google Patents

Abstract

The invention discloses a bolt height calibration tool and a calibration method applied to chemical vapor deposition equipment, which comprises a fixed ring, wherein an annular groove is formed in the inner side wall of the fixed ring, a rotating ring is movably connected in the annular groove, the inner wall of the rotating ring is fixedly connected with a fixed slide rail, an adjusting slide block slides on the fixed slide rail, an adjusting bolt is connected on the adjusting slide block in a threaded manner, two buckle mechanisms are arranged at the bottom of the adjusting slide block, and a height gauge is detachably installed through the two buckle mechanisms. The height of the heater bolt is calibrated, and the horizontal difference value between the center point and the four side points of the heater bolt can be calculated.

Description

Plug pin height calibration tool and calibration method applied to chemical vapor deposition equipment

Technical Field

The invention relates to the technical field of chemical vapor deposition equipment, in particular to a plug pin height calibration tool and a calibration method applied to the chemical vapor deposition equipment.

Background

The existing heater can use a plug pin, in order to prevent the plug pin from being abnormal in height caused by wear, drooping of a knife body, unevenness of a plug pin plate or various factors, the height of the plug pin of the heater needs to be measured, a blade is firstly extended into a cavity and is measured by a steel ruler, the height requirement of the plug pin of the heater to the lower edge of the knife body needs to be larger than 3 millimeters, the plug pin is easy to collide when the knife body transfers or takes the blade, the risk of blade breakage or blade falling is caused, meanwhile, the plug pin height is limited by the fact that the heater needs to be stopped for replacing the blade and extending into the cavity, the stop time is too long, the product running efficiency is reduced, and the level difference value between the center point and four side points of the plug pin of the heater cannot be measured.

Disclosure of Invention

The present invention is directed to a pin height calibration tool and a pin height calibration method for chemical vapor deposition equipment, so as to solve the problems of the related art.

In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a be applied to high calibration instrument of bolt and calibration method of chemical vapor deposition equipment, includes solid fixed ring, seted up the ring channel on the solid fixed ring inside wall, swing joint has the rotating ring in the ring channel, and the inner wall rigid coupling of rotating ring has fixed slide rail, and it has adjusting block to slide on the fixed slide rail, and threaded connection has adjusting bolt on the adjusting block, and adjusting block's bottom is equipped with two buckle mechanisms and has the altimeter through two buckle mechanism demountable installation.

Preferably, the two side walls of the rotating ring are fixedly connected with limit rings, and the two limit rings are respectively movably connected in two limit grooves formed in the inner wall of the annular groove.

Preferably, the outer wall of the rotating ring is provided with worm gear teeth, the rotating ring is meshed with a worm shaft through the worm gear teeth, the worm shaft is rotatably connected in the fixed ring through a bearing, and one end of the worm shaft extends to the outside of the fixed ring and is fixedly connected with a hand wheel.

Preferably, the outer wall of the fixing ring is fixedly connected with two mounting blocks, the two mounting blocks are L-shaped, and mounting holes are formed in the tops of the two mounting blocks.

Preferably, the buckle mechanism comprises a movable block, the movable block is movably connected in a movable hole formed in the bottom of the adjusting slide block, one end of the movable block extends to one side of the adjusting slide block and is provided with an edge bulge, the edge bulge is elastically connected with the side wall of the adjusting slide block through a spring, a clamping block is fixedly connected to the side wall of the other end of the movable block, and the clamping block is connected in a clamping groove formed in the side wall of the height gauge in a clamping mode.

Preferably, the fixture block is in a right trapezoid shape, and the bottom surface of the fixture block is an inclined surface.

The invention also discloses a calibration method applying the bolt height calibration tool, which comprises the following steps:

step S1: the height meter is fixedly inserted between the two buckle mechanisms; then the fixing ring is installed in the heater through the installation block;

step S2: the hand wheel is rotated to drive the worm shaft to rotate, and the rotating ring is driven to integrally rotate through the meshing action of the worm shaft and the gear teeth; so as to adjust the corresponding position of the fixed slide rail on the horizontal plane;

step S3: loosening the adjusting bolt to enable the adjusting slide block to move to a corresponding position along the fixed slide rail;

step S4: measuring height data of any point of the heater plug pin at the axial position along the fixed slide rail in the cavity through the height meter;

step S5: calculating the level difference value of the central point and the four side points of the heater bolt through an altimeter;

step S6: according to the data obtained in step S5, the height of the entire heater pin is calibrated.

Compared with the prior art, the invention has the beneficial effects that:

the height gauge is convenient to mount and dismount through the arrangement of the buckle mechanism, the position of the height gauge is adjusted, the rotating ring can drive the fixed sliding rail to rotate, and the adjusting sliding block is moved to be positioned on the fixed sliding rail, so that data of any point in the middle of the heater plug pin and the height of the heater plug pin in the cavity can be measured, fragments and downtime are reduced, the height of the heater plug pin is calibrated, and the horizontal difference value between the center point of the heater plug pin and four points can be calculated.

