CN114995009A - Adjustable optical power distributor for on-chip optical information exchange - Google Patents

Adjustable optical power distributor for on-chip optical information exchange Download PDF

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CN114995009A
CN114995009A CN202210649183.4A CN202210649183A CN114995009A CN 114995009 A CN114995009 A CN 114995009A CN 202210649183 A CN202210649183 A CN 202210649183A CN 114995009 A CN114995009 A CN 114995009A
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waveguide
branch
output
light
width
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孙小强
刘庭瑜
高阳
刘崧岳
许言
吴远大
张大明
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Jilin University
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Jilin University
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/212—Mach-Zehnder type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

A light adjustable power distributor for on-chip optical information exchange belongs to the technical field of polymer integrated optics. The device comprises a modulation electrode, an upper cladding, a core layer, a lower cladding and a substrate layer from top to bottom in sequence, wherein the upper cladding and the lower cladding are both made of polymer materials EpoClad, and the refractive index is 1.56; the core layer is a polymer material EpoCore and has a refractive index of 1.572. The modulation electrode is made of metal aluminum, and the substrate layer is made of silicon chip. Along the light transmission direction, the core layer of the mode converter is formed by sequentially cascading a 1 multiplied by 1 asymmetric Mach-Zehnder optical switch based on a Y-branch structure, a 1 multiplied by 3Y-branch type optical splitter and a 3 multiplied by 3 multimode interferometer 3, and three modulation electrodes are arranged on the core layer.

Description

Adjustable optical power distributor for on-chip optical information exchange
Technical Field
The invention belongs to the technical field of polymer integrated optics, and particularly relates to a dimmable power distribution device for on-chip optical information exchange.
Background
Optical switching is an important component of optical information systems, and has important applications particularly in data centers. Optical communication plays a crucial role in communication systems because of its advantages of high speed, low delay, etc. At present, full photochemistry in terms of signal transmission has been achieved. However, the routing switching of optical signals still needs to be realized through optical-electrical-optical conversion, which limits the improvement of the optical communication rate. As a core device of an optical network and an optical signal route, a high-speed, low-power consumption, small-size and low-cost optical power distributor has important research and practical values for promoting the development of all-optical switching.
The optical power distributor is used for connecting an optical path terminal and an optical network unit, is one of important cores in an optical communication network, and can also be used for forming more complex optical devices such as an optical switch, a wavelength division multiplexing device, optical phase array control and the like. The optical fiber can be divided into three types, i.e. discrete component combination type, all-fiber type and planar waveguide type, according to different materials and structures. The planar waveguide type optical power divider has the advantages of light weight, small volume, high integration level, good mechanical property stability, accurate control of coupling splitting ratio and the like, and is an important development direction of the optical power divider. Because the thermo-optic coefficient of the polymer material is higher, the thermo-optic effect is utilized, and the power consumption of the polymer waveguide device can be effectively reduced; the polymer material also has the advantages of low dielectric constant, simple manufacturing process, low absorption loss, low cost and the like, so the polymer material is suitable for the thermo-optic type adjustable optical power distributor.
Disclosure of Invention
The invention aims to provide a dimmable power divider for on-chip optical information exchange, which is used for realizing adjustment change and redistribution of optical power between channels under different driving conditions.
The invention relates to a light-adjustable power distribution device for on-chip optical information exchange, which is sequentially composed of a substrate layer, a lower cladding layer, a core layer, an upper cladding layer and a modulation electrode from bottom to top as shown in figure 1, wherein the core layer is positioned on the lower cladding layer and is completely coated in the upper cladding layer, the lower cladding layer and the upper cladding layer are both made of polymer EpoClad, and the refractive index is 1.560; the core layer material is polymer EpoCore, and the refractive index is 1.572; the modulating electrode is made of metal aluminum, and the substrate layer is a silicon wafer.
Along the optical transmission direction, the core layer of the tunable optical power splitter is formed by sequentially cascading a 1 × 1 asymmetric mach-zehnder optical switch based on a Y-branch structure, a 1 × 3Y-branch optical splitter and a 3 × 3 multimode interferometer, as shown in fig. 2 a. The core layers of the three parts have the same waveguide height h and different widths, and all the waveguides only transmit TE 11 Light of a mode.
