CN115046689B - Leakage detection tool and method for magnetic fluid rotary sealing mechanism - Google Patents
Leakage detection tool and method for magnetic fluid rotary sealing mechanism Download PDFInfo
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- CN115046689B CN115046689B CN202210984278.1A CN202210984278A CN115046689B CN 115046689 B CN115046689 B CN 115046689B CN 202210984278 A CN202210984278 A CN 202210984278A CN 115046689 B CN115046689 B CN 115046689B
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
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- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
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Abstract
The invention provides a leakage detection tool and a leakage detection method for a magnetic fluid rotary sealing mechanism. And during leakage detection, the leakage detection tool is respectively connected with the gas detection device and the detected magnetofluid rotary sealing mechanism, gas to be detected is introduced from the lower part of the magnetofluid, and the sealing performance of the magnetofluid rotary sealing mechanism is judged according to the detection result of the gas detection device. The leakage detection tool can ensure that the rotary sealing mechanism of the magnetic fluid can adjust and reassemble the structure with poor sealing performance in the installation process, has the advantages of simple structure, convenient operation, high leakage detection precision and high assembly and disassembly speed, can improve the working efficiency, and can measure the vacuum degree of the magnetic fluid to the greatest extent.
Description
Technical Field
The invention belongs to the technical field of semiconductor high-end equipment manufacturing and vapor deposition equipment, and relates to a leakage detection tool and a leakage detection method for a magnetic fluid rotary sealing mechanism.
Background
The rotary sealing mechanism is a key module for determining a film process of vapor deposition equipment, and particularly, the quality of a coating film is directly influenced by the sealing performance of the magnetic fluid rotary sealing mechanism. In the process of assembling a vapor deposition device (such as a Chemical Vapor Deposition (CVD) device) with a magnetic fluid rotary sealing mechanism, in order to ensure high sealing performance, sealing rings are generally arranged at both ends of the magnetic fluid.
Because certain errors inevitably exist in the aspects of manual assembly and part machining precision, high sealing can not be guaranteed after the installation. All judge the sealing performance of magnetic fluid rotary seal mechanism through the actual conditions of equipment operation after the equipment finishes among the current public technique, the installation is loaded down with trivial details with the dismantlement process, can't adjust and repack the structure that the leakproofness is not good in the installation, has increased the cost of labor in the operation undoubtedly.
Disclosure of Invention
In view of the above disadvantages of the prior art, the present invention aims to provide a leakage detection tool and a leakage detection method for a magnetic fluid rotary sealing mechanism, which are used to solve the problems that the installation and disassembly processes of the existing magnetic fluid rotary sealing mechanism are complicated, the structure with poor sealing performance cannot be adjusted and reassembled in the installation process, the labor cost is high, and the like.
To achieve the above and other related objects, the present invention provides a leakage detecting tool for a magnetic fluid rotary sealing mechanism, comprising:
a connecting structure;
the ventilation structure comprises a ventilation pipe, a first sealing plate, a first sealing ring, a second sealing plate, a second sealing ring, a ventilation channel, a fixing rod and a first fixed combination part, wherein the top end of the ventilation pipe is connected with the connection structure, the bottom end of the ventilation pipe is connected with the first sealing plate, the first sealing ring is arranged on the bottom surface of the first sealing plate, the second sealing plate is connected with the first sealing plate, the side edge of the first sealing plate horizontally protrudes out of the side edge of the second sealing plate, the second sealing ring is arranged on the bottom surface of the second sealing plate, the ventilation channel extends from the side wall opening of the second sealing plate to the inside of the second sealing plate until the ventilation channel is communicated with the ventilation pipe, the top end of the fixing rod is connected with the second sealing plate, and the bottom end of the fixing rod is connected with the first fixed combination part;
the fixing structure comprises an auxiliary fixing part, a pull rod, a second fixing combination part, a pin shaft and an eccentric clamping handle, wherein the auxiliary fixing part is hollow and provided with a top opening and a bottom opening, the second fixing combination part is positioned in the inner space of the auxiliary fixing part and detachably connected with the first fixing combination part, the pull rod penetrates through the bottom opening, the top end of the pull rod is connected with the second fixing combination part, the bottom end of the pull rod protrudes out of the auxiliary fixing part, and the eccentric clamping handle is positioned below the auxiliary fixing part and is connected with the pull rod in a rotating mode through the pin shaft.
Optionally, the second fixed joint part is connected with the first fixed joint part in a rotating riveting manner.
Optionally, the first fixing combination portion includes a clamping groove and an inlet, the inlet is located below the clamping groove and communicated with the clamping groove, the second fixing combination portion is matched in shape with the inlet to extend into the clamping groove through the inlet, and the second fixing combination portion horizontally rotates by a preset angle after extending into the clamping groove to complete riveting connection with the first fixing combination portion.
Optionally, the inlet is in the shape of a straight line.
