CN115055452A - Method for cleaning quartz tube of silicon carbide crystal growth furnace - Google Patents
Method for cleaning quartz tube of silicon carbide crystal growth furnace Download PDFInfo
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- CN115055452A CN115055452A CN202210617683.XA CN202210617683A CN115055452A CN 115055452 A CN115055452 A CN 115055452A CN 202210617683 A CN202210617683 A CN 202210617683A CN 115055452 A CN115055452 A CN 115055452A
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- quartz tube
- rod
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- seat
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/023—Cleaning the external surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/04—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes
- B08B9/043—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes
- B08B9/045—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes the cleaning devices being rotated while moved, e.g. flexible rotating shaft or "snake"
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention belongs to the technical field of silicon carbide, and particularly relates to a method for cleaning a quartz tube of a silicon carbide crystal growth furnace, wherein the surface of a cleaning seat is fixedly connected with a plurality of clamping seats, and the clamping seats are connected to the upper surface of the cleaning seat at equal intervals; a quartz tube body is arranged in each clamping seat, the rear side of each cleaning seat is fixedly connected with a cylinder frame, a connecting plate is arranged below the cylinder frame, and the lower surface of the connecting plate is fixedly connected with a plurality of compression columns which are arranged corresponding to the quartz tube bodies; the scraping plate can scrape and clean the inner wall of the quartz tube body in a state of rotating downwards in the cleaning process; the inner wall of the quartz tube body is gradually cleaned; the phenomenon that workers need to clean manually at present is avoided, and the quartz tube body can be cleaned from top to bottom at the same time, so that the quartz tube cleaning machine is suitable for quartz tubes with different heights; and the safety is high; convenience is brought to the use of the quartz tube.
Description
Technical Field
The invention belongs to the technical field of silicon carbide, and particularly relates to a method for cleaning a quartz tube of a silicon carbide crystal growth furnace.
Background
The silicon carbide induction type crystal growth furnace adopts an induction heating mode, and is equipment for growing 6 inches of single crystal materials such as silicon carbide and the like by utilizing a physical vapor transport method in the atmosphere of argon, nitrogen (or a mixed gas of the argon and the nitrogen) or other process gases. Putting the raw materials and seed crystals into a graphite crucible, and wrapping the graphite crucible with a graphite soft felt thermal insulation material. The wrapped crucible is placed in a growth chamber, which is generally composed of a large-diameter high-purity quartz glass tube and metal flanges with two sealed ends.
The longer growth temperature in the growth chamber during operation may result in the impurities present in the graphite soft felt being volatilized at high temperatures and deposited on the quartz glass tube. In addition, the growth period is longer, so that the deposit is stubborn and compact; the cleaning machine is generally manually cleaned by workers, and more problems also occur during cleaning.
When the quartz tube is cleaned manually, the inner space of the quartz tube is limited, which is not beneficial to the operation of personnel and increases the labor intensity of the personnel; and because quartz capsule self height is higher, lead to the staff can not accomplish complete clearance in the clearance process.
Therefore, the invention provides a method for cleaning a quartz tube of a silicon carbide crystal growth furnace.
Disclosure of Invention
To remedy the deficiencies of the prior art, at least one of the technical problems set forth in the background is addressed.
The technical scheme adopted by the invention for solving the technical problems is as follows: the invention relates to a method for cleaning a quartz tube of a silicon carbide crystal growth furnace, which comprises the following steps:
s1, inserting the quartz tube bodies into different clamping seats, and enabling the different quartz tube bodies to correspond to different cleaning rods; then, an air cylinder and a piston column in the air cylinder frame are driven to operate by an external power supply, so that the piston column drives the connecting plate to move;
s2, the connecting plate drives the compression leg to press the rotating wheel downwards, the rotating wheel is connected to the surface of the compression leg in a rotating manner, and the guide groove formed in the surface of the rotating wheel is matched with the clamping leg; when the pressing column applies downward pressure to the rotating wheel, the pressing column can drive the rotating wheel to rotate downwards under the action of the clamping column and the guide groove, and the rotating wheel can simultaneously drive the cleaning rod below the rotating wheel to move towards the inside of the quartz tube body;
s3, in the moving process of the cleaning rod, the deflection rod on the outer surface of the cleaning rod is firstly contacted with the quartz tube body and drives the deflection rod to rotate, so that the deflection rod can drive the scraper to rotate, then the scraper can be pressed on the inner wall of the quartz tube body, and the deposited carbon on the inner wall of the quartz tube body is scraped.
By the cleaning method, the scraper can scrape and clean the inner wall of the quartz tube body in a state of rotating downwards in the cleaning process; the inner wall of the quartz tube body is gradually cleaned; the quartz tube cleaning machine is convenient and fast to operate, avoids the phenomenon that workers need to clean manually at present, can clean the quartz tube body from top to bottom, and can be suitable for quartz tubes with different heights; and the safety is high; convenience is brought to the use of the quartz tube.