As shown in FIG. 2b, the 1 × 1 asymmetric Mach-Zehnder optical switch based on Y-branch structure comprises an asymmetric Y-branch waveguide, a symmetric Y-branch waveguide, and two straight waveguides Wg connecting the asymmetric Y-branch waveguide and the symmetric Y-branch waveguide 1-2 And Wg 1-3 Forming; asymmetric Y-branch waveguide composed of trunk waveguide Wg 1-1 And two asymmetric branch waveguides which are asymmetric along the inter-branch axis and a main waveguide Wg 1-1 Has a width of W 0 The starting ends (a-a') of the two asymmetric branched waveguides have widths W 1 And W 2 The width of the terminating end (b-b') is W 3 And W is 0 ＝W 1 +W 2 ＝2W 3 (ii) a The projection lengths of the two asymmetric branch waveguides along the inter-branch axis (A-A') are both L 0 The width of the waveguide being in the length L 0 Linear variation within the interval; two asymmetric branch waveguidesOffset distance with respect to the inter-branch axis (A-A') over a length L 0 Gradually increasing in interval from 0 (a-a') to D 0 And D 1 (at b-b'); straight waveguide Wg 1-2 And Wg 1-3 Are all L 1 A heating electrode M1 is arranged on the upper surface of one of the straight waveguides, and the length of the heating electrode is L 1 Straight waveguide Wg 1-2 、Wg 1-3 The width of the heating electrode M1 is W 3 (ii) a The symmetrical Y-branch waveguide consists of two symmetrical branch waveguides and a main waveguide Wg 1-4 The two symmetrical branch waveguides are symmetrical along the axis between the branches, and the main waveguide Wg 1-4 Has a width of W 0 The widths of the starting end and the terminating end of the two symmetrical branch waveguides are W 3 And W is 0 ＝2W 3 (ii) a The projection lengths of the two symmetrical branch waveguides along the inter-branch axis (B-B') are both L 0 The two symmetrical branch waveguides are offset by a distance of length L from the inter-branch axis (B-B') 0 Gradually decrease within the interval from D 2 Reduced to 0, and D 0 +D 1 ＝2D 2 。
As shown in FIG. 2c, the 1X 3Y-branch optical splitter is composed of a straight trunk waveguide Wg 1-4 And three branch waveguides Wg 2-1 、Wg 2-2 And Wg 2-3 Formed integrally with respect to the branched waveguide Wg 2-2 A symmetrical structure; trunk straight waveguide Wg 1-4 Width of W 0 (ii) a Three branch waveguides Wg 2-1 、Wg 2-2 And Wg 2-3 And are respectively divided into input end bent waveguides (length L) 2 ) And an output end bent waveguide (length L) 3 ) Transition straight waveguide (length L) 4 ) And a straight waveguide (length L) 5 ) A four-section structure; wg 2-1 And Wg 2-3 Input end bending waveguide in branch waveguide Wg 2-2 Are all projected with length L 2 ；Wg 2-2 The widths of the starting end and the terminating end of the input end bending waveguide are W 3 ，Wg 2-1 And Wg 2-3 The widths of the starting end and the terminating end of the input end bending waveguide are W 4 And W is 0 ＝W 3 +2W 4 (ii) a At L 2 Within the interval, Wg 2-1 、Wg 2-3 And Wg 2-1 Gradually increases from 0 to D 3 ；Wg 2-1 And Wg 2-3 Bending waveguide at output end on branch waveguide Wg 2-2 All projection lengths on are L 3 At L 3 Within the interval, Wg 2-2 Width of W 3 Linear change to W 5 ，Wg 2-1 And Wg 2-3 All width is W 4 Gradual change to W 5 ，Wg 2-1 、Wg 2-3 And Wg 2-2 Is spaced by D 3 Gradually decrease to D 4 And in the transition straight waveguide and straight waveguide portion, this spacing is kept constant; the length of the transition straight waveguide is L 4 All width being W 5 (ii) a The width of the straight waveguide is W 5 All lengths are L 5 In Wg 2-1 And Wg 2-3 Has a width W on the upper surface 5 Heating electrodes M2 and M3.
As shown in fig. 2d, the 3 × 3 multimode interferometer is composed of 3 input tapered waveguides, 1 trunk waveguide, and 3 output tapered waveguides; the lengths of all 3 input tapered waveguides are L 6 Width is from W 5 Linear change to W 6 (ii) a The lengths of the 3 output tapered waveguides are all L 6 Width is from W 6 Linear change to W 5 (ii) a The distance between two adjacent tapered waveguides at the joint with the trunk waveguide is W 8 (ii) a The length of the trunk straight waveguide is L 7 Width is W 7 ，W 7 ＝3W 6 +2W 8 .3 output tapered waveguides of the 3X 3 multimode interferometer are respectively connected with 3 tapered waveguides with the width W 5 Waveguide (Wg) 3-1 、Wg 3-2 、Wg 3-3 ) As an output.