Optionally, the eccentric clamping handle includes eccentric semicircle portion and handle portion, eccentric semicircle portion have one side to the arc surface of supplementary fixed part, eccentric semicircle portion passes through the round pin axle with the pull rod rotary type is connected, the central axis of round pin axle is skew the centre of a circle that the arc surface corresponds, the one end of handle portion with eccentric semicircle portion fixed connection is in order to drive under the exogenic action eccentric semicircle portion winds the round pin axle rotates and then drives the pull rod rises or descends.
Optionally, the eccentric clamping handle satisfies R/e = 7.5-10, where R is a circle diameter corresponding to the arc surface, and e is a distance between the central axis of the pin shaft and a circle center corresponding to the arc surface.
Optionally, the connection structure includes a first clamping portion, a second clamping portion and a clamping fixing portion, one end of the first clamping portion is rotatably connected to one end of the second clamping portion, the first clamping portion and the second clamping portion together enclose a space allowing the top end of the vent pipe to extend into, and the other end of the first clamping portion is detachably connected to the other end of the second clamping portion through the clamping fixing portion.
The invention also provides a leakage detection method of the magnetic fluid rotary sealing mechanism, which comprises the following steps:
providing a magnetic fluid rotary sealing mechanism, a gas detection device and a magnetic fluid rotary sealing mechanism leak detection tool as described in any one of the above items, wherein the magnetic fluid rotary sealing mechanism comprises an inner tube component, an outer tube component and a magnetic fluid, the inner tube component is rotatably arranged in the outer tube component, and the magnetic fluid is positioned in a gap between the inner tube component and the outer tube component;
connecting the gas detection device to the connection structure;
passing an end of the leak detection tool having the first fixed joint through the inner tube assembly from a top end of the magnetofluid rotary seal mechanism to a bottom end of the magnetofluid rotary seal mechanism;
mounting the fixed structure at the bottom end of the inner pipe assembly, and connecting the second fixed combining part with the first fixed combining part;
the pin shaft is used as a round mandrel to rotate the eccentric clamping handle to pull the pull rod to move downwards, and the fixed rod descends along with the pull rod to enable the first sealing plate to press the top end of the outer pipe assembly and enable the second sealing plate to press the top end of the inner pipe assembly;
introducing gas to be detected into the gap from the lower part of the magnetic fluid, and if the gas detection device detects the introduced gas, judging that the sealing performance of the magnetic fluid rotary sealing mechanism is poor; and if the gas detection device does not detect the introduced gas, judging that the sealing performance of the magnetic fluid rotary sealing mechanism is good.
Optionally, the top end of the outer tube assembly is higher than the top end of the inner tube assembly, and the bottom surface of the second sealing plate is lower than the bottom surface of the first sealing plate.
Optionally, the outer tube assembly includes an outer tube main body and a connecting member, a bottom end of the connecting member is connected to a top end of the outer tube main body in a sealing manner, and the first sealing plate is connected to a top end of the connecting member in a sealing manner through the first sealing ring.
Optionally, the connecting piece extends horizontally to the upper part of the inner pipe assembly, and a blowing port facing the top end of the inner pipe assembly is arranged at the bottom end of the connecting piece.
Optionally, the magnetic fluid rotary sealing mechanism further comprises a magnetic fluid upper end sealing ring and a magnetic fluid lower end sealing ring which are positioned in the gap and sequentially arranged from top to bottom, and the magnetic fluid is distributed between the magnetic fluid upper end sealing ring and the magnetic fluid lower end sealing ring.
As described above, the leakage detection tool for the magnetofluid rotary sealing mechanism of the invention comprises a connecting structure, a ventilation structure and a fixing structure, wherein the ventilation structure comprises a ventilation pipe, a first sealing plate, a first sealing ring, a second sealing plate, a second sealing ring, a ventilation channel, a fixing rod and a first fixing combination part, and the fixing structure comprises an auxiliary fixing part, a pull rod, a second fixing combination part, a pin shaft and an eccentric clamping handle. When the magnetic fluid rotary sealing mechanism needs to be subjected to leak detection, connecting a gas detection device to the connecting structure, penetrating one end, provided with the first fixed combining part, of the leak detection tool through an inner tube assembly of the magnetic fluid rotary sealing mechanism from the top end of the magnetic fluid rotary sealing mechanism to extend to the bottom end of the magnetic fluid rotary sealing mechanism, installing the fixed structure at the bottom end of the inner tube assembly, and connecting the second fixed combining part with the first fixed combining part; the pin shaft is used as a round mandrel to rotate the eccentric clamping handle to pull the pull rod to move downwards, the fixed rod descends along with the pull rod to enable the first sealing plate to press the top end of the outer tube assembly of the fluid rotary sealing mechanism, enable the second sealing plate to press the top end of the inner tube assembly, and enable gas to be detected to be introduced into a gap between the inner tube assembly and the outer tube assembly from the lower side of the magnetic fluid. The leakage detecting tool and the leakage detecting method for the magnetic fluid rotary sealing mechanism can ensure that the magnetic fluid rotary sealing mechanism can adjust and reassemble a structure with poor sealing performance in the installation process, so that the sealing performance of the magnetic fluid rotary sealing mechanism is improved, and the leakage detecting tool is simple in structure, convenient to operate, high in leakage detecting precision and high in loading and unloading speed; the working efficiency can be improved, and the vacuum degree of the magnetic fluid can be measured to the fastest extent.