Preferably, the surface of the cleaning seat is fixedly connected with a plurality of clamping seats, and the clamping seats are connected to the upper surface of the cleaning seat at equal intervals; a quartz tube body is arranged in each clamping seat, a cylinder frame is fixedly connected to the rear side of the cleaning seat, a connecting plate is arranged below the cylinder frame, a plurality of pressing columns which correspond to the quartz tube bodies are fixedly connected to the lower surface of the connecting plate, one ends of the pressing columns penetrate through the connecting seat, a rotating wheel is rotatably connected to the lower end surface of each pressing column, a guide groove is formed in the outer surface of each rotating wheel, and a clamping column matched with the guide groove is fixedly connected to the inside of the connecting seat; the lower end face of the rotating wheel is fixedly connected with a cleaning rod, the outer surface of the cleaning rod is rotatably connected with a deflection rod, and the outer surface of the deflection rod is fixedly connected with a scraper; in this embodiment, the cylinder and the piston column are disposed inside the cylinder block, and the connection manner between the cylinder and the connecting plate is the prior art, which is not described in detail in this embodiment; when the quartz tube is cleaned manually, the inner space of the quartz tube is limited, which is not beneficial to the operation of personnel and increases the labor intensity of the personnel; moreover, the height of the quartz tube is high, so that workers cannot completely clean the quartz tube in the cleaning process; when in work; when the quartz tube is cleaned, the quartz tube body is firstly inserted into different clamping seats, and different quartz tube bodies correspond to different cleaning rods; then, an air cylinder and a piston column in the air cylinder frame are driven to operate by an external power supply, so that the piston column drives the connecting plate to move; the connecting plate can drive the compression leg to press the rotating wheel downwards, and the rotating wheel is connected to the surface of the compression leg in a rotating manner, and a guide groove formed in the surface of the rotating wheel is matched with the clamping leg; when the pressing column applies downward pressure to the rotating wheel, the pressing column can drive the rotating wheel to rotate in a downward rotating state under the action of the clamping column and the guide groove, and the rotating wheel can simultaneously drive the cleaning rod below the rotating wheel to move towards the inside of the quartz tube body; in the cleaning process, the scraper can scrape and clean the inner wall of the quartz tube body in a state of rotating downwards; the inner wall of the quartz tube body is gradually cleaned; the quartz tube cleaning machine is convenient and fast to operate, avoids the phenomenon that workers need to clean manually at present, can clean the quartz tube body from top to bottom, and can be suitable for quartz tubes with different heights; and the safety is high; convenience is brought to the use of the quartz tube.
Preferably, a limiting frame is arranged inside the connecting seat, a limiting groove is formed in the surface of the limiting frame, and the diameter of the limiting groove is equal to that of the compression column; when the device works, the limiting frame is arranged, so that the compression columns can move on the same vertical line, and the compression columns are limited; thereby being beneficial to the compression leg to drive the rotating wheel on the lower surface to rotate, and being convenient for cleaning the quartz tube.
Preferably, a plurality of pull rods are slidably connected inside the clamping seat, and the pull rods are arranged inside the clamping seat in a circumferential array; the middle part of the pull rod, which is close to the clamping seat, is connected with an annular sleeve, and the outer surface of the pull rod is connected with the inner wall of the clamping seat to form a tension spring; when in work; the pull rod is manually pulled outwards by a worker, so that the pull rod pulls the annular sleeve and the tension spring is in a compressed state; when the quartz tube body is placed in the clamping seat; loosening the pull rod, under the extension spring is recovered by the compression state, can drive the annular cover and support and press the surface at the quartz capsule body, the annular cover of different departments can give the certain pressure of quartz capsule body this moment, avoids the phenomenon that the skew appears in the quartz capsule when the clearance, has improved cleaning efficiency.
Preferably, a sliding rod is connected inside the cleaning rod in a sliding manner, and a pressing rod is rotatably connected above the sliding rod; one end of the abutting rod is connected with the outer surface of the sliding rod, and the other end of the abutting rod is connected with the outer surface of the deflection rod; the bottom of the sliding rod and the inner wall of the cleaning rod are fixedly connected with an extension spring; a sliding groove matched with the sliding rod is formed in the cleaning rod; when the quartz tube is in work, when the deflection rod is in contact with the surface of the quartz tube body, the deflection rod can simultaneously drive the abutting rod on the side surface of the deflection rod to rotate, so that the abutting rod can drive the sliding rod on the other side to move, and then the sliding rod can compress the extension spring; the slide bar can give the deflection bar certain spacing with pressing the pole this moment, avoids the deflection bar turned angle too big to be favorable to the scraper blade to hug closely at the inner wall of quartz capsule body, be convenient for to the clearance of its inner wall carbon deposit.
