CN115055452B - Cleaning method for quartz tube of silicon carbide crystal growth furnace - Google Patents
Cleaning method for quartz tube of silicon carbide crystal growth furnace Download PDFInfo
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- CN115055452B CN115055452B CN202210617683.XA CN202210617683A CN115055452B CN 115055452 B CN115055452 B CN 115055452B CN 202210617683 A CN202210617683 A CN 202210617683A CN 115055452 B CN115055452 B CN 115055452B
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- cleaning
- quartz tube
- rod
- fixedly connected
- tube body
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/023—Cleaning the external surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/04—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes
- B08B9/043—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes
- B08B9/045—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes the cleaning devices being rotated while moved, e.g. flexible rotating shaft or "snake"
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
Abstract
The invention belongs to the technical field of silicon carbide, in particular to a cleaning method of a quartz tube of a silicon carbide crystal growth furnace, wherein the surface of a cleaning seat is fixedly connected with a plurality of clamping seats which are equidistantly connected to the upper surface of the cleaning seat; the inside of each clamping seat is provided with a quartz tube body, the rear side of each cleaning seat is fixedly connected with a cylinder frame, a connecting plate is arranged below the cylinder frame, and the lower surface of the connecting plate is fixedly connected with a plurality of pressing columns which are arranged corresponding to the quartz tube body; the scraping plate can be used for scraping and cleaning the inner wall of the quartz tube body in a state of rotating downwards in the cleaning process; gradually cleaning the inner wall of the quartz tube body; the phenomenon that workers need to manually clean at present is avoided, and meanwhile, the quartz tube body can be cleaned from top to bottom, so that the quartz tube cleaning device is applicable to quartz tubes with different heights; the safety is high; brings convenience for the use of the quartz tube in the future.
Description
Technical Field
The invention belongs to the technical field of silicon carbide, and particularly relates to a cleaning method of a quartz tube of a silicon carbide crystal growth furnace.
Background
The silicon carbide induction type crystal growth furnace adopts an induction heating mode, and grows single crystal materials such as 6 inches of silicon carbide and the like in an atmosphere of argon, nitrogen (or a mixed gas of the two) or other process gases by using a physical gas phase conveying method. And (3) putting the raw materials and seed crystals into a graphite crucible, and wrapping a graphite soft felt heat insulation material outside the crucible. The wrapped crucible is placed in a growth cavity which is generally composed of a large-diameter high-purity quartz glass tube and metal flanges with two ends sealed.
Longer growth temperatures in the growth chamber during operation can result in the volatile deposition of impurities present in the graphite felt on the quartz glass tube at high temperatures. In addition, the growth period is longer, so that the sediment is stubborn and compact; when cleaning the cleaning device, the cleaning device is generally manually cleaned by a worker, and more problems can occur during cleaning.
When the quartz tube is cleaned manually, the limited space inside the quartz tube is not beneficial to the operation of personnel, and the labor intensity of the staff is increased; and because the quartz tube is higher in self-body height, the staff cannot clean completely in the cleaning process.
Therefore, the invention provides a cleaning method of a quartz tube of a silicon carbide crystal growth furnace.
Disclosure of Invention
In order to overcome the deficiencies of the prior art, at least one technical problem presented in the background art is solved.
The technical scheme adopted for solving the technical problems is as follows: the invention relates to a cleaning method of a quartz tube of a silicon carbide crystal growth furnace, which comprises the following steps:
s1, firstly, inserting a quartz tube body into different clamping seats, and enabling the different quartz tube bodies to correspond to different cleaning rods; then driving the cylinder and the piston column in the cylinder frame to operate through an external power supply, so that the piston column drives the connecting plate to move;
s2, the connecting plate drives the pressing column to press the rotating wheel, and the rotating wheel is rotationally connected to the surface of the pressing column, so that a guide groove formed in the surface of the rotating wheel is matched with the clamping column; when the pressing column applies downward pressure to the rotating wheel, the pressing column drives the rotating wheel to rotate downwards under the action of the clamping column and the guide groove, and the rotating wheel simultaneously drives the cleaning rod below the rotating wheel to move towards the inside of the quartz tube body;
s3, in the moving process of the cleaning rod, the deflection rod on the outer surface of the cleaning rod is contacted with the quartz tube body at first and drives the deflection rod to rotate, so that the deflection rod can drive the scraping plate to rotate, and then the scraping plate can be propped against the inner wall of the quartz tube body and scrape accumulated carbon on the inner wall of the quartz tube body.
According to the cleaning method, the scraping plate can scrape and clean the inner wall of the quartz tube body in a downward rotating state in the cleaning process; gradually cleaning the inner wall of the quartz tube body; the operation is more convenient, the phenomenon that workers need to manually clean at present is avoided, meanwhile, the quartz tube body can be cleaned from top to bottom, and the quartz tube cleaning device is applicable to quartz tubes with different heights; the safety is high; brings convenience for the use of the quartz tube in the future.