Drawings
Fig. 1 is a schematic perspective view of a leakage detection tool for a magnetofluid rotary sealing mechanism according to the present invention.
Fig. 2 is a schematic perspective view of the connection structure.
Fig. 3 is a schematic perspective view of the vent structure.
Fig. 4 is a schematic perspective view of the fixing structure.
Fig. 5 is a perspective view of the eccentric clamping handle.
Fig. 6 is a schematic perspective view of a rotary sealing mechanism for a magnetic fluid under test.
Fig. 7 is a schematic cross-sectional structure diagram of the magnetic fluid rotary sealing mechanism.
Fig. 8 is a schematic cross-sectional view of the leak detection tool after installation in the magnetic fluid rotary sealing mechanism.
Fig. 9 shows a force-bearing schematic diagram of the eccentric clamping mechanism revolute pair.
FIG. 10 is a graph showing a sin α -0.1cos α function.
Fig. 11 shows a schematic mechanical geometry for the case of R/e = 7.5.
Fig. 12 shows a schematic mechanical geometry for the case of R/e = 10.
Element number description: 1. the connecting structure comprises a connecting structure, a first clamping part 101, a second clamping part 102, a fixing part 103, a 2 ventilation structure, a 201 ventilation pipe, a first sealing plate 202, a first sealing ring 203, a second sealing plate 204, a second sealing ring 205, an air duct 206, a fixing rod 207, a first fixing combination part 208, a 2081 clamping groove, a 2082 inlet, a 3 fixing structure, an auxiliary fixing part 301, a 302 pull rod, a second fixing combination part 303, a 304 pin shaft, a 305 eccentric clamping handle, a 3051 eccentric semicircular part, a 3052 handle part, a 4 magnetic fluid rotary sealing mechanism, a 401 inner pipe assembly, a 402 outer pipe assembly, a 4021 outer pipe main body, a 4022 connecting piece, a 4023 air blowing opening, a magnetic fluid 403, a 404 magnetic fluid upper end sealing ring, a 405 magnetic fluid lower end sealing ring and a 406 air opening.
Detailed Description
The following embodiments of the present invention are provided by way of specific examples, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1 to 12. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
Example one
In this embodiment, a leakage detection tool for a magnetic fluid rotary sealing mechanism is provided, please refer to fig. 1, which is a schematic perspective view of the leakage detection tool, and includes a connection structure 1, a ventilation structure 2, and a fixing structure 3.
Specifically, the connection structure 1 is used to connect a gas detection device to the top end of the ventilation structure 2 to detect leaked gas. Referring to fig. 2, which is a schematic perspective view of the connection structure 1, the connection structure 1 includes a first clamping portion 101, a second clamping portion 102, and a clamping fixing portion 103, one end of the first clamping portion 101 is rotatably connected to one end of the second clamping portion 102, the first clamping portion 101 and the second clamping portion 102 together define a space allowing a top end of the ventilation structure 2 (specifically, a top end of the subsequent ventilation pipe 201, see fig. 3) to extend into, and the other end of the first clamping portion 101 is detachably connected to the other end of the second clamping portion 102 through the clamping fixing portion 103.
As an example, the clamping and fixing part 103 includes a screw and a nut, and the first clamping part 101 and the second clamping part 102 clamp the gas detection device and the air vent structure 2 together in a fastening manner at the butt joint position.
In other embodiments, the connecting structure may also take other forms as long as it can achieve stable docking of the gas detection device with the ventilation structure 2, and the protection scope of the present invention should not be limited excessively herein.
Specifically, the ventilation structure 2 is a main functional component of the leak detection tool, and is used for detecting the sealing performance of the magnetic fluid rotary sealing mechanism on the vapor deposition equipment, and specifically for introducing gas leaked by the magnetic fluid rotary sealing mechanism into a gas detection device.
Referring to fig. 3, which is a schematic perspective view of the ventilation structure 2, the ventilation structure 2 includes a ventilation pipe 201, a first sealing plate 202, a first sealing ring 203, a second sealing plate 204, a second sealing ring 205, an air duct 206, a fixing rod 207, and a first fixing joint portion 208, wherein a top end of the ventilation pipe 201 is connected to the connection structure 1, a bottom end of the ventilation pipe 201 is connected to the first sealing plate 202, the first sealing ring 203 is disposed on a bottom surface of the first sealing plate 202, the second sealing plate 204 is connected to the first sealing plate 202, a side edge of the first sealing plate 202 horizontally protrudes from a side edge of the second sealing plate 204, the second sealing ring 205 is disposed on a bottom surface of the second sealing plate 204, the air duct 206 is opened from a side wall of the second sealing plate 204 and extends into the second sealing plate 204 until communicating with the ventilation pipe 201, a top end of the fixing rod 207 is connected to the second sealing plate 204, and a bottom end of the fixing rod 207 is connected to the first fixing joint portion 208.
