CN115013663A - XY theta alignment platform - Google Patents
XY theta alignment platform Download PDFInfo
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- CN115013663A CN115013663A CN202210641682.9A CN202210641682A CN115013663A CN 115013663 A CN115013663 A CN 115013663A CN 202210641682 A CN202210641682 A CN 202210641682A CN 115013663 A CN115013663 A CN 115013663A
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- 239000003638 chemical reducing agent Substances 0.000 claims description 21
- 238000009434 installation Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
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Abstract
The invention relates to the technical field of precise alignment platforms, in particular to an XY theta alignment platform, which is characterized in that a mounting base, an X-axis sliding mechanism, a first sliding seat, an X-axis driving adjusting mechanism, a Y-axis sliding mechanism, a second sliding seat, a Y-axis driving adjusting mechanism, a rotating seat and a rotating driving adjusting mechanism are integrated together, the structure is compact and simple, and the rotating driving adjusting mechanism sequentially penetrates through the second sliding seat, the first sliding seat and the mounting base, so that the height and the width of the XY theta alignment platform are greatly reduced, and the problems of high overall height and difficulty in ensuring precision caused by the superposition of the traditional XY theta alignment platform are solved; when the device is used, the problems that the structure is complex due to the adoption of the conventional XXY working platform, the rotation is realized due to the need of a special complex algorithm, the design is difficult, the manufacturing cost is high and the production cost is saved are avoided.
Description
Technical Field
The invention relates to the technical field of precision alignment platforms, in particular to an XY theta alignment platform.
Background
The precision alignment system based on machine vision has a complex structure and integrates multiple technologies such as a precision mechanical technology, an optical system/an image processing technology/an intelligent control technology and the like. The precision mechanical working platform is an important component of precision mechanical technology and a key subsystem in a precision alignment system, and plays an important role in assembling alignment equipment to complete accurate device alignment.
In the conventional XY theta alignment platform, theta is an independent rotating shaft and can rotate by a large angle, and the defects that the superposition amplification of errors is caused by the superposition of the platform and the precision is not easy to ensure; with the rapid development of the flat panel display technology, the requirements of flat panel display products on the precision of processing equipment are continuously improved, and the XY theta platform is mostly not applied to precision alignment application occasions; and an XXY working platform is usually adopted for precise alignment, wherein the XXY working platform is usually named as UVW in Japan, the XXY is axial in two X directions and is matched with one axial in the Y direction, and the rest shaft adopts a free shaft, so that the application of the traditional XY theta is replaced, the XXY working platform is different from the traditional XY theta structure, the overall height is effectively reduced, the utilization rate of a machine space is improved, but the XXY working platform has a complex structure, needs a special complex algorithm to rotate, is difficult to design, is expensive in manufacturing cost and is not beneficial to saving the production cost.
Disclosure of Invention
In order to overcome the defects and shortcomings in the prior art, the invention aims to provide an XY theta alignment platform.
The purpose of the invention is realized by the following technical scheme: an XY theta alignment platform comprises a mounting base, an X-axis sliding mechanism, a first sliding seat, an X-axis driving adjusting mechanism, a Y-axis sliding mechanism, a second sliding seat, a Y-axis driving adjusting mechanism, a rotating seat and a rotary driving adjusting mechanism, wherein the X-axis sliding mechanism is axially arranged on the mounting base, the first sliding seat is in sliding connection with the mounting base through the X-axis sliding mechanism, the X-axis driving adjusting mechanism is fixedly arranged on the mounting base and used for driving the first sliding seat to slide along the X-axis axial direction, the Y-axis sliding mechanism is axially arranged on the first sliding seat, the second sliding seat is in sliding connection with the first sliding seat through the Y-axis sliding mechanism, the Y-axis driving adjusting mechanism is fixedly arranged on the first sliding seat and used for driving the second sliding seat to slide along the Y-axis axial direction, the rotating seat is rotatably arranged above the second sliding seat, and the rotary driving adjusting mechanism is fixedly arranged in the middle of the second sliding seat and used for driving the rotating seat to rotate, the rotary driving adjusting mechanism sequentially penetrates through the middle of the second sliding seat, the middle of the first sliding seat and the middle of the mounting base.