Preferably, the outer surface of the sliding rod is fixedly connected with an extrusion block, a plurality of liquid storage cavities are fixedly connected inside the cleaning rod, and the two liquid storage cavities are arranged in a left-right symmetrical manner; a piston plate is connected inside the liquid storage cavity in a sliding mode, an arc-shaped rod is fixedly connected to one side, close to the sliding rod, of the piston plate, limiting springs are fixedly connected to the upper side and the lower side of the arc-shaped rod and located on the inner wall of the liquid storage cavity, and the width of the piston plate is equal to that of the liquid storage cavity; in this embodiment, the outer surface of the liquid storage cavity is connected with a liquid outlet pipe; when in work; when the slide bar moves down, the slide bar can drive the extrusion piece synchronous motion of its left and right sides simultaneously, the extrusion piece can contact each other and extrude it with the arc pole afterwards, the arc pole of later both sides can drive the piston board and remove, make the piston board promote the inside hydrofluoric acid solution of stock solution cavity, and from the inner wall of external drain pipe flow direction quartz capsule body, hydrofluoric acid solution can spout automatically, staff manual operation has been avoided, and avoided the staff to receive the injury, high durability and convenient use, the cleaning effect of quartz capsule has been improved greatly.
Preferably, a circulation slotted hole is formed in the cleaning rod; the lower end of the circulation slotted hole penetrates through the liquid storage cavity; set up the circulation slotted hole, can let in hydrofluoric acid solution to stock solution cavity inside through this circulation slotted hole, and then conveniently to the reuse of hydrofluoric acid solution.
Preferably, a cleaning ring seat is fixedly connected above the cleaning rod, and the diameter of the cleaning ring seat is larger than that of the quartz tube body; the during operation, when the clearance pole moves down, the clearance ring seat of clearance pole top can support simultaneously and press at the outer wall of quartz capsule body, makes the clearance ring seat simultaneously to the outer wall clearance of quartz capsule body, can be in step to inner wall and outer wall clearance, operates comparatively simply.
Preferably, the inner wall of the cleaning ring seat is fixedly connected with a plurality of compression springs which are arranged on the inner wall of the cleaning ring seat in a circumferential array, and one side of each compression spring, which is close to the cleaning rod, is fixedly connected with a cleaning ring plate; during operation, support when pressing at quartz capsule body outer wall at the clearance ring seat, under the compression that sticiss the spring, sticiss the spring and can support and press the clearance crown plate to the clearance crown plate can tightly support and press the surface at the quartz capsule body, thereby is favorable to the clearance to the quartz capsule outer wall.
Preferably, the outer surface of the cleaning ring plate is fixedly connected with a water absorption ring plate, and the diameter of the water absorption ring plate is larger than that of the cleaning ring plate; in this embodiment, alcohol is filled in the water absorption ring plate, and sponge is filled in the water absorption ring plate; during operation, when the cleaning ring plate is tightly attached to the outer wall of the quartz tube, the water absorption ring plate is simultaneously pressurized, so that alcohol in the water absorption ring plate can be extruded out and flows to the outer wall of the quartz tube, and the operation is convenient.
The invention has the following beneficial effects:
1. according to the method for cleaning the quartz tube of the silicon carbide crystal growth furnace, in the moving process of the cleaning rod, the deflection rod on the outer surface of the cleaning rod is firstly contacted with the quartz tube body and drives the deflection rod to rotate, so that the deflection rod drives the scraper to rotate, then the scraper is pressed against the inner wall of the quartz tube body, and carbon deposition accumulated on the inner wall of the quartz tube body is scraped; in the cleaning process, the scraper can scrape and clean the inner wall of the quartz tube body in a state of rotating downwards; the inner wall of the quartz tube body is gradually cleaned; the quartz tube cleaning machine is convenient and fast to operate, avoids the phenomenon that workers need to clean manually at present, can clean the quartz tube body from top to bottom, and can be suitable for quartz tubes with different heights; and the safety is high; convenience is brought to the use of the quartz tube.
2. According to the method for cleaning the quartz tube of the silicon carbide crystal growth furnace, when the slide rod moves downwards, the slide rod can simultaneously drive the extrusion blocks on the left side and the right side to synchronously move, the extrusion blocks can then be in contact with the arc-shaped rods and extrude the arc-shaped rods, and then the arc-shaped rods on the two sides can drive the piston plate to move, so that the piston plate pushes hydrofluoric acid solution in the liquid storage cavity and flows to the inner wall of the quartz tube body from the external liquid outlet tube, the hydrofluoric acid solution can be automatically sprayed out, manual operation of workers is avoided, the workers are prevented from being injured, the use is convenient, and the cleaning effect of the quartz tube is greatly improved.
Drawings
The invention will be further explained with reference to the drawings.