Preferably, the surface of the cleaning seat is fixedly connected with a plurality of clamping seats, and the clamping seats are equidistantly connected to the upper surface of the cleaning seat; the inside of each clamping seat is provided with a quartz tube body, the rear side of each cleaning seat is fixedly connected with a cylinder frame, the lower part of each cylinder frame is provided with a connecting plate, the lower surface of each connecting plate is fixedly connected with a plurality of pressing columns which are correspondingly arranged with the quartz tube body, one end of each pressing column penetrates through the inside of each connecting seat, the lower end face of each pressing column is rotationally connected with a rotating wheel, the outer surface of each rotating wheel is provided with a guide groove, and the inside of each connecting seat is fixedly connected with a clamping column which is matched with the guide groove; the lower end face of the rotating wheel is fixedly connected with a cleaning rod, the outer surface of the cleaning rod is rotationally connected with a deflection rod, and the outer surface of the deflection rod is fixedly connected with a scraping plate; in this embodiment, the cylinder and the piston column are disposed inside the cylinder seat, and the connection manner between the cylinder and the piston column is the prior art, and redundant description is not made in this embodiment; when the quartz tube is cleaned manually, the limited space inside the quartz tube is not beneficial to the operation of personnel, and the labor intensity of the staff is increased; moreover, because the quartz tube is higher in self-body height, the staff cannot clean completely in the cleaning process; when in work; when the quartz tube is cleaned, firstly, the quartz tube body is inserted into the inside of different clamping seats, and different quartz tube bodies correspond to different cleaning rods; then driving the cylinder and the piston column in the cylinder frame to operate through an external power supply, so that the piston column drives the connecting plate to move; the connecting plate drives the pressing column to press the rotating wheel, and the rotating wheel is rotationally connected to the surface of the pressing column, and a guide groove formed in the surface of the rotating wheel is matched with the clamping column; when the pressing column gives downward pressure to the rotating wheel, the pressing column drives the rotating wheel to rotate in a downward side-to-side rotating state under the action of the clamping column and the guide groove, the rotating wheel simultaneously drives the cleaning rod below the rotating wheel to move towards the inside of the quartz tube body, in the moving process of the cleaning rod, the deflection rod on the outer surface of the cleaning rod is firstly contacted with the quartz tube body and drives the deflection rod to rotate, so that the deflection rod can drive the scraping plate to rotate, and then the scraping plate can be propped against the inner wall of the quartz tube body and scrape accumulated carbon accumulated on the inner wall of the quartz tube body; in addition, the scraping plate can be used for scraping and cleaning the inner wall of the quartz tube body in a state of rotating downwards in the cleaning process; gradually cleaning the inner wall of the quartz tube body; the operation is more convenient, the phenomenon that workers need to manually clean at present is avoided, meanwhile, the quartz tube body can be cleaned from top to bottom, and the quartz tube cleaning device is applicable to quartz tubes with different heights; the safety is high; brings convenience for the use of the quartz tube in the future.
Preferably, a limiting frame is arranged in the connecting seat, a limiting groove is formed in the surface of the limiting frame, and the diameter of the limiting groove is equal to that of the pressing column; when the device works, the limiting frame is arranged, so that the pressing column can move in the same vertical line, and the limiting effect on the pressing column is achieved; thereby being beneficial to the rotation wheel of the lower surface of the pressing column, and being convenient for cleaning the quartz tube afterwards.
Preferably, the inside of the clamping seat is slidably connected with a plurality of pull rods, and the pull rods are arranged in the clamping seat in a circumferential array; the middle part of the pull rod, which is close to the clamping seat, is connected with an annular sleeve, and the outer surface of the pull rod is connected with the inner wall of the clamping seat; when in work; the pull rod is manually pulled outwards by a worker, so that the pull rod pulls the annular sleeve and the tension spring is in a compressed state; when the quartz tube body is placed in the clamping seat; loosening the pull rod, under the extension spring is replied by compression state, can drive annular sleeve to support and press the surface at the quartz capsule body, the annular sleeve of difference can give the quartz capsule body certain pressure this moment, avoids quartz capsule appearance skew phenomenon when the clearance, has improved cleaning efficiency.
Preferably, a sliding rod is connected in the cleaning rod in a sliding way, and a pressing rod is connected above the sliding rod in a rotating way; one end of the supporting pressing rod is connected with the outer surface of the sliding rod, and the other end of the supporting pressing rod is connected with the outer surface of the deflection rod; the bottom of the sliding rod is fixedly connected with an extension spring on the inner wall of the cleaning rod; a sliding groove matched with the sliding rod is formed in the cleaning rod; when the quartz tube is in operation, when the deflection rod is in contact with the surface of the quartz tube body, the deflection rod can simultaneously drive the pressing rod on the side surface of the quartz tube body to rotate, so that the pressing rod can drive the sliding rod on the other side to move, and then the sliding rod can compress the tension spring; at the moment, the sliding rod and the pressing rod can give a certain limit to the deflection rod, so that the deflection rod is prevented from rotating too much in angle, the scraping plate is favorably clung to the inner wall of the quartz tube body, and the cleaning of carbon deposition on the inner wall of the quartz tube body is facilitated.