Preferably, the X-axis sliding mechanism includes an X-axis sliding rail axially fixed to the mounting base, and a first sliding block slidably connected to the X-axis sliding rail, and the first sliding seat is fixedly connected to the first sliding block; the Y-axis sliding mechanism comprises a Y-axis sliding rail and a second sliding block, the Y-axis sliding rail is axially fixed on the first sliding seat, the second sliding block is connected with the Y-axis sliding rail in a sliding mode, and the second sliding seat is fixedly connected with the second sliding block.
Preferably, the X-axis driving adjustment mechanism comprises a first lead screw stepping motor fixedly mounted on the mounting base, and a first lead screw nut in threaded connection with a screw end of the first lead screw stepping motor, and an outer side wall of the first lead screw nut is fixedly connected to the first sliding seat; the Y-axis driving adjusting mechanism comprises a second lead screw stepping motor fixedly installed on the second sliding seat and a second lead screw nut in threaded connection with the screw end of the second lead screw stepping motor, and the outer side wall of the second lead screw nut is fixedly connected to the first sliding seat.
Preferably, the first lead screw stepping motor and the second lead screw stepping motor are through shaft type lead screw stepping motors.
Preferably, the mounting base is connected with a first connecting seat, the first lead screw stepping motor is fixedly connected with the mounting base through the first connecting seat, the second sliding seat is connected with a second connecting seat, and the second lead screw stepping motor is fixedly connected with the second sliding seat through the second connecting seat.
Preferably, the rotary driving adjusting mechanism comprises a rotary driving motor fixedly installed at the middle part of the second sliding seat and a speed reducer connected with the output end of the rotary driving motor, the output end of the speed reducer is fixedly connected with the rotating seat, and the rotary driving motor sequentially penetrates through the second sliding seat, the first sliding seat and the mounting base.
Preferably, the bottom of the second sliding seat is connected with a motor connecting seat, and the rotary driving motor is fixedly connected with the second sliding seat through the motor connecting seat.
Preferably, the inner side of the motor connecting seat is provided with a holding clamping groove, and the upper end cover of the rotary driving motor is clamped in the holding clamping groove of the motor connecting seat and is fixedly connected with the holding clamping groove through a bolt.
Preferably, the rotary driving motor is a stepping motor, the speed reducer is a harmonic speed reducer, a wave generator of the speed reducer is fixedly connected with the rotary driving motor, and a rigid wheel of the speed reducer is fixedly connected with the rotary seat.
Preferably, the XY θ alignment platform further comprises an X-axis sensor disposed on the sidewall of the first sliding seat, a Y-axis sensor disposed on the sidewall of the second sliding seat, a rotation sensor disposed at the bottom of the rotating seat, an X-axis displacement sensor disposed on the mounting base and cooperating with the X-axis sensor to detect the X-axis axial sliding displacement of the first sliding seat, a Y-axis displacement sensor disposed on the first sliding seat and cooperating with the Y-axis sensor to detect the Y-axis axial sliding displacement of the second sliding seat, and a rotation displacement sensor disposed on the second sliding seat and cooperating with the rotation sensor to detect the rotation displacement of the rotating seat.
The invention has the beneficial effects that: according to the XY theta alignment platform, the mounting base, the X-axis sliding mechanism, the first sliding seat, the X-axis driving adjusting mechanism, the Y-axis sliding mechanism, the second sliding seat, the Y-axis driving adjusting mechanism, the rotating seat and the rotating driving adjusting mechanism are integrated together, the structure is compact and simple, and the rotating driving adjusting mechanism sequentially penetrates through the second sliding seat, the first sliding seat and the mounting base, so that the height and the width of the XY theta alignment platform are greatly reduced, and the problems that the overall height is high and the precision is not easy to guarantee due to the superposition of the traditional XY theta alignment platform are solved; when the X-axis sliding mechanism is used, the first sliding seat is driven to slide axially along the X axis through the X-axis driving adjusting mechanism for adjustment, the second sliding seat is driven to slide axially along the Y axis through the Y-axis driving adjusting mechanism for adjustment, and the rotating seat is driven to rotate through the rotating driving adjusting mechanism for rotation, so that the problems that the structure is complex, the complex algorithm special for matching is needed for rotation, the design is difficult, the manufacturing cost is expensive and the production cost is saved due to the adoption of the conventional XXY working platform are solved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of another aspect of the present invention;
FIG. 3 is a schematic structural view from a further perspective of the present invention;
fig. 4 is an exploded view of the present invention.
