CN115015155A - Terahertz near-field audio frequency modulation and demodulation nano probe array system, method and storage medium - Google Patents
Terahertz near-field audio frequency modulation and demodulation nano probe array system, method and storage medium Download PDFInfo
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Abstract
The invention provides a terahertz near-field audio modulation and demodulation nano probe array system, a method and a storage medium. The terahertz near-field audio frequency modulation and demodulation nano probe array is based on a terahertz near-field audio modulation and demodulation nano probe array, frequency mixing is carried out on terahertz wave signals, and the terahertz wave signals are demodulated to obtain biomacromolecule information. The terahertz near-field audio frequency modulation and demodulation nano probe array enables the detected biomacromolecule to be rapidly and dynamically imaged in a microscopic mode.
Description
Technical Field
The invention relates to the field of microscopic imaging, in particular to a terahertz near-field audio modulation and demodulation nano probe array system, a method and a storage medium.
Background
The terahertz wave has great application potential in the field of biomedical spectral imaging by virtue of the excellent characteristics of fingerprint spectrum of biomacromolecules, good penetrability, no ionization damage and the like, and becomes a hot point of research at home and abroad. In the conventional far-field terahertz imaging based on traditional lens focusing, because a terahertz light spot is far larger than the size of a biomolecule, the physical diffraction limit causes serious mismatch of the scale, and the average effect of the whole light spot covering the biomolecule is obtained by far-field detection. At present, a nano probe is utilized to focus terahertz waves to a probe tip in a super-diffraction manner to form a terahertz local enhancement field with the curvature radius equivalent to that of the probe tip, the curvature radius of the probe tip is controlled to enable the size of a focused light spot to reach a nano level, the terahertz waves focused in the super-diffraction manner are obtained, and the nano-scale imaging spatial resolution, namely terahertz near-field imaging, is realized.
However, the current terahertz near-field imaging related research focuses on static or slow imaging, and even if the space resolution is sufficient, only a specific state of biomacromolecule interaction can be imaged, and all information revealed by the interaction process of terahertz radiation and a biological system cannot be shown.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a terahertz near-field audio modulation and demodulation nano probe array system, a method and a storage medium.
A nanometer probe array device comprises a directional coupler, a radio frequency mixer, a subharmonic mixer, an IQ mixer, a phase-locked amplifier, a signal generator and a nanometer probe array;
the directional coupler and the subharmonic mixer are matched with each other to transmit the terahertz wave signals scattered back by the nanoprobe array to the IQ mixer; the radio frequency mixer is used for transmitting a vibration source signal to the IQ mixer; the IQ mixer is used for mixing the terahertz wave signals; the phase-locked amplifier demodulates the terahertz wave signal to acquire biomacromolecule information.
Preferably, the signal of the first local vibration source is input into the directional coupler after power amplification and frequency doubling, and is output to the nanoprobe array through the directional coupler; the terahertz wave signals scattered back by the nanoprobe array enter the RF end of the subharmonic mixer through the directional coupler; the signal of the second local vibration source enters the LO end of the subharmonic mixer after power amplification and frequency multiplication;
signals of the first local vibration source and the second local vibration source are respectively input into the radio frequency mixer, and the output of the radio frequency mixer is input into an LO end of the IQ mixer after power amplification and frequency multiplication; the RF end of the IQ mixer is connected with the IF end of the subharmonic mixer; the IQ mixer is used for realizing frequency mixing of terahertz wave signals; and the quadrature phase component and the in-phase component of the IQ mixer are respectively input into a phase-locked amplifier.
Preferably, the nanoprobe array comprises a plurality of signal generators, and each signal generator generates a vertical vibration modulation signal at different frequencies.
Preferably, the lock-in amplifier reference inputs are provided by signal generators, and the number of lock-in amplifier reference inputs matches the number of signal generators.
Preferably, the probe length and the tip radius of curvature of each nanoprobe of the linear array are the same.
A terahertz near field imaging system comprises the nano probe array device.