The working principle of the adjustable optical power divider is as follows:
as shown in fig. 2a, the trunk waveguide Wg 1-1 Input end, waveguide Wg as adjustable optical power distributor 3-1 ～Wg 3-3 Three Output terminals Output as adjustable optical power divider 1 、Output 2 、Output 3 。M 1 、M 2 、M 3 Three metal electrodes of the adjustable optical power divider can change the waveguide below the electrodes through the thermo-optic effect after current is appliedThe effective refractive index, in turn, changes the optical transmission path and the power of the optical signal in each output waveguide. The waveguide size of each part is optimized through a light beam propagation method. The signal light is Input from Input, enters a 1 multiplied by 1 asymmetric Mach-Zehnder optical switch, enters a 3 multiplied by 3 multimode interferometer through a 1 multiplied by 3Y branch type optical splitter, and finally is Output 1 、Output 2 And Output 3 And (6) outputting the port.
As shown in FIGS. 3(a), (b) and (c), when only the modulation electrode M is provided 1 Work, M 2 、M 3 When the adjustable light power distributor does not work, the adjustable light power distributor has three working modes of (i), (ii) and (iii):
the working mode is that: when the electrode M 1 Induced temperature change amount Δ T 1 When the signal light is equal to 0K, the signal light enters from the Input port and passes through Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3 type Y-branch waveguide, the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Medium no light signal; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 And Wg 3-3 In the middle transmission, and finally Output port Output 1 And Output 3 And the output, three-port output optical power ratio is 0.5:0:0.5, as shown in fig. 3 (a).
Working mode II: when the electrode M 1 Induced temperature change amount Δ T 1 When the voltage is 5.17K, the signal light enters from the Input port and passes through Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, the light is in the waveguide Wg 2-1 、Wg 2-2 And Wg 2-3 The middle transmission; after entering the 3X 3 multimode interferometer, the light is in the waveguide Wg 3-1 、Wg 3-2 And Wg 3-3 In the middle transmission, and finally Output port Output 1 、Output 1 And Output 3 And the output, three-port output optical power ratio is 0.33:0.33:0.33, as shown in fig. 3 (b).
Working mode (c): when the electrode M 1 Induced temperature change amount Δ T 1 When the voltage is 13.48K, the signal light enters from the Input port and passes through Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, the light is only in the waveguide Wg 2-2 The middle transmission; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-2 In the middle transmission, and finally Output port Output 2 And (4) outputting, namely outputting the optical power ratio of 0:1:0 from the three ports, as shown in the figure 3 (c).
When only the modulation electrode M is provided, as shown in FIGS. 3(d), (e) and (f) 2 Work, M 1 、M 3 When not working, the adjustable light power distributor has three working modes of four, five and sixth:
working mode IV: when the electrode M 2 Induced temperature change Δ T 2 At 1.13K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Middle does not transmit light; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 And Wg 3-3 In the middle transmission, and finally Output port Output 1 And Output 3 And outputting, namely outputting the light intensity ratio of the three ports to be 0.67:0:0.33, as shown in the figure 3 (d).
Working mode five: when the electrode M 2 Induced temperature change amount Δ T 2 At 1.75K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Middle does not transmit light; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 And Wg 3-3 In the middle transmission, and finally Output port Output 1 And Output 3 And (e) outputting, namely outputting the light intensity ratio of the three ports to 0:0.25, as shown in the figure 3 (e).
The working mode is: when the electrode M 2 Induced temperature change amount Δ T 2 At 5.28K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Does not transmit light; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 In the middle transmission, and finally Output port Output 1 And (f) outputting, namely outputting the light intensity ratio of 1:0:0 from the three ports, as shown in the figure 3 (f).
As shown in FIGS. 3(g), (h) and (i), when only the modulation electrode M is provided 3 Work, M 1 、M 2 When the adjustable light power distributor does not work, the adjustable light power distributor has three working modes of (c), (b) and (c):
working mode (c): when the electrode M 3 Induced temperature change amount Δ T 3 At 1.12K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Middle does not transmit light; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 And Wg 3-3 In the middle transmission, and finally Output port Output 1 And Output 3 And the output, three-port output light intensity ratio is 0.33:0:0.67, as shown in fig. 3 (g).