The reference signs are: 1. mounting a base; 2. a first sliding seat; 3. a second sliding seat; 4. a rotating base; 5. an X-axis sliding mechanism; 51. an X-axis slide rail; 52. a first slider; 6. an X-axis drive adjustment mechanism; 61. a first lead screw stepping motor; 62. a first lead screw nut; 7. a Y-axis slide mechanism; 71. a Y-axis slide rail; 72. a second slider; 8. a Y-axis drive adjustment mechanism; 81. a second lead screw stepping motor; 82. a second feed screw nut; 9. a first connecting seat; 10. a second connecting seat; 11. a rotary drive motor; 12. a speed reducer; 13. a motor connecting seat; 14. an accommodating slot; 15. an X-axis sensing member; 16. a Y-axis sensing element; 17. rotating the sensing member; 18. an X-axis displacement sensing assembly; 19. a Y-axis displacement sensing assembly; 20. a rotary displacement sensing assembly.
Detailed Description
For the understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention.
As shown in FIGS. 1 to 4, an XY θ alignment platform comprises a mounting base 1, an X-axis sliding mechanism 5 disposed on the mounting base 1 in the axial direction of the X-axis, a first sliding base 2 slidably connected to the mounting base 1 via the X-axis sliding mechanism 5, an X-axis driving adjustment mechanism 6 fixedly mounted on the mounting base 1 for driving the first sliding base 2 to slide along the axial direction of the X-axis, a Y-axis sliding mechanism 7 disposed on the first sliding base 2 in the axial direction of the Y-axis, a second sliding base 3 slidably connected to the first sliding base 2 via the Y-axis sliding mechanism 7, a Y-axis driving adjustment mechanism 8 fixedly mounted on the first sliding base 2 for driving the second sliding base 3 to slide along the axial direction of the Y-axis, a rotary base 4 rotatably disposed above the second sliding base 3, and a rotary driving adjustment mechanism fixedly mounted on the middle portion of the second sliding base 3 for driving the rotary base 4 to rotate, the rotary driving adjusting mechanism sequentially penetrates through the middle of the second sliding seat 3, the middle of the first sliding seat 2 and the middle of the mounting base 1.
According to the XY theta alignment platform, the mounting base 1, the X-axis sliding mechanism 5, the first sliding seat 2, the X-axis driving adjusting mechanism 6, the Y-axis sliding mechanism 7, the second sliding seat 3, the Y-axis driving adjusting mechanism 8, the rotating seat 4 and the rotating driving adjusting mechanism are integrated together, the structure is compact and simple, and the rotating driving adjusting mechanism sequentially penetrates through the second sliding seat 3, the first sliding seat 2 and the mounting base 1, so that the height and the width of the XY theta alignment platform are greatly reduced, and the problems that the overall height is high and the precision is not easy to guarantee due to the superposition of a traditional XY theta alignment platform are solved; when the X-axis sliding adjusting mechanism is used, the X-axis driving adjusting mechanism 6 drives the first sliding seat 2 to slide and adjust along the X-axis axial direction, the Y-axis driving adjusting mechanism 8 drives the second sliding seat 3 to slide and adjust along the Y-axis axial direction, and the rotary driving adjusting mechanism drives the rotary seat 4 to rotate, so that the problems that the structure is complex, a special complex algorithm is required to be matched to achieve rotation, the design is not easy, the manufacturing cost is expensive and the like due to the adoption of the conventional XXY working platform are solved, and the production cost is saved.
In this embodiment, the X-axis sliding mechanism 5 includes an X-axis sliding rail 51 axially fixed to the mounting base 1, and a first sliding block 52 slidably connected to the X-axis sliding rail 51, and the first sliding seat 2 is fixedly connected to the first sliding block 52; the Y-axis sliding mechanism 7 comprises a Y-axis sliding rail 71 axially fixed on the first sliding seat 2 and a second sliding block 72 slidably connected with the Y-axis sliding rail 71, and the second sliding seat 3 is fixedly connected with the second sliding block 72.
By adopting the technical scheme, the X-axis slide rail 51 limits the first slide block 52 to only slide in the X-axis axial direction, the Y-axis slide rail 71 limits the second slide block 72 to only slide in the Y-axis axial direction, when the X-axis drive adjusting mechanism 6 drives the first slide seat 2 to slide in the X-axis axial direction, and the Y-axis drive adjusting mechanism 8 drives the second slide seat 3 to slide in the Y-axis axial direction, so that the influence on the precision alignment effect caused by deviation in the sliding direction is avoided.