Specifically, the fixing structure 3 is a fixing functional component of the leak detection tool, and is used for fixing the ventilation structure 2 to the magnetic fluid rotary sealing mechanism.
Please refer to fig. 4, which shows a schematic perspective view of the fixing structure 3, which includes an auxiliary fixing portion 301, a pull rod 302, a second fixing combination portion 303, a pin 304 and an eccentric clamping handle 305, wherein the auxiliary fixing portion 301 is shaped like a hollow sleeve and has a top opening and a bottom opening, the second fixing combination portion 303 is located in an inner space of the auxiliary fixing portion 301 and detachably connected to the first fixing combination portion 208, the pull rod 302 passes through the bottom opening, a top end of the pull rod 302 is connected to the second fixing combination portion 303, a bottom end of the pull rod 302 protrudes out of the auxiliary fixing portion 301, and the eccentric clamping handle 305 is located below the auxiliary fixing portion 301 and rotatably connected to the pull rod 302 through the pin 304.
In this embodiment, the size of the top end of the auxiliary fixing portion 301 is designed to be slightly smaller than the size of the bottom opening of the inner tube assembly 401 of the measured magnetofluid rotary seal mechanism so as to be just capable of being placed in the opening, and after the top end of the auxiliary fixing portion 301 is placed in the bottom opening of the inner tube assembly 401, the fixing structure 3 can be fixed at the bottom end position of the measured magnetofluid rotary seal mechanism.
For example, referring to fig. 3 and 4, the second fixed coupling portion 303 is connected to the first fixed coupling portion 208 by a rotational riveting manner, where the first fixed coupling portion 208 includes a clamping groove 2081 and an inlet 2082, the inlet 2082 is located below the clamping groove 2081 and is communicated with the clamping groove 2081, the shape of the second fixed coupling portion 303 is matched with the shape of the inlet 2082 so as to extend into the clamping groove 2081 through the inlet 2082, and the second fixed coupling portion 303 horizontally rotates by a preset angle after extending into the clamping groove 2081, so that the riveting connection between the second fixed coupling portion 303 and the first fixed coupling portion 208 is completed. In this embodiment, the inlet 2082 is in a straight shape, and the second fixing and coupling portion 303 extends into the groove 2081 and then is horizontally rotated by 90 ° to complete the connection with the first fixing and coupling portion 208.
Specifically, the eccentric clamping handle 305 is used for controlling a horizontal rotation angle of the pull rod 302 and further controlling a horizontal rotation angle of the second fixing combination portion 303, and the eccentric clamping handle 305 is further used for controlling the lifting of the pull rod 302.
Referring to fig. 5, a schematic perspective view of the eccentric clamping handle 305 is shown, and the eccentric clamping handle 305 includes an eccentric semicircular part 3051 and a handle part 3052.
Referring to fig. 4 and 5, the eccentric semicircle part 3051 has an arc surface facing the auxiliary fixing part 301, the eccentric semicircle part 3051 is rotatably connected to the pull rod 302 through the pin 304, a central axis of the pin 304 deviates from a circle center corresponding to the arc surface, and one end of the handle part 3052 is fixedly connected to the eccentric semicircle part 3051 to drive the eccentric semicircle part 3051 to rotate around the pin 304 under an external force, so as to drive the pull rod 302 to ascend or descend.
By way of example, the non-circular arc surface of the eccentric semi-circular part 3051 is connected to the handle part 3052,
as an example, the eccentric clamping handle 305 satisfies R/e = 7.5-10, so that self-locking can be achieved, that is, after an external force F is applied to the eccentric clamping handle 305 to lower the pull rod 302 and press the first sealing plate 202 and the second sealing plate 204 against the top end of the magnetic fluid rotary sealing mechanism, and after the external force F is removed, the first sealing plate 202 and the second sealing plate 204 are kept in a pressed state, where R is a circle diameter corresponding to the arc surface, and e is a distance between a central axis of the pin shaft 304 and a circle center corresponding to the arc surface, that is, an eccentric distance of the pin shaft 304.
The leakage detection tool of the embodiment can ensure that the magnetic fluid rotary sealing mechanism can adjust and reassemble the structure with poor sealing performance in the installation process, thereby being beneficial to improving the sealing performance of the magnetic fluid rotary sealing mechanism. The leakage detection tool has the characteristics of simple structure, convenience in operation, high leakage detection precision and high loading and unloading speed, and is beneficial to improving the working efficiency and measuring the vacuum degree of the magnetic fluid to the greatest extent.
Example two
In this embodiment, a leakage detection method for a magnetic fluid rotary sealing mechanism is provided, in which the leakage detection tool for a magnetic fluid rotary sealing mechanism described in the first embodiment is respectively connected to a gas detection device and a detected magnetic fluid rotary sealing mechanism to detect the sealing performance of the magnetic fluid rotary sealing mechanism.