Preferably, the outer surface of the sliding rod is fixedly connected with an extrusion block, the inside of the cleaning rod is fixedly connected with a plurality of liquid storage cavities, and the number of the liquid storage cavities is two and symmetrically arranged left and right; the inside of the liquid storage cavity is slidably connected with a piston plate, one side, close to the sliding rod, of the piston plate is fixedly connected with an arc-shaped rod, limiting springs are fixedly connected to the upper side and the lower side of the arc-shaped rod and positioned on the inner wall of the liquid storage cavity, and the width of the piston plate is equal to the width of the liquid storage cavity; in the embodiment, the outer surface of the liquid storage cavity is connected with a liquid outlet pipe; when in work; when the slide bar moves downwards, the slide bar can drive the extrusion piece of its left and right sides simultaneously and remove in step, the extrusion piece can contact each other and extrude it with the arc pole later, the arc pole of both sides can drive the piston board and remove, make the piston board promote the inside hydrofluoric acid solution of stock solution cavity to flow to the inner wall of quartz capsule body from external drain pipe, can automatic blowout hydrofluoric acid solution, avoided the staff manual operation, and avoided the staff to receive the injury, it is comparatively convenient to use, improved the clearance effect of quartz capsule greatly.
Preferably, a circulation slot is formed in the cleaning rod; the lower end of the circulating slot hole penetrates through the inside of the liquid storage cavity; through the circulation slot, hydrofluoric acid solution can be introduced into the liquid storage cavity through the circulation slot, so that the hydrofluoric acid solution can be reused conveniently.
Preferably, a cleaning ring seat is fixedly connected above the cleaning rod, and the diameter of the cleaning ring seat is larger than that of the quartz tube body; during operation, when the cleaning rod moves downwards, the cleaning ring seat above the cleaning rod can simultaneously support and press the outer wall of the quartz tube body, so that the cleaning ring seat can simultaneously clean the outer wall of the quartz tube body, can synchronously clean the inner wall and the outer wall, and is simple to operate.
Preferably, the inner wall of the cleaning ring seat is fixedly connected with a plurality of compression springs, the compression springs are arranged on the inner wall of the cleaning ring seat in a circumferential array, and one side, close to the cleaning rod, of each compression spring is fixedly connected with a cleaning ring plate; when the cleaning ring seat is pressed against the outer wall of the quartz tube body during operation, the pressing spring can press the cleaning ring plate under the compression of the pressing spring, so that the cleaning ring plate can be tightly pressed against the outer surface of the quartz tube body, and the cleaning of the outer wall of the quartz tube is facilitated.
Preferably, the outer surface of the cleaning ring plate is fixedly connected with a water absorbing ring plate, and the diameter of the water absorbing ring plate is larger than that of the cleaning ring plate; in the embodiment, the inside of the water absorbing ring plate is filled with alcohol, and the inside of the water absorbing ring plate is filled with sponge; when the cleaning ring plate is tightly attached to the outer wall of the quartz tube in operation, the water absorbing ring plate is simultaneously stressed, so that alcohol in the water absorbing ring plate can be extruded out and flows to the outer wall of the quartz tube, and the operation is convenient.
The beneficial effects of the invention are as follows:
1. according to the cleaning method for the quartz tube of the silicon carbide crystal growth furnace, in the moving process of the cleaning rod, the deflection rod on the outer surface of the cleaning rod is firstly contacted with the quartz tube body and drives the deflection rod to rotate, so that the deflection rod drives the scraping plate to rotate, and then the scraping plate is pressed against the inner wall of the quartz tube body and scrapes carbon deposited on the inner wall of the quartz tube body; in addition, the scraping plate can be used for scraping and cleaning the inner wall of the quartz tube body in a state of rotating downwards in the cleaning process; gradually cleaning the inner wall of the quartz tube body; the operation is more convenient, the phenomenon that workers need to manually clean at present is avoided, meanwhile, the quartz tube body can be cleaned from top to bottom, and the quartz tube cleaning device is applicable to quartz tubes with different heights; the safety is high; brings convenience for the use of the quartz tube in the future.