A terahertz near-field audio frequency modulation and demodulation method based on the nano probe array device comprises the following steps:
the nano probe connected to the tuning fork is subjected to nano amplitude dithering at the frequency of sound waves or ultrasonic waves, the modulation frequency range and the frequency interval are selected, and the near-field signal is modulated by using the mechanical vibration of the nano probe;
phase-locked amplifying the detected near-field signal at the fundamental frequency or the higher harmonic frequency of the mechanical vibration, so that the unmodulated background signal scattered back from the tuning fork and the probe conical body is abandoned;
and the Hertz near field detection time period is used as a scanning period to synchronously scan the nano probe array, so that the terahertz near field signal detected by the detector can be read by the nano probe array every time the nano probe array is stepped on the objective table.
Preferably, the space coordinates of the nanoprobe and the detected terahertz signal are stored as the same node data, and the node data is used as the terahertz near-field detection time period of the nanoprobe array imaging pixel.
Preferably, a single nanoprobe is labeled by identifying the terahertz near-field scattering signal from the nanoprobe to realize the positioning demodulation of the terahertz scattering signal of each nanoprobe.
A storage medium comprising a computer program which when run executes the above-mentioned terahertz near-field audio frequency modulation-demodulation method.
Compared with the prior art, the invention has the beneficial technical effects that: the terahertz near-field audio frequency modulation and demodulation nano probe array improves the imaging speed and realizes the rapid dynamic microscopic imaging of the measured biomacromolecule on the basis of breaking through the diffraction limit and having the nano-scale spatial resolution.
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To more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
FIG. 1 is a schematic diagram of a terahertz near-field imaging system based on a nanoprobe array.
FIG. 2 is a schematic diagram of a structure of a nanoprobe array.
FIG. 3 is a schematic diagram of scanning probe array arrangement.
Fig. 4 is a schematic diagram of a probe signal demodulation process.
Fig. 5 is a schematic diagram of signal phase lock amplification.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all the embodiments.
As shown in fig. 1, the present embodiment provides a terahertz near-field audio frequency modulation and demodulation nanoprobe array system and an imaging system thereof, including a local oscillation source, a beam splitter, a power amplifier, a plurality of frequency multipliers, a directional coupler, a horn antenna, an off-axis parabolic mirror, a radio frequency mixer, a sub-harmonic mixer, an IO mixer, a lock-in amplifier, and a signal generator.
The vibration sources S1 and S2 both adopt phase-locked sources as low-frequency transmitting signals. Illustratively, the signal frequency of the phase-locked source S1 is 27.5GHz, and in order to obtain higher output power, the signal source transmission power is amplified by using a high-gain power amplifier before frequency multiplication; the frequency of the transmitted signal is changed into 220GHz dot frequency signal after passing through a quadruple frequency and a frequency doubler, the 220GHz dot frequency signal is used as a Radio Frequency (RF) signal of the system, the RF signal is finally transmitted out by the nano probe array through the directional coupler, the horn antenna and the off-axis parabolic mirror, and the terahertz wave signal which carries biomacromolecule information and is scattered back by the nano probe array enters the radio frequency input end of the subharmonic mixer through the directional coupler. The phase-locked source S2 is used as a system local oscillator signal generator, the frequency is 27.475GHz, and the phase-locked source S2 is used as a local oscillator signal to enter a subharmonic mixer after being subjected to power amplification through a quadruple frequency.
The structure of the nanoprobe array is schematically shown in FIG. 2. The length of each nano probe of the linear array structure is the same as the curvature radius of the needle point. Illustratively, the curvature radius of the needle tip is about 10nm, and the distance between two adjacent nanoprobes is controlled in the range of 20-60 nm. Modifying the structure or curvature radius of the probe by adopting a focused ion beam to obtain a probe tip with the curvature radius of about 100 nm; and then, carrying out metallization treatment on the needle tip by adopting vacuum coating or thermal evaporation to prepare a probe array with the curvature radius of about 10nm so as to realize single-molecule-level terahertz near-field imaging.
And part of the output of the two phase-locked sources respectively enters two radio frequency ends of an incident frequency mixer, the frequency output of the two phase-locked sources is converted into 219.8GHz after passing through a power amplifier and being subjected to frequency doubling by a quadruple frequency and a frequency doubler, and then the converted frequency enters a local oscillation input end of the I-Q mixer to be mixed with terahertz wave signals scattered back by the nano probe array.