FIG. 1 is a perspective view of a cleaning base of the present invention;
FIG. 2 is a cross-sectional view of the present invention;
FIG. 3 is an enlarged view of the structure of FIG. 2 according to the present invention;
FIG. 4 is a cross-sectional view of the holder of the present invention;
FIG. 5 is an enlarged view of the structure of FIG. 2B in accordance with the present invention;
FIG. 6 is a schematic view of a deflection rod portion of the present invention;
FIG. 7 is a schematic view of a portion of the cleaning ring plate of the present invention;
FIG. 8 is a schematic structural view of a water absorption ring plate according to a second embodiment of the present invention;
fig. 9 is a flow chart of a method in the present invention.
In the figure: 1. cleaning a seat; 101. a cylinder frame; 102. a connecting plate; 2. a clamping seat; 21. a quartz tube body; 3. pressing the column; 31. a connecting seat; 311. a limiting frame; 32. a rotating wheel; 33. a guide groove; 34. clamping the column; 35. cleaning the rod; 351. a flow through slot; 37. a deflection bar; 38. a squeegee; 4. a pull rod; 41. an annular sleeve; 42. a tension spring; 5. a slide bar; 51. a pressing rod is abutted; 52. an extension spring; 53. extruding the block; 54. a liquid storage cavity; 55. a piston plate; 56. an arcuate bar; 561. a limiting spring; 6. cleaning the ring seat; 61. a compression spring; 62. cleaning the ring plate; 621. and (5) a water absorption ring plate.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
Example one
As shown in fig. 9, a method for cleaning a quartz tube of a silicon carbide crystal growth furnace comprises the following steps:
s1, inserting the quartz tube body 21 into different clamping seats 2, and enabling different quartz tube bodies 21 to correspond to different cleaning rods 35; then, an air cylinder and a piston column in the air cylinder frame 101 are driven to operate by an external power supply, so that the piston column drives the connecting plate 102 to move;
s2, the connecting plate 102 drives the compression leg 3 to press the rotating wheel 32, the rotating wheel 32 is connected to the surface of the compression leg 3 in a rotating manner, and the guide groove 33 formed in the surface of the rotating wheel 32 is matched with the clamping leg 34; when the pressing column 3 applies downward pressure to the rotating wheel 32, the pressing column 3 can drive the rotating wheel 32 to rotate downwards under the action of the clamping column 34 and the guide groove 33, and the rotating wheel 32 can simultaneously drive the cleaning rod 35 below the rotating wheel to move towards the inside of the quartz tube body 21;
s3, in the moving process of the cleaning rod 35, the deflection rod 37 on the outer surface of the cleaning rod 35 firstly contacts with the quartz tube body 21 and drives the deflection rod 37 to rotate, so that the deflection rod 37 drives the scraper 38 to rotate, then the scraper 38 is pressed against the inner wall of the quartz tube body 21, and the accumulated carbon on the inner wall of the quartz tube body 21 is scraped.
By the cleaning method, the scraper 38 can scrape and clean the inner wall of the quartz tube body 21 in a state of rotating downwards in the cleaning process; gradually cleaning the inner wall of the quartz tube body 21; the operation is convenient, the phenomenon that workers need to clean manually at present is avoided, the quartz tube body 21 can be cleaned from top to bottom, the quartz tube cleaning machine is suitable for quartz tubes with different heights, and the safety is high; brings convenience for the later use of the quartz tube.
As shown in fig. 1 to 3 and 6, a plurality of clamping seats 2 are fixedly connected to the surface of the cleaning seat 1, and the clamping seats 2 are connected to the upper surface of the cleaning seat 1 at equal intervals; a quartz tube body 21 is arranged inside each clamping seat 2, a cylinder frame 101 is fixedly connected to the rear side of the cleaning seat 1, a connecting plate 102 is arranged below the cylinder frame 101, a plurality of compression columns 3 which correspond to the quartz tube body 21 are fixedly connected to the lower surface of the connecting plate 102, and a connecting seat 31 is arranged above the quartz tube body 21; one end of the compression leg 3 penetrates through the inside of the connecting seat 31, the lower end face of the compression leg 3 is rotatably connected with a rotating wheel 32, the outer surface of the rotating wheel 32 is provided with a guide groove 33, and the inside of the connecting seat 31 is fixedly connected with a clamping column 34 matched with the guide groove 33; a cleaning rod 35 is fixedly connected to the lower end face of the rotating wheel 32, a deflection rod 37 is rotatably connected to the outer surface of the cleaning rod 35, and a scraper 38 is fixedly connected to the outer surface of the deflection rod 37; in this embodiment, the cylinder and the piston column are arranged inside the cylinder frame 101, and the connection manner between the cylinder and the connecting plate 102 is the prior art, which is not described in detail in this embodiment; when the