2. According to the cleaning method for the quartz tube of the silicon carbide crystal growth furnace, when the sliding rod moves downwards, the sliding rod can drive the extrusion blocks at the left side and the right side of the sliding rod to synchronously move, the extrusion blocks can be mutually contacted with the arc rods and extrude the arc rods, and then the arc rods at the two sides can drive the piston plate to move, so that the piston plate pushes hydrofluoric acid solution in the liquid storage cavity and flows to the inner wall of the quartz tube body from the external liquid outlet pipe, the hydrofluoric acid solution can be automatically sprayed out, manual operation of workers is avoided, the workers are prevented from being injured, the use is convenient, and the cleaning effect of the quartz tube is greatly improved.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a perspective view of a cleaning seat of the present invention;
FIG. 2 is a cross-sectional view of the present invention;
FIG. 3 is an enlarged view of the structure of FIG. 2A in accordance with the present invention;
FIG. 4 is a schematic cross-sectional view of a holder according to the present invention;
FIG. 5 is an enlarged view of the structure of FIG. 2B in accordance with the present invention;
FIG. 6 is a schematic view of a deflection yoke portion of the present invention;
FIG. 7 is a schematic view of a part of the structure of a cleaning ring plate in the invention;
FIG. 8 is a schematic view of the construction of a water absorbing ring plate according to a second embodiment of the present invention;
fig. 9 is a flow chart of a method in the present invention.
In the figure: 1. cleaning a seat; 101. a cylinder frame; 102. a connecting plate; 2. a clamping seat; 21. a quartz tube body; 3. pressing a column; 31. a connecting seat; 311. a limit frame; 32. a rotating wheel; 33. a guide groove; 34. a clamping column; 35. cleaning a rod; 351. a flow slot; 37. a deflection lever; 38. a scraper; 4. a pull rod; 41. an annular sleeve; 42. a tension spring; 5. a slide bar; 51. a pressing rod; 52. a tension spring; 53. extruding a block; 54. a liquid storage cavity; 55. a piston plate; 56. an arc-shaped rod; 561. a limit spring; 6. cleaning the ring seat; 61. compressing the spring; 62. cleaning the annular plate; 621. and a water absorbing annular plate.
Detailed Description
The invention is further described in connection with the following detailed description in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the invention easy to understand.
Example 1
As shown in fig. 9, a cleaning method for a quartz tube of a silicon carbide crystal growth furnace comprises the following steps:
s1, firstly, inserting the quartz tube bodies 21 into different clamping seats 2, and enabling the different quartz tube bodies 21 to correspond to different cleaning rods 35; then, driving the cylinder and the piston column in the cylinder frame 101 to operate through an external power supply, so that the piston column drives the connecting plate 102 to move;
s2, the connecting plate 102 drives the pressing column 3 to press the rotating wheel 32, and the rotating wheel 32 is rotationally connected to the surface of the pressing column 3, and the guide groove 33 formed on the surface of the rotating wheel 32 is matched with the clamping column 34; when the pressing column 3 applies downward pressure to the rotating wheel 32, the pressing column 3 drives the rotating wheel 32 to rotate downwards under the action of the clamping column 34 and the guide groove 33, and the rotating wheel 32 drives the cleaning rod 35 below the rotating wheel to move towards the inside of the quartz tube body 21;
s3, in the moving process of the cleaning rod 35, the deflection rod 37 on the outer surface of the cleaning rod 35 is firstly contacted with the quartz tube body 21 and drives the deflection rod 37 to rotate, so that the deflection rod 37 drives the scraping plate 38 to rotate, and then the scraping plate 38 is pressed against the inner wall of the quartz tube body 21 and scrapes carbon deposit accumulated on the inner wall of the quartz tube body 21.
By the cleaning method, the scraping plate 38 can scrape and clean the inner wall of the quartz tube body 21 in a state of rotating downwards during cleaning; gradually cleaning the inner wall of the quartz tube body 21; the operation is convenient, the phenomenon that the workers need to manually clean at present is avoided, meanwhile, the quartz tube body 21 can be cleaned from top to bottom, the quartz tube cleaning device can be suitable for quartz tubes with different heights, and the safety is high; brings convenience for the use of the quartz tube in the future.