Illustratively, the nanoprobe array is set to be eight, and vertical vibration modulation signals with different frequencies are given by the eight-way signal generator, and the vertical vibration modulation frequencies are respectively set to be omega n ＝10KHz,11KHz...17KHz，n＝1,2…7 at 1KHz intervals, the I and Q outputs of the I-Q mixer contain DC signals and omega n The harmonic components of the eight-path phase-locked amplifier respectively enter the I input end and the Q input end of the eight-path phase-locked amplifier; the reference inputs corresponding to the eight-path phase-locked amplifier are respectively provided by the eight-path signal generator, so that the biomacromolecule information acquired by the nano probes corresponding to eight modulation frequencies can be simultaneously demodulated by IQ.
The embodiment provides a terahertz near-field audio modulation and demodulation nano probe array method, which comprises the following steps: n linear probe arrays are modulated. The detected near-field signal is phase-locked amplified at the fundamental or higher harmonic n Ω ( n 2, 3, 4 … …) frequency of the mechanical vibrations using a phase-locked amplifier, thereby discarding the strong background signal scattered back from the periphery of the probe tuning fork and probe cone body, etc., which is not modulated. Before phase-locked amplification is carried out, a Michelson interferometer in the terahertz optical path module is also used for carrying out interference amplification to improve the detection sensitivity.
And (3) demodulating signals of the nano linear multi-probe array. In order to demodulate the terahertz scattering signal of each nano probe, the terahertz waves scattered by the nth nano probe are determined by utilizing the natural vibration frequency identification of the tuning fork probe system, and the terahertz near-field signals are demodulated through the vibration frequency and the harmonic frequency thereof. The tuning fork natural frequency gives the nano probe an audio frequency modulation vibration signal to vibrate up and down slightly, so that the corresponding modulation of the vibration signals with different frequencies to different probes is realized.
Illustratively, the nanoprobe attached to the tuning fork is dithered with a sonic or ultrasonic frequency Ω n to a nanometer amplitude. The natural resonant frequency of a tuning fork nanoprobe is typically between 10kHz to 30kHz, there is enough space to accommodate tens or hundreds of individual resonant frequencies, and there is enough frequency difference between adjacent frequencies to avoid crosstalk. For example, 10 tuning fork nanoprobes of 10kHz, 11kHz and … 19kHz can be selected to form an array of 10 elements. Where Δ Ω ═ 1kHz is the frequency spacing between adjacent channels, each channel corresponding to a single tuning fork nanoprobe. After the modulation frequency range and interval are selected, the near-field signal can be modulated using mechanical vibration of the probe. In the control aspect of the nano probe, a motor is adopted to drive the probe to perform movement control with the precision of less than 10 nanometers and the stroke of 10 micrometers in the Z direction so as to ensure that the nano probe is safely and effectively contacted with a sample.
The synchronous control of the scanning of the probe array arrangement is shown in fig. 3. The method is realized by the cooperative control of software and hardware, and the software is used for controlling the hardware time sequence, so that the terahertz near-field signal detected by the corresponding detector is read when the nano probe array is stepped on the objective table once; meanwhile, in order to reduce the interference of the probe conical main body and a tuning fork scattering signal, the terahertz signal is amplified by up-and-down vibration phase locking of the nano probe, and finally the space coordinate of the nano probe and the detected terahertz signal are stored as the same node data and are used as the terahertz near-field detection time period of one array imaging pixel. After the series of actions are completed, the next time period is entered through software control, and the detection of the next array of pixel points is carried out. Considering that there is a spatial distance of m × 20(m ═ 1, 2, 3) nanometers between two adjacent nanoprobe tips, (m-1) times of cross scans are needed to complete a full row or column panoramic scan when each row or column is scanned. The cross scanning mode of multi-probe synchronous control can complete the whole-row or whole-column panoramic scanning without missing.