Referring to fig. 6, fig. 7 and fig. 8, wherein fig. 6 is a schematic perspective view of a magnetic fluid rotary sealing mechanism 4 to be tested, fig. 7 is a schematic sectional view of the magnetic fluid rotary sealing mechanism 4, and fig. 8 is a schematic sectional view of the leak detection tool installed in the magnetic fluid rotary sealing mechanism 4.
Specifically, the magnetic fluid rotary sealing mechanism 4 includes an inner tube assembly 401, an outer tube assembly 402 and a magnetic fluid 403, the inner tube assembly 401 is rotatably disposed in the outer tube assembly 402, the magnetic fluid 403 is located in a gap between the inner tube assembly 401 and the outer tube assembly 402, and the outer wall of the inner tube assembly 401 is distributed in a surrounding manner.
In this embodiment, the magnetic fluid rotary sealing mechanism 4 further includes a magnetic fluid upper end sealing ring 404 and a magnetic fluid lower end sealing ring 405 which are located in the gap and sequentially arranged from top to bottom, the magnetic fluid 403 is distributed between the magnetic fluid upper end sealing ring 404 and the magnetic fluid lower end sealing ring 405, the magnetic fluid upper end sealing ring 404 is used for sealing the upper end of the magnetic fluid to prevent the magnetic fluid or the steam generated by the movement of the magnetic fluid from overflowing from the upper end, and the magnetic fluid lower end sealing ring 405 is used for sealing the lower end of the magnetic fluid to prevent the magnetic fluid or the steam generated by the movement of the magnetic fluid from overflowing from the lower end.
As an example, the top end of the outer tube assembly 402 is higher than the top end of the inner tube assembly 401, and correspondingly, the bottom surface of the second sealing plate 204 is designed to be lower than the bottom surface of the first sealing plate 202 to adapt to the top end topography of the magnetic fluid rotary sealing mechanism 4. In other embodiments, if the top end of the outer tube assembly of the magnetofluid rotary seal mechanism being tested is higher than the top end of the inner tube assembly, the bottom surface of the second seal plate 204 will be designed to be higher than the bottom surface of the first seal plate 202.
By way of example, the outer tube assembly 402 includes an outer tube main body 4021 and a connector 4022, a bottom end of the connector 4022 is in sealing connection with a top end of the outer tube main body 4021, and the first sealing plate 202 is in sealing connection with a top end of the connector 4022 through the first sealing ring 203 to block the tested gas from overflowing from the outside of the first sealing plate 202, so as to isolate the top end of the outer tube assembly 402 from communicating with the atmosphere. The material of the first sealing ring 203 includes but is not limited to rubber.
Illustratively, the connector 4022 extends horizontally above the inner tube assembly 401, and the bottom end of the connector 4022 is provided with a gas blowing port 4023 facing the top end of the inner tube assembly 401 to prevent particles from entering the gap during the coating process. The second sealing plate 204 is located inside the connector 4022 and is connected to the top end of the inner tube assembly 401 through the second sealing ring 205 in a sealing manner to prevent the tested gas from escaping from the inside of the second sealing plate 204, thereby isolating the top end of the inner tube assembly 401 from communicating with the atmosphere. The material of the second sealing ring 205 includes but is not limited to rubber.
Specifically, the installation step of the leak detection tool comprises:
connecting the gas detection device to the connection structure 1;
passing the end of the leak detection tool having the first stationary bond 208 through the inner tube assembly 401 from the top end of the magnetic fluid rotary seal mechanism 4 to extend to the bottom end of the magnetic fluid rotary seal mechanism 4;
mounting the fixing structure 3 on the bottom end of the inner tube assembly 401, and connecting the second fixing joint 303 with the first fixing joint 208;
rotating the eccentric clamping handle 305 about the pin 304 to pull the pull rod 302 downward, and the fixing rod 207 pressing the first sealing plate 202 against the top end of the outer tube assembly 402 and the second sealing plate 204 against the top end of the inner tube assembly 401 as the pull rod 302 descends;
gas to be detected is introduced into the gap from the lower part of the magnetic fluid 403, wherein the specific position of the vent for introducing the gas to be detected can be adjusted as required as long as the vent is positioned below the sealing ring at the lower end of the magnetic fluid. In this embodiment, as shown in fig. 8, the vent 406 is disposed at a boundary between the bottom end of the outer tube assembly 402 and the outer wall of the inner tube assembly 401, and the vent 406 and the magnetic fluid lower end sealing ring 405, the magnetic fluid 403, the magnetic fluid upper end sealing ring 404, the gas blowing port 4023, the gas passage 206 and the gas passage 201 are in the same communicated gas passage, that is, after gas is introduced from the vent 406, if the seals of the magnetic fluid lower end sealing ring 405 and the magnetic fluid upper end sealing ring 404 are not tight, the introduced gas sequentially follows the magnetic fluid lower end sealing ring 405, the magnetic fluid 403, the magnetic fluid upper end sealing ring 404, the gas blowing port 4023, the gas passage 206, the gas passage 201 and the connection structure 1 from the vent 406 to the gas detection apparatus.