Drawings

FIG. 1 is a schematic structural view of the present invention as a whole;

FIG. 2 is a schematic structural view of the retaining ring of the present invention with the parts broken away;

FIG. 3 is a schematic cross-sectional view of a retaining ring according to the present invention;

fig. 4 is a schematic structural diagram of the components at the bottom of the adjusting slider according to the present invention.

In the figure: 1. a fixing ring; 2. an annular groove; 3. a rotating ring; 4. a limiting ring; 5. a limiting groove; 6. worm gear teeth; 7. a worm shaft; 8. a bearing; 9. a hand wheel; 10. fixing the slide rail; 11. adjusting the sliding block; 12. adjusting the bolt; 13. a buckle mechanism; 131. a movable block; 132. a movable hole; 133. a spring; 134. a pull rod; 135. a clamping block; 14. an altimeter; 15. a card slot; 16. and (7) installing the block.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In a first embodiment, referring to fig. 1-4, the present invention provides a technical solution: the utility model provides a be applied to high calibration instrument of bolt and calibration method of chemical vapor deposition equipment, including solid fixed ring 1, set up ring channel 2 on the solid fixed ring 1 inside wall, swing joint has swivel becket 3 in the ring channel 2, the inner wall rigid coupling of swivel becket 3 has fixed slide rail 10, it has adjusting block 11 to slide on the fixed slide rail 10, threaded connection has adjusting bolt 12 on adjusting block 11, adjusting block 11's bottom is equipped with two buckle mechanism 13 and has altimeter 14 through two buckle mechanism 13 demountable installation.

Furthermore, two side walls of the rotating ring 3 are fixedly connected with limit rings 4, and the two limit rings 4 are respectively movably connected in two limit grooves 5 formed in the inner wall of the annular groove 2; maintaining the stability of the rotation of the rotating ring 3 in the annular groove 2.

Furthermore, the outer wall of the rotating ring 3 is provided with worm gear teeth 6, the rotating ring 3 is meshed with a worm shaft 7 through the worm gear teeth 6, the worm shaft 7 is rotatably connected in the fixed ring 1 through a bearing 8, and one end of the worm shaft 7 extends to the outside of the fixed ring 1 and is fixedly connected with a hand wheel 9; the rotation angle of the rotating ring 3 is convenient to adjust.

Furthermore, two mounting blocks 16 are fixedly connected to the outer wall of the fixing ring 1, the two mounting blocks 16 are both L-shaped, and mounting holes are formed in the tops of the two mounting blocks 16; the installation is convenient for the whole.

Further, the fastening mechanism 13 includes a movable block 131, the movable block 131 is movably connected in a movable hole 132 formed in the bottom of the adjusting slider 11, one end of the movable block 131 extends to one side of the adjusting slider 11 and is provided with an edge protrusion, the edge protrusion is elastically connected with the side wall of the adjusting slider 11 through a spring 133, a fixture block 135 is fixedly connected to the side wall of the other end of the movable block 131, and the fixture block 135 is connected in a fixture groove 15 formed in the side wall of the height gauge 14 in a clamping manner; the height gauge 14 is easy to assemble and disassemble.

Further, the fixture block 135 is a right trapezoid, and the bottom surface of the fixture block 135 is an inclined surface; the height gauge 14 is easily installed.

In the scheme, when the height gauge is used, the fixing ring 1 is firstly installed in the heater through the installation block 16, the height gauge 14 is inserted between the two buckle mechanisms 13 after installation is finished, the height gauge 14 is used for extruding the bottom inclined planes of the two clamping blocks 135, so that the two movable blocks 131 are far away from each other, the spring 133 is in a stretching state, when the clamping block 135 corresponds to the clamping groove 15 on the side wall of the height gauge 14, the clamping block 135 is clamped into the clamping groove 15 under the action of the tensile force of the spring 133, so that the installation work of the height gauge 14 is finished, and when the height gauge 14 is subsequently disassembled, the pull rod 134 is directly pulled to separate the clamping block 135 from the clamping groove 15, the height gauge 14 is convenient to disassemble and assemble, finally, the position of the height gauge 14 is adjusted, the hand wheel 9 is rotated to drive the worm shaft 7 to rotate, the worm shaft 7 drives the rotating ring 3 to rotate through the meshing action with the worm wheel teeth 6, the rotating ring 3 can drive the fixing slide rail 10 to rotate, then the adjusting bolt 12 is unscrewed, and the adjusting slide block 11 is moved to be positioned on the fixed slide rail 10, so that the data of any point in the middle of the inserted pin of the heater and the height of the inserted pin of the heater in the cavity can be measured; the method has the advantages of reducing fragment and downtime, calibrating the height of the heater bolt, and calculating the horizontal difference value between the center point and four side points of the heater bolt.