As shown in fig. 1 to 3 and 6, the surface of the cleaning seat 1 is fixedly connected with a plurality of clamping seats 2, and the clamping seats 2 are equidistantly connected on the upper surface of the cleaning seat 1; the inside of each clamping seat 2 is provided with a quartz tube body 21, the rear side of the cleaning seat 1 is fixedly connected with a cylinder frame 101, the lower part of the cylinder frame 101 is provided with a connecting plate 102, the lower surface of the connecting plate 102 is fixedly connected with a plurality of pressing columns 3 which are correspondingly arranged with the quartz tube bodies 21, and the upper part of the quartz tube body 21 is provided with a connecting seat 31; one end of the pressing column 3 penetrates through the inside of the connecting seat 31, the lower end face of the pressing column 3 is rotatably connected with a rotating wheel 32, the outer surface of the rotating wheel 32 is provided with a guide groove 33, and a clamping column 34 matched with the guide groove 33 is fixedly connected inside the connecting seat 31; a cleaning rod 35 is fixedly connected to the lower end surface of the rotating wheel 32, a deflection rod 37 is rotatably connected to the outer surface of the cleaning rod 35, and a scraping plate 38 is fixedly connected to the outer surface of the deflection rod 37; in this embodiment, a cylinder and a piston column are disposed inside the cylinder frame 101, and the connection manner between the cylinder and the piston column and the connection plate 102 is the prior art, which is not described in detail in this embodiment; when the quartz tube is cleaned manually, the limited space inside the quartz tube is not beneficial to the operation of personnel, and the labor intensity of the staff is increased; moreover, because the quartz tube is higher in self-body height, the staff cannot clean completely in the cleaning process; when in work; when the quartz tube is cleaned, firstly, the quartz tube body 21 is inserted into the inside of different clamping seats 2, and different quartz tube bodies 21 are corresponding to different cleaning rods 35; then, driving the cylinder and the piston column in the cylinder frame 101 to operate through an external power supply, so that the piston column drives the connecting plate 102 to move; the connecting plate 102 drives the pressing column 3 to press the rotating wheel 32, and the rotating wheel 32 is rotationally connected to the surface of the pressing column 3, and the guide groove 33 formed on the surface of the rotating wheel 32 is matched with the clamping column 34; when the pressing column 3 applies downward pressure to the rotating wheel 32, the pressing column 3 drives the rotating wheel 32 to rotate downwards under the action of the clamping column 34 and the guide groove 33, the rotating wheel 32 simultaneously drives the cleaning rod 35 below the rotating wheel to move towards the inside of the quartz tube body 21, and in the moving process of the cleaning rod 35, the deflection rod 37 on the outer surface of the cleaning rod 35 is firstly contacted with the quartz tube body 21 and drives the deflection rod 37 to rotate, so that the deflection rod 37 drives the scraping plate 38 to rotate, and then the scraping plate 38 is propped against the inner wall of the quartz tube body 21 and scrapes carbon deposited on the inner wall of the quartz tube body 21; in addition, the scraping plate 38 can scrape and clean the inner wall of the quartz tube body 21 in a state of rotating downwards; gradually cleaning the inner wall of the quartz tube body 21; the operation is convenient, the phenomenon that the workers need to manually clean at present is avoided, meanwhile, the quartz tube body 21 can be cleaned from top to bottom, and the quartz tube cleaning device is applicable to quartz tubes with different heights; the safety is high; brings convenience for the use of the quartz tube in the future.
As shown in fig. 2, a limiting frame 311 is disposed in the connecting seat 31, a limiting groove is formed on the surface of the limiting frame 311, and the diameter of the limiting groove is equal to the diameter of the pressing column 3; when the device works, the limiting frame 311 is arranged, so that the pressing column 3 can move in the same vertical line, and the limiting effect on the pressing column 3 is achieved; thereby being beneficial to the rotation wheel 32 on the lower surface of the pressing column 3 to be driven to operate, and facilitating the cleaning of the quartz tube afterwards.
As shown in fig. 2 to 4, the inside of the clamping seat 2 is slidably connected with a plurality of pull rods 4, and the pull rods 4 are arranged in a circumferential array inside the clamping seat 2; the middle part of the pull rod 4, which is close to the clamping seat 2, is connected with an annular sleeve 41, and the outer surface of the pull rod 4 is connected with a tension spring 42 with the inner wall of the clamping seat 2; when in work; the pull rod 4 is manually pulled outwards by a worker, so that the pull rod 4 pulls the annular sleeve 41 and the tension spring 42 is in a compressed state; when the quartz tube body 21 is placed inside the holder 2; when the pull rod 4 is loosened, the tension spring 42 is restored from the compression state, the annular sleeve 41 is driven to be propped against the outer surface of the quartz tube body 21, and at the moment, the annular sleeve 41 at different positions can give certain pressure to the quartz tube body 21, so that the phenomenon that the quartz tube is deviated during cleaning is avoided, and the cleaning efficiency is improved.
As shown in fig. 2 to 6, the cleaning rod 35 is slidably connected with a sliding rod 5, and a pressing rod 51 is rotatably connected above the sliding rod 5; one end of the pressing rod 51 is connected with the outer surface of the sliding rod 5, and the other end of the pressing rod is connected with the outer surface of the deflection rod 37; the bottom of the sliding rod 5 and the inner wall of the cleaning rod 35 are fixedly connected with an extension spring 52; a sliding groove matched with the sliding rod 5 is formed in the cleaning rod 35; when the deflection rod 37 contacts with the surface of the quartz tube body 21 in operation, the deflection rod 37 drives the pressing rod 51 on the side surface of the deflection rod to rotate at the same time, so that the pressing rod 51 drives the sliding rod 5 on the other side to move, and then the sliding rod 5 compresses the tension spring 52; at this time, the slide bar 5 and the pressing bar 51 can provide a certain limit for the deflection rod 37, so that the deflection rod 37 is prevented from rotating too much in angle, the scraping plate 38 is favorably clung to the inner wall of the quartz tube body 21, and the carbon deposition on the inner wall of the quartz tube body is conveniently cleaned.