As an example, the gas to be detected may be helium or other suitable gas, and if the gas detection device can detect the introduced gas, it can be determined that the sealing performance of the detected magnetofluid rotary sealing mechanism is not good, and the detected magnetofluid rotary sealing mechanism needs to be re-sealed and assembled and perform the next leak detection operation; if the gas detection device does not detect the introduced gas, the sealing performance of the detected magnetofluid rotary sealing mechanism can be judged to be good, and the detected magnetofluid rotary sealing mechanism can be used for further assembling.
Specifically, after the leak detection operation is finished, all parts of the leak detection tool of the magnetic fluid rotary sealing mechanism 4 are disassembled in a reverse direction according to the original assembly and fixing process.
It should be noted that fig. 6 and 7 are only an example of the measured magnetofluid rotary sealing mechanism, and in other embodiments, the specific structures of the inner tube assembly 401 and the outer tube assembly 402 may be adjusted as needed, and the protection scope of the present invention should not be limited excessively herein.
Specifically, when the leak detection tool is mounted, the pin 304 is used as a circular spindle to rotate the handle portion 3052 in the vertical direction until the handle portion 3052 cannot rotate, so as to achieve mounting and fixing of the leak detection tool, at this time, a clamping point is provided between an arc surface of the eccentric semicircular portion 3051 and a bottom surface of the auxiliary fixing portion 301, and a self-locking stress analysis of an eccentric clamping mechanism composed of the eccentric clamping handle 305, the pin 304, and the auxiliary fixing portion 301 is as follows:
(1) Description of the problems
It is known that: friction factors of all parts in the eccentric clamping mechanism are mu, a circle radius corresponding to a circular arc surface of the eccentric clamping handle 305 (hereinafter referred to as a first component) is R, and a friction angle between the circular arc surface and the bottom surface of the auxiliary fixing part 301 is psi 1; the radius of the pin shaft 304 (hereinafter referred to as a third member) is r, the radius of a friction circle is ρ, and the friction angle between the pin shaft 304 and the eccentric semicircle part 3051 is ψ 2; the eccentricity is e; the first member is pressed by an external force F, and the auxiliary fixing portion 301 (hereinafter referred to as a second member) is neglected.
The problems are as follows: after the external force F is removed, the mechanism is self-locked, and the geometric condition which the mechanism needs to meet is determined.
Solving the idea: the first member is subjected to a force F R31 ，F R21 Wherein F is R31 Force of three pairs of members one, F R21 Force of the member to the member one;
analyzing the motion trend of the first component;
determining the self-locking condition of the kinematic pair by analyzing the stress;
since the friction factors are equal everywhere, ψ 1= ψ 2= ψ;
solution:
a) Drawing a friction circle according to the size and the friction coefficient of the third member, and calculating a friction angle psi 2= arctan mu;
b) Determining the relative movement direction between each component (see the force-bearing schematic diagram of the eccentric clamping mechanism revolute pair presented in figure 9);
c) Determining the force of the two-to-one member (see FIG. 9)
F can be judged according to the pressing movement trend of the pair of members II of the loosening member R21 Is a driving force;
to make the member stationary, the driving force should be tangent or tangent to the friction circle
Wherein the content of the first and second substances,
l is F R21 The moment arm of (a);
p is a clamping contact point of the eccentric semicircular part and the auxiliary fixing part;
O 1 is the center of an eccentric semicircle part;
O 2 is the center of the pin shaft;
c is per O 2 A foot formed by points making a perpendicular line of a predetermined straight line, wherein the predetermined straight line passes through O 1 Point and parallel to F R21 The line of force of (a);
d is per O 1 Stippling as F R21 A foot obtained from a perpendicular to the force line of (1);
ω 12 the rotation direction of the eccentric clamping handle relative to the auxiliary fixing part;
ω 13 the eccentric clamping handle is in the rotating direction relative to the pin shaft;
Esin (alpha-psi) ≦ Rsin psi + rho, where rho = f, may be deduced from the above four expressions v R = sin ψ r = Rsin ψ, then esin (α - ψ) ≦ Rsin ψ + Rsin ψ, wherein f is v Is the equivalent friction coefficient.
Since the eccentric clamping member is typically steel, the minimum friction coefficient μ =0.1 is taken, whereby tan ψ =0.1; substituting the inequality to obtain R + R with the value of 10e (sin alpha-0.1 cos alpha) being less than or equal to 10 e.
Referring to FIG. 10, which shows a graph of the sin α -0.1cos α function, it can be seen that the maximum value of sin α -0.1cos α is 1, so that the whole mechanism can be self-locked when R + R is satisfied at 10e ≦ R + R.
Please refer to the table below, which is a table corresponding to the values of α (angle) and sin α -0.1cos α.
A first table:
according to the related content in the existing clamp design manual, R/e is called eccentric wheel characteristic and represents the reliability of the eccentric wheel operation, as long as alpha is less than or equal to 14.24 degrees or 7 is less than or equal to R/e, each clamping point on the circumference of the eccentric wheel can be self-locked, and in the embodiment, two limit positions of R/e =7.5>, and R/e =10 are selected to illustrate that the eccentric clamping mechanism scheme can be self-locked in the present case.