The embodiment two further discloses a calibration method using the bolt height calibration tool, which is characterized in that: the method comprises the following steps:

step S1: the height gauge 14 is inserted and fixed between the two buckling mechanisms 13; then the fixing ring 1 is installed in the heater through the installation block 16;

step S2: the hand wheel 9 is rotated to drive the worm shaft 7 to rotate, and the rotating ring 3 is driven to rotate integrally through the meshing action of the worm shaft 7 and the worm gear teeth 6; so as to adjust the corresponding position of the fixed slide rail 10 on the horizontal plane;

step S3: loosening the adjusting bolt 12 to enable the adjusting slide block 11 to move to a corresponding position along the fixed slide rail 10;

step S4: measuring height data of any point of the heater bolt in the axial position of the fixed slide rail in the cavity through the height meter 14;

step S5: calculating the level difference value of the central point and the four side points of the heater bolt through the altimeter 14;

step S6: the height of the entire heater pin is calibrated based on the data obtained in step S5.

By the aid of the calibration method, the risk that a blade is extended into the cavity to be measured by a steel ruler in the traditional method and is easily collided with a bolt to cause fragment breaking or fragment dropping when the blade body transmits or takes the fragment is avoided; and the problem of inaccurate measurements; the method comprises the steps that the height meter 14 is controlled to move on the fixed slide rail 10, so that data of any point in the middle of a heater plug pin and the height of the heater plug pin in a cavity are measured, and the horizontal difference value of the center point of the heater plug pin and four side points is calculated; to better calibrate heater pin height.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. The utility model provides a be applied to chemical vapor deposition equipment's bolt height calibration instrument and calibration method, includes solid fixed ring (1), its characterized in that: the height gauge is characterized in that an annular groove (2) is formed in the inner side wall of the fixing ring (1), a rotating ring (3) is movably connected into the annular groove (2), a fixed sliding rail (10) is fixedly connected to the inner wall of the rotating ring (3), an adjusting sliding block (11) slides on the fixed sliding rail (10), an adjusting bolt (12) is connected to the adjusting sliding block (11) in a threaded mode, two buckle mechanisms (13) are arranged at the bottom of the adjusting sliding block (11), and the height gauge (14) is detachably mounted on the two buckle mechanisms (13).

2. The tool and method of claim 1, wherein the tool comprises a base, a pin height sensor, and a pin height sensor, wherein the pin height sensor comprises: the two side walls of the rotating ring (3) are fixedly connected with limit rings (4), and the two limit rings (4) are respectively movably connected into two limit grooves (5) formed in the inner wall of the annular groove (2).

3. The tool and method of claim 1, wherein the tool comprises a base, a pin height sensor, and a pin height sensor, wherein the pin height sensor comprises: the outer wall of the rotating ring (3) is provided with worm gear teeth (6), the rotating ring (3) is meshed with a worm shaft (7) through the worm gear teeth (6), the worm shaft (7) is rotatably connected in the fixing ring (1) through a bearing (8), and one end of the worm shaft (7) extends to the outside of the fixing ring (1) and is fixedly connected with a hand wheel (9).

4. The tool and method of claim 1, wherein the tool comprises a base, a pin height sensor, and a pin height sensor, wherein the pin height sensor comprises: the outer wall of the fixing ring (1) is fixedly connected with two mounting blocks (16), the two mounting blocks (16) are L-shaped, and mounting holes are formed in the tops of the two mounting blocks (16).

5. The tool and method as claimed in claim 1, wherein the tool comprises a base, a pin height calibration module, and a pin height calibration module, wherein the pin height calibration module comprises: buckle mechanism (13) are including movable block (131), movable block (131) swing joint is in movable hole (132) that adjusting slider (11) bottom was seted up, the one end of movable block (131) extends to adjusting slider (11) one side and is equipped with marginal arch, marginal arch passes through spring (133) and the lateral wall elastic connection of adjusting slider (11), the rigid coupling has fixture block (135) on the other end lateral wall of movable block (131), fixture block (135) block is connected in draw-in groove (15) of seting up on altimeter (14) lateral wall.

6. The tool and method of claim 5, wherein the tool comprises a base, a pin height sensor, and a pin height sensor, wherein the pin height sensor comprises: the clamping block (135) is in a right trapezoid shape, and the bottom surface of the clamping block (135) is an inclined surface.

7. A calibration method using the pin height calibration tool according to any one of claims 1 to 6, wherein: the method comprises the following steps:

step S1: the height gauge (14) is inserted and fixed between the two buckling mechanisms (13); then the fixing ring (1) is installed in the heater through the installation block (16);

step S2: the hand wheel (9) is rotated to drive the worm shaft (7) to rotate, and the rotating ring (3) is driven to integrally rotate through the meshing action of the worm shaft (7) and the worm gear teeth (6); so as to adjust the corresponding position of the fixed slide rail (10) on the horizontal plane;

step S3: then the adjusting bolt (12) is unscrewed, so that the adjusting slide block (11) moves to a corresponding position along the fixed slide rail (10);

step S4: measuring height data of any point of the heater bolt in the axial position of the fixed slide rail in the cavity through a height meter (14);

step S5: calculating the level difference value between the central point of the heater bolt and four side points through an altimeter (14);

step S6: according to the data obtained in step S5, the height of the entire heater pin is calibrated.

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