As shown in fig. 2 to 5, the outer surface of the sliding rod 5 is fixedly connected with an extrusion block 53, the interior of the cleaning rod 35 is fixedly connected with a plurality of liquid storage cavities 54, and the number of the liquid storage cavities 54 is two and is symmetrically arranged left and right; the inside of the liquid storage cavity 54 is slidably connected with a piston plate 55, one side of the piston plate 55, which is close to the sliding rod 5, is fixedly connected with an arc rod 56, the upper side and the lower side of the arc rod 56 are fixedly connected with limiting springs 561 on the inner wall of the liquid storage cavity 54, and the width of the piston plate 55 is equal to the width of the liquid storage cavity 54; in this embodiment, the outer surface of the liquid storage cavity 54 is connected with a liquid outlet pipe; when in work; when the slide bar 5 moves downwards, the slide bar 5 can simultaneously drive the extrusion blocks 53 on the left side and the right side of the slide bar to synchronously move, the extrusion blocks 53 can be mutually contacted with the arc rods 56 and extrude the arc rods, then the arc rods 56 on the two sides can drive the piston plate 55 to move, so that the piston plate 55 pushes hydrofluoric acid solution in the liquid storage cavity 54 and flows to the inner wall of the quartz tube body 21 from an external liquid outlet pipe, the hydrofluoric acid solution can be automatically sprayed out, manual operation of a worker is avoided, the worker is prevented from being injured, the use is convenient, and the cleaning effect of the quartz tube is greatly improved.
As shown in fig. 6, the cleaning rod 35 is provided with a flow slot 351 therein; the lower end of the circulation slot 351 penetrates through the inside of the liquid storage cavity 54; through the circulation slot 351, hydrofluoric acid solution can be introduced into the liquid storage cavity 54 through the circulation slot 351, so that the hydrofluoric acid solution can be reused conveniently.
As shown in fig. 7, a cleaning ring seat 6 is fixedly connected above the cleaning rod 35, and the diameter of the cleaning ring seat 6 is larger than that of the quartz tube body 21; during operation, when clearance pole 35 downwardly moving, clearance ring seat 6 of clearance pole 35 top can support simultaneously and press the outer wall at quartz capsule body 21, makes clearance ring seat 6 clear up the outer wall of quartz capsule body 21 simultaneously, can be synchronous to inner wall and outer wall clearance, and the operation is comparatively simple.
The inner wall of the cleaning ring seat 6 is fixedly connected with a plurality of compression springs 61, the compression springs 61 are arranged on the inner wall of the cleaning ring seat 6 in a circumferential array, and one side of each compression spring 61 close to the cleaning rod 35 is fixedly connected with a cleaning ring plate 62; when the cleaning ring seat 6 is pressed against the outer wall of the quartz tube body 21 in operation, the pressing spring 61 can press the cleaning ring plate 62 under the compression of the pressing spring 61, so that the cleaning ring plate 62 can be tightly pressed against the outer surface of the quartz tube body 21, and the cleaning of the outer wall of the quartz tube is facilitated.
Example two
As shown in fig. 8, in comparative example one, another embodiment of the present invention is: the outer surface of the cleaning ring plate 62 is fixedly connected with a water absorbing ring plate 621, and the diameter of the water absorbing ring plate 621 is larger than that of the cleaning ring plate 62; in the present embodiment, the inside of the water absorbing ring plate 621 is filled with alcohol, and the inside of the water absorbing ring plate 621 is filled with sponge; when the cleaning ring plate 62 is tightly attached to the outer wall of the quartz tube in operation, the water absorbing ring plate 621 is simultaneously stressed, so that alcohol in the water absorbing ring plate 621 can be extruded out and flows to the outer wall of the quartz tube, and the operation is convenient.