Referring to fig. 11, which shows a schematic diagram of the mechanical geometry relationship for the case of R/e =7.5, when R/e =7.5 and R =15 and e =2 are selected, α can be seen from fig. 11 p =7 °, then there is α p =7°<14.24 deg., so at R/e>7, the mechanism can be self-locking, wherein,
α p is O 1 Line connecting point and point P, O 2 The included angle between the point and the connecting line of the point P;
h0 is the minimum value of the distance h between the circular eccentric rotation center and the workpiece clamping surface;
gamma is O 1 Line connecting point and point P, O 1 Point and O 2 The included angle between the extension lines of the connecting lines of the points;
hr is the maximum value of the distance h between the eccentric center of rotation and the clamping surface of the workpiece;
o, A is O 1 Point and O 2 The intersection point of the straight line of the connecting line of the points and the circumference of the eccentric semicircle part.
Referring to fig. 12, a schematic diagram of the mechanism geometry for the case of R/e =10 is shown, when R/e =10 and R =20 is selected, e =2, α can be seen from fig. 12 p Is not less than 5 deg., then has alpha p =5°<14.24 degrees, so the mechanism can be self-locked under the condition that R/e is less than or equal to 10 degrees.
Therefore, when the R/e range is between 7.5 and 10, the eccentric clamping mechanism can realize self-locking.
In summary, the leakage detection tool for the magnetic fluid rotary sealing mechanism of the invention comprises a connecting structure, a ventilation structure and a fixing structure, wherein the ventilation structure comprises a ventilation pipe, a first sealing plate, a first sealing ring, a second sealing plate, a second sealing ring, a ventilation channel, a fixing rod and a first fixing combination part, and the fixing structure comprises an auxiliary fixing part, a pull rod, a second fixing combination part, a pin shaft and an eccentric clamping handle. When the magnetic fluid rotary sealing mechanism needs to be subjected to leak detection, connecting a gas detection device to the connecting structure, penetrating one end, provided with the first fixed combining part, of the leak detection tool through an inner tube assembly of the magnetic fluid rotary sealing mechanism from the top end of the magnetic fluid rotary sealing mechanism to extend to the bottom end of the magnetic fluid rotary sealing mechanism, installing the fixed structure at the bottom end of the inner tube assembly, and connecting the second fixed combining part with the first fixed combining part; the pin shaft is used as a round mandrel to rotate the eccentric clamping handle to pull the pull rod to move downwards, the fixed rod descends along with the pull rod to enable the first sealing plate to press the top end of the outer tube assembly of the fluid rotary sealing mechanism, enable the second sealing plate to press the top end of the inner tube assembly, and enable gas to be detected to be introduced into a gap between the inner tube assembly and the outer tube assembly from the lower side of the magnetic fluid. The leakage detecting tool and the leakage detecting method for the magnetic fluid rotary sealing mechanism can ensure that the magnetic fluid rotary sealing mechanism can adjust and reassemble a structure with poor sealing performance in the installation process, so that the sealing performance of the magnetic fluid rotary sealing mechanism is improved, and the leakage detecting tool is simple in structure, convenient to operate, high in leakage detecting precision and high in loading and unloading speed; the working efficiency can be improved, and the vacuum degree of the magnetic fluid can be measured to the fastest extent. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (12)
1. A magnetic fluid rotary seal mechanism leak detection tool, comprising:
a connecting structure;
the ventilation structure comprises a ventilation pipe, a first sealing plate, a first sealing ring, a second sealing plate, a second sealing ring, a ventilation channel, a fixing rod and a first fixed combination part, wherein the top end of the ventilation pipe is connected with the connection structure, the bottom end of the ventilation pipe is connected with the first sealing plate, the first sealing ring is arranged on the bottom surface of the first sealing plate, the second sealing plate is connected with the first sealing plate, the side edge of the first sealing plate horizontally protrudes out of the side edge of the second sealing plate, the second sealing ring is arranged on the bottom surface of the second sealing plate, the ventilation channel extends from the side wall opening of the second sealing plate to the inside of the second sealing plate until the ventilation channel is communicated with the ventilation pipe, the top end of the fixing rod is connected with the second sealing plate, and the bottom end of the fixing rod is connected with the first fixed combination part;
the fixing structure comprises an auxiliary fixing part, a pull rod, a second fixing combination part, a pin shaft and an eccentric clamping handle, wherein the auxiliary fixing part is hollow and provided with a top opening and a bottom opening, the second fixing combination part is positioned in the inner space of the auxiliary fixing part and detachably connected with the first fixing combination part, the pull rod penetrates through the bottom opening, the top end of the pull rod is connected with the second fixing combination part, the bottom end of the pull rod protrudes out of the auxiliary fixing part, and the eccentric clamping handle is positioned below the auxiliary fixing part and is connected with the pull rod in a rotating mode through the pin shaft.