Working mode (v): when the electrode M 3 Induced temperature change amount Δ T 3 At 1.73K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Middle does not transmit light; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 And Wg 3-3 In the middle transmission, and finally Output port Output 1 And Output 3 And outputting, namely outputting the light intensity ratio of the three ports to 0.25:0:0.75, as shown in figure 3 (h).
And ninthly, working mode: when the electrode M 3 Induced temperature change Δ T 3 At 5.27K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Middle does not transmit light; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-3 In the middle transmission, and finally Output port Output 3 And (5) outputting, namely outputting the light intensity ratio of the three ports to 0:1, as shown in the (i) of figure 3.
The electrode working modes corresponding to the nine working modes of the device and the ratio of the light intensity output by the three ports are shown in table 1, and the working modes (i-ninu) can be combined to form a 1 x 3 adjustable optical power distributor.
Table 1: electrode working modes corresponding to the nine working modes and three-port output light intensity ratio data
Figure BDA0003685380260000051
Drawings
FIG. 1 is a schematic cross-sectional view of a tunable optical power splitter according to the present invention;
FIG. 2 is a top view illustrating the structure of the device;
wherein fig. 2a is an overall top view of the device of the present invention; FIG. 2b is a schematic diagram of the structure and dimensions of the 1 × 1 asymmetric Mach-Zehnder interferometer; FIG. 2c is a schematic diagram of the structure and dimensions of the 1X 3Y-branch optical splitter; FIG. 2d is a schematic diagram of the structure and dimensions of each portion of a 3 × 3 multimode interferometer;
FIGS. 3(a-i) are schematic diagrams of the working principle of the whole device in working mode (c-n), respectively;
FIG. 4 is a flow chart of the fabrication of the optical channel switch and power splitter according to the present invention;
FIG. 5 is a schematic diagram of a mask structure used in the fabrication process of the present invention;
wherein, FIG. 5a is a structural diagram of a device waveguide mask, and FIG. 5b is a structural diagram of a modulation electrode mask.
Detailed Description
The present invention will be described in further detail with reference to the following detailed description and accompanying drawings
Example 1
Referring to fig. 1, the multifunctional optical device comprises a substrate layer, a lower cladding layer, a core layer, an upper cladding layer and a modulation electrode from bottom to top. Referring to FIG. 2a, the core layer is made ofThe optical switch is formed by sequentially cascading a 1 multiplied by 1 asymmetric Mach-Zehnder optical switch based on a Y-branch structure, a 1 multiplied by 3Y-branch optical splitter and a 3 multiplied by 3 multimode interferometer. Wherein the core waveguides have the same height. The sizes of all parts of the device are optimized by a light beam propagation method, so that the waveguide meets the single-mode light transmission condition. The device has three heating electrodes in total, as shown in FIG. 2a, Wg 1-2 Above the waveguide is a length L 1 Metal thermode M of 1 ，Wg 2-1 And Wg 2-3 The tail end of the waveguide, namely the joint of the tail end of the waveguide and the 3 multiplied by 3 multimode interferometer, is provided with a length L 5 Electrode M of 2 And M 3 . The effective refractive index of the lower waveguide is changed by using the thermo-optic effect, so that the propagation path and the light splitting ratio of light can be changed. Input light is Input from an Input port, passes through a 1 × 1 asymmetric Mach-Zehnder optical switch, and passes through propagation paths (Wg) having different lengths and widths 1-2 、Wg 1-3 ) At the electrode M 1 In the non-operating state, after the light is input, the light field intensity can be transmitted to Wg in a ratio of 1:1 1-4 (ii) a If and only if the electrode M 1 In operation, a change in refractive index due to the thermo-optic effect will result in Wg 1-2 And Wg 1-3 The intensity of the optical field is no longer uniformly distributed. The 1 x 3 optical splitter can split and output different input optical signals according to different proportions. The 3 x 3 multi-mode interferometer can generate interference effect on input optical signals with different proportions of three input ports, and the input optical signals pass through the electrode M 2 And M 3 After modulation affects the refractive index, it can be output from different output ports at different power ratios, as shown in fig. 3.
Example 2
This example is a more detailed description of example 1.