In this embodiment, the X-axis driving adjustment mechanism 6 includes a first lead screw stepping motor 61 fixedly mounted on the mounting base 1, and a first lead screw nut 62 in threaded connection with a screw end of the first lead screw stepping motor 61, and an outer side wall of the first lead screw nut 62 is fixedly connected to the first sliding seat 2; the Y-axis driving adjustment mechanism 8 comprises a second lead screw stepping motor 81 fixedly installed on the second sliding seat 3 and a second lead screw nut 82 in threaded connection with a screw end of the second lead screw stepping motor 81, and the outer side wall of the second lead screw nut 82 is fixedly connected to the first sliding seat 2.
By adopting the technical scheme, the first lead screw stepping motor 61 is matched with the first lead screw nut 62 to drive the first sliding seat 2 to slide; the second screw rod stepping motor 81 is matched with the second screw rod nut 82 to drive the second sliding seat 3 to slide, and the structure is simple and the control is convenient.
In the present embodiment, the first lead screw stepping motor 61 and the second lead screw stepping motor 81 are through shaft type lead screw stepping motors.
By adopting the technical scheme, the precise driving is favorably realized, and the precise alignment effect is improved.
In this embodiment, the mounting base 1 is connected with a first connecting seat 9, and the first lead screw stepping motor 61 is fixedly connected with the mounting base 1 through the first connecting seat 9; the second sliding seat 3 is connected with a second connecting seat 10, and the second lead screw stepping motor 81 is fixedly connected with the second sliding seat 3 through the second connecting seat 10.
By adopting the technical scheme, the installation stability and the structural compactness of the first lead screw stepping motor 61 are improved, and the installation stability and the structural compactness of the second lead screw stepping motor 81 are improved; when the first lead screw stepping motor 61 is driven, the first sliding seat 2 slides relative to the mounting base 1, and when the second lead screw stepping motor 81 is driven, the second sliding seat 3 slides relative to the mounting base 1.
In this embodiment, the rotation driving adjusting mechanism includes a rotation driving motor 11 fixedly installed in the middle of the second sliding seat 3 and a speed reducer 12 connected to the output end of the rotation driving motor 11, the output end of the speed reducer 12 is fixedly connected to the rotating seat 4, and the rotation driving motor 11 sequentially penetrates through the second sliding seat 3, the first sliding seat 2 and the mounting base 1.
Adopt above-mentioned technical scheme, reduction gear 12 is connected with rotary drive motor 11's output, improves rotational stability, avoids rotary drive motor 11 drive roating seat 4 to rotate too violently and lead to counterpoint product dystopy.
In this embodiment, a motor connecting seat 13 is connected to the bottom of the second sliding seat 3, and the rotary driving motor 11 is fixedly connected to the second sliding seat 3 through the motor connecting seat 13.
By adopting the technical scheme, the installation stability and the structure compactness of the rotary driving motor 11 are improved.
In this embodiment, the inner side of the motor connecting seat 13 is provided with an accommodating slot 14, and the upper end cover of the rotary driving motor 11 is clamped in the accommodating slot 14 of the motor connecting seat 13 and is fixedly connected to the accommodating slot 14 through a bolt.
By adopting the technical scheme, the structure is more compact, the height of the XY theta alignment platform is favorably reduced, and the problems that the overall height is high and the precision is difficult to guarantee due to the superposition of the traditional XY theta alignment platform are further favorably solved.
In this embodiment, the rotation driving motor 11 is a stepping motor, the speed reducer 12 is a harmonic speed reducer 12, a wave generator of the speed reducer 12 is fixedly connected with the rotation driving motor 11, and a rigid wheel of the speed reducer 12 is fixedly connected with the rotating base 4.
By adopting the technical scheme, the structure is more compact, the size of the harmonic reducer 12 is small, the harmonic reducer has the advantages of high precision, high bearing capacity and the like, the height of the XY theta alignment platform is further reduced, and the problems that the overall height is high and the precision is not easy to guarantee due to the superposition of the traditional XY theta alignment platform are solved. Furthermore, the rotating seat 4 is provided with a countersunk through hole, and the rotating seat 4 penetrates through the countersunk through hole through a bolt and is fixedly connected with the rigid wheel.
