CN115031659A - Axial cross-scale precise three-dimensional microscopic measurement method - Google Patents
Axial cross-scale precise three-dimensional microscopic measurement method Download PDFInfo
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- 238000005259 measurement Methods 0.000 claims abstract description 35
- 238000003384 imaging method Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 12
- 238000010226 confocal imaging Methods 0.000 claims description 6
- 238000011156 evaluation Methods 0.000 claims description 6
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention provides an axial cross-scale precise three-dimensional microscopic measurement method, which comprises the following steps: step 1: in a microscopic imaging device, acquiring a certain number of image sequences according to a certain stepping layer scan; and 2, step: analyzing the image sequence obtained by layer scanning to extract and divide the local clear area; and 3, step 3: restoring the three-dimensional information of the clear area on the serial number image by utilizing an axial differential principle according to the segmented local clear area; and 4, step 4: and fusing the axial three-dimensional information of the clear areas restored by different serial numbers through the layer scanning stepping superposition to realize three-dimensional measurement. The axial cross-scale precision three-dimensional microscopic measurement method can realize the expansion of the axial measuring range under high precision.
Description
Technical Field
The invention relates to an axial cross-scale precise three-dimensional microscopic measurement method.
Background
With the rapid development of the semiconductor field, the axial dimension of the structural part of the micro-nano micro-measurement device is continuously changed, and the traditional micro-nano micro-measurement method is difficult to meet the measurement requirement of axial multi-dimension change at the present stage. The traditional method for solving the contradiction between the measurement range and the precision is to acquire a multi-focus image sequence by layer scanning and adopt an image fusion technology. The method realizes the expansion of axial measurement on the premise of ensuring the measurement precision, but the measurement speed is slow because a large amount of image data needs to be acquired, and the method depends on the definition degree of the acquired image to a great extent. In addition, how to select a part on the graph which is clearer to fuse has an important influence on the measurement precision of the depth of field expansion. The method is limited by the motion control of mechanical parts, and axial measurement deviation is easy to occur, so that a certain deviation exists between an acquired image and an actual image, and measurement errors are caused.
Disclosure of Invention
The invention aims to provide an axial cross-scale precise three-dimensional microscopic measurement method, which can realize axial range expansion under high precision.
In order to solve the technical problem, the invention provides an axial cross-scale precise three-dimensional microscopic measurement method, which comprises the following steps:
step 1: in a microscopic imaging device, acquiring a certain number of image sequences according to a certain stepping layer scan;
step 2: analyzing the image sequence obtained by layer scanning to extract and divide the local clear area;
and step 3: restoring the three-dimensional information of the clear area on the serial number image by utilizing an axial differential principle according to the segmented local clear area;
and 4, step 4: and fusing the axial three-dimensional information of the clear areas restored by different serial numbers through the layer scanning stepping superposition to realize three-dimensional measurement.
In a preferred embodiment: the step layer scanning method in step 1 is one of point scanning confocal, line scanning confocal, and area array confocal.
In a preferred embodiment: the planar array type confocal imaging can adopt a dot array type multi-focus structure to perform light modulation parallel confocal imaging.
In a preferred embodiment: the step 2 comprises the following steps: and (3) carrying out local definition evaluation on the actually acquired image, dividing the image into a plurality of regions with different definition levels, estimating the region belonging to the differential measurement range through a definition evaluation algorithm, and carrying out segmentation and reservation.
In a preferred embodiment: the axial differential principle in the step 3 comprises:
in confocal images, the axial light intensity satisfies the formula:
wherein u is the axial defocusing amount of an object space, and I (u) is an axial light intensity value; the axial differential measurement is to obtain two axial light intensity response curves deviating from the positive focal plane and equidistant before and after the focal plane and make a difference:
u F the pre-focal offset and the post-focal offset are obtained; during actual differential three-dimensional measurement, the difference is made by acquiring two images before and after focusing, and the gray difference value can pass through the differential curve I T The linear region in (1) restores the depth information of the focal plane image.