Firstly, the size parameters of all parts of the core layer waveguide are determined. With reference to the description in example 1, an asymmetric Y-branch trunk waveguide Wg in a 1X 1 asymmetric Mach-Zehnder optical switch was selected 1-1 Width of W 0 10 μm, two-branch waveguide Wg 1-2 And Wg 1-3 At aa' widths W 1 ＝4.62μm、W 2 5.38 μm, width W at bb 3 5 μm, length L 0 ＝1000μm。Wg 1-2 And Wg 1-3 Offset with respect to axis AA' by an amount D 0 ＝6μm，D 1 24 μm. The length of the two straight waveguides and the upper arm electrode is L 1 800 μm. Symmetrical Y-branch trunk waveguide Wg 1-4 Width of W 0 10 μm, branched waveguide Wg 1-2 And Wg 1-3 Are each W 0 ＝10μm、W 3 5 μm, length L 0 ＝1000μm，Wg 1-2 And Wg 1-3 Offset distances with respect to axis BB' are all D 2 ＝15μm。
Selecting the trunk waveguide Wg of the 1X 3Y branch optical splitter 1-4 Width of W 0 10 μm, three branched waveguides Wg 2-1 、Wg 2-2 And Wg 2-3 Are each W 4 ＝2.5μm、W 3 5 μm and W 4 2.5 μm. Three branch waveguides Wg 2-1 、Wg 2-2 And Wg 2-3 Each part of length L 2 ＝2500μm，L 3 ＝2000μm，L 4 500 μm and L 5 ＝1000μm。Wg 2-2 Has a width variation of W 3 ＝5μm、W 5 ＝4μm。Wg 2-1 And Wg 2-3 Has a width variation of W 4 ＝2.5μm、W 5 ＝4μm。
Selecting the trunk waveguide width of the 3 multiplied by 3 multimode interferometer as W 7 40 μm, length L 7 3770 μm. The width of six tapered waveguides is changed into W 5 4 μm to W 6 6 μm, length L 6 1000 μm, the distance between the tapered waveguides being W 8 ＝11μm。
For the device as a whole, the upper cladding layer completely covers the core layer. The thickness of the under clad layer was 5 μm, the height h of the core layer was 4 μm, the thickness of the over clad layer other than the core layer was 5 μm, and the thickness of the over clad layer between the core layer and the modulator electrode was 1 μm.
Example 3
The following detailed description of the preparation method of the present invention is provided with reference to fig. 4 and 5, and the specific steps are as follows:
1. cleaning the silicon substrate: selecting a silicon wafer as a substrate layer, firstly cleaning the silicon wafer by using an acetone organic solvent, and removing organic impurities such as oil stains on the surface of the silicon wafer; then, cleaning the silicon wafer by using an absolute ethyl alcohol solution, and removing acetone remained in the previous step; and finally, repeatedly washing the silicon wafer by using deionized water, removing residual ethanol on the surface of the silicon wafer and drying the silicon wafer by blowing.
2. Spin coating EpoClad lower cladding: a5 μm thick layer of EpoClad polymer material (negative photoresist, Micro Resist Technology, Germany) was spin coated onto a cleaned silicon substrate layer as the lower cladding layer of the device (spin speed 2600r/min, refractive index 1.56). A pre-bake, uv exposure of 100mW and a post-bake were then performed to enhance the degree of crosslinking of the polymer. Wherein the temperature of the front/back baking is 65 ℃ for curing for 10min, and then 95 ℃ for curing for 20 min.
3. Spin coating of EpoCore core layer: a 4 μm thick EpoCore polymer material (negative photoresist, Micro Resist Technology, germany) was spin coated onto the lower cladding layer as the core layer of the device (rotation speed 3500r/min, refractive index 1.572). Then, pre-drying is carried out, the temperature of the pre-drying is 65 ℃ for curing for 10min, and then the curing is carried out for 20min at 95 ℃.
4. Photoetching and developing: preparing a device waveguide by using an ultraviolet lithography and wet development method, masking by using a mask plate which is complementary to a mode converter core layer waveguide structure and is shown in fig. 5(a), carrying out postbaking after 100mW of ultraviolet exposure, curing at 65 ℃ for 10min, and curing at 95 ℃ for 20 min. Removing unexposed EpoCore by using Epo developing solution to obtain a core layer of the mode converter and a gap waveguide between the core waveguides; then washing away residual EPO developing solution by using isopropanol; finally, washing the residual isopropanol by deionized water, and heating and curing for 30min at 120 ℃.
5. Spin coating EpoClad upper cladding: a5 μm thick layer of EpoClad polymer was spin coated onto the core and lower cladding layers of the mode converter as the upper cladding layer (spin speed 2600r/min, refractive index 1.56). Then a pre-bake, uv cure and post-bake were performed to enhance the degree of crosslinking of the polymer, with experimental parameters consistent with step 2.