quartz tube is cleaned manually, the inner space of the quartz tube is limited, which is not beneficial to the operation of personnel and increases the labor intensity of the personnel; moreover, the height of the quartz tube is high, so that workers cannot completely clean the quartz tube in the cleaning process; when in work; when the quartz tube is cleaned, the quartz tube body 21 is inserted into different clamping seats 2, and different quartz tube bodies 21 correspond to different cleaning rods 35; then, an air cylinder and a piston column in the air cylinder frame 101 are driven to operate by an external power supply, so that the piston column drives the connecting plate 102 to move; then the connecting plate 102 will drive the compression leg 3 to press the rotating wheel 32, because the rotating wheel 32 is connected to the surface of the compression leg 3 in a rotating way, and the guide groove 33 formed on the surface of the rotating wheel 32 is matched with the clamping column 34; when the compression leg 3 applies downward pressure to the rotating wheel 32, the compression leg 3 can drive the rotating wheel 32 to rotate while rotating under the action of the clamping column 34 and the guide groove 33, and the rotating wheel 32 can simultaneously drive the cleaning rod 35 below the rotating wheel to move towards the inside of the quartz tube body 21, during the movement process of the cleaning rod 35, the deflection rod 37 on the outer surface of the cleaning rod 35 can firstly contact with the quartz tube body 21 and drive the deflection rod 37 to rotate, so that the deflection rod 37 can drive the scraper 38 to rotate, and then the scraper 38 can be pressed against the inner wall of the quartz tube body 21 and scrape off carbon deposition accumulated on the inner wall of the quartz tube body 21; in addition, the scraper 38 can scrape and clean the inner wall of the quartz tube body 21 in a state of rotating downwards in the cleaning process; gradually cleaning the inner wall of the quartz tube body 21; the operation is convenient, the phenomenon that workers need to clean manually at present is avoided, the quartz tube body 21 can be cleaned from top to bottom, and the quartz tube cleaning machine is suitable for quartz tubes with different heights; and the safety is high; convenience is brought to the use of the quartz tube.
As shown in fig. 2, a limiting frame 311 is disposed inside the connecting seat 31, a limiting groove is disposed on a surface of the limiting frame 311, and a diameter of the limiting groove is equal to a diameter of the compression leg 3; when the device works, the limiting frame 311 is arranged, so that the compression columns 3 can move on the same vertical line, and the limiting effect on the compression columns 3 is achieved; thereby being beneficial to the compression leg 3 to drive the rotating wheel 32 on the lower surface to rotate, and being convenient for cleaning the quartz tube.
As shown in fig. 2 to 4, a plurality of pull rods 4 are slidably connected inside the clamping base 2, and the pull rods 4 are arranged inside the clamping base 2 in a circumferential array; the middle part of the pull rod 4 close to the clamping seat 2 is connected with an annular sleeve 41, and the outer surface of the pull rod 4 and the inner wall of the clamping seat 2 are connected with a tension spring 42; when in work; the pull rod 4 is pulled outwards manually by a worker, so that the pull rod 4 pulls the annular sleeve 41 and the tension spring 42 is in a compressed state; when the quartz tube body 21 is placed inside the holder 2; loosening pull rod 4, under extension spring 42 is recovered by the compression state, can drive annular cover 41 and support and press at the surface of quartz capsule body 21, the annular cover 41 of different places can give certain pressure to quartz capsule body 21 this moment, avoids the phenomenon that the quartz capsule squinted when the clearance, has improved cleaning efficiency.
As shown in fig. 2 to 6, a sliding rod 5 is slidably connected inside the cleaning rod 35, and a pressing rod 51 is rotatably connected above the sliding rod 5; one end of the compression bar 51 is connected with the outer surface of the sliding bar 5, and the other end is connected with the outer surface of the deflection bar 37; an extension spring 52 is fixedly connected to the bottom of the sliding rod 5 and the inner wall of the cleaning rod 35; a sliding groove matched with the sliding rod 5 is formed in the cleaning rod 35; during operation, when the deflection rod 37 contacts with the surface of the quartz tube body 21, the deflection rod 37 will drive the pressing rod 51 on the side surface to rotate, so that the pressing rod 51 will drive the slide rod 5 on the other side to move, and then the slide rod 5 will compress the extension spring 52; at the moment, the sliding rod 5 and the abutting rod 51 can limit the deflection rod 37 to a certain extent, so that the deflection rod 37 is prevented from rotating too much, the scraper 38 is favorably attached to the inner wall of the quartz tube body 21 tightly, and carbon deposition on the inner wall of the quartz tube body is conveniently cleaned.