In a preferred embodiment: the step 1 of "acquiring a certain number of image sequences" includes:
if the height of the measured sample is h, the differential measurement range is 2u F And h > 2u F When step t is equal to u F Then, the number D of the acquired sequence images is:
wherein]To round down;
if the differential step t < u F The number D of acquired sequence images is:
d is an integer.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects:
according to the precise three-dimensional microscopic measurement method with axial cross-scale, firstly, the rapid segmentation of the local clear area of the image can be realized through local definition estimation and classification, and the characteristics of the original high-resolution image are reserved; secondly, due to the adoption of a confocal axial differential three-dimensional reduction principle, the limitation of too small layer scanning step is eliminated, the rapid and efficient measurement is realized, and the possibility of rapidly realizing the field depth expansion in large step is provided; then, the rapid separation of the images in the differential range can be realized by utilizing the estimation of the local definition on the acquired images, and the reconstruction of the local three-dimensional shape is realized; and finally, combining the stepping size of the differential layer sweep, and matching with the local three-dimensional morphology restored between the differential sections, the axial range expansion of the microscopic imaging can be realized, and the cross-scale and high-precision submicron precision measurement can be achieved.
Therefore, the axial cross-scale precision three-dimensional microscopic measurement method realizes the rapid extraction of the local clear region through the local clear estimation, greatly reduces the time for local clear segmentation, and reduces the time complexity of the algorithm; secondly, a parallel confocal axial differential measurement principle is introduced, large-stepping axial scanning is realized, the number of scanning layers and scanning time are reduced, the image acquisition time and the complexity of data required to be processed are reduced, and the axial cross-scale precise three-dimensional microscopic measurement method provided by the invention has the advantages of rapidness, cross-scale and high precision.
Drawings
FIG. 1 is a graph of light intensity versus axial defocus of a sample in a preferred embodiment of the present invention;
FIG. 2 is a simulation of an axial differential measurement curve in a preferred embodiment of the present invention;
FIG. 3 is a schematic view of an axial differential layer scan measurement in a preferred embodiment of the present invention;
fig. 4 is a flow chart of a preferred embodiment of the present invention.
Detailed Description
The technical solution of the present invention is further explained with reference to the accompanying drawings and the detailed description.
Referring to fig. 1-4, the present embodiment provides an axial cross-scale precision three-dimensional microscopic measurement method, including the following steps:
step 1: in a microscopic imaging device, acquiring a certain number of image sequences according to a certain stepping layer scan;
step 2: analyzing a local clear region of an image sequence obtained by layer scanning, extracting and dividing;
and step 3: restoring the three-dimensional information of the clear area on the serial number image by utilizing an axial differential principle according to the segmented local clear area;
and 4, step 4: and fusing the axial three-dimensional information of the clear areas restored by different serial numbers through the layer scanning stepping superposition to realize three-dimensional measurement.
Wherein the step layer scanning method in step 1 is one of point scanning confocal, line scanning confocal, and area array confocal. In this embodiment, a planar array type confocal imaging is taken as an example, and a dot array type multifocal structure can be adopted to perform light modulation parallel confocal imaging.
The step 1 of "acquiring a certain number of image sequences" includes:
if the height of the measured sample is h, the differential measurement range is 2u F And h > 2u F When step t is equal to u F Then, the number D of the acquired sequence images is:
wherein]To round down;
if the differential step t < u F The number D of acquired sequence images is:
d is an integer.
The step 2 comprises the following steps: and (3) carrying out local definition evaluation on the actually acquired image, dividing the image into a plurality of regions with different definition levels, estimating the region belonging to the range of the differential measurement range through a definition evaluation algorithm, and carrying out segmentation and reservation.
The axial differential principle in the step 3 comprises:
in confocal images, the axial light intensity satisfies the formula:
wherein u is the axial defocusing amount of an object space, and I (u) is an axial light intensity value; the axial differential measurement is to obtain two axial light intensity response curves deviating from the positive focal plane and equidistant before and after the focal plane and make a difference:
u F the pre-focal offset and the post-focal offset are obtained; during actual differential three-dimensional measurement, the difference is made by acquiring two images before and after focusing, and the gray difference value can pass through the differential curve I T The linear region in (1) restores depth information of the focal plane image.
The above description is only a preferred embodiment of the present invention, but the design concept of the present invention is not limited thereto, and any person skilled in the art can make insubstantial changes to the present invention within the technical scope of the present invention, and all actions infringing the protection scope of the present invention.