In this embodiment, the XY θ alignment stage further includes an X-axis sensor 15 disposed on the side wall of the first sliding seat 2, a Y-axis sensor 16 disposed on the side wall of the second sliding seat 3, a rotation sensor 17 disposed at the bottom of the rotating seat 4, an X-axis displacement sensor 18 disposed on the mounting base 1 and cooperating with the X-axis sensor 15 for detecting the X-axis axial sliding displacement of the first sliding seat 2, a Y-axis displacement sensor 19 disposed on the first sliding seat 2 and cooperating with the Y-axis sensor 16 for detecting the Y-axis axial sliding displacement of the second sliding seat 3, and a rotation displacement sensor 20 disposed on the second sliding seat 3 and cooperating with the rotation sensor 17 for detecting the rotation displacement of the rotating seat 4.
By adopting the technical scheme, the X-axis displacement sensing assembly 18 is matched with the X-axis sensing piece 15 to detect the axial sliding displacement of the X axis of the first sliding seat 2, the Y-axis displacement sensing assembly 19 is matched with the Y-axis sensing piece 16 to detect the axial sliding displacement of the Y axis of the second sliding seat 3, and the rotary displacement sensing assembly 20 is matched with the rotary sensing piece 17 to detect the rotary displacement of the rotary seat 4, so that the adjustment range of the X-axis driving and adjusting mechanism 6 on the first sliding seat 2, the adjustment range of the Y-axis driving and adjusting mechanism 8 on the second sliding seat 3 and the adjustment range of the rotary driving and adjusting mechanism on the rotary seat 4 can be judged and controlled.
The above-described embodiments are preferred implementations of the present invention, and the present invention may be implemented in other ways without departing from the spirit of the present invention.
Claims (10)
1. An XY θ alignment stage, comprising: comprises a mounting base, an X-axis sliding mechanism arranged on the mounting base in the axial direction of an X axis, a first sliding seat connected with the mounting base in a sliding way through the X-axis sliding mechanism, an X-axis driving adjusting mechanism fixedly arranged on the mounting base and used for driving the first sliding seat to slide along the axial direction of the X axis, a Y-axis sliding mechanism arranged on the first sliding seat in the axial direction of the Y axis, a second sliding seat connected with the first sliding seat in a sliding way through the Y-axis sliding mechanism, a Y-axis driving adjusting mechanism fixedly arranged on the first sliding seat and used for driving the second sliding seat to slide along the axial direction of the Y axis, a rotating seat rotatably arranged above the second sliding seat, and a rotation driving adjusting mechanism fixedly arranged in the middle part of the second sliding seat and used for driving the rotating seat to rotate, the rotary driving adjusting mechanism sequentially penetrates through the middle of the second sliding seat, the middle of the first sliding seat and the middle of the mounting base.
2. An XY θ alignment stage according to claim 1, wherein: the X-axis sliding mechanism comprises an X-axis sliding rail and a first sliding block, the X-axis sliding rail is axially and fixedly arranged on the mounting base, the first sliding block is connected with the X-axis sliding rail in a sliding mode, and the first sliding seat is fixedly connected with the first sliding block; the Y-axis sliding mechanism comprises a Y-axis sliding rail and a second sliding block, the Y-axis sliding rail is axially fixed on the first sliding seat, the second sliding block is connected with the Y-axis sliding rail in a sliding mode, and the second sliding seat is fixedly connected with the second sliding block.
3. An XY θ alignment stage according to claim 1, wherein: the X-axis driving adjusting mechanism comprises a first lead screw stepping motor fixedly installed on the installation base and a first lead screw nut in threaded connection with a screw end of the first lead screw stepping motor, and the outer side wall of the first lead screw nut is fixedly connected to the first sliding seat; the Y-axis driving adjusting mechanism comprises a second lead screw stepping motor fixedly installed on the second sliding seat and a second lead screw nut in threaded connection with the screw end of the second lead screw stepping motor, and the outer side wall of the second lead screw nut is fixedly connected to the first sliding seat.
4. An XY θ alignment stage according to claim 3 wherein: the first lead screw stepping motor and the second lead screw stepping motor are through shaft type lead screw stepping motors.
5. An XY θ alignment stage according to claim 3 wherein: the mounting base is connected with a first connecting seat, the first lead screw stepping motor is fixedly connected with the mounting base through the first connecting seat, the second sliding seat is connected with a second connecting seat, and the second lead screw stepping motor is fixedly connected with the second sliding seat through the second connecting seat.
6. An XY θ alignment stage according to claim 1, wherein: the rotary driving adjusting mechanism comprises a rotary driving motor fixedly installed at the middle of the second sliding seat and a speed reducer connected with the output end of the rotary driving motor, the output end of the speed reducer is fixedly connected with the rotating seat, and the rotary driving motor sequentially penetrates through the second sliding seat, the first sliding seat and the mounting base.