As shown in fig. 2 to 5, an extrusion block 53 is fixedly connected to an outer surface of the sliding rod 5, a plurality of liquid storage cavities 54 are fixedly connected to an inner portion of the cleaning rod 35, and the number of the liquid storage cavities 54 is two and the two liquid storage cavities 54 are arranged in bilateral symmetry; a piston plate 55 is connected inside the liquid storage cavity 54 in a sliding manner, an arc-shaped rod 56 is fixedly connected to one side, close to the sliding rod 5, of the piston plate 55, limiting springs 561 are fixedly connected to the upper side and the lower side of the arc-shaped rod 56 and located on the inner wall of the liquid storage cavity 54, and the width of the piston plate 55 is equal to that of the liquid storage cavity 54; in this embodiment, the outer surface of the liquid storage cavity 54 is connected with a liquid outlet pipe; when in work; when slide bar 5 moves down, slide bar 5 can drive the extrusion piece 53 synchronous motion of its left and right sides simultaneously, extrusion piece 53 can contact each other and extrude it with arc 56 afterwards, later the arc 56 of both sides can drive piston plate 55 and remove, make piston plate 55 promote the inside hydrofluoric acid solution of stock solution cavity 54, and from the inner wall of external drain pipe flow direction quartz capsule body 21, hydrofluoric acid solution can spout automatically, staff's manual operation has been avoided, and avoided the staff to receive the injury, high durability and convenient use, quartz capsule's clearance effect has been improved greatly.
As shown in fig. 6, a flow slot 351 is formed inside the cleaning rod 35; the lower end of the flow groove hole 351 penetrates through the liquid storage cavity 54; set up circulation slotted hole 351, can let in hydrofluoric acid solution to stock solution cavity 54 inside through this circulation slotted hole 351, and then conveniently to the reuse of hydrofluoric acid solution.
As shown in fig. 7, a cleaning ring seat 6 is fixedly connected above the cleaning rod 35, and the diameter of the cleaning ring seat 6 is larger than that of the quartz tube body 21; the during operation, when clearance pole 35 moves down, clearance ring seat 6 of clearance pole 35 top can support simultaneously and press at the outer wall of quartz capsule body 21, makes clearance ring seat 6 simultaneously to the outer wall clearance of quartz capsule body 21, can be in step to inner wall and outer wall clearance, operates comparatively simply.
The inner wall of the cleaning ring seat 6 is fixedly connected with a plurality of compression springs 61, the compression springs 61 are arranged on the inner wall of the cleaning ring seat 6 in a circumferential array, and one side, close to the cleaning rod 35, of each compression spring 61 is fixedly connected with a cleaning ring plate 62; during operation, support at clearance ring seat 6 and press when the quartz capsule body 21 outer wall, under the compression that sticiss spring 61, sticiss spring 61 and can support and press clearance ring board 62 to clearance ring board 62 can tightly support and press the surface at quartz capsule body 21, thereby is favorable to the clearance to the quartz capsule outer wall.
Example two
As shown in fig. 8, a first comparative example, in which another embodiment of the present invention is: the outer surface of the cleaning ring plate 62 is fixedly connected with a water absorption ring plate 621, and the diameter of the water absorption ring plate 621 is larger than that of the cleaning ring plate 62; in this embodiment, the inside of the water absorption ring plate 621 is filled with alcohol, and the inside of the water absorption ring plate 621 is filled with sponge; during operation, when the cleaning ring plate 62 is tightly attached to the outer wall of the quartz tube, the water absorption ring plate 621 is pressed at the same time, so that the alcohol inside the water absorption ring plate 621 can be extruded out and flows to the outer wall of the quartz tube, and the operation is convenient.
When the quartz tube cleaning device works, the quartz tube bodies 21 are inserted into different clamping seats 2, and different quartz tube bodies 21 correspond to different cleaning rods 35; then, an air cylinder and a piston column in the air cylinder frame 101 are driven to operate by an external power supply, so that the piston column drives the connecting plate 102 to move; then the connecting plate 102 will drive the compression leg 3 to press the rotating wheel 32, because the rotating wheel 32 is connected to the surface of the compression leg 3 in a rotating way, and the guide groove 33 formed on the surface of the rotating wheel 32 is matched with the clamping column 34; when the compression column 3 applies downward pressure to the rotating wheel 32, the compression column 3 can drive the rotating wheel 32 to rotate in a downward rotating state under the action of the clamping column 34 and the guide groove 33, the rotating wheel 32 can simultaneously drive the cleaning rod 35 below the rotating wheel to move towards the inside of the quartz tube body 21, and in the moving process of the cleaning rod 35, the deflection rod 37 on the outer surface of the cleaning rod 35 can firstly contact with the quartz tube body 21 and drive the deflection rod 37 to rotate, so that the deflection rod 37 can drive the scraper 38 to rotate, then the scraper 38 can be pressed against the inner wall of the quartz tube body 21, and the accumulated carbon deposition on the inner wall of the quartz tube body 21 is scraped; in addition, the scraper 38 can scrape and clean the inner wall of the quartz tube body 21 in a state of rotating downwards in the cleaning process; gradually cleaning the inner wall of the quartz tube body 21; the operation is convenient, the phenomenon that workers need to clean manually at present is avoided, the quartz tube body 21 can be cleaned from top to bottom, and the quartz tube cleaning machine is suitable for quartz tubes with different heights; and the safety is high; convenience is brought to the use of the quartz tube; the pull rod 4 is pulled outwards manually by a worker, so that the pull rod 4 pulls the annular sleeve 41 and the tension spring 42 is in a compressed state; when the quartz tube body 21 is placed inside the holder 2; the pull rod 4 is loosened, the tension spring 42 is restored from a compressed state, the annular sleeve 41 is driven to abut against the outer surface of the quartz tube body 21, certain pressure can be applied to the quartz tube body 21 by the annular sleeve 41 at different positions, the phenomenon that the quartz tube deviates during cleaning is avoided, and the cleaning efficiency is improved.