Claims (6)
1. An axial cross-scale precise three-dimensional microscopic measurement method is characterized by comprising the following steps:
step 1: in a microscopic imaging device, acquiring a certain number of image sequences according to a certain stepping layer scan;
and 2, step: analyzing the image sequence obtained by layer scanning to extract and divide the local clear area;
and 3, step 3: restoring the three-dimensional information of the clear area on the serial number image by utilizing an axial differential principle according to the segmented local clear area;
and 4, step 4: and fusing the axial three-dimensional information of the clear areas restored by different serial numbers through the layer scanning stepping superposition to realize three-dimensional measurement.
2. The method for precise three-dimensional microscopic measurement across the axial dimension as claimed in claim 1, wherein: the step layer scanning method in step 1 is one of point scanning confocal, line scanning confocal, and area array confocal.
3. The method for precise three-dimensional microscopic measurement across the axial dimension as claimed in claim 2, wherein: the planar array type confocal imaging can adopt a dot array type multi-focus structure to perform light modulation parallel confocal imaging.
4. The method for precise three-dimensional microscopic measurement across the axial dimension according to claim 1, characterized in that: the step 2 comprises the following steps: and (3) carrying out local definition evaluation on the actually acquired image, dividing the image into a plurality of regions with different definition levels, estimating the region belonging to the range of the differential measurement range through a definition evaluation algorithm, and carrying out segmentation and reservation.
5. The method for precise three-dimensional microscopic measurement across the axial dimension according to claim 1, characterized in that: the axial differential principle in the step 3 comprises:
in confocal images, the axial light intensity satisfies the formula:
wherein u is the axial defocusing amount of an object space, and I (u) is an axial light intensity value; the axial differential measurement is to obtain two axial light intensity response curves deviating from the positive focal plane and equidistant before and after the focal plane and make a difference:
u F the offset is before-focus offset and after-focus offset; during actual differential three-dimensional measurement, the difference is made by acquiring two images before and after focusing, and the gray difference value can pass through the differential curve I T The linear region in (1) restores depth information of the focal plane image.
6. The method for precise three-dimensional microscopic measurement across the axial dimension as claimed in claim 2, wherein: the step 1 of "acquiring a certain number of image sequences" includes:
if the height of the measured sample is h, the differential measurement range is 2u F And h > 2u F When step t is equal to u F Then, the number D of the acquired sequence images is:
wherein]To round down;
if the differential step t is less than u F And acquiring the number D of the sequence images as follows:
d is an integer.
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| JP2008241483A (en) * | 2007-03-27 | 2008-10-09 | Matsushita Electric Works Ltd | Three-dimensional measurement method and three-dimensional shape measuring apparatus using the same |
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| CN107514984A (en) * | 2017-07-07 | 2017-12-26 | 南京航空航天大学 | A kind of 3 d surface topography measuring method and system based on optical microphotograph |
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| CN110763153A (en) * | 2019-11-22 | 2020-02-07 | 宁波五维检测科技有限公司 | Multispectral large-view-field microscopic three-dimensional morphology measuring device and method |
| CN110763154A (en) * | 2019-11-25 | 2020-02-07 | 宁波五维检测科技有限公司 | Large-field-of-view microscopic 3D (three-dimensional) morphology multi-channel measuring device and method |
| CN113188473A (en) * | 2021-04-30 | 2021-07-30 | 聚时科技(上海)有限公司 | Surface topography measuring device and method |
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- 2022-06-08 CN CN202210641105.XA patent/CN115031659A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008241483A (en) * | 2007-03-27 | 2008-10-09 | Matsushita Electric Works Ltd | Three-dimensional measurement method and three-dimensional shape measuring apparatus using the same |
| CN103075960A (en) * | 2012-12-30 | 2013-05-01 | 北京工业大学 | Multi-visual-angle great-depth micro stereo visual-features fusion-measuring method |
| CN107514984A (en) * | 2017-07-07 | 2017-12-26 | 南京航空航天大学 | A kind of 3 d surface topography measuring method and system based on optical microphotograph |
| CN110715616A (en) * | 2019-10-14 | 2020-01-21 | 中国科学院光电技术研究所 | Structured light micro-nano three-dimensional morphology measurement method based on focusing evaluation algorithm |
| CN110763153A (en) * | 2019-11-22 | 2020-02-07 | 宁波五维检测科技有限公司 | Multispectral large-view-field microscopic three-dimensional morphology measuring device and method |
| CN110763154A (en) * | 2019-11-25 | 2020-02-07 | 宁波五维检测科技有限公司 | Large-field-of-view microscopic 3D (three-dimensional) morphology multi-channel measuring device and method |
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