During operation, when the quartz tube is cleaned, the quartz tube body 21 is firstly inserted into the inside of different clamping seats 2, and different quartz tube bodies 21 are made to correspond to different cleaning rods 35; then, driving the cylinder and the piston column in the cylinder frame 101 to operate through an external power supply, so that the piston column drives the connecting plate 102 to move; the connecting plate 102 drives the pressing column 3 to press the rotating wheel 32, and the rotating wheel 32 is rotationally connected to the surface of the pressing column 3, and the guide groove 33 formed on the surface of the rotating wheel 32 is matched with the clamping column 34; when the pressing column 3 applies downward pressure to the rotating wheel 32, the pressing column 3 drives the rotating wheel 32 to rotate downwards under the action of the clamping column 34 and the guide groove 33, the rotating wheel 32 simultaneously drives the cleaning rod 35 below the rotating wheel to move towards the inside of the quartz tube body 21, and in the moving process of the cleaning rod 35, the deflection rod 37 on the outer surface of the cleaning rod 35 is firstly contacted with the quartz tube body 21 and drives the deflection rod 37 to rotate, so that the deflection rod 37 can drive the scraping plate 38 to rotate, and then the scraping plate 38 can be propped against the inner wall of the quartz tube body 21 and scrape accumulated carbon accumulated on the inner wall of the quartz tube body 21; in addition, the scraping plate 38 can scrape and clean the inner wall of the quartz tube body 21 in a state of rotating downwards; gradually cleaning the inner wall of the quartz tube body 21; the operation is convenient, the phenomenon that the workers need to manually clean at present is avoided, meanwhile, the quartz tube body 21 can be cleaned from top to bottom, and the quartz tube cleaning device is applicable to quartz tubes with different heights; the safety is high; convenience is brought to the use of the quartz tube in the future; the pull rod 4 is manually pulled outwards by a worker, so that the pull rod 4 pulls the annular sleeve 41 and the tension spring 42 is in a compressed state; when the quartz tube body 21 is placed inside the holder 2; when the pull rod 4 is loosened, the tension spring 42 is restored from the compression state, the annular sleeve 41 is driven to be propped against the outer surface of the quartz tube body 21, and at the moment, the annular sleeve 41 at different positions can give certain pressure to the quartz tube body 21, so that the phenomenon that the quartz tube is deviated during cleaning is avoided, and the cleaning efficiency is improved.
When the deflection rod 37 contacts with the surface of the quartz tube body 21, the deflection rod 37 simultaneously drives the pressing rod 51 on the side surface of the deflection rod to rotate, so that the pressing rod 51 drives the sliding rod 5 on the other side to move, and then the sliding rod 5 compresses the tension spring 52; at the moment, the slide bar 5 and the pressing bar 51 can provide certain limit for the deflection rod 37, so that the deflection rod 37 is prevented from rotating too much in angle, the scraping plate 38 is favorably clung to the inner wall of the quartz tube body 21, and the carbon deposition on the inner wall of the quartz tube body is conveniently cleaned; when the slide bar 5 moves downwards, the slide bar 5 simultaneously drives the extrusion blocks 53 on the left side and the right side of the slide bar to synchronously move, the extrusion blocks 53 are then contacted with the arc rods 56 and extrude the arc rods, and then the arc rods 56 on the two sides drive the piston plates 55 to move, so that the piston plates 55 push hydrofluoric acid solution in the liquid storage cavity 54 and flow to the inner wall of the quartz tube body 21 from an external liquid outlet pipe, the hydrofluoric acid solution can be automatically sprayed out, manual operation of a worker is avoided, the worker is prevented from being injured, the use is convenient, and the cleaning effect of the quartz tube is greatly improved; the circulation slot 351 is arranged, and hydrofluoric acid solution can be introduced into the liquid storage cavity 54 through the circulation slot 351, so that the hydrofluoric acid solution can be reused conveniently; when the cleaning rod 35 moves downwards, the cleaning ring seat 6 above the cleaning rod 35 can simultaneously abut against the outer wall of the quartz tube body 21, so that the cleaning ring seat 6 can simultaneously clean the outer wall of the quartz tube body 21, and can synchronously clean the inner wall and the outer wall, and the operation is simpler.
When the cleaning ring seat 6 is propped against the outer wall of the quartz tube body 21, the compression spring 61 can prop against the cleaning ring plate 62 under the compression of the compression spring 61, so that the cleaning ring plate 62 can tightly prop against the outer surface of the quartz tube body 21, and the cleaning of the outer wall of the quartz tube is facilitated; when the cleaning ring plate 62 is tightly attached to the outer wall of the quartz tube, the water absorbing ring plate 621 is simultaneously pressed, so that alcohol in the water absorbing ring plate 621 can be extruded out and flows to the outer wall of the quartz tube, and the operation is convenient.
The front, rear, left, right, up and down are all based on fig. 1 in the drawings of the specification, the face of the device facing the observer is defined as front, the left side of the observer is defined as left, and so on, according to the viewing angle of the person.