When the deflection rod 37 contacts with the surface of the quartz tube body 21, the deflection rod 37 will drive the pressing rod 51 on the side surface to rotate, so that the pressing rod 51 will drive the slide rod 5 on the other side to move, and then the slide rod 5 will compress the extension spring 52; at the moment, the sliding rod 5 and the abutting rod 51 can limit the deflection rod 37 to a certain extent, so that the deflection rod 37 is prevented from rotating too much, the scraper 38 is favorably attached to the inner wall of the quartz tube body 21, and carbon deposits on the inner wall of the quartz tube body are conveniently cleaned; when the slide bar 5 moves downwards, the slide bar 5 can simultaneously drive the extrusion blocks 53 on the left side and the right side to synchronously move, the extrusion blocks 53 can then contact with the arc-shaped rods 56 and extrude the arc-shaped rods, and then the arc-shaped rods 56 on the two sides can drive the piston plate 55 to move, so that the piston plate 55 pushes hydrofluoric acid solution in the liquid storage cavity 54 and flows to the inner wall of the quartz tube body 21 from the external liquid outlet tube, the hydrofluoric acid solution can be automatically sprayed out, the manual operation of workers is avoided, the workers are prevented from being injured, the use is convenient, and the cleaning effect of the quartz tube is greatly improved; the circulation groove hole 351 is formed, and hydrofluoric acid solution can be introduced into the liquid storage cavity 54 through the circulation groove hole 351, so that the hydrofluoric acid solution can be reused conveniently; when clearance pole 35 moves down, clearance ring seat 6 of clearance pole 35 top can support simultaneously and press at the outer wall of quartz capsule body 21, makes clearance ring seat 6 simultaneously to the outer wall clearance of quartz capsule body 21, can be in step to inner wall and outer wall clearance, and the operation is comparatively simple.
When the cleaning ring seat 6 is pressed against the outer wall of the quartz tube body 21, the pressing spring 61 is pressed against the cleaning ring plate 62 under the compression of the pressing spring 61, so that the cleaning ring plate 62 is tightly pressed against the outer surface of the quartz tube body 21, and the cleaning of the outer wall of the quartz tube is facilitated; when the cleaning ring plate 62 is tightly attached to the outer wall of the quartz tube, the water absorption ring plate 621 is pressed at the same time, so that the alcohol inside the water absorption ring plate 621 is extruded out and flows to the outer wall of the quartz tube, and the operation is convenient.
The front, the back, the left, the right, the upper and the lower are all based on figure 1 in the attached drawings of the specification, according to the standard of the observation angle of a person, the side of the device facing an observer is defined as the front, the left side of the observer is defined as the left, and the like.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present invention and for simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the scope of the present invention.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. A method for cleaning a quartz tube of a silicon carbide crystal growth furnace is characterized by comprising the following steps: the method comprises the following steps:
s1, inserting the quartz tube bodies (21) into different clamping seats (2) and enabling the different quartz tube bodies (21) to correspond to different cleaning rods (35); then, an air cylinder and a piston column in the air cylinder frame (101) are driven to operate by an external power supply, so that the piston column drives the connecting plate (102) to move;
s2, the connecting plate 102 drives the compression leg (3) to press the rotating wheel (32) downwards, the rotating wheel (32) is rotatably connected to the surface of the compression leg (3), and the guide groove (33) formed on the surface of the rotating wheel (32) is matched with the clamping column (34); when the pressure column (3) gives downward pressure to the rotating wheel (32), the pressure column (3) can drive the rotating wheel (32) to rotate downwards under the action of the clamping column (34) and the guide groove (33), and the rotating wheel (32) can simultaneously drive the cleaning rod (35) below the rotating wheel to move towards the inside of the quartz tube body (21);
s3, in the moving process of the cleaning rod (35), the deflection rod (37) on the outer surface of the cleaning rod (35) is firstly contacted with the quartz tube body (21) and drives the deflection rod (37) to rotate, so that the deflection rod (37) drives the scraper (38) to rotate, then the scraper (38) is pressed against the inner wall of the quartz tube body (21), and carbon deposition accumulated on the inner wall of the quartz tube body (21) is scraped.