Due to the problem of physical spacing of the probes, cross scanning is required to complete full-row or full-column panoramic scanning without missing. Marking a single nanoprobe by identifying different modulation frequencies of the terahertz near-field scattering signals from the nanoprobe, thereby realizing the positioning and demodulation of the terahertz scattering signals of each nanoprobe; and (3) arranging and scanning by using a synchronously controlled probe array, so that the whole row or column is scanned without blind areas.
As shown in fig. 4-5, taking one path of modulation frequency Ω as an example, the signal processing process is as follows:
suppose E i ＝|E i |cos(ω i t+θ 0 ) Representing incident field signals from the nanoprobe, E b ＝|E b |cos(ω i t+θ 1 ) Representing the backscattered field signal, E n Is a near field signal, then
Where η is the reflectance of the sample being probed; f m Are the fourier coefficients of the harmonic components,
|F m i and
amplitude and phase of the fourier coefficients, respectively; omega i The frequency of terahertz waves (220 GHz as in fig. 1); theta 0 Is the phase of the incident terahertz wave; theta.theta. 1 Is the phase of the scattered terahertz wave.
Inevitably, the signal reflected back to the directional coupler contains not only the near-field signal received by the probe, but also the backscattered signal reflected by the tip and the sample surface, so the signal entering the rf side of the subharmonic mixer can be expressed as E RF ＝E n +E b Is concretely provided with
Let E LO Representing signals entering the local oscillator of the subharmonic mixer, E LO ＝|E LO |cos(ω r t+θ 2 ) (ii) a The subharmonic mixer output E IF Can be expressed as
It follows that the output signal of the subharmonic mixer comprises two frequency components ω i -2ω r And ω i -2ω r +mΩ；ω r The frequency of the signal entering the local oscillation end of the subharmonic mixer (109.95 GHz as shown in figure 1). In order to eliminate useless frequency component signals, the output of the harmonic mixer enters the radio frequency end of the IQ mixerFurther mixing is performed. Due to local oscillator input E of IQ mixer lo ＝|E lo |cos[(ω i -2ω r )t+θ 3 ]；θ 3 For the phase difference output by the two phase-locked sources, its mixing signal E if Can be expressed as
After filtering off the DC component, E if The AC component, which contains only the harmonic of Ω, can be expressed as
Wherein the content of the first and second substances,
F m are the fourier coefficients of the harmonic components,
|F m i and
the amplitude and phase of the fourier coefficients, respectively, are determined by the complex dielectric properties of the sample, and are the near-field signal amplitude and phase information that needs to be demodulated.
Is provided with
Its two quadrature outputs E IF-I And E IF-Q Can be expressed as
Respectively enter the I and Q input terminals of the lock-in amplifier, and can be represented as E if the initial phase of the reference input of the lock-in amplifier is zero ref ＝E ref | cos (m Ω t). After the phase-locked amplification treatment, the outputs are respectively
In order to obtain the amplitude and phase of the input signal of the lock-in amplifier, a phase-locked loop (PLL) is designed at the reference input end of the lock-in amplifier, the phase of the reference input signal is rotated by 90 degrees to generate two orthogonal reference signals, and the two orthogonal reference signals are respectively multiplied by the two input signals. Therefore, the m-times Ω frequency signal is phase-locked and demodulated, and the two output orthogonal signals are:
after the phase-locked amplification processing, the corresponding amplitude and phase information can be obtained from the output signal of the phase-locked amplification processing respectively as follows
Finally, the required amplitude and phase information can be derived from the above equation:
the present embodiment also provides a storage medium including a computer program which executes the terahertz near-field audio frequency modulation and demodulation method of the present embodiment when the computer program is executed.
The embodiment adopts the audio frequency modulation and demodulation nano probe array device combining the nano probe array and the rapid scanning mechanism, combines the terahertz all-solid-state transmitting and receiving coherent detection, thoroughly gets rid of the limitation of the terahertz source and the detector on the imaging speed, improves the terahertz near-field imaging speed, and meets the requirement of observing the interaction dynamic speed between biomacromolecules in real time.