2. The magnetic fluid rotary seal mechanism leak detection tool according to claim 1, wherein: the second fixed combining part is connected with the first fixed combining part in a rotating riveting mode.
3. The magnetic fluid rotary seal mechanism leak detection tool according to claim 2, wherein: the first fixed combination part comprises a clamping groove and an inlet, the inlet is located below the clamping groove and communicated with the clamping groove, the shape of the second fixed combination part is matched with that of the inlet to extend into the clamping groove through the inlet, and the second fixed combination part horizontally rotates for a preset angle after extending into the clamping groove to complete riveting connection with the first fixed combination part.
4. The magnetic fluid rotary seal mechanism leak detection tool according to claim 3, wherein: the inlet is in a straight shape.
5. The magnetic fluid rotary sealing mechanism leak detection tool according to claim 1, characterized in that: eccentric clamping handle includes eccentric semicircle portion and handle portion, eccentric semicircle portion have one side to the arc surface of supplementary fixed part, eccentric semicircle portion passes through the round pin axle with the pull rod rotary type is connected, the central axis of round pin axle is skew the centre of a circle that the arc surface corresponds, the one end of handle portion with eccentric semicircle portion fixed connection is in order to drive under the exogenic action eccentric semicircle portion winds the round pin axle rotates and then drives the pull rod rises or descends.
6. The magnetic fluid rotary seal mechanism leak detection tool according to claim 5, wherein: the eccentric clamping handle meets the condition that R/e = 7.5-10, wherein R is the diameter of a circle corresponding to the circular arc surface, and e is the distance between the central axis of the pin shaft and the circle center corresponding to the circular arc surface.
7. The magnetic fluid rotary sealing mechanism leak detection tool according to claim 1, characterized in that: the connecting structure comprises a first clamping part, a second clamping part and a clamping fixing part, one end of the first clamping part is rotatably connected with one end of the second clamping part, a space allowing the top end of the breather pipe to extend into is formed by the first clamping part and the second clamping part together, and the other end of the first clamping part is detachably connected with the other end of the second clamping part through the clamping fixing part.
8. A leakage detection method of a magnetic fluid rotary sealing mechanism is characterized by comprising the following steps:
providing a magnetofluid rotary seal mechanism, a gas detection device and a magnetofluid rotary seal mechanism leak detection tool according to any one of claims 1 to 7, wherein the magnetofluid rotary seal mechanism comprises an inner tube assembly, an outer tube assembly and a magnetofluid, the inner tube assembly is rotatably arranged in the outer tube assembly, and the magnetofluid is positioned in a gap between the inner tube assembly and the outer tube assembly;
connecting the gas detection device to the connection structure;
passing the end of the leak detection tool having the first fixed joint through the inner tube assembly from the top end of the magnetic fluid rotary seal mechanism to the bottom end of the magnetic fluid rotary seal mechanism;
mounting the fixed structure at the bottom end of the inner pipe assembly and connecting the second fixed joint part with the first fixed joint part;
the pin shaft is used as a round mandrel to rotate the eccentric clamping handle to pull the pull rod to move downwards, and the fixed rod descends along with the pull rod to enable the first sealing plate to press the top end of the outer pipe assembly and enable the second sealing plate to press the top end of the inner pipe assembly;
introducing gas to be detected into the gap from the lower part of the magnetic fluid, and if the gas detection device detects the introduced gas, judging that the sealing performance of the magnetic fluid rotary sealing mechanism is poor; and if the gas detection device does not detect the introduced gas, judging that the sealing performance of the magnetic fluid rotary sealing mechanism is good.
9. The method for detecting the leakage of the magnetic fluid rotary sealing mechanism according to claim 8, wherein the method comprises the following steps: the top end of the outer pipe assembly is higher than the top end of the inner pipe assembly, and the bottom surface of the second sealing plate is lower than the bottom surface of the first sealing plate.
10. The method for detecting the leakage of the magnetic fluid rotary sealing mechanism according to claim 8, wherein the method comprises the following steps: the outer tube assembly comprises an outer tube main body and a connecting piece, the bottom end of the connecting piece is connected with the top end of the outer tube main body in a sealing mode, and the first sealing plate is connected with the top end of the connecting piece in a sealing mode through the first sealing ring.
11. The leakage detection method for the magnetofluid rotary sealing mechanism according to claim 10, wherein the leakage detection method comprises the following steps: the connecting piece horizontally extends to the upper part of the inner pipe assembly, and the bottom end of the connecting piece is provided with an air blowing opening facing the top end of the inner pipe assembly.
12. The method for detecting the leakage of the magnetic fluid rotary sealing mechanism according to claim 8, wherein the method comprises the following steps: the magnetic fluid rotary sealing mechanism further comprises a magnetic fluid upper end sealing ring and a magnetic fluid lower end sealing ring which are positioned in the gap and sequentially arranged from top to bottom, and the magnetic fluid is distributed between the magnetic fluid upper end sealing ring and the magnetic fluid lower end sealing ring.
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