6. Aluminum metal film evaporation: and evaporating a metal aluminum film with the thickness of about 200nm on the EpoClad upper cladding layer by adopting an evaporation method.
7. Spin coating BP212 photoresist: and spin-coating a layer of BP212 positive photoresist on the aluminum film at the rotating speed of 3000 r/min. Then, pre-drying is carried out, wherein the pre-drying temperature is 65 ℃ (10min) and 95 ℃ (20 min).
8. Photoetching and developing: performing alignment (the modulation electrode is positioned on the slot waveguide) on the sample obtained in the last step by using a mask plate with the same structure as the modulation electrode as shown in fig. 5b, and performing ultraviolet lithography; and after post-baking, removing the exposed BP212 photoresist and aluminum by using NaOH solution with the mass concentration of 5 per mill.
9. Removal of residual BP 212: and soaking the sample in an absolute ethyl alcohol solution to remove the BP212 photoresist on the aluminum electrode, and then washing away the residual absolute ethyl alcohol by using deionized water, thereby obtaining the mode converter.

Claims (5)

1. A tunable optical power splitter for on-chip optical information exchange, characterized by:
the composite material comprises a substrate layer, a lower cladding layer, a core layer, an upper cladding layer and a modulation electrode in sequence from bottom to top, wherein the core layer is positioned on the lower cladding layer and completely cladded in the upper cladding layer, the lower cladding layer and the upper cladding layer are both made of polymer EpoClad, and the refractive index is 1.560; the core layer material is polymer EpoCore, and the refractive index is 1.572; the modulation electrode is made of metal aluminum, and the substrate layer is a silicon wafer;
along the light transmission direction, the core layer of the adjustable light power distributor is formed by sequentially cascading a 1 multiplied by 1 asymmetric Mach-Zehnder optical switch based on a Y-branch structure, a 1 multiplied by 3Y-branch type optical splitter and a 3 multiplied by 3 multimode interferometer; the core layers of the three parts have the same waveguide height h and different widths, and all the waveguides only transmit TE 11 A mode of light;
the 1 multiplied by 1 asymmetric Mach-Zehnder optical switch based on the Y-branch structure comprises an asymmetric Y-branch waveguide, a symmetric Y-branch waveguide, and two straight waveguides Wg connecting the asymmetric Y-branch waveguide and the symmetric Y-branch waveguide 1-2 And Wg 1-3 Composition is carried out; asymmetric Y-branch waveguide composed of trunk waveguide Wg 1-1 And two asymmetric branch waveguides which are asymmetric along the inter-branch axis and a main waveguide Wg 1-1 Has a width of W 0 The widths of the starting ends of the two asymmetric branch waveguides are respectively W 1 And W 2 All width of the terminating end is W 3 And W is 0 ＝W 1 +W 2 ＝2W 3 (ii) a The projection lengths of the two asymmetric branch waveguides along the axial line between the branches are both L 0 Waveguide width at length L 0 Linear variation within the interval; the offset distance of the two asymmetric branched waveguides relative to the axis between the branches is in the length L 0 Gradually increases in the interval from 0 to D 0 And D 1 (ii) a Straight waveguide Wg 1-2 And Wg 1-3 Are all L 1 A heating electrode M1 is arranged on the upper surface of one of the straight waveguides, and the length of the heating electrode is L 1 Straight waveguide Wg 1-2 、Wg 1-3 The width of the heating electrode M1 is W 3 (ii) a The symmetrical Y-branch waveguide comprises two symmetrical branch waveguides and a main waveguide Wg 1-4 The two symmetrical branch waveguides are symmetrical along the axis between the branches, and the main waveguide Wg 1-4 Has a width of W 0 The widths of the starting end and the terminating end of the two symmetrical branch waveguides are W 3 And W is 0 ＝2W 3 (ii) a The projection lengths of the two symmetrical branch waveguides along the axial line between the branches are both L 0 The offset distance of the two symmetrical branched waveguides relative to the axis between the branches is in the length L 0 Gradually decrease within the interval from D 2 Reduced to 0, and D 0 +D 1 ＝2D 2 ；