7. An XY θ alignment stage according to claim 6, wherein: the bottom of the second sliding seat is connected with a motor connecting seat, and the rotary driving motor is fixedly connected with the second sliding seat through the motor connecting seat.
8. An XY θ alignment stage according to claim 7, wherein: the inner side of the motor connecting seat is provided with a containing clamping groove, and the upper end cover of the rotary driving motor is clamped in the containing clamping groove of the motor connecting seat and is fixedly connected with the containing clamping groove through a bolt.
9. An XY θ alignment stage according to claim 6, wherein: the rotary driving motor is a stepping motor, the speed reducer is a harmonic speed reducer, a wave generator of the speed reducer is fixedly connected with the rotary driving motor, and a rigid wheel of the speed reducer is fixedly connected with the rotary seat.
10. An XY θ alignment stage according to claim 1, wherein: the XY theta alignment platform further comprises an X-axis sensing piece arranged on the side wall of the first sliding seat, a Y-axis sensing piece arranged on the side wall of the second sliding seat, a rotation sensing piece arranged at the bottom of the rotating seat, an X-axis displacement sensing assembly arranged on the mounting base and matched with the X-axis sensing piece to detect the X-axis axial sliding displacement of the first sliding seat, a Y-axis displacement sensing assembly arranged on the first sliding seat and matched with the Y-axis sensing piece to detect the Y-axis axial sliding displacement of the second sliding seat, and a rotation displacement sensing assembly arranged on the second sliding seat and matched with the rotation sensing piece to detect the rotation displacement of the rotating seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210641682.9A CN115013663A (en) | 2022-06-07 | 2022-06-07 | XY theta alignment platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210641682.9A CN115013663A (en) | 2022-06-07 | 2022-06-07 | XY theta alignment platform |
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| CN115013663A true CN115013663A (en) | 2022-09-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210641682.9A Pending CN115013663A (en) | 2022-06-07 | 2022-06-07 | XY theta alignment platform |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1170434A (en) * | 1997-08-29 | 1999-03-16 | Ntn Corp | Movable table |
| CN202742244U (en) * | 2012-05-03 | 2013-02-20 | 吴茂祥 | XY theta precision alignment platform |
| KR101474696B1 (en) * | 2014-09-18 | 2014-12-18 | (주)삼정오토메이션 | Xy theta stage |
| CN206235889U (en) * | 2016-12-05 | 2017-06-09 | 亿模塑胶科技(苏州)有限公司 | A kind of SERVO CONTROL high accuracy contraposition rotation platform |
| CN207824831U (en) * | 2018-01-23 | 2018-09-07 | 王玉昌 | A kind of three axis automatic aligning platforms |
| CN207874158U (en) * | 2018-01-23 | 2018-09-18 | 誊展精密科技（深圳）有限公司 | A kind of high-accuracy XY θ contrapositions hardware platform |
| CN113799076A (en) * | 2021-10-10 | 2021-12-17 | 誊展精密科技（深圳）有限公司 | Leveling module and seven-axis alignment platform comprising same |
-
2022
- 2022-06-07 CN CN202210641682.9A patent/CN115013663A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1170434A (en) * | 1997-08-29 | 1999-03-16 | Ntn Corp | Movable table |
| CN202742244U (en) * | 2012-05-03 | 2013-02-20 | 吴茂祥 | XY theta precision alignment platform |
| KR101474696B1 (en) * | 2014-09-18 | 2014-12-18 | (주)삼정오토메이션 | Xy theta stage |
| CN206235889U (en) * | 2016-12-05 | 2017-06-09 | 亿模塑胶科技(苏州)有限公司 | A kind of SERVO CONTROL high accuracy contraposition rotation platform |
| CN207824831U (en) * | 2018-01-23 | 2018-09-07 | 王玉昌 | A kind of three axis automatic aligning platforms |
| CN207874158U (en) * | 2018-01-23 | 2018-09-18 | 誊展精密科技（深圳）有限公司 | A kind of high-accuracy XY θ contrapositions hardware platform |
| CN113799076A (en) * | 2021-10-10 | 2021-12-17 | 誊展精密科技（深圳）有限公司 | Leveling module and seven-axis alignment platform comprising same |
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Application publication date: 20220906 |
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