In the description of the present invention, it should be understood that the terms "center," "longitudinal," "lateral," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the scope of the present invention.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (6)
1. A cleaning method of a quartz tube of a silicon carbide crystal growth furnace is characterized by comprising the following steps: the method comprises the following steps:
s1, firstly, inserting the quartz tube bodies (21) into different clamping seats (2), and enabling the different quartz tube bodies (21) to correspond to different cleaning rods (35); then, an external power supply drives an air cylinder and a piston column in the air cylinder frame (101) to operate, so that the piston column drives the connecting plate (102) to move;
s2, the connecting plate 102 drives the pressing column (3) to press the rotating wheel (32), and the rotating wheel (32) is rotationally connected to the surface of the pressing column (3), and a guide groove (33) formed in the surface of the rotating wheel (32) is matched with the clamping column (34); when the pressing column (3) gives downward pressure to the rotating wheel (32), the pressing column (3) can drive the rotating wheel (32) to rotate in a downward rotating state under the action of the clamping column (34) and the guide groove (33), and the rotating wheel (32) can drive the cleaning rod (35) below the rotating wheel to move towards the inside of the quartz tube body (21);
s3, in the moving process of the cleaning rod (35), a deflection rod (37) on the outer surface of the cleaning rod (35) is firstly contacted with the quartz tube body (21) and drives the deflection rod (37) to rotate, so that the deflection rod (37) drives a scraping plate (38) to rotate, and then the scraping plate (38) is pressed against the inner wall of the quartz tube body (21) and scrapes carbon deposited on the inner wall of the quartz tube body (21);
the surface of the cleaning seat (1) is fixedly connected with clamping seats (2), the number of the clamping seats (2) is multiple, and the clamping seats are equidistantly connected to the upper surface of the cleaning seat (1); the inside of each clamping seat (2) is provided with a quartz tube body (21), the rear side of each cleaning seat (1) is fixedly connected with a cylinder frame (101), the lower part of each cylinder frame (101) is provided with a connecting plate (102), the lower surface of each connecting plate (102) is fixedly connected with a plurality of pressing columns (3) which are correspondingly arranged with the quartz tube bodies (21), and the upper part of each quartz tube body (21) is provided with a connecting seat (31); one end of the pressing column (3) penetrates through the inside of the connecting seat (31), a rotating wheel (32) is rotatably connected to the lower end face of the pressing column (3), a guide groove (33) is formed in the outer surface of the rotating wheel (32), and a clamping column (34) matched with the guide groove (33) is fixedly connected to the inside of the connecting seat (31); a cleaning rod (35) is fixedly connected to the lower end surface of the rotating wheel (32), a deflection rod (37) is rotatably connected to the outer surface of the cleaning rod (35), and a scraping plate (38) is fixedly connected to the outer surface of the deflection rod (37); a limiting frame (311) is arranged in the connecting seat (31), a limiting groove is formed in the surface of the limiting frame (311), and the diameter of the limiting groove is equal to that of the pressing column (3);
the inside of the clamping seat (2) is connected with a plurality of pull rods (4) in a sliding way, and the pull rods (4) are arranged in the clamping seat (2) in a circumferential array; the middle part of the pull rod (4) close to the clamping seat (2) is connected with an annular sleeve (41), and the outer surface of the pull rod (4) is connected with a tension spring (42) which is connected with the inner wall of the clamping seat (2); a sliding rod (5) is connected inside the cleaning rod (35) in a sliding way, and a pressing rod (51) is connected above the sliding rod (5) in a rotating way; one end of the pressing rod (51) is connected with the outer surface of the sliding rod (5), and the other end of the pressing rod is connected with the outer surface of the deflection rod (37); the bottom of the sliding rod (5) is fixedly connected with an extension spring (52) on the inner wall of the cleaning rod (35); the inside of the cleaning rod (35) is provided with a sliding groove matched with the sliding rod (5).
2. The method for cleaning a quartz tube of a silicon carbide crystal growth furnace according to claim 1, wherein the method comprises the steps of: the outer surface of the sliding rod (5) is fixedly connected with an extrusion block (53), the inside of the cleaning rod (35) is fixedly connected with a plurality of liquid storage cavities (54), and the number of the liquid storage cavities (54) is two and is symmetrically arranged left and right; the inside sliding connection of stock solution cavity (54) has piston board (55), one side that piston board (55) are close to slide bar (5) fixedly connected with arc pole (56), the equal fixedly connected with spacing spring (561) of inner wall that just is located stock solution cavity (54) of upper and lower both sides of arc pole (56), the width of piston board (55) equals with the width of stock solution cavity (54).
3. The method for cleaning a quartz tube of a silicon carbide crystal growth furnace according to claim 2, wherein: a circulation slot (351) is formed in the cleaning rod (35); the lower end of the circulation slot (351) penetrates through the inside of the liquid storage cavity (54).
4. The method for cleaning a quartz tube of a silicon carbide crystal growth furnace according to claim 2, wherein: the upper part of the cleaning rod (35) is fixedly connected with a cleaning ring seat (6), and the diameter of the cleaning ring seat (6) is larger than that of the quartz tube body (21).
5. The method for cleaning a quartz tube of a silicon carbide crystal growth furnace according to claim 4, wherein the method comprises the steps of: the inner wall fixedly connected with of clearance ring seat (6) sticiss spring (61), sticiss spring (61) and set up a plurality of, and be circumference array setting at the inner wall of clearance ring seat (6), sticiss spring (61) one side fixedly connected with clearance annular plate (62) near clearance pole (35).
6. The method for cleaning a quartz tube of a silicon carbide crystal growth furnace according to claim 5, wherein the method comprises the steps of: the outer surface of the cleaning ring plate (62) is fixedly connected with a water absorbing ring plate (621), and the diameter of the water absorbing ring plate (621) is larger than that of the cleaning ring plate (62).
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| CN115055452A (en) | 2022-09-16 |
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