The 1X 3Y branch type optical splitter consists of a main straight waveguide Wg 1-4 And three branch waveguides Wg 2-1 、Wg 2-2 And Wg 2-3 Formed integrally with respect to the branched waveguide Wg 2-2 A symmetrical structure; trunk straight waveguide Wg 1-4 Width of W 0 (ii) a Three branch waveguides Wg 2-1 、Wg 2-2 And Wg 2-3 The waveguide is divided into four sections of structures of an input end curved waveguide, an output end curved waveguide, a transition straight waveguide and a straight waveguide; wg 2-1 And Wg 2-3 Input end bending waveguide in branch waveguide Wg 2-2 Are all projected with length L 2 ；Wg 2-2 The widths of the starting end and the terminating end of the input end bending waveguide are W 3 ，Wg 2-1 And Wg 2-3 The width of the starting end and the terminating end of the input end bending waveguideAll degrees are W 4 And W is 0 ＝W 3 +2W 4 (ii) a At L 2 Within the interval, Wg 2-1 、Wg 2-3 And Wg 2-1 Gradually increases from 0 to D 3 ；Wg 2-1 And Wg 2-3 Bending waveguide at output end on branch waveguide Wg 2-2 All projection lengths on are L 3 At L 3 Within the interval, Wg 2-2 Width of W 3 Linear change to W 5 ，Wg 2-1 And Wg 2-3 All width is W 4 Gradual change to W 5 ，Wg 2-1 、Wg 2-3 And Wg 2-2 Is spaced by D 3 Gradually decrease to D 4 And in the transition straight waveguide and straight waveguide portion, this spacing is kept constant; the length of the transition straight waveguide is L 4 All width being W 5 (ii) a The width of the straight waveguide is W 5 All lengths are L 5 In Wg of 2-1 And Wg 2-3 Has a width W on the upper surface 5 Heating electrodes M2 and M3;
the 3 x 3 multimode interferometer is composed of 3 input tapered waveguides, 1 trunk waveguide and 3 output tapered waveguides; the lengths of all 3 input tapered waveguides are L 6 Width is from W 5 Linear change to W 6 (ii) a The lengths of all 3 output tapered waveguides are L 6 Width is from W 6 Linear change to W 5 (ii) a The distance between two adjacent tapered waveguides at the joint with the trunk waveguide is W 8 (ii) a The length of the trunk straight waveguide is L 7 Width of W 7 ，W 7 ＝3W 6 +2W 8 (ii) a 3 output tapered waveguides of the 3X 3 multimode interferometer are respectively connected with 3 tapered waveguides with the width W 5 Waveguide Wg 3-1 、Wg 3-2 、Wg 3-3 As an output.
2. An adjustable optical power splitter for on-chip optical information exchange as claimed in claim 1 wherein: asymmetric Y-branch trunk waveguide Wg in 1 x 1 asymmetric Mach-Zehnder optical switch 1-1 Width of W 0 10 μm, two-branch waveguide Wg 1-2 And Wg 1-3 Width W of the start end 1 4.62 μm andW 2 5.38 μm, width W of the terminating end 3 Length of 5 μm 0 ＝1000μm；Wg 1-2 And Wg 1-3 Maximum offset D relative to the axis between the branches 0 6 μm and D 1 24 μm, two straight waveguides and an upper arm electrode of length L 1 800 μm; symmetrical Y-branch trunk waveguide Wg 1-4 Width of W 0 10 μm, branched waveguide Wg 1-2 And Wg 1-3 Are each W 0 10 μm and W 3 Length of 5 μm 0 ＝1000μm，Wg 1-2 And Wg 1-3 Maximum offset distance D relative to the axis between the branches 2 ＝15μm；
Trunk waveguide Wg of 1X 3Y branch optical splitter 1-4 Width of W 0 10 μm, three branched waveguides Wg 2-1 、Wg 2-2 And Wg 2-3 Respectively has a starting end width W and a terminating end width W 4 ＝2.5μm、W 3 5 μm and W 4 2.5 μm; three branch waveguides Wg 2-1 、Wg 2-2 And Wg 2-3 Each part of length L 2 ＝2500μm、L 3 ＝2000μm、L 4 500 μm and L 5 ＝1000μm；Wg 2-2 Has a width W of the starting end and the terminating end 3 5 μm and W 5 ＝4μm，Wg 2-1 And Wg 2-3 Has a width W of the starting end and the terminating end 4 2.5 μm and W 5 ＝4μm；
The trunk waveguide width of the 3 x 3 multimode interferometer is W 7 40 μm, length L 7 3770 μm; the width of six tapered waveguides is changed into W 5 4 μm to W 6 6 μm, length L 6 1000 μm, the distance between the tapered waveguides being W 8 ＝11μm；
The thickness of the under clad layer was 5 μm, the height h of the core layer was 4 μm, the thickness of the over clad layer other than the core layer was 5 μm, and the thickness of the over clad layer between the core layer and the modulator electrode was 1 μm.