The above-mentioned embodiments are only specific embodiments of the present application, and are used for illustrating the technical solutions of the present application, but not limiting the same, and the scope of the present application is not limited thereto, and although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope disclosed in the present application; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present application. Are intended to be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A nanoprobe array device is characterized by comprising a directional coupler, a radio frequency mixer, a subharmonic mixer, an IQ mixer, a phase-locked amplifier, a signal generator and a nanoprobe array;
the directional coupler and the subharmonic mixer are matched with each other to transmit terahertz wave signals scattered back by the nano probe array to the IQ mixer; the radio frequency mixer is used for transmitting a vibration source signal to the IQ mixer; the IQ mixer is used for mixing the terahertz wave signals; the phase-locked amplifier demodulates the terahertz wave signal to acquire biomacromolecule information.
2. The nanoprobe array apparatus of claim 1, wherein a signal of the first local oscillator is amplified and frequency-doubled, then input to the directional coupler, and output to the nanoprobe array through the directional coupler; the terahertz wave signals scattered back by the nanoprobe array enter the RF end of the subharmonic mixer through the directional coupler; the signal of the second local vibration source enters the LO end of the subharmonic mixer after power amplification and frequency multiplication;
signals of the first local vibration source and the second local vibration source are respectively input into the radio frequency mixer, and the output of the radio frequency mixer is input into an LO end of the IQ mixer after power amplification and frequency multiplication; the RF end of the IQ mixer is connected with the IF end of the subharmonic mixer; the IQ mixer is used for realizing frequency mixing of terahertz wave signals; and the quadrature phase component and the in-phase component of the IQ mixer are respectively input into a phase-locked amplifier.
3. The nanoprobe array apparatus of claim 2, wherein the nanoprobe array comprises a plurality of signal generators, each generating a vertical vibration modulation signal at a different frequency.
4. The nanoprobe array apparatus of claim 3, wherein the reference inputs of the lock-in amplifiers are provided by signal generators, and the number of reference inputs of the lock-in amplifiers matches the number of signal generators.
5. The nano-probe array apparatus according to claim 4, wherein the probe length and the tip radius of curvature of each nano-probe of the linear array are the same.
6. A terahertz near-field imaging system, characterized in that the terahertz near-field dynamic imaging system comprises the nanoprobe array apparatus of any one of claims 1 to 5.
7. A terahertz near-field acoustic frequency modulation and demodulation method based on the nanoprobe array device of any one of claims 1 to 5, comprising:
the nano probe connected to the tuning fork is subjected to nano amplitude dithering at the frequency of sound waves or ultrasonic waves, a modulation frequency range and a frequency interval are selected, and the near-field signal is modulated by using the mechanical vibration of the nano probe;
phase-locked amplifying the detected near-field signal at the fundamental frequency or the higher harmonic frequency of the mechanical vibration, so that the unmodulated background signal scattered back from the tuning fork and the probe conical body is abandoned;
and the Hertz near field detection time period is used as a scanning period to synchronously scan the nano probe array, so that the terahertz near field signal detected by the detector can be read by the nano probe array every time the nano probe array is stepped on the objective table.
8. The terahertz near-field audio frequency modulation and demodulation method as claimed in claim 7, wherein the space coordinates of the nanoprobe and the detected terahertz signal are stored as the same node data, and the node data is used as the terahertz near-field detection time period of one nanoprobe array imaging pixel.
9. The terahertz near-field audio frequency modulation and demodulation method as claimed in claim 8, wherein the individual nanoprobes are labeled by identifying the terahertz near-field scattering signal from the nanoprobes to achieve localized demodulation of the terahertz scattering signal of each nanoprobe.
10. A storage medium comprising a computer program which when executed performs the terahertz near-field audio modulation-demodulation method of any one of claims 7 to 9.
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| CN117405624A (en) * | 2023-10-27 | 2024-01-16 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | Terahertz near-field imaging system measurement method with precision superior to 10 nanometers |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117405624A (en) * | 2023-10-27 | 2024-01-16 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | Terahertz near-field imaging system measurement method with precision superior to 10 nanometers |
| CN117405624B (en) * | 2023-10-27 | 2024-05-07 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | Terahertz near-field imaging system measurement method with precision superior to 10 nanometers |
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