2. The method for cleaning the quartz tube of the silicon carbide crystal growing furnace according to claim 1, wherein the method comprises the following steps: the surface of the cleaning seat (1) is fixedly connected with a plurality of clamping seats (2), and the clamping seats (2) are connected to the upper surface of the cleaning seat (1) at equal intervals; a quartz tube body (21) is arranged in each clamping seat (2), a cylinder frame (101) is fixedly connected to the rear side of the cleaning seat (1), a connecting plate (102) is arranged below the cylinder frame (101), a plurality of compression columns (3) which are arranged corresponding to the quartz tube body (21) are fixedly connected to the lower surface of the connecting plate (102), and a connecting seat (31) is arranged above the quartz tube body (21); one end of the compression leg (3) penetrates through the inside of the connecting seat (31), the lower end face of the compression leg (3) is rotatably connected with a rotating wheel (32), the outer surface of the rotating wheel (32) is provided with a guide groove (33), and the inside of the connecting seat (31) is fixedly connected with a clamping column (34) matched with the guide groove (33); the lower terminal surface rigid coupling of rotating wheel (32) has clearance pole (35), the surface of clearance pole (35) rotates and is connected with deflection pole (37), the surface rigid coupling of deflection pole (37) has scraper blade (38).
3. The method for cleaning the quartz tube of the silicon carbide crystal growing furnace according to claim 2, wherein the method comprises the following steps: the inside of connecting seat (31) is provided with spacing frame (311), the spacing groove has been seted up on the surface of spacing frame (311), and the diameter of spacing groove equals with the diameter of compression leg (3).
4. The method for cleaning the quartz tube of the silicon carbide crystal growing furnace according to claim 2, wherein the method comprises the following steps: a plurality of pull rods (4) are connected inside the clamping seat (2) in a sliding manner, and the pull rods (4) are arranged inside the clamping seat (2) in a circumferential array manner; the middle part that pull rod (4) is close to grip slipper (2) is connected with annular cover (41), the surface of pull rod (4) just is connected with extension spring (42) with grip slipper (2) inner wall.
5. The method for cleaning the quartz tube of the silicon carbide crystal growing furnace according to claim 2, wherein the method comprises the following steps: a sliding rod (5) is connected to the inside of the cleaning rod (35) in a sliding manner, and a pressing rod (51) is rotatably connected to the upper side of the sliding rod (5); one end of the pressing rod (51) is connected with the outer surface of the sliding rod (5), and the other end of the pressing rod is connected with the outer surface of the deflection rod (37); the bottom of the sliding rod (5) and the inner wall of the cleaning rod (35) are fixedly connected with an extension spring (52); the cleaning rod (35) is internally provided with a sliding groove matched with the sliding rod (5).
6. The method for cleaning the quartz tube of the silicon carbide crystal growing furnace according to claim 5, wherein the method comprises the following steps: the outer surface of the sliding rod (5) is fixedly connected with an extrusion block (53), a plurality of liquid storage cavities (54) are fixedly connected inside the cleaning rod (35), and the two liquid storage cavities (54) are arranged in a bilateral symmetry manner; the piston plate (55) is connected to the liquid storage cavity (54) in a sliding mode, an arc-shaped rod (56) is fixedly connected to one side, close to the sliding rod (5), of the piston plate (55), limiting springs (561) are fixedly connected to the upper side and the lower side of the arc-shaped rod (56) and located on the inner wall of the liquid storage cavity (54), and the width of the piston plate (55) is equal to the width of the liquid storage cavity (54).
7. The method for cleaning the quartz tube of the silicon carbide crystal growing furnace according to claim 5, wherein the method comprises the following steps: a circulation groove hole (351) is formed in the cleaning rod (35); the lower end of the circulation groove hole (351) penetrates through the liquid storage cavity (54).
8. The method for cleaning the quartz tube of the silicon carbide crystal growing furnace according to claim 5, wherein the method comprises the following steps: the upper portion of the cleaning rod (35) is fixedly connected with a cleaning ring seat (6), and the diameter of the cleaning ring seat (6) is larger than that of the quartz tube body (21).
9. The method for cleaning the quartz tube of the silicon carbide crystal growing furnace according to claim 8, wherein the method comprises the following steps: the inner wall fixedly connected with of clearance ring seat (6) sticiss spring (61), sticis spring (61) and sets up a plurality ofly, and is the inner wall of circumference array setting at clearance ring seat (6), sticis spring (61) and is close to one side fixedly connected with clearance crown plate (62) of clearance pole (35).
10. The method for cleaning the quartz tube of the silicon carbide crystal growing furnace according to claim 9, wherein the method comprises the following steps: the outer surface of the cleaning ring plate (62) is fixedly connected with a water absorption ring plate (621), and the diameter of the water absorption ring plate (621) is larger than that of the cleaning ring plate (62).
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| CN115055452B (en) | 2023-09-22 |
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