3. An adjustable optical power splitter for on-chip optical information exchange according to claim 1 or 2, characterized by: when only the modulation electrode M is provided 1 In the working process, the operation is carried out,M 2 、M 3 when not in use, the adjustable light power distributor has three working modes (i.e. first, second and third), namely
The working mode is that: when the electrode M 1 Induced temperature change Δ T 1 When the signal light is equal to 0K, the signal light enters from the Input port and passes through Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3 type Y-branch waveguide, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Medium no light signal; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 And Wg 3-3 In the middle transmission, and finally Output port Output 1 And Output 3 Outputting, wherein the output optical power ratio of the three ports is 0.5:0: 0.5;
the working mode is two: when the electrode M 1 Induced temperature variation DeltaT 1 When the voltage is 5.17K, the signal light enters from the Input port and passes through Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, the light is in the waveguide Wg 2-1 、Wg 2-2 And Wg 2-3 The middle transmission; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 、Wg 3-2 And Wg 3-3 In the middle transmission, and finally Output port Output 1 、Output 1 And Output 3 Outputting, wherein the output optical power ratio of the three ports is 0.33:0.33: 0.33;
working mode (c): when the electrode M 1 Induced temperature change Δ T 1 When 13.48K, the signal light enters from the Input port and passes through Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, the light is only in the waveguide Wg 2-2 The middle transmission; after entering the 3X 3 multimode interferometer, the light is in the waveguide Wg 3-2 In the middle transmission, and finally Output port Output 2 And outputting, wherein the output optical power ratio of the three ports is 0:1: 0.
4. An adjustable optical power splitter for on-chip optical information exchange according to claim 1 or 2, characterized by: when only the modulation electrode M is provided 2 Work, M 1 、M 3 When it is not working, the adjustable light power distributor has three working modes (four, five and sixthly), namely
Working mode IV: when the electrode M 2 Induced temperature variation DeltaT 2 At 1.13K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Does not transmit light; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 And Wg 3-3 In the middle transmission, and finally Output port Output 1 And Output 3 Outputting, wherein the ratio of the output light intensity of the three ports is 0.67:0: 0.33;
working mode (v): when the electrode M 2 Induced temperature variation DeltaT 2 At 1.75K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Middle does not transmit light; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 And Wg 3-3 In transmission, and Output port Output 1 And Output 3 Outputting, wherein the ratio of the output light intensity of the three ports is 0.75:0: 0.25;
the working mode comprises the following steps: when the electrode M 2 Induced temperature change Δ T 2 At 5.28K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Middle does not transmit light; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 In the middle transmission, and finally Output port Output 1 And (4) outputting, wherein the ratio of the output light intensity of the three ports is 1:0: 0.
5. An adjustable optical power splitter for on-chip optical information exchange according to claim 1 or 2, characterized by: when only the modulation electrode M is provided 3 Work, M 1 、M 2 When not in work, the adjustable light power distributor has three working modes of (c), (b) and (c), namely
Working mode (c): when the electrode M 3 Induced temperature variation DeltaT 3 At 1.12K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Middle does not transmit light; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-1 And Wg 3-3 In transmission, and Output port Output 1 And Output 3 Outputting, wherein the ratio of the output light intensity of the three ports is 0.33:0: 0.67;
working mode (v): when the electrode M 3 Induced temperature change Δ T 3 At 1.73K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Middle does not transmit light; after entering the 3X 3 multimode interferometer, the light is in the waveguide Wg 3-1 And Wg 3-3 In the middle transmission, and finally Output port Output 1 And Output 3 Outputting, wherein the ratio of the output light intensity of the three ports is 0.25:0: 0.75;
and ninthly, working mode: when the electrode M 3 Induced temperature variation DeltaT 3 At 5.27K, Input light enters from Input, passes Wg 1-1 Then respectively in the waveguide Wg 1-2 And Wg 1-3 The middle transmission; passing through Wg 1-4 After entering the 1X 3Y branch, in the waveguide Wg 2-1 And Wg 2-3 Medium transmission, Wg 2-2 Middle does not transmit light; after entering the 3X 3 multimode interferometer, the light is guided in a waveguide Wg 3-3 In the middle transmission, and finally Output port Output 3 And (4) outputting, wherein the ratio of the output light intensity of the three ports is 0:0: 1.
CN202210649183.4A 2022-06-09 2022-06-09 Adjustable optical power distributor for on-chip optical information exchange Pending CN114995009A (en)

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